KR20170010272A

KR20170010272A - Sensor including flexible thermoelectric material and sensing system using the same

Info

Publication number: KR20170010272A
Application number: KR1020150101759A
Authority: KR
Inventors: 김준수; 문승언; 김태광; 임솔이; 최원철
Original assignee: 한국전자통신연구원
Priority date: 2015-07-17
Filing date: 2015-07-17
Publication date: 2017-01-26
Also published as: KR101981209B1

Abstract

A sensor capable of sensing external force and temperature is provided. The sensor includes a lower electrode, an upper electrode on the lower electrode, and a sensing member interposed between the lower and upper electrodes and having an upper surface opposed to the lower surface and the lower surface. The sensing member may include a flexible thermoelectric material, the shape of the sensing member may vary, and the electrical resistance between the lower electrode and the upper electrode may vary as the shape of the sensing member varies.

Description

TECHNICAL FIELD [0001] The present invention relates to a sensor including a flexible thermoelectric material, and a sensing system using the same. &Lt; Desc / Clms Page number 1 >

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a sensor for sensing temperature and external force, and more particularly, to a sensor for sensing temperature and external force using a flexible thermoelectric material.

There has been a long-standing need for devices that can replace human functions. Skin delivers as precise and reliable stimuli as the eye to the brain, helping people recognize things and cope with them. As a result, the demand for artificial skin has long been on the rise.

In this regard, research is actively being conducted on sensors that can sense one of various senses that the skin can perceive (e.g., tactile, nasal, depression, cooling, or warm). In particular, semiconductor-based sensors using complementary metal-oxide semiconductor (CMOS) transistors have been developed to fabricate sensors with high resolution and high reliability. However, such semiconductor-based sensors have low flexibility because they are fabricated on rigid substrates such as silicon. Thus, semiconductor based sensors are difficult to completely replace the skin.

In recent years, tactile sensors based on flexible polymers have been developed to solve these problems. Examples of such tactile sensors include sensors using piezoelectric materials, sensors using friction induction, capacitive sensors, or metal-based resistance sensors.

An object of the present invention is to provide a sensor capable of detecting both an external force and a temperature with a single structure.

Another object of the present invention is to provide a sensor having flexibility.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood by those skilled in the art from the following description .

According to an aspect of the present invention, there is provided a sensor comprising: a lower electrode; An upper electrode on the lower electrode; And a sensing member interposed between the lower and upper electrodes, the sensing member having a lower surface and an upper surface opposite to the lower surface. The sensing member may include a flexible thermoelectric material, the shape of the sensing member may be varied, and the electrical resistance between the lower electrode and the upper electrode may be changed as the shape of the sensing member changes.

According to one embodiment, the flexible thermoelectric material is selected from the group consisting of polyacetylene, polypyrole, polythiophene, polyaniline, poly (3,4-ethylenedioxythiophene), poly [2-methoxy-5- (3-hexylthiophene-2,5-diyl), and polymers thereof.

According to one embodiment, the flexible thermoelectric material may include at least one of carbon nanotubes and graphenes.

According to one embodiment, the flexible thermoelectric material may include a compound containing at least one of Bi, Te, Sb, and Sn.

According to an embodiment, the smaller the vertical thickness of the sensing member, the smaller the electrical resistance between the lower electrode and the upper electrode.

According to an embodiment, the greater the width of the sensing member, the smaller the electrical resistance between the lower electrode and the upper electrode.

According to an embodiment, the larger the area of the upper surface of the sensing member, the smaller the electrical resistance between the lower electrode and the upper electrode.

According to one embodiment, in a cross-sectional view, the width of the sensing member may become smaller as the distance from the lower electrode increases.

According to one embodiment, the sensing member includes a plurality of sensing patterns interposed between the lower and upper electrodes, and each of the plurality of sensing patterns may include the flexible thermoelectric material.

According to one embodiment, the plurality of sensing patterns may be spaced from each other.

According to an aspect of the present invention, there is provided a sensor comprising: a plurality of lower electrodes extending in a first direction and spaced apart from each other; A plurality of upper electrodes disposed on the plurality of lower electrodes and extending in a second direction intersecting with the first direction and spaced apart from each other; And a sensing layer disposed between the plurality of lower electrodes and the plurality of upper electrodes. Wherein the sensing layer includes a plurality of sensing regions overlapping with intersections of the lower electrodes and the upper electrodes, respectively, from a plan viewpoint; And a support area surrounding the plurality of sensing areas, from a plan viewpoint. Each of the sensing regions may include a sensing member having a lower surface and an upper surface opposite the lower surface, the sensing member may include a flexible thermoelectric material, the shape of the sensing member may vary, The electrical resistance between the lower electrode and the upper electrode can be changed.

According to one embodiment, the support region may comprise support members.

According to one embodiment, the support members may be spaced apart from the sensing member.

According to one embodiment, the support members may comprise the same material as the sensing member.

According to one embodiment, the sensor comprises a flexible lower substrate below the plurality of lower electrodes; And

And a flexible upper substrate on the plurality of upper electrodes.

