KR20150033233A - Cylindrical mold, apparatus and method for processing cylindrical mole - Google Patents

Abstract

The present invention relates to a cylindrical mold, an apparatus and a method for processing the cylindrical mold, more specifically, to a cylindrical mold, an apparatus and a method for processing the cylindrical mold, wherein cylindricity is improved since a rotary shaft is precisely matched in a manufacturing process such as a mirror surface process, etc. According to an aspect of the present invention, the apparatus for processing the cylindrical mold is provided in a cylinder shape, having a hollow hole formed inside, and processes the cylindrical mold where inclined planes, which are extended inward toward a central shaft from the external circumferential surface, are formed in end portions of both sides. The apparatus for processing the cylindrical mold comprises: a rotary portion provided in a complementary cone shape on the inclined planes, combined with the cylindrical mold in order to make the central shaft of the cylindrical mold and the rotary shaft thereof matched by being inserted into the hollow hole, and rotating the cylindrical mold; and a polishing portion moving in the longitudinal direction of the cylindrical mold while being in contact with the external circumferential surface of the cylindrical mold.

Description

TECHNICAL FIELD [0001] The present invention relates to a cylindrical mold, a cylindrical mold processing apparatus,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cylindrical mold, a cylindrical mold processing apparatus and a cylindrical mold processing method, and more particularly, to a cylindrical mold, a cylindrical mold processing apparatus, And a mold processing method.

In general, a lithography process is mainly used to form a minute pattern in a semiconductor or a display field. However, such a lithography process has a limitation in realizing patterning in the nanometer scale, and is not suitable for forming an ultrafine pattern. In addition, since the complicated process of repeating exposure and development etching is required, It also has disadvantages in terms of environment because of the large amount of chemical pollutants generated during the process.

In recent years, imprint technology has attracted attention as a substitute for existing lithography processes. Imprint technology is a technology that performs patterning through a simple method of pressing a mold with a fine pattern formed on a substrate to a substrate. It can transfer a pattern at low cost and is suitable for mass production, and is expected to replace lithography process in the future . Among them, the roll imprint method is a technique of transferring a pattern onto a base material by using a cylindrical mold. Since there is no joint in the master roll, it is easy to ensure uniformity of patterns when a large area is applied. Therefore, it is widely applied in the field of display industry in recent years.

However, in spite of these advantages of the roll imprinting process, it is difficult to make a cylindrical mold, which is indispensable for the process, and it is a problem in commercialization. Particularly, in order to realize ultra-precise patterning of a nano unit with a cylindrical metal mold, it is required to mirror-surface the surface of a cylindrical metal mold. However, in order to obtain a desired surface roughness, not only the degree of difficulty of the process increases, but also the manufacturing cost is increased.

An object of the present invention is to provide a cylindrical mold which is mirror-finished with high surface roughness, and an apparatus and a method for manufacturing such a cylindrical mold.

It is to be understood that the present invention is not limited to the above-described embodiments and that various changes and modifications may be made without departing from the spirit and scope of the present invention as defined by the following claims .

According to one aspect of the present invention, there is provided a cylindrical metal mold processing apparatus provided with a cylindrical hole having a hollow hole therein and having sloped surfaces extending inward from the outer circumferential surface toward the central axis at both side end portions, A rotating part provided in a complementary conical shape and coupled to the cylindrical metal so that the center axis of the cylindrical metal is coincident with the rotation axis of the cylindrical metal mold; And a polishing unit moving along the longitudinal direction of the cylindrical metal in a state of being in contact with the outer circumferential surface of the cylindrical metal mold.

According to another aspect of the present invention, there is provided a cylindrical mold processing method for processing a cylindrical mold provided in a cylindrical shape having a hollow hole formed therein and provided with sloped surfaces extending inward toward the central axis on the outer peripheral surface at both side ends, A rotary head provided in a complementary conical shape is inserted into the hollow hole to be coupled with the cylindrical mold so that the central axis of the cylindrical metal and the rotation axis thereof coincide with each other; Rotating the cylindrical mold by the rotating head; And polishing the outer circumferential surface of the cylindrical metal by bringing the polishing pad into contact with the outer circumferential surface of the rotating cylindrical metal.

According to another aspect of the present invention, there is provided a cylindrical metal mold having a hollow hole having a length shorter than the entire length, the outer circumferential surface being formed along an outer diameter of the entire diameter of the cylindrical metal mold; An inner circumferential surface formed along an inner diameter which is a diameter of the hollow hole; And an inclined surface extending from the outer circumferential surface to the inner circumferential surface in the inner direction of the cylindrical metal mold at both side end portions thereof, the inclined surface of which extends toward the central axis of the cylindrical metal mold.

It is to be understood that the solution of the problem of the present invention is not limited to the above-mentioned solutions, and the solutions which are not mentioned can be clearly understood by those skilled in the art to which the present invention belongs It will be possible.

