KR20130107117A - Apparatus for synthesizing graphene - Google Patents
Apparatus for synthesizing graphene Download PDFInfo
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- KR20130107117A KR20130107117A KR1020120028956A KR20120028956A KR20130107117A KR 20130107117 A KR20130107117 A KR 20130107117A KR 1020120028956 A KR1020120028956 A KR 1020120028956A KR 20120028956 A KR20120028956 A KR 20120028956A KR 20130107117 A KR20130107117 A KR 20130107117A
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- Prior art keywords
- chamber
- graphene
- cooling
- catalyst metal
- annealing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/24—Stationary reactors without moving elements inside
- B01J19/2445—Stationary reactors without moving elements inside placed in parallel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/24—Stationary reactors without moving elements inside
- B01J19/245—Stationary reactors without moving elements inside placed in series
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
Abstract
The present invention relates to a graphene synthesis device. The present invention is a vacuum unit for vacuuming the catalyst metal; An annealing unit to anneal the catalyst metal; Graphene synthesis unit for synthesizing graphene on the surface of the catalyst metal; And a cooling unit for cooling the graphene.
Description
The present invention relates to nonmetallic elements, and more particularly to an apparatus for synthesizing graphene on catalytic metals.
With the development of science and technology, the development of new materials using nanotechnology is actively progressing. Among them, research on carbon-containing materials such as carbon nanotubes, diamonds, graphite, graphenes, and the like has been intensively studied in the field of nanotechnology. In particular, graphene is a two-dimensional carbon allotrope and has very useful properties that differ from conventional materials. One of the characteristics of graphene is that when electrons move in graphene, it flows as if the mass of electrons is zero. This means that the electrons flow at the speed at which light in the vacuum moves, ie at the speed of light. Graphene has an electron mobility of up to 200,000 cm2 / Vs. Graphene exhibits an unusual half-integer quantum Hall effect on electrons and holes, and a fractional quantum Hall effect when suspended in the air.
The method for preparing graphene includes a peeling method for physically separating a layer of graphene from graphite, a chemical oxidation / reduction method for obtaining graphene by dispersing graphite in a dispersion and chemically reducing the silicon carbide (SiC) substrate. The pyrolysis method, and the chemical vapor deposition method to obtain a graphene layer through high temperature pyrolysis at, are the chemical vapor deposition method is a method that can synthesize the highest quality graphene.
An apparatus for producing graphene by chemical vapor deposition is disclosed in US Patent Publication No. US 2010201012727. The patent discloses an apparatus for manufacturing graphene in one chamber, and when manufacturing the graphene film according to the apparatus, the graphene manufacturing time is long, and thus, the manufacturing cost of the graphene film is high.
The present invention is to provide a graphene synthesis apparatus that the time for synthesizing graphene on the catalytic metal is shortened.
The present invention to achieve the above object,
A vacuum unit for vacuuming the catalyst metal; An annealing unit to anneal the catalyst metal; Graphene synthesis unit for synthesizing graphene on the surface of the catalyst metal; And it provides a graphene synthesis device having a cooling unit for cooling the graphene.
The vacuum unit, the annealing unit, the graphene synthesis unit, and the cooling unit are separated from each other.
A chamber having a catalyst metal mounted therein, the vacuum unit having a vacuum controller for vacuuming the inside of the chamber when the chamber is mounted, and the annealing unit annealing the catalyst metal mounted inside the chamber when the chamber is mounted. And a graphene synthesis controller for synthesizing graphene with a catalyst metal mounted inside the chamber when the chamber is mounted, and the cooling unit is inside the chamber when the chamber is mounted. It may be provided with a cooling controller for cooling the graphene mounted on.
The vacuum controller, the annealing controller, the graphene synthesis controller and the cooling controller are each connected by a conveyor, and the chamber may be moved on the conveyor.
The vacuum controller is provided with an air discharger for discharging the air inside the chamber to the outside when the chamber is mounted, the annealing controller supplies a gas to the chamber and the first heater for heating the chamber when the chamber is mounted The first gas supply and the first gas discharger for discharging the gas in the chamber to the outside is installed, the graphene synthesis controller is equipped with a second heater for heating the chamber and the gas when the chamber is mounted The second gas supplier for supplying and the second gas discharger for discharging the gas in the chamber to the outside is provided, and when the chamber is mounted in the cooling controller is supplied to the chamber by supplying the cooling gas to the inside of the chamber The third gas supply for cooling the graphene and the third gas discharger for discharging the gas inside the chamber to the outside It can chidoel.
By the roll-to-roll method, the catalyst metal may move between the vacuum chamber, the annealing chamber, the graphene synthesis chamber, and the cooling chamber.
