KR20160120516A - The device for controlling the range of dispensing pressure fluctuation - Google Patents

The device for controlling the range of dispensing pressure fluctuation Download PDF

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Publication number
KR20160120516A
KR20160120516A KR1020150049685A KR20150049685A KR20160120516A KR 20160120516 A KR20160120516 A KR 20160120516A KR 1020150049685 A KR1020150049685 A KR 1020150049685A KR 20150049685 A KR20150049685 A KR 20150049685A KR 20160120516 A KR20160120516 A KR 20160120516A
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KR
South Korea
Prior art keywords
resin
pressure
control
control tube
housing
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Application number
KR1020150049685A
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Korean (ko)
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KR101668082B1 (en
Inventor
안성룡
황세한
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안성룡
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Priority to KR1020150049685A priority Critical patent/KR101668082B1/en
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Publication of KR101668082B1 publication Critical patent/KR101668082B1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/085Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to flow or pressure of liquid or other fluent material to be discharged
    • B05B12/087Flow or presssure regulators, i.e. non-electric unitary devices comprising a sensing element, e.g. a piston or a membrane, and a controlling element, e.g. a valve
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas

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  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)

Abstract

The present invention relates to a device for controlling the fluctuation range of resin dispensing pressure, which can stably control the pressure of dispensed resin in a constant fluctuation range without affecting the flow of the resin with high viscosity and excessively changing the pressure of the resin. The device for controlling the fluctuation range of resin dispensing pressure according to the present invention comprises: a housing in which a resin pressure control space with both open sides is formed in a straight line; a control tube made of an elastic material and inserted in the resin pressure control space while being spaced apart from the inner wall of the housing; a shrinkage restriction means inserted in the control tube, having a plurality of resin moving holes formed on the surface thereof to move resin while being in contact with the control tube, and setting the shrinkage limit of the control tube; a resin inflow means installed on one end of the housing to introduce the resin into the control tube; a resin outflow means installed on the other end of the housing to discharge the resin passing through the control tube; a gas supply means for supplying gas, which is adjusted to a specific control pressure, to a space between the housing and the control tube; and a control unit for controlling the pressure of the gas supplied by the gas supply means according to the outflow pressure value of the resin discharged by the resin outflow means.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a resin injection pressure pulse width control apparatus,

The present invention relates to a resin injection pressure pulse ripple width control apparatus and more particularly to a resin injection pressure pulse ripple width control apparatus which does not affect the flow of a resin having a high viscosity and is capable of stably controlling the pressure of the resin injected within a constant ripple width To a resin injection pressure pressure pulsation width control apparatus.

In the case where the transfer liquid such as the semiconductor processing liquid is sent to each part by the reciprocating drive pump, the pressure of the transfer liquid is largely changed during the transfer process, and the process control is often difficult.

Therefore, pulsation damping devices have been proposed in order to attenuate pulsation due to pressure fluctuations in the transfer of such chemical liquids. The general pulsation damping device 1 has a structure including a main body casing 10, a liquid chamber 20, a diaphragm 30 and an air chamber 40 as shown in Fig. The liquid chamber 20 is formed in the casing 10 to temporarily introduce the liquid to be transferred by the reciprocating pump to perform the storage operation of the liquid, I will. The diaphragm 30 is installed in the apparatus main body casing 10 and has a structure in which the diaphragm 30 can be stretched and deformed freely with respect to the liquid chamber 20. An air chamber 40, And pressurize the diaphragm 30 by the gas pressure supplied from the gas supply unit.

The pulsation damping device 1 having such a structure is driven by a mechanism that contracts and deforms the diaphragm 30 by pulsation caused by the discharge pressure of the pump to attenuate the pulsation due to a change in the capacity of the liquid chamber 20. [

However, the pulsation damping device (1) having such a structure is not suitable for a substrate combining resin having a high viscosity.

The present invention provides a resin injection pressure pulse width control apparatus which does not affect the flow of a high viscosity resin and stably controls the pressure of a resin to be injected within a constant pulse width without excessively changing will be.

