KR20160094495A - Burner for Scrubber - Google Patents

Abstract

According to the present invention, disclosed is a burner for a scrubber, which comprises: a first burner treating exhaust gas by supplying first fuel gas in which an oxidizing agent having air and oxygen and fuel are mixed to a first combustion space formed in an internal side; and a second burner having a second combustion space placed in a lower portion of the first burner to be connected to the first combustion space in an internal side, and treating exhaust gas flowing from the first burner by supplying second fuel gas in which an oxidizing agent having air and fuel are mixed to the second combustion space formed in an internal side.

Description

Burner for Scrubber [0002]

FIELD OF THE INVENTION The present invention relates to a burner for a scrubber used in exhaust gas treatment in an electronic industrial process.

Exhaust gases generated in electronic manufacturing processes such as semiconductor production processes, LCD production processes, and OLED production processes are composed of a mixture of VOC, PFC gas, moisture and other foreign substances. Particularly, PFC gas is one of the gas components generated during the semiconductor etching process and chemical vapor deposition process, and is known as a gas promoting global warming. In addition, PFC gas is a very stable gas and is known as a gas which can not be decomposed when it is treated. The PFC gas contained in the exhaust gas is treated by a scrubber of a heating system, an adsorption system or a plasma system.

The heating method is the most commonly used method for treating PFC gas. The conventional heating method uses oxygen as an oxidizing agent to heat and decompose the exhaust gas at a temperature of about 1300 degrees Celsius or more to cause nitrogen and oxygen contained in the exhaust gas to react with each other to generate a large amount of nitrogen oxides as harmful substances . Further, in recent years, the emission standards of nitrogen oxides contained in the exhaust gas have been strengthened, necessitating reduction of nitrogen oxides.

The present invention provides a burner for a scrubber that improves treatment efficiency of exhaust gas and reduces the generation of nitrogen oxides.

In order to achieve the above object, a burner for a scrubber according to the present invention comprises a first burner for supplying an oxidant containing air and oxygen and a first fuel gas mixed with fuel to a first combustion space formed inside, And a second combustion space located at a lower portion of the first burner and connected to the first combustion space, the second combustion gas having an oxidant containing air and a fuel mixed therein, And a second burner for supplying exhaust gas to the space and processing the exhaust gas flowing in the first burner.

In addition, the first burner may have a first fuel space in which the first fuel gas flows, an inner side opened to the first combustion space, and a second combustion space penetrating from the upper side to the lower side to form the first combustion space A first housing hole which is connected to the first housing hole of the first housing and which separates the first fuel space from the first combustion space and has a first injection hole penetrating from the outer circumferential surface to the inner circumferential surface, And a first fuel injection valve disposed between the first outer ring ring and the first injection ring of the first housing to separate the first fuel space into a first inner fuel space and a first outer fuel space, And a first guide ring having a first guide hole penetrating therethrough, wherein the second burner has a second fuel space in which the second fuel gas flows, and an inner side thereof is formed in the second combustion space Shaped second housing having a second housing hole extending from the upper side to the lower side and a second housing hole of the second housing, the second housing hole being separated from the second fuel space and the second combustion space, A second injection ring having a second injection hole penetrating from an outer circumferential surface to an inner circumferential surface thereof and a second injection ring formed in a shape corresponding to the second injection ring and positioned between the second outer ring ring and the second injection ring of the second housing, And a second guide ring that separates the fuel space into a second inner fuel space and a second outer fuel space and has a second guide hole penetrating from an outer circumferential surface to an inner circumferential surface. At this time, the first injection ring of the first burner may be formed higher than the second injection ring of the second burner. Further, the first burner can treat the exhaust gas using a flame having a temperature higher than that of the second burner.

The total area of the first guide holes is equal to or larger than the total area of the first injection holes and the area thereof is equal to or larger than that of the first injection holes, The area may be equal to or larger than the area, and each area may be formed to be equal to or larger than the second injection hole. In addition, the first injection holes of the first injection ring and the second injection holes of the second injection ring may be formed so that one unit is located at the center and a plurality of unit injection nozzles are arranged radially, have.

