KR20140099071A - Light emitting device - Google Patents
Light emitting device Download PDFInfo
- Publication number
- KR20140099071A KR20140099071A KR1020130011840A KR20130011840A KR20140099071A KR 20140099071 A KR20140099071 A KR 20140099071A KR 1020130011840 A KR1020130011840 A KR 1020130011840A KR 20130011840 A KR20130011840 A KR 20130011840A KR 20140099071 A KR20140099071 A KR 20140099071A
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- South Korea
- Prior art keywords
- layer
- buffer layer
- semiconductor layer
- light emitting
- light
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/42—Transparent materials
Abstract
Description
An embodiment relates to a light emitting element.
As a typical example of a light emitting device, a light emitting diode (LED) is a device for converting an electric signal into an infrared ray, a visible ray, or a light using the characteristics of a compound semiconductor, and is used for various devices such as household appliances, remote controllers, Automation equipment, and the like, and the use area of LEDs is gradually widening.
In general, miniaturized LEDs are made of a surface mounting device for mounting directly on a PCB (Printed Circuit Board) substrate, and an LED lamp used as a display device is also being developed as a surface mounting device type . Such a surface mount device can replace a conventional simple lighting lamp, which is used for a lighting indicator for various colors, a character indicator, an image indicator, and the like.
As the use area of the LED is widened as described above, it is important to increase the luminance of the LED as the brightness required for a lamp used in daily life and a lamp for a structural signal is increased.
In addition, the electrode of the light emitting device should have excellent adhesive force and excellent electrical characteristics.
Further, research is underway to improve the probability of recombination of electrons and holes in the active layer of the light emitting device.
There is a problem that lattice mismatching of the semiconductor layer occurs due to different lattice constants between materials.
The embodiment provides a light emitting device that mitigates strain generated between the first semiconductor layer and the substrate and improves the quality of the light emitting structure.
A light emitting device according to an embodiment includes a substrate including Si, a buffer layer disposed on the substrate, a strain relaxation layer disposed on the buffer layer to relax a strain generated in the semiconductor layer, And a light emitting structure including a first semiconductor layer, a second semiconductor layer, and an active layer between the first semiconductor layer and the second semiconductor layer, wherein the buffer layer includes a first buffer layer, Comprises AlN and is doped with an n-type dopant.
The embodiment has the advantage that the buffer layer is doped with a high concentration of Si, thereby controlling lattice mismatch in advance between the substrate and the buffer layer.
In addition, since the buffer layer is used in this embodiment, the thickness of the strain relief layer can be reduced, and the structure can be simplified, which has the advantage of shortening the manufacturing time of the light emitting device.
In addition, since the embodiment uses Si as the impurity of the buffer layer and uses the same material as the substrate, it has an advantage that it can be manufactured in one process.
In addition, the buffer layer of the embodiment includes the substrate material, and has an advantage that the quality of the light emitting element is also excellent.
In addition, the embodiment relaxes the lattice mismatch occurring in the semiconductor layer, and thus has the advantage of improving the quality of the semiconductor layer.
1 is a cross-sectional view illustrating a light emitting device according to an embodiment,
FIG. 2 is an enlarged sectional view of a portion A of the light emitting device of FIG. 1,
FIG. 3 is an enlarged cross-sectional view of a portion B of the light emitting device of FIG. 1,
FIG. 4 is an enlarged cross-sectional view of a light emitting device according to another embodiment of FIG. 1,
FIG. 5 is an enlarged cross-sectional view of a light emitting device according to another embodiment of FIG. 1,
6 is a perspective view of a light emitting device package including a light emitting device according to an embodiment,
7 is a cross-sectional view of a light emitting device package including a light emitting device according to an embodiment,
8 is an exploded perspective view of a display device having a light emitting device according to an embodiment.
9 is a view showing a display device having a light emitting device according to an embodiment.
10 is an exploded perspective view of a lighting device having a light emitting device according to an embodiment.
BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and the manner of achieving them, will be apparent from and elucidated with reference to the embodiments described hereinafter in conjunction with the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. To fully disclose the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.
The terms spatially relative, "below", "beneath", "lower", "above", "upper" May be used to readily describe a device or a relationship of components to other devices or components. Spatially relative terms should be understood to include, in addition to the orientation shown in the drawings, terms that include different orientations of the device during use or operation. For example, when inverting an element shown in the figures, an element described as "below" or "beneath" of another element may be placed "above" another element. Thus, the exemplary term "below" can include both downward and upward directions. The elements can also be oriented in different directions, so that spatially relative terms can be interpreted according to orientation.
The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. It is noted that the terms "comprises" and / or "comprising" used in the specification are intended to be inclusive in a manner similar to the components, steps, operations, and / Or additions.
