KR20140080292A - Coating apparatus and coating method - Google Patents

Coating apparatus and coating method Download PDF

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Publication number
KR20140080292A
KR20140080292A KR1020120149939A KR20120149939A KR20140080292A KR 20140080292 A KR20140080292 A KR 20140080292A KR 1020120149939 A KR1020120149939 A KR 1020120149939A KR 20120149939 A KR20120149939 A KR 20120149939A KR 20140080292 A KR20140080292 A KR 20140080292A
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KR
South Korea
Prior art keywords
coating
weight
coating object
pedestal
control unit
Prior art date
Application number
KR1020120149939A
Other languages
Korean (ko)
Inventor
전영호
김영철
김석경
Original Assignee
삼성전기주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 삼성전기주식회사 filed Critical 삼성전기주식회사
Priority to KR1020120149939A priority Critical patent/KR20140080292A/en
Publication of KR20140080292A publication Critical patent/KR20140080292A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
    • B05B12/26—Masking elements, i.e. elements defining uncoated areas on an object to be coated for masking cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • B05B14/20—Arrangements for collecting, re-using or eliminating excess spraying material from moving belts, e.g. filtering belts or conveying belts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)

Abstract

A coating apparatus of the present invention may include a supporting unit; a spray nozzle which sprays a coating material to an coating object placed on the supporting unit; a moving unit which moves the spray nozzle in a horizontal direction; multiple weight detection sensors which measure the weight of the coating object placed on the supporting unit; and a control unit which controls the moving unit by comparing the weight information of a predetermined coating object with the weight information measured by the weight detection sensors.

Description

[0001] COATING APPARATUS AND COATING METHOD [0002]

The present invention relates to a coating apparatus and a coating method, and more particularly, to a coating apparatus and a coating method for forming a uniform thickness coating film on a thin member such as a substrate.

Various components for communication are modularized into IC and passive components or two or more RF components into one chip. On the other hand, the modularized electronic chip has a problem that various electromagnetic waves harmful to the human body are generated because of mounting a large number of electronic parts, and the performance of the neighboring electronic chip is deteriorated due to electromagnetic waves generated from the electronic chip.

For this reason, a technique of forming a coating film of a surface of an electronic chip or an electronic module with a shielding material is used. On the other hand, if such a coating film is formed to have a considerable thickness, the electromagnetic wave can be effectively shielded, but the weight of the electronic chip is significantly increased, which hinders the weight reduction of the electronic device. In contrast, if the coating film is formed too thin, electromagnetic waves can not be shielded.

Therefore, it is required to develop a coating apparatus capable of forming a coating film of a constant thickness on the surface of an electronic chip.

On the other hand, Patent Document 1 is a prior art related to the present invention. Patent Document 1 discloses a technique of forming a coating film having the same thickness on a substrate using a distance sensor. However, the technical idea disclosed in Patent Document 1 requires complicated calculation steps for storing and comparing the measured values inputted through the distance sensor, so that the high-speed coating operation of the substrate is practically difficult.

KR 20006-126096 A

It is an object of the present invention to provide a coating apparatus and a coating method for forming a coating film having a predetermined thickness on an electronic chip or a substrate.

According to an aspect of the present invention, there is provided a coating apparatus comprising: a pedestal; A spray nozzle for spraying a coating material onto a coating object placed on the pedestal; A moving unit for moving the injection nozzle in a horizontal direction; A plurality of weight detection sensors for measuring the weight of the coating object placed on the pedestal; And a control unit for controlling the moving means by comparing the weight information measured from the plurality of weight detecting sensors with the weight information of the predetermined coated object.

In the coating apparatus according to an embodiment of the present invention, the plurality of weight detection sensors may be mounted at the corners of the pedestal, respectively.

The coating apparatus according to an embodiment of the present invention may further include a sensing sensor for measuring a mass of the coating material sprayed through the injection nozzle.

In the coating apparatus according to an embodiment of the present invention, the control unit may control the moving unit so that the reprocessing operation of the coating object through the injection nozzle can be performed when the measured value is smaller than a preset reference value.

