KR20150109531A - Liner of gauge hole for vacuum degree measurement - Google Patents

Liner of gauge hole for vacuum degree measurement Download PDF

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Publication number
KR20150109531A
KR20150109531A KR1020140032214A KR20140032214A KR20150109531A KR 20150109531 A KR20150109531 A KR 20150109531A KR 1020140032214 A KR1020140032214 A KR 1020140032214A KR 20140032214 A KR20140032214 A KR 20140032214A KR 20150109531 A KR20150109531 A KR 20150109531A
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KR
South Korea
Prior art keywords
liner
hole
cover
gauge
vacuum chamber
Prior art date
Application number
KR1020140032214A
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Korean (ko)
Inventor
박희정
Original Assignee
엘아이지인베니아 주식회사
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Priority to KR1020140032214A priority Critical patent/KR20150109531A/en
Publication of KR20150109531A publication Critical patent/KR20150109531A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The present invention relates to a liner for a gauge hole in a vacuum chamber of a vacuum chamber, the liner comprising: a vacuum chamber having a gauge hole; A wall liner that surrounds the inner wall surface of the vacuum chamber and has a through hole formed in a portion corresponding to the gauge hole; An insertion liner mounted in the gauge hole of the vacuum chamber; And a cover liner inserted into the through hole of the wall liner and having one end thereof engaged with the insertion liner and the other end sealing the inner circumferential surface of the through hole, thereby sealing the inner circumferential surface of the through hole of the wall liner In the case of the cover liner to be protected, the cover liner is released into the vacuum chamber due to the pressure of the vacuum chamber, And the efficiency of use is greatly increased.

Description

[0001] The present invention relates to a liner for gauge holes in vacuum chambers,

The present invention relates to a gauge hole liner for a vacuum chamber, and more particularly, to a gauge hole formed in one side wall of a vacuum chamber for measuring a degree of vacuum of a vacuum chamber so as to prevent the inner surface of the gauge hole from being etched during processing To a liner for a gauge hole of a vacuum chamber.

Generally, a flat panel display such as a liquid crystal display (LCD), a plasma display panel (PDP), an organic light emitting diode (OLED) Vacuum processing equipment is used for manufacturing, which includes a process chamber, a transfer chamber, and a load lock chamber.

The load lock chamber serves to receive the unprocessed substrate from the outside or to move the processed substrate to the outside while alternating between the atmospheric pressure state and the vacuum state and the transport chamber is a transportation robot for transporting the substrate between the chambers And transferring the substrate to be processed from the load lock chamber to the process chamber or transferring the processed substrate from the process chamber to the load lock chamber, wherein the process chamber uses plasma in a vacuum atmosphere or uses thermal energy Thereby performing film formation or etching on the substrate.

FIG. 1 is a sectional view showing the internal structure of a conventional process chamber (hereinafter, referred to as 'vacuum chamber'). In the conventional process chamber, a gate 11 is provided on one side, It is made possible to switch.

Two flat plate electrodes are provided on the upper and lower sides of the vacuum chamber 10 so as to face each other in parallel. A substrate S is mounted on the lower electrode assembly 30 of the two electrodes. Therefore, the lower electrode assembly 30 is also referred to as a substrate mount.

A showerhead 22 is coupled to the upper electrode assembly 20 located on the upper side corresponding to the lower electrode assembly 30.

The showerhead 22 is provided with a plurality of diffusion holes 24 having a fine diameter through which the process gas is uniformly supplied to the space between the electrodes 20 and 30, The supplied process gas is plasmaized by application of high frequency power to the electrode, and the surface of the substrate is processed by the plasma.

In such a vacuum chamber 10, it is very important to precisely control the degree of vacuum, that is, the pressure of the vacuum, in a vacuum state.

Therefore, when the process is performed in the vacuum chamber 10, the vacuum pressure in the vacuum chamber 10 must be precisely measured and accurately controlled.

2, a vacuum degree measuring gauge 40 is installed on one side of the vacuum chamber 10 to measure the degree of vacuum inside the vacuum chamber 10 when the vacuum chamber 10 is evacuated, have.

