KR20160102761A - Magnetic levitation module And Linear motor comprising the magnetic levitation module - Google Patents

Abstract

The present invention relates to a maglev module. An electromagnet unit including a core and a coil and a plurality of first permanent magnets are formed on a lower side of an upper plate member. A plurality of second and third permanent magnets are formed on an upper side of a lower plate member. A control unit controls direction or intensity of current flowing in the coil. The core includes a ferroelectric body for reinforcing magnetic interaction between the electromagnet unit and the third permanent magnets. According to the present invention, since the core includes the ferromagnetic body for reinforcing the magnetic interaction between the electromagnet unit and the third permanent magnets, a magnetic flux line generated by the coil is further concentrated on the core in comparison with an existing technology not including the ferromagnetic body in a core when the current with the same intensity is supplied to the coil, and thus a controlled levitation force using the electromagnet unit is strongly generated. Therefore, under a limited specification and a condition restricting the intensity of the current flowing in the coil, the controlled levitation force to offset a load change in response to the load change applied between the upper and lower plate members is widely exhibited, so stronger stiffness is formed in comparison with the existing technology.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a linear motor including a magnetic levitation module and a magnetic levitation module,

The present invention relates to a magnetic levitation module and to a magnetic levitation module capable of providing a magnetic bearing capable of replacing an air bearing used in a contactless linear motor of a motion stage or the like.

Unlike a rotary motor, a linear motor is a driving device that directly generates a linear driving force. The linear motor has a stator and a mover, and the mover is moved by an electromagnetic force generated between the stator and the mover. The linear motor does not need a mechanical conversion system as compared with the rotary type motor, so there is little energy loss and noise caused by friction, and it is possible to perform a high-speed response and precise position control with a relatively simple structure, XY) stage and so on.

Fig. 1 shows an example of such a linear motor. This linear motor includes a body part 1, a guide rail 3 mounted on the surface of the body part 1, a stator 4 as a permanent magnet fixed to the body part, A conveying unit 5 mounted so as to be slidable along the longitudinal direction of the rail 4 and a mover 6 as a coil coupled to the conveying unit 5. [ Therefore, when the current is supplied to the mover 6 as a coil, the linear motor 1 generates an electromagnetic force between the mover 6 and the stator 4, which is a permanent magnet, It is possible to perform a linear reciprocating motion along the guide rail 4. [

However, in the case of the conventional linear motor 1, since the guide rail 3 uses a contact bearing such as a rolling bearing or a sliding bearing, A considerable frictional force is generated in the guide rail 3 to increase heat and noise due to friction so that the life of the guide rail 3 is shortened to several months and the guide rail 3 is lifted, There is a problem in that a large amount of maintenance is required for maintenance.

In order to compensate for the problem of the contact type bearing, in the case of the conventional linear motor according to another embodiment, air, which is a type of non-contact type bearing which prevents contact between the transfer part 5 and the guide rail 3 by spraying air, Bearings are also used.

However, in the case of the air bearing, there is a problem that the environment in which the air bearing is used is contaminated by the foreign substances contained in the air, which is not suitable for use in an environment free from other pollution.

Further, in the case of the air bearing, there is a problem that it is not suitable for use in an environment requiring a vacuum.

In order to solve the problem of the above-mentioned contact type bearing and the problem of the air bearing, a magnetic bearing which is a kind of non-contact type bearing may be considered, but the permanent magnet 9 and the electromagnetic parts 7, There is a problem in that it is difficult to satisfy the load capacity and rigidity required for the specification of the limited bearing in the case of one embodiment of the conventional magnetic bearing 6 having the configuration.

Here, the load capacity means a load that can be supported by the bearing, and the stiffness is a ratio of a displacement amount between the upper plate and the lower plate to a force applied to at least one of the upper plate and the lower plate, Means the ratio reciprocal (N / um).

In the non-contact type bearing, strong rigidity is required so that the distance between the conveyance portion and the guide rail can be kept constant in response to the change of the load applied to the bearing in accordance with the movement of the conveyance portion and acceleration / deceleration.

As the rigidity becomes weaker, the distance between the conveying portion and the guide rail becomes difficult to keep constant, and the conveying portion becomes sluggish in accordance with the change of the load applied to the bearing due to the movement of the conveying portion and acceleration / deceleration.