According to an aspect of the present invention, there is provided a sensing system comprising: a lower electrode; An upper electrode on the lower electrode; And a sensor interposed between the lower and upper electrodes, the sensing member having a lower surface and an upper surface opposite to the lower surface. The sensing member may include a flexible thermoelectric material. An external force may be sensed by using an electrical resistance between the lower electrode and the upper electrode and a temperature may be sensed by using an open voltage between the lower surface and the upper surface of the sensing member.

According to one embodiment, sensing the external force may include flowing a constant current through the lower and upper electrodes to the sensing member, and measuring a voltage between the lower and upper electrodes.

According to one embodiment, sensing the temperature may comprise placing the lower and upper electrodes in an open state, and measuring a voltage between the lower and upper electrodes.

According to one embodiment, sensing the external force may include flowing a constant current through the lower and upper electrodes to the sensing member, and measuring a voltage between the lower and upper electrodes. Sensing the temperature may comprise bringing the lower and upper electrodes into an open state and measuring the voltage between the lower and upper electrodes. When sensing the external force, the voltage between the lower and upper electrodes may be at least 10 times or less than 1/10 times the voltage between the lower and upper electrodes when sensing the temperature.

The details of other embodiments are included in the detailed description and drawings.

According to the sensor according to the embodiments of the present invention, an external force can be sensed by measuring the electrical resistance between the lower electrode and the upper electrode, and the temperature can be sensed by measuring the open voltage between the lower surface and the upper surface of the sensing member . Accordingly, the sensor according to the embodiments of the present invention can sense external force and temperature with one structure.

Further, the sensing member included in the sensor according to embodiments of the present invention may include a flexible thermoelectric material. Accordingly, the sensor according to the embodiments of the present invention can have flexibility.

1A, 1B and 1C are cross-sectional views showing a sensor according to a first embodiment of the present invention.
2A, 2B and 2C are cross-sectional views showing a sensor according to a second embodiment of the present invention.
3 is a cross-sectional view showing a sensor according to a third embodiment of the present invention.
4 is a cross-sectional view showing a sensor according to a fourth embodiment of the present invention.
5 is a plan view of a sensor according to a fifth embodiment of the present invention.
Figures 6A, 6B and 6C are cross-sectional views of a sensor according to a fifth embodiment of the present invention, corresponding to line I-I 'in Figure 5.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish them, will become apparent by reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used herein, the terms 'comprises' and / or 'comprising' mean that the stated element, step, operation and / or element does not imply the presence of one or more other elements, steps, operations and / Or additions.

In addition, the embodiments described herein will be described with reference to cross-sectional views and / or plan views, which are ideal illustrations of the present invention. In the drawings, the thicknesses of the films and regions are exaggerated for an effective description of the technical content. Thus, the shape of the illustrations may be modified by manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention are not limited to the specific forms shown, but also include changes in the shapes that are generated according to the manufacturing process. For example, the etched area shown at right angles may be rounded or may have a shape with a certain curvature. Thus, the regions illustrated in the figures have schematic attributes, and the shapes of the regions illustrated in the figures are intended to illustrate specific types of regions of the elements and are not intended to limit the scope of the invention.

1A, 1B and 1C are cross-sectional views showing a sensor according to a first embodiment of the present invention.

1A, the sensor 100 may include a lower electrode 110, an upper electrode 120, and a sensing member 130 interposed between the lower electrode 110 and the upper electrode 120.

The upper electrode 120 may be disposed on the lower electrode 110. The lower electrode 110 and the upper electrode 120 may include a conductive material. For example, the lower electrode 110 and the upper electrode 120 include at least one of copper (Cu), titanium (Ti), tungsten (W), aluminum (Al), gold (Au) can do. According to some embodiments, the lower electrode 110 and the upper electrode 120 may comprise a transparent conductive material. For example, the lower electrode 110 and the upper electrode 120 may be formed of indium tin oxide (ITO), gallium zinc oxide, aluminum zinc oxide, aluminum gallium zinc oxide Indium Zinc Oxide, Indium Zinc Oxide, Indium Zinc Oxide, Indium Gallium Oxide, Indium Zinc Oxide and Indium Oxide. And may include at least one.

The sensing member 130 may be interposed between the lower electrode 110 and the upper electrode 120. The sensing member 130 may have a lower surface 130a and an upper surface 130b facing the lower surface 130a. The lower surface 130a of the sensing member 130 may be electrically connected to the lower electrode 110 and the upper surface 130b of the sensing member 130 may be electrically connected to the upper electrode 120. [ According to some embodiments, the lower surface 130a of the sensing member 130 may be in contact with the lower electrode 110, and the upper surface 130b of the sensing member 130 may be in contact with the upper electrode 120. The lower surface 130a and the lower electrode 110 of the sensing member 130 and the upper surface 130b and the upper electrode 120 of the sensing member 130 are electrically connected to each other by a van der Waals force Can be adhered. In other embodiments, an adhesive layer may be additionally provided between the lower surface 130a of the sensing member 130 and the lower electrode 110, or between the upper surface 130b of the sensing member 130 and the upper electrode. Can be provided. In view of the cross-sectional area, the cross-section of the sensing member 130 may have a rectangular shape, but is not limited thereto.

