KR20130077221A - Apparatus for inspecting objects using terahertz wave - Google Patents

Abstract

PURPOSE: An object inspecting device using terahertz waves is provided to rapidly and accurately inspect an object to be inspected with a non-destructive mode. CONSTITUTION: An object inspecting device using terahertz waves (1) includes a terahertz wave supply unit, a scanning mirror (200), a scanning collimating unit (300), and a terahertz wave detecting unit. The terahertz wave supply unit generates and supplies terahertz waves. The scanning mirror reflects the terahertz waves supplied by the terahertz wave supply unit at high speed within a range of a predetermined angle while being rotated. The scanning collimating unit reflects the reflected terahertz wave to be parallel, thereby making the terahertz wave incident into an object (10) to be inspected. The terahertz wave supply unit collects the terahertz wave incident into the object to be inspected, thereby detecting the terahertz waves.

Description

Apparatus for inspecting objects using terahertz wave}

The present invention relates to an apparatus for inspecting an object, and more particularly, to an apparatus for inspecting an object such as inspecting a foreign matter contained in food by a non-destructive method using a terahertz wave.

The terahertz wave, or terahertz wave, is an electromagnetic wave located between the infrared and microwaves, and generally has a frequency between 0.1 THz and 10 THz.

Although research and development has been conducted on such terra waves, the research is still relatively inferior to electromagnetic waves of other wavelength bands. Therefore, such a wavelength band is also called a terahertz gap.

However, with the continuing development effort, along with the development of other technologies, such as photonics and nanotechnology, the technology for teraflas has recently been improved.

In particular, due to various properties such as straightness, permeability to the material, safety to the living body, qualitative identification possibility, interest in the terrapa continues to increase.

In recent years, Terapa has been developing and manufacturing high-quality products such as airports and security facility search devices, food and pharmaceutical company quality inspection devices, semiconductor inspection devices, dental inspection devices, gas detection devices, explosion inspection devices, Lab-on- And so on.

However, despite such efforts and technical developments, the conventional technology has a problem that the time required for inspecting an object is too long and the accuracy of the inspection is low.

In addition, the type or material of the test object or the foreign matter contained therein may be very diverse. According to the related art, the test performance of the test material of the various materials or types is not satisfactory.

In particular, when the test object is a food, properties such as moisture content may be different for each food. In addition, the food may include a foreign material of various materials, such as hard or soft. In such a situation, there is a limitation that conventional technology alone does not provide sufficient performance for inspecting various kinds of foods and foreign substances.

Accordingly, the present invention was devised to solve the above problems, and is an object inspection apparatus using a terrapa, particularly in food, which can quickly and accurately inspect various kinds of specimens having different ingredients, materials, sizes, and the like. It is an object of the present invention to provide a device for inspecting the contained foreign matter.

Other objects and advantages of the present invention can be understood by the following description, and will be more clearly understood by the embodiments of the present invention. It will also be readily apparent that the objects and advantages of the invention may be realized and attained by means of the instrumentalities and combinations particularly pointed out in the appended claims.

The object inspection apparatus using the terrapa according to the present invention for achieving the above object, the terrapa supply for generating and supplying terrapa; A scanning mirror which rotates and rapidly reflects the terrapa supplied by the terrapa supply in a predetermined angle range; A scanning collimating unit for reflecting the terrapa reflected by the scanning mirror in parallel and entering the inspected object; And a terrapa detector configured to collect and detect terrapa incident on the specimen.

Preferably, the terrapa supply unit, a terrapa generating unit for generating and radiating terrapa, a light focusing unit for focusing the terrapa radiated by the terrapa generating unit so that the field angle is small, and the light focusing unit It includes a beam collimating unit that reflects in parallel the terrapa focused by.

Also preferably, the terrapa supply unit may be implemented with a quantum cascade laser (QCL) or a far infrared laser.

Also preferably, the scanning mirror is implemented as a Galvano mirror, MEMS micro mirror or polygon mirror.

Also preferably, the scanning collimating part is implemented by a non-axis parabolic mirror.

Also preferably, the terrapa detection unit may include a reflection detection unit that detects terrapa reflected from the test object, and a transmission detection unit that detects terapa transmitted through the test object.

Preferably, the apparatus further includes a display unit for providing a video image using the terra wave detected by the terra wave detecting unit.

