KR101760561B1 - Pressure transducer - Google Patents

Pressure transducer Download PDF

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Publication number
KR101760561B1
KR101760561B1 KR1020150048593A KR20150048593A KR101760561B1 KR 101760561 B1 KR101760561 B1 KR 101760561B1 KR 1020150048593 A KR1020150048593 A KR 1020150048593A KR 20150048593 A KR20150048593 A KR 20150048593A KR 101760561 B1 KR101760561 B1 KR 101760561B1
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KR
South Korea
Prior art keywords
diaphragm
stainless steel
rod
pressure
pressure transducer
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KR1020150048593A
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Korean (ko)
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KR20160119933A (en
Inventor
김영보
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(주)센서시스템기술
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Priority to KR1020150048593A priority Critical patent/KR101760561B1/en
Publication of KR20160119933A publication Critical patent/KR20160119933A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/006—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
    • G01L9/0064—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm the element and the diaphragm being in intimate contact
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L2009/0066—Mounting arrangements of diaphragm transducers; Details thereof, e.g. electromagnetic shielding means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The present invention relates to a pressure transducer, which comprises a body formed in a cylindrical shape having a through hole, a circular first protrusion formed at one end of the body so as to close the through hole and extending into the through hole at a central portion, A first diaphragm having a circumferential first trench formed between the first and second diaphragms to reduce the thickness of the first diaphragm; A second diaphragm in which a second protrusion is formed and a circumferential second trench is formed between the central portion and the outer circumferential portion to reduce the thickness of the first diaphragm; and first and second protrusions And a sensing portion formed on the second diaphragm. Therefore, the pressure applied to the input diaphragm is transmitted to the output diaphragm by a rod, which reduces the response time and enables precise measurement in real time. Also, the pressure applied to the input diaphragm is transmitted to the output diaphragm The rod, which is a pressure transmission medium, is formed in a solid state, so that even if the input diaphragm is damaged, it is prevented from adversely affecting the human body.

Description

Pressure transducer

The present invention relates to a pressure transducer, and more particularly, to a pressure transducer that can be used at high temperature and high pressure.

Generally, a pressure sensor measures the magnitude of pressure by sensing pressure, which is one of the basic physical quantities, and converting it into an electric signal, which is used for process control of appliances, automobile control, ships, medical devices, industrial robots, System control and so on.

Among these pressure sensors, when used at high temperatures and pressures, such as the engine block of an internal combustion engine, the resin melting cylinder of a plastic molded injector, the vapor production control of a processed food manufacturing plant or a boiler, a pressure transfer medium between the input diaphragm and the output diaphragm And the pressure applied to the input diaphragm is transmitted to the output diaphragm to measure the pressure.

A pressure transducer according to the prior art is disclosed in U.S. Patent No. 4,712,430 (entitled Pressure transducer).

The pressure transducer according to the prior art is characterized in that the pressure transducer for measuring the low pressure has an elongated frame having a flat surface at one end and having corresponding means adjacent to the means for defining a passage, A capillary that defines one end of the capillary tube and defines another end adjacent to the capillary tube; a connection portion that closes the other end of the frame to define the frame to connect the capillary to the chamber; And a lid portion having an inner groove adjacent to the capillary tube, wherein the groove and the flat surface define a thin disk shaped barrier wall connecting the other end of the capillary tube, The pressure applied to the coupler by the chamber and the partition wall Wherein the lid portion has a substantially flat upper wall defining a gage receiving surface, the beams extending across the upper surface being disposed in opposition, the lid upper wall having opposite longitudinally extending side walls .

In the prior art, capillaries between the diaphragm coupler used as an input diaphragm and the receiving surface used as an output diaphragm as an upper gauge are filled with liquid mercury or silicone oil as a pressure transfer medium. The pressure applied to the diaphragm coupler is then transferred to the receiving surface by a pressure transfer medium consisting of liquid mercury or silicone oil. By making the pressure transfer medium in the capillary between the input diaphragm and the output diaphragm longer, the high temperature pressure applied to the input diaphragm can be reduced to the output diaphragm.

However, since the pressure transducer according to the related art uses liquid mercury or silicone oil as the pressure transfer medium, the response time is delayed, which makes it difficult to perform real-time accurate measurement. In addition, when the diaphragm coupler used as an input diaphragm is damaged by high temperature and high pressure, there is a problem that liquid mercury or silicone oil leaks out and adversely affects the human body.

