KR20140143589A - Roll to roll face up evaporator built in open-patterned mask for manufacturing of flexible WOLED and flexible OLED lighting thin film - Google Patents

Abstract

The present invention relates to a top-down roll to roll evaporator. According to the roll to roll evaporator of the present invention, it is easy to transport a thin film flexible substrate continuously by using a winding roller, an unwinding roller and a tension roller. A center of the evaporator is made to have a smoothly uplifted columnar shape by using an angle roller to adjust tension of the flexible substrate properly. It is easy to cool the flexible substrate by placing and transporting the flexible substrate on a metal belt plane which is continuously transported, as preventing sagging thereof. After pre-processing of the flexible substrate is performed using a UV lamp, it is easy to perform deposition coating downward using a number of top-down linear evaporation sources and top-down high temperature evaporation sources. And it is easy to form a pattern of an organic thin film and a metal thin film because of using a film type mask, and thus mass production of a flexible OLED thin film for a WOLED for a flexible OLED light or a flexible OLED TV is possible.

Description

Technical Field [0001] The present invention relates to a roll-to-roll evaporator for manufacturing a flexible WOLED display and a flexible OLED light-

The present invention relates to a top-down roll-to-roll evaporator for the production of organic thin films and metal thin films of flexible OLED (Organic Lighting Emission Display) and flexible WOLED (White Organic Lighting Emission Display) display devices. More particularly, the present invention relates to a method for drastically improving the productivity of manufacturing an organic thin film and a metal thin film of a flexible substrate and reducing the cost of the production equipment, And a top-down roll-to-roll deposition apparatus for high-speed production of flexible thin film for flexible OLED lighting elements and flexible WOLED devices, in which a pre-treatment and a deposition process are continuously completed in a high vacuum and the open mask of a flexible structure is reused and reused.

In a typical OLED lighting device, a transparent electrode thin film composed of ITO is formed on a glass substrate and has an auxiliary electrode structure. Then, an organic thin film and a metal electrode thin film (mainly, aluminum) are formed, a passivation thin film (SiN) is formed, and a lamination film layer is formed. Thereafter, a module process is performed to complete the OLED device. The AMOLED display device performs the TFT process instead of the ITO process. Especially, the deposition process of the organic thin film and the metal electrode thin film, which are key processes, is mainly performed in a high vacuum atmosphere. Therefore, a high vacuum deposition chamber is required. Since the thin film has many layers, the number of deposition chambers is large. The thin film is produced by a continuous process. For example, when the glass substrate is transferred between the chambers, the gate valve is opened. When the transfer of the glass substrate is completed, the gate valve is closed and the deposition process is performed.

In recent years, research and development using a flexible substrate or a flexible substrate instead of a glass substrate have been actively performed to improve the commercialization of OLED devices. In this case, the flexible substrate is rolled around a roller, installed in the equipment, and uses a roll rheol device that is deposited while being continuously transported. However, it is very difficult to fabricate a flexible organic device at once because the total number of processes is too large and the conditions of the process (eg, plasma, high vacuum deposition, silver paste printing) and atmosphere (eg, degree of vacuum and substrate temperature) are too different.

Currently, a flexible organic device is manufactured in the same manner as a process for manufacturing a glass substrate organic device by attaching a flexible substrate to a glass substrate. When the process is completed, a flexible substrate is separated from the glass substrate to produce a flexible device, do. In order to improve productivity of flexible organic devices, it is necessary to develop a roll-to-roll evaporator. However, a roll-to-roll evaporator succeeding in mass production of flexible OLED devices has not been developed yet.

Since the flexible substrate is very thin, it is difficult to maintain the shape of the flexible substrate, so continuous transfer is difficult and it is necessary to develop a technology capable of continuous transfer. Further, development of a vapor deposition apparatus in which the substrate is sagged easily when heat is applied due to temperature sensitivity, and sagging is prevented is required. Since the temperature of the substrate must be maintained at room temperature when the organic material and the metal material are evaporated and deposited on the substrate, a proper cooling apparatus for the substrate is required. The shape of the thin film of the organic thin film and the metal thin film is determined by using a mask. The patterned thin film is formed by covering the vapor deposition surface of the flexible substrate at a certain portion, which is called an open mask. Masking technology that can align with flexible substrate should be developed. The vacuum degree of the roll-to-roll evaporator using rollers should be kept constant and the process atmosphere should maintain a single degree of vacuum.

