KR20160149935A - Extinguishing gas leakage detecting sensor and a method of manufacturing, and the leak detection method using a gas detecting sensor - Google Patents

Extinguishing gas leakage detecting sensor and a method of manufacturing, and the leak detection method using a gas detecting sensor Download PDF

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KR20160149935A
KR20160149935A KR1020150087797A KR20150087797A KR20160149935A KR 20160149935 A KR20160149935 A KR 20160149935A KR 1020150087797 A KR1020150087797 A KR 1020150087797A KR 20150087797 A KR20150087797 A KR 20150087797A KR 20160149935 A KR20160149935 A KR 20160149935A
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gas
electrode pair
film
substrate
gas sensing
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KR1020150087797A
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Korean (ko)
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남성원
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남성원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62C—FIRE-FIGHTING
    • A62C37/00—Control of fire-fighting equipment
    • A62C37/50—Testing or indicating devices for determining the state of readiness of the equipment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073—Composition or fabrication of the solid electrolyte
    • G01N27/4074—Composition or fabrication of the solid electrolyte for detection of gases other than oxygen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Public Health (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

The present invention relates to a fire extinguishing gas leakage detection sensor and a manufacturing method thereof. According to the present invention, the fire extinguishing gas leakage detection sensor comprises: a substrate; an electrode pair formed on the substrate, to which power is applied; a conductive film which is applied to an upper surface of the substrate and the electrode pair, and performs a catalytic action to promote a sensing reaction to gas to be sensed; and a gas sensing film which is coated on an upper portion of the conductive film, and receives power from the electrode pair. The gas sensing film comprises any one selected from a semiconductor metal oxide group including tin oxide (SnO_2) and a zirconium compound (ZrOCl_2) or an alloy thereof. According to the present invention, a gas leakage is sensed in advance by a gas sensor for detecting a fluorine ion (F-) or hydrogen fluoride (HF) to prevent malfunction of a fire extinguishing facility and a fatal accident to maintain a complete fire protection system in an emergency.

Description

TECHNICAL FIELD [0001] The present invention relates to an exhaust gas leak detecting sensor, a manufacturing method thereof, and a leakage gas detecting method using a detection sensor,

The present invention relates to a fire extinguishing gas leakage sensor, a method of manufacturing the fire extinguishing gas leakage detecting sensor, and a leakage gas detecting method using the sensing sensor, and more particularly, to a fire extinguishing gas leakage detecting sensor using a fluorine ion (F-) or hydrogen fluoride The present invention relates to a fire extinguishing gas leakage detecting sensor capable of reducing the size of a gas sensor and performing a sensing function with high sensitivity, a method for manufacturing the same, and a leakage gas detecting method using the detecting sensor.

Generally, fire extinguishing agents emitted from gas-based fire extinguishing systems are classified as carbon dioxide extinguishing agents, halogen compound extinguishing agents, and clean extinguishing agents. Currently, the use of clean extinguishing agents having relatively less toxicity and environmental impact is increasing.

Perfluorobutane, Hydrochloro-Fluorocarbon Mix, Chlorotetrafluoroethane, Pentafluoroethane, Hepta (Heptafluoroethane), Heptafluoropropane (Heptafluoroethane), Heptafluoroethane fluoropropane, hexafluoropropane, trifluoromethane, trifluoroiodide (CF3I), perfluoro-4-trifluoromethyl-3-pentanone The most commonly used gases in Korea, such as - (trifluoromethyl) -3-pentanone, bromochlorodifluoromethane, etc., will be used in 2014 as Trifluoromethane (839 tons), Pentafluoroethane Pentafluoroethane (141 tons), heptafluoropropane (67 tons), and a hydrochlorofluorocarbon mix (63 tons).

The above-mentioned clean fire extinguishing agents generate fluorine ion (F-) or hydrogen fluoride (HF), the hydrogen fluoride is colorless and very toxic to the strong inorganic acid which is very soluble in water, the concentration in air is 30 ppm. Exposure to hydrogen fluoride may cause irritation or burns to the skin and airway mucosa and may cause metabolic disturbances.