According to the present invention, a cylindrical mold with improved surface roughness can be produced by a relatively simple surface treatment process.

According to the present invention, since the process of adjusting the rotation axis of the cylindrical metal mold is omitted in the surface treatment process, the time and cost required for the process can be reduced.

The effects of the present invention are not limited to the above-mentioned effects, and the effects not mentioned can be clearly understood by those skilled in the art from the present specification and the accompanying drawings.

1 is a perspective view of a cylindrical mold according to an embodiment of the present invention.
2 is a side view of a cylindrical mold according to an embodiment of the present invention.
3 and 4 are side views of a cylindrical mold processing apparatus according to another embodiment of the present invention.
5 is a top view of a cylindrical mold processing apparatus according to another embodiment of the present invention.
FIG. 6 is a view of a coupling portion of a cylindrical die processing apparatus according to another embodiment of the present invention. FIG.
7 is an overall flowchart of a cylindrical mold processing method according to another embodiment of the present invention.
8 and 9 are views showing a plating process in a cylindrical mold processing method according to another embodiment of the present invention.
10 is a table of process conditions of a lapping process during a surface treatment process in a method of treating a cylindrical metal mold according to another embodiment of the present invention.
11 is a table of process conditions of a polishing process during a surface treatment process in a cylindrical metal mold processing method according to another embodiment of the present invention.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to be illustrative of the present invention and not to limit the scope of the invention. Should be interpreted to include modifications or variations that do not depart from the spirit of the invention.

Although the terms used in the present invention have been selected in consideration of the functions of the present invention, they are generally used in general terms. However, the present invention is not limited to the intention of the person skilled in the art to which the present invention belongs . However, if a specific term is defined as an arbitrary meaning, the meaning of the term will be described separately. Accordingly, the terms used herein should be interpreted based on the actual meaning of the term rather than on the name of the term, and on the content throughout the description.

The drawings attached hereto are intended to illustrate the present invention easily, and the shapes shown in the drawings may be exaggerated and displayed as necessary in order to facilitate understanding of the present invention, and thus the present invention is not limited to the drawings.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a detailed description of known configurations or functions related to the present invention will be omitted when it is determined that the gist of the present invention may be obscured.

According to one aspect of the present invention, there is provided a cylindrical metal mold processing apparatus provided with a cylindrical hole having a hollow hole therein and having sloped surfaces extending inward from the outer circumferential surface toward the central axis at both side end portions, A rotating part provided in a complementary conical shape and coupled to the cylindrical metal so that the center axis of the cylindrical metal is coincident with the rotation axis of the cylindrical metal mold; And a polishing unit moving along the longitudinal direction of the cylindrical metal in a state of being in contact with the outer circumferential surface of the cylindrical metal mold.

The rotary unit may include a rotary head provided in the shape of a cone, a shaft connected to the rotary head, and a rotary shaft for rotating the rotary head through the shaft or reciprocating the shaft, And a driver which is inserted into the hole.

The rotary head may be provided with a suction hole for generating a negative pressure on the surface of the conical shape to fixedly connect the inclined surface of the cylindrical metal and the rotary head.

The rotary head may be coupled to one end of the cylindrical metal mold, and the cylindrical metal mold processing apparatus may further include a fixed head provided in the conical shape and coupled with the other end of the cylindrical metal mold.

In addition, the rotary head may be provided to be coupled to both side ends of the cylindrical metal mold, respectively.

The polishing unit may include a rail extending in a longitudinal direction of the cylindrical metal at a position spaced apart from the cylindrical metal mold, a body installed on the rail and moving along the rail, a piston moving from the body toward the cylindrical mold, And a polishing pad contacting the outer circumferential surface of the cylindrical mold according to the movement of the piston.

The polishing pad may also include an alumina lapping film or a diamond suspension.

And a spray nozzle for spraying a workpiece onto an outer circumferential surface of the cylindrical metal mold.

According to another aspect of the present invention, there is provided a cylindrical mold processing method for processing a cylindrical mold provided in a cylindrical shape having a hollow hole formed therein and provided with sloped surfaces extending inward toward the central axis on the outer peripheral surface at both side ends, A rotary head provided in a complementary conical shape is inserted into the hollow hole to be coupled with the cylindrical mold so that the central axis of the cylindrical metal and the rotation axis thereof coincide with each other; Rotating the cylindrical mold by the rotating head; And polishing the outer circumferential surface of the cylindrical metal by bringing the polishing pad into contact with the outer circumferential surface of the rotating cylindrical metal.

And a suction hole formed on a surface of the rotary head generates a negative pressure so that the rotary head and the inclined surface of the cylindrical metal are fixedly coupled to each other.

