KR20160068008A - Apparatus for measuring leak of gas - Google Patents

Apparatus for measuring leak of gas Download PDF

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Publication number
KR20160068008A
KR20160068008A KR1020140172597A KR20140172597A KR20160068008A KR 20160068008 A KR20160068008 A KR 20160068008A KR 1020140172597 A KR1020140172597 A KR 1020140172597A KR 20140172597 A KR20140172597 A KR 20140172597A KR 20160068008 A KR20160068008 A KR 20160068008A
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KR
South Korea
Prior art keywords
gas
exhaust pipe
chlorine gas
connection portion
housing
Prior art date
Application number
KR1020140172597A
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Korean (ko)
Inventor
강인복
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(주)케이코아
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Priority to KR1020140172597A priority Critical patent/KR20160068008A/en
Publication of KR20160068008A publication Critical patent/KR20160068008A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/06—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool
    • G01M3/08—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool for pipes, cables or tubes; for pipe joints or seals; for valves; for welds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/06—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool
    • G01M3/08—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool for pipes, cables or tubes; for pipe joints or seals; for valves; for welds
    • G01M3/081—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool for pipes, cables or tubes; for pipe joints or seals; for valves; for welds for cables
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/02—Alarms for ensuring the safety of persons
    • G08B21/12—Alarms for ensuring the safety of persons responsive to undesired emission of substances, e.g. pollution alarms
    • G08B21/14—Toxic gas alarms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

A gas leakage measuring apparatus is disclosed. The gas leakage measuring device of the present invention is connected to each other so as to guide the discharge of the noxious gas discharged from the vacuum pump, and a rubber ring is provided at the connection part, and then installed at the connection part of the exhaust pipe bound by the clamp, A housing formed to enclose a part of the clamp and detachably mounted to a connection portion of the exhaust pipe; A sensing sensor coupled to the housing and configured to output a sensing signal after sensing leakage of chlorine gas or fluorine gas discharged from a connection portion of the exhaust pipe; A gas concentration measuring terminal configured to measure and output a concentration of chlorine gas or fluorine gas according to a sensing signal of the sensing sensor and generate an alarm sound; And a light emission signal output unit configured to output a light emission signal when the gas concentration measuring terminal outputs a concentration signal.

Description

[0001] APPARATUS FOR MEASURING LEAK OF GAS [0002]

The present invention relates to a gas leakage measuring apparatus, and more particularly to a gas leakage measuring apparatus provided with a chlorine gas (CL2) or a fluorine gas (F2) which is installed at an exhaust pipe connecting portion of a vacuum pump for discharging chlorine gas The present invention relates to a gas leak measuring apparatus capable of detecting and measuring gas F2 and outputting an alarm sound and an emission signal to inform the manager.

Generally, chlorine gas (CL2) (Cl2) or fluorine gas (F2) (F2), which are highly toxic and corrosive for surface treatment of products including semiconductor manufacturing processes, are widely used in various industrial fields.

This chlorine gas (CL2) or fluorine gas (F2) is toxic and corrosive and is harmful to human body. Therefore, if the product is leaked during the process of discharging after processing, not only waste of gas but also accident And there is also a problem of polluting the environment.

To this end, a vacuum pump for discharging chlorine gas (CL2) or fluorine gas (F2) to a predetermined place is installed in the process using chlorine gas (CL2) or fluorine gas (F2) A plurality of exhaust pipes for discharging chlorine gas (CL2) or fluorine gas (F2) are installed.

FIG. 1 is a schematic view of an exhaust pipe installed in a conventional vacuum pump, and FIG. 2 is a cross-sectional view of a connection portion of an exhaust pipe.

As shown in FIG. 1, the exhaust pipe 1 is formed with a predetermined length so as to store the chlorine gas CL2 or the fluorine gas F2 discharged from the vacuum pump at a predetermined location, and is connected to each other. A rubber ring 2 for preventing the leakage of the chlorine gas CL2 or the fluorine gas F2 and a clamp 3 for binding the exhaust pipe 1 are provided at the connection portion of the exhaust pipe 1 .

According to such a configuration, the exhaust pipe 1 can safely guide the chlorine gas CL2 or the fluorine gas F2 discharged from the vacuum pump to prevent leakage, and can store the gas in a predetermined place.

However, in such a conventional exhaust pipe, in the process of discharging the chlorine gas (CL2) or the fluorine gas (F2), the rubber ring is contacted with the chlorine gas (CL2) or the fluorine gas (F2) The function thereof is lost and there is a problem that chlorine gas (CL2) or fluorine gas (F2) leaks from the connection portion of the exhaust pipe.