Accordingly, it is an object of the present invention to provide a pressure transducer capable of precisely measuring in real time by minimizing the response time for transferring the pressure applied to the input diaphragm to the output diaphragm.

It is another object of the present invention to provide a pressure transducer which can prevent a harmful influence on the human body even if the input diaphragm is damaged.

In order to accomplish the above objects, a pressure transducer according to the present invention includes: a body formed in a cylindrical shape having a through hole; a circular first protrusion formed at one end of the body so as to close the through hole and extending in the center of the through hole; A first diaphragm having a circumferential first trench formed between the central portion and the outer circumferential portion to reduce the thickness of the first diaphragm, and a second diaphragm disposed at the other end of the body so as to close the through- A second diaphragm having a circular second protrusion facing the second diaphragm and having a circumferential second trench formed between the central portion and the outer circumferential portion to reduce the thickness of the second diaphragm; 1 and the second projection; and a sensing portion formed on the second diaphragm.

The body is made of titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel or precipitation hardening stainless steel.

And a protective layer formed on a surface exposed to the outside, opposite to the first projection of the first diaphragm.

In this case, TiN, TiC, or Al 2 O 3 is formed as a protective layer by a chemical vapor deposition method or a plasma deposition method.

And a guide tube formed in a cylindrical shape such that the first and second projections are inserted into both ends of the rod when the rod is inserted.

The rod may be made of titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel or precipitation hardening stainless steel, which have the same or similar thermal expansion coefficient as the material constituting the body .

The sensing unit includes first and second strain gauges formed on a second diaphragm, an insulator, and a circuit board, wherein the first and second strain gauges are formed on the first and second substrates, And the first to fourth resistors are formed to have a wheatstone bridge configuration. The insulator is formed in the shape of a circular cap having a periphery having a central portion penetrated by a synthetic resin, And the first to sixth output terminals of the thin film are formed of conductive metal on the surface, and are electrically connected to the first to sixth electrodes respectively by the conductive wires.

Accordingly, since the pressure applied to the input diaphragm is transmitted to the output diaphragm by a rod, it is possible to precisely measure in real time by reducing the response time. Further, the pressure applied to the input diaphragm is transmitted to the output diaphragm Since the rod, which is a pressure-transmitting medium, is formed of a solid material such as metal or ceramic, there is an advantage that harmful influence to the human body can be prevented even if the input diaphragm is damaged.

1 is a sectional view of a pressure transducer according to an embodiment of the present invention;
2 is a detailed view of a portion A in Fig.
3 is a plan view of the first and second strain gages formed on the second diaphragm.
Fig. 4 is a cross-sectional view of Fig. 3 taken along line BB; Fig.
5 is an operational state view of first and second strain gages formed on a second diaphragm;
6 is an equivalent circuit diagram of first and second strain gauges formed on a second diaphragm;
7 is a sectional view of a pressure transducer according to another embodiment of the present invention;

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view of a pressure transducer according to an embodiment of the present invention, FIG. 2 is a detailed view of a portion A of FIG. 1, FIG. 4 is a cross-sectional view taken along line BB of FIG. 3; FIG.

The pressure transducer according to an embodiment of the present invention includes a body 11, first and second diaphragms 13 and 19, a rod 25, a guide tube 27, and a sensing unit 29 do.

The body 11 is formed of a stainless steel having corrosion resistance, wear resistance and heat resistance, and has a cylindrical shape with a through hole. The body 11 may be formed of titanium alloy-based stainless steel, inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel, precipitation hardening stainless steel, or the like.

The first diaphragm (13) is installed at one end of the body (11) to close the through hole. The first diaphragm 13 is made of titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel or precipitation hardening stainless steel to which a pressure to be measured is input. And the outer peripheral portion is welded and attached to one end of the body 11 to block the through hole. The first diaphragm 13 has a columnar first trench 15 formed between the center portion and the outer circumferential portion and has a thickness thinner than the center portion and the outer circumferential portion, . The first diaphragm 13 is formed with a first protrusion 17 protruding in a circular shape at a central portion of a surface opposite to the external to which the pressure is applied.

The first diaphragm 13 may be formed of stainless steel or inconel as well as heat resistant and hard metal such as titanium, chromium, manganese, chromium, nickel or cobalt, And may be attached to one end of the body 11 by welding or electron beam welding.