Also preferably, the test object further comprises a test object transfer unit for transporting the test object.

The control apparatus may further include a controller configured to control at least one operation of the terrapa supply unit, the scanning mirror, the scanning collimating unit, and the terrapa detection unit based on the detection result by the terrapa detection unit.

Also preferably, the test object is a food.

According to the present invention, it is possible to inspect the object to be inspected, that is, the object to be inspected, quickly and accurately by using a terrapa. In particular, in the case of terrapa can pass through the opaque non-conductive material not only to obtain a good inspection performance, but also to ensure the safety of the user with a low risk to the living body.

Moreover, according to one aspect of the present invention, it can be applied to a device capable of inspecting foreign substances contained in food. In this case, various foreign matters present in various foods can be detected regardless of the moisture content of the food, the kind of material, and the like. In particular, in the case of food, there may be food of various materials, such as high-moisture food or low-moisture food, and foreign matters included in the food may also have foreign materials of various materials such as hard foreign matters or soft foreign matters. In this case, by inspecting the foreign matter in the food using both the reflection method and the transmission method, it may not be affected by the material, properties, types, etc. of the food or foreign matter.

In addition, according to an aspect of the present invention, since the test result is displayed in real time as an image image, it is possible to quickly determine whether the presence of foreign substances in the food.

According to an aspect of the present invention, detection sensitivity can be improved by irradiating the terrapa (terrabeam) focused through a scanning mirror onto a sample (test object) area, and the measurement time can be shortened to achieve high speed inspection. can do. In addition, the size of the food and the like may not be largely limited.

In addition, according to an aspect of the present invention, by using a light converging lens and a non-axis parabolic mirror with a minimized spherical aberration to minimize the light loss, it is possible to maximize the intensity of the incident terrapa, thereby detecting during reflection and transmission The sensitivity of the signal can be improved.

In addition, according to one aspect of the present invention, it can be easily combined with a transfer device such as a conveyor belt existing in the food inspection process, it is easy to apply in the existing food production or management process. And, this can lower the cost of manufacturing equipment.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate preferred embodiments of the invention and, together with the description of the invention given below, serve to further the understanding of the technical idea of the invention, And should not be construed as limiting.
1 is a block diagram schematically illustrating a functional configuration of an apparatus for inspecting an object using terrapa according to an embodiment of the present invention.
2 is a three-dimensional perspective view schematically showing the three-dimensional configuration of the object inspection apparatus using a terrapa according to an embodiment of the present invention.
3 is a diagram schematically showing the configuration of a terrapa supply unit according to an embodiment of the present invention.
FIG. 4 is a diagram schematically illustrating a configuration in which a terrapa supplied by a terrapa supply unit is incident on an object to be inspected through a scanning mirror and a scanning collimating unit according to an embodiment of the present invention.
FIG. 5 is a diagram schematically showing a terrapa detection configuration of a reflection detection unit according to an embodiment of the present invention.
6 is a diagram schematically showing a terrapa detection configuration of a transmission detection unit according to an embodiment of the present invention.
7 is a block diagram schematically illustrating a functional configuration of a display unit according to an exemplary embodiment of the present invention.
8 is a diagram schematically showing the configuration of an object to be transferred according to an embodiment of the present invention.
9 is a top view diagrammatically illustrating a configuration in which terrapa is scanned in a test piece transferred by an test piece transferring unit according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms or words used in the specification and claims should not be construed as having a conventional or dictionary meaning, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention.

Therefore, the embodiments described in the present specification and the configurations shown in the drawings are only the most preferred embodiments of the present invention and do not represent all the technical ideas of the present invention. Therefore, It is to be understood that equivalents and modifications are possible.

1 is a block diagram schematically illustrating a functional configuration of an apparatus for inspecting an object using terrapa according to an embodiment of the present invention. 2 is a three-dimensional perspective view schematically showing the three-dimensional configuration of the object inspection apparatus using the terrapa according to an embodiment of the present invention.

1 and 2, the apparatus for inspecting an object using terrapa according to the present invention includes a terrapa supply unit 100, a scanning mirror 200, a scanning collimating unit 300, and a terrapa detector 400. Include.