In the case of the above-described air bearing, since it is easy to adjust the air injection pressure exerted on the basis of the unit air injection amount by adjusting the size of the hole through which the air is injected, it is easy to satisfy the required load capacity and rigidity.

On the other hand, in the case of the conventional magnetic bearing 6, in order to enhance the load capacity and rigidity, the size of the permanent magnet and the coil 9 of the electromagnetic coil must be wound a large number, so that even if the required load capacity and rigidity are satisfied, It is difficult to satisfy the standard.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and its object is to provide a magnetic levitation module capable of increasing the load capacity and rigidity.

In order to achieve the above object, a magnetic levitation module according to the present invention is characterized in that a virtual X-axis, a Y-axis and a Z-axis are orthogonal to each other, and the upper plate member and the lower plate member are spaced apart from each other along the Z- And the lower plate member is controlled by a control unit, wherein a lower end of the upper plate member is provided with a core protruding along the Z-axis direction, and a coil surrounding the outer periphery of the core, ; And a plurality of first permanent magnets spaced apart from each other with the electromagnet portion interposed therebetween, wherein a permanent magnet corresponding to each of the first permanent magnets is provided on the upper side of the lower plate member, A plurality of second permanent magnets arranged to act; And a third permanent magnet corresponding to the electromagnetic portion, the third permanent magnet being arranged to magnetically interact with the electromagnetic portion, wherein the control portion controls the direction of the current flowing through the coil or the intensity of the current Wherein the core comprises a ferromagnetic body for enhancing magnetic interaction between the electromagnet part and the third permanent magnet.

Here, it is preferable that a fourth permanent magnet constituting a Halbach magnet array in cooperation with the second permanent magnet and the third permanent magnet is provided on the upper side of the lower plate member.

Here, it is preferable that the magnetization directions of the first permanent magnet, the second permanent magnet and the third permanent magnet are the Z-axis direction, and the magnetization direction of the fourth permanent magnet is the Y-axis direction.

Here, a distance sensor unit for obtaining distance information between the upper plate member and the lower plate member is provided at one side, and the control unit controls the distance between the upper plate member and the lower plate member based on distance information obtained by the distance sensor unit, It is desirable to have a function of adjusting the distance between the two.

A guide portion formed to be long along the X-axis direction; A stator which is coupled to the guide portion and is elongated along the longitudinal direction of the guide portion, a mover which is arranged to reciprocate along the longitudinal direction of the stator and which is electromagnetically interacted with the stator, And a transfer unit coupled to the mover and configured to reciprocate along the longitudinal direction of the guide unit. The linear motor includes the magnetic levitation module, wherein the magnetic levitation module includes the second permanent magnet and the second permanent magnet, The third permanent magnet is provided on the upper side of the guide portion and the electromagnetic portion and the first permanent magnet are provided on the lower side of the transfer portion so that the transfer portion is supported in the Z- It may be operated by a magnetic bearing.

According to the magnetic levitation module of the present invention, since the core includes the ferromagnetic body for enhancing the magnetic interaction between the electromagnet part and the third permanent magnet, when the current of the same intensity is supplied to the coil, The magnetic flux lines generated by the coils are more concentrated on the core than in the conventional technique, and therefore, there is an effect that the strength of the control portion using the electromagnet portion can be strongly generated.

The above-mentioned magnetic levitation module has a function to control the load of the control part which can offset the change in the load corresponding to the change in the load acting between the upper plate member and the lower plate member under a condition that the intensity of the current that can flow to the coil is limited. As a result, it is possible to form a stronger rigidity as compared with the conventional technique.

1 is a sectional view showing an example of a conventional linear motor.
2 is a cross-sectional view illustrating a conventional magnetic bearing structure.
3 is a conceptual diagram illustrating a configuration of a magnetic levitation module according to an embodiment of the present invention.
4 is a view showing a magnetic levitation module according to an embodiment of the present invention.
5 is a rear view of the upper plate member and a plan view of the lower plate member shown in Fig.
6 is a cross-sectional view illustrating the structure of the magnetic levitation module shown in FIG.
FIG. 7 is a view for explaining the influence of a Halbach magnet array provided on the upper side of the lower plate member shown in FIG. 4 on the magnetic flux.
8 is a view for explaining the magnetic flux distribution generated by the magnetic levitation module shown in FIG.
9 is a sectional view showing a linear motor including a magnetic levitation module according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to the drawings. It is to be noted that the same elements among the drawings are denoted by the same reference numerals whenever possible. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprises" or "having" and the like are used to specify that there is a feature, a number, a step, an operation, an element, a component or a combination thereof described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Spatially relative terms such as " lower ", "upper ", " side ", and the like are used to easily describe one member or components and other members or components Spatially relative terms should be understood to include, in addition to the directions shown in the drawings, terms that include different orientations of the elements at the time of use or operation. For example, when reversing a member shown in the figure, Quot; upper "of the other member may be placed" lower " of the other member. Thus, by way of example, the term "upper" may include both downward and upward directions. , So that spatially relative terms can be interpreted according to orientation.