The sensing member 130 may comprise a flexible thermoelectric material. For example, the flexible thermoelectric material may be selected from the group consisting of polyacetylene, polypyrole, polythiophene, polyaniline, poly (3,4-ethylenedioxythiophene), poly [2-methoxy- hexylthiophene-2,5-diyl, and polymers thereof. As another example, the flexible material may include at least one of carbon nanotubes and graphene. As another example, the flexible material may comprise a compound comprising at least one of Bi, Te, Sb, and Sn.

FIG. 1A shows a sensing member 130 when no external force is applied, and FIG. 1B shows a sensing member 130 when an external force is applied from the upper surface 130b to the lower surface 130a. Referring to FIGS. 1A and 1B, the shape of the sensing member 130 may be changed by an external force, so that the electrical resistance between the lower electrode 110 and the upper electrode 120 may vary. The sensing member 130 may have elasticity, and thus can be restored to its original shape when the external force is removed. For example, when the external force is removed, the sensing member 130 can be restored to the shape shown in FIG. 1A in the shape shown in FIG. 1B.

1A and 1B, when an external force acts on the sensing member 130 from the upper surface 130b toward the lower surface 130a, the area of the lower surface 130a of the sensing member 130 The area of the upper surface 130b of the sensing member 130 or the area in which the sensing member 130 and the upper electrode 120 are in contact with each other can be increased The widths W1 and W2 of the sensing member 130 can be increased and the thicknesses TH1 and TH2 between the lower surface 130a and the upper surface 130b of the sensing member 130 can be reduced . The electrical resistance between the lower electrode 110 and the upper electrode 120 may be reduced due to the deformation of the sensing member 130.

As described above, the sensing member 130 is deformed by an external force, and the electrical resistance between the lower electrode 110 and the upper electrode 120 can be changed. Therefore, by measuring the electrical resistance between the lower electrode 110 and the upper electrode 120, the sensor 100 according to the first embodiment of the present invention can sense an external force. The measurement of the electrical resistance between the lower electrode 110 and the upper electrode 120 is performed by flowing a constant current to the sensing member 130 through the lower and upper electrodes 110 and 120, 110, < RTI ID = 0.0 > 120, < / RTI > At this time, the scale of the voltage applied between the lower electrode 110 and the upper electrode 120 can be controlled by controlling the magnitude of the current flowing through the sensing member 130.

1C shows the sensing member 130 when the temperature Ta of the lower surface 130a and the temperature Tb of the upper surface 130b are different. As described above, the sensing member 130 may include a thermoelectric material. Accordingly, when the temperature Ta of the lower surface 130a of the sensing member 130 and the temperature Tb of the upper surface 130b are different from each other, a voltage (voltage) is applied between the lower surface 130a and the upper surface 130b of the sensing member 130 Vt) may occur. As the difference between the temperature Ta of the lower surface 130a of the sensing member 130 and the temperature Tb of the upper surface 130b becomes larger, the voltage generated between the lower surface 130a of the sensing member 130 and the upper surface 130b (Vt) can also be increased.

As described above, the sensing member 130 responds to the temperature difference (difference between Ta and Tb) between the lower surface 130a and the upper surface 130b and accordingly the lower surface 130a of the sensing member 130 and the upper surface 130b A voltage Vt may be generated between the electrodes. Therefore, by measuring the open-circuit voltage Vt between the lower surface 130a and the upper surface 130b of the sensing member 130, the sensor 100 according to the first embodiment of the present invention can sense the temperature. According to some embodiments, the temperature of the lower surface 130a of the sensing member 130 can be kept constant. For example, when the sensor 100 is attached to the skin of a person, the temperature Ta of the lower surface 130a of the sensing member 130 can be maintained at a temperature close to the human body temperature of about 37 占 폚. The measurement of the open-circuit voltage Vt between the lower surface 130a and the upper surface 130b of the sensing member 130 may be performed in a state in which no current is applied to the lower and upper electrodes 110 and 120 And measuring the voltage between the lower and upper electrodes 110 and 120 (with the electrodes 110 and 120 in an open state).

According to the sensor 100 according to the first embodiment of the present invention, external force and temperature can be sensed using one structure. As described above, the sensing of the external force can be performed by measuring the voltage between the lower electrode 110 and the upper electrode 120 while a constant current flows through the sensing member 130. The sensing of the temperature also includes sensing the voltage Vt between the lower electrode 110 and the upper electrode 120 with the sensing member 130 in an open state (i.e., without current flowing through the sensing member 130) &Lt; / RTI > As described above, according to the sensor 100 according to the first embodiment of the present invention, the principle of sensing the external force is different from the principle of sensing the temperature, and the sensing of the external force and the sensing of the temperature can be performed separately .

The scale of the voltage applied between the lower electrode 110 and the upper electrode 120 when the external force is sensed is applied to the sensing member 130 Can be controlled using the magnitude of the flowing current. The scale of the voltage applied between the lower electrode 110 and the upper electrode 120 at the time of sensing an external force is a scale of a voltage applied between the lower electrode 110 and the upper electrode 120 It can be controlled differently. For example, when the external force is sensed, the magnitude of the voltage applied between the lower electrode 110 and the upper electrode 120 is equal to the magnitude of the voltage applied between the lower electrode 110 and the upper electrode 120 Times, or less than 1/10 times. Accordingly, voltage due to external force and voltage due to temperature can be distinguished, and crosstalk between the two voltages can be prevented.