According to an aspect of the present invention, there is provided a coating method comprising: measuring a weight of a coating object before coating; Coating a coating object; Measuring the weight of the coating object after coating; Calculating a deviation between the weight before coating and the weight after coating; And re-coating the coated object if the deviation is less than the set reference value.

The present invention can form a coating film having a uniform thickness on a coating object.

In addition, the present invention has an advantage in that the coating quality of a coating object can be easily managed.

FIG. 1 is a configuration diagram of a coating apparatus according to an embodiment of the present invention,
FIG. 2 is a plan view of a pedestal for explaining an arrangement of the weight detection sensor shown in FIG. 1,
3 is a flow chart illustrating a coating method according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In describing the present invention, it is to be understood that the terminology used herein is for the purpose of describing the present invention only and is not intended to limit the technical scope of the present invention.

2 is a plan view of a pedestal for explaining the arrangement of the weight detection sensor shown in FIG. 1, and FIG. 3 is a cross-sectional view of a coating apparatus according to an embodiment of the present invention And the coating method according to the present invention.

1 to 4, a coating apparatus according to an embodiment of the present invention will be described.

The coating apparatus 100 according to the present embodiment may include a pedestal 110, a spray nozzle 120, a moving unit 130, and a weight detection sensor 140. In addition, the coating apparatus 100 may further include a control unit 150 that controls the operation of the injection nozzle 120 and the movement unit 130. The coating apparatus 100 may further include a sensing sensor 160 for sensing the amount of coating material sprayed through the spray nozzle 120.

The pedestal 110 is a member for supporting the coating object 200, and may be substantially rectangular in plan view. However, the shape of the pedestal 110 is not limited to a square. For example, the pedestal 110 may be circular or some other shape depending on the shape of the coating object 200.

The pedestal 110 may have a predetermined size. In other words, the pedestal 110 may be formed larger than the object to be coated 200 so as to stably support the object 200. In addition, the pedestal 110 may have a predetermined strength and rigidity so as not to be deformed even when the coating object 200 is placed on the pedestal. In other words, the pedestal 110 can be made of a material that does not bend even when the coating object 200 is placed on one surface (upper surface in FIG. 1).

The injection nozzle 120 may be mounted on the moving unit 130 and may be a member for spraying a coating material onto the coating object 200. In other words, the spray nozzle 120 moves horizontally by the moving unit 130 and can spray the coating material. For example, the injection nozzle 120 may be a mechanism for spraying the coating material by the driving force of the actuator. Although not shown in FIG. 1, the spray nozzle 120 may receive a coating material from an external source. For example, the injection nozzle 120 may be connected to a supply source through a rubber hose or the like, and the coating material of the supply source may be continuously supplied by a pump mounted on the supply source. Here, the coating material may be an electromagnetic shielding material shielding electromagnetic waves.

The injection nozzle 120 may be composed of a plurality of nozzles. For example, the injection nozzle 120 may be composed of a plurality of nozzles arranged in one direction of the pedestal 110. In this case, there is an advantage that the coating operation time through the injection nozzle 120 can be shortened.

The spray nozzle 120 can spray the coating material at a constant pressure. In other words, the spray nozzle 120 can spray the coating material at a constant pressure so that a coating film having a uniform thickness can be formed on the surface of the coating object 200.

The mobile unit 130 may engage the injection nozzle 120 and move the injection nozzle 120 in the horizontal direction. To this end, the mobile unit 130 may be comprised of a first mobile unit 132 and a second mobile unit 134. Here, the first moving unit 132 can move in a first direction (X-axis direction in FIG. 1) of the pedestal 110 and the second moving unit 134 can move in a second direction 1 direction in the Y-axis direction). Here, the injection nozzle 120 may be mounted on the first moving unit 132, and the first moving unit 132 may be mounted on the second moving unit 134. Accordingly, the injection nozzle 120 can freely move in the first direction and the second direction as described above.

