KR20130100476A - Oil drip tray for lcd substrate transfer and its manufacturing method - Google Patents

Oil drip tray for lcd substrate transfer and its manufacturing method Download PDF

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Publication number
KR20130100476A
KR20130100476A KR1020120021699A KR20120021699A KR20130100476A KR 20130100476 A KR20130100476 A KR 20130100476A KR 1020120021699 A KR1020120021699 A KR 1020120021699A KR 20120021699 A KR20120021699 A KR 20120021699A KR 20130100476 A KR20130100476 A KR 20130100476A
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KR
South Korea
Prior art keywords
lcd substrate
substrate transport
transport robot
oil
support plate
Prior art date
Application number
KR1020120021699A
Other languages
Korean (ko)
Inventor
서정혁
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서정혁
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 서정혁 filed Critical 서정혁
Priority to KR1020120021699A priority Critical patent/KR20130100476A/en
Publication of KR20130100476A publication Critical patent/KR20130100476A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0058—Means for cleaning manipulators, e.g. dust removing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)

Abstract

The oil support plate for the LCD substrate transport robot according to the present invention is formed in a plate shape and detachably provided at an opening of the bottom of the LCD substrate transport robot joint, and a collecting groove is formed at the center to collect the oil flowing out of the LCD substrate transport robot. The circumference of the collection groove includes a body having one or more auxiliary grooves formed thereon and an upper surface of the body, and an absorption sheet for absorbing oil flowing out of the LCD substrate transport robot.
In addition, the method for manufacturing an oil support plate for an LCD substrate transport robot according to the present invention includes applying a pressure using a press to cut the body, and forming a collecting groove in the center of the body and at least one auxiliary groove around the collecting groove. And forming an absorbent sheet attaching the absorbent sheet to the upper surface of the body manufactured by the pressing step.

Description

Oil Drip Tray for LCD Substrate Transfer and Its Manufacturing Method {Oil Drip Tray for LCD Substrate Transfer and Its Manufacturing Method}

The present invention relates to an oil support plate for an LCD substrate transport robot and a method for manufacturing the same for absorbing and collecting oil flowing out of the LCD substrate transport robot, and more particularly, is formed in a plate shape and detached from the opening of the joint substrate transport robot joint bottom. The present invention relates to an oil support plate for an LCD substrate transport robot, and a method of manufacturing the same.

LCD liquid crystal display (LCD) substrates need to be handled precisely and stably in nature, and therefore, LCD substrate transport robots are widely used when transporting LCD substrates. In addition, the LCD substrate transport robot is provided with a plurality of joints to ensure the degree of freedom during transport. Therefore, it is necessary to continuously supply a large amount of lubricant to the joint site to prevent maintenance, repair and corrosion of the joint.

As a result, when the LCD transport robot moves, oils such as lubricating oil may accumulate on the bottom of the joint. In many cases, they leaked outside and contaminated the site.

In the related art, in order to solve such a problem, an oil absorbing cloth was attached to the joint bottom of the LCD substrate transport robot. However, when the maximum absorption amount is exceeded, the effect is not obtained and the replacement is not easy. There was a troublesome problem.

In addition, the replacement of the worker's clothing, etc., of course, there is a problem that the oil flows during the replacement process, such as the floor is contaminated.

Therefore, a method for solving the above problems is required.

An object of the present invention is to solve the above-described problems, and to solve the problem that the oil flowing out of the LCD substrate transport robot causes the failure of the LCD substrate transport robot or pollutes the workplace.

The problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

The oil support plate for the LCD substrate transport robot of the present invention for solving the above process is formed in a plate shape so as to be detachable to the opening of the bottom of the LCD substrate transport robot joint, the oil flowing out of the LCD substrate transport robot in the center portion A collecting groove to be collected is formed, and a circumference of the collecting groove includes a body having one or more auxiliary grooves formed thereon and an upper surface of the body, the absorbing sheet absorbing oil flowing out of the LCD substrate transport robot.

And the plurality of auxiliary grooves may be formed radially.

In addition, the auxiliary groove may be formed in a ring shape along the circumference of the collecting groove.

At least one of the collecting groove and the auxiliary groove may be formed to have a deeper depth toward the center.

In addition, the body is formed so as to have an area larger than the opening of the bottom of the LCD substrate transport robot joint, at least one screw hole for fixing the body around the opening of the bottom of the LCD substrate transport robot joint Can be formed.