The terrapa supply unit 100 is a component that generates and supplies the terrapa 1 and may be replaced with various terms such as a terrapa light source, a terrapa source, and the like. Here, the terrapa means an electromagnetic wave in the terahertz region, and preferably, may have a frequency of 0.1 THz to 10 THz. However, even if it deviates from these ranges, the area | region which does not greatly deviate can be recognized as a terrapa in this invention.

The terrapa supply unit 100 may be implemented in various forms to generate and supply the terrapa (1).

3 is a diagram schematically showing the configuration of a terrapa supply unit 100 according to an embodiment of the present invention.

As shown in FIG. 3, the terrapa supply unit 100 according to the present invention may include a terrapa generation unit 110, a light focusing unit 120, and a beam collimating unit 130.

The terrapa generating unit 110 may generate a terrapa 1, and emits the terrapa 1 generated by a light focusing lens.

Preferably, the terragenerating unit 110 may be implemented using a gunn diode. The gun diode is a diode that oscillates electromagnetic waves by using a gun effect, and has an advantage of minimizing volume and volume at a low cost. The terra wave generating unit 110 of the present invention can generate the terra wave using the gun diode. In this case, the terrapa generated by the gun diode can be emitted through the horn. However, the present invention is not necessarily limited to such a gun diode, and the terra generator unit 110 may be implemented in various forms.

The light focusing unit 120 may focus the terrapa radiated by the terrapa generation unit 110 so that the field angle becomes smaller. That is, when terrapa is generated and radiated by a dry diode or the like, the emitted terrapa is incident on the light focusing unit 120, and the light focusing unit 120 reduces the field angle of the incident light, that is, the incident terapa. To the beam collimating unit 130. In this case, the light focusing unit 120 may have different magnifications of the incident part and the exit part.

Preferably, the light focusing unit 120 may be implemented using an aspherical lens, as shown in FIG. 3. In particular, when a lens including an aspherical surface is used in the light focusing unit 120 to make the field angle of light small, spherical aberration can be minimized. When the aspherical lens is used in the light focusing unit 120 as described above, it is preferable that the planar portion faces outward as shown in FIG. 3.

On the other hand, the light focusing unit 120, it is preferable to exhibit a constant refractive index in the terrapa region and the visible light region, and to facilitate the lens alignment (lens alignment). Therefore, the light focusing unit 120 may be made of TPX polymer (polymethylpentene) material. In the case of TPX, it is transparent at a wavelength of 633 nm and has a refractive index of 1.46, which is almost similar to the refractive index of the terrapa region. Therefore, the lens of the light focusing unit 120 is preferably made of TPX polymer material. However, the present invention is not necessarily limited thereto, and various materials other than the TPX polymer may be used for the lens included in the light focusing unit 120.

The beam collimating unit 130 collimates the terrapa focused by the light focusing unit 120. Therefore, the terrapa passing through the light focusing unit 120 is focused at the focal point and then reflected in parallel by the beam collimating unit 130, and the reflected terrapa is directed to the scanning mirror 200.

Preferably, the beam collimating unit 130 may be implemented by a parabolic reflector. In particular, the parabolic mirror of the beam collimating unit 130 may have an off axis paraboloid. As such, when the beam collimating unit is implemented by a non-axis parabolic mirror, by adjusting the distance between the focal point of the parabolic mirror and the focal point of the lens at the rear of the light focusing unit 120, You can adjust the beam spot size.

On the other hand, in the above embodiment, the terrapa supply unit 100 has been described as being implemented to include a terrapa generating unit 110, the light focusing unit 120 and the beam collimating unit 130, this is only an example The terapa supply unit 100 may be implemented in various other forms.

For example, the terrapa supply unit 100 may be implemented as a quantum cascade laser (QCL) or a far infrared laser (Far Infrared Laser). Such quantum waterfall lasers and far-infrared lasers are continuous oscillation lasers capable of oscillating terawave continuously. For example, a quantum cascade laser is an electromagnetic radiation laser that uses a transition between subbands formed of a quantum well structure, unlike a general laser through a transition of a semiconductor band gap. Such a quantum cascade laser uses continuous transitions of electrons instead of recombination of electron-holes, so that stepwise radiation can be continuously performed in a repeatedly formed quantum well structure.

On the other hand, the terrapa supplied by the terrapa supply unit 100 as described above may be incident on the specimen 10 through the scanning mirror 200 and the scanning collimating unit 300.