The vacuum degree measuring gauge 40 is installed outside the vacuum chamber 10 so that a gauge hole 50 penetrating the one side wall of the vacuum chamber 10 is formed, 50 and a vacuum degree gauge 40 as a connection pipe 60 are connected to measure the degree of vacuum in the vacuum chamber 10. [

However, when the gauge hole 50 penetrating the one side wall of the vacuum chamber 10 is formed, when the plasma is generated for the substrate processing in the vacuum chamber 10, the inner surface of the gauge hole 50 may be etched As shown in FIG. 2, a ceramic material liner 70 is inserted into the inner surface of the gauge hole 50 to eliminate the fear of etching.

The liner 70 includes an insertion portion 72 which is inserted into the gauge hole 50 and surrounds the inner circumferential surface of the gate hole 50 and an insertion portion 72 which is formed integrally with the insertion portion 72, And an engaging portion 74 which engages with the inlet end of the gauge hole 50 of the vacuum chamber 10.

Therefore, when the inserting portion 72 of the liner 70 is inserted into the gauge hole 50 from the inside of the vacuum chamber 10, the engaging portion 74 is engaged with the inlet end of the gauge hole 50 of the vacuum chamber 10 A wall liner 80 made of an aluminum material that has been anodized over the tip of the latching portion 74 of the liner 70 as well as the inner wall surface of the vacuum chamber 10 is inserted in this state So that the inner wall surface of the vacuum chamber 10 and the inner peripheral surface of the gauge hole 50 are prevented from being etched in the vacuum chamber 10 during the processing process.

However, in this case, the inside of the latching portion 74 of the liner 70 is directly exposed through the through hole 82 of the wall liner 80, and the inside of the liner 70 The inner side of the latching portion 74 of the gage hole 50 is still etched and subsequently the inner surface of the gage hole 50 is etched by the subsequent etching.

3, there is provided a liner 100 comprising an insertion liner 110 inserted into a gage hole 50 and a cover liner 120 protecting the insertion liner 100, The problem of etching the inner surface of the gauge hole 50 is solved by fastening the cover liner 120 to the wall liner 80. [

3, a wall liner 80 is formed on the inner wall surface of the vacuum chamber 10, and a portion corresponding to the gauge hole 50 in the wall liner 80 is provided with a female screw portion 84 And the insertion liner 110 inserted into the gauge hole 50 is formed as an object and is fastened to the female threaded portion 84 of the wall liner 80, And a cover liner 120 having a male thread 122 formed on its outer surface.

The insertion liner 110 is inserted into the gauge hole 50 from the inner wall surface side of the vacuum chamber 10 by interference fit and the male thread portion 122 of the cover liner 120 is inserted into the gauge hole 50 of the wall liner 80 A liner structure for preventing the inner surface of the gauge hole 50 from being etched is provided by rotationally fastening to the female screw portion 84.

In the case of the liner 100 constructed as described above, the thickness of the wall liner 80 is very small, approximately 5 mm, and the thickness of the cover liner 120 with respect to the female threaded portion 84 of the wall liner 80, The cover liner 120 is fastened to the wall liner 80 by the vacuum pressure in vacuum inside the vacuum chamber 10 because the fastening depth of the male thread 122 of the vacuum lance 10 is very shallow, There is a problem in that it is easily disassembled.

When the cover liner 120 is separated from the wall liner 80 as described above, the leading end portion of the insertion liner 110 is directly exposed through the through hole of the wall liner 80. As a result, The inner peripheral surface of the hole 50 is still etched.

The present invention has been made in view of the above problems, and it is an object of the present invention to increase the fastening force of the cover liner to prevent the cover liner from being easily released even under the pressure of the vacuum chamber, and eventually the inner peripheral surface of the gauge hole of the vacuum chamber is etched And it is an object of the present invention to provide a liner for a gauge hole of a vacuum chamber which is capable of dissipating concern.

According to an aspect of the present invention, there is provided a liner for a gauge hole of a vacuum chamber, including: a vacuum chamber having a gauge hole; A wall liner that surrounds the inner wall surface of the vacuum chamber and has a through hole formed in a portion corresponding to the gauge hole; An insertion liner mounted in the gauge hole of the vacuum chamber; And a cover liner inserted into the through hole of the wall liner to have one end thereof engaged with the insertion liner and the other end sealing the inner peripheral surface of the through hole.