For continuous transfer of the flexible substrate, a winding roller and an unwinding roller are used, the direction of conveying the substrate is a direction roller, and the tension is solved by using a tension roller and an angle roller. The deposition surface of the flexible substrate is provided so that the roller is in contact with only the surface opposite to the deposition surface of the substrate so as not to come into contact with the surface of the roller. A sagging of the substrate is prevented, and a metal belt is formed so as to facilitate cooling of the substrate when the flexible substrate is transferred, and is simultaneously transferred to the flexible substrate. A cooling block for cooling the metal belt is separately constructed. A top down evaporation source is used to prevent sagging of the substrate. The film-type flexible mask is made of a metal foil and is used flexibly in the form of a roll so that a thin film pattern can be formed. A metal mask for recycling can be constructed for reuse of the mask and can be used continuously. The inside of the top-down roll-to-roll evaporator is kept at a high vacuum to maintain a constant process vacuum.

The use of the winding roller and the unwinding roller enables continuous transfer of the flexible substrate,

By using the direction roller, the tension roller and the sag prevention roller, the flexible substrate is transported, and the roller is not brought into contact with the deposition surface of the flexible substrate, so that the thin film is not damaged. The flexible substrate is prevented from sagging and the flexible substrate can be cooled Do. Since the flexible mask is built in and used continuously, pattern formation of the organic thin film and the metal thin film is possible.

Since UV lamps and high-intensity vacuum evaporation sources are used, both the pretreatment process and the deposition process are performed in a high vacuum state, so that a low-vacuum process such as plasma pretreatment is not required.

FIG. 1 is a schematic view of a roll-to-roll deposition apparatus for OLED thin film deposition using a bottom-up evaporation source
FIG. 2 is a conceptual diagram of an OLED thin film deposition roll-to-roll deposition apparatus using a top-down evaporation source
Figure 3 is a conceptual view of a roll-to-roll evaporator using angle rollers to raise the roll film
4 is a conceptual view of a roll-to-roll evaporator in which a film transfer metal belt is incorporated
Fig. 5 is a conceptual view of a roll-to-roll evaporator incorporating a flexible flexible open mask
Fig. 6 is a conceptual view of a roll-to-roll evaporator incorporating a flexible open mask for recycling
7 is a conceptual view of a flexible open mask
8 is a view showing the roll configuration of the roll-
9 is a view showing a configuration of a flexible substrate and a flexible mask attached thereto
10 is a view showing the construction of a three-chamber roll-to-roll evaporator using a lip gate valve
11 is a conceptual diagram showing a roll accumulator
12 is a conceptual view of a roll-to-roll evaporator in which a roll-
13 is a view showing a configuration of a flexible substrate and an open mask attached thereto
14 is a schematic view of a roll-to-roll evaporator for performing a high vacuum OLED deposition process and a low vacuum SiN passivation deposition process
15 is a view showing a roll-to-roll production equipment for producing a flexible OLED device
16 is a schematic view of a roll-to-roll evaporator using a low-temperature down-evaporation source and a high-temperature bottom-up evaporation source
17 is a conceptual diagram showing a configuration of a top-down linear evaporation source, a source shutter, a fixed shutter, and a transfer shutter.

FIG. 1 is a conceptual view of a roll-to-roll evaporator in which a thin film is deposited on the lower surface of the flexible film substrate 3 by using a bottom-up linear evaporation source 5 to evaporate upward. The winding roller 1 is located on the upper left side of the evaporator, the unwinding roller 2 is located on the upper right side, and the orientation of the substrate is determined using the orientation roller 4 to introduce the lower surface of the flexible substrate to the evaporation source do. (HIL, HTL, EML, ETL, etc.) are successively coated by using a plurality of bottom-up linear evaporation sources, and LiF, Al thin films, etc., which are electrode thin films, are vapor-deposited by using the bottom- . The problem is that the number of evaporation sources is used from 18 to 24, the exposure of the lower surface of the flexible substrate becomes very long, and the flexible substrate is sagged by the heat of the evaporation source.