The mobile unit 130 may be electrically connected to the control unit 150. [ In other words, the mobile unit 130 can move in the first direction and the second direction according to the control signal of the control unit 150. [

The weight detection sensor 140 may be composed of one or more sensors and may be mounted on the pedestal 110. In other words, the weight detection sensor 140 can be disposed at a position where the coating object 200 is placed. For example, the weight detection sensor 140 may be composed of four sensors, and may be mounted near four corners of the pedestal 110 as shown in FIG. For reference, although the weight detection sensor 140 is shown as four sensors in FIG. 2, four or more sensors may be disposed or four or more sensors may be disposed as needed. The former is advantageous in that it can measure a precise weight change of the coating object 200 and the latter has an advantage of simplifying the control operation circuit of the control unit 150 according to the measurement signal of the weight detection sensor 140 .

The weight detection sensor 140 may measure the weight of the coating object 200 and send the measured weight value to the control unit 150. In other words, the weight sensing sensor 140 can measure the weight of the coating object 200 before the coating operation is performed and send the measured value (hereinafter, simply referred to as a first weight) to the control unit 150 have. In addition, the weight detection sensor 140 may measure the weight of the coating object 200 after the coating operation is completed, and send the measured value (hereinafter, simply referred to as a second weight) to the control unit 150. In addition, the weight detection sensor 140 may measure the weight of the coating object 200 at any time during the coating operation of the coating object 200, and may transmit the measured value to the control unit 150.

The weight sensor 140 may be a resistance sensor whose resistance varies depending on the pressure or weight applied to the weight sensor, and may be a piezoelectric sensor that generates currents of different magnitudes depending on the pressure or weight applied to the weight sensor. Lt; / RTI >

The control unit 150 may be electrically connected to the mobile unit 130 and the weight detection sensor 140. In addition, the control unit 150 may be electrically connected to the sensing sensor 160.

The control unit 150 configured as described above can control the mobile unit 130 through the information received from the weight detection sensor 140 and the detection sensor 160. In other words, if the deviation between the first weight and the second weight received from the weight detection sensor 140 (i.e., the weight of the coating film formed on the coating object 200) is larger than the set reference value, It can be judged that it is formed in one thickness. Alternatively, when the deviation between the first weight and the second weight is smaller than the set reference value, the control unit 150 determines that the coating film is not formed in a uniform thickness, or that the coating material is not properly sprayed from the spray nozzle 120 . In the latter case, the control unit 150 controls the moving unit 130 to move the injection nozzle 120 to the initial position, and then perform the coating operation of the coating object 200 again.

The sensing sensor 160 may be mounted to the injection nozzle 120. In other words, the sensing sensor 160 can measure the weight of the coating material injected through the injection nozzle 120. Here, the weight measurement by the sensing sensor 160 can be measured in a predetermined process unit. For example, the sensing sensor 160 measures the weight (hereinafter referred to as coating weight) of the coating material required for a single coating operation of the coating object 200, and sends the measured value to the control unit 150 . Alternatively, the sensing sensor 160 may measure the weight of the coating material required to coat a portion of the coating object 200, and send the measured value to the control unit 150. In this case, the control unit 150 may store the received coating weight from the sensing sensor 160, and set the coating weight as a reference value. That is, the control unit 150 compares the deviation of the first weight with the second weight to determine the re-execution of the coating operation.

Since the coating apparatus 100 configured as described above determines the uniformity of the coating film through the weight of the coating material formed on the coating object 200, the coating object 200 having the uneven surface or the complicated shape, May be effective in forming a uniform coating film.

Therefore, the coating apparatus 100 according to the present embodiment can be usefully used for coating a package module or a package substrate on which a plurality of electronic parts are mounted.

Next, a coating method according to an embodiment of the present invention will be described with reference to FIG.

The coating method according to this embodiment may include a first weight measurement step S10, a coating step S20, a second weight measurement step S30, and a weight comparison step S40. In addition, the present coating method may further include a re-coating step (S50).

