KR20130087340A - Angle valve equipped with functions for open-and-shut indicate and locking - Google Patents

Abstract

PURPOSE: An angle valve having an opening/closing condition displaying function and a locking function is provided to allow a user to visually identify an opened or closed condition thereof before starting to operate a semiconductor production facility after measuring a vacuum level in a semiconductor manufacturing facility, thereby improving efficiency and accuracy in work. CONSTITUTION: An angle valve having an opening/closing condition displaying function and a locking function includes an opening/closing condition displaying member and an opening/closing condition displaying panel driving part. The opening/closing condition displaying member at the upper side of a handle rotates on the rotational center of the handle, and has an opening/closing condition displaying panel (51) indicating whether or not the valve is opened or closed. The opening/closing displaying panel driving part rotates the opening/closing condition displaying panel in order to display a closing sign on the display part of the opening/closing condition displaying panel when an opening/closing plate adheres to a valve sheet in order to seal the valve, and rotates the opening/closing condition displaying panel in order to display an opening sign on the display part of the opening/closing condition displaying panel when the opening/closing plate is separated from the valve sheet so that the valve is started to be opened. A locking unit (L) between the lower side and the upper body (20) of the opening/closing condition displaying panel locks the opening or closing condition of the valve.

Description

ANGLE VALVE EQUIPPED WITH FUNCTIONS FOR OPEN-AND-SHUT INDICATE AND LOCKING}

The present invention relates to an angle valve having an opening and closing display and a locking function,

More specifically, it relates to an angle valve installed in a vacuum chamber or a connecting pipe of a vacuum chamber and a vacuum pump in a semiconductor manufacturing facility, and connects a vacuum pressure measuring gauge. The present invention relates to an angle valve having a locking function for preventing the opening and closing in a closed or open state, and preventing the accident.

An angle valve, especially an angle valve for vacuum pressure measurement, is installed in a semiconductor manufacturing facility equipped with a vacuum pump, which is essential for maintaining a vacuum level inside the chamber, by installing a vacuum gauge to measure vacuum pressure if necessary, Is used for the measurement.

The vacuum pump provided in the semiconductor manufacturing facility is divided into a roughing pump, a high vacuum pump, and an ultra-high vacuum pump depending on the ability to make a vacuum state.

The roughness of the roughing pump refers to a pump having the ability to create a vacuum up to about 1 × 10 ^-3 Torr. The high vacuum pump is about 1 × 10 ^-3 Torr to 1 × 10 ^-8 Torr, and the ultra high vacuum pump is about It is a pump having the ability to make a vacuum of 1 × 10 ^-8 Torr or less.

1 is a schematic diagram of a vacuum equipment according to a general semiconductor production equipment technology. 1, a vacuum equipment (system) of a semiconductor production facility comprises a chamber 1 in which a work is performed, a high vacuum pump 4 for making the chamber 1 in a vacuum state, and a roughing pump 6 do. A valve 3 is provided between the chamber 1 and the high vacuum pump 4, between the chamber 1 and the roughing pump 6, and between the high vacuum pump 4 and the roughing pump 6, 5 and 7 are connected to each other, and an angle valve is installed on one side of the body of the chamber 1 or between the pumps 4 and 6 and the valves 3 and 7. The angle valve is normally kept in a "locked" state, and a vacuum gauge 2 is mounted for vacuum pressure measurement only when necessary, and the pressure inside the vacuum system is measured by opening the angle valve.

In FIG. 1, reference numeral 8 denotes a gas supply container 8 for supplying N2 gas or the like when the chamber 1 is brought into vacuum at atmospheric pressure, and reference numeral V denotes a gas supply container 8 and a chamber. The valve V which opens and closes between (1) is shown.

However, the angle valve with the vacuum gauge in this way should be kept closed at all times except when the degree of vacuum measurement is required (process preparation step). That is, the user (manager) opens the angle valve only when the vacuum degree measurement operation is performed, and makes the vacuum gauge communicate with the chamber to measure the vacuum degree. When the vacuum degree measurement operation is completed, .

