KR20130123605A - Displacement pump for liquid - Google Patents

Abstract

The purpose of the present invention is to provide a displacement pump for liquid which check valves of intake and discharge side of a pump chamber generates no gas leakage even though liquid or liquid including bubbles are utilized. An intake process supplying liquid to the pump chamber (3) via the check valve (8) and an inlet (6) from an air intake passage (9) by enlarging the volume of the pump chamber (3) is enlarged, and a discharge process sending liquid to a discharge passage (9) via an outlet (7) and the check valve (10) of a discharge side from the pump chamber (3) by reducing the volume of the pump chamber (3) are alternately performed. A small amount of the liquid inside the pump chamber (3) is discharged to the discharge passage (9) via a micro hole passage (14) by directly connecting an upper region of the pump chamber (3) and the discharge passage (9) by the micro hole passage (14) in the discharge process so that the present invention prevents a gas leakage from the check valves (8, 10) by excluding the bubbles inside the pump chamber (3).

Description

Volumetric Pump for Liquids {DISPLACEMENT PUMP FOR LIQUID}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is a volumetric pump, such as a bellows pump, used in the semiconductor and liquid crystal markets as a liquid feed pump, and particularly has a foaming liquid (for example, a liquid having foaming properties such as ozone water and hydrogen peroxide water). ) And a liquid volume pump for handling a liquid containing bubbles (for example, a liquid in which bubbles are generated due to high temperature, high pressure, cavitation, etc.).

BACKGROUND ART Conventional volumetric pumps for liquids generally include a pump chamber formed by an expandable bellows and configured to expand and contract a volume, a suction port and an outlet opening in the pump chamber, and a suction check valve at the suction port. A suction passage connected in communication with each other via a discharge passage, and a discharge passage connected to the discharge passage via a discharge side check valve, and the pump chamber is enlarged to supply a liquid to the pump chamber from the suction passage through the suction side check valve and the suction port. Bellows pumps and the like, which are configured to alternately and continuously perform the suction process to reduce the volume of the pump chamber and the pumping liquid from the pump chamber to the discharge passage through the discharge port and the discharge side check valve, are widely known (for example, See Patent Document 1).

[Patent Document 1] Japanese Patent Application Laid-Open No. 2010-196541

However, in volumetric pumps such as bellows pumps, the suction fluid checks the discharge side check valve to the discharge side check when the liquid is fluid containing foam due to effervescent liquid such as ozone water, hydrogen peroxide water, or the like due to high temperature, high pressure, cavitation or the like. There is a possibility that a so-called gas lok phenomenon occurs in which the valve becomes inoperable, and a failure may occur that prevents good liquid feeding.

That is, when a volumetric pump such as a bellows pump or the like is used as a liquid delivery pump or a circulation pump of a liquid having foamability or air bubbles, bubbles generated or introduced into the pump chamber during the suction process are discharged from the pump chamber during the discharge process. It is not discharged and remains in the pump chamber. Such retention bubbles are combined with other retention bubbles or newly generated bubbles in the pump chamber by growing the suction and discharge steps by the volumetric pump, and grow into large bubbles. On the other hand, the discharge side check valve can be displaced to the open valve position by resisting the spring by the pressure rise in the pump chamber in the discharge step and the suction side check valve by the pressure drop in the pump chamber in the suction step. It is composed. Therefore, if a large bubble exists in the pump chamber, only the bubble is compressed in the discharging step and the pump chamber is not substantially reduced, so that the pressure rise in the pump chamber is insufficient, and the discharge side check valve does not operate properly (the valve body is opened). In the suction process, the bubble expands only, the pump chamber is not substantially enlarged, and the pressure drop in the pump chamber is insufficient, and the suction check valve does not operate properly (the valve body is an open valve). Not displaced into position), so-called gas lock phenomenon occurs. Moreover, even if the bubble which generate | occur | produces or stays in a pump chamber in a single process is small or a small amount, since this process is repeated and a bubble increases gradually and becomes large, there exists a possibility that the above-mentioned gas lock phenomenon may arise.

In view of such a point, the present invention, even when dealing with a liquid having foamability or a liquid containing bubbles, it is possible to prevent the occurrence of the above-mentioned gas lock phenomenon in advance, and to perform the suction process and the discharge process satisfactorily. It is an object to provide a volumetric pump.

The present invention provides a pump chamber configured to expand and contract a volume, an inlet port and an outlet port opened in the pump chamber, an inlet passage connected to the inlet port via a suction side check valve, and a outlet port connected to the outlet port through a discharge side check valve. A passage is provided so that the volume of the pump chamber is enlarged, and the suction process for supplying the pump chamber from the suction passage through the suction side check valve and the suction port and the volume of the pump chamber is reduced to transfer the liquid from the pump chamber to the discharge passage through the discharge port and the discharge side check valve. In a volumetric pump for liquids which handles liquids which generate bubbles in the pump chamber, the upper region of the pump chamber and the discharge passage are particularly designed to achieve the above object. Directly connected by micro-hole passages, and liquid in the pump chamber in the discharge process By from the microporous path trace (微量) flows out to the discharge passage is to offer to place configured to exclude air bubbles in the pump chamber.

