KR20130021499A - Piezoelectric sensor and method for manufacturing thereof - Google Patents
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- KR20130021499A KR20130021499A KR1020110083765A KR20110083765A KR20130021499A KR 20130021499 A KR20130021499 A KR 20130021499A KR 1020110083765 A KR1020110083765 A KR 1020110083765A KR 20110083765 A KR20110083765 A KR 20110083765A KR 20130021499 A KR20130021499 A KR 20130021499A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims description 58
- 239000000843 powder Substances 0.000 claims abstract description 160
- 239000000463 material Substances 0.000 claims abstract description 136
- 239000011032 tourmaline Substances 0.000 claims abstract description 100
- 229910052613 tourmaline Inorganic materials 0.000 claims abstract description 100
- 229940070527 tourmaline Drugs 0.000 claims abstract description 100
- 229910010272 inorganic material Inorganic materials 0.000 claims abstract description 63
- 239000011147 inorganic material Substances 0.000 claims abstract description 63
- 238000002156 mixing Methods 0.000 claims abstract description 53
- 239000011368 organic material Substances 0.000 claims description 60
- 239000000243 solution Substances 0.000 claims description 39
- 239000011259 mixed solution Substances 0.000 claims description 27
- 239000000203 mixture Substances 0.000 claims description 19
- 239000002033 PVDF binder Substances 0.000 claims description 13
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 13
- 238000005245 sintering Methods 0.000 claims description 9
- 239000002904 solvent Substances 0.000 claims description 9
- 239000005416 organic matter Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 abstract description 2
- -1 poly (ethylene) Polymers 0.000 description 19
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 12
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 8
- YCWSUKQGVSGXJO-NTUHNPAUSA-N nifuroxazide Chemical group C1=CC(O)=CC=C1C(=O)N\N=C\C1=CC=C([N+]([O-])=O)O1 YCWSUKQGVSGXJO-NTUHNPAUSA-N 0.000 description 8
- 229910052500 inorganic mineral Inorganic materials 0.000 description 6
- 239000011707 mineral Substances 0.000 description 6
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Divinylene sulfide Natural products C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 5
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 4
- 239000005977 Ethylene Substances 0.000 description 4
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 150000005072 1,3,4-oxadiazoles Chemical class 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229930192474 thiophene Natural products 0.000 description 3
- VXNZUUAINFGPBY-UHFFFAOYSA-N 1-Butene Chemical compound CCC=C VXNZUUAINFGPBY-UHFFFAOYSA-N 0.000 description 2
- OEVVKKAVYQFQNV-UHFFFAOYSA-N 1-ethenyl-2,4-dimethylbenzene Chemical compound CC1=CC=C(C=C)C(C)=C1 OEVVKKAVYQFQNV-UHFFFAOYSA-N 0.000 description 2
- GVLZQVREHWQBJN-UHFFFAOYSA-N 3,5-dimethyl-7-oxabicyclo[2.2.1]hepta-1,3,5-triene Chemical compound CC1=C(O2)C(C)=CC2=C1 GVLZQVREHWQBJN-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229920000265 Polyparaphenylene Polymers 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 2
- WDECIBYCCFPHNR-UHFFFAOYSA-N chrysene Chemical compound C1=CC=CC2=CC=C3C4=CC=CC=C4C=CC3=C21 WDECIBYCCFPHNR-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- VPUGDVKSAQVFFS-UHFFFAOYSA-N coronene Chemical compound C1=C(C2=C34)C=CC3=CC=C(C=C3)C4=C4C3=CC=C(C=C3)C4=C2C3=C1 VPUGDVKSAQVFFS-UHFFFAOYSA-N 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 235000013847 iso-butane Nutrition 0.000 description 2
- 239000011224 oxide ceramic Substances 0.000 description 2
- 229910052574 oxide ceramic Inorganic materials 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920000052 poly(p-xylylene) Polymers 0.000 description 2
- 229920003251 poly(α-methylstyrene) Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 2
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- OMCUOJTVNIHQTI-UHFFFAOYSA-N 1,4-bis(4-phenylphenyl)benzene Chemical group C1=CC=CC=C1C1=CC=C(C=2C=CC(=CC=2)C=2C=CC(=CC=2)C=2C=CC=CC=2)C=C1 OMCUOJTVNIHQTI-UHFFFAOYSA-N 0.000 description 1
- ZEMDSNVUUOCIED-UHFFFAOYSA-N 1-phenyl-4-[4-[4-(4-phenylphenyl)phenyl]phenyl]benzene Chemical group C1=CC=CC=C1C1=CC=C(C=2C=CC(=CC=2)C=2C=CC(=CC=2)C=2C=CC(=CC=2)C=2C=CC=CC=2)C=C1 ZEMDSNVUUOCIED-UHFFFAOYSA-N 0.000 description 1