In the gas fire extinguishing system, the leak detection gas sensor is important in two aspects of the management of the gas extinguishing system itself and prevention of the accident of human life accident.

Korean Patent Application No. 10-2003-7007590 discloses a patent relating to a gas sensor.

On the other hand, the reliability of the product is the most important because the fire-fighting product has to protect the life and property against the fire in case of emergency. In the case of the gas-based fire-extinguishing equipment, there is a possibility of leakage of the gas due to lack of installation and management.

Therefore, the gas fire extinguishing system in the gas fire extinguishing system is often used to prevent human accidents due to self-toxicity due to self-toxicity and decrease in oxygen, .

SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems of the prior art described above, and it is an object of the present invention to simplify the manufacturing process and to improve the sensitivity of the sensor by forming a conductive film and a fluorine ion (F-) or hydrogen fluoride And a method of manufacturing the same, and a method of detecting leakage gas using a detection sensor. 2. Description of the Related Art In recent years, The purpose is to provide.

According to an embodiment of the present invention, there is provided a semiconductor device comprising: a substrate; An electrode pair formed on the substrate and to which power is applied; A catalytic conducting film applied to the top surface and the electrode pair of the substrate, the catalytic conducting film promoting a sensing reaction on the gas to be sensed; And a gas sensing film coated on top of the conductive film and being powered from the electrode pair, wherein the gas sensing film is formed of a semiconductor metal oxide group including a tin oxide (SnO 2 ), a zirconium compound (ZrOCl 2 ) The exhaust gas leakage detecting sensor is provided.

According to another embodiment of the present invention, there is provided a method of manufacturing a fluorine ion (F-) or hydrogen fluoride (HF) gas detection sensor, comprising: A first step of providing a substrate; Depositing a conductive paste pattern on the substrate by a printing method to form an electrode pair; Forming a conductive film on the electrode pair formed in the step 2; And a fourth step of forming a gas sensing film by applying any one selected from the group consisting of tin oxide (SnO 2 ), a zirconium compound (ZrOCl 2 ), or a semiconductor metal oxide group containing an alloy thereof to the conductive film formed in step 3 above A method of manufacturing a fire extinguishing gas leakage sensor is provided.

According to the present invention, by detecting gas leakage through fluorine ion (F-) or hydrogen fluoride (HF) detection gas sensor in advance, it is possible to prevent a malfunction and safety accident of a fire extinguishing facility, There is an effect.

1 is a perspective view showing a fire extinguishing gas leakage detecting sensor according to the present invention,
2 is a sectional view of a fire extinguishing gas leakage detecting sensor according to the present invention,
3 is a process flow diagram of a fire extinguishing gas leakage detecting sensor according to the present invention,
FIG. 4 is a graph showing response characteristics of Bromochlorodifluoromethane according to time after exposure to a fire extinguishing gas leakage sensor according to an embodiment of the present invention. FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Before describing the present invention, it is to be understood that the following terms are defined in consideration of the functions of the present invention, and that they should be construed in accordance with the technical idea of the present invention and interpreted in a general sense or commonly understood in the technical field.

In the following description, well-known functions or constructions are not described in detail to avoid obscuring the subject matter of the present invention.

Here, the attached drawings are exaggerated or simplified in order to facilitate understanding and clarification of the structure and operation of the technology, and the components do not exactly coincide with actual sizes.

FIG. 1 is a perspective view showing a basic structure of a gas sensor for detecting fluorine ion (F-) or hydrogen fluoride (HF) according to the present invention, and FIG. 2 is a graph showing the relationship between a fluorine ion (F-) or hydrogen fluoride (HF) FIG. 3 is a cross-sectional view of a detection gas sensor. FIG. 3 shows an example of a fluorine ion (F-) or hydrogen fluoride (HF) gas sensor manufactured. After exposure to bromochlorodifluoromethane, a reaction sensitivity (Vg / (F-) or hydrogen fluoride (HF), which is expressed by the sensor measured voltage of the sensor when the sensor is exposed to fluorine ion (F-) or hydrogen fluoride (HF)) and Vg to be.

