KR20160065029A

KR20160065029A - Creation method of drawing data

Info

Publication number: KR20160065029A
Application number: KR1020150167530A
Authority: KR
Inventors: 시게히로 하라; 켄이치 야스이; 야스오 카토
Original assignee: 가부시키가이샤 뉴플레어 테크놀로지
Priority date: 2014-11-28
Filing date: 2015-11-27
Publication date: 2016-06-08
Also published as: TWI644341B; JP2016111325A; KR101794287B1; TW201637074A; JP6548982B2

Abstract

A drawing method of drawing data of an aspect of the present invention is a drawing method of drawing data to be inputted to a drawing apparatus for drawing a figure pattern on a sample using a charged particle beam, Wherein the imaging data is generated in accordance with a data format in which dose amount information indicating dose amounts or dos modulation ratios at positions of respective corner portions of the figure pattern are continuously defined.

Description

Drawing data creation method {CREATION METHOD OF DRAWING DATA}

The present invention relates to a method of creating drawing data, and more particularly, to a method of creating drawing data to be input to a drawing apparatus, for example.

In recent years, the circuit line width of a semiconductor device has become finer with the increasingly high integration of LSI. As a method for forming an exposure mask (also referred to as a reticle) for forming a circuit pattern on these semiconductor devices, an electron beam (EB) imaging technique having excellent resolution is used.

For example, there is a drawing apparatus using multi-beams. Compared with the case of imaging with one electron beam, by using multi-beams, a large number of beams can be irradiated at a time, and the throughput can be greatly improved. In such a multi-beam drawing apparatus, for example, an electron beam emitted from an electron gun is passed through a mask having a plurality of holes to form a multi-beam, and each of the beams not subjected to blanking control is reduced to an optical system, Deflected by a deflector and irradiated to a desired position on the sample.

In the multi-beam drawing apparatus, pattern data (drawing data) converted from CAD data is input. Then, the data conversion process is performed on the input pattern data, and the process proceeds to the rendering process. It is needless to say that the data amount of the pattern data input to the drawing apparatus is preferably small. Therefore, pattern data defining a plurality of figure patterns is defined in a data compressed format (see, for example, Japanese Patent Application Laid-Open No. 2005-079115).

Conventionally, in a drawing apparatus, a fringing effect of mm order, a proximity effect by back scattering with an influence range of about 10 mu m, a fading effect of mm order, and a dimensional change caused by a chroming effect of mm order ) Is corrected. In order to correct the dimensional fluctuation due to the phenomenon of the influence range smaller than the influence range of about 10 mu m, for example, it is assumed that the dose modulation amount is defined in the graphic pattern itself of the drawing data inputted to the drawing apparatus. However, in order to compensate for such a small influence range, the size of the figure pattern itself is too large. To use this method, the figure pattern is divided into a plurality of small figure patterns, and one dose amount of modulation There is a need to define. Therefore, there has been a problem that the amount of data of the rendering data becomes enormous.

An embodiment of the present invention provides a drawing method of drawing data capable of reducing the amount of data.

A drawing method of drawing data according to an aspect of the present invention includes:

A drawing method for drawing data to be input to a drawing apparatus for drawing a figure pattern on a sample using a charged particle beam,

In a data format in which the shape information of the figure pattern and the dose information indicating the dose amount or the DOS modulation ratio at the position of each corner portion of the figure pattern before or after the figure information is defined are continuously defined, .

According to another aspect of the present invention,

A drawing method for drawing data to be input to a drawing apparatus for drawing at least one figure pattern on a sample using a charged particle beam,

Inputting at least one figure information of a figure pattern, setting a rectangular frame surrounding at least one figure pattern,

The respective doses or dosing modulation ratios at the positions of the four corners of the rectangular frame are set,

The shape information of at least one figure pattern and the dose information indicating the dose amount or the dose modulation rate at the positions of the four corner portions of the rectangular frame before or after the figure information is defined are sequentially And generating drawing data.

According to another aspect of the present invention,

The figure information of the figure pattern is inputted, a rectangular frame is set in a part of the figure pattern,

A plurality of mesh areas of a fixed size are set in an area including the remaining part of the figure pattern,

A dose amount or a DOS modulation ratio is set for each of a plurality of mesh regions,

The shape information of the figure pattern and the first dose amount information indicating the dose amount or the dose modulation ratio at the positions of the four corners of the rectangular frame before or after the figure information is defined and the first dose amount information Characterized in that drawing data is created in accordance with a data format in which the second dose amount information indicating the set dose amount or the DOS modulation ratio is continuously defined.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a conceptual diagram showing a configuration of a drawing system according to a first embodiment. FIG.
2 is a conceptual diagram showing a configuration of a rendering data conversion apparatus according to the first embodiment.
3 (a) to 3 (c) are diagrams showing an example of a data format including a DOS modulation amount in the first embodiment.
4 (a) to 4 (c) are diagrams showing another example of a data format including a DOS modulation amount in the first embodiment.
5 (a) and 5 (b) are diagrams showing another example of a data format including the DOS modulation amount in the first embodiment.
6 is a diagram showing an evaluation pattern for explaining the effect of the first embodiment.
7 is a diagram showing an example of the number of divisions of the evaluation pattern for explaining the effect of the first embodiment.
8 is a diagram showing an example in which the number of divisions of the evaluation pattern for explaining the effect of the first embodiment is different.
9 is a diagram showing the relationship between the number of divisions and the amount of data in the first embodiment;
10 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the second embodiment.
Figs. 11 (a) to 11 (g) are diagrams for explaining a figure pattern group and a dose amount defining position in the second embodiment. Fig.
12 is a diagram showing another example of a data format including the DOS modulation amount in the second embodiment.
13 is a diagram showing an example of grouping of figure pattern groups in the second embodiment.
14 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the third embodiment.
15 is a view for explaining an example of a dose amount defining position in the third embodiment.
16 is a view for explaining another example of the dose amount defining position in the third embodiment;
17 is a diagram showing an example of a data format of pattern data of a figure pattern including information on the amount of DOS modulation.
Fig. 18 is a diagram for explaining the data amount of the pattern data in the case of dividing into the small figure pattern of the necessary dos modulation amount.
Fig. 19 is a diagram for explaining the data amount of the pattern data in the sample unit in the case of dividing into a small figure pattern of the necessary dose modulation amount. Fig.
20 is a diagram showing an example of a figure pattern in the fourth embodiment.
21 is a conceptual diagram showing a configuration of a rendering data conversion device according to the fourth embodiment.
22 (a) to 22 (c) are diagrams showing an example of a data format including a figure pattern having a rotation angle and a dose modulation amount in the fourth embodiment.
23 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the fifth embodiment.
24 (a) to 24 (c) are diagrams for explaining an example of a data format including a figure pattern group, a dose amount defining position and a dose amount of modulation in the fifth embodiment.
25 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the sixth embodiment.
26 is a diagram for explaining an example of a cell, a figure pattern group, and a dose amount defining position in the sixth embodiment.
27 is a diagram showing an example of a data format including the DOS modulation amount in the sixth embodiment;
Figs. 28 (a) and 28 (b) are diagrams for explaining an example of a data format including a cell, a figure pattern group, and a dose modulation amount in the seventh embodiment.

17 is a diagram showing an example of a data format of pattern data of a figure pattern including information on the amount of DOS modulation. In Fig. 17, a rectangular pattern whose size in the x direction is w and size in the y direction is h is shown as an example. In the data format shown in Fig. 17, a 1-byte code (code _DOSE ) indicating a DOS modulation amount, a 2-byte DOS modulation amount, a 1-byte code (code _FIG ) indicating a graphics type, (X, Y) and sizes (W, H) in the x and y directions of each 2 bytes are defined. Therefore, when pattern data of such a figure pattern is created in the data format shown in Fig. 17, it can be defined as a data amount of 1 + 2 + 1 + 3 x 2 + 2 x 2 = 14 bytes.

Fig. 18 is a diagram for explaining the data amount of the pattern data in the case of dividing into the small figure pattern of the necessary dos modulation amount. In the example of Fig. 18, for example, a rectangular pattern of 200 nm x 200 nm is shown. In the case where the DOS modulation amount is not defined, one byte of code (code _DOSE ) and two bytes of DOS modulation amount are unnecessary in the data format shown in Fig. 17, and thus can be defined as the data amount of 11 bytes. However, for example, when the dose modulation amount is defined by a size of 10 nm, it is necessary to divide the rectangular pattern shown in FIG. 18 into 20 pieces in the x and y directions, respectively. Therefore, pattern data including 400 DOS modulation amounts of 20 x 20 = 20 from one figure is required. When the data format described in Fig. 17 is used, a data amount of 400 x 14 = 5600 bytes is required. As described above, there is a problem that, for example, the amount of data of 11 bytes is increased to the amount of data of 5600 bytes in order to correct the small influence range.

Fig. 19 is a diagram for explaining the data amount of the pattern data in the sample unit when dividing into a small figure pattern of necessary dose modulation amount. Fig. In the example of Fig. 19, a chip area (drawing area) of 80 mm x 120 mm is formed on the mask substrate for exposure. It is assumed that a DOS modulation amount map is created for such a chip area. In the DOS modulation amount map, for example, the DOS modulation amount is defined as 10 bits. For example, in the case of defining a dose modulation amount for each mesh region of 10 nm size, (80000000/10) nm x (120000000/10) nm x 10 bits / 8 bits = 109 TB Is required. In the report of the ITRS (International Technology Roadmap for Semiconductors) 2012, a pattern of a half pitch HP of 28 nm to 10 nm is 2.2 TB to 2.9 TB per one mask. Even in comparison with this data amount, The amount of data is large.

Hereinafter, a method of generating drawing data using a data format capable of reducing the amount of data even when it is necessary to define the dose amount as a fine size will be described in the embodiments.

Hereinafter, in the embodiments, a configuration using an electron beam will be described as an example of a charged particle beam. However, the charged particle beam is not limited to the electron beam, and may be a beam using charged particles such as ion beams.

Embodiment 1

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a conceptual diagram showing a configuration of a drawing system according to a first embodiment. FIG. 1, the drawing system has a drawing apparatus 100 and a drawing data conversion apparatus 300. [

1, the drawing apparatus 100 includes a drawing unit 150 and a control unit 160. [ The drawing apparatus 100 is an example of a multi-charged particle beam drawing apparatus. The drawing unit 150 includes an electron lens barrel 102 and a drawing chamber 103. The electron gun barrel 102 includes an electron gun 201, an illumination lens 202, a multi-beam forming plate 203, a blanking plate 204, a reduction lens 205, a limiting aperture member 206, An objective lens 207 and a deflector 208 are disposed. In the drawing chamber 103, an XY stage 105 is disposed. On the XY stage 105, a sample 101 such as a mask to be a substrate to be drawn is arranged at the time of drawing. The sample 101 includes a mask for exposure in manufacturing a semiconductor device or a semiconductor substrate (silicon wafer) on which a semiconductor device is manufactured. In addition, the sample 101 includes mask blanks to which a resist is applied, in which nothing is drawn yet.

The control unit 160 includes storage devices 140 and 142 such as a control computer 110, a memory 111, a control circuit 120, and a magnetic disk device. The control calculator 110, the memory 111, the control circuit 120 and the storage devices 140 and 142 are connected via a bus not shown. In the control calculator 110, a shot data generation unit 112, an irradiation amount calculation unit 113, and a rendering control unit 114 are arranged. A series of 'parts' such as the shot data generation unit 112, the irradiation amount calculation unit 113 and the rendering control unit 114 includes at least one electric circuit, at least one computer, at least one processor, , Or at least one circuit such as at least one semiconductor device. Information input to and output from the shot data generation unit 112, the irradiation dose calculation unit 113, and the imaging control unit 114 and information during the calculation are stored in the memory 111 every time.