The first burner further includes a first supply pipe coupled to the first housing and supplying a first fuel gas to the first fuel space, the second burner coupled to the second housing, And a second supply pipe for supplying the second fuel gas to the second fuel space. The first supply pipe is coupled to the first housing in a direction perpendicular to the tangent of the first guide ring so that the first fuel gas is supplied toward the center of the first housing, And may be coupled to the second housing such that the second fuel gas is supplied in the direction of the center of the second housing by being coupled in a direction perpendicular to the tangent of the second guide ring.

The burner for a scrubber of the present invention is formed in two stages to increase the stability of the flame and increase the treatment efficiency of the exhaust gas.

In addition, the burner for a scrubber of the present invention has an effect of reducing the amount of oxygen used as an oxidizer and reducing the generation of nitrogen oxides.

In addition, the burner for a scrubber of the present invention has an effect of reducing the generation of nitrogen oxides because the exhaust gas is treated by applying the surface combustion method.

Further, since the burner for a scrubber of the present invention mixes the fuel and the oxidizing agent in advance and injects it into the combustion region, the mixing degree of the fuel and the oxidizing agent becomes high, and the flame is stably formed.

Further, since the scrubber burner of the present invention operates at a relatively low temperature as compared with the conventional oxygen burner, the time interval required for maintenance is increased.

1 is a perspective view of a burner for a scrubber according to an embodiment of the present invention.
2 is a vertical cross-sectional view of the burner for the scrubber shown in Fig.
3 is a perspective sectional view of the burner for the scrubber shown in Fig. 1
4 is a horizontal cross-sectional view of the BB of the burner for scrubber shown in Fig.
FIG. 5 is a perspective view of a scrubber including the burner for the scrubber of FIG. 1;
Figure 6 is a vertical cross-sectional view of the scrubber of Figure 5;
7 is a vertical sectional view showing the operation of the burner for a scrubber of Fig.

Hereinafter, a burner for a scrubber according to an embodiment of the present invention will be described with reference to the accompanying drawings.

First, a burner for a scrubber according to an embodiment of the present invention will be described.

1 is a perspective view of a burner for a scrubber according to an embodiment of the present invention. 2 is a vertical cross-sectional view of the burner for the scrubber shown in Fig. 3 is a perspective sectional view of the burner for a scrubber shown in Fig. 4 is a horizontal cross-sectional view of the BB of the burner for scrubber shown in Fig.

1 to 4, a scrubber burner 100 according to an embodiment of the present invention includes a first burner 200 and a second burner 300. The scrubber burner 100 may be formed by stacking a plurality of first burners 200 and a plurality of second burners 300 according to the amount of exhaust gas to be treated. The scrubber burner 100 may be formed by stacking a first burner 200 and a plurality of second burners 300 according to the amount of exhaust gas to be treated.

The scrubber burner 100 includes a first burner 200 and a second burner 300 stacked vertically so that the exhaust gas flows sequentially to the first burner 200 and the second burner 300 . The scrubber burner 100 can supply different amounts of oxygen to be supplied to the first burner 200 and the second burner 300. The first burner 200 increases the flame temperature by increasing the stability of the flame by supplying the first fuel gas having a high oxygen content, thereby increasing the treatment efficiency of the exhaust gas. The second burner 300 supplies the second combustion gas having a relatively low oxygen content to the exhaust gas through the surface combustion while reducing the temperature of the flame, thereby improving the treatment efficiency of the exhaust gas while reducing the generation of nitrogen oxides . For example, the first combustion gas supplied to the first burner 200 is formed by mixing an oxidant containing air and oxygen and a fuel, and when the same fuel is used, the oxygen content is higher than that of the second combustion gas And becomes relatively high. Also, the second combustion gas supplied to the second burner 300 does not contain oxygen, and the oxidant containing air is mixed with the fuel, so that the content of oxygen is relatively low. The air is preferably compressed dry air. Also, a fuel gas such as LNG is used as the fuel. Since the first burner 200 has a high oxygen content in the first fuel gas, the burning of the fuel proceeds fast, the length of the flame is short and stably maintained, and the second burner 300 has the oxygen content of the second combustion gas Because it is relatively low, the combustion of the fuel proceeds relatively slowly, and the length of the flame may be long and unstable. The first burner 200 also provides a flame to maintain the flame of the second burner 300 even when the flame of the second burner 300 is unstable and partially turned off. In addition, the first burner 200 has a relatively high flame temperature, so that the treatment efficiency of the exhaust gas is increased.