FIG. 3 is a conceptual diagram illustrating the configuration of a magnetic levitation module according to an embodiment of the present invention. FIG. 4 is a diagram illustrating a magnetic levitation module according to an embodiment of the present invention, And FIG. 6 is a cross-sectional view illustrating the structure of the magnetic levitation module shown in FIG.

In the present embodiment, the direction away from the members or the direction of movement will be described with reference to a three-dimensional rectangular coordinate system for convenience of explanation. In the three-dimensional Cartesian coordinate system, the virtual X-axis, Y-axis, and Z-axis are orthogonal to each other.

3 to 6, the magnetic levitation module 100 according to the embodiment of the present invention is configured to allow the distance between the upper plate member 10 and the lower plate member 40, which are spaced apart from each other along the Z axis, A first permanent magnet 30, a second permanent magnet 50, a third permanent magnet 60, a fourth permanent magnet 70, and a second permanent magnet 70. The first permanent magnet 30, A control unit 80, and a distance sensor unit 90.

The upper plate member 10 and the lower plate member 40 are formed of a material through which a magnetic flux path passes and a magnetic flux path can be formed. In the present embodiment, the upper plate member 10 and the lower plate member 40 are formed of a steel plate.

The electromagnet portion 20 is a portion that generates a force capable of adjusting the distance between the upper plate member 10 and the lower plate member 40 by electromagnetic interaction with the third permanent magnet 60 , A core (21) and a coil (22).

The core 21 protrudes along the lower side of the top plate member 10, that is, along the negative direction of the Z axis, and is a portion extending long along the longitudinal direction of the top plate member 10.

The core 21 includes a ferromagnetic body for enhancing magnetic interaction between the electromagnetic portion 20 and the third permanent magnet 60.

Specifically, the ferromagnetic material used for the core 21 is a metal having a high permeability. When a current flows through the coil 22, the generated electromagnetic force lines are not scattered to the outside of the core 21, 21).

Therefore, the magnetic interaction between the electromagnetic portion 20 and the third permanent magnet 60 located under the core 21 is strengthened.

In this embodiment, the ferromagnetic material used for the core 21 is made of an iron core, but is not limited thereto.

remind 　 The coil 22 is a coil wound around the outer periphery of the core 21, so that a current flows so that a magnetic force can be generated.

Here, depending on the direction of the current flowing through the coil 22, the direction of the magnetic force lines acting on the electromagnetic portion 20 may be the positive direction of the Z axis or the negative direction of the Z axis.

In the present embodiment, as shown in Fig. 5, the electromagnetic portion 20 is provided along the X-axis direction.

The first permanent magnets (30) are permanent magnets which are provided with a plurality of them and are spaced apart from each other with the electromagnetic portion (20) therebetween.

The first permanent magnet 30 is fixed to the second permanent magnet 30 in order to generate a load capacity for supporting the top plate member 10 in the positive direction of the Z axis so that the top plate member 10 can be separated from the bottom plate member 40, And magnetically interacts with the magnet 50.

In this embodiment, as shown in FIG. 5, the first permanent magnets 30 are provided on the both sides of the electromagnetic portion 20, respectively.

The second permanent magnet 50 is a permanent magnet corresponding to each of the first permanent magnets 30 and disposed on the upper side of the lower plate member 40 so that a repulsive force acts on the first permanent magnets 30 .