In this case, the gauge hole of the vacuum chamber may include: a first gauge hole formed to have a predetermined diameter from the inner wall surface side of the vacuum chamber; And a second gauge hole having a diameter smaller than that of the first gauge hole and forming a hook at a boundary therebetween.

The insertion liner includes: a first insertion portion inserted into the first gauge hole so as to be closely contacted with the inner diameter of the first gauge hole and having a stepped portion formed on one side of the outer diameter thereof so as to be engaged with the engagement protrusion; And a second inserting portion which is inserted into the second gauge hole so as to be in close contact with the inner diameter of the second gauge hole.

It is preferable that a through hole is formed in the insertion liner and a female screw portion is formed at a predetermined distance from one end of the through hole on the inner surface of the through hole.

In this case, a male screw portion is formed on the outer surface of the cover liner corresponding to the female screw portion, and the cover liner and the insertion liner are screwed together.

The cover liner includes a first cover portion having a male screw portion around an outer surface of the cover to be fastened to the female screw portion of the insertion liner; A second cover portion formed to have a diameter larger than that of the first cover portion and inserted in close contact with the inner circumferential surface of the through hole of the wall liner to cover one end of the insertion liner; And a third cover part formed to have a larger diameter than the through holes of the second cover part and the wall liner and being closely held on one side surface of the wall liner around the through hole.

The through-hole of the insertion liner may include a first through-hole formed at a predetermined distance from the one end of the insertion liner by a predetermined distance; And a second through-hole continuously formed along the longitudinal direction with a diameter smaller than the first through-hole, and the female threaded portion is formed on the inner circumferential surface of the first through-hole.

In addition, a planar portion is formed in a longitudinal direction at a predetermined interval on at least one of circumferential surfaces of the outer circumferential surfaces of the insertion liner so that the insertion liner is not rotated in a state that the insertion liner is inserted into the gauge hole, A planar portion corresponding to the planar portion may be formed.

As described above, according to the liner for a gauge hole of a vacuum chamber according to the present invention, in the case of a cover liner for sealingly protecting an inner circumferential surface of a through hole of a wall liner, the cover liner is fastened with a screw- The cover liner is prevented from being released to the inside of the vacuum chamber by the pressure corresponding to the vacuum of the vacuum chamber, and the efficiency of use thereof is greatly increased.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a cross-sectional view of a conventional calm chamber configuration.
FIG. 2 and FIG. 3 are partially cutaway perspective views schematically showing a state in which a liner is installed in a gauge hole in a conventional vacuum chamber. FIG.
4 is a partial perspective view schematically showing a state in which a liner is installed in a gauge hole of a vacuum chamber according to the present invention;
Figure 5 is an exploded perspective view of the insert liner and cover liner in Figure 4;
6 is a partial perspective view schematically showing a state in which a liner is installed in a gauge hole of a vacuum chamber according to another embodiment of the present invention;

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 4 is a partially cutaway perspective view schematically showing a state in which a liner is installed in a gauge hole of a vacuum chamber according to the present invention, and FIG. 5 is an exploded perspective view of an insertion liner and a cover liner in FIG.

For the sake of reference, in describing the embodiment of the present invention, the same reference numerals are given to the same parts as those in the conventional art, and repeated description thereof will be omitted.

As shown in the figure, a gauge hole 50 is formed on one wall surface of the vacuum chamber to measure the degree of vacuum in the vacuum chamber using a vacuum gauge.

The gauge hole 50 is formed in a linear direction so as to penetrate from the inner wall surface of the vacuum chamber 10 through the outer wall surface. The gauge hole 50 includes a first gauge hole 54 formed to have a predetermined diameter from the inner wall surface, And a second gauge hole 52 having a diameter smaller than that of the gauge hole 54 and forming a hook 56 at a boundary portion thereof.

There is provided a liner 200 which is inserted into the gauge hole 50 and prevents the inner circumferential surface of the gauge hole 50 from being etched during the processing in the vacuum chamber 10, The liner 200 includes an insertion liner 210 inserted into the gauge hole 50 of the vacuum chamber 10 and a cover liner 220 detachably fixed to the insertion liner 210 in a screw- ).