Therefore, the operator or manager must recheck whether the angle valve is opened or closed when the vacuum measurement is completed, and it is not necessary to visually check whether the angle valve is opened or closed. This presence exists as a factor which reduces work efficiency.

In particular, even if the angle valve is only slightly opened, the internal pressure (vacuum degree) of the vacuum pipe and the main chamber connected to the vacuum pump during semiconductor production is changed, which causes product defects during various complicated processes in the production of semiconductors. If this occurs, it can lead to enormous cost loss, and can also cause a lot of disruption to semiconductor production due to deterioration of the vacuum pump and shortened life. Therefore, the angle valve is required not only to visually identify whether the valve is opened or closed, but also to be able to be displayed in an "open state" even if it is slightly opened.

It is furthermore important to introduce a locking function to prevent random opening and closing in the closed or open state.

The present invention has been made to solve the problems of the prior art as described above, the angle for the vacuum pressure measurement of the semiconductor manufacturing equipment that can visually check whether the angle valve opening and closing before the operator starts the semiconductor production equipment operation The purpose is to propose a valve.

In particular, the angle valve for measuring the vacuum pressure according to the present invention is intended to be displayed in the "open state" even if a little open.

Further object of the present invention is to provide a locking means for preventing any opening and closing in the closed or open state.

To achieve the above object, the angle valve having the opening and closing display and locking function according to the present invention is

An upper body accommodating the connection shaft, a handle for actuating the connection shaft, and a lower body having a first connection port and a second connection port connected to each other, a connection shaft having an opening and closing plate for opening and closing the first connection port, In the angle valve,

An opening / closing display member having an opening / closing display panel coupled to an upper surface of the handle so as to be rotatable based on a rotational center point of the handle and displaying whether the valve is opened or closed;

When the valve is in close contact with the valve seat and the valve is closed, the opening / closing display panel is rotated so that a “close” mark is displayed on the display part of the opening / closing display panel. It is provided with an opening and closing display panel driver to rotate the display panel, so that the "open" display appears on the display portion of the opening and closing display panel,

Locking means for fixing a closed state or an open state is provided between the lower surface of the opening and closing display panel and the upper body.

In addition, in the angle valve having the opening and closing display and locking function according to the present invention

The locking means is provided between the handle and the upper body and the elevating member supported by the elastic means, the female or male first locking portion provided on the elevating member, coupled to the first locking portion and provided on the handle Made of a male or female second locking portion,

Furthermore, the locking means further includes a slot formed in the upper body of the valve, the lifting portion and the locking portion continuously formed, and a guide pin through the coupling hole of the lifting member to be coupled to the slot, and the lifting member lifts and lowers the lifting member. And according to the left and right rotation, the guide pin is preferably located in the lifting or locking portion of the slot to perform a locking or unlocking function.

On the other hand, the angle valve according to the present invention,

In the angle valve for measuring the vacuum pressure of a semiconductor manufacturing equipment comprising an upper and lower body, a connecting shaft for driving a valve, and a handle for rotating the connecting shaft,

An opening / closing display panel coupled to an upper surface of the handle to display whether the valve is opened or closed;

When the valve is in close contact with the valve seat and the valve is closed, the opening / closing display panel is rotated so that a “close” indication appears on the display part of the opening / closing display panel, and the opening / closing plate is detached from the valve seat and opened and closed when the valve starts to open. And an opening / closing display panel driving unit which rotates the display panel so that an “open” display appears on the display unit of the opening / closing display panel.

The angle valve for vacuum pressure measurement according to the present invention configured as described above can visually check the open / closed state of the angle valve before starting the semiconductor production equipment operation after the vacuum degree measuring operation in the semiconductor manufacturing equipment, thereby improving work efficiency as well as working accuracy. Can be improved.

Furthermore, since the angle valve according to the present invention is marked as "open state" even when the valve is open even a little, it is possible to minimize the cause of product defects during the production of the semiconductor, and to reduce the enormous cost loss and furthermore, the vacuum. It is a useful invention that can maintain the performance and life of the pump. In addition, by the locking means to prevent the arbitrary opening and closing in the closed or open state can increase the safety and operating reliability.