In this case, the sag prevention roller can not be used. If the rotation speed of the roller is increased and the tension of the substrate is adjusted to prevent sagging, the very thin flexible substrate may be torn or stretched to damage the thin film.

In addition, when the sag prevention roller is used, the evaporation surface is reduced, and the deposited thin film touches the surface of the roller, so that particles adhere to the thin film or generate particles.

In order to prevent the flexible substrate from sagging, FIG. 2 shows the concept of a top-down roll-to-roll evaporator 10. The winding roller (11) and the unwinding roller (12) are located at the bottom of the chamber and prevent sagging of the flexible film substrate by using the sag prevention roller (18). At this time, the surface of the sag prevention roller comes into contact with the back side of the substrate where the thin film is not coated, so that no damage is given to the thin film. The direction of the flexible substrate is determined by using the direction roller 17. The process starts from the left side of the chamber, preprocessing of the substrate is carried out with the UV lamp 13, and a plurality of top-down linear evaporation sources 14 are arranged in a line to continuously perform deposition coating of the organic thin film. In addition, the deposition surface is defined for the pattern of the organic thin film. The flexible flexible open mask 16 having the hole of the deposition surface of the desired size is constructed as shown in FIG. 2 and used while rotating. After the deposition of the organic thin film is completed, the metal thin film is deposited on the top down using a top-down high-temperature evaporation source. In order to determine the pattern of the deposition surface, the film open mask 16 is constructed and rotated. That is, the film-type open mask can be used continuously by providing it in the high vacuum chamber 10. For reference, since the pattern of the organic thin film and the pattern of the metal thin film are different, different film-type open masks are used.

3 shows another view of a top-down roll-to-roll evaporator. In order to more easily adjust the tension of the flexible substrate, a plurality of angle rollers 20 are used to give different heights and angles A of the rollers, and the shape of the flexible substrate follows the shape of the circumference, Respectively.

In FIG. 4, the metal belt 30 is moved in the same manner as the conveying speed of the flexible substrate in order to smoothly transfer and prevent the flexible substrate. Since the flexible substrate is only as thin as 50 to 100 um, it is very difficult to keep the surface of the substrate flat during transfer of the substrate for continuous deposition. In order to improve the flatness of the substrate, the metal belt 30 is constructed so that the flexible substrate touches the surface of the metal belt and is conveyed. Thus, sagging of the flexible substrate is prevented and the flatness is further improved. Particularly, when the width of the substrate is increased to about 2 meters, the problem of flatness becomes very serious. In order to prevent the metal belt from being heated by an evaporation source or the like and to keep the temperature of the flexible substrate low, a cooling block 31 is formed inside the metal belt and a cooling water line 32 is formed inside the cooling block The cooling water is flowed to maintain the cooling. Since the metal belt is made of SUS or tantalum sheet, it is flexible, easy to cool, is prevented from sagging by using the sag prevention roller 33, maintains the shape by using the direction roller 34 and the angle roller, Thereby enabling the conveyor type rotary motion of the conveyor. In particular, if the cooling roller 35 for flowing cooling water is additionally provided inside the roller, the cooling of the metal belt can be achieved more effectively.

FIG. 5 shows the structure of a top-down roll-to-roll evaporator using the metal belt and the cooling block. Flexible open masks 40 and 41 are used.

FIG. 6 shows a top-down roll-to-roll evaporator using a roll-type mask instead of a rotary flexible open mask. The mask film roller A (107) is aligned with the flexible substrate for patterning of the metal thin film, and the mask film roller B (108) is aligned with the flexible substrate for pattern formation of the organic thin film. That is, the flexible substrate and the metal thin film mask are aligned first, and the organic thin film mask is aligned. After the UV lamp 112 process and a plurality of top-down linear evaporation sources 114 are used to deposit and coat the organic thin film, the organic thin film mask is wound and separated using the mask film roller C 109, After the metal thin film is deposited using the top-down high-temperature evaporation source 115, the mask for metal thin film is separated from the flexible substrate using the mask film roller D (110), and the deposition process is completed.