According to an aspect of the present invention, there is provided a resin injection pressure pulse width control apparatus comprising: a housing having a resin pressure control space formed on both sides thereof in a linear direction; An elastic material control tube inserted into the resin pressure control space so as to be spaced apart from the inner wall of the housing; A shrinking restriction means inserted in the control tube and provided with a plurality of resin movement grooves on the surface of which the resin can move in a state of being closely contacted with the control tube and setting a shrinkage limit of the control tube; Resin inlet means installed at one end of the housing for introducing the resin into the control tube; A resin outlet means installed at the other end of the housing for discharging resin passing through the inside of the control tube; A gas supply means for supplying a gas adjusted to a specific control pressure to a space between the housing and the control tube; And a control unit for controlling the pressure of the gas supplied by the gas supply unit in accordance with the outflow pressure value of the resin flowing out by the resin outflow unit to the gas supply unit.

In the present invention, it is preferable that the shrinkage restriction means is formed in a streamline shape at the end of the resin inlet means, and the plurality of resin movement grooves are formed at a predetermined interval on the outer surface of the shrinkage restriction means.

Further, in the present invention, it is preferable that the control unit controls the gas supply pressure (P air ) of the gas supply means within the range of the following inequality.

nP resin ≤ P air ≤ P resin

(Where Pair is the gas supply pressure, Presin is the target resin supply pressure, and n is a real number where 0 <n <1)

According to the present invention, it is possible to effectively and stably control the spray pressure pulse width of the high viscosity resin while maintaining the natural flow of the resin with respect to the resin having high viscosity and without causing the stagnation of the resin in the passing process have.

1 is a view showing a structure of a conventional pulsation width damping device.
2 is a view showing a structure of a resin injection pressure pulse width control apparatus according to an embodiment of the present invention.
3 and 4 are views showing the movement of a control tube according to an embodiment of the present invention.

Hereinafter, a specific embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The resin injection pressure pulse width control apparatus 100 according to the present embodiment includes a housing 110, a control tube 120, a shrinkage restriction means 130, a resin inlet means 140, A resin outflow means 150, a gas supply means 160, and a control unit (not shown in the figure).

As shown in FIG. 2, the housing 110 forms an overall shape of the pulse width control apparatus 100 according to the present embodiment, and provides a space in which other components can be installed. As shown in FIG. 2, the housing 110 is formed with a resin pressure control space 112 opened on both sides in a linear direction.

2, the control tube 120 is a component that is inserted into the housing 110, particularly, in the resin pressure control space 112, while being spaced apart from the inner wall of the housing 110 . Further, since the control tube 120 is made of an elastic material, it is deformed when an external force is present, and is restored to a circular shape when an external force is removed.

Of course, the space S between the control tube 120 and the inner wall of the housing 110 is sealed by the O-ring 122 or the like as shown in Fig.

2, the shrinkage limiting means 130 is installed in the control tube 120 and restricts the shrinkage limit of the control tube 120 when the control tube 120 is shrunk. .

2, the shrinkage limiting means 130 is formed in a streamlined shape, and the resin movement groove 132 is formed on the outer surface of the shrinkage limiting means 130, A plurality of spacers are formed at regular intervals. 4, when the control tube 120 and the shrinkage limiting means 130 are in close contact with each other, the resin R moves through the resin moving groove 132 It is movable.

2, the resin inlet means 140 is a component installed at one end of the housing 110 to introduce the resin into the control tube 120, (150) is a component that is installed at the other end of the housing (110) and emits the resin that has passed through the inside of the control tube (120).

2, the gas supplying means 160 is a component for supplying a gas adjusted to a specific control pressure to the closed space S between the housing 110 and the control tube 120 . The control tube 120 is deformed by the correlation between the gas pressure supplied by the gas supply means 160 and the resin pressure in the control tube 120 so that the resin is injected with a certain pressure.

Therefore, in the present embodiment, the control unit controls the pressure of the gas supplied by the gas supply unit 160 according to the outflow pressure value of the resin flowing out of the resin outflow unit 150.