On the inner wall surface of the vacuum chamber 10, a wall liner 80 made of an anodized aluminum material is formed to a certain thickness in order to prevent the inner wall surface of the chamber from being etched by the process plasma. A through hole (not shown) communicating with the gauge hole 50 is formed in the wall liner 80.

The insertion liner 210 is inserted and mounted into the gauge hole 50 through the through hole of the wall liner 80 and a portion of the cover liner 220 is also inserted through the through hole of the wall liner 80, A part of the front end of the cover liner 220 is tightly supported on one side surface of the through hole of the wall liner 80, Thereby sealing the inner peripheral surface of the through hole.

The insertion liner 210 includes a first insertion portion 216 formed with a size corresponding to an inner diameter of the first gauge hole 54 and an outer diameter thereof and having a first through hole 218 formed at the center thereof, And a second insertion portion 212 having a size corresponding to the inner diameter of the gauge hole 52 and an outer diameter thereof and having a second through hole 214 formed at the center thereof.

Therefore, when the inserting liner 210 is inserted into the gauge hole 50, the outer diameter side boundary portion of the first inserting portion 216 and the second inserting portion 212 is formed in a stepped shape. A portion of the first gauge hole 54 and the second gauge hole 52 is caught by the engagement jaw 56 formed at the boundary portion between the first gauge hole 54 and the second gauge hole 52. [

That is, when the insertion liner 210 is inserted into the gauge hole 50 through the through hole of the wall liner 80 on the inner wall surface side of the vacuum chamber 10, and the second insertion portion 212 is inserted first, After the stepped portion of the first insertion portion 216 is inserted to the position where the stepped portion 56 is hooked, the insertion is no longer performed.

The through holes 218 and 214 communicate with the gauge hole 50 at the central portion of the insertion liner 210. The through holes 218 and 214 are formed in a predetermined A first through hole 218 formed to have a constant diameter with a predetermined interval and a second through hole 214 formed continuously along the longitudinal direction with a diameter smaller than the first through hole 218, A female threaded portion 219 is formed on the inner circumferential surface of the hole 218.

The cover liner 220 is formed with a male screw portion 224 around the outer surface of the cover liner 220 so as to be fastened to the female screw portion 219 of the insertion liner 210. The cover liner 220 has through holes 218, The first cover part 222 is formed to have a larger diameter than the first cover part 222 and is inserted into the through hole of the wall liner 80 so as to be in close contact therewith, A second cover portion 226 covering an inner circumferential surface of the hole and one end of the insertion liner 210 and a diameter larger than a passing hole of the second cover portion 226 and the wall liner 80, And a third cover portion 228 tightly supported on one side surface of the wall liner 80 in the vicinity of the through hole.

That is, the cover liner 220 includes a first cover portion 222 having the smallest diameter, a second cover portion 226 having a diameter larger than that of the first cover portion, And the third cover portion 228 is formed in a stepped shape.

5, the second inserting portion 212 of the inserting liner 210 is cylindrical, while the first inserting portion 216 is provided on both sides of the outer circumferential face of the inserting liner 210 opposite to each other, (217) are formed.

In this case, the inner circumferential surface of the first gauge hole 54 in which the first insertion portion 216 is inserted is also formed as a plane portion so as to correspond to the plane portion 217 of the first insertion portion 216 .

When the planar portion 217 is formed on the outer circumferential surface of the first insertion portion 216 of the insertion liner 210 and the planar portion is formed on the inner circumferential surface of the corresponding first gauge hole 54, The rotation of the insertion liner 210 is restricted in a state where the insertion liner 210 is inserted into the gauge hole 50.

That is, the cover liner 220 is rotated while the insertion liner 210 is inserted into the gauge hole 50, and the insertion liner 210 is fastened to the insertion liner 210 in a screw- The insertion liner 210 is restricted from rotating with respect to the gauge hole 50 when the rotation is interlocked with the gauge hole 220.

For reference, in the embodiment of the present invention, the insertion liner 210 is formed with a flat surface portion 217 on both sides opposite to each other on the outer circumferential surface of the first insertion portion 216 so as to restrict rotation with respect to the gauge hole 50 And a planar portion is formed on the inner circumferential surface of the corresponding first gauge hole 54. However, the present invention is not limited to this configuration.