1 is a conceptual diagram showing the configuration of a vacuum system in a semiconductor manufacturing facility, and is an explanatory diagram for explaining the installation position and function of an angle valve according to the present invention.
Figure 2 is an external perspective view of the angle valve according to a preferred embodiment of the present invention
3 is a cross-sectional view showing the open state of the angle valve according to the present invention, and the "open" display state of the opening and closing display panel in the open state.
4 is a cross-sectional view showing a state in which the angle valve according to the present invention starts to close, and shows an open / close display state at this time.
5 is a cross-sectional view showing a closed state of the angle valve according to the present invention, and a "closed" display state of the opening and closing display panel in this state.
Fig. 6 is a sectional view showing a part of an open state of the angle valve according to the present invention, and shows an “open” display state of the open / close display panel in this state.
Figure 7 is a perspective view of the combination angle valve in accordance with another embodiment of the present invention.
8 and 9 are exploded perspective views and sectional views of the main parts of FIG. 7, respectively.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings.

The present invention may be modified in various ways and may have various forms, and thus embodiments (or embodiments) will be described in detail in the text. However, this is not intended to limit the present invention to the specific form disclosed, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

In the drawings, the same reference numerals are used for the same reference numerals, and in particular, the numerals of the tens and the digits of the digits, the digits of the tens, the digits of the digits and the alphabets are the same, Members referred to by reference numerals can be identified as members corresponding to these standards.

In addition, in the drawings, the components are exaggerated in size (or thickness), in size (or thickness), in size (or thickness), or in a simplified form or simplified in view of convenience of understanding. It should not be.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, the term " comprising " or " consisting of ", or the like, refers to the presence of a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

In describing the angle valve for measuring the vacuum pressure of the semiconductor manufacturing equipment according to the present invention, a non-strict approximate direction reference is specified with reference to FIG. 3 for convenience.

In the state as shown, the top and bottom, left and right, front and rear are divided, and in the detailed description and claims of the invention related to other drawings, the direction is specified and described according to this criterion.

As shown in FIG. 2 which is an external perspective view of an angle valve according to an embodiment, the angle valve according to the present invention is

A valve lower body 10 having a first connection port 11 and a second connection port 12 and an opening and closing plate 13 for opening and closing the first connection port 11 in close contact with / An upper body 20 for supporting the connection shaft 15 in a screwed manner, and a handle 30 for rotating the connection shaft 15. This basic configuration is the same as the known angle valve. The upper body 20 and the lower body 10 are assembled by a lid 25 and are tightly coupled by an assembly screw 26.

When the angle valve is used for the vacuum pressure measurement of the semiconductor manufacturing equipment, the first connector 11 is usually connected to a vacuum pipe or a vacuum chamber, the gauge is connected to the second connector (12).

Figure 3 is a cross-sectional view showing an open state of the angle valve according to the present invention, as shown in the metal bellows 16, the opening and closing plate 13 and the packing provided in the lower portion of the opening and closing plate in FIG. Description of general components of the angle valve not related to the main characteristic configuration of the invention will be omitted.

The present invention includes the opening and closing display member 50 including the opening and closing display panel 51 which is coupled to the upper surface of the handle 30 to indicate whether the valve is opened or closed while still including the essential configuration of the general angle valve configured as described above With the work core,

Closing display panel 51 so that the display portion 52 of the opening / closing display panel 51 displays a "close" or "close" indication depending on the opening / closing state of the valve, And a control unit.

The opening / closing plate 51 is coupled to the upper surface of the handle by a fastening screw 55 so as to be rotatable about the rotation center of the handle. In order to prevent the opening and closing display panel 51 from turning along with the handle 30 when rotating, the bush 56 (more specifically, in FIG. 8, the fastening screw 55 is interposed with the deformation washer 56a). It is preferable to be spaced apart from the handle 30 by the penetrating through the 56 to be coupled to the hollow of the handle (3) to be coupled to the fastening screw (55).

