KR20160119933A - Pressure transducer - Google Patents
Pressure transducer Download PDFInfo
- Publication number
- KR20160119933A KR20160119933A KR1020150048593A KR20150048593A KR20160119933A KR 20160119933 A KR20160119933 A KR 20160119933A KR 1020150048593 A KR1020150048593 A KR 1020150048593A KR 20150048593 A KR20150048593 A KR 20150048593A KR 20160119933 A KR20160119933 A KR 20160119933A
- Authority
- KR
- South Korea
- Prior art keywords
- diaphragm
- stainless steel
- rod
- hole
- pressure transducer
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/006—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
- G01L9/0064—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm the element and the diaphragm being in intimate contact
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L2009/0066—Mounting arrangements of diaphragm transducers; Details thereof, e.g. electromagnetic shielding means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
The present invention relates to a pressure transducer, and more particularly, to a pressure transducer that can be used at high temperature and high pressure.
Generally, a pressure sensor measures the magnitude of pressure by sensing pressure, which is one of the basic physical quantities, and converting it into an electric signal, which is used for process control of appliances, automobile control, ships, medical devices, industrial robots, System control and so on.
Among these pressure sensors, when used at high temperatures and pressures, such as the engine block of an internal combustion engine, the resin melting cylinder of a plastic molded injector, the vapor production control of a processed food manufacturing plant or a boiler, a pressure transfer medium between the input diaphragm and the output diaphragm And the pressure applied to the input diaphragm is transmitted to the output diaphragm to measure the pressure.
A pressure transducer according to the prior art is disclosed in U.S. Patent No. 4,712,430 (entitled Pressure transducer).
The pressure transducer according to the prior art is characterized in that the pressure transducer for measuring the low pressure has an elongated frame having a flat surface at one end and having corresponding means adjacent to the means for defining a passage, A capillary that defines one end of the capillary tube and defines another end adjacent to the capillary tube; a connection portion that closes the other end of the frame to define the frame to connect the capillary to the chamber; And a lid portion having an inner groove adjacent to the capillary tube, wherein the groove and the flat surface define a thin disk shaped barrier wall connecting the other end of the capillary tube, The pressure applied to the coupler by the chamber and the partition wall Wherein the lid portion has a substantially flat upper wall defining a gage receiving surface, the beams extending across the upper surface being disposed in opposition, the lid upper wall having opposite longitudinally extending side walls .
In the prior art, capillaries between the diaphragm coupler used as an input diaphragm and the receiving surface used as an output diaphragm as an upper gauge are filled with liquid mercury or silicone oil as a pressure transfer medium. The pressure applied to the diaphragm coupler is then transferred to the receiving surface by a pressure transfer medium consisting of liquid mercury or silicone oil. By making the pressure transfer medium in the capillary between the input diaphragm and the output diaphragm longer, the high temperature pressure applied to the input diaphragm can be reduced to the output diaphragm.
However, since the pressure transducer according to the related art uses liquid mercury or silicone oil as the pressure transfer medium, the response time is delayed, which makes it difficult to perform real-time accurate measurement. In addition, when the diaphragm coupler used as an input diaphragm is damaged by high temperature and high pressure, there is a problem that liquid mercury or silicone oil leaks out and adversely affects the human body.
Accordingly, it is an object of the present invention to provide a pressure transducer capable of precisely measuring in real time by minimizing the response time for transferring the pressure applied to the input diaphragm to the output diaphragm.
It is another object of the present invention to provide a pressure transducer which can prevent a harmful influence on the human body even if the input diaphragm is damaged.
In order to accomplish the above objects, a pressure transducer according to the present invention includes: a body formed in a cylindrical shape having a through hole; a circular first protrusion formed at one end of the body so as to close the through hole and extending in the center of the through hole; A first diaphragm having a circumferential first trench formed between the central portion and the outer circumferential portion to reduce the thickness of the first diaphragm, and a second diaphragm disposed at the other end of the body so as to close the through- A second diaphragm having a circular second protrusion facing the second diaphragm and having a circumferential second trench formed between the central portion and the outer circumferential portion to reduce the thickness of the second diaphragm; 1 and the second projection; and a sensing portion formed on the second diaphragm.
The body is made of titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel or precipitation hardening stainless steel.
And a protective layer formed on a surface exposed to the outside, opposite to the first projection of the first diaphragm.
In this case, TiN, TiC, or Al 2 O 3 is formed as a protective layer by a chemical vapor deposition method or a plasma deposition method.
And a guide tube formed in a cylindrical shape such that the first and second projections are inserted into both ends of the rod when the rod is inserted.
The rod may be made of titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel or precipitation hardening stainless steel, which have the same or similar thermal expansion coefficient as the material constituting the body .
