KR20160081233A - HEPA Filter Replacement Alarm System in Industrial Clean Room - Google Patents

Abstract

The present invention relates to a system for notifying replacement of an HEPA filter in an industrial clean room (ICR), and more specifically, to a system for notifying replacement of an HEPA filter in an ICR, which is configured to enable an ICR equipment replacement time to be recognized in an integrated manner by using a difference in pressure between front and rear ends of the HEPA filter. The system for notifying replacement of an HEPA filter in an ICR comprises an air-conditioning unit (100), an air duct unit (200), an HEPA filter unit, an air return unit (300), and a filter control unit (400). The system for notifying replacement of an HEPA filter in an ICR is advantageous in that environmental conditions of a clean room can be optimized by actively measuring and notifying a filter replacement time; a uniform amount of air can be supplied through installation of a plurality of electric dampers; a dew condensation phenomenon attributable to a difference between an inside and outside of the HEPA filter unit can be fundamentally prevented; leakage of air can be prevented and also long-term use is enabled through provision of a return grill integrated with a wall; and ease of the replacement can be ensured by enabling a cover to be detached and separated by using a one-touch method.

Description

{HEPA Filter Replacement Alarm System in Industrial Clean Room} in an industrial clean room facility (ICR)

The present invention relates to a notification system for replacing a HEPA filter in an industrial clean room (ICR). More specifically, the present invention relates to a notification system for replacing an industrial clean room facility The present invention relates to a notification system for replacing a HEPA filter in an industrial clean room facility.

Generally, a clean room has no dust, and is isolated or isolated from the outside. It has a wide range of applications in which environmental conditions have a great influence on quality, such as in the handling of minute genes in cells such as ultra-high density integrated circuits and genetic manipulation Lt; / RTI >

This clean room is one of the environmental conditions, and the existence of dust is problematic. Therefore, the clean room should be equipped with a device to isolate the room from dust from the outside, to remove the dust of the person coming into the room from the outside, to wear dust-free special clothing to the person in the room or to remove dust from the room.

The cleanliness of the clean room described above is highly dependent on the air conditioning system. At present, the air conditioning system of the clean room is largely classified into a fan filter unit type (FFU) and a blower filter unit type.

The FFU system is a vertical flow type of individual system, and it can be self-circulated without the need of an air conditioner, so that it can realize a clean room such as low noise, low vibration and low energy. In addition, the fan filter unit system is a system in which air volume required for cooling, heating load and cleanliness is supplied to the air conditioner through a Hepa Filter Box and only air volume required for cleanliness is circulated.

Here, the fan filter unit system has the following advantages.

1. System structure is simple, operation cost and equipment cost are cheap.

2. It is the most used system in general clean room.

3. Depending on the structure and arrangement of the room, a return box is installed on the ceiling or a return air is installed in the room to circulate the air.

4. Expansion of the clean room is relatively convenient within the capacity range of the air conditioner.

5. Local cleanliness can be formed by using Clean Bench and Clean Booth.

The conventional fan filter unit is as follows.

In the conventional fan filter unit, generally, the fan filter unit for a clean room includes a case 10 having an air blowing chamber 11 and a filter chamber 12 and provided outside the clean room; A blower 20 installed in a blowing chamber of the case and blowing polluted air circulating through the clean room to a filter chamber of the case; A filter (30) installed in the air blowing chamber of the case and filtering air supplied to the clean room by the blower; And the other side of the filter chamber is spaced apart from the inner wall of the filter chamber so as to form a swirling hole so that the air discharged through the through hole Shaped guide (16) guiding the filter (16) to the filter side along the swirling hole; And a UV assembly (40) mounted on the bottom of the guide and adapted to receive power to emit a UV wavelength.

The fan filter unit having such a structure is installed outside the clean room, and is connected to be able to communicate with the fluid through a pipe or the like to continuously supply the filtered air into the clean room.

Korean Patent Laid-Open Publication No. 2011-0066070 discloses an air chamber in which an upper one open passage is formed so as to be able to communicate with an air conditioning pipe in a lateral direction, a filter housing having a hollow structure in which a lower portion is opened, And a filter assembly hermetically installed in the lower portion of the filter housing corresponding to a lower portion of the blowing fan assembly. The filter housing is provided with an elastic fixing lever There is known a fan filter unit for a clean room having a downward direct current air blowing function in which the means is fixedly installed so as to be rotatable up and down and the filter is installed more easily and firmly.