2A, 2B and 2C are cross-sectional views showing a sensor according to a second embodiment of the present invention. The same or similar reference numerals are provided for substantially the same configurations as the sensors according to the first embodiment of the present invention described with reference to Figs. 1A, 1B, and 1C, and redundant descriptions may be omitted for simplicity of explanation .

2A, the sensor 101 may include a lower electrode 110, an upper electrode 120, and a sensing member 131 interposed between the lower electrode 110 and the upper electrode 120. The lower electrode 110 and the upper electrode 120 may be substantially the same as the lower electrode 110 and the upper electrode 120 described above with reference to FIG.

The sensing member 131 may be interposed between the lower electrode 110 and the upper electrode 120. The sensing member 131 may have an upper surface 131b opposed to the lower surface 131a and the lower surface 131a. The lower surface 131a of the sensing member 131 may be electrically connected to the lower electrode 110 and the upper surface 131b of the sensing member 131 may be electrically connected to the upper electrode 120. According to some embodiments, the lower surface 131a of the sensing member 131 can be in contact with the lower electrode 110, and the upper surface 131b of the sensing member 131 can be in contact with the upper electrode 120. The lower surface 131a and the lower electrode 110 of the sensing member 131 and the upper surface 131b and the upper electrode 120 of the sensing member 131 are electrically connected to each other by a van der Waals force Can be adhered. In other embodiments, an adhesive layer may be additionally provided between the lower surface 130a of the sensing member 131 and the lower electrode 110 or between the upper surface 130b of the sensing member 130 and the upper electrode. Can be provided. The width W3 of the sensing member 131 can be reduced as the distance from the lower electrode 110 increases. For example, in one cross-sectional view, the sensing member 131 may have a trapezoidal or triangular shape. Accordingly, the area of the upper surface 131b of the sensing member 131 may be smaller than the area of the lower surface 131a, and in some embodiments, the area of the upper surface 131b may be close to zero.

The sensing member 131 may comprise a flexible thermoelectric material. For example, the flexible thermoelectric material may be selected from the group consisting of polyacetylene, polypyrole, polythiophene, polyaniline, poly (3,4-ethylenedioxythiophene), poly [2-methoxy- hexylthiophene-2,5-diyl, and polymers thereof. As another example, the flexible material may include at least one of carbon nanotubes and graphene. As another example, the flexible material may comprise a compound comprising at least one of Bi, Te, Sb, and Sn.

2A shows the sensing member 131 when no external force is applied. 2B and 2C show the shape of the sensing member 131 which changes as the magnitude of the external force acting in the direction from the upper surface 131b to the lower surface 131a increases. 2A, 2B, and 2C, the shape of the sensing member 131 may be changed by an external force, so that the electrical resistance between the lower electrode 110 and the upper electrode 120 may vary have. The sensing member 131 may have elasticity, and thus can be restored to its original shape when the external force is removed.

FIG. 2B shows the sensing member 131 when a relatively small external force is applied. Referring to FIGS. 2A and 2B, the upper portion of the sensing member 131 may be recessed by a relatively small external force. As a result, the area of the upper surface 131b of the sensing member 131 (or the area where the sensing member 131 and the upper electrode 120 contact) can be increased, and the thickness between the lower surface 131a and the upper surface 131b (See TH3 and TH4) can be made small. The electrical resistance between the lower electrode 110 and the upper electrode 120 can be reduced by the deformation of the sensing member 131. On the other hand, a change in the area of the lower surface 131a of the sensing member 131 (or the contact area between the sensing member 131 and the lower electrode 110) and a change in width W3 and W4 of the sensing member 131, May not be large. In this case, since the rate of change of the area of the upper surface 131b of the sensing member 131 (or the area where the sensing member 131 and the upper electrode 120 are in contact with each other) is large, And the upper electrode 120 may be large.

2C shows the shape of the sensing member 131 when a relatively large external force is applied. Referring to FIGS. 2B and 2C, the sensing member 131 can be deformed by a relatively large external force. That is, the area of the lower surface 131a of the sensing member 131 (or the area where the sensing member 131 and the lower electrode 110 are in contact) can be increased and the area of the upper surface 131b of the sensing member 131 The widths W4 and W5 of the sensing member 131 can be increased and the area of the lower surface 131a of the sensing member 131 can be increased ) And the upper surface 131b (see TH4 and TH5) can be reduced. The electrical resistance between the lower electrode 110 and the upper electrode 120 may be reduced due to the deformation of the sensing member 131. In this case, since the rate of change of the area of the upper surface 131b of the sensing member 131 (or the area where the sensing member 131 and the upper electrode 120 are in contact with each other) is small as compared with the case where the small external force acts, The change rate of the electrical resistance between the lower electrode 110 and the upper electrode 120 may be small.