Further, the manager has a problem that the leakage amount of the chlorine gas (CL2) or the fluorine gas (F2) leaking from the connection portion of the exhaust pipe can not be confirmed.

It is required to research and develop a gas leakage measuring device capable of outputting an alarm sound and an emission signal to inform the manager while real time sensing and measuring chlorine gas (CL2) or fluorine gas (F2) leaking from the connection portion of the exhaust pipe It is true.

Korean Registered Patent No. 10-0250613 (registered on Jan. 05, 2000)

The technical problem of the present invention is to detect and measure chlorine gas (CL2) or fluorine gas (F2) which is installed at a connection portion of an exhaust pipe of a vacuum pump for discharging chlorine gas (CL2) or fluorine gas And outputting an alarm sound and an emission signal to inform the manager.

Another object of the present invention is to provide a gas leakage measuring device which can be installed without disassembling a clamp provided at a connecting portion of an exhaust pipe and can be easily installed and dismantled even in a small space.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. There will be.

According to an aspect of the present invention, there is provided a vacuum pump comprising: a vacuum pump; a vacuum pump connected to the vacuum pump to guide a discharge of the harmful gas; A housing formed to surround a part of the clamp and detachably mounted on a connection part of the exhaust pipe; A sensing sensor coupled to the housing and configured to output a sensing signal after sensing leakage of chlorine gas or fluorine gas discharged from a connection portion of the exhaust pipe; A gas concentration measuring terminal configured to measure and output a concentration of chlorine gas or fluorine gas according to a sensing signal of the sensing sensor and generate an alarm sound; And a light emission signal output unit configured to output a light emission signal at a concentration output of the gas concentration measurement terminal.

The housing may include a mounting member formed around the sensing sensor and attached to the exhaust pipe according to an operation of a manager so as to be detachably attached to the connection portion of the exhaust pipe .

Wherein the housing is provided with a coupling portion formed around the coupling portion of the exhaust pipe to couple the detection sensor and having a discharge passage for discharging chlorine gas or fluorine gas leaking out from the connection portion of the exhaust pipe, And is received and coupled inside.

And the housing is mounted such that the coupling portion is disposed in a lower region of the exhaust pipe to detect leakage of chlorine gas heavier than air by the detection sensor.

And the housing is mounted such that the coupling portion is disposed in an upper region of the exhaust pipe to detect leakage of chlorine gas that is lighter than air by the detection sensor.

The gas concentration measuring terminal may include an alarm sound generator provided inside the gas concentration measuring terminal to measure a concentration of chlorine gas according to a detection signal of the detection sensor and generate an alarm sound upon outputting.

According to the present invention, when a chlorine gas (CL2) or a fluorine gas (F2) is leaked, it is installed at a connecting portion of an exhaust pipe of a vacuum pump for discharging harmful gas such as chlorine gas (CL2) (CL2) or a fluorine gas (CL2) on the exhaust line of a vacuum pump by providing an output box and outputting an alarm sound and an emission signal and informing the manager of the output, (F2).

Further, the gas leakage measuring device of the present invention is detachably mounted so that the housing surrounds the clamp at the connection portion of the exhaust pipe, so that the gas leakage measuring device can be installed without releasing the clamp connecting the connection portion of the existing exhaust pipe, Installation and disassembly can be facilitated even in a space.

1 is a schematic view showing an exhaust pipe installed in a vacuum pump according to a related art.
FIG. 2 is a cross-sectional view of a connection portion of the exhaust pipe shown in FIG. 1. FIG.
3 is a schematic view showing a configuration of a gas leakage measuring apparatus according to the present invention.
FIG. 4 is a view showing the housing shown in FIG. 3. FIG.
5 is a cross-sectional view of the housing shown in FIG.
FIG. 6 is a schematic view showing an installed state of the gas leakage measuring apparatus according to the present invention. FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, the well-known functions or constructions will not be described in order to simplify the gist of the present invention.

FIG. 3 is a view schematically showing a configuration of a gas leakage measuring apparatus according to the present invention, FIG. 4 is a view showing a housing shown in FIG. 3, FIG. 5 is a view showing a section of a housing shown in FIG. FIG. 6 is a schematic view showing an installed state of the gas leakage measuring apparatus according to the present invention. FIG.

3 to 6, the gas leakage measuring apparatus according to the present invention includes a housing 10, a sensing sensor 20, a gas concentration measuring terminal 30, and an emission signal outputting unit 40 ).