And a circumferential portion of the body, there may be provided with a sealing member for preventing the flow of oil to the outside when the body is fixed to the opening of the bottom of the LCD substrate transport robot joint.

In addition, the absorbent sheet may be detachably provided on the upper surface of the body.

And in order to solve the above process, the manufacturing method of the oil support plate for the LCD substrate transport robot of the present invention, applying a pressure using a press machine to cut the body, at the same time forming a collecting groove in the center of the body and at the same time around the collecting groove And an absorbent sheet attaching step of attaching an absorbent sheet to an upper surface of the body manufactured by the pressing step, and forming a one or more auxiliary grooves.

In addition, in the pressing step, one or more screw holes may be further formed in the circumference of the body.

And after the pressing step, it may further include a sealing member attaching step of attaching a sealing member to the circumference of the body.

In order to solve the above problems, an oil support plate for an LCD substrate transport robot of the present invention and a manufacturing method thereof have the following effects.

First, there is an advantage that the oil flowing out of the LCD substrate transport robot can be accommodated stably and hygienically so as not to flow to the outside.

Second, even when the absorption amount of the absorbent sheet is exceeded, the oil can be collected by the collecting groove and the auxiliary groove, there is an advantage that can be used for a longer time.

Third, since the removable is easy to replace, there is an advantage that can reduce the labor of the worker.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims.

1 is a perspective view showing a state of the LCD substrate transport robot;
Figure 2 is a perspective view showing the overall appearance of the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention;
Figure 3 is an exploded perspective view showing the structure of the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention;
Figure 4 is a perspective view showing the body of the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention;
5 is a flowchart illustrating a process of manufacturing an oil support plate for an LCD substrate transport robot according to the first embodiment of the present invention;
Figure 6 is a perspective view showing the body of the oil support plate for the LCD substrate transport robot according to a second embodiment of the present invention; And
7 is a cross-sectional view showing the body structure of the oil support plate for the LCD substrate transport robot according to the second embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and further description thereof will be omitted.

First, referring to Figure 1 is shown a state of the LCD substrate transport robot (1). As shown, the LCD substrate transporting robot 1 has at least one arm 10 for transporting the LCD substrate, and the arm 10 has a plurality of joints 15 for freedom in transport.

As described in the technical background that is the background of the invention, in order to prevent the maintenance, repair and corrosion of the joint, a large amount of lubricating oil is continuously supplied to the joint site, and thus the lubricant when driving the LCD substrate transport robot 1 The oil on your back will collect at the bottom of the joint.

Therefore, in the past, the cloth for absorbing oil is attached to the bottom surface of the joint 15 of the arm 10, but this is not only an effect when the maximum absorption amount is exceeded, and there is a problem in that the work is not easy to replace.

Therefore, in the case of the present invention, by forming an opening in the bottom surface of the joint (15) of the arm (10), it is possible to solve the above problems by simply removing the oil support plate.

2, the overall appearance of the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention is shown.

As shown, the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention includes a body 110 and the absorbent sheet (120).

The body 110 is formed in a plate shape, and is detachably provided at the opening of the joint 15 of the LCD substrate transport robot 1. That is, the body 110 may be selectively attached or detached to open and close the opening of the bottom of the LCD substrate transport robot joint (15).

And the body 110 may be formed in various forms, in the case of the present embodiment, the body 110 is formed in a circular shape, and therefore, the opening of the joint 15 is also preferably formed in a circular shape to correspond thereto.

In addition, although not shown in Figure 2 is covered by the absorbent sheet 120, the collecting groove and the auxiliary groove are formed in the body, which will be described later.

Absorption sheet 120 is provided on the upper surface of the body 110, and serves to absorb the oil flowing out of the LCD substrate transport robot (1). That is, the absorbent sheet 120 may be any material as long as it has absorbency, and may be formed in various shapes.

And the absorbent sheet 120 is provided on the upper surface of the body 110 to be exposed to the inside of the housing of the LCD substrate transport robot 1 when fixing the body 110 in the opening. Therefore, when oil such as lubricating oil flows into the housing, it can be absorbed.

In the present embodiment, the absorbent sheet 120 is formed in a circular shape similar to the body 110, and detachably bonded to the body 110. However, unlike the present embodiment, the absorbent sheet 120 may be provided on the upper surface of the body 110 in various ways, and of course, is not fixed to the body 110 and is simply mounted on the upper surface of the body 110. It may be provided as.

3, the structure of the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention is shown.