A protective layer may be formed on the surface exposed to the outside, opposite to the first projection 17 of the first diaphragm 13. The protective layer may be formed by a chemical vapor deposition method or a plasma deposition method such as TiN, TiC, or Al 2 O 3 having a high melting point, a high hardness, and excellent chemical and thermodynamic stability. This protective layer prevents the exposed surface of the first diaphragm 13 from changing in pressure characteristics due to corrosion and wear due to the adherence of foreign substances.

The second diaphragm (19) is installed at the other end of the body (11) so as to block the through hole. The second diaphragm 19 has a second protrusion 23 formed at a central portion corresponding to the first protrusion 17 formed on the first diaphragm 13 and extending to the inside of the through hole of the body 11 And a second trench 21 of a columnar shape adjacent to the second projection 23 is formed. The second diaphragm 19 receives the pressure applied to the first diaphragm 13 from the outside through the rod 25 and the second trench 21 receives the pressure applied to the first diaphragm 13 through the rod 25 The second diaphragm 19 is easily bent.

The second diaphragm 19 may be formed of titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel, precipitation hardening stainless steel, Or may be attached to the other end of the body 11 by electron beam welding.

The rod 25 is elongated in the form of a rod or rod so that both sides thereof are in contact with the first and second projections 17 and 23 of the first and second diaphragms 13 and 19, And the pressure applied to the diaphragm 13 is transmitted to the second diaphragm 19.

The rod 25 may be made of a material having the same or similar thermal expansion coefficient as the material constituting the body 11, for example, titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenite Type stainless steel or precipitation hardening type stainless steel so that the pressure applied to the first diaphragm 13 is transmitted to the second diaphragm 19 in real time to reduce the response time so that the strength of the pressure can be precisely measured . Further, the rod 25 may be formed of a ceramic such as aluminum oxide (Al 2 O 3 ).

If the material constituting the rod 25 has a thermal expansion coefficient larger than that of the material constituting the body 11, it is recognized that the pressure is applied even though the pressure is not applied. Further, if the material constituting the rod 25 has a thermal expansion coefficient smaller than that of the material constituting the body 11, it is recognized that the pressure is not applied even when the pressure is applied by expanding smaller at a high temperature. This phenomenon can not accurately measure the applied pressure due to malfunction.

Further, since the pressure applied to the first diaphragm 13 is transmitted to the second diaphragm 19 by the rod 25, which is a solid rod or bar, the first and second diaphragms 13, It is possible to prevent a harmful influence on the human body even if it is damaged.

The first and second diaphragms 13 and 19 may be joined to the body 11 by welding. Since the first and second diaphragms 13 and 19 and the body 11 are formed of the same material, welding is easy.

The guide tube 27 is formed in a cylindrical shape so that the first and second projections 17 and 23 can be inserted into both ends of the guide tube 27 with the rod 25 inserted therein. Therefore, the guide tube 27 not only prevents the rod 25 from being separated from the first and second diaphragms 13 and 19 but also prevents foreign matter from entering the rod 25, Can be prevented. The guide tube 27 may be formed of stainless steel or inconel as well as heat resistant and hard metal such as titanium, chromium, manganese, chromium, nickel or cobalt.

The sensing section 29 includes first and second strain gauges 31a and 31b formed on the second diaphragm 19, an insulator 33 and a circuit board 35.

The first and second strain gauges 31a and 31b are formed on the first and second substrates 43a and 43b by first to sixth electrodes 45a to 45c and 45d to 45e ) 45f and first to fourth resistors 47a, 47b, 47c and 47d. 45b, 45c, 45d, 45e and 45f and the first to fourth resistors 47a, 47b and 47c constituting the sensing unit 29, (47d) has a wheatstone bridge configuration as shown in Fig.

The first and second substrates 43a and 43b are formed with first through third electrodes 45a 45b and 45c and fourth through sixth electrodes 45d and 45e and 45f. The first to third electrodes 45a, 45b and 45c of the first and second substrates 43a and 43b and the fourth to sixth electrodes 45d and 45e and 45f are respectively connected to the first And the second and third resistors 47a and 47b and the third and fourth resistors 47a and 47b are formed. The first and second resistors 47a and 47b and the third and fourth resistors 47a and 47b have a narrow width and a long length on the first and second substrates 43a and 43b, And are formed to have the same longitudinal direction.