Storage devices 340 and 342 such as magnetic disk devices are connected to the rendering data conversion device 300 via a bus (not shown).

The control calculator 110 of the drawing apparatus 100 is also connected to the drawing data conversion apparatus 300 and the storage apparatuses 340 and 342 through a network not shown. In the storage device 340, layout data (CAD data) as design data is stored. Then, data conversion is performed in the drawing data conversion apparatus 300, and drawing data that can be input to the drawing apparatus 100 is created. The created rendering data is stored in the storage device 342.

Here, in FIG. 1, necessary configurations are described for explaining the first embodiment. The drawing apparatus 100 may be provided with other necessary structures. An input device such as a mouse or a keyboard, a monitor device, an external interface circuit, and the like may be connected to the drawing device 100.

In order to perform the drawing process with the drawing apparatus 100, it is necessary to convert such layout data into drawing data that can be input to the drawing apparatus 100. [ Although not shown in the drawings, the drawing apparatus 100 generally has a proximity effect due to back scattering having an influence range of about 10 mu m, a fogging effect of mm order, and a chrome effect range of mm order A process for correcting the pattern dimension CD with respect to the dimensional fluctuation caused by the loading effect is performed. However, even when the calculated dose amount in the drawing apparatus is used, a correction residual (residual) or the like may remain. As a factor of such a correction residual, there is a dimensional fluctuation due to the phenomenon of influence range smaller than the influence range of about 10 μm. For example, a dimensional variation caused by a phenomenon with an influence range of about 100 nm is assumed. It is necessary to define a dose amount or a dose modulation amount for each mesh size of, for example, 10 nm, which is about 1/10 of the influence range, in order to correct the dimensional fluctuation caused by the phenomenon of influence of about 100 nm . For this reason, the user sets the dose modulation amount for each of these minute sizes at the stage before inputting to the drawing apparatus. However, as described above, if the definition is made for each mesh size of 10 nm, for example, the data amount of the rendering data becomes enormous.

Here, the variation of the dimensional variation due to the above-described phenomenon in the figure pattern group and the adjacent figure pattern group gradually changes without a steep change. Therefore, the information of the necessary dose amount or the amount of dose modulation (rate) may be changed gradually without changing steeply. Therefore, in the first embodiment, a data format for defining a dose amount or a dose modulation amount (rate) at a plurality of representative points is used without defining a dose amount or a dose amount (rate) for each micro size.

2 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the first embodiment. 2, the division setting section 10, the dose setting section 12, the drawing data creating section 14, the control section 16, and the memory 18 are arranged in the drawing data conversion apparatus 300 have. A series of 'parts' such as the division setting section 10, the dose setting section 12, the drawing data creating section 14 and the control section 16 is composed of at least one electric circuit, at least one computer, at least one At least one circuit board, at least one semiconductor device, or the like. Information input to and output from the division setting section 10, the dose setting section 12, the drawing data creating section 14, and the control section 16 and the information in the arithmetic operation are stored in the memory 18 each time.

Here, Fig. 2 shows the necessary configuration for explaining the first embodiment. The rendering data conversion apparatus 300 may have other structures that are normally required. For example, an input device such as a mouse or a keyboard, a monitor device, and an external interface circuit may be connected.

3 (a) to 3 (c) are diagrams showing an example of a data format including a DOS modulation amount in the first embodiment. Here, as shown in Fig. 3 (b), a rectangular figure pattern 30 whose size in the x direction is w and size in the y direction is h is defined. In the example of FIG. 3 (b), each dose amount or DOS modulation ratio at each position of four corner portions (P ₀₀ , P ₁₀ , P _01, and P ₁₁ ) of the figure pattern 30 is defined. Here, the index 00 represents the lower left corner portion of the rectangular figure pattern 30. And the index 10 represents the lower right corner portion of the rectangular figure pattern 30. The index 01 represents the upper left corner of the figure pattern 30 of a rectangle. And the index 11 represents the upper right corner portion of the rectangular figure pattern 30. The coordinate of the lower left corner of the figure pattern 30 is represented by (x ₀ , y ₀ ).

Figure 3 (a), the data format as shown in the expression code of one byte indicating that the dose amount or the dose modulation amount (rate) (code _D0), 4 of the edge portion (P _00, P _10, P ₀₁ and P ₁₁₎ (Or the ds modulation ratio) (d ₀₀ , d ₁₀ , d ₁₁ , d ₀₁ ) at each position of the memory cell is defined. Then, following the dose amount information, a 1-byte graphic type code (code _FIG ) indicating the figure type, coordinates (X, Y) of the figure pattern of 3 bytes each of the figure pattern, and a size (W, H) are defined. The coordinates (X, Y) of the figure pattern of each 3 bytes of the figure pattern and the sizes (W, H) in the x and y directions of each 2 bytes of the figure pattern code (code _FIG ) It shows the figure information of the pattern. The expression code (code _D0 ) and each dose amount (or the dos modulation rate) (d ₀₀ , d ₁₀ , d ₁₁ , d ₀₁ ) indicate the dose amount information. The dose amount information may be defined after the figure information of the figure pattern. Therefore, in the data format shown in Fig. 3A, 1 + 2 x 4 + 1 + 3 x 2 + 2 x 2 = 20 bytes can be defined for one rectangular pattern.

As described above, the drawing data conversion apparatus 300 is configured to convert the graphic information of the graphic pattern 30 and the respective dose amounts or DOS modulation rates at the positions of the corners of the graphic pattern 30 before or after the graphic information is defined In the data format in which the dose amount information indicating the dose amount information indicating the dose amount is continuously defined.

In the drawing apparatus 100, it is sufficient to calculate the dose amount for each necessary size by using such drawing data. The dose amount (or the dose modulation amount) (d (x, y)) of the coordinates (x, y) shown in FIG. 3C can be obtained, for example, by linear interpolation ). By this calculation, the dose amount of each position (x, y) in the figure pattern 30 can be calculated.

(1) d (x, y ) = (1 / w · h) {d 00 (x 0 + w - x) (y 0 + h - y)

+ d ₁₀ (x - x ₀ ) (y ₀ + h - y)

+ d ₀₁ (x ₀ + w - x) (y - y ₀ )

+ d ₁₁ (x - x ₀ ) (y - y ₀ )}

4 (a) to 4 (c) are diagrams showing another example of a data format including the DOS modulation amount in the first embodiment. Here, Fig. 4, as shown in (b), Figure 3 (b) and the four corner portions of the same figure pattern _{(30) (P 00, P} 10, P 02 and P ₁₂₎ in addition to, and also, more on the way of sides The amount (or the amount of DOS modulation (rate)) is defined by the points P ₀₁ and P ₁₁ . 4B, the dose amount information also includes a dividing line for dividing the figure pattern 30 in the y direction at the position of the coordinate y ₁ (y-coordinate) and the figure pattern 30, the definition of the dose amount (or dose modulation amount (rate)) at the intersection point (P ₁₁₎ of the left side and the right side of the intersection point (P ₀₁₎ and the dividing line shape pattern 30 of the. In the example of Fig. 4 (b), the figure pattern 30 is divided in the y direction, but the present invention is not limited to this. The figure pattern 30 may be divided in the x direction. In this case, the amount of the dose (or the dose amount (or the dose amount) of the pattern pattern 30 at the intersection of the dividing line dividing the figure pattern 30 in the x direction and the appearance of the figure pattern 30 and the intersection of the dividing line and the figure pattern 30 Rate)). In Fig. 4 (b), the index 00 represents the lower left corner of the figure pattern 30 having a rectangular shape. And the index 10 represents the lower right corner portion of the rectangular figure pattern 30. And the index 02 represents the upper left corner of the figure pattern 30 of the rectangle. And the index 12 represents the upper right corner portion of the rectangular figure pattern 30. The index 01 represents the intersection of the dividing line dividing the figure pattern 30 in the y direction and the left side of the figure pattern 30. [ The index 11 shows the intersection of the dividing line dividing the figure pattern 30 in the y direction and the right side of the figure pattern 30. [ The coordinates of the lower left corner of the figure pattern 30 are denoted by x ₀ , y ₀ . The dose amount (or the dose modulation amount (rate)) of the coordinates (x, y) to be calculated is calculated as shown in Fig. 4 (c) (1) using the data of the four corners of the rectangular frame surrounded by the four neighboring points in which the coordinates of the four corners are defined.

In the data format shown in Fig. 4A, a 1-byte representation code (code _DD ) indicating that the dose amount (or the dose modulation amount (rate)) is used, a 2-byte division number (ndivx) , The division number (ndivy) of 2 bytes in the y direction of the figure pattern, the division y coordinate (y ₁ ) of 3 bytes, the four corner portions (P ₀₀ , P ₁₀ , P ₀₁ , P ₁₁ ) (Or the ds modulation ratio) (d ₀₀ , d ₁₀ , d ₀₁ , d ₁₁ , d ₀₂ , d ₁₂ ) of the two bytes at the respective positions of the respective bits P ₀₁ and P ₁₁ are defined. Then, following the dose amount information, a 1-byte graphic type code (code _FIG ) indicating the figure type, coordinates (X, Y) of the figure pattern of 3 bytes each of the figure pattern, and a size (W, H) are defined. The coordinates (X, Y) of the figure pattern of each 3 bytes of the figure pattern and the sizes (W, H) in the x and y directions of each 2 bytes of the figure pattern code (code _FIG ) It shows the figure information of the pattern. Expression codes (code _DD), the dividing number (ndivx), the dividing number (ndivy), dividing the height (y _1), and each dose (or doses modulation _{factor) (d 00, d 10,} d 01, d 11, d 02 , and d ₁₂ represent dose information. The dose amount information may be defined after the figure information of the figure pattern. Therefore, in one data format divided in the y direction shown in Fig. 4A, 1 + 2 x 2 + 3 + 2 x 6 + 1 + 3 x 2 + 2 x 2 = 31 bytes Can be defined.

5 (a) and 5 (b) are diagrams showing another example of a data format including a DOS modulation amount in the first embodiment. 5B, in addition to the four corner portions of the rectangular figure pattern 30, the dividing lines for dividing the figure pattern 30 in the x and y directions and the dividing lines for dividing the figure pattern 30 (Or a dose modulation rate (rate)) at each intersection of each side and each intersection of dividing lines. In the example of Fig. 5 (b), the figure pattern 30 is divided m times in the x direction and n times in the y direction. 5B, the figure pattern 30 is divided into a coordinate (x ₁ ) to a coordinate (x _m ) (divided x coordinate) in the x direction and a coordinate (y ₁ ) y _n ) (split y coordinate). When the coordinates of the lower left corner of the figure pattern 30 are (x ₀ , y ₀ ), the x coordinate of each position at which the dose amount (or the dose modulation amount (rate)) is defined is x ₀ , x ₁ , ..., x _m , x _m _{+ 1} , and the y coordinate of each position becomes y ₀ , y ₁ , ..., y _n , y _n _{+ 1 in} turn toward the y direction. Accordingly, the index is also expressed as a combination of values 0, 1, ..., n, n + 1 in order toward 0, 1, ..., m, m + 1 in the x direction .