The display unit 52 according to the preferred embodiment of the present invention may be formed as a hole penetrating through the opening and closing plate 51, Closed "display portion is formed at the corresponding position of the hole on the upper surface of the handle so that when the opening / closing plate 51 is rotated by the opening / closing plate driving portion, the" open "Quot; or "closed" However, since the display unit 52 can be realized in various forms by a known technology such as a light emitting device, a liquid crystal panel, a sound or a melody, the display unit 52 is collectively referred to as a 'display unit 52' in the detailed description of the present invention.

It is preferable that the opening / closing indication plate 51 is provided on the upper surface of the handle so that the operator can visually confirm whether the valve is opened or closed. When the handle is operated, the opening / closing indication plate 51 is not moved by the opening / It may be rotated by the hand of the operator. To prevent this, a space for receiving the opening / closing signboard 51 is formed on the upper surface of the handle so that the opening / closing signboard 51 is seated in the accommodation space desirable.

In the vacuum valve for measuring vacuum pressure in the semiconductor manufacturing facility of the present invention, a "closed" indication appears on the display portion 52 of the opening / closing display plate 51, particularly when the handle is closed in the closing direction and the valve is closed, It is necessary to display an "open" sign on the display portion 52 of the opening / closing display panel when the door is opened.

To this end, the opening / closing panel drive unit according to the preferred embodiment of the present invention includes:

A support shaft 58 provided in a direction orthogonal to the connection shaft of the handle 30;

The upper surface of the handle is protruded from the lower surface of the handle so as to be in close contact with the lower surface of the handle. And a roller 57 protruding from the top surface of the roller.

Hereinafter, with reference to Figures 4 and 5 of the present invention, the operation of the opening and closing display panel 51 and the display unit 52 according to the operation of locking the valve by turning the handle of the angle valve will be described in detail.

When the handle is turned in the locking direction (clockwise) while the valve is fully open (see FIG. 3), the connecting shaft 15 coupled to the handle 30 together with the handle 30 is lowered while rotating. Accordingly, the opening / closing plate 13 will gradually come into close contact with the valve seat 14. [ Since the packing 17 is provided on the bottom surface of the opening / closing plate 13, the valve is closed at the moment when the packing 17 starts to be seated on the upper surface of the valve seat 14.

The handle is lowered until the valve is closed. When the handle is lowered, the roller (57) provided on the handle is configured to be brought into close contact with the upper surface of the upper body (20) immediately before the valve is closed.

When the handle is turned continuously with the roller 57 in close contact with the upper surface of the upper body 20, the valve is closed (the packing 17 is seated on the upper surface of the valve seat 14). At this time, the roller 57 is caused to roll on the upper surface of the upper body 20 by the rotation of the handle, and the bottom surface of the opening / closing plate 51 is closely attached to the upper portion of the roller. The display panel 51 is rotated relative to the handle.

4 is a cross-sectional view showing a state in which the angle valve according to the present invention begins to close, and a display state of the open / close display panel at this time. As shown in FIG. 4, the display unit 52 of the open / close display panel 51 is shown. Indicates the "open" state in the state of FIG. 3, the valve 57 is rotated relative to the handle by the roller 57 as the valve starts to be closed, and thus the intermediate position of "open-close". Will be displayed.

If the handle is continuously turned in the locking direction (clockwise) in the state shown in FIG. 4, the connecting shaft 15 coupled to the handle together with the handle 30 is lowered while further rotating, thereby opening and closing the plate 13 Packing (17) provided on the bottom of the) will be in close contact with the top surface of the valve seat 14 while being elastically deformed tightly. In this process, the roller 57 continues to rotate while the handle is rotating, and the opening / closing plate 51, which is in close contact with the roller 57, continues to rotate with respect to the handle, The "open" indication disappears and the "closed" indication is completely displayed.