Korean Patent Laid-Open No. 2011-0088244 can measure the differential pressure of the tertiary filter (HEPA filter) to determine the asbestos dust accumulation state and the filter replacement timing, and the asbestos dust is leaked and infiltrated And a filter mounting structure for preventing the filter from being damaged.

Korean Laid-Open Patent Application No. 2012-0016625 discloses a case in which a deodorization filter consisting of a carbon filter for removing an antimicrobial filter and contaminants and a nano-sliver filter and a filter paper are sequentially stacked inside the case , Between the antibacterial filter and the carbon filter, a sintered permanent magnet powder is embedded in the inside thereof with a thickness of 0.8 to 2 mm through the upper and lower fiber layers, and the upper and lower fiber layer peripheries And a sensor for measuring and posting the concentration of metal ions is attached to the antimicrobial filter and the deodorization / removal filter, and the electric wave is connected to the LED. .

Korean Utility Model Appln. Utility Model Publication No. 2014-0004212 discloses a fresh water cooler provided with a filter for removing impurities from a seawater inflow port into which seawater for cooling fresh water is introduced. The fresh water cooler is installed in the seawater inflow port and the seawater inflow port of the fresh water cooler A pressure gauge for measuring seawater pressure; a differential pressure sensing unit for sensing a pressure difference displayed on the pressure gauge and sending it out as an electrical signal; and a differential pressure sensor And a control unit for outputting an alarm control signal so that a source of the filter recognizes a filter replacement time in the central control room.

In Korean Patent No. 10-1125704, when a set pressure corresponding to the air purging time of the bag filter is sensed using a differential pressure sensor, the sensor inputs the sensed signal to the controller, and then the controller causes the air injection pipe to closely contact the exhaust port of the bag filter And the air purging operation can be performed automatically through the control command for spraying the air from the dusting air hose. If the dust adhered to the air purging operation is not removed and the pressure of the filtering part rises, When the alarm is generated, the operator activates the vibrating separator to secondarily apply vibration to the bag filter to completely discharge the adhered dust. Which is a feature of the present invention.

However, there has not been disclosed a HEPA filter automatic replacement alarm system of an industrial clean room facility that actively controls a filter replacement time due to clogging of a filter in an industrial clean room facility equipped with a plurality of HEPA filters, thereby indicating a replacement time.

Korea Patent Publication No. 2011-0066070 Korea Patent Publication No. 2011-0088244 Korea Patent Publication No. 2012-0016625 Korean Public Utility Model No. 2014-0004212 Korean Patent No. 10-1125704

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and it is an object of the present invention to provide a notification system for replacing a HEPA filter in an industrial clean room (ICR), more specifically, The present invention provides a notification system for replacing a HEPA filter in an industrial clean room facility.

In order to accomplish the above object, the present invention provides a replacement notification system for a HEPA filter in an industrial clean room (ICR)

An air filter (110) for primarily filtering air, an air cooler (120) for selectively cooling air passing through the air filter according to predetermined air conditioning conditions, and an air filter An air humidifier 140 for selectively humidifying the air passing through the air heater according to a predetermined air conditioning condition and an air humidifier 140 for humidifying air passing through the air humidifier to the industrial clean room equipment through an air duct An air conditioning unit (100) comprising a fan (150) for supplying a flow rate, a motor (160) for transmitting a driving force to the fan, and an inverter (170) for controlling an air flow rate according to a predetermined air conditioning condition.

