KR20140084860A - the manufacturing method of lens having antirefrective nanostructure using nanowire growth and the lens thereby - Google Patents

the manufacturing method of lens having antirefrective nanostructure using nanowire growth and the lens thereby Download PDF

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KR20140084860A
KR20140084860A KR1020120154822A KR20120154822A KR20140084860A KR 20140084860 A KR20140084860 A KR 20140084860A KR 1020120154822 A KR1020120154822 A KR 1020120154822A KR 20120154822 A KR20120154822 A KR 20120154822A KR 20140084860 A KR20140084860 A KR 20140084860A
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lens
metal oxide
present
manufacturing
seed layer
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정기훈
정혁진
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한국과학기술원
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/041Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method

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  • Chemical & Material Sciences (AREA)
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  • Optics & Photonics (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
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  • Inorganic Chemistry (AREA)
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  • Surface Treatment Of Optical Elements (AREA)

Abstract

It is an object of the present invention to provide a method of manufacturing a lens having an anti-reflection nanostructure using nanowire growth and a lens manufactured thereby. To this end, the present invention provides a method of manufacturing a lens, comprising: forming a seed layer on the surface of the lens (step 1); And a step (step 2) of immersing the lens in which the seed layer is formed in the metal oxide precursor solution in the step 1 and heating the lens in the metal oxide precursor solution (step 2), and a method of manufacturing a lens having an anti- . The present invention also provides a lens having an anti-reflection nanostructure formed by the above method and having metal oxide nanowires formed on its surface. According to the present invention, it is possible to reduce the reflectance of the lens and increase the transmittance by forming a nanostructure having a height, a width, and a period shorter than the wavelength of light on the surface of a plane lens or a lens having a curvature, High efficiency lenses can be made. That is, the present invention forms a non-reflective layer having a nano structure on the surface of a lens by growing metal oxide nanowires on the lens surface instead of applying a different kind of material onto the lens as in the conventional anti-reflection layer coating. And it is possible to mass-produce lenses.

Description

 BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a method of manufacturing a lens having an anti-reflection nanostructure using nanowire growth and a lens manufactured thereby,

The present invention relates to a method of manufacturing a lens having a large-area antireflection nano structure using nanowire growth and a lens manufactured thereby.

A micro lens (micro lens) means a minute lens having a diameter of about 0.1 占 퐉 to several millimeters. This is especially true in optical communication devices including optical fiber, planar lightwave circuit (PLC), laser diode (LD) and other optical communication devices including connections between optical devices such as photodiodes (PD) . Such a fine lens can be classified into a refractive index distribution type lens, a micro-curved surface lens, an array lens, a Fresnel band type lens and the like, and is manufactured by a method such as ion exchange, diffusion polymerization, sputtering,

In addition, a fine lens is essentially used for the purpose of increasing the light receiving efficiency of an image sensor such as a CCD (charge coupled device) or a CMOS (complementary metal oxide semiconductor) by using light receiving characteristics. These fine lenses are manufactured by a thermal resistive method based on the thermoplastic properties of the polymer material. There is a problem that the reflection of light according to the difference between the refractive index of the air and the lens lowers the light collection rate of the fine lens.

Generally, an anti-reflection coating is used to fabricate a high transmittance lens through reduction of the reflectance of a conventional micro lens. A method of forming an antireflection film having a multilayer structure such as an oxide film or a nitride film on the surface of a micro lens is known. This is to increase the light transmittance of the optical element and reduce the reflectance.

However, such a conventional anti-reflective coating technique has a characteristic that it is mechanically unstable as the temperature changes, and furthermore, it is difficult to find a coating material having a refractive index suitable for the purpose of use, and also the cost of the coating material is increased, there was. In addition, a method of forming a multilayered antireflection film requires a special medium having a very low refractive index, and the process is also complicated, resulting in a reduction in the efficiency of the entire process.

Accordingly, there is an increasing demand for new technologies to replace the conventional anti-reflective coating technology as described above, and a technique for forming an anti-reflective structure in accordance with such a demand has been proposed as an alternative to conventional anti- Was presented. That is, the anti-reflection structure technology can be manufactured at a comparatively low cost as compared with the conventional anti-reflection coating technology, is available for a wider wavelength range, and has an advantage of obtaining an anti-reflection effect for a wider incident angle.

As an existing method of forming such an anti-reflection structure, there is, for example, a method using lithography. However, this method is costly and time consuming, and it is disadvantageous in that it is difficult to form an anti-reflection structure on a large area and a curved surface.

