KR20160005160A - Method of detecting corrosion of glass substrate - Google Patents
Method of detecting corrosion of glass substrate Download PDFInfo
- Publication number
- KR20160005160A KR20160005160A KR1020140082934A KR20140082934A KR20160005160A KR 20160005160 A KR20160005160 A KR 20160005160A KR 1020140082934 A KR1020140082934 A KR 1020140082934A KR 20140082934 A KR20140082934 A KR 20140082934A KR 20160005160 A KR20160005160 A KR 20160005160A
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- South Korea
- Prior art keywords
- glass substrate
- light source
- sensor
- corrosion
- light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8848—Polarisation of light
Abstract
Placing a light source, an on-off sensor, and a glass substrate; Setting a polarization angle (? Br ) of the glass substrate with the light source and the sensor; And scanning the glass substrate with the light source at the polarization angle, wherein the light emitted from the light source is P-polarized light.
Description
To a corrosion detection method of a glass substrate.
Conventionally, precision equipments such as SIMS (secondary ion mass spectrometer), AFM (scanning electron microscope), SEM (scanning electron microscope) and TEM (transmission electron microscope) have been used to confirm the presence or absence of corrosion of the glass substrate, In this case, much time and expense were consumed, and it was difficult to detect corrosion of a glass substrate or the like having a certain area or more because the equipment was able to confirm only the corrosion of the glass substrate with a certain size.
One embodiment of the present invention provides a corrosion detection method for detecting the presence or absence of corrosion according to an on-off sensor operation after irradiating light onto a glass substrate.
In one embodiment of the present invention, a light source, an on-off sensor, a glass substrate, Setting a polarization angle (? Br ) of the glass substrate with the light source and the sensor; And scanning the glass substrate with the light source at the polarization angle, wherein the light emitted from the light source is P-polarized light.
The half-width of the spectrum of the light source may be about 10 nm or less.
The light source can be disposed on the glass substrate.
The polarization angle may be an angle at a time when the sensor is initially turned off while the light source is scanning an arbitrary region of the glass substrate.
The polarization angle can be controlled by the composition of the glass substrate.
The sensor may be disposed on the glass substrate.
The glass substrate may be one area, and the glass substrate, the area of the glass substrate 2 of about 9m to about 20m 2.
Wherein the step of scanning the glass substrate by the light source includes the steps of: turning off the sensor by passing P-polarized light emitted from the light source through the glass substrate; Or P-polarized light emitted from the light source is dispersed into the first light and the second light at the surface of the glass substrate, and the second light turns on the sensor.
In the step of turning off the sensor, the reflectance of the P-polarized light may be about 1% or less.
At the surface of the glass substrate, the first light may be transmitted through the glass substrate, and the second light may be reflected at the glass substrate.
The area of the organic substrate on which the sensor is turned off is a non-corrosive area, and the area of the glass substrate on which the sensor is turned on may be a corrosion area.
The refractive index of the non-corrosive region may be greater than the refractive index of the corrosion region.
The porosity of the non-corrosion region may be less than the porosity of the corrosion region.
By using the above corrosion detection method, it is possible to confirm the presence or absence of corrosion in a relatively short period of time, thereby minimizing the defective rate and thereby producing a high quality coated glass.
1 is a schematic diagram illustrating a process of detecting a non-corrosive region of a glass substrate.
2 is a schematic diagram illustrating a process of detecting a corrosion area of a glass substrate.
Hereinafter, embodiments of the present invention will be described in detail. However, the present invention is not limited thereto, and the present invention is only defined by the scope of the following claims.
In one embodiment of the present invention, a light source, an on-off sensor, a glass substrate, Setting a polarization angle (? Br ) of the glass substrate with the light source and the sensor; And scanning the glass substrate with the light source at the polarization angle, wherein the light emitted from the light source is P-polarized light.
The P-polarized light refers to a light having a direction of a magnetic field vibration of light that is parallel to a surface of the substrate. The polarizing angle is the same as the Brewster's angle. When the P-polarized light is incident at a specific incident angle, The angle of incidence is Brewster's angle.