FIG. 7 shows a schematic view of a flexible flexible open mask 151 having a plurality of openings 152. The flexible open mask has a structure in which the top-down linear evaporating source 150 surrounds and rotates, but the shape is not limited.

Fig. 8 shows a configuration diagram for roller driving of the roll-to-roll evaporator. The EPC 210 is formed on the rewinding roll 211 so that the film is unwound from the unwinding roll and the EPC 210 is wound on the unwinding roll 200. [ An infrared sensor, which is wound on a rewinding roll and tilting to one side, measures the position of the edges of the film and prevents the film from escaping by allowing the EPC device to adjust the right and left positions of the film roll appropriately . Further, since the tension for pulling the film is changed in real time as the film is released from the unwinding roll, the dancer roll 202 is installed to keep the tension constant in real time. For the same reason, a dancer roll 209 is also installed near the rewinding roller. The expand rolls 203, 205, 206 and 208 function to spread the wrinkles on the transferred film substrate. The load cells 204 and 207 measure the tension transmitted to the film substrate and feed back to the rotating motor device of the unwinding and rewinding rolls to appropriately adjust the rotation speed of the rollers.

Metal belts 213 are configured and closed to be closed by belt rotors 214 and belt cooling rolls 215. EPCs 216 and 217 are installed on the belt rotors and belt cooling rolls to tilt . A plurality of guide rolls 218 and 219 are used to keep the metal belt up and rise toward the center upper side and the film substrate 212 is placed on the upper surface of the metal belt, The substrate is transported. The metal belt is easily cooled by the belt cooling roll to allow the film substrate to cool.

9 shows a configuration of a cathode mask film 251 and an OLED mask film 252 which are attached on a flexible substrate 250 on which ITO is formed. The mask films are in the form of open masks with openings at the center. That is, when the OLED deposition is completed, the open mask for the OLED thin film is peeled. When the cathode deposition is completed, the open mask film for the cathode thin film is filled and the open pattern deposition process is performed on the flexible substrate. For reference, the opening of the cathode is always formed larger than the opening of the OLED thin film.

10 shows a configuration in which the unwinding roll chamber 300, the rewinding roll chamber 301 and the deposition chamber 302 are connected by the lip gate valves 317 and 318. In the unwinding roll chamber, a flexible film substrate can be driven by an unwinding roll 303 and a guide roll 306. A metal belt 314 is wound around the belt driving roll 315 and the belt cooling The OLED open mask filling roll 311 and the cathode mask filling roll 312 are formed by a UV lamp 309, a top-down linear evaporation source 310 and a cathode evaporation source 313, When the deposition process is completed, each open mask is peeled off, and a flexible film substrate on which a pattern of the organic thin film and the cathode thin film is formed is wound on the rewinding roll 308. It is possible to close the Lip Gate Valve, break the vacuum in the unwinding roll chamber, replace the film roll with a new one, supply the film without breaking the high vacuum degree of the deposition chamber, The roll can also be replaced. However, when the film is supplied, there is a disadvantage that the deposition process must be stopped.

FIG. 11 shows the structure of a roll accumulator 400. In the upper part of the chamber, a plurality of cylindrical rolls 402 are connected to the roll fixing device 405 at regular intervals at the same height, and a plurality of cylindrical stones are formed at the same height at the lower part of the chamber. Is introduced by the guide roll 406 and the length of the film substrate is accumulated while the up-down roll 402 formed on the top is directed upward and the up-down roll 404 formed on the bottom is directed downward, And when the lower roll faces upward, the length of the film substrate is exhausted, so that the film can be accumulated and exhausted.

12, the unwinding roll chamber is connected to the roll accumulation chamber 400 by a rip gate valve, a roll accumulation chamber 401 is formed on the left and right of the deposition chamber, and a right- A roll-to-roll evaporator is shown. When the roll accumulation chamber is used, when a new film roll is supplied or a used film roll is exchanged, the deposition process is continuously performed without stopping the process of the deposition chamber, so that the productivity is improved. That is, the length of the substrate is sufficiently accumulated in the roll accumulation chamber 400, the lip gate valve 403 is closed, the high vacuum of the unwinding roll chamber is broken, the exhausted rollers are replaced with new ones, The gate valve is opened, and the film substrate can be continuously supplied.