Here, the gas leakage measuring apparatus according to the present invention is a device for measuring the gas leakage in a state where the exhaust gas is discharged from the exhaust pipe 1 while being detachably connected to the connection portion of the exhaust pipe 1 connected to each other to guide the discharge of the chlorine gas CL2 or the fluorine gas F2, And the chlorine gas CL2 or the fluorine gas F2 leaking through the connection portion of the pipe 1 is measured. At this time, the connection portion of the exhaust pipe 1 is structured such that the rubber ring 2 for holding the airtightness is installed so as to prevent the leakage of the chlorine gas CL2 or the fluorine gas F2, .

The housing 10 is detachably attached to the connection portion of the exhaust pipe 1. That is, the housing 10 is formed so as to enclose a part of the clamp 3 and is detachably mounted to the connection portion of the exhaust pipe 1. This is so that chlorine gas or fluorine gas leaking from the connection portion of the exhaust pipe 1 bound by the clamp 3 is discharged to the outside through the housing 10. [ At this time, the housing 10 is mounted so as to selectively enclose the lower region or the upper region of the exhaust pipe 1 when mounted on the connection portion of the exhaust pipe 1.

Here, the reason why the housing 10 is mounted so as to surround the lower region of the exhaust pipe 1 is to easily measure the leakage of the chlorine gas CL2. That is, since the chlorine gas CL2 is heavier than air, the chlorine gas CL2 leaks downward from the connection portion of the exhaust pipe 1 bound by the clamp 3 toward the exhaust pipe 1.

On the contrary, the reason why the housing 10 is mounted so as to surround the upper region of the exhaust pipe 1 is to easily measure the leakage of the fluorine gas F2. That is, since the fluorine gas F2 is lighter than air, it leaks from the connecting portion of the exhaust pipe 1 bound by the clamp 3 toward the upper portion of the exhaust pipe 1. [

Further, the housing 10 is provided with a mounting member 12 which is bound and released to and from the exhaust pipe 1 in accordance with the operation of the manager, so that the housing 10 can be detachably attached to the connection portion of the exhaust pipe 1. That is, the mounting member 12 is rotatably coupled to the housing 10 via a hinge, and has a structure that is coupled to the housing 10 or released from the housing 10 according to the operation of the manager. Thus, the housing 10 can be detachably mounted to the connection portion of the exhaust pipe 1 by the mounting member 12.

The housing 10 is formed with a coupling portion 14 to which the detection sensor 20 is received and coupled around the mounting member 12 and a coupling portion 14 is provided on the connection portion of the exhaust pipe 1 A discharge passage 16 for discharging the chlorine gas CL2 or the fluorine gas F2 to the outside is formed.

The coupling portion 14 defines a space in which the detection sensor 20 can be accommodated and the discharge passage 16 is connected to the exhaust pipe 1 through the chlorine gas CL2 or the fluorine gas F2 Thereby forming a passage which can be discharged naturally to the outside.

That is, since the chlorine gas CL2 is heavier than air, the chlorine gas CL2 leaks from the connection portion of the exhaust pipe 1 and is discharged to the outside via the housing 10 and the engaging portion 14. [ For this purpose, the housing 10 is arranged so that the engaging portion 14 is disposed below the exhaust pipe 1 in order to detect leakage of chlorine gas heavier than air through the sensing sensor 20 on the connection portion of the exhaust pipe 1 Respectively.

The fluorine gas F2 leaks from the connection portion of the exhaust pipe 1 because the fluorine gas F2 is lighter than air and then is discharged to the outside via the housing 10 and the engaging portion 14. [ To this end, the housing is mounted on the connecting portion of the exhaust pipe 1 so that the engaging portion 14 is disposed on the upper portion of the exhaust pipe 1 in order to detect leakage of chlorine gas that is lighter than air through the detection sensor 20.

The sensing sensor 20 is adapted to be received in the coupling portion 14 of the housing 10. That is, the sensing sensor 20 is accommodated in the engaging portion 14 provided in the housing 10 and is connected to the exhaust pipe 1 through the connecting portion 14, (CL2) or fluorine gas (F2), and outputs a detection signal.

The detection of the leakage of the chlorine gas (CL2) or the fluorine gas (F2) by using the detection sensor 20 and outputting the detection signal is performed by a person skilled in the art before the application of the present invention. The chlorine gas (CL2) or the fluorine gas (F2) Which is widely known in the field of the leak detection system of the present invention, and a description thereof will be omitted.