The polishing pad may be reciprocated in the longitudinal direction of the cylindrical mold so that the entire outer circumferential surface of the cylindrical mold is polished.

And spraying a workpiece onto an outer circumferential surface of the cylindrical metal mold.

And a step of plating the surface of the cylindrical metal mold by immersing the cylindrical metal mold in a plating water tank containing the plating liquid.

The plating step may include the steps of: placing the cylindrical metal mold on a support provided at a lower portion of the plating water tank and having a conical shape; and supporting the cylindrical metal mold according to at least one of a rotational motion and an elevating motion, A moving step.

According to another aspect of the present invention, there is provided a cylindrical metal mold having a hollow hole having a length shorter than the entire length, the outer circumferential surface being formed along an outer diameter of the entire diameter of the cylindrical metal mold; An inner circumferential surface formed along an inner diameter which is a diameter of the hollow hole; And an inclined surface extending from the outer circumferential surface to the inner circumferential surface in the inner direction of the cylindrical metal mold at both side end portions thereof, the inclined surface of which extends toward the central axis of the cylindrical metal mold.

The cylindrical metal mold may be made of aluminum or aluminum alloy.

Hereinafter, a cylindrical metal mold 100 according to an embodiment of the present invention will be described.

FIG. 1 is a perspective view of a cylindrical metal mold 100 according to an embodiment of the present invention, and FIG. 2 is a side view of a cylindrical metal mold 100 according to an embodiment of the present invention.

In the present invention, the cylindrical mold 100 may be used as a master roll used to transfer a pattern onto a substrate such as a semiconductor or a display by a roll imprinting method. Specifically, the cylindrical mold 100 is subjected to a plating process and a surface treatment process by a cylindrical mold processing method described later, and a pattern to be transferred is formed on the surface thereof, so that the cylindrical mold 100 can be used as a master roll.

1 and 2, the cylindrical metal mold 100 may have a cylindrical shape. Here, the cylindrical metal mold 100 may have a standard of an outer diameter of about 100 to 300 mm and a length of about 300 to 1200 mm.

In addition, as shown in FIGS. 1 and 2, the hollow metal mold 100 may have a hollow hole 140 formed therein. The hollow hole 140 may be a cylinder whose length is shorter than the entire length of the cylindrical metal mold 100. As the hollow hole 140 is formed, the cylindrical metal mold 100 is formed along the outer circumferential surface 110 formed along the outer diameter corresponding to the entire diameter of the cylindrical metal mold 100, and the inner diameter which is the diameter of the hollow hole 140 And may have an inner peripheral surface 120. The end portion of the cylindrical metal mold 100 may have an inclined surface 130 extending obliquely toward the inside of the cylindrical metal mold 100 in the longitudinal direction of the cylindrical metal mold 100 from the outer circumferential surface 110 toward the inner circumferential surface 120 .

Here, the outer diameter, which is the total diameter of the cylindrical metal mold 100, and the inner diameter, which is the diameter of the hollow hole 140, can be concentric with each other. Thus, the direction in which the inclined surface 130 extends is the same as the center axis of the cylindrical metal mold 100 Direction. A rotating head 1360 to be described later is inserted into the hollow hole 140 of the cylindrical metal mold 100 and coupled with the cylindrical metal mold 100 according to the shape of the inclined surface 130, The center axes of the mold 100 can be made to coincide with each other.

On the other hand, as the material of the cylindrical metal mold 100, a metal material can be used. For example, the cylindrical metal mold 100 may be made of aluminum (Al) or an alloy thereof. In particular, as the material of the cylindrical metal mold 100, an Al 70 series (for example, Al 7075 °) which is an aluminum alloy may be used. Since Al 7075 ° is light and has a high non- It has the advantage of using a master roller. Al 7075 ° has the advantage that the mirror surface treatment of the surface is relatively easy. AL 6061-0, AL 6061-T4, AL 6061-T6, AL 7050-0, and AL 7050-T6 may be used as the aluminum alloy.

Although the cylindrical metal mold 100 has been described above, the shape, size, and material of the cylindrical metal mold 100 are not necessarily limited to the examples described above.

Hereinafter, a cylindrical die processing apparatus 1000 according to another embodiment of the present invention will be described.

In the present invention, the cylindrical mold processing apparatus 1000 can mirror-surface the surface of the cylindrical mold 100 through a surface treatment process. The cylindrical mold 100, which is mirror-finished and has improved surface roughness, can be used as a master roll used for roll imprinting.

FIGS. 3 and 4 are side views of a cylindrical mold processing apparatus 1000 according to another embodiment of the present invention, and FIG. 5 is a top view of a cylindrical mold processing apparatus 1000 according to another embodiment of the present invention.

3 to 5, a cylindrical mold processing apparatus 1000 may include a body 1100, a supporting unit 1200, a rotating unit 1300, a fixing unit 1400, and a polishing unit 1500.