As shown in FIG. 1, the fire extinguishing gas leakage detecting sensor according to the present invention includes a perfluorobutane, a hydrochloro-fluorocarbon mix, a chlorotetrafluoroethane, a pentafluoroethane, But are not limited to, pentafluoroethane, heptafluoropropane, hexafluoropropane, trifluoromethane, trifluoroiodide (CF3I), perfluoro-4-tri Is applied to gas-based fire-extinguishing plants containing one or more components in the group consisting of perfluoro-4- (trifluoromethyl) -3-pentanone, bromochlorodifluoromethane.

A fire extinguishing gas leakage detecting sensor according to an embodiment of the present invention includes a substrate (2); A pair of electrodes 3 formed on the substrate 2 and to which power is applied; A catalytic conducting film (4) applied to the upper surface of the substrate (2) and to the electrode pair (3) and promoting a sensing reaction on the gas to be sensed; And a gas sensing film (5) coated on the conductive film (4) and receiving power from the electrode pair (3).

The substrate 2 is an insulating substrate such as a polyethylene terephthalate (PET) film, glass, ceramics, or a silicon substrate.

The electrode pair 3 is disposed on the insulating substrate so as to apply power to the gas sensing film 5 of the substrate 2.

A power supply for supplying external power to the electrode pair 3 and a meter 32 for measuring the electrical characteristics of the gas sensing film 5 may be connected.

The conductive electrode pair 3 may be formed of a metal such as gold (Au), platinum (Pt), silver (Ag), nickel (Ni), copper (Cu), tungsten Group is formed from one or more metals selected from the group.

Therefore, the electrode pair 3 can generate a potential difference in the gas sensing film 5 by applying power to the gas sensing film 5. [

When a direct current voltage is supplied to the electrode pair 3, the electrode pair 3 is an electrode having polarities of positive and negative polarities relatively.

The electrode pair 3 may be an electrode having a predetermined potential and an electrode maintaining a ground potential, and the electrode pair 3 may be a voltage Can be supplied.

The meter 32 can monitor the electrical conductivity difference of the gas sensing film 5 and measure the electrical characteristics of the gas sensing film 5. [

The conductive film 4 formed on the electrode pair 3 can catalyze a sensing reaction of the gas sensing film 5 with respect to a predetermined sensing target gas.

The conductive film 4 is applied with a substance capable of catalyzing a predetermined gas sensing film 5.

The electrode pair 3 may have a plurality of strips parallel to one another and the conductive film 4 may be arranged between the electrode pairs 3 when the electrons conduct along the conduction path 36 , And electrons are alternately arranged in the gas sensing film (5) and the conductive film (4).

By accelerating the decomposition reaction and the binding reaction of the detection gas on the conductive film 4, the response speed and sensitivity of the gas sensor can be increased.

The gas sensing film 5 is formed on the conductive film 4 and detects gas leakage in response to fluorine ion (F-) or hydrogen fluoride (HF).

The gas sensing film 5 may be formed in the form of a thin film or a bulk on the conductive film 4.

The thickness of the gas sensing film 5 is determined so that the sensing target gas introduced from the outside diffuses through the gas sensing film 5 and reaches the conductive film 4 sufficiently.

The gas sensing film 5 is, for example, any one selected from the group consisting of tin oxide (SnO2), a zirconium compound (ZrOCl2), or a semiconductor metal oxide including an alloy thereof.

Although the gas sensing film 5 has been described above as an example, other various kinds of materials whose electrical conductivity changes in a similar manner as described above may be applied to the gas sensing film 5.

According to another embodiment of the present invention, there is provided a fire extinguishing gas leakage detecting sensor for detecting fluorine ion (F-) or hydrogen fluoride (HF) gas, comprising: a substrate 2; A first adhesive layer formed on the upper surface of the substrate (2) and including electrode pairs (3); A second adhesive layer formed to completely cover the first adhesive layer and including a conductive film (4); And a gas sensing film 5 formed on the upper surface of the second adhesive layer and reacting with fluorine ion (F-) or hydrogen fluoride (HF), the power being applied by the electrode pair (3).