Here, the magnetization directions of the first permanent magnet 30 and the second permanent magnet 50 are the Z-axis direction in which the upper plate member 10 and the lower plate member 40 are spaced apart. However, the magnetizations of the first permanent magnet 30 and the second permanent magnet 50 are opposite to each other so that a repulsive force acts therebetween. 6, if the magnetization direction of the first permanent magnet 30 is the negative direction of the Z axis, the magnetization direction of the second permanent magnet 50 becomes the positive direction of the Z axis.

Here, the magnetization direction means a direction in which the magnetic force lines advance. 6, if the first permanent magnet 30 is magnetized in the negative direction of the Z axis, the S pole is disposed at the upper end of the first permanent magnet 30, The N pole is disposed at the lower end of the armature 30, and the magnetic force lines are directed toward the negative direction of the Z axis.

The third permanent magnet 60 is a permanent magnet corresponding to the electromagnet 20 and is arranged on the upper side of the lower plate 40 so as to magnetically interact with the electromagnet 20.

Here, the magnetization direction of the third permanent magnet 60 is the Z axis direction in which the upper plate member 10 and the lower plate member 40 are spaced apart. The third permanent magnet 60 is magnetized in a direction opposite to the magnetization direction of the second permanent magnet 50 so that the magnetic force lines advancing from the second permanent magnet 50 can enter. 6, if the magnetization direction of the second permanent magnet 50 is the positive direction of the Z axis, the magnetization direction of the third permanent magnet 60 becomes the negative direction of the Z axis.

The fourth permanent magnets 70 are permanent magnets constituting a Halbach magnet arrangement in cooperation with the second permanent magnets 50 and the third permanent magnets 60 and are arranged on the upper side of the lower plate member 40 Respectively.

Here, the fourth permanent magnet 70 is magnetized in the Y-axis direction and disposed between the second permanent magnet 50 and the third permanent magnet 60. Each of the fourth permanent magnets 70 disposed on the left and right sides with respect to the third permanent magnets 60 is magnetized in opposite directions to each other.

In this embodiment, the fourth permanent magnets 70 on the left side of the third permanent magnet 60 are magnetized in the negative direction of the Y axis, and the fourth permanent magnets 70 on the right side of the third permanent magnet 60 ) Is magnetized in the positive direction of the Y-axis.

7 is a view for explaining the influence of the Halbach magnet array provided on the upper side of the lower plate member 40 on the magnetic flux.

7A is a view showing the distribution of magnetic flux when only the second permanent magnet 50 and the third permanent magnet 60 are arranged on the upper side of the lower plate member 40. FIG. On the left side of the third permanent magnet 60, magnetic flux lines are formed in a clockwise direction. On the right side of the third permanent magnet 60, magnetic flux lines are formed in a counterclockwise direction.

7 (b) is a diagram showing the magnetic flux distribution when only two fourth permanent magnets 70 are arranged on the upper side of the lower plate member 40. In Fig. On the upper portion of the fourth permanent magnet 70 disposed on the left side, magnetic flux lines are formed in a clockwise direction, and magnetic flux lines are formed in a lower portion thereof in a counterclockwise direction. A magnetic flux line is formed in a counterclockwise direction on the upper side of the fourth permanent magnet 70 disposed on the right side and a magnetic flux line is formed in a clockwise direction below the fourth permanent magnet.

7C shows a configuration in which a Halbach magnet array constituted by the second permanent magnet 50, the third permanent magnet 60 and the fourth permanent magnet 70 is formed on the upper side of the lower plate member 40 , And FIG. Based on the magnetic flux distributions shown in Figs. 7A and 7B, the magnetic fluxes on the permanent magnets 50, 60 and 70 are strengthened by the magnetic flux lines formed in the same direction And the magnetic fluxes above the permanent magnets 50, 60, and 70 are weakened by magnetic flux lines formed in opposite directions to each other.

That is, by arranging a Halbach magnet array on the upper side of the lower plate member 40, a high magnetic flux density can be formed on the upper side of the lower plate member 40.

The controller 80 is a module configured to control the direction of a current or the intensity of a current flowing through the coil 22 of the electromagnet 20.

Specifically, the direction of the magnetic force lines generated in the electromagnetic portion 20 is the positive direction of the Z-axis or the negative direction of the Z-axis, depending on the direction of the electric current flowing in the coil 22, The intensity of the magnetic field generated in the electromagnet 20 increases.