Therefore, it is desirable to provide a new manufacturing method capable of overcoming the problems of the conventional lithography process and manufacturing a plastic lens having a non-reflective structure capable of mass production. However, Devices and methods have not been provided.

Accordingly, the inventors of the present invention have been studying for the purpose of reducing reflectance, increasing the transmittance, and developing a lens with high efficiency. Since the nanowire is formed on the surface of the lens by growing the nanowire on the surface of the lens, It is possible to mass-produce a lens, thereby completing the present invention.

It is an object of the present invention to provide a method of manufacturing a lens having an anti-reflection nanostructure using nanowire growth and a lens manufactured thereby.

To this end,

Forming a seed layer on the surface of the lens (step 1); And

A step of immersing the lens in which the seed layer is formed in the metal oxide precursor solution in step 1 and then heating the lens (step 2);

The present invention provides a method of manufacturing a lens having an anti-reflection nano structure using nanowire growth.

In addition,

There is provided a lens having an anti-reflection nanostructure formed by the above method and having metal oxide nanowires formed on its surface.

According to the present invention, it is possible to reduce the reflectance of the lens and increase the transmittance by forming a nanostructure having a height, a width, and a period shorter than the wavelength of light on the surface of a plane lens or a lens having a curvature, High efficiency lenses can be made. That is, the present invention forms a non-reflective layer having a nano structure on the surface of a lens by growing metal oxide nanowires on the lens surface instead of applying a different kind of material onto the lens as in the conventional anti-reflection layer coating, And it is possible to mass-produce lenses.

1 is a photograph of a lens having an anti-reflection nanostructure according to the present invention observed with a scanning electron microscope;
2 is a photograph of an anti-reflection nano structure of a lens having an anti-reflection nano structure according to the present invention observed by a scanning electron microscope;
3 is a schematic view of a method of manufacturing a lens having an anti-reflection nano structure according to the present invention.

It is an object of the present invention to provide a method of manufacturing a lens having an anti-reflection nanostructure using nanowire growth and a lens manufactured thereby. To this end, the present invention provides a method for manufacturing a lens having a nanostructured non-reflective layer formed on the surface of a lens by growing metal oxide nanowires on the surface of the lens, do.

Therefore,

Forming a seed layer on the surface of the lens (step 1); And

A step of immersing the lens in which the seed layer is formed in the metal oxide precursor solution in step 1 and then heating the lens (step 2);

The present invention provides a method of manufacturing a lens having an anti-reflection nano structure using nanowire growth.

Hereinafter, the present invention will be described in detail by steps.

In the method of manufacturing a lens according to the present invention, the step 1 is a step of forming a seed layer on the surface of the lens.

In the method of manufacturing a lens according to the present invention, the lens of step 1 is preferably a planar lens or a lens having a curvature, but is not limited thereto.

At this time, it is preferable that the lens of step 1 is made of one kind selected from the group consisting of photo resist, polymer, silicon, glass, and III-V semiconductor compound. However, Is not particularly limited.

In the method of manufacturing a lens according to the present invention, the seed layer is for growing nanowires and is made of zinc, silicon, nickel, indium tin oxide (ITO), tin, gold, silver, copper and vanadium It is preferable to include one kind of oxide selected from the group consisting of At this time, the seed layer is formed by dissolving a solution of one kind of metal precursor selected from the group consisting of zinc, silicon, nickel, indium tin oxide (ITO), tin, gold, silver, copper, And then oxidizing it.

The seed layer of step 1 is preferably formed to a thickness of 10 nm to 200 nm. As the thickness of the seed layer increases, the diameter of the nanowire increases, the density decreases, and the length also decreases. When the seed layer is out of the range, the nanowire can not be formed to have a size and period shorter than the wavelength of the nanowire .

Also, the diameter and density of the nanowire are controlled according to the particle size included in the seed layer. As the particle size included in the seed layer increases, the diameter increases and the density decreases. The particle size included in the seed layer is preferably 3 nm to 5 nm.

In the method of manufacturing a lens according to the present invention, the step 2 is a step of immersing the lens in which the seed layer is formed in the step 1 in a metal oxide precursor solution, and then heating the lens.

By performing the above steps, a metal oxide nanowire can be grown by hydrothermal synthesis on the lens surface, and a lens having a nano-structured non-reflective layer of a nano nipple type as shown in FIG. 2 can be manufactured .