The electrode pair 3 formed on the first adhesive layer is formed in a conductive paste pattern so that power can be applied to the gas sensing layer and a meter 32 is connected to one side of the electrode pair 3 to apply power to the gas sensing layer 5. [ .

The gas sensing film 5 is any one selected from the group consisting of tin oxide (SnO 2 ), a zirconium compound (ZrOCl 2 ), or a semiconductor metal oxide including an alloy thereof.

The conductive film 4 formed on the electrode pair 3 can catalyze a sensing reaction of the gas sensing film 5 with respect to a predetermined sensing target gas.

The conductive film 4 is applied with a substance capable of catalyzing a predetermined gas sensing film 5.

The electrode pair 3 may have a plurality of strap shapes parallel to each other and the conductive film 4 may have a shape such that when the electrons are conducted along the conductive path 36 between the electrode pairs, 5 and the conductive film 4 alternately.

By accelerating the decomposition reaction and the binding reaction of the detection gas on the conductive film 4, the response speed and sensitivity of the gas sensor can be increased.

A fluorine ion (F-) or hydrogen fluoride (HF) gas sensing film is formed on the conductive film 4.

Meanwhile, a method for manufacturing a fluorine ion (F-) or hydrogen fluoride (HF) gas detection sensor manufactured by the above-described method is as follows.

As shown in Fig. 3, a first step (S1) comprising a substrate 2; A second step S2 of depositing a conductive paste pattern on the substrate 2 by a printing method to form an electrode pair 3; (S3) of forming a conductive film (4) on the electrode pair (3) formed in the second step (S2); (SnO 2 ), a zirconium compound (ZrOCl 2 ), or an alloy thereof to the conductive film 4 formed in the step 3 (S3) to form a gas sensing film 5 (S4) of forming a first electrode (not shown).

In the first step S1, an insulating substrate such as a polyethylene terephthalate (PET) film, a glass, a ceramic, a silicon substrate, or the like is prepared as the substrate 2.

In the second step S2, an electrode pair is formed on one side of the upper surface of the substrate 2 by depositing gold (Au), platinum Pt, silver (Ag), nickel (Ni) (Cu), tungsten (W), aluminum (Al), or an alloy thereof.

The electrode pairs 3 are formed in the form of a plurality of straps parallel to each other, and a conduction path 36 is formed therebetween.

In the third step S3, the conductive film 4 is formed on the upper surface of the substrate 2 and the upper surface of the electrode pair 3. The conductive film 4 may catalyze a sensing reaction of the gas sensing film 5 with respect to a predetermined gas to be sensed.

The conductive film 4 is arranged so that electrons can alternately conduct in the gas sensing film 5 and the conductive film 4 when the electrons are conducted along the conductive path 36 between the electrode pairs 3.

In the fourth step, the gas sensing film 5 is formed to have a predetermined thickness so that the sensing target gas introduced from the outside can diffuse through the gas sensing film 5 and reach the conductive film 4 sufficiently.

The gas sensing film 5 is made of any one selected from the group consisting of tin oxide (SnO2), a zirconium compound (ZrOCl2), or a semiconductor metal oxide group including an alloy thereof.

4 is a graph showing an embodiment of a fluorine ion (F-) or hydrogen fluoride (HF) gas sensor manufactured by the above-described method.

Extinguishing gas leakage sensor according to the present invention is exposed to bromochlorodifluoromethane.

Then, the response characteristic with respect to the reaction sensitivity with time is detected.

Vo described in the response characteristic of the graph is a sensor measurement voltage in air, and Vg is a sensor measurement voltage when exposed to fluorine ion (F-) or hydrogen fluoride (HF).

After exposure to bromochlorodifluoromethane, the reactivity was measured after exposure to bromochlorodifluoromethane in a continuous manner after the measured voltage was stabilized to determine the repeatability of the measurement.