As described above, the sensing member 131 may be deformed by an external force, and the electrical resistance between the lower electrode 110 and the upper electrode 120 may be changed. Therefore, by measuring the electrical resistance between the lower electrode 110 and the upper electrode 120, the sensor 101 according to the second embodiment of the present invention can sense an external force. 2B, when the magnitude of the external force is relatively small, the change rate of the electrical resistance between the lower electrode 110 and the upper electrode 120 is larger than that of the upper electrode 120 . Accordingly, it is possible to sensitively measure a small external force. 2C, when the magnitude of the external force is relatively large, the change in the electrical resistance between the lower electrode 110 and the upper electrode 120, Can be small. As a result, a wide range of external force variation can be measured.

The electrical resistance between the lower electrode 110 and the upper electrode 120 is measured by flowing a constant current through the sensing member 131 through the lower and upper electrodes 110 and 120, 110, < RTI ID = 0.0 > 120, < / RTI > At this time, the voltage scale between the lower electrode 110 and the upper electrode 120 can be controlled by adjusting the current flowing through the sensing member 131.

2 (d) shows the sensing member 131 when the temperature Ta of the lower surface 131a is different from the temperature Tb of the upper surface 131b. As described above, the sensing member 131 may include a thermoelectric material. Therefore, when the temperature Ta of the lower surface 131a of the sensing member 131 is different from the temperature Tb of the upper surface 131b, a voltage Vt (t) is applied between the lower surface 131a and the upper surface 131b of the sensing member 131 ) May occur. As the difference between the temperature Ta of the lower surface 131a of the sensing member 131 and the temperature Tb of the upper surface 130b becomes larger, the voltage generated between the lower surface 131a of the sensing member 131 and the upper surface 131b (Vt) can also be increased.

As described above, the sensing member 131 responds to the temperature difference (difference between Ta and Tb) between the lower surface 131a and the upper surface 131b and accordingly the lower surface 131a of the sensing member 131 and the upper surface 131b A voltage Vt may be generated between the electrodes. Therefore, the sensor 101 according to the second embodiment of the present invention can sense the temperature by measuring the open-circuit voltage Vt between the lower surface 131a and the upper surface 131b of the sensing member 131. [ According to some embodiments, the temperature of the lower surface 131a of the sensing member 131 can be kept constant. For example, when the sensor 101 is attached to the skin of a person, the temperature Ta of the lower surface 131a of the sensing member 131 can be maintained at a temperature close to the human body temperature of about 37 占 폚. The measurement of the open-circuit voltage Vt between the lower surface 131a and the upper surface 131b of the sensing member 131 is performed in a state in which no current is applied to the lower and upper electrodes 110 and 120 And measuring the voltage between the lower and upper electrodes 110 and 120 (with the electrodes 110 and 120 in an open state).

The width W3 of the sensing member 131 may be reduced as the distance from the lower electrode 110 is increased and the upper surface 131b of the sensing member 131 may have a relatively small area . The shape of the sensing member 131 can increase the thermal resistance of the sensing member 131 and reduce the heat transfer between the lower electrode 110 and the upper electrode 120. Accordingly, heat is transmitted through the sensing member 131, and the phenomenon of thermal equilibrium between the lower electrode 110 and the upper electrode 120 can be mitigated. As a result, the reliability of the temperature sensing of the sensor 101 can be improved.

According to the sensor 101 according to the second embodiment of the present invention, external force and temperature can be sensed using one structure. As described above, the sensing of the external force can be performed by measuring the voltage between the lower electrode 110 and the upper electrode 120 in a state in which a constant current flows through the sensing member 131. The sensing of the temperature may be accomplished by sensing the voltage Vt between the lower electrode 110 and the upper electrode 120 with the sensing member 131 in an open state (i.e., without current flowing through the sensing member 131) &Lt; / RTI > As described above, according to the sensor 101 according to the second embodiment of the present invention, the principle of sensing the external force is different from the principle of sensing the temperature, and sensing the external force and sensing the temperature can be performed separately .

In the sensor 101 according to the second embodiment of the present invention, the scale of the voltage applied between the lower electrode 110 and the upper electrode 120 when the external force is sensed is detected by the sensing member 131 Can be controlled using the magnitude of the flowing current. The scale of the voltage applied between the lower electrode 110 and the upper electrode 120 at the time of sensing an external force is a scale of a voltage applied between the lower electrode 110 and the upper electrode 120 It can be controlled differently. For example, when the external force is sensed, the magnitude of the voltage applied between the lower electrode 110 and the upper electrode 120 is equal to the magnitude of the voltage applied between the lower electrode 110 and the upper electrode 120 Times, or less than 1/10 times. Accordingly, voltage due to external force and voltage due to temperature can be distinguished, and crosstalk between the two voltages can be prevented.

3 is a cross-sectional view showing a sensor 102 according to a third embodiment of the present invention. The same or similar reference numerals are provided for substantially the same configurations as the sensors according to the first embodiment of the present invention described with reference to Figs. 1A, 1B, and 1C, and redundant descriptions may be omitted for simplicity of explanation .