5 is a cross-sectional view showing a closed state of the angle valve according to the present invention, and a "closed" display state of the opening and closing display panel in this state. When the valve is completely closed, as shown in Figure 5, the handle 30 is no longer able to rotate, the opening and closing display panel 51 in the present invention is also no longer rotated.

In contrast to the above description, the operation of opening the angle valve for measuring the vacuum pressure in the closed (closed) state of the valve will be described.

When the handle is rotated in the opening direction (counterclockwise direction) to open the valve, the roller 57 is supported by the handle, and the roller 57 closely attached to the upper surface of the upper body 20 is rotated. The display panel 52 of the open / close display panel 51 is rotated in a counterclockwise direction with respect to the handle since the bottom surface of the open / close display panel 51 is in close contact with the roller 57 As the "Closed" indication disappears gradually, the "Open" indication appears gradually, indicating the middle position of "Open-Closed".

When the handle is continuously rotated in the opening direction (counterclockwise direction) in this state, the connecting shaft 15 coupled with the handle 30 continues to be lifted along with the handle 30, The packed packing 17 will be slowly restored.

In this process, the roller 57 continues to rotate while the handle rotates in the counterclockwise direction, and the opening / closing plate 51 which is in close contact with the roller 57 also continues to rotate with respect to the handle, The "closed" indication disappears and the "open" indication is completely displayed on the display unit 52. [

The packing 17 of the opening / closing plate 13 is completely restored at this time, and the valve seat (not shown) 14, the valve is fully opened. 6 shows a state in which the valve is slightly open, and the state of the opening / closing display panel 51 and the display unit 520 at this time.

As a preferred embodiment of the present invention, the opening / closing indication plate 51 further includes an arc-shaped slot 53 centered on the rotation center of the opening / closing plate, It is particularly preferable that the projecting pin 54 accommodated in the projecting portion 53 is further provided.

The projecting pin (54) limits the relative rotation of the handle and the opening / closing panel in the state of being accommodated in the arc-shaped slot (53).

That is, in the process of changing the valve from the closed state to the open state, the opening and closing plate 13 is separated from the valve seat 14, the packing 17 is separated from the upper surface of the valve seat 14, the valve is completely open At this time, the display portion 52 of the opening and closing display panel 51 is displayed in a completely "open" state. In this state, if the handle is continuously turned counterclockwise (opening direction), as shown in FIG. It becomes an open state. An unnecessary operation may occur such that the opening / closing display plate 51 continues to rotate as long as the roller 57 is in close contact with the upper surface of the upper body 20 while the valve 57 is fully opened after the valve is opened.

Therefore, when the "open" or "close" indication is completely displayed on the display portion 52 of the opening / closing indicating plate 51, since the projecting pin 54 comes into contact with the end of the slot 53, It is preferable to limit the amount of rotation in the clockwise and counterclockwise directions so that the rotor 51 does not rotate.

Further, since the slip prevention rubber pad 59 is further provided on the outer circumferential surface of the roller according to the present invention, slippage (slip) does not occur with respect to the bottom surface of the opening / closing panel and the upper surface of the upper body, Is more preferable. Particularly, when a round O-ring is employed as the rubber pad 59, even if the distance between the bottom surface of the opening / closing plate and the top surface of the upper body is less than the allowable standard when the handle is at its maximum, The operation reliability can be secured.

Meanwhile, referring to FIG. 7, which is a perspective view of an angle valve according to another embodiment of the present disclosure, and FIGS. 8 and 9, which are exploded perspective views and sectional views, respectively, the lower and upper surfaces of the opening and closing display panel 51 are shown. The locking means L provided in between to fix the closed state or the open state will be described in detail.

8 and 9 omit the opening and closing plate 13, the bellows 16, the roller 57, etc. for convenience, and show the configuration related to the locking means L intensively.

The locking means L includes a first locking portion of the elevation member 60, that is, a second locking portion provided on the stopper L1 and the handle 30, that is, a locking groove L2 formed on the handle bottom, .

