KR20160027304A - Frictional electricity energy generator and manufacturing method thereof - Google Patents

Abstract

Provided are a frictional electricity energy generator and a manufacturing method thereof. The frictional electricity energy generator of the present invention comprises: a first fabric substrate; a polymer layer placed on the first fabric substrate, whose surface has a bumpy shape, and which comprises a polymer having electrification characteristics; and, a second fabric substrate placed on the polymer layer, whose surface is coated with a metal buffer layer and which has multiple metal particles in the embossed form on the metal buffer layer facing the polymer layer. As the polymer layer repeats contact and noncontact with the metal particles, frictional electricity occurs between the polymer layer and the metal particles. Accordingly, the increase in the frictional surface area can be maximized.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a frictional electric energy generating device,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an energy generating element, and more particularly, to a tractive electric energy generating element and a manufacturing method thereof.

Energy harvest technology, which converts external energy sources (for example, mechanical energy originating from nature such as thermal energy, animal movement, wind, or waves) into electrical energy, has recently been widely studied as environmentally friendly technology. Recently, researches on energy generating devices used in energy harvesting technology have been actively carried out.

One technique for harvesting energy is to utilize triboelectricity. Triboelectricity refers to a type of friction static between charged objects. The energy generating element utilizing the triboelectric energy has at least two active materials between the upper electrode and the lower electrode, and energy is generated due to the charging difference caused by the static electricity generated when the two or more active materials are in contact with each other. At this time, the power characteristics of the energy generating element are determined by such factors as the kind of the active material, the distance between the active materials, and the surface area of the active material.

Conventionally, in order to widen the surface area of an active material, a mold is fabricated by using a photolithography process, and then the surface area of the active material is increased through an additional process. However, such a method increases the cost of the energy generating device and complicates the process And surface area increase is still limited.

In addition, since the flexibility of the substrates used for developing the conventional energy generating devices is limited, it is difficult to apply them as wearable devices.

Accordingly, the present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a triboelectric energy generating device capable of maximizing a friction surface area increase and a manufacturing method thereof, Another object is to provide a method of manufacturing a generating element.

Another object of the present invention is to provide a triboelectric energy generating device which can be applied as a wearable device and a manufacturing method thereof.

One aspect of the present invention provides a triboelectric energy generating element. Wherein the triboelectric energy generating element comprises a first fabric substrate, a polymer layer disposed on the first fabric substrate, the polymer layer having a surface having a concavo-convex shape and having a charging property, and a polymer layer disposed on the polymer layer, And a second fabric substrate coated with the metal buffer layer and having a plurality of metal particles positioned in an embossed form on a metal buffer layer facing the polymer layer, wherein the polymer layer repeatedly contacts and contacts the metal particles A triboelectricity is generated between the polymer layer and the metal particles.

The metal buffer layer may include at least one selected from the group consisting of Au, Cu, Ag, and Pt. The metal material contained in the metal particles may be a material different from the metal material contained in the metal buffer layer. At this time, the metal particles may include at least one selected from the group consisting of Al, Zn, and Mg.

The polymer may include at least one selected from the group consisting of polydimethylsiloxane (PDMS), polytetrafluoroethylene (PTFE), and polyvinyl chloride (PVC) And can serve as a whole friction electrode and an electrode.

Another aspect of the present invention provides a method of manufacturing a triboelectric energy generating element. The method for manufacturing a triboelectric energy generating element includes the steps of preparing a first fabric substrate, forming a polymer layer having a surface having an irregular shape on the first fabric substrate and including a polymer having a charging property, Forming a plurality of metal particles in an embossed form on the metal buffer layer of a second fabric substrate coated with a metal buffer layer on a first fabric substrate having the polymer layer facing the polymer layer, And disposing the second fabric substrate, wherein triboelectricity is generated between the polymer layer and the metal particles as the polymer layer repeats contact and non-contact states with the metal particles.