The gas concentration measuring terminal 30 is provided to be electrically connected to the sensor 20. That is, the gas concentration measuring terminal 30 measures the concentration of the chlorine gas CL2 or the fluorine gas F2 according to the sensing signal output from the sensing sensor 20 and outputs the measured concentration.

For this purpose, the gas concentration measuring terminal 30 includes a plurality of circuit boards for measuring the concentration of the chlorine gas (CL2) or the fluorine gas (F2) according to a sensing signal output from the sensing sensor And a display unit is provided to output the measured concentration to the surface.

The chlorine gas CL2 is supplied to the circuit board of the gas concentration measuring terminal 30 so as to measure and output the concentration of the chlorine gas CL2 or the fluorine gas F2 according to the sensing signal output from the sensing sensor 20. [ Or the concentration value of the fluorine gas (F2).

The concentration of the chlorine gas (CL2) or the fluorine gas (F2) is measured with the stored information using the gas concentration measuring terminal 30 and the concentration value corresponding to the sensing signal of the sensing sensor 20 is output. A well-known technique widely applied in the field of a leak detection system of chlorine gas (CL2) or fluorine gas (F2) by a person skilled in the art before the application is not described here.

The gas concentration measuring terminal 30 is provided with an alarm sound generating unit 32 therein to measure the concentration of the chlorine gas CL2 or the fluorine gas F2 and generate an alarm sound upon outputting. The alarm sound generating unit 32 generates an alarm sound according to the control of the circuit board provided in the gas concentration measuring terminal 30. At this time, the alarm sound may be generated continuously for a predetermined period of time or may be periodically generated according to a predetermined period of time.

The emission signal output unit 40 is provided to be electrically connected to the gas concentration measuring terminal 30. [ That is, the emission signal output unit 40 is provided to output the emission signal when the concentration of the gas concentration measuring terminal 30 is outputted. At this time, the emission signal output unit 40 may be provided as a warning light.

The light emission signal output unit 40 outputs the light emission signal under the control of the circuit board provided in the gas concentration measurement terminal 30. [

Hereinafter, the operation of the operation of the gas leakage measuring apparatus according to the embodiment of the present invention will be described.

6, the gas leakage measuring apparatus of the present embodiment can be detachably attached to the connection portion of the exhaust pipe 1 in order to detect leakage of the chlorine gas CL2 or the fluorine gas F2 discharged from the vacuum pump Respectively. That is, the housing 10 provided in the gas leakage measuring device is detachably attached to the connection portion of the exhaust pipe 1 so as to enclose a part of the clamp 3, and the detection sensor 20 is mounted to the housing 10, The gas concentration measuring terminal 30 is electrically connected to the sensing sensor 20 and the emission signal outputting unit 40 is electrically connected to the gas concentration measuring terminal 30. [

At this time, the housing 10 can be installed without releasing the clamp 3 connecting the connection portion of the exhaust pipe 1, and is miniaturized so as to be detachably attached to the connection portion of the exhaust pipe 1, So that installation and disassembly can be facilitated.

As described above, the gas leakage measuring device is installed at the connection portion of the exhaust pipe 1, and the chlorine gas CL2 or the fluorine gas F2 is discharged along the exhaust pipe 1 by the operation of the vacuum pump.

When the chlorine gas CL2 or the fluorine gas F2 leaks from the connection portion of the exhaust pipe 1 during the discharge of the gas as described above, the chlorine gas CL2 is heavier than the air, And is discharged through the coupling portion 14 and the discharge passage 16 provided in the housing 10 after leakage. At this time, the coupling portion 14 to which the detection sensor 20 is coupled is disposed in the lower region of the exhaust pipe 1 to sense the leakage of the chlorine gas CL2.

The fluorine gas F2 is lighter than the air and is leaked from the connection portion of the exhaust pipe 1 and then discharged through the coupling portion 14 and the discharge passage 16 provided in the housing 10. [ At this time, the coupling portion 14 to which the detection sensor 20 is coupled is disposed in the upper region of the exhaust pipe 1 to sense the leakage of the fluorine gas F2.

At this time, the sensing sensor 20 senses the leakage of the chlorine gas CL2 or the fluorine gas F2 to output a sensing signal, and the gas concentration measuring terminal 30 senses the chlorine gas CL2) or fluorine gas (F2) and outputs an alarm sound through the alarm sound generating unit 32 and the light emission signal output unit 40 outputs the concentration signal of the gas concentration measuring terminal 30 And outputs a light emission signal.

Accordingly, the manager can easily confirm the leakage of the chlorine gas (CL2) or the fluorine gas (F2) on the connection portion of the exhaust pipe (1) provided in the vacuum pump.