In the data format shown in Fig. 5A, a 1-byte expression code (code _DD ) indicating that the dose amount (or the DOS modulation amount (rate)), a 2-byte division number (ndivx) , PICS (ndivy), division of the respective 3-byte partition x coordinate (x ₁ ~ x _m), each three bytes of the y-coordinate (y ₁ ~ y _n), the figure pattern in the y direction of the second byte of a figure pattern ( 30 and the respective intersections of the respective division lines for dividing the figure pattern 30 in the x and y directions and the respective sides of the figure pattern 30 and the respective positions of the respective intersections of the division lines dose (or doses modulation amount (rate)) in _{(d 00, d 10, d} 20, d m0, d (m + 1) 0, ··· d 0 (n + 1), d 1 (n + ₁₎ , d _{2 (n + 1)} , d _{m (n + 1)} and d _{(m + 1) (n + 1)} . Then, following the dose amount information, a 1-byte graphic type code (code _FIG ) indicating the figure type, coordinates (X, Y) of the figure pattern of 3 bytes each of the figure pattern, and a size (W, H) are defined.

The coordinates (X, Y) of the figure pattern of each 3 bytes of the figure pattern and the sizes (W, H) in the x and y directions of each 2 bytes of the figure pattern code (code _FIG ) It shows the figure information of the pattern. Expression codes (code _DD), the dividing number (ndivx), the dividing number (ndivy), dividing the x coordinate (x ₁ ~ x _m), divided y-coordinate _{(y 1 ~ y n),} 4 of the edge portion, each of the divided lines and shapes pattern 30, each of the intersection and the divided dose (or doses modulation amount (rate)) at each position of each intersection point between the line _{(d 00, d 10, d} 20, d m0, of the respective sides of the d _{( m + 1) 0, ··· d} 0 (n + 1), d 1 (n + 1), d 2 (n + 1), d m (n + 1), d (m + 1) (n + ₁₎ ) represents dose information. The dose amount information may be defined after the figure information of the figure pattern. Therefore, in the data format of m times divided in the x direction and divided n times in the y direction shown in Fig. 5A, 1 + 2 x 2 + 3 x (m + n) + 2 x (m + 2) (n + 2) + 1 + 3 x 2 + 2 x 2 = (24 + 2 mn + 7 m +7 n) bytes.

As described above, the drawing data conversion apparatus 300 can acquire, as the dose information, in addition to the respective dose amounts (or the dose modulation amounts (rate)) at the respective corner portions of the figure pattern 30, (Or a dose modulation amount (rate)) at an intersection between a dividing line dividing a plurality of pixels 30 in at least one of x direction and y direction and any side of the figure pattern.

The method of generating drawing data in such a data format carries out each step of the division setting step, the dose amount setting step, and the drawing data creation step.

The division setting section 10 reads the CAD data from the storage device 340 and sets the division number (ndivx) in the x direction and the division number (ndivy) in the y direction for each figure pattern. In addition, each division coordinate is set. When the number of divisions (ndivx = m), the coordinates (x ₁ ) to coordinates (x _m ) in the x direction (division x coordinate) are set. Likewise, in the case of the number of divisions (ndivy = n), coordinates (y ₁ ) to coordinates (y _n ) in the y direction (y coordinate) are set. If not divided, the number of divisions (ndivx) and the number of divisions in the y direction (ndivy) may be set to zero. Or, in the case of not dividing, the division setting step may be omitted.

A dose setting process, the dose amount setting section 12, the x-coordinate, including each figure pattern, the four corner x coordinate (x _0, x _m ₊ ₁₎ portion of such a figure pattern (x _0, x _1, _{···, x m, x m +} 1) and y coordinate _{(y 0, y 1, ···} , y n, y n + including the four corners of the y-coordinate _{(y 0, y n + 1} ) (Or the dose modulation amount (rate)) at each position by a combination of the above-described _first and _{second embodiments} . In the case of not dividing, it is sufficient to set the dose amount (or the dose modulation amount (rate)) at each position of the four corner portions.

As the drawing data creating step, the drawing data creating unit 14 sets the amount of the set dose (or the set amount) at each of the above-mentioned positions including the four corner portions before or after the figure information and the figure information of the figure pattern are defined (Imaging data) is generated in accordance with the data format in which the dose amount information indicating the dose amount information (DOS modulation amount (rate)) is continuously defined.

Then, the control unit 16 outputs the drawing data that summarizes the pattern data of each formed figure pattern to the storage device 342 and stores the drawing data. As described above, imaging data to be input to the imaging apparatus 100 that draws the figure pattern on the sample 101 using the electron beam 200 is created.

6 is a diagram showing an evaluation pattern for explaining the effect of the first embodiment. In Fig. 6, for example, an array arrangement in which a plurality of squares of 200 nm on one side are arranged is shown. In addition, the interval between the figure patterns is 200 nm (space). Here, among the array arrangements shown in Fig. 6, the central square A is to be evaluated. When a dose amount (or a dose modulation amount (rate)) is required for every 10 nm, for example, in the conventional method, a data amount of 5600 bytes is required as described above. (400/10) x (400/10) x (10/10) x 400 nm when the dose map is created separately from the pattern data. 8) = 2000 bytes of data is required. On the other hand, in Embodiment 1, the following data amount can be suppressed.

7 is a diagram showing an example of the number of divisions of the evaluation pattern for explaining the effect of the first embodiment. Fig. 7 shows a case of dividing into two in the x direction and two in the y direction in order to set a position defining the dose amount (or the dose modulation rate (rate)). Therefore, in the pattern data of the figure pattern 30, the dose amount (or the dose modulation amount (rate)) at 12 points is defined in addition to the four corners. Therefore, when pattern data is created in accordance with this data format, it is possible to suppress the data amount of 60 bytes, which is 11 bytes for graphic information and 49 bytes for dose information.

8 is a diagram showing an example in which the number of divisions of the evaluation pattern for explaining the effect of the first embodiment is different. 7 shows a case where five positions are divided in the x direction and five positions in the y direction in order to set the position defining the dose amount (or the dose modulation rate (rate)). Therefore, in the pattern data of the figure pattern 30, the dose amount (or the dose modulation amount (rate)) at the position of 45 points is defined in addition to the four corners of the corner. Therefore, when pattern data is created in accordance with this data format, the amount of data can be suppressed to 11 bytes for the graphic information and 144 bytes for 133 bytes of the dose information.

9 is a diagram showing the relationship between the number of divisions and the amount of data in the first embodiment. As shown in Fig. 9, in order to set a position defining the dose amount (or the dose modulation rate (rate)), in the case of dividing into two in the x direction and two in the y direction, the pattern data of one figure pattern is 60 It can be suppressed by the data amount of bytes. In the case of dividing into three in the x direction and three in the y direction, the pattern data of one figure pattern can be suppressed to a data amount of 84 bytes. In the case of dividing into four in the x direction and four in the y direction, the pattern data of one figure pattern can be suppressed to a data amount of 112 bytes. In the case of dividing into five in the x direction and five in the y direction, the pattern data of one figure pattern can be suppressed to a data amount of 144 bytes.

As described above, according to the first embodiment, the data amount of the pattern data (rendering data) can be greatly reduced.

Subsequently, the drawing apparatus 100 inputs (transmits) such drawing data from the storage device 342, and stores the drawing data in the storage device 140. [ Then, the drawing operation is performed in the drawing apparatus 100.

As the shot data generation process, the shot data generation unit 112 reads the rendering data from the storage device 140 and generates shot data specific to the device. The shot data generation unit 112 reads out the drawing data from the storage device 140 and reads the drawing data of the sample 101 or a plurality of pixel areas (mesh areas) And calculates the areal density of the pattern arranged in each pixel region. For example, first, the drawing region of the sample 101, or the chip region to be drawn, is divided into a rectangular stripe region with a predetermined width. Then, each stripe region is virtually divided into the above-mentioned plurality of pixel regions. The size of the pixel region is suitable if it is, for example, a beam size or smaller. For example, a size of about 10 nm is suitable. For example, corresponding drawing data is read from the storage device 140 for each stripe area, and a plurality of figure patterns defined in the drawing data are assigned to the pixels. Then, the area density of the figure pattern arranged for each pixel may be calculated.

As the dose calculation process, first, the dose calculation unit 113 calculates the dose amount (or dose amount (rate)) d (x (y)) at the desired position (x, y) by using the dose amount information defined in the rendering data , y)). The calculation method of the dose amount (or the dose modulation amount (rate)) (d (x, y)) may be obtained by calculation of the primary interpolation in the same manner as in equation (1). However, the coordinates (x ₀ , y ₀ ) in the expression (1) are the values of the four points near the coordinates (x, y) The coordinates of the lower left corner of the rectangular frame surrounded by the coordinates of the lower left corner. The width dimension w in the formula (1) uses the width dimension of the rectangular frame surrounded by the four points in the vicinity. The height dimension h in the formula (1) uses the height dimension of the rectangular frame surrounded by the four points in the neighborhood. The dose amount (or the dose modulation rate (rate)) (d ₀₀ ) in the equation (1) is calculated by multiplying the dose amount at the position of the lower left corner of the rectangular frame surrounded by these four points Modulation rate (rate)). The dose amount (or the dose modulation amount (rate)) (d ₁₀ ) in the equation (1) is calculated by multiplying the dose amount at the position of the lower right corner of the rectangular frame surrounded by these four points Modulation rate (rate)). The dose amount (or the dose amount (rate)) (d ₀₁ ) in the equation (1) is calculated by multiplying the dose amount at the position of the upper left corner of the rectangular frame surrounded by these four points Modulation rate (rate)). The dose amount (or the dose modulation amount (rate)) d11 in the equation (1) is calculated by multiplying the dose amount at the position of the upper right corner of the rectangular frame surrounded by the four points (Rate)) is used.

Here, as an example, the dose amount (or the dose modulation amount (rate)) (d (x, y)) is obtained by the first-order interpolation, but is not limited thereto. The dose amount (or the dose modulation amount (rate)) at each defined point may be approximated by a predetermined polynomial. For example, it may be approximated by a polynomial of a second order or higher order. Then, the dose amount (or the dose modulation amount (rate)) (d (x, y)) at the desired position (x, y) may be calculated from the obtained approximate expression.

The irradiation dose calculation unit 113 then calculates the dose D (x, y) at each pixel position (x, y) using the obtained d (x, y). The irradiation dose D (x, y) can be calculated by multiplying the reference dose Dbase by the dose amount (or the dose modulation amount (rate)) (d (x, y)) and the area density. In the case where the proximity effect correction amount is not considered in the dose amount (dose modulation amount) defined in the rendering data, it is also appropriate to further multiply the proximity effect correction irradiation coefficient for correcting the proximity effect. Alternatively, it is also suitable to multiply by a correction coefficient such as a fogging effect correction irradiation coefficient for correcting the fogging effect or a loading effect correction irradiation coefficient for correcting the loading effect. The correction calculation for each phenomenon such as proximity effect correction may be the same as the conventional method.

As the drawing process, the drawing control unit 114 outputs a control signal to the control circuit 120 so as to perform the drawing process. The control circuit 120 receives the data of each correction dose for each pixel and controls the drawing unit 150 in accordance with the control signal from the drawing control unit 114. The drawing unit 150 reads the multi- The figure pattern is drawn on the sample 100 by using the figure pattern. Specifically, it operates as follows.

The electron beam 200 emitted from the electron gun 201 (emitting portion) illuminates the entire multi-beam forming plate 203 almost vertically by the illumination lens 202. The multi-beam forming plate 203 is provided with holes (openings) of n columns (m, n? 2) in the longitudinal (y direction) m rows and the lateral (x directions) rows in a matrix shape at a predetermined arrangement pitch. For example, 512 x 8 rows of holes are formed. Each of the holes is formed into a rectangle having the same dimensional shape. Alternatively, it may be circular with the same outer diameter. The electron beam 200 illuminates an area including all the plurality of holes. Each of the electron beams 200 irradiated at the positions of the plurality of holes passes through a plurality of holes of the multi-beam forming plate 203, thereby forming a plurality of electron beams (multi-beams) 20a to 20e Is formed. These multi-beams 20a-e pass through respective blanking plates of the blanking plate 204, respectively. In the blanking plate 204, through-holes (openings) for passing the beams of the multi-beams are opened at positions corresponding to the respective holes of the multi-beam forming plate 203. (Blanker) for pairing for blanking are arranged through the through-holes corresponding to the positions near the respective through-holes. That is, a plurality of blankers corresponding to the number of beams are arranged. This blanker deflects the electron beam 20 individually (makes the blanking deflection) individually.