In such a liquid displacement pump, it is preferable that the micropore passage is opened in the pump chamber toward the upper region thereof. In addition, the suction port is preferably opened at least toward the upper region in the pump chamber, and when the pump chamber is expanded and contracted in the horizontal direction, the suction port is radially opened in a direction orthogonal to the pump chamber expansion and contraction operation direction. It is preferable to branch to a plurality of suction ports.

In a preferred embodiment of such a volumetric pump for liquids, a check valve for allowing liquid flow from the pump chamber to the discharge passage and inhibiting liquid flow in the reverse direction is disposed in the micropore passage, thereby discharging the passage through the suction stroke. And communication by the micro-pores passage with the pump chamber can be blocked. Alternatively, the micropore passage may be left open at all times without providing such a check valve, and a small amount of liquid in the discharge passage may be introduced into the upper region of the pump chamber from the micropore passage in the suction step.

In addition, the present invention can be suitably applied to a volumetric pump for liquid, in which the pump chamber is formed surrounded by bellows of a cylinder having a bottom that is stretchable in the horizontal direction. In this case, when the circumferential wall of the bellows has a bellows structure with a cross-sectional waveform, the opening of the micropore passage in the pump chamber flows into the micropore passage from the discharge passage in the suction step. Preferably, the liquid is ejected toward the inner circumferential surface at the upper side portion of the bellows. In addition, the micropore passage is opened in a plurality of places in the pump chamber, and the expansion and contraction operation of the bellows such that the opening ejects the liquid toward the annular recess formed in the inner peripheral surface of the circumferential wall of the bellows at least at the final stage of the suction process. It is preferable to arrange | position in parallel form at predetermined intervals in a direction.

The volumetric pump for liquid according to the present invention directly connects the upper region of the pump chamber and the discharge passage by means of a micropore passage, so that a small amount of liquid in the pump chamber is discharged from the micropore passage into the discharge passage in the discharging step. Since bubbles can be taken out together, large bubbles are not generated in the pump chamber even if the process is repeated, and the occurrence of the gas lock phenomenon described at the beginning can be avoided beforehand. Therefore, according to the present invention, even when handling a liquid having foamability (ozone water, hydrogen peroxide water, etc.) or a liquid containing bubbles, a good pump function can be exhibited, and a volumetric pump for liquids having extremely practicality can be provided. Can be.

BRIEF DESCRIPTION OF THE DRAWINGS It is a longitudinal side view which shows an example of the liquid feeding pump equipped with the volumetric pump for liquids which concerns on this invention.
FIG. 2 is a longitudinal side view corresponding to FIG. 1 showing a state different from FIG. 1. FIG.
3 is a longitudinal side view corresponding to FIG. 1 showing a state different from FIGS. 1 and 2.
4 is an enlarged detailed view of the main portion of FIG. 1.
5 is a longitudinal front view of the recess along VV of FIG. 1;
Fig. 6 is a longitudinal sectional side view corresponding to Fig. 1 showing a modification of the liquid feeding pump equipped with the volumetric pump for liquid according to the present invention.
FIG. 7 is an enlarged view illustrating main parts of FIG. 6.
8 is a longitudinal front view of the main portion along the line VIII-VIII in FIG. 6;
Fig. 9 is a longitudinal sectional side view corresponding to Fig. 1 showing another modification of the liquid feeding pump equipped with the volumetric pump for liquid according to the present invention.
FIG. 10 is an enlarged view of the main part of FIG. 9.
FIG. 11 is a longitudinal rear view of the main portion along the XI-XI line of FIG. 10; FIG.
12 is a longitudinal rear view of the main portion along the line XII-XII in FIG. 10.
FIG. 13 is a longitudinal side view corresponding to FIG. 10 showing yet another modification of the liquid feed pump including the volumetric pump for liquid according to the present invention. FIG.

EMBODIMENT OF THE INVENTION The form for implementing this invention is demonstrated concretely based on drawing.

BRIEF DESCRIPTION OF THE DRAWINGS The longitudinal side view which shows an example of the liquid feeding pump equipped with the volumetric pump for liquids which concerns on this invention, FIG. 2 and FIG. 3 is the longitudinal side view which corresponds to FIG. 1 which shows an operation state different from FIG. 4 is an enlarged detailed view of the main portion of FIG. 1, and FIG. 5 is a longitudinal front view of the main portion along the VV line of FIG. 1. In addition, in the following description, up, down, left and right shall refer to the up, down, left and right in FIGS.