And a rotating device for transferring the catalyst metal, wherein the rotating device discharges the catalyst metal from the vacuum chamber and introduces the catalyst metal into the annealing chamber, and discharges the catalyst metal from the annealing chamber to the graphene synthesis chamber. Into the inside of the, the catalyst metal may be discharged from the graphene synthesis chamber and introduced into the cooling chamber.
The graphene synthesis device of the present invention includes a separate device for each process to synthesize graphene on a catalyst metal.
Therefore, the graphene synthesis process may be performed for each process.
As such, according to the present invention, since the graphene synthesis process proceeds step by step, that is, the graphene synthesis is simultaneously performed in each process, the graphene synthesis time is drastically shortened, thereby allowing mass production of graphene. .
1 is a block diagram of a graphene synthesis device according to the present invention.
2 is a cross-sectional view of a catalytic metal.
3 is a cross-sectional view of a material synthesized with graphene on a catalytic metal.
4 is a cross-sectional view schematically showing the structure of a graphene synthesis device according to a first embodiment of the present invention.
5 is a cross-sectional view schematically illustrating a structure of a graphene synthesizing apparatus according to a second embodiment of the present invention.
6 is a cross-sectional view schematically showing the structure of a graphene synthesis device according to a first embodiment of the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. Like reference numerals in the drawings denote like elements.
1 is a block diagram of a graphene synthesis device according to the present invention. Referring to FIG. 1, the
The
The annealing
The
The
As shown in FIG. 1, the
That is, in the prior art, the synthesis time of graphene (221 of FIG. 3) is long by performing all four processes in one chamber, whereas the present invention simultaneously synthesizes graphene (221 of FIG. 3) by process. Therefore, the synthesis time of the graphene (221 of FIG. 3) can be significantly shortened. This enables mass production of graphene (221 in FIG. 3).
4 is a cross-sectional view schematically showing the structure of a graphene synthesis device according to a first embodiment of the present invention. Referring to FIG. 4, the graphene synthesis apparatus includes a
An
The
The
As the
The
When an electrode (not shown) is installed on the
In the
The
The
5 is a cross-sectional view schematically illustrating a structure of a graphene synthesizing apparatus according to a second embodiment of the present invention. Referring to FIG. 5, the graphene synthesis apparatus includes a vacuum chamber 111b, an annealing chamber 121b, a graphene synthesis chamber 131b, and a cooling chamber 141b. The vacuum chamber 111b, the annealing chamber 121b, the graphene chamber 131b and the cooling chamber 141b are each fixedly installed in one place.
An
The
Instead of separately installing the vacuum chamber 111b, the inside of the annealing chamber 121b may be vacuumed by using the
The graphene synthesis chamber 131b is provided with a
When an electrode (not shown) is installed on the graphene synthesis chamber 131b and a radio frequency (RF) signal is applied to the electrode, free electrons are emitted from the electrode to form an interior of the graphene synthesis chamber 131b. It collides with atoms injected into, for example, argon atoms to ionize argon atoms. The electrons emitted during the generation of argon ions and the free electrons supplied from the electrode continually accelerate and collide to generate more ions, while on the other hand the recombination of electron-ions, the inner wall of the electrode and graphene synthesis chamber 131b The electrons are also destroyed due to collision with them. When the electron generation and extinction ratios are the same, a stable plasma is formed. In this state, when a gas containing carbon is injected into the graphene synthesis chamber 131b, argon ions collide with the carbon gas to dissociate the carbon. Dissociated carbon is deposited on the surface of the catalytic metal (211 of FIGS. 2 and 3) to form graphene (221 of FIG. 3).
The
The graphene synthesis apparatus illustrated in FIG. 5 includes material supply devices 161 and 162 to transfer the catalytic metal (211 in FIGS. 2 and 3) to an adjacent chamber in a roll to roll manner. The material supply apparatuses 161 and 162 wind and support one side of the catalyst metal (211 of FIGS. 2 and 3) and wind the rotatable first roll 161 and the other side of the catalyst metal (211 of FIGS. 2 and 3). And a rotatable second roll 162. Although not shown in the figure, the first roll 161 and the second roll 162 may be rotated by a motor, a belt, a chain, or the like. The catalytic metal (211 in FIGS. 2 and 3) passes through the inlets and outlets of the
6 is a cross-sectional view schematically illustrating a structure of a graphene synthesizing apparatus according to a third embodiment of the present invention. Referring to FIG. 6, the graphene synthesizing apparatus includes a
The
In the graphene synthesizing apparatus of FIG. 6, in addition to the method of flowing out the catalytic metal in each chamber to proceed with the process, a method of directly transferring the respective chambers by equally matching each process lead time may be possible.
Four arms of the
Since the structure of the
Although the present invention has been described with reference to the embodiments shown in the drawings, it is to be understood that various modifications and equivalent embodiments may be made by those skilled in the art without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.