In the conventional method of forming an antireflection film having a multilayer structure such as an oxide film or a nitride film on the surface of a micro lens, a method of forming a multilayered antireflection film requires a special medium having a very low refractive index, On the other hand, according to the present invention, by growing the metal oxide nanowire on the surface of the lens, a non-reflective layer having a nano structure is formed on the surface of the lens, so that not only a lens can be easily manufactured, It is effective.

In the method of manufacturing a lens according to the present invention, the metal oxide precursor solution in step 2 may be selected from the group consisting of zinc, silicon, nickel, indium tin oxide (ITO), tin, gold, silver, copper and vanadium And the like.

In the method of manufacturing a lens according to the present invention, it is preferable that the metal oxide precursor solution in step 2 further includes a reducing agent and a surfactant. The reducing agent is included in the metal oxide precursor solution to reduce them to nanoparticles, and the surfactant assists dispersion of the nanoparticles formed from the metal oxide precursor solution.

At this time, the reducing agent may be sodium hydroxide (NaOH), HMTA (hexamethylenetetramine), sodium carbonate (Na 2 CO 3 ), ammonia and ethylenediamine, more preferably HMTA. The ions are discharged through the pyrolysis pH-HMTA is a material most widely used in the hydrothermal synthesis method for producing a zinc oxide nanowires, OH that can cause precipitation reaction with a thermal decomposition - and serves to provide an ion, the OH And serves as a buffer. In addition, when zinc oxide nanowires are formed, zinc ions (Zn 2+ ) attached to the non-polar portions of the nanowires are prevented from being absorbed by the nanowires, so that they act as polar portions for epitaxial growth of the oxidized iris .

The surfactant may be PEI (Polyethyleneimine). Surfactants act to reduce the average diameter of the nanowires, thereby allowing the nanowire length to be oriented.

In the method for manufacturing a lens according to the present invention, it is preferable that the heating in step 2 is performed for 2 to 3 hours at a temperature of 50 to 100 캜.

When heat is applied to promote the growth of zinc oxide nanowires in aqueous solution, zinc oxide nanowires are spontaneously formed by nucleation. At this time, the temperature of the aqueous solution is more preferably maintained at 50 to 300 캜.

The nanowires may grow in the form of nano nipples on the surface of the lens through the heating in the step 2, and the height, width, and period of the nano-nipple structure generated when the temperature and the time range are out of range may be smaller than the wavelength It can not be grown.

The anti-reflection nanostructure is generated as shown in FIG. 2, and is formed in a plurality of layers on the lens so that the height, width, and period are equal to or less than the wavelength of the light, thereby reducing the refractive index of light incident on the lens. have.

When a conventional antireflection film is used, the refractive index of the antireflection film should be 1.3 or less, which is practically impossible because it is lower than the refractive index of water. However, in the case of the lens having the anti-reflection nano structure according to the present invention, since the nanostructure is provided under the above-described conditions, the refractive index of light incident on the lens can be reduced.

For example, when the refractive index of the air is 1 and the refractive index of the substrate is 1.68, when the size d of the anti-reflection nanostructure is formed to be 115 nm smaller than the size of the light wavelength in a state where the light wavelength is 600 nm, The refractive index of the structure may be 1.3 or less.

Here, an effective refractive index for reducing the reflectivity of the lens can be calculated by Equation (1).

&Quot; (1) "

Figure pat00001

In Equation (1), n eff is the refractive index of the anti-reflection nanostructure,

n s Is the refractive index of the substrate,

n air is the refractive index of air,

d is the height of the anti-reflective nanostructure,

lambda is a light wavelength.

The present invention also provides a lens having an anti-reflection nanostructure formed by the above method and having metal oxide nanowires formed on its surface.

The anti-reflection nanostructure according to the present invention may be formed in the form of nano nipples as shown in FIG. 2, but may be formed on the lens surface in various forms without being limited thereto.

In the lens according to the present invention, the lens is preferably a planar lens or a lens having a curvature, but the present invention is not limited thereto and can be manufactured in various forms. (See Fig. 1)

At this time, it is preferable that the lens of step 1 is made of one kind selected from the group consisting of photo resist, polymer, silicon, glass, and III-V semiconductor compound. However, Is not particularly limited.

In the lens according to the present invention, it is preferable that the anti-reflection nanostructure is provided so as to have a height, a width, and a period shorter than an optical wavelength.

The lens according to the present invention can reduce the reflectance of the lens by the nanostructure having a size and period shorter than the wavelength of light and increase the transmittance, and it is possible to manufacture the lens with high efficiency by the anti-reflection effect. As a result, the number of light sources can be reduced as the efficiency of the light source increases, manufacturing cost can be reduced, heat generated from the light source can be reduced, and nanowires can be grown on the surface of the lens, Since the non-reflective layer is formed, the lens can be manufactured easily, and mass production of the lens is possible.