The step of forming the polymer layer may use a dry etching process, and the dry etching process may be selected from the group consisting of a reactive ion etching (RIE) process and an inductively coupled plasma (ICP) process Can be used.

The forming of the metal particles on the metal buffer layer may be performed by vacuum deposition, and the vacuum deposition may be performed at a rate of 0.1 Å / s to 0.2 Å / s. The forming of the metal particles on the metal buffer layer may include depositing the metal particles until the average thickness of the metal particles is 3 nm to 5 nm. The metal material contained in the metal particles may be a material different from the metal material contained in the metal buffer layer.

According to the present invention, it is possible to maximize the increase of the frictional surface area of the frictional energy generating element and to simplify the manufacturing process of the frictional energy generating element.

Further, there is provided an effect of providing a triboelectric energy generating element applicable as a wearable element.

1A to 1D are cross-sectional views illustrating a method of manufacturing a triboelectric energy generating device according to an embodiment of the present invention.
Fig. 2 is a planar image of a PDMS nanostructure coated on a fabric substrate in Production Example 1. Fig.
3 is a cross-sectional image of a PDMS nanostructure coated on a fabric substrate in Production Example 1. FIG.
4 is a SEM image of the surface of an Al coating layer coated on the fabric substrate of Production Example 1. Fig.
5 is a SEM image of a surface of an Al coating layer coated on a fabric substrate of Comparative Example 1. Fig.
6 is a SEM image of a surface of an Al coating layer coated on a fabric substrate of Comparative Example 2. Fig.
7 is a graph showing the output voltages of Production Example, Comparative Example 1, and Comparative Example 2. Fig.
8 is a graph showing the output currents of Production Example, Comparative Example 1, and Comparative Example 2. Fig.
FIG. 9 is a SEM image of a surface of a metal particle layer according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It is to be understood, however, that the present invention is not limited to the embodiments described herein but may be embodied in other forms and includes all equivalents and alternatives falling within the spirit and scope of the present invention.

In addition, where a layer is referred to herein as being "on" another layer or substrate, it may be formed directly on another layer or substrate, or a third layer may be interposed therebetween. In the present specification, directional expressions of the upper side, upper side, upper side, and the like can be understood as meaning lower, lower, lower, and the like according to the standard. In other words, the expression of spatial direction should be understood in relative direction and should not be construed as limiting in absolute direction.

In the drawings, the thicknesses of the layers and regions may be exaggerated or reduced for clarity. Like reference numerals designate like elements throughout the specification.

In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

1A to 1D are cross-sectional views illustrating a method of manufacturing a triboelectric energy generating device according to an embodiment of the present invention.

Referring to FIG. 1A, a first fabric substrate 10 is prepared.

The first fabric substrate 10 described above can be a flexible and stretch fabric, and the fabric described above can be a fabric in a woven form. Therefore, there is an effect that it can be applied to a wearable element.

The first fabric substrate 10 described above can then be coated with a metal buffer layer (not shown) using a metal buffer material.

As the above-mentioned metal buffer material, at least one material selected from the group consisting of Au, Cu, Ag and Pt can be used. It is also preferable to use chemical vapor deposition (CVD) for coating with the metal buffer layer described above.

Thereafter, the polymer layer 20 having a concavo-convex shape on the surface of the first fabric substrate 10 and containing a polymer having a charging property is formed.

The polymer contained in the polymer layer 20 described above acts as a first active material of the triboelectric energy generating element and is formed between the first fabric substrate 10 described above and an upper second fabric substrate 40 described below The polymer layer 20 and the metal particles described later are repeatedly brought into contact and noncontact states to generate triboelectricity.

The polymer having the charging property described above may include at least one selected from the group consisting of polydimethylsiloxane (PDMS), polytetrafluoroethylene (PTFE), and polyvinyl chloride (PVC) .