Claims (12)
An annealing unit to anneal the catalyst metal;
Graphene synthesis unit for synthesizing graphene on the surface of the catalyst metal; And
Graphene synthesizing apparatus comprising a cooling unit for cooling the graphene.
The catalyst metal is graphene synthesis device, characterized in that the movement in the order of the vacuum unit, annealing unit, graphene synthesis unit and the cooling unit.
Graphene synthesis device, characterized in that the vacuum unit, annealing unit, graphene synthesis unit and the cooling unit are separated from each other.
A chamber having a catalyst metal mounted therein, the vacuum unit having a vacuum controller for vacuuming the inside of the chamber when the chamber is mounted, and the annealing unit annealing the catalyst metal mounted inside the chamber when the chamber is mounted. And a graphene synthesis controller for synthesizing graphene with a catalyst metal mounted inside the chamber when the chamber is mounted, and the cooling unit is inside the chamber when the chamber is mounted. Graphene synthesizing apparatus comprising a cooling controller for cooling the graphene mounted on.
Graphene synthesizing apparatus, characterized in that the vacuum controller, the annealing controller, the graphene synthesis controller and the cooling controller are each connected by a conveyor, the chamber is moved on the conveyor.
The vacuum controller is provided with an air discharger for discharging the air inside the chamber to the outside when the chamber is mounted, the annealing controller supplies a gas to the chamber and the first heater for heating the chamber when the chamber is mounted The first gas supply and the first gas discharger for discharging the gas in the chamber to the outside is installed, the graphene synthesis controller is equipped with a second heater for heating the chamber and the gas when the chamber is mounted The second gas supplier for supplying and the second gas discharger for discharging the gas in the chamber to the outside is provided, and when the chamber is mounted in the cooling controller is supplied to the chamber by supplying the cooling gas to the inside of the chamber The third gas supply for cooling the graphene and the third gas discharger for discharging the gas inside the chamber to the outside Graphene synthesizer such a manner that value.
The cooling chamber is a graphene synthesizing apparatus, characterized in that for cooling the graphene by attaching a cooling plate to the cooling chamber without the third gas supply and the third gas discharger.
Graphene comprising a vacuum chamber for vacuuming the catalyst metal, an annealing chamber for annealing the catalyst metal, a graphene synthesis chamber for synthesizing graphene to the catalyst metal, and a cooling chamber for cooling the graphene Synthetic device.
The catalytic metal is moved between the vacuum chamber, the annealing chamber, the graphene synthesis chamber, and the cooling chamber by a roll-to-roll method.
A rotating device for transferring the catalyst metal,
The rotating device discharges the catalyst metal from the vacuum chamber and introduces the catalyst metal into the annealing chamber, and discharges the catalyst metal from the annealing chamber and introduces the catalyst metal into the graphene synthesis chamber. Graphene synthesizing apparatus characterized in that the catalyst metal is discharged and introduced into the cooling chamber.
The vacuum chamber, the annealing chamber, the graphene synthesis chamber and the cooling chamber is characterized in that the transfer directly to match the same process lead time.
The annealing controller and the graphene synthesis controller, respectively, graphene synthesizing apparatus having a device capable of controlling the total pressure in the chamber by controlling the flow rate of gas flowing into or out of the chamber.
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KR1020120028956A KR20130107117A (en) | 2012-03-21 | 2012-03-21 | Apparatus for synthesizing graphene |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107236938A (en) * | 2017-07-11 | 2017-10-10 | 江苏星特亮科技有限公司 | A kind of continous way membrane production equipment |
WO2023121714A1 (en) * | 2021-12-22 | 2023-06-29 | General Graphene Corporation | Novel systems and methods for high yield and high throughput production of graphene |
US11718527B2 (en) | 2021-12-22 | 2023-08-08 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
-
2012
- 2012-03-21 KR KR1020120028956A patent/KR20130107117A/en not_active Application Discontinuation
Cited By (9)
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CN107236938A (en) * | 2017-07-11 | 2017-10-10 | 江苏星特亮科技有限公司 | A kind of continous way membrane production equipment |
WO2023121714A1 (en) * | 2021-12-22 | 2023-06-29 | General Graphene Corporation | Novel systems and methods for high yield and high throughput production of graphene |
US11718527B2 (en) | 2021-12-22 | 2023-08-08 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
US11718526B2 (en) | 2021-12-22 | 2023-08-08 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
US11753304B2 (en) | 2021-12-22 | 2023-09-12 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
US11827519B2 (en) | 2021-12-22 | 2023-11-28 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
US11858813B2 (en) | 2021-12-22 | 2024-01-02 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
US11866334B2 (en) | 2021-12-22 | 2024-01-09 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
US11866333B2 (en) | 2021-12-22 | 2024-01-09 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
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