The first and second substrates 43a and 43b may be formed of a semiconductor such as silicon, amorphous silicon oxide (SiO2), aluminum oxide (Al2O3), sapphire, or the like. The first and second substrates (43a) (43b) of the semiconductor, amorphous silicon oxide (SiO2), aluminum oxide of silicon or the like used in the (Al 2 O 3) or sapphire, etc. As good thermal stability and chemical resistance, mechanical Can be used for sensors used in harsh environments such as engine blocks, resin melting cylinders in plastic forming machines, processed foods manufacturing plants, vapor pressure control of boilers, or for military purposes.

The first to fourth resistors 47a, 47b, 47c, and 47d may be formed of single crystal silicon or polycrystalline silicon doped with impurities having a small change in resistance value depending on temperature, or may be formed of indium tin oxide (ITO) Or a metal oxide such as tin oxide (TO).

The first to sixth electrodes 45a, 45b, 45c, 45d, 45e and 45f are formed of a metal such as aluminum, copper or silver to form first through fourth resistors 47a, 47b and 47c ) 47d and a wheatstone bridge.

5 and 6 are an operational state diagram and an equivalent circuit diagram of the first and second strain gages 31a and 31b formed on the second diaphragm 19, respectively.

5 and 6, when the pressure applied to the first diaphragm 13 is transmitted to the second diaphragm 19 via the rod 25, the second diaphragm 19 19 are stressed by the pressure applied in the vertical direction and deformed in the vertical direction. At this time, since the stress of the second diaphragm 19 is (-) in the peripheral portion adjacent to the body 11 and (+) in the central portion, the first and third resistors 47a and 47c are long And the second and fourth resistors 47b and 47d are reduced in width. Therefore, as shown in Fig. 6, the resistance value of the first and third resistors 47a and 47c is decreased, and the resistance value of the second and fourth resistors 47b and 47d is increased.

The first and sixth electrodes 45a and 45f and the third and fourth electrodes 45c and 45d are common to each other as shown in FIG.

The insulator 33 is formed in the shape of a circular cap having a periphery portion formed of synthetic resin or the like and having a central portion penetrated therethrough. In this case, the inner side of the periphery of the insulator 33 is engaged with the outer side of the second diaphragm 19 to be engaged.

The circuit board 35 is mounted on the periphery of the insulator 33 on the insulator 33. The circuit board 35 has on its surface first through sixth output terminals 39a, 39b, 39c, 39d, 39e, 39f of a thin film of metal such as aluminum, copper or silver. The first to sixth output terminals 39a, 39b, 39c, 39d, 39e, 39f are connected to the first to sixth electrodes 45a, 45b, 45c 45d) 45e, 45f.

The pressure transducer according to the above-described configuration is transmitted to the second diaphragm 19 through the rod 25 when pressure is applied to the first diaphragm 13 from the outside. Since the first diaphragm 13 has a thin thickness between the center portion and the outer circumferential portion by the first trench 15, the first diaphragm 13 is easily deformed by the pressure applied from the outside. Then, the rod 25 transmits the bending deformation of the first diaphragm 13 to the second diaphragm 19. The guide tube 27 has first and second protrusions 17 and 23 formed at both ends thereof in the first and second diaphragms 13 and 19 with the rod 25 inserted therein, Is inserted to prevent the rod 25 from being separated from the first and second diaphragms 13 and 19. Since the rod 25 is made of stainless steel or ceramics such as alumina (Al 2 O 3 ), the pressure applied to the first diaphragm 13 is transmitted to the second diaphragm 19 in real time to reduce the response time So that the strength of the pressure can be precisely measured. In addition, since the liquid material harmful to the human body does not flow out even if the first diaphragm 13 is damaged, it is possible to prevent the user from being adversely affected.

The second diaphragm 19 is deformed in the vertical direction due to the stress generated by the pressure transmitted through the rod 25. The second diaphragm 19 is deformed in the vertical direction by the second trench 21 It is easily deformed. The first and second substrates 43a and 43b formed on the second diaphragm 19 are also deformed in the vertical direction so that the first and third resistors 47a and 47c are reduced in length, And the second and fourth resistors 47b and 47d are reduced in width to increase the resistance value. Accordingly, the deformed resistance values of the first to fourth resistors 47a, 47b, 47c and 47d are the same as those of the first to sixth electrodes 45a, 45b, 45c, 45d, 45e and 45f And transmitted to the first to sixth electrodes 45a, 45b, 45c, 45d, 45e, and 45f through the wire 41. [

7 is a cross-sectional view of a pressure transducer according to another embodiment of the present invention.