The liquid feeding pump shown in FIG. 1 delivers liquids (e.g., liquids having foamability such as ozone water, hydrogen peroxide water, etc., or liquids containing bubbles due to high temperature, high pressure, cavitation, etc.) that bubbles tend to stay in the pump. The left and right pairs of volumetric pumps (hereinafter, referred to as "first pump 1A" and pumps on the right as "second pump 1B") are arranged in parallel. It is a multiple pump.

Both pumps 1A and 1B have the same structure except that they have a symmetrical structure, and are disposed in the pump case 2 and the pump case 2, respectively, as shown in FIGS. And a bellows 4 formed to surround the pump chamber 3, operating means 5 for expanding and contracting the volume of the pump chamber 3, a suction port 6 and a discharge port 7 opened in the pump chamber 3; And a suction passage 9 connected to the suction port 6 through the suction side check valve 8 and a discharge passage 11 connected to the discharge port 7 through the discharge side check valve 10. It is a bellows pump (a bellows type reciprocating pump) configured to alternately perform a suction step of feeding the pump chamber 3 from the suction passage 9 and a discharge step of feeding the pump chamber 3 from the pump chamber 3 to the discharge passage 11.

As shown in FIGS. 1-3, the pump case 2 is a cylindrical structure of both ends occlusion which is common as a pump case of both pumps 1A and 1B, and is installed in the state where the axis line becomes horizontal. do. The internal space of the pump case 2 is divided into two by a disk-shaped passage forming wall 2a disposed in the middle portion in the axial direction (left and right directions), and the first pump ( The structural member of 1A is arrange | positioned, and the structural member of the 2nd pump 1B is arrange | positioned at the division part of the right side.

As shown in FIGS. 1-3, each bellows 4 is a bottomed cylindrical body comprised by the bellows structure of the cross-sectional waveform so that it can expand and contract in an axial direction (horizontal direction). The opening end part 4b of each bellows 4 is fixed to the passage forming wall 2a, and consists of the pump chamber 3 which closed the inside of the bellows 4 by the passage forming wall 2a. It is. The expansion and contraction of the volume of each pump chamber 3 is carried out by stretching the bellows 4 enclosed therein in the axial direction, but the both bellows 4 and 4 are fixed to the bottom walls 4c and 4c. By connecting the disk-shaped movable plates 12 and 12 by the connection 13, expansion and contraction operation is performed in the opposite direction in synchronism. That is, as shown in FIG. 1, the connection part 13 is made so that the other bellows 4 may become the longest state, when one bellows 4 is in the shortest state. In this case, the bellows 4 is interlocked with each other, and when the bellows 4 is reduced, the other bellows 4 is extended.

Each operation means 5 extends and operates the bellows 4, and is composed of a piston cylinder mechanism, a crank mechanism, and the like. In this example, as shown in Figs. And pressurized air in a space formed between the bellows 4 and the movable plate 12 and the pump case 2 from the supply / discharge mechanism 5a formed on the end wall 2b of the pump case 2. It is comprised so that the bellows 4 may expand and contract by abruptly discharging 5b. The air supply and exhaust from both supply / exhaust mechanisms 5a and 5a are alternately synchronized to supply air from one supply / exhaust mechanism 5a and exhaust from the other supply / exhaust mechanism 5a. (B), the expansion and contraction operations of both bellows 4 and 4, i.e., expansion and contraction operations of both pump chambers 3 and 3, are synchronized in the reverse direction. That is, the suction process (or discharge process) of the 1st pump 1A and the discharge process (or suction process) of the 2nd pump 1B are performed synchronously, and the suction process and discharge process in both pump 1A, 1B are performed. Is switched at the same time. 1 shows the end state of the suction process of the first pump 1A and the discharge process of the second pump 1B, and FIG. 2 shows the discharge process of the first pump 1A and the second pump 1B. Fig. 3 shows a state in which the suction process of the first pump 1A and the suction discharge process of the second pump 1B are in progress.

Each suction side check valve 8 is comprised from the valve box 8a, the valve seat 8b, the valve main body 8c, and the spring 8d, as shown to FIG. The valve box 8a protrudes from the passage forming wall 2a into the pump chamber 3 and does not interfere with the bellows 4, and has a bottom with the opening end fixed to the passage forming wall 2a. It is cylindrical. The valve seat 8b is formed in the valve box attaching part of the passage formation wall 2a, and is connected to the downstream end part which is one end of the suction path 9 formed in the passage formation wall 2a. The downstream end of the suction passage 9 branches and communicates with the valve seats 8b and 8b of the both suction side check valves 8 and 8. In the valve box 8a, at the closed valve position (the position shown in FIGS. 2 and 3 in the first pump 1A or the second pump 1B in the first pump 1A, which is fitted to the valve seat 8b and occludes it). 1 and the open valve position (a position shown in FIG. 1 in the first pump 1A or the second pump 1B in the first pump 1A) to be spaced apart from the valve seat 8b. The valve main body 8c which can be displaced over the position shown in FIG. 9, and the spring 8d which bias this to a closed valve position are built-in. The valve body 8c is held in the closed position by the back pressure (pressure in the pump chamber 3) and the biasing force of the spring 8d in the discharging step, and in the suction step, the spring is reduced by the pressure drop in the pump chamber 3. It is displaced to the open valve position in response to the bias force of 8d.