The first fuel gas and the second fuel gas are mixed at a predetermined ratio outside the scrubber burner 100 and supplied to the first burner 200 and the second burner 300. Therefore, since the first fuel gas and the second fuel gas are supplied to the first burner 200 and the second burner 300 in a state where the fuel and the oxidizer are uniformly mixed, the incomplete combustion of the fuel is reduced, Can be reduced.

The first burner 200 and the second burner 300 have the same or similar specific structures, and the combustion spaces to be treated with the exhaust gas have the same height or different heights. Preferably, the height of the combustion space of the second burner 200 . For example, the first burner 200 may have a relatively low height and the second burner 300 may have a relatively high height. The first burner 200 heats the exhaust gas at a high temperature and processes it in a relatively short time, and the second burner 300 treats the contact time with the exhaust gas at a relatively low temperature. The first burner and the second burner are formed of a corrosion-resistant metal such as stainless steel or an invar alloy.

The first burner 200 includes a first housing 210, a first injection ring 220, a first guide ring 230, and a first supply pipe 240. The first burner 200 is disposed at an upper portion of the burner 100 for a scrubber and includes a first combustion space 200a formed in the first injection ring 220 located inside the first housing 210, So that the exhaust gas is allowed to flow. The first burner 200 is configured to inject the first fuel gas supplied from the first supply pipe 240 into the first housing 210 through the first guide ring 230 in the first housing 210 The first injection ring 220 is sprayed with the first injection ring 220 to form a flame in the second combustion space 300a along the inner circumferential surface of the first injection ring 220. [ The first burner 200 burns exhaust gas flowing into the second combustion space 300a by using a flame. The first burner 200 supplies the burned exhaust gas to the second burner 300.

The first housing 210 is formed to include a first outer ring ring 211, a first upper ring 213 and a first lower ring 215. The first housing 210 has a first fuel space 200b through which a first fuel gas flows, an inner side opened to the first combustion space 200a, and a second housing 200b extending from the upper side to the lower side, And is formed into a ring shape having a hole 210a. The first housing hole 210a forms a first combustion space 200a. The first fuel space 200b is connected to the first combustion space 200a and allows the first combustion gas to be injected into the first combustion space 200a. The first housing 210 is formed so that the inner side facing the first outer ring ring 211 is opened so that the vertical section has a " C " shape. The first housing 210 provides a first fuel space 200b through which the first fuel gas supplied through the first supply pipe 240 flows. The first fuel gas flowing into the first housing 210 passes through the first guide ring 230 while flowing along the first fuel space 200a and flows through the first injection ring 220 into the first fuel space 200a, (200a).

On the other hand, the configuration of the reference numeral 219 is a sealing member such as a gasket that prevents the waste gas from flowing out by pushing the coupled portion when the first burner 200 is coupled to the lower portion of the waste gas inlet portion shown in FIG. 5 .

The first outer ring ring 211 is formed in a circular ring shape having a predetermined diameter and height. The first upper plate ring 213 has an outer diameter corresponding to the diameter of the first outer ring ring 211 and an inner diameter corresponding to the diameter of the first housing hole 210a. The first upper plate ring 213 is coupled to the upper portion of the first outer ring ring 211. The first lower plate ring 215 is formed in a shape corresponding to the first upper plate ring 213 and is coupled to the lower portion of the first outer plate ring 211.

The first outer ring ring 211 is formed with a first outer wall hole 211a. The first outer wall hole 211a is formed to penetrate from the outer circumferential surface to the inner circumferential surface, and the first supply pipe 240 is coupled.