The multi-beams 20a to e passing through the blanking plate 204 are contracted by the reducing lens 205 and moved toward the center hole formed in the limiting aperture member 206. [ Here, the electron beam 20 deflected by the corresponding blanker of the blanking plate 204 is displaced from the hole in the center of the limiting aperture member 206 (blanking aperture member) As shown in Fig. On the other hand, the electron beam 20, which was not deflected by the corresponding blanker of the blanking plate 204, passes through the hole in the center of the limiting aperture member 206 as shown in Fig. By ON / OFF of the individual blanking mechanism, blanking control is performed to control ON / OFF of the beam. As such, the limiting aperture member 206 shields each beam deflected by the individual blanking mechanism to be in the beam-off state. A beam of shot is formed by the beam passing through the limiting aperture member 206, which is formed from the beam ON to the beam OFF. The multi-beam 20 that has passed through the limiting aperture member 206 is focused by the objective lens 207 and becomes a pattern of the desired reduction ratio and is deflected by the deflector 208 into the limiting aperture member 206 (All of the multi-beams 20) are deflected in the same direction and irradiated to the respective irradiation positions on the sample 101 of the respective beams. Further, for example, when the XY stage 105 is continuously moving, the deflector 208 controls the irradiation position of the beam to follow the movement of the XY stage 105. The multi-beam 20 to be irradiated at one time is ideally arranged at a pitch obtained by multiplying the arrangement pitch of the plurality of holes of the multi-beam forming plate 203 by the desired reduction ratio described above. The drawing apparatus 100 performs a drawing operation in such a manner that the shot beams are successively and sequentially irradiated, and when drawing a desired pattern, a necessary beam according to the pattern is controlled to be ON by blanking control.

As described above, according to the first embodiment, it is possible to eliminate the need to define the dose amount information for each fine size. In addition, rendering data can be generated regardless of the correction size of the dose amount. Therefore, the amount of data can be reduced. Furthermore, since the map of the dose amount (or the amount of dose modulation (rate)) is created in a place where the figure exists, it is not necessary to create an area having no figure like the conventional dose amount map, . Further, since the position of the dividing line can be set to be variable, it is easy to create a mesh having a variable mesh size. Therefore, a more compressed dose amount (or dose amount (rate)) map can be easily generated.

Embodiment 2 Fig.

Embodiment 1 shows a data format in which a dose amount (or a dose modulation amount (rate)) is defined at a position such as a corner portion of a figure pattern with respect to one figure type pattern. In other words, the data format in which the shape of each figure pattern itself is used in the dose amount (or dose amount (rate)) map is shown. However, it is not limited thereto. In the second embodiment, a data format in which at least one figure pattern is defined as a group of groups and a dose amount (or a dose modulation amount (rate)) is defined for each group will be described. In Embodiment 2, the structure of the drawing apparatus 100 is the same as in Fig. The contents other than the points described below are the same as those of the first embodiment.

10 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the second embodiment. 10, except that a group processing unit 19 and a rectangular frame setting unit 20 are further added in the drawing data conversion apparatus 300. [ A series of 'parts' such as the division setting section 10, the dose setting section 12, the drawing data creating section 14, the control section 16, the group processing section 19, and the rectangular frame setting section 20 , At least one electric circuit, at least one computer, at least one processor, at least one circuit board, or at least one semiconductor device. Information input to and output from the division setting section 10, the dose setting section 12, the drawing data creating section 14, the control section 16, the group processing section 19, and the rectangular frame setting section 20 And stored in the memory 18 each time.

Here, in Fig. 10, necessary configurations are described in describing the second embodiment. The rendering data conversion apparatus 300 may have other structures that are normally required. For example, an input device such as a mouse or a keyboard, a monitor device, and an external interface circuit may be connected, which is the same as the first embodiment.

Figs. 11 (a) to 11 (g) are diagrams for explaining a figure pattern group and a dose amount defining position in the second embodiment. Fig. 11 (a) to 11 (f) show an example of a group of continuous figure patterns. Here, a figure pattern group in which a rectangular pattern is continuous is shown. In the second embodiment, such a group of consecutive figure patterns is used as one group, and a dose amount (or dose amount (rate)) map is created for each group.

The group processing unit 19 as the group processing step reads out the CAD data in which the figure information of the plurality of figure patterns is defined from the storage unit 340 and reads out the plurality of figure patterns defined in the CAD data at least for each consecutive figure pattern group Group into one group. If there is only one continuous group of figure patterns, one group is created. If a plurality of groups of figure patterns are defined, a plurality of groups may be created. For example, a group of consecutive figure patterns shown in Fig. 11 (c) are grouped as one group. 11 (a) to 11 (f), groups of remaining figure pattern groups may be grouped.

As the rectangular frame setting process, the rectangular frame setting unit 20 sets a rectangular frame surrounding the figure pattern group of the group for each group. The rectangle frame is suitable, for example, by using a circumscribed rectangle of the figure pattern group. However, the present invention is not limited to this, and as shown in Fig. 11 (g), the rectangular frame 40 may be a frame slightly larger than the circumscribed rectangle. For example, in the case of setting the dividing line to be described later in accordance with a predetermined grid, the rectangular frame 40 itself may be set according to such a grid. In the second embodiment, such a rectangular frame 40 is used as a dose amount (or a dose modulation amount (rate)) map. As shown in Fig. 11 (g), the rectangular frame setting unit 20 defines the size of the rectangular frame 40 (map) in the x direction as Wm and the size in the y direction as hm. The rectangular frame setting unit 20 sets the rectangular frame 40 from the reference position (e.g., the lower left corner) of the figure pattern at the first (e.g. left end) among the group of figure pattern groups surrounded by the rectangular frame 40 (X _off , y _off ) up to a reference position (e.g., the lower left corner) of the map (map). Therefore, the pattern data (drawing data) of the figure pattern group including the rectangular frame 40 shown in Fig. 11 (g) is generated by storing the figure information of the figure pattern group and the shape information of the rectangular frame 40 in the dose amount (Rate) map 32 is defined.

As the division setting process, the division setting section 10 sets the division number (ndivx) of the rectangular frame 40 in the x direction and the division number (ndivy) in the y direction for each group. In addition, each division coordinate is set. When the number of divisions (ndivx = m), the coordinates (x ₁ ) to coordinates (x _m ) in the x direction (division x coordinate) are set. Likewise, in the case of the number of divisions (ndivy = n), coordinates (y ₁ ) to coordinates (y _n ) in the y direction (y coordinate) are set. If not divided, the number of divisions (ndivx) and the number of divisions in the y direction (ndivy) may be set to zero. Otherwise, the division setting step may be omitted. The dividing method may be the same as that described in Figs. 4 (a) to 4 (c), 5 (a), 5 (b) and 6. At this time, the figure pattern can be read by replacing it with the rectangular frame 40.

A dose setting step dose setting unit 12, x coordinates of four corners of the each group, art rectangular frame (40), (x _0, x _m ₊ _1), x coordinate (x _0, x ₁ containing _{, ···, x m, x m} + 1) and the x-coordinate (y _0, y _1, ···, including the four corners of the y-coordinate _{(y 0, y n + 1} ), y n, y n It sets a dose (or doses modulation amount (rate)) at each position by the combination of a ₊ _1). In the case of not dividing, it is sufficient to set the dose amount (or the dose modulation amount (rate)) at each position of the four corner portions.

12 is a diagram showing another example of a data format including the DOS modulation amount in the second embodiment. Herein, in addition to the four corner portions of the rectangular frame 40, in addition to the intersection points of the respective dividing lines dividing the rectangular frame 40 in the x and y directions and the respective sides of the rectangular frame 40, Define the dose amount (or DOS modulation amount (rate)) at each intersection. In the example of Fig. 12, the rectangular frame 40 is divided m times in the x direction and n times in the y direction. In the example of Figure 12, the rectangular frame (40) to coordinate a coordinate (x ₁₎ of the x direction (x _m) divided by (divided x-coordinates), and also coordinate in the y direction (y ₁₎ - the coordinates (y _n) (Split y coordinate). When the coordinates of the lower left corner of the rectangular frame 40 is (x ₀ , y ₀ ), the x-coordinate of each position at which the dose amount (or the dose modulation amount (rate)) is defined is x ₀ , x ₁ , ..., x _m , x _m _{+ 1} , and the y coordinate of each position becomes y ₀ , y ₁ , ..., y _n , y _n _{+ 1 in} turn toward the y direction. Accordingly, the index is also expressed as a combination of values 0, 1, ..., n, n + 1 in order toward 0, 1, ..., m, m + 1 in the x direction .

The drawing data creating unit 14 as the drawing data creating step creates drawing data of the group of figure patterns constituting the group and the position of the four corners of the rectangular frame 40 before or after the figure information is defined The pattern data (rendering data) is generated in accordance with the data format in which the dose amount information indicating the set dose amount (or the dosed amount (rate)) in the continuous quantization is continuously defined. The created pattern data (rendering data) is output to the storage device 342 and stored.

In the data format shown in Fig. 12, a 1-byte representation code (code _DD2 ) indicating that the dose amount (or the DOS modulation amount (rate)) is satisfied, a 2-byte division number (ndivx) The number of divisions (ndivy) of the 2 bytes in the y direction of the rectangular frame 40, the offset amount (x _off , y _off ) of each 3 bytes, the size of the rectangular frame 40 in the x and y directions (Wm, hm), in addition to four corner portions of the division of each of the 3 bytes x coordinate (x ₁ ~ x _m), division of the respective three bytes of the y-coordinate (y ₁ ~ y _n), the rectangular frame 40, and, The amount of the dose (or the amount of dose (the ratio of the amount of dose (the rate of change in the amount of the dose) _{)) (d 00, d 10} , d 20, d m0, d (m + 1) 0, ··· d 0 (n + 1), d 1 (n + 1), d 2 (n + 1), dm _{(n + 1)} , d _{(m +} _{1) (} _{n + 1)} ). Following the dose amount information, a 1-byte representation code (code _NR ) indicating a normal expression for simply repeating each figure information, a 1-byte figure type code (code _FIG ) indicating a figure type, (X, Y) of the 3-byte figure pattern and the size (W, H) of each 2-byte in the x and y directions, which are repeated in turn on the figure pattern (1 to N) constituting the figure pattern group, ) Is defined.

A 1-byte representation code (code _NR ) representing a figure type, a 1-byte figure type code (code _FIG ) representing a figure type, a number of 2-byte figure pattern groups, and a figure pattern 1-N constituting a figure pattern group The coordinate (X, Y) of each repeated 3-byte figure pattern and the size (W, H) in the x and y directions of each 2 bytes represent the figure information of the figure pattern group. Expression codes (code _DD), the dividing number (ndivx), the dividing number (ndivy), the offset amount (x _off, y _off), the rectangle size of the x, y direction of the frame (40) (Wm, hm) , dividing the x coordinate (x ₁ to x _m ), y-coordinate (y ₁ to y _n ), four corners, each intersection of each division line and each side of the figure pattern 30, and each position dose (or doses modulation amount (rate)) in _{(d 00, d 10, d} 20, d m0, d (m + 1) 0, ··· d 0 (n + 1), d 1 (n + ₁₎ , d _{2 (n + 1)} , d _{m (n + 1)} , and d _{(m + 1) (n + 1)} represent dose information. The dose amount information may be defined after the figure information of the figure pattern. Therefore, in the data format of n times divided in the x direction and divided in the y direction shown in Fig. 12, 1 + 2 x 2 + 3 x 2 + 2 x 2 + 3 + (m + n) + 2 占 (m + 2) n + 2 + 1 + 1 + 2? 7 n + 10 N) bytes.

