KR20130023922A - Vibration measurement system - Google Patents

Vibration measurement system Download PDF

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Publication number
KR20130023922A
KR20130023922A KR1020110087032A KR20110087032A KR20130023922A KR 20130023922 A KR20130023922 A KR 20130023922A KR 1020110087032 A KR1020110087032 A KR 1020110087032A KR 20110087032 A KR20110087032 A KR 20110087032A KR 20130023922 A KR20130023922 A KR 20130023922A
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KR
South Korea
Prior art keywords
information
vibration
unit
sensors
display
Prior art date
Application number
KR1020110087032A
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Korean (ko)
Inventor
유재홍
Original Assignee
유재홍
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Publication date
Application filed by 유재홍 filed Critical 유재홍
Priority to KR1020110087032A priority Critical patent/KR20130023922A/en
Publication of KR20130023922A publication Critical patent/KR20130023922A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/12—Measuring characteristics of vibrations in solids by using direct conduction to the detector of longitudinal or not specified vibrations
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
    • G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)

Abstract

PURPOSE: A vibration measuring system is provided to display the information of temperature, humidity, and a video by acquiring the same on a real time basis. CONSTITUTION: A vibration measuring system comprises a convey unit(2) and a vibration measuring unit(10). A plurality of sensors(4,6,8) is attached on the convey unit. The sensors include vibration sensors measuring vibration. The vibration measuring unit receives wireless information from the sensors and displays the received wireless information. At least one of the sensors is a sensor measuring temperature and humidity. At least one of the sensors is a CCD(Charge-Coupled Device) camera for transmitting video information. [Reference numerals] (12) Receiving part; (14) Control part; (16) Selecting part; (18) Display part; (2) Convey unit; (20) Storage part

Description

Vibration Measurement System {Vibration Measurement System}

The present invention relates to a vibration measuring system, and more particularly, to a vibration measuring system capable of measuring the vibration of the conveying means in real time.

In recent years, with the rapid development of the information communication field and the popularization of information media such as computers, semiconductors constituting circuits and liquid crystal displays (LCDs) for displaying information are rapidly developing. In addition, with the development of electronic devices, solar cells and batteries (batteries) and the like have also been put into practical use.

In general, a semiconductor is manufactured by stacking a predetermined circuit pattern on a silicon wafer. The liquid crystal display is manufactured by stacking a predetermined circuit pattern on a glass. To this end, the semiconductor and the liquid crystal display are formed through a plurality of unit processes such as a photo process, an ashing process, a thin film deposition process, and an etching process. In addition, a solar cell, a battery, etc. are manufactured using the separator which divides a pole plate and a pole plate.

Here, the semiconductor, the liquid crystal display, the solar cell, the battery, and the like are manufactured through various processes, and each unit process is performed in a predetermined chamber. Thus, a conveying means for conveying the conveying material (eg glass, wafer or electrode plate, etc.) is used during each unit process. In one example, glass and wafers are transferred by a robotic arm. The conveying means is implemented in various shapes so that the conveying material can be stably conveyed during each process.

On the other hand, the vibration of the conveying means has a significant effect on the yield. For example, when the transport material is not seated at a desired point due to vibration of the transport means, the transport material should be discarded. In addition, when the vibration of the transfer means is more than the reference value increases the probability that the transfer material is broken. Therefore, there is a need for a system capable of measuring the vibration of the transport means in real time.

Accordingly, it is an object of the present invention to provide a vibration measuring system capable of measuring the vibration of the conveying means in real time.

Vibration measuring system according to an embodiment of the present invention is a vibration means for receiving the wireless information from the sensor, and the transfer means is attached to a plurality of sensors attached to the sensor including a vibration sensor for measuring the vibration; It has a measuring part.

Preferably, at least one of the plurality of sensors is a sensor for measuring temperature and humidity. At least one of the plurality of sensors is a CCD camera for transmitting video information.

The vibration measuring unit includes a receiving unit for receiving the wireless information, a selection unit for receiving the display information of the user from the outside, and at least one of the wireless information corresponding to the display information input to the selection unit to the display unit. And a display unit for displaying the information from the control unit. The vibration measuring unit further includes a storage unit for storing wireless information input to the receiving unit.

According to the vibration measuring system of the present invention there is an advantage that can measure the vibration of the transfer means in real time. In addition, there is an advantage that can be obtained by displaying the information, such as temperature, humidity and video on the process in real time.

1 is a view showing a vibration measuring system according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating vibration information and tact time information displayed on the display unit of FIG. 1.
3 is a diagram illustrating vibration information of a specific sensor displayed on the display of FIG. 1.
4 is a diagram illustrating an example of an information processing form displayed on the display unit of FIG. 1.
FIG. 5 is a diagram illustrating information and video information of a sensor displayed on the display of FIG. 1.
6 is a view showing a vibration measuring system according to another embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view showing a vibration measuring system according to an embodiment of the present invention.

Referring to Figure 1, the vibration measuring system according to the present invention is a variety of information using the transfer means 2 to which the plurality of sensors (4, 6, 8) is attached, and wireless information from the sensors (4, 6, 8) It is provided with a vibration measuring unit 10 for displaying.

The conveying means 2 is used to move the conveying material. Such conveying means 2 may be formed in the shape of any one of the currently known configuration. In one example, the transfer means 2 used in the LCD and semiconductor processes can be selected as a robot arm.

A plurality of sensors 4, 6, 8 are attached to the conveying means 2. Here, the position of the plurality of sensors 4, 6, 8 is determined so that the transport material can be moved stably. In one example, the plurality of sensors 4, 6, 8 may be located on the back of the conveying means 2.