The first injection ring 220 is formed in a ring shape having a predetermined thickness and height. The first injection ring 220 is formed to have a diameter corresponding to the first housing hole 210a and is coupled to the first housing hole 210a of the first housing 210. [ The first injection ring 220 is supported and coupled between the first upper plate ring 213 of the first housing 210 and the first lower plate ring. The first injection ring 220 spatially separates the first fuel space 200b from the first combustion space 200a.

The first injection ring 220 is formed with a plurality of first injection holes 220a passing from the outer circumferential surface to the inner circumferential surface. The first injection hole 220a serves as an injection nozzle for injecting the first fuel gas. The first injection hole 220a is formed so as to be distributed over the first injection ring 220 as a whole. A plurality of the first injection holes 220a preferably form a unit injection nozzle, and the unit injection nozzles may be spaced apart from each other. For example, the unit injection nozzles may be formed such that one first injection hole 220a is positioned at the center and a plurality of first injection holes 220a are radially positioned to form a flower shape as a whole. When the first injection hole 220a is formed as a unit injection nozzle, since the first fuel gas is concentrated and injected, the flame is formed over a predetermined size and stably maintained, so that the combustion of the exhaust gas can be efficiently performed .

The first guide ring 230 is formed in a ring shape corresponding to the first injection ring 220 and has a diameter larger than that of the first injection ring 220. The first guide ring 230 is positioned between the first outer ring ring 211 of the first housing 210 and the first injection ring 220 and is connected to the first upper ring 213 of the first housing 210, And the first lower plate ring (215). Accordingly, the first guide ring 230 separates the first fuel space 200b into the first inner fuel space 200c and the first outer fuel space 200d.

The first guide ring 230 is formed with a plurality of first guide holes 230a extending from the outer circumferential surface to the inner circumferential surface. The first guide hole 230a is formed so as to be distributed over the first guide ring 230 as a whole. The total area of the first guide hole 230a is preferably equal to or larger than the total area of the first injection hole 220a. The first guide hole 230a minimizes the decrease in the supply pressure of the first fuel gas in the first inner fuel space 200c divided by the first guide ring 230, So that the first fuel gas can be injected smoothly. When the total area of the first guide hole 230a is smaller than the total area of the first injection hole 220a, the pressure in the first outer fuel space 200d increases and the pressure in the first inner fuel space 200c increases. The pressure is relatively decreased and the first fuel gas may not be smoothly injected through the first injection hole 220a. In addition, the first guide holes 230a may have the same area as the first injection holes 220a. Accordingly, the number of the first guide holes 230a is greater than that of the first injection holes 220a, and the first guide holes 230a are distributed throughout the first guide ring 230 so that the fuel gas can pass smoothly. For example, the first guide hole 230a and the first injection hole 220a may have a circular shape having a diameter of 0.8 mm, and may be formed to have a larger number of the first guide holes 230a. have.

The first guide hole 230a may be formed in the first injection hole 220a located on the opposite side of the first supply pipe 240 such that the supplied first fuel gas flows along the outer circumferential surface of the first guide ring 230, So that the first fuel gas can be sufficiently supplied. In the absence of the first guide ring 230, the first fuel gas supplied from the first supply pipe 240 is supplied to the first injection ring 220 in the space adjacent to the first supply pipe 240 due to the supplied pressure, The first injection hole 220a of the first injection hole 220a has a large amount of injection and the first injection hole 220a is located on the opposite side of the first supply pipe 240. Accordingly, May not be sufficiently sprayed.

The first supply pipe 240 is coupled to the first housing 210 and supplies the first fuel gas to the first fuel space 200b. The first supply pipe 240 may be coupled to the first outer wall hole 211 a of the first outer ring ring 211. However, the first supply pipe 240 may be coupled to the first upper plate ring 213 or the first lower plate ring 215 of the first housing 210. Also, the first supply pipes 240 may be formed as a plurality of the first supply pipes 240 depending on the size of the first housing 210, and may be coupled to the first housing 210 at predetermined intervals.