It can be seen that the fluorine ion (F-) or hydrogen fluoride (HF) gas sensor according to the present invention operates at room temperature and exhibits the same level of response characteristics even when exposed to three times of repeated bromochlorodifluoromethane.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

2: substrate 3: electrode pair
4: conductive film 5: gas sensing film
32: Meter

Claims (7)

Board;
An electrode pair formed on the substrate and to which power is applied;
A catalytic conducting film applied to an upper surface of the substrate and to the electrode pair to facilitate a sensing reaction of the gas sensing film with respect to the gas to be sensed;
And a gas sensing film coated on the conductive film and being powered from the electrode pair,
Wherein the gas sensing membrane reacts with fluorine ion (F-) or hydrogen fluoride (HF). Board;
A first adhesive layer formed on an upper surface of the substrate and including an electrode pair;
A second adhesive layer formed to completely cover the first adhesive layer and including a conductive thin film;
A gas sensing film formed on the upper surface of the second adhesive layer and responsive to fluorine ion (F-) or hydrogen fluoride (HF), and powered by the electrode pair;
And a sensor for detecting an extinguishing gas leakage. 3. The method according to claim 1 or 2,
The gas sensing film may be formed of one or more metals selected from the group including gold (Au), platinum (Pt), silver (Ag), nickel (Ni), copper (Cu), tungsten (W), aluminum Is formed in a shape of a cylinder.
3. The method according to claim 1 or 2,
The electrode pair may be formed of one or more metals selected from the group including gold (Au), platinum (Pt), silver (Ag), nickel (Ni), copper (Cu), tungsten (W), aluminum Wherein the sensor is connected to one side of the sensor.
3. The method according to claim 1 or 2,
Wherein the gas sensing layer is selected from a group consisting of tin oxide (SnO2), a zirconium compound (ZrOCl2), or a semiconductor metal oxide group including an alloy thereof.
A first step of providing a substrate;
Depositing a conductive paste pattern on the substrate by a printing method to form an electrode pair;
Forming a conductive film on the electrode pair formed in the step 2;
A fourth step of forming a gas sensing film on the conductive film formed in step 3, the gas sensing film reacting with fluorine ion (F-) or hydrogen fluoride (HF) and being powered by the electrode pair;
And a sensor for detecting an extinguishing gas leak. Perfluorobutane, a hydrochloro-fluorocarbon mix, chlorotetrafluoroethane, pentafluoroethane, heptafluoropropane, hexafluoroethane, and the like. Trifluoromethyl-3-pentanone, perfluoro-4-trifluoromethyl-3-pentanone, hexafluoropropane, trifluoromethane, trifluoroiodide (CF3I) pentanone, and bromochlorodifluoromethane, in a gas-based fire extinguishing system comprising one or more components,
Wherein the gas sensing film of the gas sensor reacts with fluorine ion (F-) or hydrogen fluoride (HF) to detect gas leakage.

KR1020150087797A 2015-06-19 2015-06-19 Extinguishing gas leakage detecting sensor and a method of manufacturing, and the leak detection method using a gas detecting sensor KR20160149935A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109675245A (en) * 2018-12-29 2019-04-26 浙江华神消防科技有限公司 Clean type extinguishing chemical and its extinguishing device
WO2020013373A1 (en) * 2018-07-10 2020-01-16 주식회사 파이어캅 Fire extinguishing sheet and tape having excellent flexibility and self-extinguishing function, and manufacturing method therefor
KR20200005851A (en) * 2018-07-09 2020-01-17 최기환 Sensor for detecting liquid and device using the same
KR20220156195A (en) * 2021-05-18 2022-11-25 중앙대학교 산학협력단 Led-based gas sensor with locally integrated two-dimensional transition metal chalcogenide and method of preparing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200005851A (en) * 2018-07-09 2020-01-17 최기환 Sensor for detecting liquid and device using the same
WO2020013373A1 (en) * 2018-07-10 2020-01-16 주식회사 파이어캅 Fire extinguishing sheet and tape having excellent flexibility and self-extinguishing function, and manufacturing method therefor
CN109675245A (en) * 2018-12-29 2019-04-26 浙江华神消防科技有限公司 Clean type extinguishing chemical and its extinguishing device
KR20220156195A (en) * 2021-05-18 2022-11-25 중앙대학교 산학협력단 Led-based gas sensor with locally integrated two-dimensional transition metal chalcogenide and method of preparing the same

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