KR20130049918A - 6-axis force-torque sensor for measuring electrostatic capacity - Google Patents

6-axis force-torque sensor for measuring electrostatic capacity Download PDF

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Publication number
KR20130049918A
KR20130049918A KR1020110114971A KR20110114971A KR20130049918A KR 20130049918 A KR20130049918 A KR 20130049918A KR 1020110114971 A KR1020110114971 A KR 1020110114971A KR 20110114971 A KR20110114971 A KR 20110114971A KR 20130049918 A KR20130049918 A KR 20130049918A
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KR
South Korea
Prior art keywords
connector
robot
tool
capacitance
torque sensor
Prior art date
Application number
KR1020110114971A
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Korean (ko)
Inventor
이희원
권순명
정현진
Original Assignee
현대자동차주식회사
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Application filed by 현대자동차주식회사 filed Critical 현대자동차주식회사
Priority to KR1020110114971A priority Critical patent/KR20130049918A/en
Publication of KR20130049918A publication Critical patent/KR20130049918A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE: A small 6 axial power-torque sensor of a capacitance measuring method is provided to measure a change of a capacitance value caused by a relative position change of an electrode for measuring capacitance, thereby improving the measurement accuracy of the sensor. CONSTITUTION: A small 6 axial power-torque sensor of a capacitance measuring method comprises a tool connector(10), a robot connector(20), and an elastic beam(30). The tool connector is connected to a terminal device unit. The robot connector is connected to a robot arm. The elastic bema is connected between the outer diameter of the tool connector and the inner diameter of the robot connector. An external slit(22) is penetrate-formed in the inner circumference of the robot connector adjacent to the outer end of the elastic beam. An internal slit(12) is penetrate-formed in the outer circumference of the robot connector adjacent to the inner end of the elastic beam. A range of the length of the elastic beam is within a section between the inner and outer slits. [Reference numerals] (AA) Cross section B-B

Description

6-axis force-torque sensor for measuring electrostatic capacity

The present invention relates to a small six-axis force-torque sensor of capacitive measurement method, and more particularly, to a structure capable of measuring capacitance, and to reduce the size of the elastic beam, thereby miniaturizing the overall sensor size It relates to a small six-axis force-torque sensor of capacitive measurement method.

Automation facilities using robots are installed throughout various industries, including precision welding and assembly processes in automobile assembly lines.

In order to operate an automated facility using a robot, it is necessary to measure and simultaneously feed back and control the force and torque acting on the end tool device connected to the robot as well as the position of the robot, and to automate complex and delicate tasks. It should be possible to carry out force control simultaneously with the position control of the arm and the tool.

Most of the robots currently used are applied to position control methods, but the robot's driving environment is expected to change as the environment for use of robots coexists with humans in the future and to play a role as a service robot that performs various tasks with a single operation mechanism. It is changing to a conventional force control method, and accordingly, interest in force / torque sensors applied to the robot field is increasing.

Therefore, in the force-controlled robot, the force / torque sensor for detecting an external force acting on the end mechanism plays an important role, which will be a key component of service robots to be developed in the future.

As described above, the conventional measuring method of the force-torque sensor for detecting external force acting on the robot and the end mechanism (tool mounted on the robot arm) is to use the deformation of the elastic body having the strain gauge, the method using the piezoelectric body, and the LVDT. Using the Stewart platform apparatus.

FIG. 5 shows a six-axis force-torque sensor applied to a method using an elastic deformation with a strain gauge, reference numeral 10 denotes a tool connector connected to an end mechanism part (tool), and 20 denotes a robot arm or the like. Each robot connector is shown.

In particular, the outer diameter of the tool connector 10 and the inner diameter of the robot connector 20 are integrally connected by three elastic beams 30, each of which has a certain force and torque, such as a kind of torsion beam When applied, it is mechanically deformed, such as twisting and having elastic restoring force.

At this time, the three elastic beams 30 are attached to a plurality of strain gauges 32 for measuring the force and torque according to the mechanical deformation of the elastic beam.

The conventional six-axis force-torque sensor has to be designed in anticipation of a change in the elastic beam structure in advance, and it can be said that the sensitivity of the entire sensor is determined according to the performance of the strain gauge attached to the elastic beam structure.

Conventional six-axis force-torque sensors have a range of forces and torques, such as three-way force components (Fx, Fy, Fz) and three-way torque components (Mx, My, Mz) when arbitrary forces and torques are applied. As a sensor that can measure the size and direction at the same time, since the force and torque components in each direction are correlated with each other, an expensive silicon strain gauge is attached to the elastic beam to improve measurement accuracy.

However, the expensive silicon strain gauge has a problem that the error of the result value is severe due to the severe performance change according to the temperature or the environment, and this requires that separate logic circuits for error correction are included, and that the strain gauge of the elastic beam There is a limit to miniaturization of the sensor size because it is limited enough to be attached.