Referring to FIG. 3, the sensor 102 may include a lower electrode 110, an upper electrode 120, and a sensing member 132 interposed between the lower electrode 110 and the upper electrode 120. The lower electrode 110 and the upper electrode 120 may be substantially the same as the lower electrode 110 and the upper electrode 120 described above with reference to FIG.

The sensing member 132 may include a plurality of sensing patterns 130. The plurality of sensing patterns 130 may be spaced apart from each other. Each of the plurality of sensing patterns 130 may be substantially the same as the sensing member 130 described with reference to FIGS. 1A, 1B, and / or 1C. For example, each of the plurality of sensing patterns 130 may have a lower surface 130a and an upper surface 130b opposite the lower surface 130a. The lower surface 130a of each of the plurality of sensing patterns 130 may be electrically connected to the lower electrode 110 and the upper surface 130b may be electrically connected to the upper electrode 120. [ According to some embodiments, the lower surface 130a of each of the plurality of sensing patterns 130 may be in contact with the lower electrode 110, and the upper surface 130b may be in contact with the upper electrode 120. Each of the plurality of sensing patterns 130 may comprise a flexible thermoelectric material.

4 is a sectional view showing a sensor 103 according to a fourth embodiment of the present invention. The same or similar reference numerals are provided for substantially the same configurations as the sensors according to the second embodiment of the present invention described with reference to Figs. 2A, 2B, 2C, and 2D, and redundant descriptions are omitted for simplicity of explanation .

Referring to FIG. 4, the sensor 103 may include a lower electrode 110, an upper electrode 120, and a sensing member 133 interposed between the lower electrode 110 and the upper electrode 120. The lower electrode 110 and the upper electrode 120 may be substantially the same as the lower electrode 110 and the upper electrode 120 described above with reference to FIG.

The sensing member 133 may include a plurality of sensing patterns 131. The plurality of sensing patterns 133 may be spaced apart from each other. Each of the plurality of sensing patterns 131 may be substantially the same as the sensing member 131 described with reference to Figures 2a, 2b, 2c, and / or 2d. For example, each of the plurality of sensing patterns 131 may have a lower surface 131a and an upper surface 131b opposite to the lower surface 131a. Each lower surface 131a of the plurality of sensing patterns 131 may be electrically connected to the lower electrode 110 and the upper surface 110b may be electrically connected to the upper electrode 120. [ According to some embodiments, the lower surface 131a of each of the plurality of sensing patterns 131 can be in contact with the lower electrode 110, and the upper surface 131b can be in contact with the upper electrode 120. Each of the plurality of sensing patterns 131 may include a flexible thermoelectric material.

5 is a plan view of a sensor 200 according to a fifth embodiment of the present invention. 6A, 6B and 6C are cross-sectional views of a sensor 200 according to a fifth embodiment of the present invention, corresponding to line I-I 'in FIG.

5 and 6A, the sensor 200 includes a lower substrate BS, an upper substrate TS, a plurality of lower electrodes 210, a plurality of upper electrodes 220, and a sensing layer SL. . &Lt; / RTI >

The lower substrate (BS) may be a flexible polymer substrate. For example, the lower substrate (BS) may comprise polydimethylsiloxane (PDMS) or polyurethane.

The upper substrate TS may be provided on the lower substrate BS. The lower surface of the upper substrate TS may face the upper surface of the lower substrate BS. The upper substrate TS may be spaced from the lower substrate BS. The upper substrate TS may be a flexible polymer substrate. For example, the top substrate TS may comprise polydimethylsiloxane (PDMS) or polyurethane.

A plurality of lower electrodes 210 may be provided on the upper surface of the lower substrate BS. Each of the lower electrodes 210 may extend in a first direction D1. The lower electrodes 210 may be spaced apart from each other in a second direction D2 that intersects the first direction D1. The lower electrodes 210 may include a conductive material. For example, the lower electrodes 210 may include at least one of copper (Cu), titanium (Ti), tungsten (W), aluminum (Al), gold (Au), and silver (Ag). According to some embodiments, the lower electrodes 210 may comprise a transparent conductive material. For example, the lower electrodes 210 may include at least one selected from the group consisting of Indium Tin Oxide, Gallium Zinc Oxide, Aluminum Zinc Oxide, Aluminum Gallium Zinc Oxide, At least one of Aluminum Indium Zinc Oxide, Indium Zinc Tin Oxide, Indium Gallium Oxide, Indium Zinc Oxide and Indium Oxide. .

A plurality of upper electrodes 220 may be provided between the upper substrate TS and the plurality of lower electrodes 210. Each of the upper electrodes 220 may extend in a second direction D2. The upper electrodes 220 may be spaced apart from each other in the first direction D1. The upper electrodes 220 may include a conductive material. For example, the upper electrodes 220 may include at least one of copper (Cu), titanium (Ti), tungsten (W), aluminum (Al), gold (Au), or silver (Ag). According to some embodiments, the top electrodes 220 may comprise a transparent conductive material. For example, the upper electrodes 220 may be formed of indium tin oxide, gallium zinc oxide, aluminum zinc oxide, aluminum gallium zinc oxide, aluminum indium tin oxide, At least one of Aluminum Indium Zinc Oxide, Indium Zinc Tin Oxide, Indium Gallium Oxide, Indium Zinc Oxide and Indium Oxide. .