Unless defined otherwise, all terms (including technical and scientific terms) used herein may be used in a sense commonly understood by one of ordinary skill in the art to which this invention belongs. Also, commonly used predefined terms are not ideally or excessively interpreted unless explicitly defined otherwise.
The thickness and size of each layer in the drawings are exaggerated, omitted, or schematically shown for convenience and clarity of explanation. Also, the size and area of each component do not entirely reflect actual size or area.
Further, the angle and direction mentioned in the description of the structure of the light emitting device in the embodiment are based on those shown in the drawings. In the description of the structure of the light emitting device in the specification, reference points and positional relationship with respect to angles are not explicitly referred to, refer to the related drawings.
1 is an enlarged sectional view of a portion A of the light emitting device of FIG. 1, FIG. 3 is an enlarged sectional view of a portion B of the light emitting device of FIG. 1, and FIG. 4 is a cross- FIG. 5 is an enlarged cross-sectional view of a light emitting device according to another embodiment of FIG. 1; FIG.
1, a
The
The
On the other hand, a PSS (Patterned SubStrate) structure may be provided on the upper surface of the
A
On the
An undoped semiconductor layer (not shown) may be located on the strain relief layer 140. The undoped semiconductor layer is a nitride semiconductor layer which is not intentionally implanted with n-type impurity, but can have an n-type conductivity. For example, the undoped semiconductor layer may be formed of Undoped-GaN.
The
The
The
The
When the
A conductive clad layer (not shown) may be formed on and / or below the
The
A current blocking layer (not shown) may be formed between the
On the other hand, the current blocking layer may have a band gap larger than the band gap of the barrier layer included in the
The
In addition, the doping concentrations of the conductive dopants in the
The
The
Meanwhile, a method of exposing a part of the
A
The
The
The first and
Referring to FIG. 2, the strain relieving layer 140 may be formed by alternately stacking at least two pairs of InGaN layers and GaN layers. Preferably, the strain relief layer 140 may comprise at least two subgroups. In FIG. 2, three
The number of
On the other hand, the
The thickness of each of the
The arrangement in which the thickness of each
For example, the thickness of the
The number of the InGaN layers 141A, 143A, and 145A and the number of the GaN layers 141B, 143B, and 145B in the
It is preferable that the thicknesses of the InGaN layers 141A, 143A, 145A and the GaN layers 141B, 143B, 145B are uniformly arranged in the
The thicknesses of the InGaN layers 141A, 143A and 145A and the GaN layers 141B, 143B and 145B may be 1 nm to 1 mu m and the thicknesses of the GaN layers 141B, 143B and 145B may be InGaN layers 141A, ) ≪ / RTI >
Another example of the arrangement in which the thickness of each
For example, the thickness of the InGaN layer in the subgroup adjacent to the
As another example, the thickness of the GaN layer in the subgroup adjacent to the
When the thicknesses of the InGaN layer and the GaN layer of the
The embodiment is not to change the strain abruptly in the strain relieving layer 140 but rather to alternately laminate the layers having tensile and compressive strains alternately first thinly and then thickly alternately and gradually changing the strain The strain between the
The In content of the InGaN layers 141A, 143A and 145A can be made higher as the InGaN layers 141A, 143A and 145A of the
Hereinafter, the
The
The
The thickness of the
The
The
When the
In addition, since the
The lattice constant between the
The
When the
The
FIG. 6 is a perspective view illustrating a light emitting device package including the light emitting device according to the embodiment, and FIG. 7 is a cross-sectional view illustrating a light emitting device package including the light emitting device according to the embodiment.
6 and 7, the light emitting
The
The inner surface of the
Concentration of light emitted to the outside from the
The shape of the
The
The
The encapsulant (not shown) may be filled in the
The encapsulant (not shown) may be formed of silicon, epoxy, or other resin material. The encapsulant may be filled in the
In addition, the encapsulant (not shown) may include a phosphor, and the phosphor may be selected to be a wavelength of light emitted from the
The phosphor may be one of a blue light emitting phosphor, a blue light emitting phosphor, a green light emitting phosphor, a sulfur green light emitting phosphor, a yellow light emitting phosphor, a yellow red light emitting phosphor, an orange light emitting phosphor, and a red light emitting phosphor depending on the wavelength of light emitted from the
That is, the phosphor may be excited by the light having the first light emitted from the
Similarly, when the
Such a fluorescent material may be a known fluorescent material such as a YAG, TAG, sulfide, silicate, aluminate, nitride, carbide, nitridosilicate, borate, fluoride or phosphate.