In order to reduce the flow rate of the air discharged from the air-conditioning unit to prevent noise generation, an air sound chamber 210 installed in the air duct at the upper portion of the air-conditioning unit discharging unit, and air passing through the air sound chamber, (230) disposed at the front end of the HEPA filter unit, an air flow rate sensor (230) disposed in front of the HEPA filter unit for supplying the air amount to the HEPA filter unit according to a measured value of the air flow rate sensor An air duct unit (200) including a plurality of air duct branches (250) provided with an electric damper (240) that can be uniformly distributed;

An air damper 221 connected to the plurality of air duct branches to control an air flow rate, an air reservoir 222 in which the air passing through the air damper stays, (223), a HEPA filter (225) installed to filter foreign substances before the air is supplied to the interior of the industrial clean room, and a second filter A HEPA filter unit including a cover (226) for protecting the HEPA filter;

A return grill 310 for recovering the air supplied to the industrial clean room equipment, a return duct 320 for guiding the recovered air passing through the return grill to the air conditioning unit, An air return unit (300) including a bypass device (330) for selectively supplying the recovered air to the rear end of the air humidifier, a temperature sensor (340) and a humidity sensor (350) installed at the rear end of the return duct; And

The air flow rate sensor of the air duct unit, the differential pressure sensor of the HEPA filter unit, and the temperature sensor and the humidity sensor information of the air return unit, A supply air controller 410 for selectively controlling the temperature, humidity, and flow rate of air supplied using the air cooler, the air heater, the air humidifier, the electric damper, and the inverter, and a HEPA filter When the pressure drop value at the front end and the rear end during operation of the equipment is 25 mmAq to 50 mmAq or less, no alarm is provided. If the pressure drop value at the front and rear ends of the HEPA filter exceeds 50 mmAq, And a filter control unit (400) for providing an alarm to the light providing device (430). It provides a framework filter replacement reminder.

The present invention also provides a function of preventing the formation of condensation due to the difference in temperature between the inside and outside of the HEPA filter unit by installing the air staying heat insulating material inside and outside the HEPA filter unit, not only the air holding unit of the HEPA filter unit It may be to add.

Further, the present invention provides that the return grille is integrally formed on the wall body other than the separable mounting type.

Further, the cover may be a push-button type detachable cover which is not in the form of being coupled to the HEPA filter unit in the form of a screw.

The HEPA filter replacement notification system in the industrial clean room (ICR) of the present invention actively senses and informs the replacement time of the filter to optimize the environmental conditions of the clean room, and a plurality of electric dampers are installed, It is possible to uniformly supply air to the ceiling of the ceiling filter unit and to fundamentally prevent the condensation phenomenon caused by the temperature difference between the inside and the outside of the HEPA filter unit, and as a return grille integrally formed on the wall, So that the ease of replacement can be ensured by separating and detaching.

1 is a configuration diagram of an air conditioning unit of a notification system for replacing a HEPA filter in an industrial clean room (ICR) of the present invention.
FIG. 2 is a configuration diagram of an air duct unit of the HEPA filter replacement notification system in an industrial clean room (ICR) of the present invention.
3 is a configuration diagram of an air return unit of the HEPA filter replacement notification system in an industrial clean room (ICR) of the present invention.
4 is a block diagram of a filter control unit of the HEPA filter replacement notification system in an industrial clean room (ICR) of the present invention.
5 is an overall configuration diagram of a HEPA filter replacement notification system in an industrial clean room (ICR) of the present invention.
6 is a configuration diagram of the HEPA filter unit of the HEPA filter replacement notification system in the industrial clean room (ICR) of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, like reference numerals refer to like elements throughout. The same reference numerals in the drawings denote like elements throughout the drawings.

1 is a configuration diagram of an air conditioning unit of a notification system for replacing a HEPA filter in an industrial clean room (ICR) of the present invention.

FIG. 2 is a configuration diagram of an air duct unit of the HEPA filter replacement notification system in an industrial clean room (ICR) of the present invention.

3 is a configuration diagram of an air return unit of the HEPA filter replacement notification system in an industrial clean room (ICR) of the present invention.

4 is a block diagram of a filter control unit of the HEPA filter replacement notification system in an industrial clean room (ICR) of the present invention.

5 is an overall configuration diagram of a HEPA filter replacement notification system in an industrial clean room (ICR) of the present invention.

6 is a configuration diagram of the HEPA filter unit of the HEPA filter replacement notification system in the industrial clean room (ICR) of the present invention.

The cell concentration type separator includes an upper body 100, a lower body 200, and a central opening / closing handle 300.