The control unit 80 controls the third permanent magnet 60 so that the direction of the magnetic force lines generated by the electromagnet unit 20 becomes larger than the direction of the magnetic force lines generated by the third permanent magnet 60, A current flows in the coil 22 so that the direction of the Z axis is opposite to the direction of magnetization of the Z axis. The control unit 80 increases / decreases the intensity of the current flowing through the coil 22 to adjust the distance between the upper plate member 10 and the lower plate member 40 faster / slower.

The distance sensor unit 90 is provided at one side of the upper plate member 10 and the lower plate member 40 as a sensor for acquiring distance information. The distance sensor unit 90 senses the first distance D1 between the upper plate member 10 and the lower plate member 40 which are spaced apart from the first time point T1 and transmits the distance D1 information to the control unit 80).

The controller 80 receives the first distance (D1) information sensed by the distance sensor 90. Based on the first distance D1 information and the second distance D2 between the top plate member 10 and the electromagnet portion 20 which must be spaced apart from the second time point T2, And calculates the current direction and current intensity to be supplied to the coil 22. In addition, the control unit 80 controls the current to flow through the coil 22 according to the calculated current direction and current intensity.

Meanwhile, the magnetic levitation module 100, which is an embodiment of the present invention, may be included in the linear motor 200 shown in FIG.

The linear motor 200 includes a body portion 210, a guide portion 220, a stator 230, a transfer portion 240, a mover 250, and magnetic levitation modules 100a, 100b, and 100c .

When describing an embodiment of the linear motor 200, the longitudinal directions mentioned refer to the X-axis orthogonal to the Y-axis and the Z-axis, respectively.

The body 210 is a portion of the body of the linear motor 200, which is fixed to the floor of the workplace.

The guide part 220 is a part serving as a guide so that the conveying part 250 can reciprocate along the X-axis direction, and a plurality of guide parts 220 are mounted on the surface of the body part 210. Here, the guide portion 220 has a protruding portion whose cross-sectional shape corresponding to the upper portion of the inverted triangle is elongated along the X-axis direction.

The stator 230 is a device for forming a magnetic field including a permanent magnet, and is coupled to the body 210.

The conveying unit 240 is a plate-shaped member that is reciprocally movable along the longitudinal direction of the guide unit 220. Here, the conveying unit 240 is provided with a plurality of grooves which can be inserted into the projecting portions of the plurality of guide units 220 provided.

The mover 250 is a member having a coil (not shown) incorporated therein and interacting with the stator 230 in an electromagnetic manner, and is arranged to be reciprocally movable along the length direction of the stator 230.

Since the mover 250 and the transfer unit 240 are coupled to each other, the mover 250 reciprocates along the longitudinal direction of the stator 230, so that the transfer unit 240 can move in the longitudinal direction of the guide unit 220 .

The magnetic levitation modules 100a, 100b and 100c are magnetic bearings disposed between the guide part 220 and the transfer part 240. The electromagnetic part 20 and the first permanent magnet 30 are connected to the transfer part 240, And the second permanent magnet 50, the third permanent magnet 60 and the fourth permanent magnet 70 are coupled to the upper side of the guide portion 220. That is, in the linear motor 200, the transfer unit 240 can be seen as an example of the upper plate member 10, and the guide unit 220 can be seen as an example of the lower plate member 40.

Specifically, three magnetic levitation modules 100a, 100b, and 100c are disposed on each of the three corners constituting the upper part of the inverted triangle, which is the sectional shape of the groove part of the transfer part 240 and the protruding part of the guide part 220, respectively.

The magnetization directions of the first permanent magnet 30, the second permanent magnet 50 and the third permanent magnet 60 constituting the magnetic levitation modules 100a, 100b and 100c are Z1 Z2 and Z3 directions and the magnetization directions of the fourth permanent magnets 70 are in the Y1, Y2 and Y3 axis directions in the order of 100a, 100b and 100c.

Each of the magnetic levitation modules 100a, 100b and 100c supports the transfer unit 240 in the positive direction of the Z1, Z2 and Z3 axes in the order of 100a, 100b and 100c, .

In the present embodiment, three magnetic levitation modules are provided because the grooves of the transfer unit 240 and the protruding portions of the guide unit 220 have three sectional edge shapes. However, But it may be varied depending on the shape of the conveying portion and the guide portion.

Heat may be generated in the coil 22 depending on the intensity of the current flowing through the coil 22. When excessive heat is generated in the coil 22, the permanent magnets 30, 50, 60, A potato phenomenon in which the intensity of the electric field is attenuated may occur.