As described above, the drawing data conversion apparatus 300 can acquire, as dose information, in addition to the respective dose amounts (or the dose modulation amounts (rate)) at the respective corner portions of the rectangular frame 40, (Or the dose modulation amount (rate)) at the intersection between the dividing line dividing the rectangular frame 40 into at least one of the x direction and the y direction and the side of the rectangular frame 40.

13 is a diagram showing an example of grouping of figure pattern groups in the second embodiment. In the above-described example, there is shown a case where one group of consecutive figure pattern groups is formed. However, the present invention is not limited to this. As shown in Fig. 13, a series of figure pattern groups may be set as a plurality of groups. In the example of Fig. 13, a group of continuous figure pattern groups is divided into groups 1 to 4. The grouping may be set so that the rectangular frame does not become too large. In the example of Fig. 13, the figure pattern group is divided at the position where the connection direction changes by 90 degrees (between groups 1 and 2). For example, the figure pattern group is divided at the position where the width size greatly changes (between groups 2, 3, and 4).

Further, in the above-described example, one group is composed of a plurality of continuous figure patterns (figure pattern groups), but the present invention is not limited to this. One group may be formed by one figure pattern. In the case where one such figure pattern is rectangular, it is assumed that the rectangular frame and the figure pattern have the same shape. However, when such one shape pattern is not a rectangle, for example, a triangle, a trapezoid, , It may be easy to create a map of the amount of dose (or the amount of dose modulation (rate)) by setting the rectangular frame 40. In such a case, it is particularly preferable to form one group by one figure pattern.

Therefore, the group processing unit 19 as the group processing step described above reads out the CAD data in which the figure information of at least one figure pattern is defined from the storage device 340, and reads out at least one figure pattern defined in the CAD data at least They can be grouped into one group. Similarly, as the rectangular frame setting step, the rectangular frame setting unit 20 may input the shape information of at least one figure pattern and set a rectangular frame surrounding at least one figure pattern. Likewise, as the drawing data creation step, the drawing data creation section 14 creates the drawing data of at least one figure pattern and the shape information of the shape data at the four corners of the rectangular frame before or after the figure information is defined, The drawing data may be generated in accordance with the data format in which the dose information indicating the modulation rate is continuously defined.

As described above, in the second embodiment, the rectangular frame 40 is set for each group composed of at least one figure pattern, and a rectangular frame 40 is formed for each of the corners of four corners or the like, the intersection point of the dividing lines and the sides, And creates a data format that defines dose information. Then, the drawing apparatus 100 inputs the drawing data created. Then, in the drawing apparatus 100, information on a plurality of points defined by using such a rectangular frame 40 is obtained by, for example, primary interpolation or the like, Modulation rate (rate)). The calculation method may be the same as in the first embodiment.

As described above, according to the second embodiment, the dose amount information can be defined for each group composed of at least one figure pattern. Therefore, it is possible to eliminate the need to define the dose amount information for each fine size. In addition, rendering data can be generated regardless of the correction size of the dose amount. Therefore, the amount of data can be reduced. Further, according to the second embodiment, since the figure information and the dose information of a plurality of figure patterns are collectively defined, the data amount can be further reduced. In addition, it is not necessary to create an area having no graphic shape like the conventional dose map, and the amount of data can also be reduced in this regard. Further, since a map of the dose amount (or the amount of dose modulation (rate)) is prepared in the vicinity of the graphic group, it is not necessary to create a region having no graphic shape like the conventional dose map, have. Further, since the position of the dividing line can be set to be variable, it is easy to create a mesh having a variable mesh size. Therefore, a more compressed dose amount (or dose amount (rate)) map can be easily generated.

Embodiment 3:

In Embodiments 1 and 2, a dose amount (or a dose modulation amount (rate)) at a desired position is calculated using a dose amount (or a dose modulation amount (rate)) of a plurality of points defined by using a figure pattern or a rectangular frame. ) Can be calculated. However, the present invention is not limited thereto. In the third embodiment, a plurality of mesh areas of a fixed size are set in addition to the map in which the data for primary interpolation is defined in the example described in the first and second embodiments, and the dose amount (or the dose modulation amount (rate) ) Will be described. In Embodiment 3, the structure of the drawing apparatus 100 is the same as in Fig. The contents other than the points described below are the same as those of the first embodiment or the second embodiment.

14 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the third embodiment. 14, except that the fixed size mesh setting unit 22 and the dose setting unit 13 are additionally provided in the drawing data conversion apparatus 300. [ The dose setting unit 12, the dose setting unit 13, the rendering data creating unit 14, the control unit 16, the group processing unit 19, the rectangular frame setting unit 20, A series of 'portions', such as the fixed size mesh setting portion 22, may include at least one electrical circuit, at least one computer, at least one processor, at least one circuit board, or at least one semiconductor device, Circuits. The dose setting unit 12, the dose setting unit 13, the rendering data creating unit 14, the control unit 16, the group processing unit 19, the rectangular frame setting unit 20, The information input to and output from the fixed-size mesh setting unit 22 and the information during the operation are stored in the memory 18 each time.

Here, in Fig. 14, necessary configurations are described in describing the third embodiment.

The rendering data conversion apparatus 300 may have other structures that are normally required. For example, an input device such as a mouse or a keyboard, a monitor device, and an external interface circuit may be connected, which is the same as the first and second embodiments.

The contents of each step from the group processing step to the rectangular frame setting step are the same as those in the second embodiment. When the shape of the figure pattern is directly used for each figure pattern without using a rectangular frame, each step from the group processing step to the rectangular frame setting step is not necessary.

The fixed-size mesh setting unit 22 sets a plurality of fixed-size mesh areas 44 in an area other than the rectangular frame 40 (or one figure pattern 30).

15 is a diagram for explaining an example of a dose amount defining position in the third embodiment. 15 shows a rectangular frame 40 (or one figure pattern 30) portion surrounding a figure pattern group constituting one group divided by dividing lines and a rectangular frame 40 (or one rectangular pattern 40) Fig. 6 shows an example of a plurality of mesh areas 44 of a fixed size in an area other than the area (the figure pattern 30). A map of the amount of dose (or dose modulation rate (rate)) is created by the rectangular frame 40 (or one figure pattern 30) and the plurality of mesh areas 44.

The division setting section 10 sets the division number (ndivx) of the rectangular frame 40 (or one figure pattern 30) in the x direction and the division number (ndivx) of the rectangular frame 40 in the y direction (Ndivy) is set. In addition, each division coordinate is set. When the number of divisions (ndivx = m), the coordinates (x ₁ ) to coordinates (x _m ) in the x direction (division x coordinate) are set. Likewise, in the case of the number of divisions (ndivy = n), coordinates (y ₁ ) to coordinates (y _n ) in the y direction (y coordinate) are set. If not divided, the number of divisions (ndivx) and the number of divisions in the y direction (ndivy) may be set to zero. Or, in the case of not dividing, the division setting step may be omitted. The dividing method may be the same as that described in Figs. 4 (a) to 4 (c), 5 (a), 5 (b) and 6. At this time, the figure pattern can be read by replacing it with the rectangular frame 40.

The dose amount setting unit 12 sets the dose amounts of the rectangular frame 40 (or the figure pattern 30) in the group (or each figure pattern) _{(x 0, x m + 1} ) x coordinate _{(x 0, x 1, ···} , x m, x m + 1) and the four corners of the y-coordinate (y _0, y _n ₊ ₁₎ including the (Or a dose modulation amount (rate)) at each position by a combination of x coordinates (y ₀ , y ₁ , ..., y _n , y _n ₊ ₁ ) In the case of not dividing, it is sufficient to set the dose amount (or the dose modulation amount (rate)) at each position of the four corner portions.

The dose setting unit 13 sets the dose amount (or the dose modulation amount (rate)) for each fixed size mesh area 44 as the dose amount setting step (2). For example, it is difficult to cope with a local variation in dose by performing calculation such as linear interpolation using data of a plurality of points set in the rectangular frame 40 (or the figure pattern 30). In such a case, it is only necessary to set such a local dose amount (or a dose modulation amount (rate)) in the mesh area 44 of fixed size.

As the drawing data creation step, the drawing data creation section 14 creates the drawing information (or the figure information of the figure pattern) of the figure pattern group constituting the group by group (or each figure pattern) (Or the amount of dose modulation (rate)) at the positions of the four corners of the rectangular frame 40 (or the figure pattern 30) before or after the dose amount information (the first dose amount Pattern data (drawing data) is generated in accordance with a data format in which information is continuously defined. This data format may contain, in addition to the dose information of the plurality of points using the rectangular frame 40 (or the figure pattern 30), the dose amount (or the dose amount (Second amount of dose information) indicating the amount of modulation (rate)) is defined. The created pattern data (rendering data) is output to the storage device 342 and stored.

Here, in the above-described example, a case has been described in which a plurality of mesh areas 44 are set in the rectangular frame 40 surrounding the figure pattern group constituting the group or in the area outside the figure pattern 30, It does not.

16 is a view for explaining another example of the dose amount defining position in the third embodiment. In Fig. 16, a rectangular frame 41 is set in a part of the figure pattern 33. Fig. Then, a plurality of fixed-size mesh regions 44 are set in an area including the remaining portion of the figure pattern 33. [ The rectangular frame 41 is divided into the aforementioned dividing lines and the dose amount (or the amount of DOS modulation (rate)) is set at the intersection of the four corners of the rectangular frame, the intersection of the dividing line and the sides, You can set it. The map of the dose amount (or the amount of dose modulation (rate)) for the graphic pattern 33 may be formed by the rectangular frame 40 and the plurality of mesh regions 44. In the example of Fig. 16, one figure pattern 33 is divided into a rectangular frame portion and a fixed size mesh portion. However, a group composed of a plurality of figure patterns may be divided into a rectangular frame portion and a fixed size mesh portion .

As described above, according to the third embodiment, it is also possible to define a local dose amount (or a dose amount (rate)) that can not be obtained, for example, by a function calculation such as a first-order interpolation. The amount of data can be reduced as compared with a case where a map is created using only a fixed-size mesh area. It is possible to eliminate the necessity of defining the dose amount information for each fine size for a sufficient area by functional calculation such as linear interpolation.

Then, the drawing apparatus 100 inputs the drawing data created. Then, in the drawing apparatus 100, information on a plurality of points defined by using such a rectangular frame 40 is obtained by, for example, primary interpolation or the like, Modulation rate (rate)). The calculation method may be the same as in the first embodiment. In addition, when the desired position corresponds to the fixed-size mesh area 44, the dose amount (or the dose modulation amount (rate)) defined in the fixed-size mesh area 44 may be used.

In the multi-beam imaging, it is necessary to calculate the dose amount (or the dose modulation amount (rate)) for each pixel. However, in order to correct the dimensional fluctuation caused by the development of the influence range smaller than the influence range of about 10 μm, It is necessary to define every micro size. On the other hand, by using the first to third embodiments, it is possible to eliminate the need to define the dose amount (or the dose amount (rate)) for each fine size or each pixel at the stage of the drawing data input by the multi-beam drawing apparatus have. As described above, by using the dose amount (or the dose modulation amount (rate)) defined at the four corners of the rectangular frame (or the figure pattern), the intersection point of the dividing line and the sides and the intersection point of the dividing lines, In the apparatus, the dose amount (or dose modulation amount (rate)) of a desired pixel region may be calculated by linear interpolation or the like. In this way, the amount of data can be reduced as rendering data for multi-beam rendering.