The sensing unit includes first and second strain gauges formed on a second diaphragm, an insulator, and a circuit board, wherein the first and second strain gauges are formed on the first and second substrates, And the first to fourth resistors are formed to have a wheatstone bridge configuration. The insulator is formed in the shape of a circular cap having a periphery having a central portion penetrated by a synthetic resin, And the first to sixth output terminals of the thin film are formed of conductive metal on the surface, and are electrically connected to the first to sixth electrodes respectively by the conductive wires.
Accordingly, since the pressure applied to the input diaphragm is transmitted to the output diaphragm by a rod, it is possible to precisely measure in real time by reducing the response time. Further, the pressure applied to the input diaphragm is transmitted to the output diaphragm Since the rod, which is a pressure-transmitting medium, is formed of a solid material such as metal or ceramic, there is an advantage that harmful influence to the human body can be prevented even if the input diaphragm is damaged.
1 is a sectional view of a pressure transducer according to an embodiment of the present invention;
2 is a detailed view of a portion A in Fig.
3 is a plan view of the first and second strain gages formed on the second diaphragm.
Fig. 4 is a cross-sectional view of Fig. 3 taken along line BB; Fig.
5 is an operational state view of first and second strain gages formed on a second diaphragm;
6 is an equivalent circuit diagram of first and second strain gauges formed on a second diaphragm;
7 is a sectional view of a pressure transducer according to another embodiment of the present invention;
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings.
FIG. 1 is a cross-sectional view of a pressure transducer according to an embodiment of the present invention, FIG. 2 is a detailed view of a portion A of FIG. 1, FIG. 4 is a cross-sectional view taken along line BB of FIG. 3; FIG.
The pressure transducer according to an embodiment of the present invention includes a
The
The first diaphragm (13) is installed at one end of the body (11) to close the through hole. The
The
A protective layer may be formed on the surface exposed to the outside, opposite to the
The second diaphragm (19) is installed at the other end of the body (11) so as to block the through hole. The
The
The
The
If the material constituting the
Further, since the pressure applied to the
The first and
The
The
The first and
The first and
The first and
The first to
The first to
5 and 6 are an operational state diagram and an equivalent circuit diagram of the first and
5 and 6, when the pressure applied to the
The first and
The
The
The pressure transducer according to the above-described configuration is transmitted to the
The
7 is a cross-sectional view of a pressure transducer according to another embodiment of the present invention.
The pressure transducer according to another embodiment of the present invention is characterized in that the
The guide tube 27 'is formed so as to fit only a part of the portion of the
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Will be apparent to those of ordinary skill in the art.
11: body 13: first diaphragm
15: first trench 17: first protrusion
19: second diaphragm 21: second trench
23: second protrusion 25: rod
27: guide tube 29: sensing part
31a, 31b: first and second strain gauges
33: insulator 35: circuit board
39a, 39b, 39c, 39d, 39e, 39f: first to sixth output terminals
43a, 43b: first and second substrates
45a, 45b, 45c, 45d, 45e, 45f: first to sixth electrodes
47a, 47b, 47c, and 47d: first to fourth resistors
Claims (7)
A first protruding portion which is formed at one end of the body so as to close the through hole and which has a circular first protrusion extending in the center of the through hole and has a first circumferential trench formed between the center portion and the outer circumferential portion, In addition,
A circular second protrusion facing the first protrusion is formed at the other end of the body so as to close the through hole and extends in the center of the through hole to reduce the thickness between the center portion and the outer circumferential portion, A second diaphragm having two trenches,
A rod positioned in contact with the first and second projections formed respectively opposite to the first and second diaphragms,
And a sensing portion formed on the second diaphragm.
The first and second strain gauges are formed on the first and second substrates such that the first to sixth electrodes and the first to fourth resistors have a wheatstone bridge configuration,
The insulator is formed in a circular cap shape having a periphery portion through which a central portion is penetrated by a synthetic resin,
Wherein the circuit board is mounted on the periphery of the insulator and the first to sixth output terminals of the thin film are formed of a conductive metal on the surface and are electrically connected to the first to sixth electrodes respectively by conductive wires.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150048593A KR101760561B1 (en) | 2015-04-06 | 2015-04-06 | Pressure transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150048593A KR101760561B1 (en) | 2015-04-06 | 2015-04-06 | Pressure transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20160119933A true KR20160119933A (en) | 2016-10-17 |
KR101760561B1 KR101760561B1 (en) | 2017-07-24 |
Family
ID=57250248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150048593A KR101760561B1 (en) | 2015-04-06 | 2015-04-06 | Pressure transducer |
Country Status (1)
Country | Link |
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KR (1) | KR101760561B1 (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009109313A (en) | 2007-10-30 | 2009-05-21 | Denso Corp | Pressure-temperature compound sensor |
JP2011141223A (en) * | 2010-01-08 | 2011-07-21 | Seiko Epson Corp | Pressure sensing unit and pressure sensor |
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2015
- 2015-04-06 KR KR1020150048593A patent/KR101760561B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
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KR101760561B1 (en) | 2017-07-24 |
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Free format text: TRIAL NUMBER: 2016101001532; TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20160314 Effective date: 20170602 |
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