The body 1100 forms a frame of the cylindrical mold processing apparatus 1000. Other configurations of the cylindrical mold processing apparatus 1000 may be installed in the body 1100. [

The supporting portion 1200 can support the cylindrical metal mold 100. The support portion 1200 may include a conveyor 1220 and a support 1240.

The cylindrical mold 100 may be transferred from the outside and loaded on the support base 1240. The support base 1240 may be provided in a hemispherical shape in which the upper surface thereof is complementary to the outer peripheral surface 110 of the cylindrical metal mold 100 to stably support the cylindrical metal mold 100.

The conveyor 1220 can transfer the cylindrical metal mold 100 between the preparation position and the correct position. The cylindrical mold 100 transferred from the outside is placed on the support base 1240 as shown in FIG. The conveyor 1220 can transfer the cylindrical mold 100 at the preparation position to the correct position for the surface treatment process. For example, the conveyor 1220 lifts the support 1240 to move the cylindrical mold 100 from the prepared position to the correct position, as shown in FIG. When the cylindrical mold 100 placed in the correct position is engaged with the rotary head 1360 and the fixed head 1420, the conveyor 1220 descends to smoothly perform the surface treatment process. When the surface treatment process for the cylindrical metal mold 100 is completed, the conveyor 1220 can raise the support table 1240 again so that the cylindrical metal mold 100 is seated on the support table 1240.

The rotary part 1300 can rotate the cylindrical metal mold 100. [ The cylindrical mold 100 may be surface-treated as it rotates while being in contact with the polishing unit 1500 to be described later. The rotating portion 1300 may include a driver 1320, a shaft 1340, and a rotating head 1360. The driver 1320 may linearly move the shaft 1340 or rotate the shaft 1340. The shaft 1340 linearly moves by the driving force received from the driver 1320 so that the rotary head 1360 is inserted into the hollow hole 140 of the cylindrical metal mold 100 so that the rotary head 1360 is engaged with the cylindrical metal mold 100 Or rotate by the driving force so as to rotate the rotating head 1360.

The rotary head 1360 may be inserted into the hollow hole 140 of the cylindrical metal mold 100 and coupled with the cylindrical metal mold 100. In addition, the rotating head 1360 can rotate the cylindrical metal mold 100 by receiving a rotational force through the shaft 1340 in a state of being coupled with the cylindrical metal mold 100.

FIG. 6 is a view of a coupling portion of a cylindrical mold processing apparatus 1000 according to another embodiment of the present invention.

Referring to FIG. 6, the rotating head 1360 may be provided with a conical surface facing the cylindrical metal mold 100. The central axis of the conical shape coincides with the rotation axis of the rotary head 1360. The conical shape of the rotary head 1360 is complementary to the inclined surface 130 of the cylindrical metal mold 100. When the rotary head 1360 moves in the direction of the cylindrical metal mold 100 by the shaft 1340, the rotary head 1360 is inserted into the hollow hole 140 and the inclined surface 130 of the cylindrical metal mold 100 and the rotary head 1360, The cylindrical mold 100 and the rotating head 1360 are brought into contact with each other so that the rotational axis of the rotating head 1360 and the central axis of the cylindrical mold 100 are exactly aligned with each other do. Accordingly, when the rotating head 1360 rotates, the cylindrical metal mold 100 can be rotated exactly at its center axis. Since this process can be performed without a separate calibration process, the process is simple and the process time can be shortened.

The rotation unit 1300 may further include a suction hole 1370 and a vacuum pump 1380. The suction hole 1370 may be provided on at least one conical surface of the rotating head 1360 as shown in FIG. The vacuum pump 1380 can apply a negative pressure to the suction hole 1370. By this negative pressure, the conical surface and the inclined surface 130 of the cylindrical metal mold 100 can be attracted to each other, and the rotational force of the rotary head 1360 can be stably transmitted to the cylindrical metal mold 100.

The fixing part 1400 can fix the cylindrical metal mold 100 in the correct position while the cylindrical metal mold 100 is being processed. The fixing portion 1400 may be composed of a fixed head 1420. The fixed head 1420 may be provided in the same or similar form as the rotating head 1360. The fixing head 1420 can be coupled to the cylindrical metal mold 100 in a state of being inserted into the hollow hole 140 of the cylindrical metal mold 100 and the center axis of the fixed head 1420 and the center axis of the cylindrical metal mold 100 The center axes can be exactly matched.

3 and 4, the fixing part 1400 is shown as a fixed type fixing head 1420. However, the fixing part 1400 may be provided in a form similar to the rotation part 1300 have. For example, the fixation portion 1400 may have a configuration similar to the shaft 1340 or the driver 1320 of the rotation portion 1300, which can linearly move and / or rotate the fixation head 1420 . Similarly, the fixing portion 1400 may further include a suction hole 1370 and a vacuum pump 1380. [

The polishing unit 1500 can polish the surface of the cylindrical metal mold 100 rotated by the rotating unit 1300.