4 is a configuration in which the terrapa supplied by the terrapa supply unit 100 is incident on the specimen 10 through the scanning mirror 200 and the scanning collimating unit 300 according to an embodiment of the present invention. It is a figure which shows schematically.

Referring to FIG. 4, the terrapa supplied by the terrapa supply unit 100 including the terrapa generation unit 110, the light focusing unit 120, and the beam collimating unit 130 is incident to the scanning mirror 200. After the reflection is reflected back to the scanning collimating unit 300, the incident object 10 is incident.

The scanning mirror 200 reflects the terrapa supplied by the terapa supply unit 100 at high speed. In this case, the scanning mirror 200 may rotate at a high speed in a predetermined angle range. Therefore, the terrapa incident on the scanning mirror 200 may be reflected at a high speed in a predetermined angle range and scanned by the scanning collimating unit 300. In this case, in order for the terrapa to be scanned in one axial direction, the scanning mirror 200 may rotate in one axial direction in a predetermined angle range.

Preferably, the scanning mirror 200 may be implemented as a Galvano mirror, a MEMS micro mirror or a polygon mirror. In the case of such mirrors, since the collimated light can be scanned at a high speed in a certain angle range, it can be suitably used as the scanning mirror 200. However, in addition to the above, various mirrors may be employed as the scanning mirror 200.

Meanwhile, the rotation of the scanning mirror 200 may be implemented in various forms. For example, when the Galvano mirror is employed as the scanning mirror 200, by applying a current having a square wave or a sine wave of a constant frequency to the motor of such a Galvano mirror, it is possible to obtain a desired repeated rotation operation of the Galvano mirror. Here, the rotation speed of the scanning mirror 200 may be 60Hz to 100Hz.

Meanwhile, the rotation angle, the operation, the speed, and the like of the scanning mirror 200 may be feedback-controlled according to the information collected by the terrapa detector 400.

The scanning collimating unit 300 collimates the terrapa reflected by the scanning mirror 200. That is, when the scanning mirror 200 scans tera waves at an angle within a predetermined range, the scanning collimating unit 300 reflects the scanned tera waves in parallel and enters the object 10 under test.

Preferably, the scanning collimating unit 300 may be implemented by a parabolic mirror. At this time, if the terrapa supply unit 100 includes a beam collimating unit 130, the beam collimating unit 130 is implemented by a non-axis parabolic mirror, the stock parabolic diameter of the scanning collimating unit 300 is a beam collie The aperture may be larger than the stock parabolic diameter of the mating unit 130. For example, the diameter of the non-axis parabolic mirror for implementing the scanning collimating unit 300 may be 200 mm. Therefore, the relative parabolic diameter of the scanning collimating unit 300 may be referred to as a large-diameter non-parabolic parabolic diameter, and the non-axis parabolic diameter of the beam collimating unit 130 may be referred to as a small-diameter non-parabolic parabolic diameter.

Here, the focal point of the large-diameter non-axis parabolic mirror and the rotation axis of the scanning mirror 200 can be made to coincide. In this case, the terrapa is reflected while sweeping the large-diameter non-parabolic parabolic mirror at a predetermined angle due to the rotation of the scanning mirror 200, and the reflected terrapa are incident on the specimen 10 in parallel with each other and are applied to the specimen 10. Repetitive scanning is possible. At this time, the scanning collimating unit 300, as shown in Figure 4, it is preferable to make the terrapa reflected in parallel to the test object 10 perpendicularly.

As such, the scanning collimating unit 300, which may be implemented as a large diameter parabolic parabolic mirror, may repeatedly scan the terrapa in a predetermined length direction with respect to the upper part of the object 10 along with the scanning mirror 200.

In this case, the scanning mirror 200 and the scanning collimating unit 300 may allow the terrapa to be scanned into the specimen 10 in a raster scanning manner. In this case, the optical resolution can be determined using the size of the beam spot.

Meanwhile, the scanning collimating unit 300 may also be implemented by a telecentric f-theta lens system. However, in this case, since the scanning collimating unit 300 should be implemented using a plurality of lenses, the resolution and optical performance may be improved when implementing the imaging by the terrapa, but the optical loss is very large. Have In this aspect, when implementing the scanning collimating unit 300 through the non-axis parabolic mirror as in the embodiment, the advantage of having a scanning collimating function while reducing the optical loss by using a protected gold coating mirror have. Of course, this single mirror plane has a constant f-theta value that does not vary with dice, compared to the telecentric F-theta lens system technology used in visible-near-infrared light. It can be ignored compared to the diffraction limit of the wave.