That is, if the rotation of the insertion liner 210 is restricted with respect to the gauge hole 50, a planar portion is formed in at least one circumferential surface of the outer circumferential surface of the insertion liner 210 in the longitudinal direction, It is a matter of course that a planar portion corresponding to the planar portion may be formed on the inner wall surface of the hole 50.

The installation relationship of the gauge hole liner of the vacuum chamber having the above-described structure and its operation and effect will be described below.

The wall liner 80 is inserted into the gauge hole 50 through the through hole of the wall liner 80 in a state in which the wall liner 80 is formed so as to have a through hole communicating with the gauge hole 50 on the inner wall surface of the vacuum chamber 10 The liner 210 is inserted.

At this time, when the first insertion portion 216 of the insertion liner 210 is fitted in the first gauge hole 54 of the gauge hole 50, the stepped portion of the first insertion portion 216 is inserted into the first gauge hole 54 of the gauge hole 50, It is caught by the engaging jaw 56 formed at the boundary between the hole 54 and the second gauge hole 52 and is no longer inserted.

In this state, the first cover portion 222 of the cover liner 220 is inserted into the through hole of the wall liner 80 as well as rotated, The male screw portion 224 formed around the outer surface and the female screw portion 219 formed around the inner surface of the first through hole 218 of the insertion liner 210 are screwed together so that the cover liner 220 is gradually pushed inward .

The cover liner 220 includes a first cover part 222, a second cover part 226 and a third cover part 228. The first cover part 222, As the screws are screwed into the first through holes 218 of the insertion liner 210, the first and second through holes 218 are fastened together. At this time, the second cover portion 226 is inserted into the through hole of the wall liner 80 so that the tip of the first insertion portion 216 of the insertion liner 210 is blocked and the third cover portion 228 covers the wall liner 80 The inner circumferential surface of the through hole of the gauge hole 50 and the wall liner 80 is inserted into the insertion liner 210 and the cover liner 220 without being screwed any more Protection is achieved.

Here, when the cover liner 220 is screwed while rotating the inserting liner 210, rotation of the inserting liner 210 with respect to the gauge hole 50 is restricted, so that the inserting liner 210 is easily fastened .

In this state, the liner 200 composed of the insertion liner 210 and the cover liner 220 protects the gauge hole 50 of the vacuum chamber 10 and the inner circumferential surface of the through hole of the wall liner 80, When the plasma process is performed in the chamber 10, the inner wall surface of the gauge hole 50 and the inner circumferential surface of the through hole of the wall liner 80 are protected by the inserting liner 210 and the cover liner 220, respectively, .

The cover liner 220 may be attached to or detached from the insertion liner 210 even if a part of the cover liner 220 is etched by a frequent process. You can replace it separately.

Particularly, in the case of the cover liner 80 which hermetically protects the inner circumferential surface of the through hole of the wall liner 80 in the present invention, the cover liner 80 is screwed directly into the inserted liner 210 inserted in the gauge hole 50 The cover liner 220 is prevented from being released into the vacuum chamber 10 due to the pressure of the vacuum of the vacuum chamber 10, and the efficiency of use is greatly increased.

6 is a partial perspective view schematically showing a state in which a liner is installed in a gauge hole of a vacuum chamber according to another embodiment of the present invention.

The present embodiment has the same structure and operation as those of the previous embodiment except that the female thread portion 80a is formed on the inner surface of the through hole of the wall liner 80 and the male thread portion 226a are formed.

That is, the female screw portion 80 is formed on the inner circumferential surface of the through hole of the wall liner 80 and the male screw portion 226a is formed on the outer circumferential surface of the second cover portion 226 of the cover liner 220, The fastener 220 is inserted through the through hole of the wall liner 80 and fastened with the insertion liner 210 so that the fastener 220 is fastened doubly so as to maintain a more firm fixation.

In this embodiment, compared with the previous embodiment, the female screw portion 80 is formed on the inner circumferential surface of the through hole of the wall liner 80, and the male screw portion 80 is formed on the outer circumferential surface of the second cover portion 226 of the cover liner 220, The cover liner 220 is doubled in thickness, and the rest of the configuration and operation of the cover liner 220 are identical to those of the cover liner 220. Therefore, a repetitive description thereof will be omitted.