Embodiment 4.

In the first embodiment described above, the case of setting the division position or the like along the coordinate axis direction of the orthogonal coordinate system in the horizontal (x direction) and vertical (y direction) directions has been described, but the present invention is not limited thereto. In the fourth embodiment, a figure pattern or the like which is not parallel to the coordinate axis direction of the rectangular coordinate system will be described. Hereinafter, contents other than the points to be specifically described are the same as those in the first embodiment.

20 is a diagram showing an example of a figure pattern in the fourth embodiment. In Fig. 20, for example, in a pattern used in a memory, a figure pattern rotated about the coordinate axis direction of the orthogonal coordinate system in the x and y directions is sometimes used. In the two-dimensional dose map along the coordinate axis direction of the orthogonal coordinate system in the x and y directions described above with respect to such figure pattern, it is expected that it is difficult to optimally perform data compression by the first-order interpolation. Here, in the fourth embodiment, as shown in Fig. 20, a format that can be defined for the drawing data of the figure pattern rotated at the rotation angle [theta] will be described.

21 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the fourth embodiment. 21, in the drawing data conversion apparatus 300, a rotation angle setting unit 11 is also arranged. A series of "parts", such as the rotation angle setting section 11, the division setting section 10, the dose setting section 12, the drawing data creating section 14, and the control section 16, , At least one computer such as at least one computer, at least one processor, at least one circuit board, or at least one semiconductor device. Information input to and output from the rotation angle setting section 11, the division setting section 10, the dose setting section 12, the drawing data creating section 14 and the control section 16 and the information in the arithmetic operation are stored in the memory 18 at that time .

Here, in FIG. 21, necessary configurations are described in describing the fourth embodiment. The rendering data conversion apparatus 300 may have other structures that are normally required. For example, an input device such as a mouse or a keyboard, a monitor device, and an external interface circuit may be connected, which is the same as the first embodiment.

22 (a) to 22 (c) are diagrams showing an example of a data format including a figure pattern having a rotation angle and a dose modulation amount in the fourth embodiment. In the example shown in Fig. 22 (a), the rectangular figure pattern 30 is rotated counterclockwise at an angle [theta] with respect to the x direction. Here, as shown in Fig. 22 (c), a rectangular figure pattern 30 (x, y) is formed on the x ', y' coordinate system in which the x, y coordinate system is rotated in the counter- And the intersection points of the dividing lines dividing the figure pattern 30 in the x 'and y' directions and the respective sides of the figure pattern 30 and the intersection points of the respective intersections of the division lines (Or the amount of DOS modulation (rate)). In the example of Fig. 22 (c), the figure pattern 30 is divided m times in the x 'direction and n times in the y' direction. 22 (c), the figure pattern 30 is divided into a coordinate (x ₁ ) to a coordinate (x _m ) (divided x coordinate) in the x 'direction and a coordinate (y ₁ ) (Y _n ) (division y coordinate). When the coordinates of the lower left corner of the figure pattern 30 is (x ₀ , y ₀ ), the x coordinate of each position at which the dose amount (or the dose modulation amount (rate)) is defined is _{x 0, x 1, ···,} x m, _m _{+ 1} is the x, y coordinates of each position y 'and then toward the direction _{y 0, y 1, ···,} y n, y n + 1 is do. 1, ..., m, m + 1 in the x 'direction in the order of 0, 1, ..., n, n + 1 in the y' direction .

In the data format shown in Fig. 22 (b), a 1-byte representation code (code _rot ) indicating a rotation angle, a 4-byte rotation angle (?) Of a figure pattern, and a dose amount (or a dosed amount expression code for indicating a 1-byte (code _DD), the two bytes of the figure pattern x dividing number (ndivy), division of the respective three bytes of the "direction dividing number (ndivx), y of the second byte of the figure pattern to the 'direction x ', y', and y 'of the figure pattern 30 in addition to the four corner portions of the figure pattern 30 and the x coordinate (x ₁ to x _m ), the divided y coordinates (y ₁ to y _n ) (Or the amount of modulation (rate)) (d ₀₀ , d ₁₀ , and d 0) at each intersection of each division line and the respective sides of the figure pattern 30, _{d 20, d m0, d (} m + 1) 0, ··· d 0 (n + 1), d 1 (n + 1), d 2 (n + 1), d m (n + 1), d _{(m + 1) (n + 1)} ) is defined. Then, following the dose amount information, a 1-byte figure type code (code _FIG ) indicating a figure type, a coordinate (X, Y) of a figure pattern of 3 bytes each of the figure pattern, (W, H) are defined. In addition, the actual coordinate value is not the x ', y' coordinate system, and the value in the x, y coordinate system in which the angle (?) Is not rotated is defined.

, A 1-byte representation code (code _rot ) indicating a rotation angle, a 4-byte rotation angle (?) Of a figure pattern, a 1-byte figure type code (code _FIG ) indicating a figure type, (X, Y) and the size (W, H) in the x ', y' direction of each 2 bytes represent the figure information of the figure pattern. Expression codes (code _DD), the dividing number (ndivx), the dividing number (ndivy), dividing the x coordinate (x ₁ ~ x _m), divided y-coordinate _{(y 1 ~ y n),} 4 of the edge portion, each of the divided lines and shapes pattern 30, each of the intersection and the divided dose (or doses modulation amount (rate)) at each position of each intersection point between the line _{(d 00, d 10, d} 20, d m0, of the respective sides of the d _{( m + 1) 0, ··· d} 0 (n + 1), d 1 (n + 1), d 2 (n + 1), d m (n + 1), d (m + 1) (n + ₁₎ ) represents the dose amount information. The dose amount information may be defined after the figure information of the figure pattern. 1 + 4 + 1 + 2 x 2 + 3 x (m + n) for one rectangular pattern in the data format of n times divided into x 'direction division and y' 2 + (m + 2) (n + 2) + 1 + 3 x 2 + 2 x = 29 + 2 mn + 7 m +7 n bytes.

The drawing data generation method of this data format carries out each step of the rotation angle setting step, the division setting step, the dose amount setting step, and the drawing data creation step.

As the rotation angle setting process, the rotation angle setting unit 11 reads CAD data from the storage device 340 and sets the rotation angle [theta] of the figure pattern for each figure pattern.

The division setting section 10 reads the CAD data from the storage device 340 and rotates the x, y coordinate system in the counterclockwise direction by an angle (?) In accordance with the set rotation angle? Y 'coordinate system, and sets the number of divisions (ndivx) in the x' direction and the number of divisions (ndivy) in the y 'direction. In addition, each division coordinate is set. In the case of the number of divisions (ndivx = m), coordinates (x ₁ ) to coordinates (x _m ) in x direction converted into x coordinates in the x, y coordinate system from the x 'coordinate in the x', y ' x coordinate). Similarly, in the case of the number of divisions (ndivy = n), the coordinates (y ₁ ) to (y _n ) in the y direction converted from the y 'coordinate in the x', y 'coordinate system into the y coordinate in the x, y coordinate system, (Division y coordinate). If not divided, the number of divisions (ndivx) and the number of divisions in the y direction (ndivy) may be set to zero. Or, in the case of not dividing, the division setting step may be omitted.

A dose setting step dose setting section 12, each figure pattern, the x-coordinate (x _0, x _1, including the x-coordinate (x _0, x _m ₊ ₁₎ 4 of the edge portion of such a figure pattern, · ··, x _m, x _m ₊ ₁₎ and the four corners of the y-coordinate (y _0, y _n ₊ ₁₎ x-coordinate (y _0, y _1, ··· containing, y _n, y _n ₊ (Or the dose modulation amount (rate)) at each position by a combination of the above-described _first and _{second embodiments} . In the case of not dividing, it is sufficient to set the dose amount (or the dose modulation amount (rate)) at each position of the four corner portions.

The drawing data creating section 14, as the drawing data creating process, is a drawing data creating section that creates, for each figure pattern, rotation information indicating the rotation angle of the figure pattern that is a part of the figure information of the figure pattern, (Or the dose modulation amount (rate)) at each of the above-mentioned positions including the four corner portions before or after the figure information of the pattern data is defined, (Rendering data) is created. In the example of Fig. 22 (b), the expression code (code _rot ) and the rotation angle [theta] representing the rotation information are defined before the dose amount information separately from the other figure information, Before or after the dose amount information, the rotation information may be defined in succession to other figure information.

In the irradiation dose calculation process of the fourth embodiment, first, the irradiation dose calculation unit 113 calculates x ', y', and y 'by rotating the x, y coordinate system counterclockwise by the angle? The coordinate (x ', y') is obtained by converting the coordinates of the position (x, y) in which the dose amount (or the dose amount (rate)) is set. Thereafter, the dose amount (or the dose modulation amount (rate)) (d (x ', y')) at the desired position (x ', y') is calculated using the dose amount information defined in the rendering data . The calculation method of the dose amount (or the amount of DOS modulation (rate)) (d (x ', y')) is obtained by reading (x, y) For example, by calculating the first-order interpolation. Then, after the calculation, the coordinates (x ', y') of d (x ', y') are converted into (x, y).

In the above example, the position (x, y) converted to the x, y coordinate system in which the dose amount (or the dose amount (rate)) is set is not rotated by the rotation angle? , But is not limited thereto. may be defined as coordinates (x ', y') in the x ', y' coordinate system in which the x, y coordinate system is rotated in the counterclockwise direction by an angle (θ). In this case, in the irradiation amount calculation step, (x, y) in the equation (1) is replaced with (x ', y') and then the same is obtained by calculation of the primary interpolation in the same manner as in the first embodiment . Then, after the calculation, the coordinates (x ', y') of d (x ', y') are converted into (x, y).

As described above, according to the fourth embodiment, the same effects as those of the first embodiment can be obtained. In addition, even when the figure pattern is rotating, it is possible to eliminate the need to define dose amount information for each fine size.

Embodiment 5:

In the second embodiment described above, the case where the division position of the rectangular frame 40 is set along the coordinate axis direction of the orthogonal coordinate system in the horizontal (x direction) and vertical (y direction) directions has been described, . In Embodiment 5, a case will be described in which at least one figure pattern that is not parallel to the coordinate axis direction of the orthogonal coordinate system is grouped into a group. Hereinafter, the contents other than the points specifically described are the same as those of the second embodiment.

23 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the fifth embodiment. In Fig. 23, the drawing data converting apparatus 300 is the same as Fig. 10 except that a rotation angle setting unit 11 is further added. The rotation angle setting section 11, the division setting section 10, the dose setting section 12, the drawing data creating section 14, the control section 16, the group processing section 19 and the rectangular frame setting section 20 The same series of 'parts' is implemented and executed with at least one circuit such as at least one electrical circuit, at least one computer, at least one processor, at least one circuit board, or at least one semiconductor device. The rotation angle setting section 11, the division setting section 10, the dose setting section 12, the drawing data creating section 14, the control section 16, the group processing section 19 and the rectangular frame setting section 20 The input / output information and the information in the arithmetic operation are stored in the memory 18 each time.

Here, Fig. 23 shows the necessary configuration for explaining the fifth embodiment. The rendering data conversion apparatus 300 may have other structures that are normally required. For example, an input device such as a mouse or a keyboard, a monitor device, and an external interface circuit may be connected, which is the same as in the second embodiment.