- IGGDKDTUCAWDAN-UHFFFAOYSA-N 1-vinylnaphthalene Chemical compound C1=CC=C2C(C=C)=CC=CC2=C1 IGGDKDTUCAWDAN-UHFFFAOYSA-N 0.000 description 1
- KAESVJOAVNADME-UHFFFAOYSA-N 1H-pyrrole Natural products C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 1
- JLTPSDHKZGWXTD-UHFFFAOYSA-N 2-[6-(dicyanomethylidene)naphthalen-2-ylidene]propanedinitrile Chemical compound N#CC(C#N)=C1C=CC2=CC(=C(C#N)C#N)C=CC2=C1 JLTPSDHKZGWXTD-UHFFFAOYSA-N 0.000 description 1
- LYTMVABTDYMBQK-UHFFFAOYSA-N 2-benzothiophene Chemical compound C1=CC=CC2=CSC=C21 LYTMVABTDYMBQK-UHFFFAOYSA-N 0.000 description 1
- DHDHJYNTEFLIHY-UHFFFAOYSA-N 4,7-diphenyl-1,10-phenanthroline Chemical class C1=CC=CC=C1C1=CC=NC2=C1C=CC1=C(C=3C=CC=CC=3)C=CN=C21 DHDHJYNTEFLIHY-UHFFFAOYSA-N 0.000 description 1
- CJOVEVFPKYVVJR-UHFFFAOYSA-N 4-methylidenehex-1-en-3-one Chemical group C(C=C)(=O)C(=C)CC CJOVEVFPKYVVJR-UHFFFAOYSA-N 0.000 description 1
- 229920003026 Acene Polymers 0.000 description 1
- GVNWZKBFMFUVNX-UHFFFAOYSA-N Adipamide Chemical compound NC(=O)CCCCC(N)=O GVNWZKBFMFUVNX-UHFFFAOYSA-N 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N N-phenyl amine Natural products NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 1
- 150000001422 N-substituted pyrroles Chemical class 0.000 description 1
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229920002367 Polyisobutene Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 150000001448 anilines Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- HFACYLZERDEVSX-UHFFFAOYSA-N benzidine Chemical class C1=CC(N)=CC=C1C1=CC=C(N)C=C1 HFACYLZERDEVSX-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- LDLDYFCCDKENPD-UHFFFAOYSA-N ethenylcyclohexane Chemical compound C=CC1CCCCC1 LDLDYFCCDKENPD-UHFFFAOYSA-N 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 230000005621 ferroelectricity Effects 0.000 description 1
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- GPRIERYVMZVKTC-UHFFFAOYSA-N p-quaterphenyl Chemical group C1=CC=CC=C1C1=CC=C(C=2C=CC(=CC=2)C=2C=CC=CC=2)C=C1 GPRIERYVMZVKTC-UHFFFAOYSA-N 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 229920001596 poly (chlorostyrenes) Polymers 0.000 description 1
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 1
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 1
- 229920000323 polyazulene Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920002776 polycyclohexyl methacrylate Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 229920000414 polyfuran Polymers 0.000 description 1
- 229920000582 polyisocyanurate Polymers 0.000 description 1
- 239000011495 polyisocyanurate Substances 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 229920000306 polymethylpentene Polymers 0.000 description 1
- 239000011116 polymethylpentene Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 150000003219 pyrazolines Chemical class 0.000 description 1
- 150000003233 pyrroles Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 1
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical class C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 150000003577 thiophenes Chemical class 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
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- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
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Abstract
Description
본 발명은 압전센서에 관한 것으로, 특히 강유전물질에 전기석 분말이나 전기석 분말과 영구자석 분말을 혼합하여 생성된 압전재료의 양측에 전극을 형성함으로써, 우수한 압전특성을 나타낼 수 있도록 해 주는 압전센서 및 그 제조방법에 관한 것이다.The present invention relates to a piezoelectric sensor, and more particularly, to a piezoelectric sensor having an electrode on both sides of a piezoelectric material produced by mixing a tourmaline powder, a tourmaline powder, and a permanent magnet powder in a ferroelectric material, thereby exhibiting excellent piezoelectric characteristics. It relates to a manufacturing method.
압전소자는 압전기(壓電氣) 현상을 나타내는 소자로서, 대표적인 예로서는 수정, 전기석, 로셸염 등이 있다. 상기 압전소자는 피에조 전기소자라고도 한다.Piezoelectric elements are elements exhibiting a piezoelectric phenomenon, and examples thereof include quartz crystals, tourmaline, and Rochelle salt. The piezoelectric element is also called a piezoelectric element.