Each suction port 6 is formed in the bottom wall of the valve box 8a, is opened in the pump chamber 3, and the suction passage 9 is provided through the suction side check valve 8, as shown in FIGS. It is connected to the downstream end of.

Each discharge side check valve 10 is comprised from the valve box 10a, the valve seat 10b, the valve main body 10c, and the spring 10d, as shown to FIG. The valve box 10a protrudes from the passage forming wall 2a into the pump chamber 3 and does not interfere with the bellows 4, and has a bottom with the opening end fixed to the passage forming wall 2a. It is cylindrical. The valve seat 10b is formed in the bottom wall of the valve box 10a, and is connected to the upstream end part which is one end of the discharge passage 11 formed in the passage formation wall 2a. The upstream end of the discharge passage 11 branches and opens in the valve boxes 10a and 10a of the both discharge side check valves 10 and 10 to communicate with the valve seats 10b and 10b. The valve box 10a is closed valve position (the position shown in FIG. 1 in the 1st pump 1A or the 2nd pump 1B in FIG. Position shown) and an open valve position (a position shown in Figs. 2 and 3 in the first pump 1A or a position shown in Fig. 1 in the second pump 1B) which is separated from the valve seat 10b to open it. The valve main body 10c which can displace over and the spring 10d which attach this to a closed valve position are built. The valve main body 10c is held in the closed position by the back pressure (pressure of the discharge passage 11) and the biasing force of the spring 10d in the suction step, and the pressure rise of the pump chamber 3 in the discharge step. It is displaced to the open valve position in response to the bias force of the spring 10d.

As shown in FIGS. 1-3, each discharge port 7 functions as a valve hole of the valve seat 10b, is formed in the bottom wall of the valve box 10a, and is opened in the pump chamber 3, It is connected to an upstream end of the discharge passage 11 via the discharge side check valve 10.

In addition, suitable materials are selected according to the nature and state of the fluid in contact with the liquid supply fluid among the pump constituent members such as the bellows 4, but in this example, corrosion resistant materials such as polytetrafluoroethylene-based corrosion resistant materials It is composed of (로 食材).

The above structure is the same as a well-known multi-stage reciprocating drive pump, and the discharge process by the 1st pump 1A and the discharge process by the 2nd pump 1B are performed in succession alternately, and from the suction part of a liquid feeding line Although the liquid can be continuously fed to the discharge portion, in the above-described first and second pumps 1A and 1B, the suction side check valve 8 and the discharge side of the suction side are further configured as follows according to the present invention. It is designed to prevent the malfunction of the check valve 10 (gas lock) and to deliver the bubble-containing liquid satisfactorily due to the foaming liquid such as ozone water, hydrogen peroxide water, high temperature, high pressure, cavitation, etc. have.

First, as shown in FIGS. 1 to 5, the upper region and the discharge passage 11 of each pump chamber 3 are provided in the fine hole passage 14 whose cross section forms a circular shape having a small diameter. By direct communication, and in the discharge process, a small amount of liquid in the pump chamber 3 flows out from the micro-hole passage 14 into the discharge passage 11, and in the suction process, the liquid in the discharge passage 11 is transferred into the micro-hole passage ( 14 is configured to allow a small amount to flow into the upper region of the pump chamber 3.

That is, as shown in FIG. 4, each of the micropore passages 14 has a bottom first cylinder 15 having a passage through the passage forming wall 2a in the axial direction (horizontal direction) of the bellows 4. ) Is fixed to the end of the first member (15) by fitting the second member (16) of the cylinder with a bottom and fastening it to the second member (16) of the cylindrical third member (17). It is formed by fitting the proximal end to each other and communicating the passage holes 15a, 16a, 17a formed in the members 15, 16, 17 in the horizontal direction. One end of the passage hole 15a formed in the first member 15 is opened in the discharge passage 11, and the passage hole 15a and the passage hole 17a of the third member 17 are formed of the second member ( It communicates with the passage hole 16a of 16. As shown in FIG.

The third member 17 protrudes horizontally from the passage forming wall 2a to the upper region in the pump chamber 3 in a state adjacent to the upper portion of the bellows 4 without interfering with it. As shown in FIGS. 1 to 3, the protruding amount of the third member 17 is the bottom wall 4c at the tip end of the third member 17 when the bellows 4 is stretched. It is set as long as possible in the range which does not interfere with. In addition, end surfaces of the first and second members 15 and 16 have the same surface as that of the end face (the end face on the pump chamber side) of the passage forming wall 2a, and is exposed to the discharge passage 11. The fitting portion between the end of the first member 15 and the passage forming wall 2a is sealed with an o-ring 15b.