At least one sensor of the plurality of sensors 4, 6, and 8 measures vibration of the transfer means 2, and provides vibration information measured using a wireless signal to the vibration measuring unit 10. In one example, a Gyro sensor may be used as the sensor 4 for measuring vibration. When the gyro sensor is used as the vibration sensor 4, the vibration of the transfer means 2 may be measured and the position of the transfer means may be determined. Therefore, the tact time and the like can be grasped using the information of the vibration sensor 4.

On the other hand, in the present invention can be obtained a variety of information from the sensors (4, 6, 8) attached to the conveying means (2). For example, at least one sensor 6 of the plurality of sensors 4, 6, and 8 may measure temperature and humidity, and wirelessly provide the measured temperature and humidity information to the vibration measuring unit 10. When temperature and humidity are measured from the transfer means 2, there is an advantage that the temperature and humidity information of each process can be grasped in real time.

In addition, a charge-coupled device camera (CCD) camera 8 may be further mounted on the transfer means 2 of the present invention. The CCD camera 8 mounted on the transfer means 2 wirelessly provides the video information to the vibration measuring unit 10. In this case, the vibration measuring unit 10 may watch the progress of each process as an image.

The vibration measuring unit 10 receives wireless information from the sensors 4, 6, 8 of the transfer means 2, and selectively displays the received information. To this end, the vibration measuring unit 10 includes a receiver 12, a controller 14, a selector 16, and a display 18.

The receiver 12 receives radio information from the sensors 4, 6, 8. For example, the receiver 12 may be configured as a Zigbee receiver that is an RF receiver.

The selection unit 16 receives information to be displayed on the display unit 18 from the user. For example, the selector 16 may receive display information from the user such that only one of vibration information, temperature / humidity information, and video information input to the receiver 12 is displayed.

The control unit 14 processes the information so that the wireless information received from the receiving unit 12 can be displayed on the display unit 18. In addition, the control unit 14 provides the display unit 18 with information selected from the display information input from the selection unit 16, for example, vibration information. In addition, the controller 14 calculates a communication state of the receiver 12, a tact time included in the vibration information, and provides the calculated information to the display unit 18.

The display unit 18 displays the information supplied from the control unit 14. Here, the display form of the display unit 18 may be configured in various forms so that the user can easily observe.

For example, when a request is made to display vibration information of a specific sensor, a tact time of a process, and the like from the selector 16, the controller 14 provides the requested information to the display unit 18. Then, the display unit 18 displays the vibration information and the tact time time information of the specific sensor as shown in FIG.

In addition, when requested to display the vibration information of the specific sensor from the selection unit 16, the control unit 14 provides the vibration information of the specific sensor to the display unit 18, accordingly, the display unit 18, as shown in FIG. Vibration information of the sensor is displayed. In addition, the controller 14 may provide information input from the receiver 12 in various forms in response to information input from the selector 16. For example, the controller 14 may process the information in a 3D bar form as shown in FIG. 4 and display the information on the display unit 18.

On the other hand, when the CCD camera 8 is mounted on the transfer means 2, the control unit 14 may display a moving image on the display unit 18 in response to information input from the selection unit 16. In this case, as illustrated in FIG. 5, the display unit 18 displays a video of a process along with various sensor information.

6 is a view showing a vibration measuring system according to another embodiment of the present invention. 6, the same components as in FIG. 1 are assigned the same reference numerals, and detailed description thereof will be omitted.

Referring to FIG. 6, the vibration measuring unit 100 of the vibration measuring system according to another embodiment of the present invention further includes a storage unit 20.

The storage unit 20 temporarily stores the government received from the receiving unit 12 and provides the stored information to the control unit 14. When the storage unit 20 is additionally provided in the vibration measuring unit 100, there is an advantage of statistically managing vibration, temperature, and humidity information of the transfer unit.

Although the technical idea of the present invention has been described in detail according to the above preferred embodiment, it should be noted that the above-described embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various modifications are possible within the scope of the technical idea of the present invention.

2: transfer means 4,6,8: sensor
10: vibration measuring unit 12: receiving unit
14: control unit 16: selection unit
18: display unit 20: storage unit

Claims (5)

A transfer means to which a plurality of sensors are attached, including a vibration sensor for measuring vibration;
And a vibration measuring unit for receiving wireless information from the sensors and displaying the received wireless information. The method of claim 1,
At least one of the plurality of sensors is a sensor for measuring temperature and humidity. The method of claim 1,
At least one of the plurality of sensors is a vibration measuring system, characterized in that the CCD camera for transmitting information. The method of claim 1,
The vibration measuring unit
A receiving unit for receiving the wireless information,
A selection unit for receiving the display information of the user from the outside;
A control unit for supplying at least one of the wireless information to the display unit in response to the display information input to the selection unit;
And a display unit for displaying information from the control unit. 5. The method of claim 4,
The vibration measuring unit further comprises a storage unit for storing the wireless information input to the receiving unit.
KR1020110087032A 2011-08-30 2011-08-30 Vibration measurement system KR20130023922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110087032A KR20130023922A (en) 2011-08-30 2011-08-30 Vibration measurement system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110087032A KR20130023922A (en) 2011-08-30 2011-08-30 Vibration measurement system

Publications (1)

Publication Number Publication Date
KR20130023922A true KR20130023922A (en) 2013-03-08

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Application Number Title Priority Date Filing Date
KR1020110087032A KR20130023922A (en) 2011-08-30 2011-08-30 Vibration measurement system

Country Status (1)

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