The lifting member 60 is coupled to the upper end of the upper body 20 and moves along the 'C' slot 21 formed in the upper body 20,

The locking means L fixes the closed state or the open state according to the position of the slot 21 of the guide pin 61A,

The essence of the " locking means " is to prevent the opening / closing plate 13, which is an essential component for maintaining the closed state or the open state, from moving,

The shape shown as one way of implementing this is a structure for preventing any rotation of the handle 30 in particular,

More specifically, the locking means L has a structure such that the handle is not rotated arbitrarily in the closed state to open.

The elevating member 60 is provided between the handle 30 and the upper body 20 and is supported by elastic means, that is, a coil spring 63a.

The guide pin 61A is coupled to the slot 21 through the coupling hole 61 of the elevating member 60 so that the coupling pin 61 of the elevating member 60 and the coupling hole 61 of the upper body 20 The slot 21 is fastened and the elevating member 60 and the upper body 20 are fastened together.

The elevating member 60 has a function of fixing the closed state or the open state of the opening / closing plate 13 by the operation of the locking means L or the non-operation thereof,

In the figure, the stopper (L1), which is the first locking portion of the locking means (L), and the locking groove (L2) of the handle bottom which is the second locking portion are engaged with each other when the elevation member is raised by the elasticity of the elastic means, State.

However, the stopper L1 provided on the elevating member 60 and forming the first locking portion and being a male member can be deformed into a female member, and is provided on the handle 30 and forms a second locking portion, (Female) member can be deformed into a male member. Of course, a structure in which the arm member and the male member are alternately formed on the elevating member 60, and the male member and the female member which are mutually coupled and corresponding to each other are formed alternately on the bottom surface of the handle 30. [

In the claims and the like, the "female or male first locking portion" and the "male or female second locking portion" encompass various variations.

The elevating member 60 is formed with a groove-shaped mounting portion 63 into which a coil spring 63A is inserted for a stable mounting and coupling structure of the coil spring 63A as an elastic means. A plurality of coil springs 63A and a plurality of mounting portions 63 are provided at symmetrical positions so that the coil spring 63A can evenly support the elevating member 60. [

8 [A] seen from the top, FIG. 8 [B] seen from the bottom, and FIGS. 9 [A] and [B] and 9 [B], respectively As can be seen in the front sectional view of the inner part of the dashed line

(As the direction reference was specified earlier, since FIG. 3 in which the second connector 12 is located on the right side is a front sectional view,

9 [A] and [B] correspond to the 'side' cross sectional view, and the main figure in the upper one-dot chain line circle of FIG. 9 [B] showing the locking means L is the 'front' cross sectional view),

The inverse 'b' slot 21 (refer to the front view of the slot in the lower left first one-dot chain line in Fig. 9 [A]) is a vertical lifting portion 21a and a horizontal locking portion 21b interconnected. Will,

When the packing 17 of the bottom surface of the opening and closing plate 13 is in contact with the bottom surface of the lower body 10 by the rotation of the connecting shaft 15 by turning the handle 20, And is closed,

The lifting member 60 is carried and lifted by the coil spring 13A, and the guide pin 61A is guided and lifted along the vertical lifting portion 21a of the slot 21,

Two stoppers L1 (up to one or three, if necessary) on the upper surface of the elevating member 60 may be coupled to the locking groove L2 on the lower surface of the handle 30 to turn the handle 30 to open the valve. Lock it so you can't.

During the unlocking, the elevating member 60 is pushed down from the outside of the angle valve, and the guide pin 61A descends along the vertical elevating portion 21a of the slot 21,

When the elevating member 60 is subsequently turned, the guide pin 61A enters the horizontal locking portion 21b of the slot 21, and at the same time, the coil spring 13A contracts,

The stopper L1 of the locking means L is separated from the locking groove L2 so that the handle 30 can be rotated.

It can be expressed that the guide pin 61A is located in the ascending or descending part or the locking part of the slot 21 in accordance with the ascending and descending and the left and right rotations of the ascending and descending member to perform the locking or unlocking function.

As the locking groove L2 can be seen in FIG. 8B, a plurality of the locking grooves L2 are radially formed to perform a more stable locking function.