As shown in FIG. 4, the microhole passage 14 has a plurality of openings (nozzle holes) 14a that are opened toward the upper region in the pump chamber 3. That is, in the part located in the pump chamber 3 as an upper surface part of the 3rd member 17, the some nozzle hole 14a which communicates with the passage hole 17a is provided in the axial direction at predetermined intervals. As shown in Fig. 1, the intervals between the nozzle holes 14a are, for example, an annular recess in which passages of the nozzle holes 14a are formed on the inner circumferential surface of the circumferential wall of the bellows 4 at least in the final stage of the suction process. It is set to oppose (4d).

Therefore, in the suction step, the discharge port 7 is closed by the discharge side check valve 10, but the liquid in the discharge passage 11 flows into the pump chamber 3 from the micropore passage 14 (the first pump). 1 and 4 in 1A or the state shown in FIGS. 2 and 3 in the second pump 1B. At this time, since the opening of the fine hole passage 14, that is, the nozzle hole 14a is opened toward the upper region in the pump chamber 3, the liquid is ejected toward the upper region in each nozzle hole 14a. However, the bubbles generated in the pump chamber 3 in the suction process float in the upper region of the pump chamber 3 and coalesce and grow newly with the bubbles generated as the suction process proceeds. However, since the liquid is ejected from each nozzle hole 14a in the upper region in the pump chamber 3 as described above, the growth of bubbles is prevented by the jet flow, and the large bubbles are minutely divided. The growth inhibition or splitting action of the bubbles is achieved by placing the nozzle holes 14a in an annular recess 4d whose opening is formed on the inner circumferential surface of the circumferential wall of the bellows 4 at least in the final stage of the suction process as described above. By setting them so as to face each other, it is more effective.

Then, when the process shifts from the suction step to the discharge step, the liquid in the pump chamber 3 is discharged from the discharge port 7 to the discharge passage 11 through the discharge side check valve 10, but at the same time, the upper region in the pump chamber 3 Of liquid flows out from each nozzle hole 14a to the discharge passage 11 through the fine hole passage 14 (the state shown in FIGS. 2 and 3 in the first pump 1A or the second pump ( 1 and 4) in the state 1B). At this time, since the air bubbles in the upper region in the pump chamber 3 are inhibited by the jet flow from the nozzle holes 14a in the suction step as described above and are finely divided, the micropore passage 14 Accompanying the outflow liquid from the discharge passage 11 to the discharge passage 11 is discharged to the discharge passage 11.

Therefore, even when the liquid to be fed is a foamable liquid or a liquid containing bubbles, bubbles are not significantly grown in the pump chamber 3 by repetition of the suction process and the discharge process. The occurrence of the same gas lock phenomenon can be avoided in advance, and a good liquid feeding function can be exhibited. In addition, the inner diameter of the micropore passage 14 is the inlet amount of the inlet amount of the pump chamber 3 from the micropore passage 14 in the suction step to the discharge passage 11 from the micropore passage 14 in the discharge step. 6) the growth of the above-mentioned bubbles is prevented in a range which does not affect the pump function (quantity, etc.) by the pumps 1A and 1B in a very small amount compared to the amount of suction from 6 to the amount of discharge from the discharge port 7, It is suitably set according to the pump conditions (the nature and state of the liquid) so that the splitting function and the discharge function of the bubble to the outside of the pump chamber are exhibited satisfactorily.

Secondly, each suction port 6 is opened in at least the upper region in the pump chamber 3, as shown in Figs. 1 to 3 and 5, to prevent the growth of bubbles in the suction process and to divide them. It is intended to make the action more effective.

That is, each inlet 6 is a plurality of inlet portions radially opened in a direction orthogonal to the expansion / contraction direction of the pump chamber 3 (horizontal direction, which is the stretch direction of the bellows 4), as shown in FIG. 5. It is branched to (6a, 6b, 6c, 6d). That is, the openings to the pump chamber 3 of each inlet 6 include an inlet portion 6a which is opened toward the upper region in the pump chamber 3, and is spaced at intervals of 90 degrees in the circumferential direction of the valve box 8a. Branch into four inlet sections 6a, 6b, 6c, 6d.

Therefore, in the suction step, the liquid sucked from the suction port 6 into the pump chamber 3 is ejected in four directions from each suction port portion 6a, 6b, 6c, 6d, including the upper region of the pump chamber 3. (State shown in FIGS. 1 and 5 in the first pump 1A or states shown in FIGS. 2 and 3 in the second pump 1B), whereby the liquid in the pump chamber 3 is stirred, Growth, enormous growth is inhibited, or bubbles are finely divided. As a result, the bubbles are discharged more effectively by being accompanied by the outflow liquid from the fine hole passage 14 to the discharge passage 11 in the discharge step.