13 shows the structures of the SiN open mask film 441, the cathode open mask film 442 and the OLED open mask film 443 which are attached on the flexible substrate 440 on which ITO is formed. The mask films are in the form of open masks with openings at the center. That is, when the OLED deposition is completed, the open mask for the OLED thin film is peeled. When the cathode deposition is completed, the open mask film for the cathode thin film is filled, and when the SiN passivation thin film process is completed, , And the open pattern deposition process is performed on the flexible substrate. For reference, the opening of the SiN open mask is always made larger than the opening of the open mask of the cathode.

FIG. 14 shows a configuration of a device capable of continuously processing by connecting a high-vacuum OLED deposition equipment 452 and a low-vacuum SiN deposition equipment 458. The unwinding roll chamber 450 is connected to the OLED evaporator 452 by a rip gate valve 451. A substrate transfer metal belt 467 is formed inside the OLED deposition apparatus and includes a top down linear evaporation source 461 and a high temperature evaporation source 463. The OLED open mask peeling roll 462 and the cathode open mask peeling roll 464 are formed. The vacuum degree of the OLED evaporator is high vacuum. Thereafter, three roll accumulation chambers 453, 455 and 457 are connected to the lip gate valves 454 and 456, followed by a SiN passivation deposition equipment 458 which is performed in a low vacuum process. The rewinding roll chamber 460 is then connected to the lip gate valve 459. Inside the SiN deposition chamber, a top-down PECVD in-line plasma source 465 is constructed and an SiN open mask peeling roll 466 is embedded. That is, the film subjected to the high vacuum fixation is accumulated in the roll accumulation chamber, and the lip gate valves 454 and 456 are opened and replaced by the high vacuum and the low vacuum, thereby performing the low vacuum process. So that the vacuum deposition process is continuously performed.

15 shows a roll-to-roll apparatus for producing a flexible OLED device. A roll accumulation chamber 502, an OLED deposition chamber 503, a roll accumulation chamber 504,506,508, an SiN passivation deposition chamber 509, a roll accumulation chamber 510, The roll-in chamber 515, the roll-accumulation chamber 516 and the rewinding roll chamber 518 are connected in an in-line manner so that the flexible substrate can be continuously supplied, continuous high vacuum deposition is possible, Continuous roll accumulation is possible, continuous vacuum degree substitution is possible, continuous low vacuum deposition is possible, continuous atmospheric pressure substitution is possible, continuous roll exchange is possible, and the productivity of the flexible OLED device is improved. Lamination rolls 523 are incorporated in the roll-in chamber, and the films are fixed to each other by cigarette rolls 524 and 525 and cured through UV lamps or IR lamps 526. [

The roll accumulation chamber 506 is capable of high vacuum and low vacuum displacement and the roll accumulation chamber 512 is capable of low vacuum and Purified N2 displacement, The winding roll chamber 518 is capable of atmospheric air replacement with PN2.

16 shows a hybrid roll-to-roll evaporator using an OLED top-down linear evaporation source and a bottom-up high temperature metal evaporation source together. The roll loading chamber 600 is provided with an unwinding roll 604, and has an infrared lamp 609, which causes the film to unwind while the film is unwound. The roll loading chamber 600 and the roll-to-roll deposition chamber 601 are connected to each other with a rib gate valve 603 interposed therebetween. A UV lamp 610 is provided on the top of the roll-to-roll deposition chamber to perform a pretreatment process of the substrate. A plurality of top-down linear evaporation sources 611 are arranged in a row to sequentially spray the organic material downward, and a plurality of organic thin films are sequentially deposited while the substrate is transferred. The film substrate is deflected into a " C " using guide rolls 606. A plurality of high-temperature down-evaporation sources 612 for the cathode thin film are installed to evaporate metal materials upward, and a cathode thin film is deposited. Once all of the organic material has been deposited, the mask is peeled off using a mask-filling roll 613, a metal material is deposited, and another mask-filling roll 614 is used. In order to support and cool the substrate during downward evaporation, a metal belt device 607 is provided at the bottom of the substrate, and a metal belt device 608 for cooling the substrate at the time of high-temperature evaporation is provided. That is, since the low-temperature evaporation source and the high-temperature evaporation source are installed separately from each other, there is an effect of isolating the low temperature and the high temperature, and the effect of shortening the length of the equipment is obtained. However, there is a disadvantage in that a plurality of metal rolls are used, but it is easy to control the tension of the substrate which is susceptible to temperature.