As shown, in this embodiment, the absorbent sheet 120 is located on the upper surface of the body 110, the body 110 is the bottom of the joint 110 of the LCD substrate transport robot (1) on the periphery of the body 110 The sealing member 130 is further provided to prevent the oil from flowing out when fixed to the opening of the.

Sealing member 130 is formed between the body 110 and the housing of the LCD substrate transport robot 1 is formed of a material capable of sealing the opening so that liquid such as rubber does not leak.

In addition, at least one screw hole (112, 132) for fixing the body 110 to the periphery of the bottom of the joint substrate 15 of the LCD substrate transport robot (1) in the circumferential portion and the sealing member 130 of the body (110) Is formed. That is, when the body 110 has an area larger than the opening of the bottom of the joint substrate 15 of the LCD substrate transport robot 1, it may be fixed by passing a screw through the screw holes 112 and 132.

As described above, the collecting groove 114 and the auxiliary groove 116 are formed in the body 110. This will be described with reference to FIG. 4.

Referring to Figure 4, the body 110 of the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention is shown in detail.

As shown, the collecting groove 114 is formed in the central portion of the body 110, it can be seen that a plurality of auxiliary grooves 116 are formed along the circumference of the collecting groove 114.

The collecting groove 114 has a shape that is largely recessed in the central portion of the body 110 and may accommodate the oil flowing out when the maximum oil absorption amount of the absorbent sheet 120 is exceeded. That is, even if the exchange of the absorbent sheet 120 is delayed, the collecting groove 114 may further collect oil that the absorbent sheet 120 does not absorb to prevent leakage of the oil. In addition, the collecting groove 114 may be formed by simultaneously applying pressure to the central portion when forming the body 110 using a press.

However, when forming the collecting groove 114 by the press, there is a problem that the entire bending may occur in the body (110). In this case, it may be difficult to smoothly fix the body 110 to the housing of the LCD substrate transport robot (1), there is room for separation when fixed. Therefore, in the present invention, by forming the auxiliary groove 116 together with the collecting groove 114 at the same time to disperse the pressure it is possible to prevent the bending of the body 110 occurs.

Auxiliary groove 116 can be formed at the same time when forming the body 110 using a press machine, similar to the collecting groove 114, in the present embodiment, the auxiliary groove 116 is collected to properly distribute the pressure of the press machine A plurality of radially around the groove 114 is formed. As a result, it is possible to manufacture a good product so that the body 110 is not bent.

In addition, the auxiliary groove 116, in addition to such a role, plays a role of auxiliary storage of excess oil when the oil collecting capacity of the collecting groove 114 is exceeded.

The oil support plate for the LCD substrate transport robot according to the first embodiment has been described above. Hereinafter, the method for manufacturing the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention will be described.

The process of manufacturing the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention may be represented by a flowchart as shown in FIG. 5.

First, while cutting the body 110, the pressing step (S1) for forming the collecting groove 114 and the auxiliary groove 116 is performed. In this step, the body 110 having a circular shape is cut from the raw material, and at the same time the collecting groove 114 and the auxiliary groove 116 is recessed by pressure.

In addition, in this step, it is a matter of course that the screw holes 112 and 132 can be formed at the periphery of the body 110 at the same time.

Next, the absorbent sheet attaching step S2 for attaching the absorbent sheet 120 to the upper surface of the body 110 manufactured by the press step S1 is performed. In this step, the absorbent sheet is cut into an appropriate shape and attached to the upper surface of the body 110 with an adhesive or the like.

Meanwhile, after the pressing step S1, a sealing member attaching step S3 for attaching the sealing member 130 to the circumference of the body 110 may be further performed. The sealing member attaching step S3 may be performed before the absorbing sheet attaching step S2 or may be performed later.

Through the above process, the oil support plate for the LCD substrate transport robot according to the first embodiment of the present invention can be manufactured.

Next, Figure 6 shows the body 210 of the oil support plate for the LCD substrate transport robot according to a second embodiment of the present invention.

In the present embodiment, the absorbing sheet and the sealing member are provided in the same manner as in the first embodiment, and thus description thereof has been omitted. Since the collecting grooves 214 are formed in the center thereof, the description thereof will be omitted because the same as in the first embodiment.

However, in the case of the second embodiment, the shape of the auxiliary groove 216 is different from that of the first embodiment. As shown, the auxiliary groove 216 of the second embodiment is formed in a ring shape along the circumference of the collecting groove 214, it has a form that is connected as a whole.