It is possible to confirm the presence or absence of corrosion in a relatively short period of time by using a corrosion detection method which confirms the presence or absence of corrosion according to the on-off sensor operation after irradiating the glass substrate with a light source that emits P- It is possible to minimize the defective rate of the coated glass according to the present invention.
The light source may have a spectrum of several hundred nm to several thousands nm wavelength depending on the degree of corrosion of the glass substrate to be searched. For example, the light source may be less than or equal to about 2000 nm, and may include less than 2000 nm of the infrared region.
However, the half-width of the spectrum of the light source may be about 10 nm or less. The half width is advantageously small as less than about 10 nm, and can not be less than 0 nm, but may vary depending on the type of light source.
The half width of the spectrum is preferably as narrow as the above range, and if the half width of the spectrum is wide, the set angle of polarization can not be maintained. If the polarization angle is not maintained, errors in corrosion detection may occur.
For example, the light source may use a lamp-type light source, a gas laser light source, a semiconductor laser light source, or the like to which a thin film filter is applied, in order to maintain the half width of the spectrum.
The light source can be disposed on the glass substrate. The light source is disposed on the glass substrate and horizontally held and moved in both directions to interlock with the sensor to set a polarization angle or to scan the glass substrate.
The position of the light source can be changed according to the wavelength, type, etc. of the light source, but it is advantageous that the light source is arranged on the glass substrate because the polarization angle uses the principle of reflection of P-polarized light emitted from the light source.
The polarization angle may be an angle at a time when the sensor is initially turned off while the light source is scanning an arbitrary region of the glass substrate.
The polarization angle is an angle at which the light source and the sensor are set to be interlocked, and the light source automatically changes the angle of incidence until it finds a polarization angle, and outputs P-polarized light to the glass substrate. When the light source is irradiated to an arbitrary region of the glass substrate, the sensor can be operated for the first time after the light source scans the glass substrate, and the angle at this time is set to the polarization angle.
The light source stores the polarization angle, and after the polarization angle is set, the glass substrate can be scanned while maintaining the polarization angle.
The polarization angle can be controlled by the composition of the glass substrate. Specifically, the polarization angle is θ = tan -1 br can be determined by the equation (n 2 / n 1), n 1 is the incidence region, that is, the refractive index of the air, wherein n 2 is the transmission region that is, Means the refractive index of the glass substrate.
At this time, the refractive index of the glass substrate may be varied according to the composition of the glass substrate, and the polarization angle may vary depending on the composition of the glass substrate.
The sensor may be disposed on the glass substrate. Specifically, it can be disposed on the glass substrate and arranged on the same line as the light source. When the light source scans the glass substrate, the sensor is turned on when P-polarized light emitted from the light source is sensed, and the sensor is turned off when P-polarized light emitted from the light source is not sensed And the sensor is disposed on the same line as the light source, so that corrosion of the glass substrate can be detected.
Since the position of the sensor can be changed according to the position of the light source, since the polarization angle uses the principle of reflection of P-polarized light emitted from the light source, the light source is placed on the glass substrate, It is advantageous to arrange them on a line.
The glass substrate may be one area, and the glass substrate, the area of the glass substrate 2 of about 9m to about 20m 2. Conventionally, by using the corrosion detection method using only the precision equipment, only the presence or absence of corrosion of the glass substrate of a certain size can be confirmed, and it is difficult to detect corrosion of the glass substrate or the like having a predetermined area or more.
However, by using the above corrosion detection method, corrosion detection of a large-area glass substrate can be possible with relatively little time and cost, and the area of the large-area glass substrate can be about 9 m 2 to about 20 m 2 .
Wherein the step of scanning the glass substrate by the light source includes the steps of: turning off the sensor by passing P-polarized light emitted from the light source through the glass substrate; Or P-polarized light emitted from the light source is dispersed into the first light and the second light at the surface of the glass substrate, and the second light turns on the sensor.
When the light source scans the glass substrate, the P-polarized light emitted from the light source passes through the glass substrate, and the P-polarized light is not sensed by the sensor, so that the sensor can be turned off. At this time, the region of the organic substrate where the sensor is turned off may be a non-corrosive region.
In the step of turning off the sensor, the reflectance of the P-polarized light may be about 1% or less. On the other hand, the transmittance of the P-polarized light through the glass substrate may be about 90% or more. For example, P-polarized light emitted from the light source can transmit at least about 96% of the glass substrate.