FIG. 17 shows a shutter apparatus for depositing an organic thin film using a plurality of top-down evaporation sources. An evaporation source shutter 701 is provided below the top-down linear evaporation source 700 to prevent contaminants and organic substances evaporated in the evaporation source from reaching the substrate. A stationary shutter device 702 having an opening 707 having an opening area of a predetermined area is provided under the evaporation source shutter so that the organic thin film is formed on the substrate only by a predetermined area. A transfer shutter 703 is provided below the fixing shutter so that the deposition of the organic thin film on the substrate can be turned on and off. The evaporation source shutter and the transporting shutter 703 can be transported from side to side.

1: winding roller 2: unwinding roller
3: Flexible film 4: Orientation roller
5: bottom-up linear evaporator 6: bottom-up high temperature evaporator
10: High vacuum chamber 11: Winding roller
12: Unwinding roller 13: UV lamp
14: top-down linear evaporator 15: top-down high temperature evaporator
16: film type open mask 17: direction roller
18: Anti-sag roller
20: Angular roller
30: metal belt 31: cooling block
32: cooling water line 33: sag prevention roller
34: direction roller 35: cooling water line
40: Flexible open mask for rotation 1 41: Flexible open mask for rotation 2
100: high vacuum chamber 101: metal thin film belt
102: roller 103: cooling block
104: unwinding roller 105: winding roller
106: roll film 107: mask film roller A
108: mask film roller B 109: mask film roller C
110: mask film roller D 111: tension roller
112: UV lamp 113: separation wall
114: top-down linear evaporation source 115: top-down high temperature evaporation source
116: auxiliary film roller 117: flexible open mask
150: top-down linear evaporation source 151: flexible open mask
152: opening
200: unwinding roll 201: edge position adjusting device (EPC)
202: Dancer Roll 203: Expand Roll
204: Load Cell 205: Expand Roll
206: Expand Roll 207: Load Cell
208: Expand Roll 209: Dancer Roll
210: EPC 211: rewinding roll
212: Film 213: Metal belt
214: Belt rotor 215: Belt cooling roll
216: EPC 217: EPC
218: guide roll 219: guide roll
250: ITO film substrate 251: cathode mask film
252: OLED mask film 253: opening
300: unwinding roll chamber 301: rewinding roll chamber
302: deposition chamber 303: unwinding roll
304: Film substrate 305: Infrared lamp
306: guide roll 307: guide roll
308: Rewinding roll 309: Ubei lamp
310: top-down linear evaporation source 311: OLED mask filling roll
312: Cathode mask filling roll 313: Cathode evaporation source
314: metal belt 315: belt drive roll
316: Belt cooling roll 317: Lip gate valve
318: Lip Gate Valve
400: roll accumulator chamber 401: roll accumulator chamber
402: Up-down guide roll 403: Lip gate valve
404: Up-down guide roll 405: Roll holder
406: guide roll
440: ITO film substrate 441: SiN open mask film
442: cathode open mask film 443: OLED open mask film
450: unwinding roll chamber 451: lip gate valve
452: OLED deposition chamber 453: Roll accumulation chamber
454: Lip gate valve 455: Roll accumulation chamber
456: Lip gate valve 457: Roll accumulation chamber
458: SiN passivation chamber 459: Lip gate valve
460: rewinding roll chamber 461: top-down linear evaporator source
462: OLED open mask filling roll 463: top-down high temperature evaporation source
464: cathode open mask peeling roll 465: top down PECVD source
466: SiN open mask peeling roll 467: metal belt
468: Metal belts
500: unwinding roll chamber 501: lip gate valve
502: Roll accumulation chamber 503: OLED deposition chamber
504: Roll accumulation chamber 505: Lip gate valve
506: Roll accumulation chamber 507: Lip gate valve
508 Roll accumulation chamber 509: SiN passivation chamber
510: Roll accumulation chamber 511: Lip gate valve
512: Roll accumulation chamber 513: Lip gate valve
514 Roll accumulation chamber 515 Roll-in chamber
516: Roll accumulation chamber 517: Lip gate valve
518: rewinding roll chamber 519: OLED open mask peeling roll
520: cathode open mask peeling roll 521: SiN downward linear plasma source
522: SiN open mask peeling roll 523: Lamination roll
524: Adhesive roll 525: Adhesive roll
526: UV (IR) lamp
600: roll loading chamber 601: roll to roll deposition chamber
602: Rolan Loading Chamber 603: Lip Gate Valve
604: Unwinding roll 605: Rewinding roll
606: guide roll 607: metal belt device
608: Metal belt device 609: Infrared lamp
610: UV lamp 611: OLED top-down linear evaporation source
612: Cassow bottom evaporation source 613: OLED mask peeling Roll
614: Metal mask peeling roll
700: OLED top-down linear evaporator 701: evaporator shutter
702: Fixing shutter 703: Feeding shutter
704: roll film 705: unwinding roll
706: Rewinding roll 707: Opening