24 (a) to 24 (c) are diagrams for explaining an example of a data format including a figure pattern group, a dose amount defining position and a dose amount of modulation in the fifth embodiment. Fig. 24 (a) shows an example of a succession of successive figure pattern groups. The example of Fig. 24 (a) shows the same configuration as the state in which the successive successive figure pattern groups shown in Fig. 11 (c) are rotated by the angle [theta]. In Embodiment 5, a map of the dose amount (or the amount of dose modulation (rate)) is generated for each group by using these consecutive successive figure pattern groups as one group.

The group processing unit 19 as the group processing step reads out the CAD data in which the figure information of the plurality of figure patterns is defined from the storage unit 340 and reads out the plurality of figure patterns defined in the CAD data, Grouped into at least one group. If there is only one successive succession of figure pattern groups, one group is created. For example, groups of consecutive groups of figure patterns shown in Fig. 24A are grouped into one group.

As the rectangular frame setting process, the rectangular frame setting unit 20 sets a rectangular frame surrounding the figure pattern group of the group for each group. The rectangle frame is suitable, for example, by using a circumscribed rectangle of the figure pattern group. However, the present invention is not limited to this, and as shown in Fig. 24 (a), the rectangular frame 40 may be a frame slightly larger than the circumscribed rectangle. For example, in the case of setting the dividing line to be described later in accordance with a predetermined grid, the rectangular frame 40 itself may be set according to such a grid. In the fifth embodiment, this rectangular frame 40 is used as the dose amount (or the dose modulation amount (rate)) map 32, as shown in Fig. 24 (b) The rectangular frame setting unit 20 defines the size of the rectangle frame 40 (map) in the x 'direction as Wm, and the size in the y' direction as hm. The rectangular frame setting unit 20 sets the rectangular frame 40 from the reference position (e.g., the lower left corner) of the figure pattern at the first (e.g. left end) among the group of figure pattern groups surrounded by the rectangular frame 40 (X _off , y _off ) up to a reference position (e.g., the lower left corner) of the map (map).

As the rotation angle setting process, the rotation angle setting unit 11 sets the rotation angle [theta] of the rectangular frame 40 after the rectangular frame 40 is set. Therefore, the pattern data (drawing data) of the figure pattern group including the rectangular frame 40 shown in Fig. 24 (a) is obtained by dividing the figure information of the figure pattern group and the shape information of the rectangular frame 40 into the dose amount (Rate) map 32, and the rotation angle [theta] are defined.

As the division setting step, the division setting section 10 converts the x, y coordinate system into the x ', y' coordinate system in which the x, y coordinate system is rotated in the counterclockwise direction by an angle (?) In accordance with the set rotation angle? The number of division (ndivx) in the x 'direction and the number of division (ndivy) in the y' direction of the image pickup element 40 are set. In addition, each division coordinate is set. In the case of the number of divisions (ndivx = m), coordinates (x ₁ ) to coordinates (x _m ) in x direction converted into x coordinates in the x, y coordinate system from the x 'coordinate in the x', y ' x coordinate). Similarly, in the case of the number of divisions (ndivy = n), the coordinates (y ₁ ) to (y _n ) in the y direction converted from the y 'coordinate in the x', y 'coordinate system into the y coordinate in the x, y coordinate system, (Division y coordinate). If not divided, the number of divisions (ndivx) and the number of divisions in the y direction (ndivy) may be set to zero. Or, in the case of not dividing, the division setting step may be omitted. The dividing method may be the same as that described in Figs. 4 (a) to 4 (c), 5 (a), 5 (b) and 6. At this time, the figure pattern can be read by replacing it with the rectangular frame 40.

A dose setting step dose setting unit 12, x coordinates of four corners of the each group, art rectangular frame (40), (x _0, x _m ₊ _1), x coordinate (x _0, x ₁ containing , ···, x _m, x _m ₊ ₁₎ and, x-coordinate (y _0, y _1, ···, including the four corners of the y-coordinate _{(y 0, y n + 1} ), y n, y (or the dose modulation amount (rate)) at each position by the combination of the dose amount ( _n ₊ ₁ ) and the dose amount ( _n ₊ ₁ ). In the case of not dividing, it is sufficient to set the dose amount (or the dose modulation amount (rate)) at each position of the four corner portions.

In the example shown in Fig. 24 (c), in addition to the four corner portions of the rectangular frame 40, the dividing lines dividing the rectangular frame 40 in the x and y directions and the rectangular frame 40 (Or a dose modulation rate (rate)) at each intersection of each side and each intersection of dividing lines. The data format including the DOS modulation amount shown in Fig. 24C is the same as Fig. 12 except that a code code ( _rot ) indicating the rotation information and a rotation angle [theta] are added.

The drawing data creation section 14, as the drawing data creation step, sets rotation information indicating a rotation angle of a figure pattern group that is a part of the figure information of a figure pattern group constituting the group, rotation information indicating a rotation angle of the figure pattern group, (Or the amount of dose modulation (rate)) at the positions of the four corners of the rectangular frame 40 before or after the graphic information of the pattern group and the graphic information are defined are successively defined Pattern data (drawing data) is generated in accordance with the data format. In the example of Fig. 24 (c), the expression code (code _rot ) and the rotation angle [theta] representing the rotation information are defined before the dose amount information separately from the other figure information. However, Before or after the dose amount information, the rotation information may be defined in succession to other figure information. The created pattern data (rendering data) is output to the storage device 342 and stored.

As described above, in the fifth embodiment, for each rectangular pattern (group: consecutive figure pattern group), a 1-byte representation code (code _rot ) indicating a rotation angle, a 4-byte rotation angle ) Has been added to the configuration of Fig. Therefore, in the data format of m times divided in the x direction and divided n times in the y direction shown in Fig. 24C, 1 + 4 + 1 + 2 x 2 + 3 x 2 + 2 x 2 + 3 x (m + 2 + (m + 2) (n + 2) + 1 + 1 + 2 + N (3 2 + 2 2) = 32 + 2 mn + 7 m + 7 n + .

In the irradiation amount calculation process of the fifth embodiment, first, the irradiation dose calculation unit 113 calculates x ', y', and y 'by rotating the x, y coordinate system counterclockwise in the angle? The coordinates (x ', y') are obtained by converting the coordinates of the position (x, y) in which the dose amount (or the dose modulation amount (rate)) is set in the coordinate system. Thereafter, the dose amount (or the dose modulation amount (rate)) (d (x ', y')) at the desired position (x ', y') is calculated using the dose amount information defined in the rendering data . The calculation method of the dose amount (or the amount of DOS modulation (rate)) (d (x ', y')) is obtained by reading (x, y) For example, by calculating the first-order interpolation. Then, after the calculation, the coordinates (x ', y') of d (x ', y') are converted into (x, y).

In the above example, the position (x, y) converted to the x, y coordinate system in which the dose amount (or the dose amount (rate)) is set is not rotated by the rotation angle? , But is not limited thereto. may be defined as coordinates (x ', y') in the x ', y' coordinate system in which the x, y coordinate system is rotated in the counterclockwise direction by an angle (θ). In such a case, in the irradiation amount calculation step, (x, y) in the equation (1) is replaced with (x ', y') and then the same is obtained by calculation of the primary interpolation in the same manner as in the second embodiment . Then, after the calculation, the coordinates (x ', y') of d (x ', y') are converted into (x, y).

As described above, according to the fifth embodiment, the same effect as that of the second embodiment can be obtained. In addition, even when the figure pattern group (group) rotates, it is not necessary to define the dose amount information for each fine size.

Embodiment 6:

In the second embodiment described above, a case has been described in which a series of successive figure patterns is surrounded by a rectangular frame 40 to generate a map of a dose amount (or a dose amount (rate)) as one group. However, Do not.

In the sixth embodiment, a dose amount (or a dose modulation amount (rate)) map is created for each figure pattern group (group) in each cell including at least one continuous group of figure pattern groups (group). Similarly, description will be made of a case where drawing data of a data format in which the dose amount information indicating the dose amount (or the amount of dosed amount (rate)) to be arranged for each figure pattern group (group) . Hereinafter, the contents other than the points specifically described are the same as those of the second embodiment.

25 is a conceptual diagram showing a configuration of a rendering data conversion device according to the sixth embodiment. 25, except that the cell setting unit 21 and the rotation angle setting unit 11 are further added in the drawing data conversion apparatus 300. [ The cell setting unit 21, the rotation angle setting unit 11, the division setting unit 10, the dose setting unit 12, the drawing data creating unit 14, the control unit 16, the group processing unit 19, A series of "parts", such as the frame setting unit 20, includes at least one circuit such as at least one electrical circuit, at least one computer, at least one processor, at least one circuit board, . The cell setting unit 21, the rotation angle setting unit 11, the division setting unit 10, the dose setting unit 12, the drawing data creating unit 14, the control unit 16, the group processing unit 19, The information input to and output from the frame setting unit 20 and information during the operation are stored in the memory 18 each time.

Here, in Fig. 25, necessary configurations are described for explaining the sixth embodiment. The rendering data conversion apparatus 300 may have other structures that are normally required. For example, an input device such as a mouse or a keyboard, a monitor device, and an external interface circuit may be connected, which is the same as in the second embodiment.

26 is a view for explaining an example of a cell, a figure pattern group, and a dose amount defining position in the sixth embodiment. 26 shows an example of a series of successive figure pattern groups. The example of Fig. 26 shows a cell 42 including a group of figure patterns successively shown in Fig. 11 (c) surrounded by a rectangular frame 40 as one group. In the sixth embodiment, a map of the dose amount (or dose amount (rate)) 32 of the group in the cell 42 is prepared for each cell including the group (and the rectangular frame 40 surrounding the rectangular frame 40) do.

26, since the rectangular frame 40 is set along the coordinate axis direction of the orthogonal coordinate system in the horizontal (x direction) and vertical (y direction) directions, rotation information is not necessarily required. Therefore, in the case of creating the drawing data in the example of Fig. 26, the rotation angle setting section 11 shown in Fig. 25 may be omitted.

The contents of the group processing step and the rectangular frame setting step are the same as those in the second embodiment. However, the rectangular frame setting unit 20 does not need to define the offset amount (x _off , y _off ).

The cell setting unit 21 sets the cell 42 (cell region) including the entire figure drawn into the rectangular frame 40 after the rectangular frame 40 is set. The cells 42 are suitable if they are rectangular. Further, an offset amount from the origin of the cell region to the origin of the rectangular frame is defined. More specifically, the cell setting unit 21 sets the reference position of the cell 42 (map) (for example, the reference position (for example, the lower left corner) of the rectangular frame 40 surrounded by the cell 42 (The lower left corner) of the image (x _off , y _off ). Therefore, the pattern data (drawing data) of the group of figure patterns in the cell 42 is generated by dividing the figure information of the figure pattern group and the rectangular frame 40 into a dose amount Modulation amount (rate)) map 32 is defined.

The division setting section 10 sets the division number (ndivx) of the rectangular frame 40 in the x direction and the division number (ndivy) in the y direction for each cell 42 and for each rectangular frame 40 Setting. In addition, each division coordinate is set. The content of the division setting process is the same as that of the second embodiment. The contents of the dose amount setting step are the same as those in the second embodiment.

27 is a diagram showing an example of a data format including the DOS modulation amount in the sixth embodiment; In the data format shown in Figure 27, it represents the code of one byte indicating that the same cell within the (code _Cellstart) a point offset amount of the respective three bytes added first (x _off, y _off) the figure pattern group and the rectangular frame (40 The offset amount between the rectangular frame 40 and the cell 42, the point at which the one-byte representation code (code _Cellend ) indicating the end in the same cell is added at the end, The coordinates (X, Y) of the three-byte figure pattern and the sizes (W, H) in the x and y directions of the two bytes of the figure pattern (1 to N) constituting the figure pattern group are set as one group , Except that a 1-byte representation code (code _FIG ) is added for each group first.