The light source emits P-polarized light to the glass substrate, and the P-polarized light emitted at the polarization angle is not reflected at all on the glass substrate, so that the sensor arranged on the same line as the light source can not be operated.
In addition, when the light source scans the glass substrate, the P-polarized light emitted from the light source is dispersed into the first light and the second light on the surface of the glass substrate, and the second light is detected by the sensor The sensor can be operated on. At this time, the area of the glass substrate on which the sensor is turned on may be a corrosion area.
At the surface of the glass substrate, the first light may be transmitted through the glass substrate, and the second light may be reflected at the glass substrate.
The first light transmitted through the glass substrate and the glass substrate surface may show a transmission angle (? 1 ), the second light reflected by the glass substrate and the glass substrate surface may show a reflection angle (? 2 ). The transmission angle and the reflection angle are variable depending on the type, composition and configuration of the glass substrate.
The refractive index of the non-corrosive region may be greater than the refractive index of the corrosion region. For example, the refractive index of the noncorrosion region may be 1.4 to 1.5, and the refractive index of the corrosion region may be less than 1.4 because the corrosion region contains more pores than the noncorrosion region.
The porosity of the non-corrosion region may be less than the porosity of the corrosion region. The corrosion area may include pores, rather than the composition of the glass substrate, in the corroded area, and may include more pores than the non-corrosion area. Therefore, the porosity of the non-corrosive region may be smaller than the porosity of the corrosion region, and the porosity means a percentage of the porosity area of the entire glass substrate area.
Hereinafter, specific embodiments of the present invention will be described. However, the embodiments described below are only intended to illustrate or explain the present invention, and thus the present invention should not be limited thereto.
1 is a schematic diagram illustrating a process of detecting a non-corrosive region of a glass substrate. Referring to FIG. 1, the light source and the sensor interlock with each other to set a polarization angle, and the light source scans the glass substrate while maintaining the set angle of polarization. At this time, the P-polarized light emitted from the light source transmitted through the glass substrate, and the sensor operated off, which is a non-corrosive region.
2 is a schematic diagram illustrating a process of detecting a corrosion area of a glass substrate. Referring to FIG. 2, the light source and the sensor are interlocked to set a polarization angle, and the light source scans the glass substrate while maintaining the set polarization angle. At this time, the P-polarized light emitted from the light source is dispersed in the first light source that is transmitted through the glass substrate on the surface of the glass substrate, and the second light source is reflected on the glass substrate, and the second light source turns on the sensor When operated, this area is the corrosion area.
1 and FIG. 2, it can be confirmed whether or not the glass substrate is corroded. The non-corrosive region of FIG. 1 has a lower refractive index and porosity than the corrosive region of FIG.
Claims (13)
Setting a polarization angle (? Br ) of the glass substrate with the light source and the sensor; And
And scanning the glass substrate with the light source at the polarization angle,
The light emitted from the light source is P-
Corrosion detection method.
Wherein the light source has a half width of the spectrum of 10 nm or less
Corrosion detection method.
Wherein the light source is disposed on the glass substrate
Corrosion detection method.
Wherein the polarization angle is an angle at a time point at which the sensor is initially turned off while the light source is scanning an arbitrary region of the glass substrate
Corrosion detection method.
Wherein the polarization angle is controlled by the composition of the glass substrate
Corrosion detection method.
The sensor is disposed above the glass substrate
Corrosion detection method.
Wherein the glass substrate is a large-area glass substrate, the glass substrate has an area of 9 m 2 to 20 m 2
Corrosion detection method.
The step of the light source scanning the glass substrate
Polarized light emitted from the light source passes through the glass substrate to turn the sensor off; or
Wherein the P-polarized light emitted from the light source is dispersed into the first light and the second light at the surface of the glass substrate, and the second light activates the sensor on
Corrosion detection method.
In the step of turning off the sensor, the reflectance of the P-polarized light is 1% or less
Corrosion detection method.
The first light transmits through the glass substrate on the surface of the glass substrate, and the second light is reflected on the glass substrate
Corrosion detection method.