The first and second lead frames 540 and 550 may be formed of a metal material such as titanium, copper, nickel, gold, chromium, tantalum, (Pt), tin (Sn), silver (Ag), phosphorus (P), aluminum (Al), indium (In), palladium (Pd), cobalt (Co), silicon (Si), germanium , Hafnium (Hf), ruthenium (Ru), and iron (Fe). Also, the first and second lead frames 540 and 550 may be formed to have a single layer or a multilayer structure, but the present invention is not limited thereto.
The first and second lead frames 540 and 550 are separated from each other and electrically separated from each other. The
The light emitting device according to the embodiment can be applied to a lighting device. The lighting system includes a structure in which a plurality of light emitting elements are arrayed and includes a display device shown in Figs. 8 and 9, a lighting device shown in Fig. 10, and may include a lighting lamp, a traffic light, a vehicle headlight, have.
8 is an exploded perspective view of a display device having a light emitting device according to an embodiment.
8, a
The
The
The
The
The
The plurality of light emitting
The
The
The
The
The
Here, the optical path of the
9 is a view showing a display device having a light emitting device according to an embodiment.
9, the
The
Here, the
The
10 is an exploded perspective view of a lighting device having a light emitting device according to an embodiment.
10, the lighting apparatus according to the embodiment includes a
For example, the
The inner surface of the
The
The
The
The surface of the
The
The
The
The
The
The
The
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of illustration, It can be seen that various modifications and applications are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that all changes and modifications that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Claims (20)
A buffer layer disposed on the substrate;
A strain relief layer disposed on the buffer layer to relax strain generated in the semiconductor layer; And
And a light emitting structure disposed on the strain relief layer and including a first semiconductor layer, a second semiconductor layer, and an active layer between the first semiconductor layer and the second semiconductor layer,
Wherein the buffer layer comprises a first buffer layer,
Wherein the first buffer layer comprises AlN and is doped with an n-type dopant.
And the n-type dopant of the first buffer layer comprises Si.
Wherein the doping concentration of the n-type dopant in the first buffer layer is greater than 10e 19 / cm 3 .
And the thickness of the buffer layer is 10 nm to 300 nm.
The buffer layer may be formed,
Further comprising a second buffer layer on the first buffer layer,
The second buffer layer
And the doping concentration of the n-type dopant decreases as the doping concentration of the n-type dopant increases toward the strain relaxation layer.
The buffer layer may be formed,
Further comprising a third buffer layer on the first buffer layer,
And the third buffer layer comprises undoped AlN.
The strain-
Two pairs of InGaN layers and GaN layers are alternately stacked.
The strain-
Comprising at least two subgroups,
Wherein at least two pairs of the InGaN layer and the GaN layer are stacked in the subgroup, and the thickness of the subgroup is thicker toward the first semiconductor layer.
Wherein the number of the InGaN layers and the number of GaN layers in each subgroup are equal to each other.
The InGaN layer has a compressive stress,
Wherein the GaN layer has a tensile stress.
Wherein the thickness of the InGaN layer is constant in the subgroup.
Wherein the GaN layer thickness is constant in the subgroup.
And the In content of the InGaN layer in the subgroup is higher as the subgroup is closer to the first semiconductor layer.
And the thickness of the InGaN layer and the GaN layer is 1 nm to 1 占 퐉.
The strain relief layer has a lattice structure.
And a light transmitting electrode layer for spreading a current on the second semiconductor layer.
A first electrode electrically connected to the first semiconductor layer, and a second electrode electrically connected to the second semiconductor layer.
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KR1020130011840A KR102020493B1 (en) | 2013-02-01 | 2013-02-01 | Light emitting device |
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KR1020130011840A KR102020493B1 (en) | 2013-02-01 | 2013-02-01 | Light emitting device |
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KR102020493B1 KR102020493B1 (en) | 2019-10-18 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2023033479A1 (en) * | 2021-08-30 | 2023-03-09 | 삼성디스플레이 주식회사 | Display device, manufacturing method for light-emitting element, and manufacturing method for display device comprising light-emitting element manufactured according to same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007149713A (en) * | 2005-11-07 | 2007-06-14 | Showa Denko Kk | Semiconductor light emitting diode |
JP2010532561A (en) * | 2007-07-04 | 2010-10-07 | ウリエルエスティー カンパニー リミテッド | Compound semiconductor light emitting device |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007149713A (en) * | 2005-11-07 | 2007-06-14 | Showa Denko Kk | Semiconductor light emitting diode |
JP2010532561A (en) * | 2007-07-04 | 2010-10-07 | ウリエルエスティー カンパニー リミテッド | Compound semiconductor light emitting device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023033479A1 (en) * | 2021-08-30 | 2023-03-09 | 삼성디스플레이 주식회사 | Display device, manufacturing method for light-emitting element, and manufacturing method for display device comprising light-emitting element manufactured according to same |
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