KR20160021915A - 차폐 이온화 장치 - Google Patents

차폐 이온화 장치 Download PDF

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Publication number
KR20160021915A
KR20160021915A KR1020140104873A KR20140104873A KR20160021915A KR 20160021915 A KR20160021915 A KR 20160021915A KR 1020140104873 A KR1020140104873 A KR 1020140104873A KR 20140104873 A KR20140104873 A KR 20140104873A KR 20160021915 A KR20160021915 A KR 20160021915A
Authority
KR
South Korea
Prior art keywords
shieled
actively
source
quot
later
Prior art date
Application number
KR1020140104873A
Other languages
English (en)
Inventor
채영태
Original Assignee
주식회사본길
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사본길 filed Critical 주식회사본길
Priority to KR1020140104873A priority Critical patent/KR20160021915A/ko
Publication of KR20160021915A publication Critical patent/KR20160021915A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

차후 보완하겠슴.

Description

차폐 이온화 장치{Actively shieled EI source}
전기,전자
필라멘트를 이용한 분자 이온화 기술
이온소스의 불필요한 이온들 제거
이온장치 주변을 차폐를 함
좋은 감도의 이온화 장치 구현
차후 보완 하겠음.

Claims (1)

  1. 추후 보완 하겠슴.
KR1020140104873A 2014-08-13 2014-08-13 차폐 이온화 장치 KR20160021915A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020140104873A KR20160021915A (ko) 2014-08-13 2014-08-13 차폐 이온화 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140104873A KR20160021915A (ko) 2014-08-13 2014-08-13 차폐 이온화 장치

Publications (1)

Publication Number Publication Date
KR20160021915A true KR20160021915A (ko) 2016-02-29

Family

ID=55448200

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140104873A KR20160021915A (ko) 2014-08-13 2014-08-13 차폐 이온화 장치

Country Status (1)

Country Link
KR (1) KR20160021915A (ko)

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