 An air filter (110) for primarily filtering air, an air cooler (120) for selectively cooling air passing through the air filter according to predetermined air conditioning conditions, and an air filter An air humidifier 140 for selectively humidifying the air passing through the air heater according to a predetermined air conditioning condition and an air humidifier 140 for humidifying air passing through the air humidifier to the industrial clean room equipment through an air duct And an air conditioner unit (100) including a fan (150) for supplying a flow rate, a motor (160) for transmitting a driving force to the fan, and an inverter (170) for controlling an air flow rate in accordance with a predetermined air conditioning condition do.

The air filter is composed of a prefilter and a medium filter. The prefilter is made of polyester or nonwoven fabric. The medium filter is made of glass fiber or synthetic resin. The material of the prefilter frame is made of aluminum, and a paper frame is also used. The material of the medium filter frame is made of zinc-plated steel and wood or stainless steel.

The air cooler is made of aluminum or a copper material having a good thermal conductivity for good heat conduction. Examples of the refrigerant include a refrigerant gas and cold water.

The air heater is made of aluminum having a good thermal conductivity for good heat conduction, and electric heat, hot water and steam are used as a kind of heat source.

The air humidifier is installed at the rear end inside the air conditioning room, and there are kinds of humidifiers such as an electrode electrode, a pan type, and a steam injection type.

There are various types of fans, such as airfoils, plenums, sirocco, and turbo fans, and generally airfoils and plenum fans are used.

Airfoils and plenum fans are used for high air pressure and relatively high static pressure. Siroco fans are used in applications where the air volume is high and the static pressure is relatively low. Turbo fans are not used for air conditioners, but they are used in places with low air flow and high static pressure.

The motor is used to deliver power to the fan.

The inverter is used to regulate the air flow rate by adjusting the number of revolutions of the fan of the air conditioner. By adjusting the value of HZ, the rpm of the fan can be adjusted to efficiently adjust the air volume of the fan from 0 to 100%.

The air sound chamber reduces the noise generated when the air taken out of the fan passes through the duct.

The material is composed of a sound absorbing material and a perforated net in a zinc-bearing stone.

The HEPA filter unit is a unit capable of mounting a HEPA filter, which includes a circular damper capable of passing and blocking air, an external casing, a heat insulating material and a filter mounting part for blocking heat loss, And a punching cover portion that can protect against burnout.

Casing and punching cover material can be made of steel and stainless.

The air flow rate sensor is installed at a front end of each of the HEPA filter units, measures the air of each HEPA filter unit so as to be supplied in a predetermined amount, and gives a signal to an electric damper installed at a front end of the installed HEPA unit, Which can be adjusted.

The electric damper electrically adjusts a value measured by an air flow rate sensor to a predetermined degree of opening so that air is uniformly supplied to the HEPA filter unit.

The air damper is a device for manually controlling the flow rate of air to the HEPA filter unit.

The air reservoir is a space in which air stays due to a differential pressure of the HEPA filter.

The heat insulating material is installed to prevent heat loss of the air staying in the hepa unit, and rubber foam insulation, Atilon insulation, and glass wool insulation are used.

The differential pressure sensor is a sensor for measuring the degree of use of the HEPA filter and measuring the pressure at the front end and the rear end to provide an alarm signal.

The HEPA filter maintains the inner class of the clean room. The basic material is made of glass fiber. It can filter 99.99% ~ 99.97% efficiency by 0.3 micro-scale. The frame is made of wood, aluminum and stainless steel.

The HEPA filter unit cover prevents the filter material from being displayed when the HEPA filter unit is installed and also protects the HEPA filter from external impacts. The material is made of steel and stainless steel.

The return grill is a function of returning the air supplied into the clean room back to the air conditioner. It has a self-adjusting resistor and a simple grille.

The bypass device is a device capable of selectively sending the recovered air to the rear end of the air conditioner humidifier in order to reduce unnecessary operation of the air conditioner when the temperature and humidity condition inside the clean room is within the deviation of the required temperature and humidity condition.

Since the temperature sensor and the humidity sensor can not be installed in the respective places in the clean room when maintaining the constant temperature sensing in order to maintain the temperature and humidity condition inside the clean room, it is installed in the return unit where all the air in the clean room is gathered, Monitoring.