If necessary, as shown in a front view of the slot in the lower left second one-dot chain line circle of FIG. 9, the locking means in the open state in the angle valve shown in the case of manufacturing the slot in the Hangul inverse '-' shape Will perform this lock function,

[A] As shown in the front view of the slot in the lower left third one-dot chain line circle, furthermore, the alphabet 'Ｚ' character (or various crank-shaped slots) (left) or the Korean alphabet 'c' character (right) ), It is possible to perform the locking function for both the closed and the open state.

9B, the stopper L1 and the locking groove L2 of the locking means L are forced to form trapezoidal structures when the shape of the stopper L1 and the locking groove L2 of the locking means L is mutually trapezoidal. When the force is applied, the stopper and the locking groove are separated from each other,

As shown in the conceptual diagram in the upper right second one-dot chain line of FIG. 9B, the stopper L1 and the locking groove L2 of the locking means L, which are in a deformed form, have a ratchet structure, so that the locking state The rotation of the handles for opening or closing operations is prevented in the system, enabling a stronger locking function.

Although the well-known technique related to the vacuum valve for vacuum pressure measurement of the semiconductor manufacturing facility is omitted in the above description, those skilled in the art can easily guess, deduce, and reproduce it.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, Should be construed as falling within the scope of protection of the present invention.

Furthermore, the idea of the present invention can be applied to various kinds of diaphragm valves other than an angle valve for measuring vacuum pressure of a semiconductor manufacturing facility, and also in this case, regardless of the name or category of the present invention, .

10: valve lower body 11: first connection port
12: second connection port 13: opening / closing plate
14: valve seat 15: connecting shaft
16: Metal Bellows
20: valve upper body 21: slot
21a: lift portion 21b:
25: cover 30: handle
31: Connecting shaft fitting groove
51: opening / closing display panel 52:
53: Slot 54:
55: fastening screw 56: bush
57: roller 58: support shaft
59: Anti-friction rubber
L: Locking means L1: Stopper (first locking portion)
L2: a locking groove (second locking portion) 60: a lift member
61: engaging hole 61A: guide pin
63: mounting portion 63A: coil spring (elastic means)

Claims (3)

A connecting shaft 15 having a lower valve body 10 having an interconnected first connector 11 and a second connector 12, and an opening and closing plate 13 for opening and closing the first connector; In the angle valve composed of the upper body 20 for receiving the shaft and the handle 30 for operating the connecting shaft,
An opening / closing display member (50) having an opening / closing display panel (51) which is coupled to an upper surface of the handle so as to be rotatable based on a rotational center point of the handle to display whether the valve is opened or closed;
When the opening and closing plate 13 is in close contact with the valve seat 14 and the valve is closed, the opening and closing display plate 51 is rotated so that a "closed" display appears on the display unit 52 of the opening and closing display plate. When the valve 13 is separated from the valve seat 14 and the valve starts to open, the opening / closing display panel 51 is rotated so that the display panel 52 of the opening / closing display panel shows an “open” indication. ,
An angle valve having an opening / closing display and a locking function between the lower surface of the opening / closing display panel 51 and the upper body 20, the locking means (L) fixing the closed state or the opened state. The method of claim 1,
The locking means (L) is provided between the handle 30 and the upper body 20 and the lifting member 60 is supported by the elastic means, the female or male first locking portion provided on the lifting member and The angle valve having an opening and closing display and a locking function, comprising a male or female second locking portion coupled to the first locking portion and provided on the handle. 3. The method of claim 2,
The locking means (L) is formed in the valve upper body 20 and the slot 21 and the lifting portion and the locking portion is formed continuously, and through the coupling hole 61 of the elevating member 60, the slot 21 Further comprising a guide pin (61A) to be coupled to,
According to the lifting and lowering and the left and right rotation of the elevating member having the opening and closing display and locking function, the guide pin 61A is located in the lifting or locking portion of the slot 21 to perform a locking or unlocking function. Angle valve.

Images