The pressure transducer according to another embodiment of the present invention is characterized in that the first projection 17 of the first diaphragm 11 is formed with a projection at a central portion thereof and the rod 25 is formed at a central portion of the first projection 17 The portion corresponding to the projection has a concave groove. Thus, the first diaphragm 11 is inserted and engaged with the projection of the first projection 17 in the concave groove of the rod 25.

The guide tube 27 'is formed so as to fit only a part of the portion of the rod 25 which is in contact with the second projection 23 of the second diaphragm 19. The rest of the configuration is the same as that of the embodiment of the present invention.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Will be apparent to those of ordinary skill in the art.

11: body 13: first diaphragm
15: first trench 17: first protrusion
19: second diaphragm 21: second trench
23: second protrusion 25: rod
27: guide tube 29: sensing part
31a, 31b: first and second strain gauges
33: insulator 35: circuit board
39a, 39b, 39c, 39d, 39e, 39f: first to sixth output terminals
43a, 43b: first and second substrates
45a, 45b, 45c, 45d, 45e, 45f: first to sixth electrodes
47a, 47b, 47c, and 47d: first to fourth resistors

Claims (7)

A body formed in a cylindrical shape having a through hole,
A first protrusion having a circular shape is formed at one end of the body so as to cover the through hole and extends to the inside of the through hole at the center portion so that a first trench of a columnar shape is formed between the center portion and the outer circumferential portion, A first diaphragm which is easily deformed by a pressure applied from the outside opposite to the first projection,
A circular second protrusion facing the first protrusion is formed at the other end of the body so as to close the through hole and extends in the center of the through hole to reduce the thickness between the center portion and the outer circumferential portion, A second diaphragm in which a second trench is formed in which a pressure applied to the first diaphragm is transmitted to form two trenches,
A rod positioned in contact with the first and second projections formed respectively opposite to the first and second diaphragms,
And a sensing unit formed on the second diaphragm and measuring a magnitude of a pressure applied to the first diaphragm in accordance with a change in resistance value of the strain gauge caused by a bending deformation of the second diaphragm.
The pressure transducer according to claim 1, wherein the body is formed of titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel or precipitation hardening stainless steel.
The pressure transducer according to claim 1, further comprising a protective layer formed on a surface exposed to the outside, opposite to the first protrusion of the first diaphragm.
The pressure transducer according to claim 3, wherein the protective layer is formed of TiN, TiC or Al 2 O 3 by a chemical vapor deposition method or a plasma deposition method.
The pressure transducer according to claim 1, further comprising a guide tube formed in a cylindrical shape such that the first and second projections are inserted into both ends of the rod while the rod is inserted.
The rod according to claim 5, wherein the rod is made of a titanium alloy stainless steel, Inconel, Hastelloy stainless steel, martensitic stainless steel, austenitic stainless steel, or precipitation hardening type which is a material having the same or similar thermal expansion coefficient as the material constituting the body Pressure transducer formed of stainless steel.
The sensor of claim 1, wherein the sensing unit includes first and second strain gauges, an insulator, and a circuit board formed on a second diaphragm,
The first and second strain gauges are formed on the first and second substrates such that the first to sixth electrodes and the first to fourth resistors have a wheatstone bridge configuration,
The insulator is formed in a circular cap shape having a periphery portion through which a central portion is penetrated by a synthetic resin,
Wherein the circuit board is mounted on the periphery of the insulator and the first to sixth output terminals of the thin film are formed of a conductive metal on the surface and are electrically connected to the first to sixth electrodes respectively by conductive wires.
KR1020150048593A 2015-04-06 2015-04-06 Pressure transducer KR101760561B1 (en)

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KR101760561B1 true KR101760561B1 (en) 2017-07-24

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009109313A (en) 2007-10-30 2009-05-21 Denso Corp Pressure-temperature compound sensor
JP2011141223A (en) * 2010-01-08 2011-07-21 Seiko Epson Corp Pressure sensing unit and pressure sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009109313A (en) 2007-10-30 2009-05-21 Denso Corp Pressure-temperature compound sensor
JP2011141223A (en) * 2010-01-08 2011-07-21 Seiko Epson Corp Pressure sensing unit and pressure sensor

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