The first supply pipe 240 supplies the first fuel gas in which fuel, air, and oxygen are mixed. Since the first fuel gas includes oxygen together with air as an oxidant, the stability of the flame formed along the inner circumferential surface of the first injection ring 220 is increased, and the flame temperature is increased.

The first supply pipe 240 is coupled in a direction perpendicular to the tangent of the first guide ring 230 to supply the first fuel gas toward the center of the first housing 210. The first supply pipe 240 is coupled to the tangent of the first guide ring 230 of the first housing 210 at a predetermined angle so that the first fuel gas flows into the first fuel space of the first housing 210 200b so as to flow.

The second burner 300 includes a second housing 310, a second injection ring 320, a second guide ring 330, and a second supply pipe 340.

The second burner 300 is disposed in a lower part of the first burner 200 in the burner 100 for the scrubber and is formed inside the second injection ring 320 located inside the second housing 310 And a second combustion space 300a. The second combustion space 300a is connected to the first combustion space 200a of the first burner 200 and allows exhaust gas to be burnt in the first combustion space 200a. The second burner 300 can supply the second fuel gas supplied from the second supply pipe 340 to the inside of the second housing 310 through the second guide ring 330 in the second housing 310 And is sprayed by the second injection ring 320 to form a flame in the second combustion space 300a along the inner circumferential surface of the second injection ring 320. [ The second burner 300 burns exhaust gas flowing into the second combustion space 300a by using a flame. The second burner 300 discharges the exhaust gas to be burned down.

The second housing 310 and the second injection ring 320 and the second guide ring 330 constituting the second burner 300 are connected to the first housing 210 constituting the first burner 200, 1 injection ring 220 and the first guide ring 230, respectively. It is preferable that the second injection ring 320 of the second burner 300 is formed at a height higher than that of the first injection ring 220 of the first burner 200. Since the second burner 300 processes the exhaust gas using a flame at a temperature lower than that of the first burner 200, the height of the first injection ring 220 in which the flame is formed is increased It is preferable to increase the area of the inner peripheral surface of the second injection ring 320 in which the flame is formed to increase the contact time between the flame and the exhaust gas. The height of the second housing 310 and the height of the second guide ring 330 may be correspondingly increased when the height of the second injection ring 320 is high. The second supply pipe 340 is formed in the same manner as the first supply pipe 240 of the first burner 200. Therefore, only the parts necessary for giving the reference numerals to the respective components of the second burner 300 will be described below.

The second housing 310 is formed in a ring shape having a second housing hole 310a connected to the first housing hole 210a of the first housing 210. [ The second housing 310 is formed to include a second outer ring ring 311, a second upper plate ring 313, and a second lower plate ring 315. The second outer wall ring 311 is formed to include a second outer wall hole 311a. The second housing 310 has a second fuel space 300b through which a second fuel gas flows.

The structure of the reference numeral 319 is a sealing member such as a gasket that prevents the waste gas from flowing out to the outside when the second burner 200 is coupled with the first burner 200 by pushing the coupled portion.

The second injection ring 320 is formed with a second injection hole 320a.

The second guide ring 330 is formed with a second guide hole 330a. The second guide ring 330 divides the second fuel space 300b into a second inner fuel space 300c and a second outer fuel space 300d.

The second supply pipe 340 is coupled to the second housing 310 in a direction perpendicular to the tangent of the second guide ring 330 so that the second fuel gas is supplied toward the center of the second housing 310 .

The second supply pipe 340 supplies the second fuel gas mixed with fuel and air to the second fuel space 300b. Since the second fuel gas contains only air as an oxidizing agent, the flame temperature of the flame formed along the inner circumferential surface of the second injection ring 320 is relatively lowered. Also, the second combustion gas increases the length of the flame formed along the inner circumferential surface of the second injection ring 320 so as to protrude into the second combustion space 300a.

Next, a scrubber including a burner for a scrubber according to an embodiment of the present invention will be described.