The terrapa detection unit 400 collects and detects terrapa incident on the object 10 through the scanning mirror 200, the scanning collimating unit 300, and the like.

In this case, as shown in FIG. 2, the terra wave detection unit 400 may include a reflection detection unit 410 and a transmission detection unit 420.

The reflection detection unit 410 may detect the terrapa reflected from the object 10, and the transmission detection unit 420 may detect the terrapa transmitted through the object 10.

5 is a diagram schematically showing a terrapa detection configuration of the reflection detection unit 410 according to an embodiment of the present invention. In FIG. 5, the arrow indicates the path of terrapa reflected by the specimen 10.

Referring to FIG. 5, the reflection detection unit 410 may detect the terrapa reflected from the object 10 using the scanning collimating unit 300 and the scanning mirror 200. That is, the terrapa incident by the scanning collimating unit 300 through the scanning mirror 200 to the object 10 may be reflected by the object 10 to be incident again into the scanning collimating unit 300. . Then, the scanning collimating unit 300, which may be implemented as a non-axis parabolic mirror, may reflect the terra waves reflected by the inspected object 10 to the scanning mirror 200. Then, the terrapa may be incident to the beam collimating unit by the scanning mirror 200, reflected by the beam collimating unit, and collected and detected by the reflection detection unit 410.

In this case, the reflection detection unit 410 may include a beam splitter 411 inside the light focusing unit 120, and may detect terra waves using a Schottky diode. In this case, the reflection detection unit 410 is further provided with a hemispherical lens to change the field angle of the terrapa incident by the beam splitter to maximize the light collection efficiency.

As such, the terrapa may be reflected along the incident path to the object 10, and the reflection detection unit 410 may collect and detect the reflected terapa.

FIG. 6 is a diagram schematically showing a terrapa detection configuration of a transmission detection unit 420 according to an embodiment of the present invention. In FIG. 6, the arrow indicates the path of the terrapa passing through the specimen 10.

Referring to FIG. 6, the transmission detection unit 420 may include a concave mirror 421 and a silicon lens 423. The terrazzo mirror 421 may reflect the transmitted terrapa when the terrapa incident to the object 10 passes through the object 10. The silicon lens 423 may be a hemispherical lens and focus the terrapa reflected by the concave mirror 421. That is, the silicon lens 423 may increase the light collecting efficiency by changing the field angle of the transmitted terapa. At this time, the transmission detection unit 420 is provided with a Schottky diode, it is possible to collect and detect the terrapa with the Schottky diode.

On the other hand, this configuration of the transmission detection unit 420 is only an example, the transmission detection unit 420 may be configured in a variety of ways. For example, the transmission detection unit 420 may use a non-parabolic parabolic mirror instead of the inexpensive concave mirror 421. In this case, compared to the concave mirror 421 may have an optically stable performance.

According to the embodiment in which both the reflection detection unit 410 and the transmission detection unit 420 are provided as described above, both the terrapa reflected from the object 10 and the terrapa transmitted through the object 10 may be detected. have. Therefore, it can be said that the object inspection is performed by using both the reflection method and the transmission method. Therefore, in this case, various kinds of inspection can be performed without being limited to the material or type of the specimen 10. For example, when inspecting a foreign matter for food, it may not be affected by the moisture content or raw materials of the food, and may not be affected by whether the foreign matter is a hard foreign matter or a soft foreign matter.

As described above, in order for the terra wave detection unit 400 to detect both the terra waves reflected from the specimen 10 and the transmitted tera waves, the incident angle of the terra waves incident by the scanning collimating unit 300 is determined. It is preferable to be perpendicular to the incident surface of the water (10). In addition, the terrapa incident by the scanning collimating unit 300 to the specimen 10 is preferably parallel, and the smaller the angle or size of the field is, the better.

Preferably, the object inspection apparatus using the terrapa according to the present invention, as shown in Figure 1, may further include a display unit (500).

The display unit 500 may provide an image image by using tera waves detected by the terra wave detection unit 400.

7 is a block diagram schematically illustrating a functional configuration of the display unit 500 according to an embodiment of the present invention.