1) a first weight measuring step (S10)

This step may be a step of measuring the initial weight (i.e., the first weight) of the coating object 200. In other words, this step may be a step of measuring the weight of the coating object 200 before the coating film is formed. This step may be performed before transporting the coating object 200 to the coating apparatus or may be performed prior to the coating operation of the coating object 200.

2) coating step (S20)

This step may be a step of forming a coating film on the coating object 200. In other words, this step may be a step of spraying a coating material onto the surface of the coating object 200 to form a coating film on the surface of the coating object 200. Here, the coating material may be an electromagnetic shielding material shielding electromagnetic waves.

3) Second weighing step (S30)

This step may be a step of measuring the weight (i.e., the second weight) of the coating object 200 on which the coating film is formed. For example, this step may be performed after the step of forming a coating film on the coating object 200. This step may be performed after forming a coating film on a part of the coating object 200 and may be performed after forming a coating film on the entire surface of the coating object 200. [

4) Weight comparison step (S40)

This step may be a step of calculating a deviation between the first weight and the second weight, and comparing the deviation and the reference value. In addition, this step may include determining whether to re-coat the coating object 200 based on the deviation and the magnitude of the reference value. More specifically, in this step, it is determined that the coating operation is completed if the deviation is larger than the reference value, and it is determined that the coating operation of the coating object 200 is necessary if the deviation is smaller than the reference value. For reference, the reference value may be a standard weight of the coating material required to form a coating film on the surface of the coating object 200.

5) Recoating step (S50)

This step may be a step of spraying a coating material onto the surface of the coating object 200 to reform the coating film. Here, the recoating operation may be performed partly according to the weight distribution of the coating object 200. For example, if the first region of the coating object 200 does not satisfy the reference value, the re-coating operation can be performed only on the first region of the coating object 200. Alternatively, if the second region of the coating object 200 does not satisfy the reference value, the re-coating operation can be performed only on the second region of the coating object 200. For reference, step S60, which has not been described, may be a step for ending the coating film forming operation of the coating object 200. [

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions And various modifications may be made.

100 coating device
110 pedestal
120 injection nozzle
130 mobile unit
140 Weight sensor
150 control unit
160 detection sensor

Claims (5)

Pedestal;
A spray nozzle for spraying a coating material onto a coating object placed on the pedestal;
A moving unit for moving the injection nozzle in a horizontal direction;
A plurality of weight detection sensors for measuring the weight of the coating object placed on the pedestal; And
A control unit for controlling the moving means by comparing measured values measured from the plurality of weight detection sensors with preset reference values;
≪ / RTI > The method according to claim 1,
Wherein the plurality of weight detection sensors are mounted on the corners of the pedestal, respectively. The method according to claim 1,
Further comprising a sensing sensor for measuring a mass of coating material sprayed through the spray nozzle. The method according to claim 1,
Wherein the control unit controls the moving unit so that a reprocessing operation of the coating object through the injection nozzle can be performed if the measured value is smaller than a preset value. Measuring the weight of the coating object before coating;
Coating a coating object;
Measuring the weight of the coating object after coating;
Calculating a deviation between the weight before coating and the weight after coating; And
Re-coating the coating object if the deviation is less than a preset reference value;
≪ / RTI >
KR1020120149939A 2012-12-20 2012-12-20 Coating apparatus and coating method KR20140080292A (en)

Priority Applications (1)

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KR1020120149939A KR20140080292A (en) 2012-12-20 2012-12-20 Coating apparatus and coating method

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KR1020120149939A KR20140080292A (en) 2012-12-20 2012-12-20 Coating apparatus and coating method

Publications (1)

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KR20140080292A true KR20140080292A (en) 2014-06-30

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101883917B1 (en) * 2018-01-17 2018-08-09 주식회사 티에스피글로벌 Apparatus and method for coating integrated circuit chip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101883917B1 (en) * 2018-01-17 2018-08-09 주식회사 티에스피글로벌 Apparatus and method for coating integrated circuit chip

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