In order to make the surface of the polymer layer 20 described above have a concavo-convex shape, a dry etching process can be used. When a dry etching process is used, the surface area of the polymer layer 20 described above is increased through a simple process and the surface roughness is improved. Accordingly, it is possible to maximize the energy generation efficiency of the triboelectric energy generating element by improving the surface area and the friction frequency to be rubbed when friction occurs with the metal particles 30 to be described later.

The dry etching process may use at least one process selected from the group consisting of a reactive ion etching (RIE) process and an inductively coupled plasma (ICP) process.

Referring to FIG. 1C, a plurality of metal particles 30 are formed in an embossed form on the metal buffer layer of the second fabric substrate 40 coated with a metal buffer layer on the surface.

The second fabric substrate 40 described above may be a flexible and stretch fabric, and the fabric described above may be a fabric in a woven form. Therefore, there is an effect that it can be applied to a wearable element. At least one material selected from the group consisting of Au, Cu, Ag, and Pt may be used as the metal buffer material to coat the second fabric substrate 40 described above with a metal buffer layer (not shown). It is also preferable to use chemical vapor deposition (CVD) for the above-described metal buffer layer coating.

Thereafter, a plurality of metal particles 30 having an embossed form are formed on the aforementioned metal buffer layer of the second fabric substrate 40 coated with the metal buffer layer on the aforementioned surface.

The metal of the above-mentioned metal particles 30 acts as a second active material of the triboelectric energy generating element and is formed between the above-described first fabric substrate 10 and the above-mentioned second upper fabric substrate 40, The layer 20 and the above-mentioned metal particles generate triboelectricity by repeating contact and non-contact states.

The above-mentioned metal particles may include at least one selected from the group consisting of Al, Zn, and Mg. At this time, the above-mentioned metal particles can serve as the entire friction pad and the electrode. It is possible to simplify the structure of the digitizer, thereby enabling high integration in mass production.

The plurality of metal particles 30 having the above-described embossed shape are formed with an embossing shape by performing a vacuum deposition method.

In vacuum deposition, it is preferable to perform vacuum deposition at a rate of 0.1 A / s to 0.2 A / s. When the above-described vacuum deposition rate is less than 0.1 Å / s, the metal particle formation rate may be slowed, and when the above-described vacuum deposition rate exceeds 0.2 Å / s, metal particles in the form of metal film The probability of coating the material increases. Accordingly, the frictional electricity generation effect may be lowered as the friction surface area becomes narrower.

At this time, it is preferable to deposit the metal particles 30 described above until the average thickness of the metal particles 30 described above is formed to a thickness of 3 nm to 4 nm. When the metal particles are formed in the thickness range described above, the surface area of the metal particles is widened, and the friction surface area is widened, thereby improving the efficiency of generating the triboelectric energy. When the average thickness of the above-mentioned metal particles 30 is less than 3 nm or more than 4 nm, the probability that the metal material is coated in the form of a metal film other than metal particles increases. Accordingly, the frictional electricity generation effect may be lowered as the friction surface area becomes narrower.

At this time, it is preferable that the metal material contained in the metal particles 30 described above is different from the metal material contained in the metal buffer coating layer described above. In this case, the surface energy difference of the above-mentioned metal particle 30 material and the above-mentioned buffer material is generated, so that the metal particles 30 of the embossed form are evenly formed, thereby widening the friction surface area. Thus, the effect of generating triboelectricity is maximized.

1D, the above-described second fabric substrate 40 is formed on the first fabric substrate 10 on which the above-described polymer layer is formed such that the above-mentioned polymer layer 20 and the aforementioned metal particles 30 face each other. . Thus, as the polymer layer 20 described above repeats contact and non-contact with the metal particles 30 described above, triboelectricity occurs between the polymer layer 20 and the metal particles 30 described above do.

The triboelectric energy generating element according to an embodiment of the present invention includes a first fabric substrate 10, a polymer disposed on the first fabric substrate 10 described above, having a surface having a concavo-convex shape, And a metal buffer layer (not shown) coated on the surface of the polymer layer 20 and a metal buffer layer 20 facing the above-mentioned polymer layer 20, And a second fabric substrate 40 on which the two metal particles 30 are located. At this time, as the polymer layer 20 described above repeats contact and non-contact with the metal particles 30 described above, triboelectricity occurs between the polymer layer 20 and the metal particles 30 described above do.