Referring to FIG. 7, the display unit 500 may include a pre-amplifier 510, a lock in amplifier 520, an AD converter 530, and a signal processing unit 540. It may include. In this case, the terrapa detected by the terrapa detection unit 400 may be amplified through the pre-amplifier 510 and the lock-in amplifier 520, and then A-D converted and transmitted to the signal processing unit 540. Then, the signal processing unit 540 may convert the signal transmitted as described above into a pixel value corresponding to the image coordinate through software and display it as a 2D image on a monitor or the like. Therefore, by observing the displayed two-dimensional image or the like, the user can accurately and quickly perform the object inspection such as the detection of foreign matter in the food in real time.

Also preferably, the apparatus for inspecting an object using terrapa according to the present invention may further include a control unit 700, as shown in FIG. 7.

The control unit 700 may control the operation of other components based on the detection result by the terra wave detection unit 400. For example, referring to the exemplary embodiment of FIG. 7, the control unit 700 may determine a two-dimensional test result by using the terrapa detected by the terapa detection unit 400 of the signal processing unit of the display unit 500. When displaying a video image, information about whether the terrapa detected by the terrapa detection unit 400 is suitable to display in the 2D image may be received from the signal processing unit. In this case, when receiving the information from the signal processing unit that the terrapa detected by the terrapa detection unit 400 is not suitable for displaying in a two-dimensional image, the control unit 700 or the rotation angle of the scanning mirror 200 The speed can be changed as appropriate. However, this embodiment is merely an example, and the control unit 700 may control the operation of other components such as the terapa supply unit 100, the scanning collimating unit 300, and / or the terapa detection unit 400. It may be.

Also preferably, the object inspection apparatus using the terrapa according to the present invention, as shown in Figures 1 and 2, may further include a specimen transfer unit 600.

The test object transfer part 600 is a component for transferring the test object 10 which is an object to be inspected.

More preferably, the specimen transfer unit 600 may include two conveyor belts to transfer the specimen 10 in one axial direction.

8 is a diagram schematically showing a configuration of an object to be transferred 600 according to an embodiment of the present invention.

Referring to FIG. 8, the specimen transfer part 600 according to the present invention includes two conveyor belts 610 arranged in series, and the specimen 10 is seated on an upper portion of the conveyor belt 610. Can be transported. In this case, the scanning collimating part 300 allows terrapa to enter the upper part of the inspected object 10 being transferred from the upper part of the conveyor belt 610. In this case, the scanning direction of the terrapa by the scanning collimating part 300 may be perpendicular to the conveying direction of the inspected object 10.

On the other hand, the scanning collimating unit 300, it is preferable that the terrapa is incident between the two conveyor belts (610). For example, as indicated by arrow c1 in the embodiment of FIG. 8, the scanning collimating unit 300 may cause the terrapa reflected by the scanning mirror 200 to be scanned between the two conveyor belts 610. Therefore, when the inspected object 10 is conveyed from the a position and is in the b position, the terrapa can be incident. Then, the terrapa may be reflected by the object 10 as shown by arrow c2 and / or may penetrate the object 10 as shown by arrow c3. As in this embodiment, if terrapa is incident between the two conveyor belt 610, the terrapa transmitted through the specimen 10 may not be affected by the conveyor belt 610. Therefore, in this case, the distance between the conveyor belts 610 may have a distance that does not interfere with the transfer of the specimen 10, but may be larger than the size of the terrapa.

FIG. 9 is a top view diagrammatically illustrating a configuration in which terrapa is scanned in the inspected object 10 transferred by the inspected object transporting part 600 according to an embodiment of the present invention.

Referring to FIG. 9, the test object 10 such as food may be transferred from the right side to the left side by the test object transferring unit 600. In this case, the scanning collimating unit 300 may scan the terrapa in the up and down direction of the drawing, as indicated by the arrow e, so as to be perpendicular to the conveying direction of the specimen 10. That is, if the conveyance direction of the to-be-tested object 10 is an x-axis direction, it can be said that the scanning direction of a terrapa is a y-axis direction. At this time, the scanning collimating unit 300 is one so that the terrapa is scanned to the same position, the specimen 10 is transported so that the terrapa is scanned on the entire surface of the specimen 10 as shown in FIG. You get results.