Wherein the area of the organic substrate on which the sensor is turned off is a non-corrosive area, and the area of the glass substrate on which the sensor is turned on is a corrosion area
Corrosion detection method.
Wherein the refractive index of the non-corrosive region is greater than the refractive index of the corrosion region
Corrosion detection method.
Wherein the porosity of the non-corrosive region is less than the porosity of the corrosion region
Corrosion detection method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140082934A KR101952617B1 (en) | 2014-07-03 | 2014-07-03 | Method of detecting corrosion of glass substrate |
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| Application Number | Priority Date | Filing Date | Title |
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| KR1020140082934A KR101952617B1 (en) | 2014-07-03 | 2014-07-03 | Method of detecting corrosion of glass substrate |
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| KR20160005160A true KR20160005160A (en) | 2016-01-14 |
| KR101952617B1 KR101952617B1 (en) | 2019-02-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019215696A1 (en) * | 2018-05-11 | 2019-11-14 | Guardian Glass, LLC | Method and system utilizing ellipsometry to detect corrosion on glass |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920012907A (en) * | 1990-12-27 | 1992-07-28 | 나까다 야스오 | Foreign Material Detection Device on Glass Plate |
| JPH09258197A (en) * | 1996-03-18 | 1997-10-03 | Hitachi Electron Eng Co Ltd | Method for discriminating front and rear defects of glass substrate |
| KR0176526B1 (en) * | 1995-08-26 | 1999-04-01 | 김광호 | Inspection result discrimination device of inspection automation equipment |
| JP2007304042A (en) * | 2006-05-15 | 2007-11-22 | Toyota Motor Corp | Device and method for measuring excoriation |
| JP2008536127A (en) * | 2005-04-06 | 2008-09-04 | コーニング インコーポレイテッド | Glass inspection apparatus and method of use thereof |
| JP2012083126A (en) * | 2010-10-07 | 2012-04-26 | Nippon Steel Corp | Substrate inspection method and substrate inspection device |
| JP2014502360A (en) * | 2010-11-30 | 2014-01-30 | コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング | Detection of raindrops on window glass by camera and lighting |
| KR20140012250A (en) * | 2012-07-19 | 2014-02-03 | (주)미토스 | Apparatus and method for measuring the defect of glass substrate |
-
2014
- 2014-07-03 KR KR1020140082934A patent/KR101952617B1/en active IP Right Grant
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920012907A (en) * | 1990-12-27 | 1992-07-28 | 나까다 야스오 | Foreign Material Detection Device on Glass Plate |
| KR0176526B1 (en) * | 1995-08-26 | 1999-04-01 | 김광호 | Inspection result discrimination device of inspection automation equipment |
| JPH09258197A (en) * | 1996-03-18 | 1997-10-03 | Hitachi Electron Eng Co Ltd | Method for discriminating front and rear defects of glass substrate |
| JP2008536127A (en) * | 2005-04-06 | 2008-09-04 | コーニング インコーポレイテッド | Glass inspection apparatus and method of use thereof |
| JP2007304042A (en) * | 2006-05-15 | 2007-11-22 | Toyota Motor Corp | Device and method for measuring excoriation |
| JP2012083126A (en) * | 2010-10-07 | 2012-04-26 | Nippon Steel Corp | Substrate inspection method and substrate inspection device |
| JP2014502360A (en) * | 2010-11-30 | 2014-01-30 | コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング | Detection of raindrops on window glass by camera and lighting |
| KR20140012250A (en) * | 2012-07-19 | 2014-02-03 | (주)미토스 | Apparatus and method for measuring the defect of glass substrate |
Non-Patent Citations (1)
| Title |
|---|
| 송준엽 외, PDP ITO 패턴유리의 결함 검사시스템 개발, 한국정밀공학회지 제21권제12호, 한국정밀공학회 2004. 12. pp92-99 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019215696A1 (en) * | 2018-05-11 | 2019-11-14 | Guardian Glass, LLC | Method and system utilizing ellipsometry to detect corrosion on glass |
| US10590031B2 (en) | 2018-05-11 | 2020-03-17 | Guardian Glass, LLC | Method and system utilizing ellipsometry to detect corrosion on glass |
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| Publication number | Publication date |
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| KR101952617B1 (en) | 2019-02-28 |
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