The lens according to the present invention is preferably applied to an image element, an optical sensor or a projection lens.

Since the lens according to the present invention can reduce the reflectance of the lens by the nanostructure having a size and period shorter than the wavelength and can increase the transmittance and can manufacture a lens with high efficiency by the anti-reflection effect, Characteristics, it is introduced into an image element such as a CCD or a CMOS, an optical sensor, a projection lens, etc., and has an effect of increasing light receiving efficiency.

Hereinafter, the present invention will be described more specifically with reference to Examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

≪ Example 1 > Production of lens having anti-reflection nano structure

Step 1: Step of forming a seed layer on the surface of the lens

And then 0.01 M of zinc acetate dihydrate prepared by dissolving in 125 ml of methanol was stirred at 60 占 폚. Thereafter, a solution in which 0.03 M of KOH solution was dissolved in methanol was added dropwise, and this was stirred at 60 ° C for 2 hours. The prepared zinc oxide nanoparticles dispersed solution was dropped on the lens, coated, washed with ethanol, and dried with nitrogen gas. After repeating the above process three times, it was heated at 150 ° C for 20 minutes, To form a seed layer.

Step 2: The step of hydrothermally synthesizing the seed layer lens to grow the nanowire

In step 1, the nanowire with the seed layer was immersed in an aqueous solution containing 25 mM zinc nitrate, 25 mM HMTA and 6 mM PEI, and then heated at 95 ° C for 30 minutes to grow zinc oxide nanorods . This was removed from the solution, washed with deionized water and dried to produce a lens having an anti-reflective nanostructure.

Claims (9)

Forming a seed layer on the surface of the lens (step 1); And
A step of immersing the lens in which the seed layer is formed in the metal oxide precursor solution in step 1 and then heating the lens (step 2);
Wherein the nanowire-grown nanowire is a nanowire.
The method according to claim 1,
Wherein the lens of step 1 is made of one selected from the group consisting of photo resist, polymer, silicon, glass, and III-V semiconductor compound. / RTI >
The method according to claim 1,
Wherein the seed layer of step 1 comprises one kind of oxide selected from the group consisting of zinc, silicon, nickel, indium tin oxide (ITO), tin, gold, silver, copper and vanadium. A method of manufacturing a lens having an anti-reflection nanostructure using wire growth.
The method according to claim 1,
Wherein the seed layer of step 1 is formed to a thickness of 10 nm to 200 nm. ≪ RTI ID = 0.0 > 8. < / RTI >
The method according to claim 1,
The metal oxide precursor solution of step 2 includes one kind of metal salt selected from the group consisting of zinc, silicon, nickel, indium tin oxide (ITO), tin, gold, silver, copper and vanadium A method for manufacturing a lens having a large-area antireflection nano structure using nanowire growth.
The method according to claim 1,
Wherein the metal oxide precursor solution of step 2 further comprises a reducing agent and a surfactant. 2. The method of claim 1, wherein the metal oxide precursor solution further comprises a reducing agent and a surfactant.
The method according to claim 1,
Wherein the heating of step 2 is performed at a temperature of 50 ° C to 300 ° C.
A lens comprising an anti-reflective nanostructure produced by the method of claim 1 and having metal oxide nanowires formed on its surface.
9. The method of claim 8,
Wherein the antireflection nano structure is provided so as to have a height, a width, and a period less than a wavelength of light.




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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107797268A (en) * 2017-12-01 2018-03-13 中北大学 A kind of electrowetting regulation and control manufacturing process of complete anti-reflection embedded nano combined lens
KR20180135272A (en) 2017-06-12 2018-12-20 세종공업 주식회사 Antireflective lens fabricating method having nanohole structures of enhanced mechanical stability
TWI829204B (en) * 2022-06-20 2024-01-11 國立中央大學 Meta-optics element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180135272A (en) 2017-06-12 2018-12-20 세종공업 주식회사 Antireflective lens fabricating method having nanohole structures of enhanced mechanical stability
CN107797268A (en) * 2017-12-01 2018-03-13 中北大学 A kind of electrowetting regulation and control manufacturing process of complete anti-reflection embedded nano combined lens
CN107797268B (en) * 2017-12-01 2020-01-21 中北大学 Electrowetting regulation and forming method of full anti-reflection embedded nano composite lens
TWI829204B (en) * 2022-06-20 2024-01-11 國立中央大學 Meta-optics element

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