As described above, the gas leakage measuring apparatus of the present embodiment is provided at the connection portion of the exhaust pipe 1 of the vacuum pump for discharging the noxious gas, and when the chlorine gas (CL2) or the fluorine gas (F2) (CL2) or fluorine gas (F2) on the exhaust line of the vacuum pump can be easily confirmed by notifying the manager of the alarm and the light emission signal simultaneously with the output box so that it can be visually confirmed have.

The gas leakage measuring apparatus according to the present embodiment is characterized in that the housing 10 is detachably mounted so as to enclose the clamp 3 at the connecting portion of the exhaust pipe 1 so that the connecting portion of the existing exhaust pipe 1 is connected It can be installed without releasing the clamp 3 and can be easily installed and dismantled even in a narrow space.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It is obvious to those who have. Accordingly, such modifications or variations should not be individually understood from the technical spirit and viewpoint of the present invention, and modified embodiments should be included in the claims of the present invention.

10: housing 12: mounting member
14: engaging portion 16: exhaust passage
20: detection sensor 30: gas concentration measurement terminal
32: Alarm sound generating unit 40: Light emitting signal output unit

Claims (6)

A rubber ring is provided at a connection site to guide the discharge of noxious gas discharged from the vacuum pump, and then installed at a connection site of the exhaust pipe bound by a clamp to measure leakage of the gas,
A housing formed to surround a part of the clamp and detachably mounted to a connection portion of the exhaust pipe;
A sensing sensor coupled to the housing and configured to output a sensing signal after sensing leakage of chlorine gas or fluorine gas discharged from a connection portion of the exhaust pipe;
A gas concentration measuring terminal configured to measure and output a concentration of chlorine gas or fluorine gas according to a sensing signal of the sensing sensor and generate an alarm sound; And
And a light emission signal output unit configured to output an emission signal when the concentration of the gas concentration measuring terminal is output. The method according to claim 1,
The housing includes:
And a mounting member formed around the detection sensor and attached to the exhaust pipe according to an operation of a manager so as to be detachably mounted on a connection portion of the exhaust pipe, . The method according to claim 1,
The housing includes:
And a discharge passage formed around the detection pipe for coupling the detection sensor and having a discharge passage for discharging chlorine gas or fluorine gas leaking from the connection portion of the exhaust pipe to the outside,
Wherein the detection sensor is received in the coupling portion. The method of claim 3,
The housing includes:
Wherein the coupling unit is mounted in a lower region of the exhaust pipe to detect leakage of chlorine gas heavier than air through the detection sensor. The method of claim 3,
The housing includes:
Wherein the coupling unit is mounted in the upper region of the exhaust pipe to detect leakage of chlorine gas that is lighter than air through the detection sensor. The method according to claim 1,
The gas concentration measuring terminal comprises:
And an alarm sound generator installed inside the gas sensor to measure a concentration of chlorine gas according to a detection signal of the detection sensor and generate a warning sound upon outputting.
KR1020140172597A 2014-12-04 2014-12-04 Apparatus for measuring leak of gas KR20160068008A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101974647B1 (en) * 2019-01-04 2019-05-02 조수민 Apparatus and method for removing gas
KR20190065835A (en) * 2017-12-04 2019-06-12 삼성중공업 주식회사 Gas sensing devices
KR20200144235A (en) 2019-06-18 2020-12-29 주식회사 비엔아이 Gas leak monitoring system based on multi-sensing factor
KR20200144237A (en) 2019-06-18 2020-12-29 주식회사 비엔아이 Gas leak monitoring system comprising multi-sensing module capable of sensing fine gas leak

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100250613B1 (en) 1997-02-21 2000-05-01 강병호 Harmful chlorine gas leakage affirmation device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100250613B1 (en) 1997-02-21 2000-05-01 강병호 Harmful chlorine gas leakage affirmation device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190065835A (en) * 2017-12-04 2019-06-12 삼성중공업 주식회사 Gas sensing devices
KR101974647B1 (en) * 2019-01-04 2019-05-02 조수민 Apparatus and method for removing gas
WO2020141960A1 (en) * 2019-01-04 2020-07-09 주식회사 고도이엔지 Gas removing apparatus and method
KR20200144235A (en) 2019-06-18 2020-12-29 주식회사 비엔아이 Gas leak monitoring system based on multi-sensing factor
KR20200144237A (en) 2019-06-18 2020-12-29 주식회사 비엔아이 Gas leak monitoring system comprising multi-sensing module capable of sensing fine gas leak

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