In addition, the structure of the volumetric pump for liquids which concerns on this invention is not limited to said form, It can improve suitably and change in the range which does not deviate from the basic principle of this invention.

For example, the fine hole passage may not be provided with the nozzle hole 14a but may only pass through the passage forming wall 2a. That is, in the case shown in FIGS. 6 to 8, a fine hole passage 18 is formed in the passage forming wall 2a in the horizontal direction to communicate the discharge passage 11 and the upper region in the pump chamber 3. Doing. The micropore passage 18 has a circular cross section with the same diameter as the micropore passage 14. The pump shown in FIGS. 6-8 has the same structure as that shown in FIGS. 1 to 5 except for the configuration of the micropore passage 18 described above. Therefore, the pumps shown in FIGS. By attaching | subjecting the same code | symbol as FIG. 5, the description is abbreviate | omitted.

In addition, in the above example, the fine hole passages 14 and 18 are configured to be normally open. However, as shown in FIGS. 9 to 12, the discharge passage 11 from the pump chamber 3 to the fine hole passages. A check valve may be arranged to allow liquid flow to the furnace and to block liquid flow in the reverse direction. The pumps shown in FIGS. 9 to 12 allow the liquid flow from the pump chamber 3 to the discharge passage 11 in the micropore passage 19 and prevent the liquid flow in the reverse direction as described below. Although the check valve 20 is arrange | positioned, except for this point, since it has the same structure as shown in FIGS. 1-5, about the structure other than the microhole passage 19 and the check valve 20, it is FIGS. By attaching | subjecting the same code | symbol as 5, the description is abbreviate | omitted.

That is, in the 1st and 2nd pump 1A, 1B shown in FIG. 9 and FIG. 10, the recessed part 2c opened in the upper area | region in the pump chamber 3 in the pump side end surface of the passage formation wall 2a is provided. In addition, the micropore passage 19 penetrates the portion where the recess 2c is formed in the passage forming wall 2a in the horizontal direction to communicate the discharge passage 11 and the upper region in the pump chamber 3 with each other. The check valve 20 is disposed in the recess 2c constituting the pump chamber side end portion of the fine hole passage 19. The micropore passage 19 has a circular cross section with the same diameter as the micropore passages 14 and 18.

As illustrated in FIG. 10, the check valve 20 includes valve boxes 21 and 22 embedded in a recess 2c formed at the pump chamber side end of the passage forming wall 2a and valve boxes 21 and 22. It consists of a valve body 23 built in. The valve box is fitted and fixed to the bottom of the cylindrical valve box body 21 having the valve hole 21a formed at the center of the tip portion and the base end opening of the valve box body 21 so as to close it. It consists of a cover 22 on a disc. The valve box is formed such that the valve hole 21a is opened in the upper region in the pump chamber 3 and the front end surface of the valve box body 21 becomes the same surface as the pump chamber side end face of the passage forming wall 2a. The male screw portion 21b formed on the outer circumferential surface of the box body 21 is fixed to the recessed portion 2c by screwing into the female screw portion 2d formed on the inner circumferential surface of the recessed portion 2c. As shown in FIGS. 10 and 11, a plurality of sets of semicircular grooves 21c extending in the axial direction (horizontal direction) are circumferentially formed on the inner circumferential surface of the valve box body 21. It is formed at equal intervals in the direction. The front end side portion of the lid 22 is fitted to the proximal end opening of the valve box body 21, but as shown in Figs. 10 to 12, the front end side portion is in a state coinciding with each semicircular groove 21c. A plurality of circular holes 22a are formed in this furnace (four in this example). Moreover, as shown in FIGS. 10-12, the circular hole 22b for communicating the whole circular hole 22a and the microhole passage 19 is formed in the base end side part of the lid | cover 22. As shown in FIG. As shown in FIG. 10, the valve hole 21a has the same or approximately the same small diameter as the microhole passage 19, and the proximal end portion has a conical shape toward the inside of the valve box body 21. As shown in FIG. It is enlarged by. The valve body 23 is a cylindrical shape that is inserted into the valve box body 21 so as to be movable in the axial direction (horizontal direction), and the front end portion is formed in a ash-headed conical shape in which the tip that can be fitted into the valve hole 21a is lifted. It is. The valve main body 23 has a closed valve position (first pump 1A) in which the valve main body 23 fits into the valve hole 21a and closes the valve main body 23 by the depressurization action in the pump chamber 3 in the suction step. 9 and 10), and in the discharging step, the valve body 23 is separated from the valve hole 21a by the pressurizing action in the pump chamber 3 to open it. 2 position in the pump 1B). In the open valve position, the valve body 23 is fitted to the lid 22.

Therefore, in the discharging step, since the valve body 23 is positioned at the open valve position and the valve hole 21a is opened, the liquid in the upper region in the pump chamber 3 is discharged in the same manner as in the case described above. A small amount flows out from the semicircular grooves 21c and the circular holes 22a and 22b through the fine hole passage 19 to the discharge passage 11 (in FIGS. 9 and 10 in the second pump 1B). Status). At this time, bubbles in the upper region in the pump chamber 3 are discharged to the discharge passage 11 together with the outflow liquid from the fine hole passage 19 to the discharge passage 11.