In particular, the above-described triboelectric energy generating element widens the friction surface area of the above-described polymer layer 20 and the above-mentioned metal particles 30, thereby maximizing the triboelectric generating effect.

Hereinafter, exemplary embodiments of the present invention will be described in order to facilitate understanding of the present invention. It should be understood, however, that the following examples are intended to assist in the understanding of the present invention and are not intended to limit the scope of the present invention.

<Production Example>

The PDMS nanostructure was formed by reactive ion etching after PDMS was coated with a first active material on a flexible fabric substrate coated with Au, which is a buffer material. After that, a flexible fabric substrate coated with Au, which is a buffer material, is put into the chamber to make a pressure of 3 × 10 ^-6 torr. The second active material, Al, was then melted to form Al particles in the form of a 2 nm thick embossed layer on the substrate at a deposition rate of 0.2 ANGSTROM / s. Thereafter, a triboelectric substrate on which the above-described Al particles were formed was disposed so that the above-mentioned Al particles were directed to the PDMS described above to produce a triboelectric energy generating element.

&Lt; Comparative Example 1 &

As compared with the above-described Production Example 1, except that an ITO electrode was formed on PET on the upper electrode substrate, and then Al was vacuum-deposited on the ITO electrode at a rate of 2.0 ANGSTROM / s to be smoothly formed, Thereby producing a triboelectric energy generating element.

&Lt; Comparative Example 2 &

Compared with the above-described Production Example 1, except that Al, which is a second active material, was vacuum-deposited at a speed of 2.0 Å / s on a flexible fabric substrate coated with Au as a buffer material and formed smoothly, Thereby producing a triboelectric energy generating element.

Fig. 2 is a planar image of a PDMS nanostructure coated on a fabric substrate of Production Example 1. Fig.

Referring to FIG. 2, it can be seen that the surface of the PDMS has a concavo-convex structure and is uniformly formed.

As a result, it can be seen that the surface of the polymer layer formed on the fabric substrate has a concave-convex structure due to the dryness, thereby improving the friction surface area.

3 is a cross-sectional image of the PDMS nanostructure coated on the fabric substrate of Production Example 1. Fig.

Referring to FIG. 3, it can be seen that a nanofiber iron body having a diameter of 2 μm and an average length of 200 to 300 nm is formed.

As a result, the surface of the polymer layer formed on the fabric substrate is referred to as dry, and the surface of the polymer layer has a very fine concavo-convex structure, thereby improving the friction surface area.

4 is a SEM image of a surface of an Al coating layer coated on a fabric substrate in Production Example 1. Fig.

Referring to FIG. 4, it can be seen that Al is coated on the fabric substrate in an embossed form.

As a result, it can be seen that the metal coating layer vacuum-deposited on the fabric substrate at low speed is coated in an embossed form to improve the friction surface area.

5 is a SEM image of a surface of an Al coating layer coated on a fabric substrate of Comparative Example 1. Fig.

Referring to FIG. 5, in the case of Comparative Example 1, it can be seen that the Al coating layer is smoothly formed.

6 is a SEM image of a surface of an Al coating layer coated on a fabric substrate of Comparative Example 2. Fig.

Referring to FIG. 6, in the case of Comparative Example 2, it can be seen that the Al coating layer is smoothly formed.

7 is a graph showing the output voltages of Production Example, Comparative Example 1, and Comparative Example 2. Fig.

Referring to FIG. 7, the production example shows an excellent output voltage improvement effect of about 10 times or more as compared with Comparative Example 1 in the order of output voltage of 259 V, Comparative Example 2 of 200 V, and Comparative Example 1 of 20 V in this order Able to know.

As a result, it can be seen that the triboelectric energy generating element of the present invention has an excellent output voltage as the friction surface area is maximized.