The sensing layer SL may be disposed between the plurality of lower electrodes 210 and the plurality of upper electrodes 220. The sensing layer SL may include a plurality of sensing regions SSR and a supporting region SPR surrounding the plurality of sensing regions SSR. The sensing regions SSR may be regions overlapping with the intersections of the lower electrodes 210 and the upper electrodes 220 in plan view.

Each of the sensing regions SSR may comprise a sensing member 232. 6A, the sensing member 232 may be substantially the same as the sensing member 132 included in the third embodiment 102 of the present invention. In such embodiments, the sensing member 232 may comprise a plurality of sensing patterns 230. The plurality of sensing patterns 230 may be spaced apart from each other. Each of the plurality of sensing patterns 230 may be substantially the same as the sensing member 130 described with reference to Figs. 1A, 1B, and / or 1C. For example, each of the plurality of sensing patterns 230 may have a bottom surface 230a and a top surface 230b opposite the bottom surface 230a. Each of the lower surfaces 230a of the plurality of sensing patterns 230 may be electrically connected to the lower electrode 210 and the upper surface 230b may be electrically connected to the upper electrode 220. [ According to some embodiments, the lower surface 230a of each of the plurality of sensing patterns 230 may be in contact with the lower electrode 210, and the upper surface 230b may be in contact with the upper electrode 220. Each of the plurality of sensing patterns 230 may comprise a flexible thermoelectric material.

6A, the sensing member 232 may include a plurality of sensors 100, 101, and 103, respectively, according to the first, second, and fourth embodiments of the present invention, And may be substantially the same as any one of the sensing members 130, 131, and 133.

The support region (SPR) may include support members (235). The support members 235 may be spaced from the sensing member 232. The support members 235 may comprise the same material as the sensing member 232, so that the support members 235 may have elasticity. In one example, the support members 235 are deformed when an external force is applied, and can be restored to their original shape when the applied external force is removed.

6A shows a sensor 200 when no external force is applied and FIG. 6B shows a sensor 200 when an external force is applied from the upper substrate TS to the lower substrate BS. . 6A and 6B, the shape of the sensing member 232 can be changed by an external force, so that the lower electrode 210 and the upper electrode 220 connected to each of the sensing regions SSR, Can be varied. The sensing member 232 may have elasticity, and thus can be restored to its original shape when the external force is removed. For example, when the external force is removed, the sensing member 232 can be recovered from the shape shown in Fig. 6B to the shape shown in Fig. 6A.

6A and 6B, when an external force from the upper substrate TS toward the lower substrate BS acts on the non-sensing area SSRa, the sensing area SSRa, The area of the lower surface 230a of the patterns 230 or the area of the sensing patterns 230 contacting the lower electrode 210 can be increased and the area of the upper surface 230b of the sensing patterns 230 The widths W6 and W7 of the sensing patterns 230 may be increased and the width of the sensing patterns 230 may be larger than the widths of the sensing patterns 230. [ The thickness (see TH6 and TH7) between the lower surface 230a and the upper surface 230b can be reduced. According to the deformation of the sensing patterns 230, the electrical resistance between the lower electrode 210 and the upper electrode 220 connected to the sensing region SSRa where an external force acts can be reduced. Alternatively, the sensing patterns 230 included in the sensing regions SSRb not affected by the external force may not be deformed, so that the lower electrode 210 connected to the sensing regions SSRb, And the upper electrode 220 can be maintained as they are.

As described above, each of the sensing patterns 230 may vary in electrical resistance between the lower electrode 210 and the upper electrode 220 connected to the respective sensing regions SSR in response to an external force. Therefore, by measuring the electrical resistance between the lower electrode 210 and the upper electrode 220 connected to the respective sensing regions SSR, the sensor 200 according to the first embodiment of the present invention can detect an external force have. The measurement of the electrical resistance between the lower electrode 210 and the upper electrode 220 connected to the respective sensing regions SSR is performed by applying a constant current And measuring the voltage between the lower and upper electrodes 210 and 220. [ At this time, the scale of the voltage applied between the lower electrode 210 and the upper electrode 220 can be adjusted according to the magnitude of the current flowing through the sensing patterns 230.

6C shows a sensing area SSRc including the sensing patterns 230 whose temperature (Ta) of the lower surface 230a and temperature (Tb) of the upper surface 230b are different from each other. When the temperature Ta of the lower surface 230a of the sensing patterns 230 and the temperature Tb of the upper surface 230b are different from each other, a voltage Vt (t) is applied between the lower surface 230a and the upper surface 230b of the sensing patterns 230, ) May occur. As the difference between the temperature Ta of the lower surface 230a of the sensing patterns 230 and the temperature Tb of the upper surface 230b increases, the lower surface 230a and the upper surface 230b of the sensing patterns 230 The voltage Vt can be increased. The temperature Ta of the lower surface 230a of the sensing patterns 230 included in the different sensing regions SSRd may be equal to the temperature Ta of the upper surface 230b, A voltage may not be generated between the upper surface 230a and the upper surface 230b.