The polishing unit 1500 can polish the surface of the cylindrical metal mold 100. The polishing unit 1500 may include a grinder 1520 and a rail 1540. [ The rail 1540 may be spaced apart from the cylindrical metal mold 100 and extend parallel to the longitudinal direction of the cylindrical metal mold 100. The grinder 1520 may be installed on the rail 1540. Specifically, the polishing machine 1520 may include a polishing machine body 1522, a piston 1524, and a polishing head 1526. The body 1522 is installed on the rail 1540 and is movable along the rail 1540 in the longitudinal direction of the cylindrical mold 100. The piston 1524 may extend from the body 1522 and move (e.g., move up and down) in the direction of the cylindrical mold 100. The polishing head 1526 is installed at the end of the piston 1524 and can be spaced or brought into contact with the cylindrical mold 100 as the piston 1524 moves. A polishing surface 1526a may be formed on a surface (for example, a lower surface) of the polishing head 1526 facing the cylindrical metal mold 100. [ The polishing surface 1526a can contact the outer peripheral surface 110 of the cylindrical metal mold 100 as the piston 1524 moves. Further, the piston 1524 can pressurize the polishing surface 1526a, which is in contact with the outer circumferential surface 110 of the cylindrical metal mold 100, with an appropriate pressure so that the polishing can be performed smoothly.

Meanwhile, in the present invention, the surface treatment process may be performed by a lapping process and a polishing process, wherein the polishing surface 1526a may be provided with a polishing pad suitable thereto. An example of a polishing pad is an alumina lapping film or a diamond suspension. Specifically, the alumina lapping film may have a particle size of 1 탆 to 30 탆. The diamond suspension may have a grain size of 0.05 to 3 탆.

Hereinafter, a cylindrical mold processing method according to another embodiment of the present invention will be described.

The cylindrical mold processing method according to an embodiment of the present invention will be described by using the cylindrical mold processing apparatus 1000 described above to process the cylindrical mold 100 described above. However, since this is merely for convenience of explanation, the cylindrical mold processing method of the present invention is not limited to the cylindrical mold 100 or the cylindrical mold processing apparatus 1000 described above.

In addition, since each step described later in the cylindrical mold processing method is not essential, the cylindrical mold processing method can be performed by omitting some of the steps described below, and each of the steps described below must be performed only in the order described It is also possible that the steps described earlier may be performed later or vice versa, and some of the steps may be performed simultaneously.

7 is an overall flowchart of a cylindrical mold processing method according to another embodiment of the present invention.

Referring to FIG. 7, a method of processing a cylindrical metal mold according to another embodiment of the present invention includes a step S110 of plating a cylindrical metal mold 100, a step S120 of surface-treating the cylindrical metal mold 100, (S130) of drying the cylindrical mold 100 (S140) and drying the cylindrical mold 100 (S140). Hereinafter, each of the above-described steps will be described.

In the plating process, the cylindrical metal mold 100 can be plated (S110). In the plating process, a plating layer can be formed on the surface of the cylindrical metal mold 100. [ Here, the plating layer may be a nickel plated layer. For example, the cylindrical metal mold 100 made of aluminum or an alloy thereof may be plated with a nickel (Ni) layer having a phosphorus (P) content of 8 to 12%.

8 to 9 are views showing a plating process in a cylindrical mold processing method according to another embodiment of the present invention. 8 and 9 show a plating water tank 2000 for plating the cylindrical metal mold 100. As shown in FIG.

According to one example, the plating bath 2000 can include a body 2100, an inlet 2120, an outlet 2140, a hanging 2200 and a stir portion 2300a as shown in FIG. 8 have. The body 2100 is provided in the shape of a water tank, and the plating liquid can be received in the body 2100. The inlet 2120 may be installed on one side of the body 2100 and may be connected to the plating liquid reservoir R through pipelines and valves. When the valve is opened, the plating liquid can be introduced into the body 2100 through the inlet 2120 from the plating liquid reservoir R through the pipeline. The discharge port 2140 may be installed on the lower side or the lower surface of the side wall of the body 2100, and may be connected to the outside through the pipeline and the valve. When the valve is opened, the solution inside the body 2100 can be discharged to the outside through the pipeline and the valve. At this time, since the discharged plating liquid contains impurities, it can be connected to a device for regenerating the plating liquid. In order to prevent environmental pollution, the discharged solution may be treated separately.

The cylindrical metal mold 100 may be engaged with the hangers 2200. The hangers 2200 can support the cylindrical metal mold 100 so that the cylindrical metal mold 100 is immersed in the plating liquid contained in the body 2100. The steamer 2300a can stir the plating liquid in the plating water tank 2000. [ Accordingly, plating of the cylindrical metal mold 100 can be performed more quickly. Further, as the plating liquid is agitated, the plating liquid can be applied to the outer peripheral surface 110 of the cylindrical metal mold 100 more uniformly.