Claims (29)

As a high vacuum evaporator, a flexible substrate is continuously transported by a winding roller, an unwinding roller, and sag prevention rollers, and a UV lamp and a plurality of low-order down-type linear evaporation sources for low temperature are arranged in a row on the flexible substrate, , And a plurality of down-type evaporation sources for high-temperature use are arranged to enable top-down evaporation deposition of the metal for electrodes. The flexible OLED thin film deposition roll-
, The flexible OLED thin film deposition roll-to-roll evaporator according to claim 2, wherein the film-type open mask is formed in a row for organic materials and metal materials.
The flexible OLED thin film deposition roll-to-roll evaporator according to claim 1, characterized in that it is configured to smoothly bend the flexible substrate using a plurality of angle rollers
The flexible OLED thin film evaporation roll-to-roll evaporator according to claim 1, wherein a flexible metal substrate, a directional roller, and a deflection prevention roller are configured to be transportable,
The flexible OLED thin film deposition roll-to-roll evaporator according to claim 4, wherein a cooling block is formed inside the metal belt and a cooling water line is formed in the cooling block.
The flexible OLED thin film evaporation roll-to-roll evaporator according to claim 4, wherein a cooling line is formed inside the roller for preventing sagging of the metal belt and the direction roller
The flexible OLED thin film evaporation roll-to-roll evaporator according to claim 2, wherein an aligning device is configured to improve the positional accuracy of the thin film pattern of the film-like open mask and the flexible substrate
The flexible OLED according to claim 2, characterized in that a winding mask roller for an organic thin film, an unwinding mask roller, a winding mask roller for a metal thin film and an unwinding mask roller are formed, and the flexible masks and the flexible substrate are precisely aligned. Thin Film Evaporation Roll-to-Roll Evaporator
9. The method according to claim 8, wherein after the flexible mask for the metal thin film is precisely attached to the flexible substrate, the flexible mask for the organic material is precisely adhered, and after the organic material deposition process is completed, The flexible OLED thin film deposition roll-to-roll evaporator
The flexible OLED thin film deposition roll-to-roll evaporator according to claim 1, wherein a partition wall is formed between the UV lamps, a partition wall is formed between the organic top-down evaporation sources, and a partition wall is formed between the metal water evaporation sources.
The flexible OLED thin film evaporation roll-to-roll evaporator according to claim 1, wherein the auxiliary film roller is constituted by winding and unwinding a film protecting the surface of the flexible substrate
An unwinding roll chamber is constituted by an unwinding roll, an edge position adjusting device, a dancer roll, an expand roll, and a load cell roll, and a metal belt, a cylindrical belt rotating roll device, a cylindrical belt cooling roll device, Characterized in that the rewinding roll chamber is constituted by the constitution of a rewinding roll, an edge position adjusting device, a dancer roll, an expand roll, and a load cell roll, and the flexible OLED thin film deposition roll-
An edge position adjusting device is provided on the unwinding roll and the rewinding roll, and an infrared ray sensor for film edge measurement is provided on both sides of the film roll to prevent a tilting phenomenon which is shifted to one side while the film is fed Flexible OLED Thin Film Evaporation Roll-to-Roll Evaporator
[Claim 12] The flexible OLED thin film evaporation roll-to-roll evaporator according to claim 12, wherein an edge position adjusting device is provided in the cylindrical belt rotating roll device and the cylindrical belt cooling roll device to prevent a tilting phenomenon of the metal belt
The flexible OLED thin film deposition roll-to-roll evaporator according to claim 12, wherein the signal of the load cell feeds back to the rotation motor device of the unwinding roll and the rewinding roll to maintain a constant tension of the substrate.