As described above, the sensing patterns 230 respond to the temperature difference (difference between Ta and Tb) between the lower surface 230a and the upper surface 230b, and accordingly, the lower surface 230a of the sensing patterns 230, A voltage Vt may be generated between the first and second electrodes 230a and 230b. Therefore, by measuring the voltage Vt between the lower surface 230a and the upper surface 230b of the sensing patterns 230, the sensor 200 according to the fifth embodiment of the present invention can sense the temperature. The measurement of the voltage Vt between the lower surface 230a and the upper surface 230b of the sensing patterns 230 is performed in a state in which no current is applied to the lower and upper electrodes 210 and 220 And measuring the voltage between the lower and upper electrodes 210 and 220 (with the electrodes 210 and 220 in the open state).

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It will be understood. It is therefore to be understood that the above-described embodiments are illustrative and not restrictive in every respect.

Claims

A lower electrode;
An upper electrode on the lower electrode; And
And a sensing member interposed between the lower and upper electrodes, the sensing member having a lower surface and an upper surface opposite to the lower surface,
Wherein the sensing member comprises a flexible thermoelectric material,
The shape of the sensing member may be deformable,
Wherein the sensor has an electrical resistance between the lower electrode and the upper electrode as the shape of the sensing member changes.

The method according to claim 1,
The flexible thermoelectric material may be selected from the group consisting of polyacetylene, polypyrole, polythiophene, polyaniline, poly (3,4-ethylenedioxythiophene), poly [2-methoxy- , 5-diyl), and polymers thereof.

The method according to claim 1,
Wherein the flexible thermoelectric material comprises at least one of carbon nanotubes and graphenes.

The method according to claim 1,
Wherein the flexible thermoelectric material comprises a compound comprising at least one of Bi, Te, Sb, and Sn.

The method according to claim 1,
Wherein the lower the vertical thickness of the sensing member, the smaller the electrical resistance between the lower electrode and the upper electrode.

The method according to claim 1,
And the sensor has a smaller electrical resistance between the lower electrode and the upper electrode as the width of the sensing member increases.

The method according to claim 1,
Wherein an electrical resistance between the lower electrode and the upper electrode decreases as an area of the upper surface of the sensing member increases.

The method according to claim 1,
Wherein the width of the sensing member decreases as the distance from the lower electrode increases.

The method according to claim 1,
Wherein the sensing member includes a plurality of sensing patterns interposed between the lower and upper electrodes,
Wherein each of the plurality of sensing patterns comprises the flexible thermoelectric material.

10. The method of claim 9,
Wherein the plurality of sensing patterns are spaced apart from each other.

A plurality of lower electrodes extending in a first direction and spaced apart from each other;
A plurality of upper electrodes disposed on the plurality of lower electrodes and extending in a second direction intersecting with the first direction and spaced apart from each other; And
And a sensing layer disposed between the plurality of lower electrodes and the plurality of upper electrodes,
The sensing layer comprises:
A plurality of sensing regions overlapping with the intersections of the lower electrodes and the upper electrodes, respectively, in plan view; And
In plan view, a support region surrounding the plurality of sensing regions,
Wherein each of the sensing regions includes a sensing member having a bottom surface and an upper surface opposite the bottom surface,
Wherein the sensing member comprises a flexible thermoelectric material,
The shape of the sensing member may be deformable,
Wherein the sensor has an electrical resistance between the lower electrode and the upper electrode as the shape of the sensing member changes.

12. The method of claim 11,
Wherein the support region comprises support members.

13. The method of claim 12,
Wherein the support members are spaced apart from the sensing member.

13. The method of claim 12,
Wherein the support members comprise the same material as the sensing member.

12. The method of claim 11,
Wherein the lower the vertical thickness of the sensing member, the smaller the electrical resistance between the lower electrode and the upper electrode.

12. The method of claim 11,
A flexible lower substrate under the plurality of lower electrodes; And
And a flexible upper substrate on the plurality of upper electrodes.

A lower electrode;
An upper electrode on the lower electrode; And
And a sensor interposed between the lower and upper electrodes, the sensing member having a lower surface and an upper surface opposite to the lower surface,
Wherein the sensing member comprises a flexible thermoelectric material,
An external force is sensed using the electrical resistance between the lower surface and the upper surface of the sensing member,
And sensing the temperature by using the open voltage between the lower surface and the upper surface of the sensing member.

18. The method of claim 17,
Detecting the external force includes:
Flowing a constant current through the lower and upper electrodes to the sensing member; And
And measuring a voltage between the lower and upper electrodes.

18. The method of claim 17,
Sensing the temperature may include:
Placing the lower and upper electrodes in an open state; And
And measuring a voltage between the lower and upper electrodes.

18. The method of claim 17,
Detecting the external force includes:
Flowing a constant current through the lower and upper electrodes to the sensing member; And
And measuring a voltage between the lower and upper electrodes,
Sensing the temperature may include:
Placing the lower and upper electrodes in an open state; And
Measuring a voltage between the lower and upper electrodes,
Wherein the voltage between the lower and upper electrodes when sensing the external force is greater than or equal to 1/10 times the voltage between the lower and upper electrodes when sensing the temperature.