According to another example, the plating water tank 2000 may have a motion part 2300b instead of the hangers 2200 and the steamer part 2300a, unlike the plating water tank 2000 of FIG. 8, as shown in FIG. Specifically, the motion section 2300b may include a motion motor 2320b, a motion axis 2340b, and a motion head 2360b. The configuration of the motion section 2300b may be provided in the same or similar manner as the rotation section 1300 of the cylindrical mold processing apparatus 1000. [ For example, the motion head 2360b may be inserted into the hollow hole 140 of the cylindrical metal mold 100 as a conical shape to support the cylindrical metal mold 100 in the plating water tank 2000. The motion motor 2320b can generate a driving force to rotate and / or lift the motion shaft 2340b. Accordingly, the cylindrical metal mold 100 seated on the motion head 2360b moves up and down in the water tank, It can rotate. Thus, the plating liquid can be rapidly plated or evenly applied to the cylindrical metal mold 100. [

In the plating process, the plating liquid is supplied to the plating water tank 2000, the plating liquid is supplied to the plating liquid, and the plating liquid is stirred by the steamer 2300a or the motion unit 2300b, So that the cylindrical metal mold 100 can be plated. For example, the outer peripheral surface 110 of the cylindrical metal mold 100 can be subjected to electroless nickel plating treatment using the above-described nickel plating liquid as a plating liquid. When the plating is completed, the cylindrical metal mold 100 can be heat-treated by discharging the plating liquid or removing the cylindrical metal mold 100 from the water tank. The surface hardness of the cylindrical metal mold 100 after plating and heat treatment may be 900 to 950 Hv.

Of course, it is needless to say that the plating of the cylindrical metal mold 100 is not necessarily limited to the nickel plating, and the surface hardness can be appropriately changed to a desired value.

When the plating is completed, the cylindrical mold 100 can be surface-treated (S120).

The surface treatment process can be performed using the above-described cylindrical mold processing apparatus 1000. [ The cylindrical mold 100 is first transferred to the cylindrical mold processing apparatus 1000 from the outside. The transferred cylindrical metal mold 100 may be seated on the support base 1240 and placed at a preparation position. The conveyor 1220 can move the support base 1240 to move the cylindrical metal mold 100 to the correct position. When the cylindrical mold 100 is placed in the correct position, the rotary head 1360 can move and be coupled to one end of the cylindrical mold 100. The other end of the cylindrical metal mold 100 may be fixed to the fixed head 1420 of the fixing portion 1400. At this time, the fixing portion 1400 is fixed, and as the rotary head 1360 moves, the cylindrical metal mold 100 is moved so that the fixing head 1420 can be inserted into the hollow hole 140. The fixing portion 1400 can directly move the fixing head 1420 and insert it into the hollow hole 140 of the cylindrical mold 100. [ When the rotary head 1360 and the fixed head 1420 are coupled to the cylindrical mold 100 at the correct position, the conveyor 1220 can move the support stand 1240 to the ready position.

The negative pressure is generated by the vacuum pump 1380 and a negative pressure is applied to the suction hole so that the inclined surface 130 of the cylindrical mold 100 and the conical surface of the rotary head 1360 are fixed to each other. In this state, the rotation axis of the rotary head 1360, the center axis of the fixed head 1420, and the central axis of the cylindrical metal mold 100 all coincide with each other. Now, the driver 1320 generates a rotational force, which is transmitted to the rotating head 1360 through the shaft 1340, which causes the cylindrical metal mold 100 to rotate. The fixing unit 1400 is provided in a similar configuration to the rotation unit 1300 so that the fixing head 1420 rotates in the same manner as the rotation head 1360 so that the cylindrical mold 100 receives a rotational force only at one end of the rotation unit 1300 It is also possible to rotate by receiving the rotational force from both ends of the rotation part 1300 and the fixing part 1400.

The polishing section 1500 causes the piston 1524 to extend from the body 1522 so that the polishing head 1526 contacts the outer circumferential surface 110 of the cylindrical mold 100 at a predetermined pressure. Thus, the polishing surface 1526a can polish the outer peripheral surface 110 of the cylindrical metal mold 100. At this time, the polishing machine 1520 moves in the longitudinal direction of the cylindrical metal mold 100, so that the entire outer peripheral surfaces 110 of the cylindrical metal mold 100 can be uniformly polished.

When the outer circumferential surface 110 of the cylindrical metal mold 100 is sufficiently polished, the polishing head 1526 is separated from the cylindrical metal mold 100 and the rotating portion 1300 stops rotating. The support base 1240 is then transported to a predetermined position and the rotary head 1360 and the stationary head 1420 are separated from the cylindrical metal mold 100 so that the cylindrical metal mold 100 is seated on the support base 1240.