FIG. 5 is a perspective view of a scrubber including the burner for the scrubber of FIG. 1; Figure 6 is a vertical cross-sectional view of the scrubber of Figure 5;

5 and 6, a scrubber 10 including a burner 100 for a scrubber according to an embodiment of the present invention includes an exhaust gas inlet 20, a burner 100 for a scrubber, and a burner 30 ) May be formed. Although not shown in detail, the scrubber 10 may include a water tank (not shown) at the bottom of the combustion unit 30 and a water treatment unit (not shown) at the top of the water tank. On the other hand, a reference numeral 40 is a passage through which an igniter for igniting the fuel gas is provided in the upper portion of the first burner.

Meanwhile, the burner 100 for a scrubber according to an embodiment of the present invention may be used in various scrubbers used for processing exhaust gas generated in an electronic industrial process, in addition to the scrubber 10 shown in FIGS.

The exhaust gas inlet 20 is formed in a cylindrical shape having an open top and a bottom, and an upper portion thereof is connected to a main exhaust line (not shown) of a semiconductor process, and a burner 100 for a scrubber is installed at a lower portion thereof. The exhaust gas inlet 20 supplies the exhaust gas flowing from the upper portion to the burner 100 for the lower scrubber.

The scrubber burner 100 is coupled to the exhaust gas inlet 20 such that an upper portion of the first combustion space 200a is connected to a lower portion of the exhaust gas inlet 20. The scrubber burner 100 heats and combusts the incoming exhaust gas.

The burner unit 30 is formed in a cylindrical shape having upper and lower openings and is coupled to the burner 100 for the scrubber so that the upper part of the burner unit 100 is connected to a lower portion of the second combustion space 300a of the burner 100 for scrubber. The combustion unit 30 provides a space for further burning the exhaust gas that is burned and discharged from the burner 100 for a scrubber. The combustion unit 30 allows the exhaust gas to be combusted to flow to the lower tank.

Next, specific actions of the burner for a scrubber according to an embodiment of the present invention will be described.

7 is a vertical cross-sectional view showing the action of a burner for a scrubber.

First, the first fuel gas mixed with LNG, air and oxygen is supplied to the first supply pipe 240 of the first burner 200. The first fuel gas flows into the first housing 210 and flows along the first outer fuel space 200d to the right and left of the first supply pipe 240 while colliding with the outer circumferential surface of the first guide ring 230, 1 guide hole 230a to the first inside fuel space 200c. The first fuel gas is injected into the first combustion space 200a through the first injection hole 220a of the first injection ring 220. [ The first fuel gas is ignited by a separate ignition means to form a flame as a whole along the inner circumferential surface of the first injection ring 220. Since the first fuel gas contains air and oxygen as an oxidizing agent, the stability of the formed flame is increased, and the flame is not extinguished or unstable due to the exhaust gas flowing into the flame. The flame generated by the first combustion gas acts as a source of the flame when the flame by the second combustion gas supplied to the second burner 300 described below is unstable and disappears. Further, the temperature of the flame by the first combustion gas is relatively high due to oxygen, thereby increasing the treatment efficiency of the exhaust gas.

Next, the second fuel gas mixed with LNG and air is supplied to the second supply pipe 340 of the second burner 300. The second fuel gas flows into the second housing 310 and flows along the second outer fuel space 300d to the left and right of the second supply pipe 340 while colliding with the outer circumferential surface of the second guide ring 330, 2 guide hole 330a to the second inner fuel space 300c. The second fuel gas is injected into the second combustion space 300a through the second injection hole 320a of the second injection ring 320. [ The second fuel gas is ignited by a separate ignition means or ignited by the flame of the first burner 200 to form a flame entirely along the inner circumferential surface of the second injection ring 320. Since the second fuel gas contains only air as an oxidizing agent, the stability of the formed flame is relatively lower than that of the first burner 200, and may be extinguished or unstable due to the exhaust gas flowing into the flame. However, since the flame by the second combustion gas is protruded from the inner circumferential surface of the second injection ring 320 to the second combustion space 300a, the exhaust gas is directly contacted with the flame to be burned, Improves efficiency. Since the oxygen concentration of the second combustion gas is relatively lower than that of the first oxygen gas, the burning rate of the fuel gas becomes slow and the length of the flame becomes long. On the other hand, since the flame by the second combustion gas includes only air as an oxidant, the temperature is relatively low, thereby reducing the generation of nitrogen oxides when the exhaust gas is burned. The exhaust gas that is burned and processed in the second burner 300 flows out to the burning unit 30 through the lower portion of the second burner 300.