The present invention has been made in view of the above, to solve the problem that the overall size of the conventional sensor is not miniaturized more than a certain limit because it does not reduce the size of the elastic beam in order to secure space for measuring the strain of the strain gauge. In order to provide a small 6-axis force-torque sensor with a capacitive measurement method, it is possible to reduce the size of the elastic beam and reduce the size of the entire sensor by improving the structure to measure the capacitance instead of the strain gauge. have.

The present invention for achieving the above object is a tool connector connected to the end mechanism (tool), a robot connector connected to the arm of the robot, a plurality of connected between the outer diameter of the tool connector and the inner diameter of the robot connector Including an elastic beam, the outer slit penetrates the inner circumferential portion of the robot connector adjacent to the outer end of the elastic beam, and simultaneously forms an inner slit through the outer circumferential portion of the tool connector adjacent to the inner end of the elastic beam. In addition, the six-axis force-torque of the capacitive measurement method is characterized by reducing the length of the elastic beam to a section between the outer slit and the inner slit, and mounting a capacitance measuring means between the robot connector and the tool connector. Provide a sensor.

Preferably, the capacitance measuring means includes: a cover integrally mounted on the front and rear surfaces of the robot connector and extending to the edge region of the tool connector; An electrode for capacitive measurement attached to an inner surface of the cover and front and rear surfaces of an edge region of the tool connector facing the cover; .

In addition, the capacitance measuring electrode is characterized in that formed in a flat plate shape.

In addition, the capacitance measuring electrode is characterized in that formed in the form of a comb structure.

Through the above-mentioned means for solving the problems, the present invention provides the following effects.

According to the present invention, by mounting means for measuring the capacitance instead of the strain gauge between the robot connector and the tool connector, it is possible to significantly reduce the length of the elastic beam, and eventually to reduce the size of the overall sensor.

That is, in the past, the size of the elastic beam could not be reduced in order to secure a space for measuring the strain of the strain gauge. However, by installing the capacitance measuring means, the overall size of the sensor can be reduced along with the size of the elastic beam.

1 is a perspective view showing a small six-axis force-torque sensor of the capacitance measurement method according to the present invention in comparison with the existing sensor,
Figure 2 is a cross-sectional view showing a small six-axis force-torque sensor of the capacitance measurement method according to the present invention in comparison with the existing sensor,
3 is a cross-sectional view showing an embodiment in which the capacitance measuring means is attached to a small six-axis force-torque sensor according to the present invention;
Figure 4 is a cross-sectional view showing another embodiment in which the capacitance measuring means is attached to a small six-axis force-torque sensor according to the present invention.
5 is a perspective view showing a conventional six-axis force-torque sensor.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention can be equipped with a means for measuring the capacitance instead of the strain gauge between the robot connector and the tool connector, it can significantly reduce the length of the elastic beam applied to the existing sensor, and reduce the overall sensor size The main focus is on miniaturization.

As shown in FIG. 1 and FIG. 2, the six-axis force-torque sensor according to the present invention includes a tool connector 10 connected to an end mechanism part (tool), and a robot connector connected to an arm of a robot ( 20, and integrally connected by the three elastic beams 30 having a reduced length compared to the existing diameter between the outer diameter of the tool connector 10 and the inner diameter of the robot connector (20).

As the elastic beam 30 of the present invention is reduced in length, it is a kind of torsion beam, which is a kind of torsion beam. The method is applied to the capacitive method.

Conventional sensors do not reduce the size of the elastic beam in order to secure a space for measuring strain of the strain gauge, so that the overall size of the sensor does not become smaller than a certain limit, but the present invention is to shorten the length of the elastic beam attached to the strain gauge This can reduce the overall size of the sensor.

Therefore, the tool slit 10 adjacent to the inner end of the elastic beam 30 while simultaneously forming the outer slit 22 through the inner circumferential portion of the robot connector 20 adjacent to the outer end of the elastic beam 30. By forming the inner slit 12 through the outer circumferential portion of the), the section between the outer slit 22 and the inner slit 12 becomes an elastic beam 30 having a reduced length.

As the length of the elastic beam 30 is reduced, the outer slit 22 and the inner slit 12 are positioned at both ends thereof, and thus the elastic deformation of the elastic beam 30 can be induced.

As described above, when the length of the elastic beam is shortened, the overall size of the sensor can be reduced, but the measurement in the longitudinal direction is inevitably difficult, and thus the measurement by the capacitive method having sensitivity to minute changes is performed. It is advantageous to apply.

As the elastic beams 30 of the present invention are reduced in length, a force and torque are measured because the mechanical deformation, such as twisting, has a resilient restoring force when a certain force and torque are applied, such as a kind of torsion beam. This method is applied to the capacitive method.

To this end, the capacitance measuring means 40 is additionally mounted between the robot connector 20 and the tool connector 10.