The flexible OLED thin film deposition roll-to-roll evaporator according to claim 12, wherein the signal of the load cell feeds back to the belt rotation motor of the metal belt and the cooling belt rotation motor device to maintain a constant tension of the metal belt
The flexible OLED thin film evaporation roll-to-roll evaporator according to claim 12, characterized in that the cooling of the metal belt is carried out by contact of the belt cooling roll, and the film substrate which has contacted the upper surface of the metal belt is cooled.
The open mask for the OLED thin film and the open masks for the cathode thin film are attached to the flexible substrate. When the OLED process is completed, the open mask for the OLED thin film is separated, and the open mask for the cathode thin film is separated when the cathode process is completed Flexible OLED thin film deposition roll-to-roll evaporator
A roll-to-roll deposition apparatus for flexible OLED thin film deposition, characterized by comprising an unwinding roll chamber, a rewinding roll chamber and a deposition chamber,
The unrolling roll chamber and the roll accumulation chamber are connected to the lip gate valve, the roll accumulation chambers are formed on the left and right sides of the deposition chamber, and the rewinding roll chamber and the deposition chamber are connected to each other with the lip gate valve interposed therebetween Flexible OLED thin film deposition roll-to-roll evaporator
When the OLED process is completed, the open mask for the OLED thin film is separated and the open mask for the cathode thin film is opened and the open mask for the cathode thin film is attached to the flexible substrate. And the SiN open mask is separated when the passivation process is completed. The flexible OLED thin film evaporation roll-to-roll evaporator
The unwinding roll chamber and the OLED deposition chamber are connected to a lip gate valve, and at least three roll accumulation chambers are formed between the OLED deposition chamber and the SiN passivation deposition chamber, and between the rewinding roll chamber SiN deposition chambers are connected to each other. A flexible OLED thin film deposition roll-to-roll evaporator
23. The flexible OLED thin film deposition roll-to-roll evaporator of claim 22, wherein the roll accumulation chambers are connected by a lip gate valve.
Wherein the unrolling roll chamber and the roll accumulation chamber are connected to a lip gate valve, the OLED deposition chamber and the SiN deposition chamber are connected to at least three roll accumulation chambers, and the SiN deposition chamber and the roll-in chamber are connected to three or more roll accumulation chambers And the roll-in chamber is connected to the roll accumulation chamber and the rewinding roll chamber
And a plurality of rib gate valves are connected to each other with a lip gate valve interposed therebetween.
A roll-to-roll production equipment for producing a flexible OLED according to claim 24, characterized in that the substrate and the lamination substrate are adhered to each other by a laminating roll, and a UV lamp and an infrared lamp are constituted and cured continuously
A roll loading chamber, a lip gate valve, a roll-to-roll deposition chamber, and a roll loading chamber are connected in-line, and a plurality of downward linear evaporation sources are arranged in a row in an upper portion of the roll- A plurality of bottom-up metallic evaporation sources are arranged in a row below the deposition chamber, a cooling metal ball device is provided on the upper backside of the roll film, and a mask filling roll is installed Roll-to-roll production equipment for flexible OLED production
A roll-to-roll system for flexible OLED production as claimed in claim 26, characterized in that a guide roller is added so that the roll film is bent into a " C ", the linear evaporation source for low temperature uses a top- Production Equipment
Wherein the evaporation source shutter is provided at a lower portion of the top-down linear evaporation source, a fixing shutter is provided at a lower portion of the evaporation source shutter, and a transfer shutter is provided at a lower portion of the fixing shutter.
29. The roll-to-roll production equipment for producing a flexible OLED according to claim 28, wherein a plurality of openings are formed in a row in the fixing shutter

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