Then, when the process shifts from the discharge step to the suction step, the valve main body 23 is positioned at the closed valve position, and the valve hole 21a is closed so that the fine hole passage 19 between the pump chamber 3 and the discharge passage 11 is closed. Communication is cut off. That is, the same suction process as in the case of not providing the fine hole passage 19 is performed.

Therefore, even when the liquid supply fluid is a foamable liquid or a liquid containing bubbles, the amount of bubbles generated or penetrated in the pump chamber 3 in a single suction step is slightly small and the bubbles are small, and therefore, discharged from the suction step. Every time the process is shifted, bubbles are removed together with the discharge liquid from the micropore passage 19 as described above, so that the bubbles in the pump chamber 3 do not grow significantly. Therefore, in the pump shown in FIGS. 9-12, the micropore path 19 is provided so that the check valve 20 may be provided in this, it opens only in a discharging process, and is closed in a suction process. Like the pumps which are normally opened as in the micropore passages 14 and 18 described above, the occurrence of the gas lock phenomenon can be avoided beforehand, and a good liquid feeding function can be exhibited. In addition, since each suction port 6 is opened in the pump chamber 3 at least toward the upper region as in the case of the above-described pump, the growth of bubbles and the splitting effect are also effectively performed in the suction step.

In addition, since the liquid does not flow into the pump chamber 3 from the discharge passage 11 during the suction stroke, a stable discharge amount can be obtained, and the quantitative property of the pump can be surely obtained while avoiding the gas lock phenomenon.

As shown in FIG. 13, the check valve 20 may be arranged on the discharge passage side instead of the pump chamber side of the fine hole passage 19. That is, in the pump shown in FIG. 13, the valve boxes 21 and 22 are arrange | positioned so that the cover 22 may become the same surface as the discharge passage side end surface of the passage formation wall 2a. In this case, the front end of the valve box body 21 is extended so that the front end face of the extended part is the same plane as the pump chamber side end face of the passage forming wall 2a, and the pump chamber is opened from the valve hole 21a to the extended part. The microhole passage 19 opening to the upper region in (3) is formed. Even in this configuration, the same effects as those of the pump shown in FIGS. 9 to 12 can be obtained.

In addition, in any of the pumps described above, the inlet 6 is branched into the plurality of inlet portions 6a, 6b, 6c, and 6d. However, depending on the nature and state of the liquid supplying fluid, Even if the suction liquid is ejected from the suction port 6 at least toward the upper region, the growth and enlargement of the bubbles can be prevented by the stirring action in the upper region in the pump chamber 3. That is, it is also possible to comprise only the suction port part 6a which opens the suction port 6 upward. In addition, when the check valve 20 is not provided, the jet flow or the micropore passage 18 from the nozzle hole 14a of the micropore passage 14 in the suction step, depending on the nature and state of the liquid supply fluid and the like. It is possible to prevent bubbles from growing and enlarging by only the jet flow from the air. In such a case, only the micropore passages 14 and 18 may be provided, and the suction port 6 may not be devised. .

In addition, the present invention can be suitably applied to a single volumetric pump for liquids or to a volumetric pump (for example, a diaphragm pump) other than a bellows pump. Further, as described above, the direction of expansion and contraction of the pump chamber 3 can be suitably applied to various liquid volume pumps in the vertical direction instead of the horizontal direction.

1A: 1st pump (volume pump for liquid)
1B: 2nd pump (volume pump for liquid)
2: pump case (2)
2a: passage forming wall
2b: end wall
2c:
2d: female thread
3: pump room
4: bellows
4a: Perimeter wall of bellows
4b: opening end
4c: bottom wall
4d: annular recess formed in inner peripheral surface of peripheral wall of bellows
5: operation means
5a: supply and discharge mechanism
5b: pressurized air
6: inlet
6a: inlet part
6b: inlet part
6c: inlet part
6d: inlet part
7: discharge port
8: suction side check valve
8a: valve box
8b: valve seat
8c: valve body
8d: spring
9: suction passage
10: discharge side check valve
10a: valve box
10b: valve seat
10c: valve body
10d: spring
11: discharge passage
12: movable plate
13: Between connections
14: micropore passage
14a: nozzle hole (opening of micro hole passage)
15: first member
15a: passage hole
15b: O-ring
16: second member
16a: passage hole
17: third member
17a: passage hole
18: micropore passage
19: micropore passage
20: check valve
21: valve box body (valve box)
21a: valve hole
21b:
21c: semicircular groove
22: cover (valve box)
22a: round hole
22b: round hole
23:

Claims (15)