This surface treatment process can be repeatedly performed by changing the polishing pad. The surface of the cylindrical mold 100 can be subjected to the mirror-finishing process by finely treating the surface first by roughly performing the surface treatment first using the polishing pad having a large particle size and by gradually using the polishing pad having the small particle size.

Overall, this surface treatment process may consist of a lapping process S122 to roughly process the surface and a polishing process S124 to process the surface more densely following the lapping process.

10 is a table of process conditions of a lapping process during a surface treatment process in a method of treating a cylindrical metal mold according to another embodiment of the present invention.

The lapping process may be performed according to the process conditions shown in Fig. The lapping process may be performed by repeating the above-described surface treatment process repeatedly several times. Specifically, a plurality of alumina lapping films (for example, 5 to 7 types) having a size of 1 to 30 탆 in particle size can be used as a polishing pad for the cylindrical metal mold 100 provided with aluminum or its alloy, The size can be repeated in order from the largest to the smallest. More specifically, a lapping film having a particle size of 30 占 퐉, 15 占 퐉, 9 占 퐉, 5 占 퐉, 3 占 퐉 and 1 占 퐉 may be used, and the contact pressure between the polishing head 1526 and the outer circumferential surface 110 is 0.22 MPa Lt; / RTI > In this case, the feed rate of the polishing machine 1520 may be 90 m / min to 140 m / min. Meanwhile, the rotational speed of the cylindrical metal mold 100 may be 100 rpm to 300 rpm. Although not shown in the drawing, a feed nozzle (not shown) may be further installed in the feeder 1220. The injection nozzle can inject DI water, a work solution in which isopropyl alcohol (IPA: Iso-Propyl alcohol) and a lubricant are combined, onto the surface of the cylindrical metal mold 100. The ratio of pure solution: IPA: lubricant can be 5: 4: 1, respectively, and the ratio can be appropriately added or subtracted. The injection speed of the injection nozzle may be about 20 ml / min. The surface thickness of the cylindrical metal 100 to be polished by this lapping process can be limited to 50 mu m or less.

After the lapping is completed, the subsequent polishing process can be performed. 11 is a table of process conditions of a polishing process during a surface treatment process in a cylindrical metal mold processing method according to another embodiment of the present invention.

The polishing process may be performed according to the process conditions shown in FIG. The polishing process can also be repeated several times like a lapping process. For example, the polishing process may be performed by using polishing pads of several kinds (for example, three to five types) provided with a diamond suspension having a particle size of 0.05 탆 to 3 탆, . ≪ / RTI > Each process can be run for about 25-35 minutes. At this time, the feeding speed of the polishing machine 1520 is about 140 m / min, which is similar to the lapping process, and the rotating speed of the cylindrical metal mold 100 is about 100 rpm to 300 rpm. On the other hand, the particle size of the diamond suspension may be in the order of 3 μm, 1 μm, 0.5 μm, and 0.05 μm, and the dosage of the diamond suspension in each process may be about 10 ml / min. The depth of the polishing thickness can also be limited to 10 mu m.

For example, the surface roughness of the outer circumferential surface 110 of the aluminum cylindrical mold 100 having been subjected to the lapping and polishing may be 2 nm to 3 nm. At this time, the cylindrical degree can be adjusted to 15 탆 or less on average and the straightness can be adjusted to 10 탆 or less on average.

The cylindrical metal mold 100 having appropriate surface roughness and hardness through lapping and polishing as described above can be used as a master roll in a nano-roll imprint process because a fine pattern can be precisely formed on the surface thereof by patterning of nano units. However, since the above description is only an example of the present invention, the characteristics of the cylindrical metal mold 100 such as the kind of the polishing pad, the process time, the number of repetitions, the surface hardness of the cylindrical metal mold 100, It is not.

When the surface treatment of the cylindrical mold 100 is completed, the cylindrical mold 100 can be cleaned (S130). The cleaning may be performed by removing the residue remaining on the surface of the cylindrical metal mold 100 through IPA or pure water. When the cleaning is completed, the cylindrical metal mold 100 may be naturally dried or heated and dried (S140).

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments of the present invention described above can be implemented separately or in combination.

Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

100: cylindrical mold 110: outer peripheral surface
120: inner peripheral surface 130: inclined surface
140: hollow hole
1000: cylindrical die processing apparatus 1100: body
1200: Support part 1220: Feeder
1240: Support member 1300:
1320: driver 1340: shaft
1360: rotating head 1370: suction hole
1380: Vacuum pump 1400:
1420: Fixing head 1500: Polishing part
1520: Grinding machine 1522: Body
1524: piston 1526: polishing head
1526a: Polishing surface 1540: Rail
2000: plating bath 2100: body
2120: Inlet port 2140: Outlet port
2200: latch 2300a:
2320a: Steer motor 2340a: Steer shaft
2360a: propeller 2300b: motion part
2320b: Motion motor 2340b: Motion axis
2360b: Motion Head
R: plating solution reservoir

Claims (16)

1. A cylindrical die processing apparatus for processing a cylindrical die provided in a cylindrical shape having an inner hollow hole formed therein and having sloped surfaces extending inward from an outer peripheral surface toward a central axis at both side end portions,
A rotation part provided in a conical shape complementary to the inclined surface, coupled to the cylindrical mold so as to be aligned with the central axis of the cylindrical mold and inserted into the hollow hole, and to rotate the cylindrical mold; And
And a polishing unit moving along the longitudinal direction of the cylindrical metal in a state of being in contact with the outer circumferential surface of the cylindrical metal mold
Cylindrical mold processing device.
The method according to claim 1,
The rotary unit may include a rotary head provided in the shape of a cone, a shaft connected to the rotary head, and a rotary shaft for rotating the rotary head through the shaft or reciprocating the shaft, And a driver
Cylindrical mold processing device.
3. The method of claim 2,
The rotary head is provided with a suction hole for generating a negative pressure on the surface of the conical shape to fixedly engage the inclined surface of the cylindrical metal with the rotary head
Cylindrical mold processing device.
3. The method of claim 2,
Wherein the rotary head is engaged with one end of the cylindrical metal mold,
The cylindrical metal mold processing apparatus further includes a fixed head provided in the conical shape and coupled with the other end of the cylindrical metal mold
Cylindrical mold processing device.
3. The method of claim 2,
The rotary head is provided with two pieces to be respectively coupled to both side ends of the cylindrical metal mold
Cylindrical mold processing device.
The method according to claim 1,
The polishing unit includes:
A cylinder extending in a longitudinal direction of the cylindrical mold at a position spaced apart from the cylindrical mold, a body installed on the rail and moving along the rail, a piston moving from the body toward the cylindrical mold, And a polishing pad contacting the outer peripheral surface of the cylindrical metal mold
Cylindrical mold processing device.
The method according to claim 6,
The polishing pad may comprise an alumina lapping film or a diamond suspension,
Cylindrical mold processing device.
The method according to claim 1,
And a spray nozzle for spraying a workpiece onto an outer peripheral surface of the cylindrical metal mold
Cylindrical mold processing device.
There is provided a cylindrical mold processing method for processing a cylindrical mold which is provided in a cylindrical shape with a hollow hole formed therein and has slant surfaces extending inward toward the central axis on the outer peripheral surface at both side end portions,
A rotary head provided in a conical shape complementary to the inclined surface is inserted into the hollow hole to be coupled with the cylindrical mold so that the central axis of the cylindrical metal and the rotation axis thereof coincide with each other;
Rotating the cylindrical mold by the rotating head; And
Polishing the outer circumferential surface of the cylindrical metal by bringing the polishing pad into contact with the outer circumferential surface of the rotating cylindrical metal;
Method of treating a cylindrical mold.
10. The method of claim 9,
And a suction hole formed on a surface of the rotary head generates a negative pressure so that the rotary head and the inclined surface of the cylindrical metal are fixedly coupled to each other
Method of treating a cylindrical mold.
10. The method of claim 9,
And reciprocating the polishing pad in the longitudinal direction of the cylindrical mold so that the entire circumferential surface of the cylindrical mold is polished
Method of treating a cylindrical mold.
10. The method of claim 9,
And spraying a workpiece onto an outer circumferential surface of the cylindrical mold
Method of treating a cylindrical mold.
10. The method of claim 9,
And a step of plating the surface of the cylindrical metal mold by immersing the cylindrical metal mold in a plating water tank containing the plating liquid
Method of treating a cylindrical mold.
14. The method of claim 13,
Wherein the plating step comprises the steps of: placing the cylindrical metal mold on a support provided at a lower portion of the plating water tank and having a conical shape; and moving the cylindrical metal mold according to at least one of a rotational motion and an elevating motion Comprising:
Method of treating a cylindrical mold.
And a hollow hole having a length shorter than the entire length formed therein,
An outer circumferential surface formed along an outer diameter of the whole diameter of the cylindrical metal mold;
An inner circumferential surface formed along an inner diameter which is a diameter of the hollow hole; And
And an inclined surface extending from the outer circumferential surface to the inner circumferential surface in the inner direction of the cylindrical metal mold at both side ends thereof and extending at an inclination angle toward the central axis of the cylindrical metal mold
Cylindrical mold.
16. The method of claim 15,
The cylindrical metal mold may be made of any one of aluminum and an aluminum alloy
Cylindrical mold.

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