In the case of this embodiment, the storage capacity of the auxiliary groove 216 is increased as compared with the first embodiment, and thus it is possible to accommodate more oil overflowing from the collecting groove 214.

7, the cross section of the body 210 of the oil support plate for the LCD substrate transport robot according to the second embodiment of the present invention.

As shown, an auxiliary groove 216 is formed around the collecting groove 214, and in particular, the collecting groove 214 is formed to become deeper toward the center. Therefore, when the worker separates and transports the housing of the LCD substrate transporting robot 1 for the treatment of the oil support plate, the oil can be stably received.

In addition, in the present embodiment, only the collecting groove 214 is formed so as to become deeper toward the center, this can be applied to the auxiliary groove 216, of course.

It will be apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit or scope of the invention as defined in the appended claims. It is obvious to them. Therefore, the above-described embodiments are to be considered as illustrative rather than restrictive, and the present invention is not limited to the above description, but may be modified within the scope of the appended claims and equivalents thereof.

1: LCD substrate transport robot 10: arm
15: joint 110: body
112: screw hole 114: collecting groove
116: auxiliary hole 120: absorption sheet
130: sealing member 132: screw hole

Claims (10)

It is formed in a plate shape is detachably provided at the opening of the bottom of the LCD substrate transport robot joint, the central portion is formed with a collecting groove for collecting the oil flowing out of the LCD substrate transport robot, at least one auxiliary groove is formed around the collection groove Formed body; And
An absorption sheet provided on an upper surface of the body to absorb oil flowing out of the LCD substrate transport robot;
LCD substrate for transporting oil supporting plate comprising a. The method of claim 1,
The auxiliary groove oil support plate for a plurality of LCD substrate transport robot formed radially. The method of claim 1,
The auxiliary groove is an oil support plate for an LCD substrate transport robot is formed in a ring shape along the circumference of the collecting groove. The method of claim 1,
At least one of the collecting groove and the auxiliary groove is an oil support plate for an LCD substrate transport robot is formed to be deeper toward the center. The method of claim 1,
The body is formed to have a larger area than the opening of the LCD substrate transport robot joint,
An oil support plate for an LCD substrate transport robot having at least one screw hole formed at a circumference of the body such that the body is fixed around an opening of a bottom of the LCD substrate transport robot joint. The method of claim 1,
In the circumference of the body,
An oil support plate for an LCD substrate transport robot having a sealing member to prevent oil from flowing out when the body is fixed to an opening of the bottom of the LCD substrate transport robot joint. The method of claim 1,
The absorbent sheet is an oil support plate for an LCD substrate transport robot that is detachably provided on the upper surface of the body. A press step of cutting the body by applying pressure using a press, and forming at least one auxiliary groove around the collecting groove while forming a collecting groove at the center of the body; And
An absorbent sheet attaching step of attaching an absorbent sheet to an upper surface of the body manufactured by the pressing step;
Manufacturing method of the oil support plate for the LCD substrate transport robot comprising a. The method of claim 1,
The press step,
A method for manufacturing an oil support plate for an LCD substrate transport robot further forming one or more screw holes in the circumference of the body. The method of claim 1,
After the press step,
And a sealing member attaching step of attaching a sealing member to the circumference of the body.
KR1020120021699A 2012-03-02 2012-03-02 Oil drip tray for lcd substrate transfer and its manufacturing method KR20130100476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120021699A KR20130100476A (en) 2012-03-02 2012-03-02 Oil drip tray for lcd substrate transfer and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120021699A KR20130100476A (en) 2012-03-02 2012-03-02 Oil drip tray for lcd substrate transfer and its manufacturing method

Publications (1)

Publication Number Publication Date
KR20130100476A true KR20130100476A (en) 2013-09-11

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108555966A (en) * 2018-04-18 2018-09-21 郑州旭飞光电科技有限公司 Glass production machine people and its oil leak catching device
JP2019188575A (en) * 2018-04-27 2019-10-31 ファナック株式会社 Parallel link robot

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108555966A (en) * 2018-04-18 2018-09-21 郑州旭飞光电科技有限公司 Glass production machine people and its oil leak catching device
JP2019188575A (en) * 2018-04-27 2019-10-31 ファナック株式会社 Parallel link robot
CN110405728A (en) * 2018-04-27 2019-11-05 发那科株式会社 Parallel link robot
US11420343B2 (en) 2018-04-27 2022-08-23 Fanuc Corporation Parallel link robot

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