For example, the insert liner 210 and the cover liner 220, which are applied to the embodiments of the present invention, may be made of a ceramic material. In some cases, the insert liner 210 and the cover liner 220 may be made of an anodized aluminum material May be applied.

The technical ideas described in the embodiments of the present invention as described above may be independently performed, or may be implemented in combination with each other. While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art. It is possible. Accordingly, the technical scope of the present invention should be determined by the appended claims.

50: gauge hole 52: second gauge hole
54: first gauge hole 56:
80: wall liner 80a: female thread part
200: liner 210: insertion liner
212: second insertion portion 214: second through hole
216: first insertion portion 218: first through hole
219: Female thread portion 220: Cover liner
222: first cover portion 224: male thread portion
226: second cover portion 226a: male thread portion
228: third cover part

Claims (8)

A vacuum chamber in which a gauge hole is formed;
A wall liner that surrounds the inner wall surface of the vacuum chamber and has a through hole formed in a portion corresponding to the gauge hole;
An insertion liner mounted in the gauge hole of the vacuum chamber;
And a cover liner which is inserted into the through hole of the wall liner and whose one end is engaged with the insertion liner and whose other end seals the inner circumferential surface of the through hole.
The method according to claim 1,
Wherein the gauge hole of the vacuum chamber
A first gauge hole formed to have a predetermined diameter from the inner wall surface side of the vacuum chamber by a predetermined distance;
And a second gauge hole having a diameter smaller than that of the first gauge hole and forming a hook at a boundary portion thereof.
3. The method of claim 2,
The insertion liner
A first insertion portion inserted into the first gauge hole so as to be closely contacted with the inner diameter of the first gauge hole and having a stepped portion formed on one side of the outer diameter thereof so as to be engaged with the engagement protrusion;
And a second insertion portion which is inserted into the second gauge hole so as to be in close contact with the inner diameter of the second gauge hole.
The method according to claim 1,
Wherein a through hole is formed in the insertion liner and a female screw portion is formed at a predetermined distance from one end of the through hole on the inner surface of the through hole.
5. The method of claim 4,
Wherein the cover liner is provided with a male screw portion on the outer surface of the cover liner corresponding to the female screw portion, and the cover liner and the insertion liner are screwed together.
5. The method of claim 4,
Wherein the cover liner comprises:
A first cover portion having a male screw portion around its outer surface for fastening with the female screw portion of the insertion liner;
A second cover portion formed to have a diameter larger than that of the first cover portion and inserted in close contact with the inner circumferential surface of the through hole of the wall liner to cover one end of the insertion liner;
And a third cover part formed to have a diameter larger than a passing hole of the second cover part and the wall liner and being closely supported on one side surface of the through hole of the wall liner.
5. The method of claim 4,
Wherein the through-hole of the insertion liner has a first through-hole formed at a predetermined distance from the one end thereof by a predetermined distance;
And a second through-hole continuously formed along the longitudinal direction with a diameter smaller than that of the first through-hole,
And the female threaded portion is formed on an inner peripheral surface of the first through hole.
The method according to any one of claims 1 to 7,
A planar portion is formed in a longitudinal direction at a predetermined interval on at least one of circumferential surfaces of the outer circumferential surfaces of the insertion liner so that the insertion liner is inserted into the gauge hole,
And a planar portion corresponding to the planar portion is formed on the inner wall surface of the gauge hole.
KR1020140032214A 2014-03-19 2014-03-19 Liner of gauge hole for vacuum degree measurement KR20150109531A (en)

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KR1020140032214A KR20150109531A (en) 2014-03-19 2014-03-19 Liner of gauge hole for vacuum degree measurement

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KR1020140032214A KR20150109531A (en) 2014-03-19 2014-03-19 Liner of gauge hole for vacuum degree measurement

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101951883B1 (en) * 2018-11-08 2019-02-25 양락주 Shield assembly for inner walls protection of chamber

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101951883B1 (en) * 2018-11-08 2019-02-25 양락주 Shield assembly for inner walls protection of chamber

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