A pump chamber configured to expand and contract in volume, an inlet port and an outlet port opened in the pump chamber, a suction path connected to the inlet port via a suction side check valve, and a discharge path connected to the discharge port via a discharge side check valve To increase the volume of the pump chamber and to alternate the suction process of supplying the pump chamber from the suction passage through the suction side check valve and the suction port to the pump chamber, and by reducing the volume of the pump chamber, and from the pump chamber to the discharge passage through the discharge port and the discharge side check valve to the discharge passage. In the volumetric pump for liquid handling the liquid generating bubbles in the pump chamber,
The upper region of the pump chamber and the discharge passage are directly connected to each other by the micropore passage, so that a small amount of liquid in the pump chamber is discharged from the micropore passage into the discharge passage in the discharging step to eliminate bubbles in the pump chamber. Volumetric pumps for liquids. The method of claim 1,
A volumetric pump for liquids, wherein the micropore passages open in the pump chamber toward the upper region. The method of claim 1,
A volumetric pump for liquids, characterized in that the inlet is opened at least towards the upper region in the pump chamber. The method of claim 1,
The micropore passage is opened in the pump chamber toward the upper region,
A volumetric pump for liquids, characterized in that the inlet is opened at least towards the upper region in the pump chamber. The method of claim 3,
In the case where the pump chamber is expanded and contracted in the horizontal direction, the inlet port is branched into a plurality of inlet ports which are radially opened in a direction orthogonal to the expansion and contraction direction of the pump chamber. 5. The method of claim 4,
In the case where the pump chamber is expanded and contracted in the horizontal direction, the inlet port is branched into a plurality of inlet ports which are radially opened in a direction orthogonal to the expansion and contraction direction of the pump chamber. 7. The method according to any one of claims 1 to 6,
A volumetric pump for liquids, characterized in that the pump chamber is formed surrounded by bellows of a cylinder having a bottom that is flexible in the horizontal direction. 7. The method according to any one of claims 1 to 6,
A volumetric pump for liquids, characterized in that the liquid in the discharge passage is introduced into the upper region of the pump chamber from the micropore passage in the suction step. 7. The method according to any one of claims 1 to 6,
The pump chamber is formed surrounded by a bellows of a cylinder with a flexible floor in the horizontal direction,
A volumetric pump for liquids, characterized in that the liquid in the discharge passage is introduced into the upper region of the pump chamber from the micropore passage in the suction step. 7. The method according to any one of claims 1 to 6,
A volumetric pump for liquid, comprising a check valve for allowing liquid flow from the pump chamber to the discharge passage and preventing liquid flow in the reverse direction in the micropore passage. 7. The method according to any one of claims 1 to 6,
The pump chamber is formed surrounded by a bellows of a cylinder with a flexible floor in the horizontal direction,
A volumetric pump for liquid, comprising a check valve for allowing liquid flow from the pump chamber to the discharge passage and preventing liquid flow in the reverse direction in the micropore passage. 7. The method according to any one of claims 1 to 6,
The pump chamber is formed surrounded by a bellows of a cylinder with a flexible floor in the horizontal direction,
A volumetric pump for liquids, characterized in that the liquid in the discharge passage is introduced into the upper region of the pump chamber from the micropore passage in the suction step. 7. The method according to any one of claims 1 to 6,
The pump chamber is formed surrounded by a bellows of a cylinder with a flexible floor in the horizontal direction,
A volumetric pump for liquid, comprising a check valve for allowing liquid flow from the pump chamber to the discharge passage and preventing liquid flow in the reverse direction in the micropore passage. 7. The method according to any one of claims 1 to 6,
The pump chamber is formed surrounded by a bellows of a cylinder with a flexible floor in the horizontal direction,
The circumferential wall of the bellows forms a bellows structure with a cross-sectional waveform, and the liquid flowing into the micropore passage from the discharge passage in the suction step is formed by the opening of the micropore passage in the pump chamber. Is ejected toward the inner circumferential surface in the side portion,
A volumetric pump for liquids, characterized in that the liquid in the discharge passage flows a small amount from the micropore passage into the upper region of the pump chamber. 7. The method according to any one of claims 1 to 6,
The pump chamber is formed surrounded by a bellows of a cylinder with a flexible floor in the horizontal direction,
The circumferential wall of the bellows forms a bellows structure with a cross-sectional waveform, and the opening of the micropore passage in the pump chamber is directed toward the inner circumferential surface of the upper portion of the bellows for the liquid flowing into the micropore passage from the discharge passage in the suction step. Erupting,
The micropore passages are opened in a plurality of places in the pump chamber, and the openings thereof extend in the stretching direction of the bellows so that the liquid is ejected toward the annular recess formed in the inner peripheral surface of the peripheral wall of the bellows at least at the final stage of the suction process. Are arranged in parallel with a predetermined interval,
A volumetric pump for liquids, characterized in that the liquid in the discharge passage is introduced into the upper region of the pump chamber from the micropore passage in the suction step.

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