8 is a graph showing the output currents of Production Example, Comparative Example 1, and Comparative Example 2. Fig.

Referring to FIG. 8, the production example shows an excellent output current improvement effect of about 4 times or more as compared with Comparative Example 1 in the order of output current of 78 uV, Comparative Example 2 of 75 uV, and Comparative Example 1 of 20 uV in this order Able to know.

As a result, it can be seen that the triboelectric energy generating element of the present invention has excellent output current as the friction surface area is maximized.

9 is SEM images of the surface of the metal particle layer according to the thickness of the metal particle layer according to an embodiment of the present invention.

9 (a) is an SEM image of the surface of the fabric substrate, (b), (c), (d) and (e) And the surface of the metal particles is photographed.

Referring to FIG. 9, when a metal material is coated with a thickness of 2 nm, the probability that a metal material is coated in a film form increases.

In addition, when the metal material is coated with a thickness of 5 nm, the probability that the metal material is coated again in a film form increases.

As a result, it is preferable to form the average thickness of the metal particles to 3 nm to 4 nm.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the present invention is not limited to the disclosed exemplary embodiments, and various changes and modifications may be made by those skilled in the art without departing from the scope and spirit of the invention. Change is possible.

10: lower electrode substrate 20: polymer nanostructure layer
30: metal coating layer 40: upper electrode substrate

Claims (13)

A first fabric substrate;
A polymer layer disposed on the first fabric substrate, the polymer layer having a surface having a concavo-convex shape and having a charging property; And
A second fabric substrate disposed on the polymer layer and having a surface coated with a metal buffer layer and a plurality of metal particles positioned in an embossed form on a metal buffer layer facing the polymer layer,
Wherein triboelectricity is generated between the polymer layer and the metal particles as the polymer layer repeats contact and noncontact states with the metal particles. The method according to claim 1,
Wherein the metal buffer layer comprises at least one selected from the group consisting of Au, Cu, Ag and Pt. 3. The method of claim 2,
Wherein the metal material contained in the metal particles is different from the metal material contained in the metal buffer layer. The method of claim 3,
Wherein the metal particles include at least one selected from the group consisting of Al, Zn, and Mg. The method according to claim 1,
Wherein the polymer comprises at least one selected from the group consisting of polydimethylsiloxane (PDMS), polytetrafluoroethylene (PTFE), and polyvinyl chloride (PVC). The method according to claim 1,
Wherein the metal particles serve as an entire friction pad and an electrode. Preparing a first fabric substrate;
Forming a polymer layer on the first fabric substrate, the polymer layer having a surface having a concavo-convex shape and having a charging property;
Forming a plurality of metal particles in an embossed form on the metal buffer layer of a second fabric substrate coated with a metal buffer layer on the surface; And
Disposing the second fabric substrate on a first fabric substrate on which the polymer layer is formed such that the polymer layer and the metal particles face each other,
Wherein triboelectricity is generated between the polymer layer and the metal particles as the polymer layer repeats contact and noncontact states with the metal particles. 8. The method of claim 7,
Wherein the step of forming the polymer layer uses a dry etching process. 9. The method of claim 8,
Wherein the dry etching process uses at least one process selected from the group consisting of a reactive ion etching (RIE) process and an inductively coupled plasma (ICP) process. / RTI &gt; 8. The method of claim 7,
Wherein forming metal particles on the metal buffer layer comprises:
And then performing a vacuum evaporation process to form the triboelectric energy generating device. 11. The method of claim 10,
Wherein the vacuum deposition is performed at a rate of 0.1 A / s to 0.2 A / s. 12. The method of claim 11,
Wherein forming metal particles on the metal buffer layer comprises:
Wherein the metal particles are deposited until an average thickness of the metal particles is formed to a thickness of 3 nm to 4 nm. 8. The method of claim 7,
Wherein the metal material contained in the metal particles is different from the metal material contained in the metal buffer layer.

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