The drawing data creation section 14 as the drawing data creation step sets the shape information of the figure pattern group constituting the cell and the position of the four corner portions of the rectangular frame 40 before or after the figure information is defined The pattern data (rendering data) is generated in accordance with the data format in which the dose amount information indicating the set dose amount (or the dosed amount (rate)) in the continuous quantization is continuously defined. The created pattern data (rendering data) is output to the storage device 342 and stored.

Therefore, in the data format in which the group is arranged in the cell shown in FIG. 27 and the group is divided into m pieces in the x direction and m pieces in the y direction, 1 + 1 + 2 x 2 + 3 2 + 2 x 2 + 3 x m + n + 2 x m + 2 n + 2? 1 + 3 2 + 2 2 + 1 = 25 + 2 mn + 7 m + 7 n + 11 N) bytes.

As described above, according to Embodiment 6, the dose amount information can be defined for each cell in which a group composed of at least one figure pattern is placed. In addition, the same effect as the second embodiment can be obtained.

Embodiment 7:

In the sixth embodiment described above, the case where the cell 42 is set along the coordinate axis direction of the orthogonal coordinate system in the horizontal (x direction) and vertical (y direction) directions is described, but the present invention is not limited thereto. In the seventh embodiment, a case where cells not parallel to the coordinate axis direction of the orthogonal coordinate system are set will be described. The configuration of the rendering data conversion apparatus 300 is the same as that of FIG. Hereinafter, contents other than the points to be specifically described are the same as those in the sixth embodiment.

Figs. 28 (a) and 28 (b) are diagrams for explaining an example of a data format including a cell, a figure pattern group, and a dose modulation amount in the seventh embodiment. Fig. 28A shows a configuration in which the figure pattern group enclosed by the cell 40 shown in Fig. 26, the rectangular frame 40 inside the cell 42, and the rectangular frame 40 is rotated by the angle? . In the seventh embodiment, a dose amount (or dose modulation amount (rate)) map is prepared for each cell 42.

A group processing step and a rectangular frame setting step are performed. The contents of the group processing step and the rectangular frame setting step are the same as in Embodiment 6 (Embodiment 2). Then, a cell setting process is performed. The contents of the cell setting process are the same as those in the sixth embodiment. In setting the cell 42, the cell is set using a rectangle rotated at the same rotation angle as the rotation angle of the rectangular frame 40 inside the cell.

As the rotation angle setting process, the rotation angle setting unit 11 sets the rotation angle [theta] of the cell 42 after the cell 42 is set. Therefore, the pattern data (drawing data) of the figure pattern group in the cell 42 shown in Fig. 28 (a) is obtained by dividing the figure information of the figure pattern group and the shape information of the rectangular frame 40 into the dose amount (or the dose modulation amount ) Map 32 and the rotation angle [theta] of the cell 42 are defined.

The division setting section 10 sets the division setting section 10 to x 'in which the x, y coordinate system is rotated counterclockwise in an angle (?) In accordance with the set rotation angle? , y 'coordinate system, and sets the division number (ndivx) in the x' direction and the division number (ndivy) in the y 'direction of the rectangular frame 40. In addition, each division coordinate is set. In the case of the number of divisions (ndivx = m), coordinates (x ₁ ) to coordinates (x _m ) in x direction converted into x coordinates in the x, y coordinate system from the x 'coordinate in the x', y ' x coordinate). Similarly, in the case of the number of divisions (ndivy = n), the coordinates (y ₁ ) to (y _n ) in the y direction converted from the y 'coordinate in the x', y 'coordinate system into the y coordinate in the x, y coordinate system, (Division y coordinate). If not divided, the number of divisions (ndivx) and the number of divisions in the y direction (ndivy) may be set to zero. Or, in the case of not dividing, the division setting step may be omitted. The dividing method may be the same as that described in Figs. 4 (a) to 4 (c), 5 (a), 5 (b) and 6. At this time, the figure pattern can be read by replacing it with the rectangular frame 40.

The contents of the dose amount setting step are the same as those in Embodiment 6 (Embodiment 2).

In the example shown in Figs. 28 (a) and 28 (b), in addition to the four corner portions of the rectangular frame 40, the rectangular frame 40 is divided into the dividing lines for dividing the rectangular frame 40 in the x and y directions, (Or a dose modulation amount (rate)) at each intersection with each side of the rectangular frame 40 and at each intersection of the division lines. The data format including the DOS modulation amount shown in Fig. 28 (a) and Fig. 28 (b) is the same as that in Fig. 27 except that a representation code (code _rot ) indicating rotation information and a rotation angle? .

As the drawing data creating process, the drawing data creating section 14 creates drawing data for each group of cells (for each cell), for each group in the cell, a rotation angle of a figure pattern group that is a part of the figure information of the group of figure patterns constituting the group , The shape information of the figure pattern group constituting the group, and the amount of the dose (or the amount of modulation (or the amount of modulation The pattern data (drawing data) is generated in accordance with the data format in which the dose amount information indicating the dosing amount information (i.e., the ratio) is continuously defined. In the examples of Figs. 28 (a) and 28 (b), although the expression code (code _rot ) and the rotation angle (?) Representing the rotation information are defined before the dose information separately from the other figure information , But the present invention is not limited to this, and rotation information before or after the dose amount information may be defined continuously with other graphic information. The created pattern data (rendering data) is output to the storage device 342 and stored.

As described above, in the seventh embodiment, a 1-byte representation code (code _rot ) indicating a rotation angle, a 4-byte rotation angle ([theta]) of a figure pattern, ) Has been added to the configuration of Fig. Therefore, in the data format of n times divided in the x direction and divided in the y direction shown in Figs. 28A and 28B, 1 + 1 + 4 + 1 + 2 x 2 + 3 x 2 + 2 x 2 + 3 x (m + n) + 2 x m + 2 n + 2 N + 1 + 3 2 + m + 7 n + 11 N) bytes.

In the irradiation amount calculation process of the seventh embodiment, first, the irradiation dose calculation unit 113 calculates x ', y' by rotating the x, y coordinate system counterclockwise in the angle (?) Using the rotation angle [ The coordinates (x ', y') are obtained by converting the coordinates of the position (x, y) in which the dose amount (or the dose modulation amount (rate)) is set in the coordinate system. Thereafter, the dose amount (or the dose modulation amount (rate)) (d (x ', y')) at the desired position (x ', y') is calculated using the dose amount information defined in the rendering data . The calculation method of the dose amount (or the amount of DOS modulation (rate)) (d (x ', y')) is obtained by reading (x, y) For example, by calculating the first-order interpolation. Then, after the calculation, the coordinates (x ', y') of d (x ', y') are converted into (x, y).

In the example described above, the position where the dose amount (or the dose amount (rate)) is set is defined as the position (x, y) converted into the x, y coordinate system in which the position is not rotated by the rotation angle , But is not limited thereto. may be defined as coordinates (x ', y') in the x ', y' coordinate system in which the x, y coordinate system is rotated in the counterclockwise direction by an angle (θ). In such a case, in the irradiation amount calculation step, (x, y) in the equation (1) is replaced with (x ', y') and then the same is obtained by calculation of the primary interpolation in the same manner as in the second embodiment . Then, after the calculation, the coordinates (x ', y') of d (x ', y') are converted into (x, y).

As described above, according to the seventh embodiment, the same effects as those of the sixth embodiment can be obtained. In addition, even when the figure pattern group (group) rotates, it is not necessary to define the dose amount information for each fine size.

The embodiments have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. In the above-described example, the multi-beam drawing apparatus 100 has been described, but the present invention is not limited thereto. The present invention is also applicable to rendering data for a raster (Gaussian beam) type drawing apparatus using a single beam.

In addition, the description of the device configuration or the control method, etc. that are not directly required in the description of the present invention is omitted, but the device configuration or control method that is required can be appropriately selected and used. For example, although the description of the control unit for controlling the painting apparatus 100 is omitted, it goes without saying that the necessary control unit configuration is appropriately selected and used.

In addition, all drawing data, drawing apparatuses and methods of drawing data which are provided with the elements of the present invention and which can be appropriately designed and changed by those skilled in the art are included in the scope of the present invention.

While several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other forms, and various omissions, substitutions, and alterations can be made without departing from the gist of the invention. These embodiments or modifications thereof are included in the scope or spirit of the invention and are included in the scope of equivalents to the invention described in the claims.

Claims

A drawing method for drawing data to be input to a drawing apparatus for drawing a figure pattern on a sample using a charged particle beam,
In the data format in which the graphics information of the graphics pattern and the dose information indicating the respective dose amounts or the DOS modulation rates at the positions of the respective corner portions of the graphics pattern before or after the graphics information is defined are continuously defined, And generating data based on the generated drawing data.

The method according to claim 1,
Wherein the data format further defines rotation information indicating a rotation angle of the figure pattern.

A drawing method for drawing data to be input to a drawing apparatus for drawing at least one figure pattern on a sample using a charged particle beam,
Inputting at least one figure information of a figure pattern, setting a rectangular frame surrounding the at least one figure pattern,
The dose amount or the dos modulation ratio at each of the four corner portions of the rectangular frame is set,
The shape information of the at least one figure pattern and the dose information indicating the dose amount or the dose modulation rate at the positions of the four corners of the rectangular frame before or after the figure information is defined are continuously defined And generating the drawing data in accordance with the format.

The method of claim 3,
The figure information of the plurality of figure patterns is defined in the figure information,
Inputting the figure information of the plurality of figure patterns, grouping the plurality of figure patterns into at least one group of figure pattern groups that are continuous,
When setting the rectangular frame, a rectangular frame surrounding the figure pattern group of the group is set for each group,
When the dose amount or the DOS modulation ratio is set, the respective dose amounts or DOS modulation rates at the positions of the four corners of the rectangular frame are set for each group,
The drawing information of the group of figure pattern groups of the group and the drawing data of the group are continuously defined before or after the figure information is defined at the positions of the four corner portions of the rectangular frame, Wherein the first and second regions are created.

The method of claim 3,
Wherein the dose amount information further indicates a dose amount or a DOS modulation ratio at an intersection between a dividing line dividing the rectangular frame into at least one of x direction and y direction and a side of the rectangular frame Way.

The method of claim 3,
And setting the rotation angle of the rectangular frame after the rectangular frame is set.

The method according to claim 6,
Wherein the data format further defines rotation information indicating a rotation angle of the rectangular frame.

The method of claim 3,
After setting the rectangular frame, a cell region including the entire figure drawn in the rectangular frame is set,
Wherein the data format further defines an offset amount from the origin of the cell region to the origin of the rectangular frame.

9. The method of claim 8,
After setting the cell region, setting a rotation angle of the cell region,
Wherein the data format further defines rotation information indicating a rotation angle of the cell area.

A drawing method for drawing data to be input to a drawing apparatus for drawing a figure pattern on a sample using a charged particle beam,
Inputting figure information of a figure pattern, setting a rectangular frame in a part of the figure pattern,
A plurality of mesh areas of a fixed size are set in an area including the remaining part of the figure pattern,
The dose amount or the dos modulation ratio at each of the four corner portions of the rectangular frame is set,
Setting a dose amount or a DOS modulation ratio for each of the plurality of mesh regions,
First dose amount information indicating a dose amount or a DOS modulation ratio at a position of four corner portions of the rectangular frame before or after the graphic information of the figure pattern and the figure information are defined, Wherein said drawing data is generated in accordance with a data format in which a second dose amount information indicating a dose amount or a DOS modulation ratio set in the mesh area is continuously defined.