The potato phenomenon in the permanent magnets 30, 50, 60 and 70 may cause a problem that the load capacity for separating the upper plate member 10 and the lower plate member 40 and the control unit load using the electromagnetic portion 20 are weakened have.

Therefore, the intensity of the current that can flow into the coil 22 is limited.

The magnetic levitation module 100 of the above-described configuration includes the coil 22 since the core 21 includes the ferromagnetic material for enhancing the magnetic interaction between the electromagnetic portion 20 and the third permanent magnet 60. Therefore, The magnetic flux lines generated by the coils 22 are more concentrated on the core 21 as compared with the conventional technique in which the core 21 does not include the ferromagnetic material when the current of the same magnitude is applied to the electromagnet 20 ) Of the control unit can be generated strongly.

The magnetic levitation module 100 is capable of generating a magnetic field in response to a change in load acting between the upper plate member 10 and the lower plate member 40 under a condition that a limited standard and an intensity of a current that can be passed through the coil 22 are limited The strength of the control portion capable of canceling the change in the load can be widely exerted, so that there is an advantage that stronger rigidity can be formed as compared with the conventional technique.

8A shows a case where the magnetic levitation module 100 having the above-described configuration does not include a ferromagnetic substance in the core 21 portion but does not include the fourth permanent magnet 70 and does not constitute a Halbach magnet array FIG. 2 is a view showing the magnetic flux distribution at the time of

8B is a diagram showing the magnetic flux distribution when the core 21 includes a ferromagnetic substance in comparison with the configuration shown in FIG. 8A. FIG. Compared with the magnetic flux distribution shown in FIG. 8A, it can be seen that the magnetic flux is gathered in the core 21 portion when the ferromagnetic body is included in the core 21 portion.

On the other hand, when a ferromagnetic material is included in the core 21 portion, attraction force between the ferromagnetic material included in the core 21 and the permanent magnets 50, 60, and 70 provided on the upper side of the lower plate member 40 Lt; / RTI > The attracting force can weaken the load capacity of separating the upper plate member 10 and the lower plate member 40 from each other by a repulsive force acting between the first permanent magnet 30 and the second permanent magnet 50 have.

The magnetic levitation module 100 having the above-described structure is constructed by arranging, on the upper side of the lower plate member 40, a first permanent magnet 50 and a third permanent magnet 60 constituting a Halbach magnet array in cooperation with the third permanent magnet 60 The relatively large magnetic flux is formed on the upper side of the lower plate member 40 by the combination of the small permanent magnets 50, 60 and 70 so that the magnetic flux generated by the ferromagnetic material included in the core 21 The upper plate member 10 and the lower plate member 40 can be separated from each other. In addition, since strong magnetic flux is also formed in the third permanent magnet 60 corresponding to the electromagnetic portion 20, there is an advantage that the strength of the control portion is also strengthened.

8C is a view showing the magnetic flux distribution when the fourth permanent magnet 70 constituting the Halbach magnet array is included in comparison with the configuration shown in FIG. 8B. It can be confirmed that a denser magnetic flux is formed on the upper side of the lower plate member 40 as compared with the magnetic flux distribution shown in Fig. 8B.

Since the magnetization directions of the first permanent magnet 30, the second permanent magnet 50 and the third permanent magnet 60 are in the Z-axis direction, the magnetic levitation module 100 of the above- 30 and the second permanent magnets 50 face each other along the Z-axis direction, and a load capacity which is a force for separating the upper plate member 10 and the lower plate member 40 from each other is Z There is an advantage that it is strengthened around the axial direction.

Since the magnetization direction of the fourth permanent magnet 70 is in the Y-axis direction perpendicular to the Z-axis, the magnetic flux line caused by the fourth permanent magnet 70 is in the second permanent The magnetic flux lines formed by the magnet 50 and the third permanent magnet 60 are cooperatively formed to form a flux path densely arranged above the lower plate member 40 so that the upper plate member 10 and the lower plate member 40 are spaced apart from each other It has the advantage of forming a magnetic field that strengthens the load capacity.