Particularly, the control unit preferably controls the gas supply pressure P air of the gas supply unit 160 within the range of the inequality below.

nP resin ≤ P air ≤ P resin

(Where P air is the gas supply pressure, P resin is the target resin supply pressure, and n is a real number with 0 <n <1)

Hereinafter, the operation of the resin injection pressure pulse width control apparatus 100 according to the present embodiment will be described.

First, when the resin pressure P resin is larger than the gas supply pressure P air , the control tube 120 moves in the direction of the housing 110 as shown in FIG. 3, and a large amount of the resin R moves It becomes a state that can be.

If the resin pressure P resin is smaller than the gas supply pressure P air as shown in FIG. 4, the control tube 120 moves in the direction of the shrinkage limiting means 130 to generate a small amount of resin R, Is in a movable state.

Therefore, the fluctuation range of the control view 120 is stably limited by the housing 110 and the shrinkage limiting means 130, and the resin having a high viscosity does not stay in the pulse width control apparatus 100 The advantage is that the flow can be continued without spontaneous flow.

1: Conventional Pulse Width Damping Device
100: Resin spray pressure pulse width control device according to one embodiment of the present invention
110: housing 120: control tube
130: shrinking restriction means 140: resin introduction means
150: resin outlet means 160: gas supply means

Claims (3)

A housing in which a resin pressure control space having open sides is formed in a linear direction;
An elastic material control tube inserted into the resin pressure control space so as to be spaced apart from the inner wall of the housing;
A shrinking restriction means inserted in the control tube and provided with a plurality of resin movement grooves on the surface of which the resin can move in a state of being closely contacted with the control tube and setting a shrinkage limit of the control tube;
Resin inlet means installed at one end of the housing for introducing the resin into the control tube;
A resin outlet means installed at the other end of the housing for discharging resin passing through the inside of the control tube;
A gas supply means for supplying a gas adjusted to a specific control pressure to a space between the housing and the control tube;
And a control unit for controlling the pressure of the gas supplied by the gas supply unit according to an outflow pressure value of the resin flowing out by the resin outflow unit to the gas supply unit.
2. The apparatus according to claim 1,
Wherein the resin inlet means side end is formed in a streamlined shape and the plurality of resin movement grooves are spaced apart from the outer surface of the shrinkage limiting means at regular intervals.
The apparatus of claim 1,
Wherein the gas supply pressure of the gas supply means is controlled within a range of the following inequality.
nP resin ≤ P air ≤ P resin
(Where P air is the gas supply pressure, P resin is the target resin supply pressure, and n is a real number with 0 <n <1)
KR1020150049685A 2015-04-08 2015-04-08 The device for controlling the range of dispensing pressure fluctuation KR101668082B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150049685A KR101668082B1 (en) 2015-04-08 2015-04-08 The device for controlling the range of dispensing pressure fluctuation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150049685A KR101668082B1 (en) 2015-04-08 2015-04-08 The device for controlling the range of dispensing pressure fluctuation

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KR20160120516A true KR20160120516A (en) 2016-10-18
KR101668082B1 KR101668082B1 (en) 2016-10-19

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1130386A (en) * 1997-07-12 1999-02-02 Marusho:Kk Muffling fluid pipe
JP2000320781A (en) * 1999-05-14 2000-11-24 Kubota Corp Impact pressure-absorbing pipe
US20100086420A1 (en) * 2007-01-08 2010-04-08 Enrique Del Pozo Polidoro System for impelling a fluid by recirculation from a low-pressure medium to a high-pressure medium

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1130386A (en) * 1997-07-12 1999-02-02 Marusho:Kk Muffling fluid pipe
JP2000320781A (en) * 1999-05-14 2000-11-24 Kubota Corp Impact pressure-absorbing pipe
US20100086420A1 (en) * 2007-01-08 2010-04-08 Enrique Del Pozo Polidoro System for impelling a fluid by recirculation from a low-pressure medium to a high-pressure medium

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