As a configuration of the capacitance measuring means 40, the cover includes a cover 42 which is integrally mounted on the front and rear surfaces of the robot connector 20 and extends to the edge region of the tool connector 10, the cover. 42 is adopted to induce a change in position relative to a given force and torque in order to measure the change in capacitance, and the cover 42 is a tool connector 10 while the robot connector 20 is integrated. Extends in the form of cantilever beams up to

At this time, the inner surface of the cover 42 and the front and rear surfaces of the edge region of the tool connecting body 10 facing the capacitive measurement electrode 44 for measuring the change in capacitance by detecting a relative position change, respectively Attached.

The capacitance measuring electrode 44 may be adopted as a flat planar electrode or as an electrode having a comb-tooth structure facing each other in a zigzag form to improve measurement sensitivity.

Therefore, when a force acts on the tool connecting body 10 and the robot connecting body 20 so that a minute elastic deformation occurs in the elastic beam 30, the inner surface of the cover 42 and the tool connecting body facing the same ( The capacitance measuring electrode 44 attached to the front and rear of the edge region of 10) changes relative position, and the change in capacitance can be measured by detecting the relative position change at this time, and the measured capacitance change Values can be transferred to the controller and converted into forces and torques acting on the tool and robotic connections.

As described above, the conventional 6-axis force-torque sensor measures the change due to the force acting on the torque sensor by directly measuring the change through the strain gauge, but on the contrary, the capacitance due to the relative position change of the electrode for measuring the capacitance By measuring the change value, it is possible to increase the measurement accuracy of the sensor and at the same time provide an advantage that can be miniaturized the entire sensor.

10: Tool connector
12: inner slit
20: robot connector
22: outside slit
30: elastic beam
32: strain gauge
40: capacitance measuring means
42: cover
44 electrode for measuring capacitance

Claims (4)

The tool connector 10 is connected to the terminal mechanism (tool), the robot connector 20 is connected to the arm of the robot, the outer diameter of the tool connector 10 and the inner diameter of the robot connector 20 is connected It includes a plurality of elastic beams 30, the outer slit 22 is formed through the inner peripheral portion of the robot connector 20 adjacent to the outer end of the elastic beam 30 and at the same time inside the elastic beam 30 By forming the inner slit 12 through the outer circumferential portion of the tool connecting body 10 adjacent to the end, and narrows the length of the elastic beam 30 to the section between the outer slit 22 and the inner slit 12, Small 6-axis force-torque sensor of the capacitive measurement method characterized in that by mounting the capacitance measuring means 40 between the robot connector 20 and the tool connector (10).
The method according to claim 1,
The capacitance measuring means 40 is:
A cover 42 integrally mounted to the front and rear surfaces of the robot connecting body 20 and extending to the edge region of the tool connecting body 10;
An electrode 44 for capacitance measurement attached to an inner surface of the cover 42 and front and rear surfaces of an edge region of the tool connector 10 facing the cover 42;
Small six-axis force-torque sensor of the capacitive measurement method, characterized in that consisting of.
The method according to claim 2,
The capacitance measuring electrode (44) is a small six-axis force-torque sensor of the capacitance measurement method, characterized in that adopted as a flat planar electrode.
The method according to claim 2,
The capacitance measuring electrode 44 is a small six-axis force-torque sensor of the capacitance measuring method, characterized in that formed in the form of a comb structure for improving sensitivity.
KR1020110114971A 2011-11-07 2011-11-07 6-axis force-torque sensor for measuring electrostatic capacity KR20130049918A (en)

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Application Number Priority Date Filing Date Title
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9513179B2 (en) 2014-01-20 2016-12-06 Good Vibrations Engineering Ltd. Force moment sensor
CN107167267A (en) * 2017-06-09 2017-09-15 海伯森技术（深圳）有限公司 Multi-dimension force sensor and calibration method
CN109238527A (en) * 2018-11-16 2019-01-18 合肥工业大学 A kind of cross beam type elastomer for six-dimensional force sensor
CN114603605A (en) * 2022-03-07 2022-06-10 常熟理工学院 Exoskeleton tail end tendency force detection device, detection method and manufacturing method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9513179B2 (en) 2014-01-20 2016-12-06 Good Vibrations Engineering Ltd. Force moment sensor
CN107167267A (en) * 2017-06-09 2017-09-15 海伯森技术（深圳）有限公司 Multi-dimension force sensor and calibration method
CN107167267B (en) * 2017-06-09 2019-03-26 海伯森技术（深圳）有限公司 The calibration method of multi-dimension force sensor
CN109238527A (en) * 2018-11-16 2019-01-18 合肥工业大学 A kind of cross beam type elastomer for six-dimensional force sensor
CN114603605A (en) * 2022-03-07 2022-06-10 常熟理工学院 Exoskeleton tail end tendency force detection device, detection method and manufacturing method
CN114603605B (en) * 2022-03-07 2023-11-07 常熟理工学院 Exoskeleton terminal tendency force detection device, detection method and manufacturing method

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