The magnetic levitation module 100 is provided with a distance sensor unit 90 for acquiring distance information between the upper plate member 10 and the lower plate member 40, Since it is provided with a function of adjusting the distance between the upper plate member 10 and the lower plate member 40 based on the distance information obtained by the distance sensor unit 90, The intensity and direction of the electric current to be applied to the coil 22 of the electromagnet portion 20 are calculated by using the first distance D1 information and the second distance D2 required at the second time point T2

The distance between the upper plate member 10 and the lower plate member 40 can be controlled quickly and effectively.

The linear motor 200 having the above-described structure is used as a magnetic bearing for supporting the magnetic levitation module 100 in the Z-axis direction so that the transfer portion 240 does not contact the guide portion 220, It is possible to exert a strong rigidity that can compensate for the change in the load applied to the bearing in accordance with the movement and acceleration / deceleration of the bearing 240, and in comparison with a linear motor including a conventional air bearing, There is an advantage that it can be used.

On the other hand, in a conventional linear motor using an air bearing, it is possible to regulate the control force of the control unit by controlling the air injection pressure. However, due to the characteristics of air which is difficult to quickly change the pressure, There is a problem in that it is difficult to actively and quickly adjust the control unit gravity.

On the contrary, the linear motor 200 can adjust the control unit force by controlling the intensity and direction of the current applied to the coil 22, and the intensity and direction of the current can change in response to the control signal quickly The control unit can be actively and quickly adjusted in response to a change in the load, which changes rapidly according to the acceleration / deceleration of the transfer unit 240, and the like.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention.

[Description of Reference Numerals]
100: magnetic levitation module (100) 10: top plate member (10)
20: electromagnetic part (20) 21: core (21)
22: coil (22) 30: first permanent magnet (30)
40: lower plate member (40) 50: second permanent magnet (50)
60: third permanent magnet (60) 70: fourth permanent magnet (70)
80: control unit (80) 90: distance sensor unit (90)
200: Linear motor (200) 210: Body part (210)
220: guide part 220: 230: stator 230:
240: transfer unit 240: 250:

Claims (5)

Wherein the virtual X-axis, the Y-axis, and the Z-axis are orthogonal to each other, and the upper plate member and the lower plate member are spaced apart from each other along the Z-axis by a magnetic force, and a distance between the upper plate member and the lower plate member, As a module,
On the lower side of the upper plate member,
An electromagnet portion having a core protruding along the Z-axis direction and a coil surrounding an outer periphery of the core; And
And a plurality of first permanent magnets spaced apart from each other with the electromagnet portion interposed therebetween,
On the upper side of the lower plate member,
A plurality of second permanent magnets corresponding to each of the first permanent magnets, the plurality of second permanent magnets being disposed so that a repulsive force acts on the first permanent magnets; And
And a third permanent magnet corresponding to the electromagnetic portion, the third permanent magnet being arranged to magnetically interact with the electromagnetic portion,
Wherein,
A direction of a current flowing to the coil, or an intensity of a current,
Wherein the core comprises a ferromagnetic body for enhancing magnetic interaction between the electromagnet part and the third permanent magnet. The method according to claim 1,
On the upper side of the lower plate member,
And a fourth permanent magnet constituting a Halbach magnet array in cooperation with the second permanent magnet and the third permanent magnet. 3. The method of claim 2,
The magnetization directions of the first permanent magnet, the second permanent magnet and the third permanent magnet are the Z-axis direction,
And the magnetization direction of the fourth permanent magnet is the Y-axis direction. The method according to claim 1,
A distance sensor unit for obtaining distance information between the upper plate member and the lower plate member,
Wherein the control unit has a function of adjusting a distance between the upper plate member and the lower plate member based on the distance information obtained by the distance sensor unit. A guide part formed to be long along the X-axis direction according to claim 1; A stator which is coupled to the guide portion and is elongated along the longitudinal direction of the guide portion, a mover which is arranged to reciprocate along the longitudinal direction of the stator and which is electromagnetically interacted with the stator, A linear motor coupled to the mover and configured to reciprocate along the longitudinal direction of the guide,
A magnetic levitation module comprising:
Wherein the magnetic levitation module is configured such that the second permanent magnet and the third permanent magnet are provided on the upper side of the guide portion and the electromagnetic portion and the first permanent magnet are provided on the lower side of the transfer portion, Wherein the linear motor is operated by a magnetic bearing supporting in the Z-axis direction according to claim 1 so as not to contact the guide part.

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