The burner 100 for a scrubber according to an embodiment of the present invention stably maintains the flame of the second burner 300 by forming and maintaining a highly stable flame in the first burner 200 and increases the stability of the flame as a whole . In addition, the scrubber burner 100 processes the exhaust gas at a relatively high temperature in the first burner 200 to increase the treatment efficiency of the exhaust gas. At the relatively low temperature in the second burner 300, The exhaust gas is secondarily treated to reduce the generation of nitrogen oxides and the degree of contact of the exhaust gas directly to the flame is increased to increase the treatment efficiency of the exhaust gas.

100: Burner for scrubber
200: First burner
210: first housing 220: first injection ring
230: first guide ring 240: first supply pipe
300: second burner
310: second housing 320: second injection ring
330: second guide ring 340: second supply pipe

Claims (8)

A first burner for supplying an oxidant containing air and oxygen and a first fuel gas mixed with the fuel to a first combustion space formed on the inner side to treat the exhaust gas;
And a second combustion space located on the lower side of the first burner and connected to the first combustion space on the inner side, and a second fuel gas containing an oxidant and air- And a second burner for processing the exhaust gas flowing in the first burner. The method according to claim 1,
Wherein the first burner has a first fuel space in which the first fuel gas flows, an inner side opened to the first combustion space, and a second combustion space penetrating from the upper side to the lower side to form the first combustion space, A ring-shaped first housing having a housing hole,
A first injection ring coupled to a first housing hole of the first housing to separate the first fuel space from the first combustion space and having a first injection hole penetrating from an outer circumferential surface to an inner circumferential surface,
And a first guide hole which is located between the first outer ring ring of the first housing and the first injection ring and separates the first fuel space into the first inner fuel space and the first outer fuel space and penetrates from the outer circumferential surface to the inner circumferential surface And a second guide ring
Wherein the second burner has a second fuel hole through which the second fuel gas flows, an inner side opened to the second combustion space, and a second housing hole penetrating from the upper side to the lower side, The second housing
A second injection ring coupled to a second housing hole of the second housing to separate the second fuel space from the second combustion space and having a second injection hole penetrating from an outer circumferential surface to an inner circumferential surface,
Wherein the first fuel ring is formed in a shape corresponding to the second fuel ring and is positioned between the second outer ring ring and the second fuel ring of the second housing to separate the second fuel space into a second inner fuel space and a second outer fuel space, And a second guide ring having a second guide hole penetrating from an outer peripheral surface to an inner peripheral surface. 3. The method of claim 2,
Wherein the first injection ring of the first burner is higher than the second injection ring of the second burner. The method according to claim 1,
Wherein the first burner processes the exhaust gas using a flame having a temperature higher than that of the second burner. 3. The method of claim 2,
Wherein the first guide hole has a total area equal to or larger than the total area of the first injection holes and an area equal to or larger than the first injection hole
Wherein a total area of the second guide holes is equal to or larger than the total area of the second injection holes, and the areas thereof are equal to or larger than the second injection holes. 3. The method of claim 2,
Wherein the first injection hole of the first injection ring and the second injection hole of the second injection ring are formed so that one unit is located at the center and a plurality of unit injection nozzles are arranged radially so that the unit- And a burner for a scrubber. 3. The method of claim 2,
The first burner further comprises a first supply pipe coupled to the first housing and supplying a first fuel gas to the first fuel space,
Wherein the second burner further comprises a second supply pipe coupled to the second housing and supplying a second fuel gas to the second fuel space. 8. The method of claim 7,
The first supply pipe is coupled to the first housing such that the first fuel gas is supplied in a direction perpendicular to the tangent of the first guide ring and in the direction of the center of the first housing,
And the second supply pipe is coupled to the second housing in a direction perpendicular to the tangent of the second guide ring so that the second fuel gas is supplied in the direction of the center of the second housing.

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