The air supply controller controls the air conditioner, the damper pressure sensor, the temperature and humidity sensor, and the like to maintain the temperature and humidity of each clean room and the operation stop of the air conditioner, the cooling and heating and the humidification of the air conditioner, The distribution of air to each equipment, and the operation of the equipment through the sensors.

When the differential pressure between the front end and the rear end of the HEPA filter exceeds 50 mmAq, the alarm sound providing device and the light providing device use a differential pressure sensor installed in the HEPA filter unit to send a signal to the filter control unit, To signal when to replace the filter.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention will be.

100: air conditioning unit 110: air filter
120: air cooler 130: air heat
140: air humidifier 150: fan
160: motor 170: inverter
200: air duct unit 210: air sound chamber
220: HEPA filter unit 221: Air damper
222: air reservoir 223: air reservoir insulator
224: Differential pressure sensor 225: Hepa filter
226: cover 300: air return unit
310: Return grill 320: Return duct
330: bypass device 340: temperature sensor
350: Humidity sensor 400: Filter control unit
410: air supply controller 420: alarm sound supply device
430: Light providing device

Claims (4)

In a HEPA filter replacement notification system in an industrial clean room (ICR)
An air filter (110) for primarily filtering air, an air cooler (120) for selectively cooling air passing through the air filter according to predetermined air conditioning conditions, and an air filter An air humidifier 140 for selectively humidifying the air passing through the air heater according to a predetermined air conditioning condition and an air humidifier 140 for humidifying air passing through the air humidifier to the industrial clean room equipment through an air duct An air conditioning unit (100) comprising a fan (150) for supplying a flow rate, a motor (160) for transmitting a driving force to the fan, and an inverter (170) for controlling an air flow rate according to a predetermined air conditioning condition.
In order to reduce the flow rate of the air discharged from the air-conditioning unit to prevent noise generation, an air sound chamber 210 installed in the air duct at the upper portion of the air-conditioning unit discharging unit, and air passing through the air sound chamber, (230) disposed at the front end of the HEPA filter unit, an air flow rate sensor (230) disposed in front of the HEPA filter unit for supplying the air amount to the HEPA filter unit according to a measured value of the air flow rate sensor An air duct unit (200) including a plurality of air duct branches (250) provided with an electric damper (240) that can be uniformly distributed;
An air damper 221 connected to the plurality of air duct branches to control an air flow rate, an air reservoir 222 in which the air passing through the air damper stays, (223), a HEPA filter (225) installed to filter foreign substances before the air is supplied to the interior of the industrial clean room, and a second filter A HEPA filter unit including a cover (226) for protecting the HEPA filter;
A return grill 310 for recovering the air supplied to the industrial clean room equipment, a return duct 320 for guiding the recovered air passing through the return grill to the air conditioning unit, An air return unit (300) including a bypass device (330) for selectively supplying the recovered air to the rear end of the air humidifier, a temperature sensor (340) and a humidity sensor (350) installed at the rear end of the return duct; And
The air flow rate sensor of the air duct unit, the differential pressure sensor of the HEPA filter unit, and the temperature sensor and the humidity sensor information of the air return unit, A supply air controller 410 for selectively controlling the temperature, humidity, and flow rate of air supplied using the air cooler, the air heater, the air humidifier, the electric damper, and the inverter, and a HEPA filter When the pressure drop value at the front end and the rear end during operation of the equipment is 25 mmAq to 50 mmAq or less, no alarm is provided. If the pressure drop value at the front and rear ends of the HEPA filter exceeds 50 mmAq, And a filter control unit (400) for providing an alarm to the light providing device (430). Filter replacement reminder system.
The air conditioner according to claim 1, wherein the air staying heat insulating material is provided not only in the air holding portion of the HEPA filter unit but also in the entire inside and outside of the HEPA filter unit to prevent condensation formation due to a temperature difference between the inside and outside of the HEPA filter unit (ICR, industrial clean room), characterized in that the function of the HEPA filter replacement notification system is added.
The system according to claim 1, wherein the return grille is integrally formed on a wall, not on a separable mounting type, in an industrial clean room (ICR).
[2] The HEPA filter according to claim 1, wherein the cover is a push-button type detachable cover which is not in the form of a screw coupled to the HEPA filter unit but is replaceable in an industrial clean room (ICR) Notification system.

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