On the other hand, as in the above embodiment, when terrapa is to be scanned for the inspected object 10 to be conveyed by the specimen transport unit 600, the conveying speed of the specimen 10 is synchronized with the scanning speed of the terrapa You can do that. In this case, the transport speed of the specimen 10 and / or the scanning speed of the terrapa may be controlled to be a speed suitable for the display unit 500 to obtain a 2D image.

As described above, the apparatus using the terrapa according to the present invention may be used as an apparatus for inspecting an object, and it is preferable to apply the apparatus for inspecting food as the test object 10. In particular, the object inspection apparatus using the terrapa according to the present invention can be applied to inspect the foreign matter present in the food. However, the present invention is not necessarily limited to this point, and may be applied to inspecting various objects.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It will be understood that various modifications and changes may be made without departing from the scope of the appended claims.

Meanwhile, in the present specification, the term 'part' such as 'terrapa supply unit', 'scanning collimating unit', 'terrapa detection unit', etc., and 'terapa generating unit', 'light focusing unit', 'beam collimating unit' Although the term 'unit' is used, such terms refer to logical structural units, and are not necessarily referring to components that can be physically separated or physically separated. It is obvious to those skilled in the art.

1: terrapa
10: specimen
110: Terapar Generation Unit
120: light focusing unit
130: beam collimating unit
200: scanning mirror
300: scanning collimating unit
410: reflection detection unit
420: transmission detection unit
600: specimen transfer unit

Claims (16)

A terrapirater for generating and supplying teraflops;
A scanning mirror which rotates and rapidly reflects the terrapa supplied by the terrapa supply in a predetermined angle range;
A scanning collimating unit for reflecting the terrapa reflected by the scanning mirror in parallel and entering the inspected object; And
Terra wave detector for collecting and detecting the terrapa incident on the specimen
Object inspection apparatus using terapa, characterized in that it comprises a. The method of claim 1,
The terrapa supply unit, a terrapa generating unit for generating and radiating terrapa, a light focusing unit for focusing the terrapa radiated by the terrapa generating unit so as to have a small field angle, and the light focusing unit An apparatus for inspecting an object using terapas, comprising a beam collimating unit that reflects terapas in parallel. The method of claim 2,
The terrapa generating unit, the object inspection apparatus using a terrapa, characterized in that implemented using a gun diode. The method of claim 2,
The light converging unit is a terrapa object inspection apparatus, characterized in that implemented using an aspherical lens. The method of claim 2,
The beam collimating unit is an object inspection apparatus using a terrapa, characterized in that implemented by a parabolic mirror. The method of claim 1,
The terrapa supply unit, the object inspection apparatus using a terrapa, characterized in that implemented by QCL (Quantum Cascade Laser) or Far Infrared Laser. The method of claim 1,
The scanning mirror is a terrapa object inspection apparatus, characterized in that implemented as a Galvano mirror, MEMS micro mirror or polygon mirror. The method of claim 1,
The scanning collimating unit, an object inspection apparatus using a terrapa, characterized in that implemented by a parabolic mirror. The method of claim 1,
The terrapa detector includes a reflection detection unit for detecting the terrapa reflected from the object and a transmission detection unit for detecting the terrapa transmitted through the object. 10. The method of claim 9,
And the reflection detection unit detects terra waves reflected from the object by using the scanning collimating unit and the scanning mirror. 10. The method of claim 9,
And the transmission detecting unit comprises a concave mirror reflecting the terrapa transmitted through the object and a silicon lens focusing the terrapa reflected by the concave mirror. The method of claim 1,
The apparatus of claim 1, further comprising a display unit for providing an image image using the terrapa detected by the terrapa detector. The method of claim 1,
An object inspection apparatus using a terrapa, characterized in that it further comprises a test object transfer unit for transferring the test object. The method of claim 1,
The specimen transfer unit includes two conveyor belts arranged in series to transfer the specimen, and the scanning collimating unit injects terapa between the two conveyor belts. Device. The method of claim 1,
The terapa further comprises a control unit for controlling the operation of at least one or more of the terapa supply unit, the scanning mirror, the scanning collimating unit and the terrapa detection unit based on the detection result by the terrapa detection unit. Object inspection device using. The method of claim 1,
The object to be inspected is an object inspection device using a terrapa, characterized in that the food.

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