여기서, 압전기 현상 즉, 압전성은 압전 소자에 일정한 방향에서 압력을 가하면 소자의 양면에 외력에 비례하는 유전 분극이 발생하여 전기가 생성되는 특성을 말며, 이는 피에조 전기(Piezo-electric)라고도 한다. 또한 반대로 압전소자에 전기적인 방법으로 유전 분극을 일으키게 하면 힘이 발생하여 변형이 생기기도 한다.Here, the piezoelectric phenomenon, that is, piezoelectricity, refers to a characteristic in which electricity is generated by generating a dielectric polarization proportional to an external force on both surfaces of a device when pressure is applied to the piezoelectric device in a predetermined direction, which is also referred to as piezo-electric. On the contrary, when the dielectric polarization is caused to the piezoelectric element by an electric method, a force is generated and deformation occurs.
이에 따라 최근에는 상기한 압전특성을 이용하여 압전재료가 다양한 분야에서 응용되고 있다. Accordingly, in recent years, piezoelectric materials have been used in various fields using the piezoelectric properties described above.
특히, 압전재료의 양면에 전극을 형성하여 구성되는 압전 센서에 있어서 종래에는 상기 압전재료로서 PZA계 산화물 세라믹스를 주로 이용하였다.In particular, in piezoelectric sensors formed by forming electrodes on both surfaces of a piezoelectric material, PZA-based oxide ceramics have been mainly used as the piezoelectric material.
상기 PZA계 산화물 세라믹스는 우수한 강유전성, 초전성 및 압전 특성을 가지고 있음은 물론, 고감도, 고출력, 빠른 응답속도 등의 장점을 갖는다. The PZA-based oxide ceramics have excellent ferroelectricity, superelectricity and piezoelectric properties, as well as high sensitivity, high power, and fast response speed.
그러나, 압전센서가 다양한 분야에 적용되고 있는 만큼 보다 양호한 압전특성을 갖는 압전센서가 요구되고 있는 것이 현실이다. However, as piezoelectric sensors have been applied to various fields, there is a demand for piezoelectric sensors having better piezoelectric properties.
이에, 본 발명은 상기한 사정을 감안하여 창출된 것으로, 강유전물질에 전기석 분말이나 전기석 분말과 영구자석 분말을 혼합하여 생성된 압전재료의 양측에 전극을 형성하여 압전센서를 구성함으로써, 보다 우수한 압전특성을 나타낼 수 있도록 된 압전센서 및 그 제조방법을 제공함에 그 기술적 목적이 있다.Accordingly, the present invention has been made in view of the above circumstances, and by forming electrodes on both sides of the piezoelectric material produced by mixing tourmaline powder, tourmaline powder and permanent magnet powder in ferroelectric material, the piezoelectric sensor is constituted, thereby providing better piezoelectric properties. It is a technical object to provide a piezoelectric sensor and a method of manufacturing the same that can exhibit the characteristics.
본 발명의 제1 관점에 따른 압전센서는 압전재료의 양면에 전극을 형성하여 이루어지는 압전센서에 있어서, 상기 압전재료는 강유전무기물질과 전기석 분말의 혼합물로 이루어지는 것을 특징으로 한다.The piezoelectric sensor according to the first aspect of the present invention is a piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material, wherein the piezoelectric material is made of a mixture of ferroelectric inorganic material and tourmaline powder.
또한, 본 발명의 제2 관점에 따른 압전센서는 압전재료의 양면에 전극을 형성하여 이루어지는 압전센서에 있어서, 상기 압전재료는 강유전무기물질과 전기석 분말 및 유기물의 혼합물로 이루어지는 것을 특징으로 한다.In addition, the piezoelectric sensor according to the second aspect of the present invention is a piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material, characterized in that the piezoelectric material is made of a mixture of ferroelectric inorganic material, tourmaline powder and organic material.
또한, 본 발명의 제3 관점에 따른 압전센서는 압전재료의 양면에 전극을 형성하여 이루어지는 압전센서에 있어서, 상기 압전재료는 강유전무기물질과 전기석 분말 및 강유전유기물질의 혼합물로 이루어지는 것을 특징으로 한다.In addition, the piezoelectric sensor according to the third aspect of the present invention is a piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material, wherein the piezoelectric material is made of a mixture of ferroelectric inorganic material, tourmaline powder and ferroelectric organic material. .
또한, 본 발명의 제4 관점에 따른 압전센서는 압전재료의 양면에 전극을 형성하여 이루어지는 압전센서에 있어서, 상기 압전재료는 강유전유기물질과 전기석 분말의 혼합물로 이루어지는 것을 특징으로 한다.In addition, the piezoelectric sensor according to the fourth aspect of the present invention is a piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material, wherein the piezoelectric material is made of a mixture of ferroelectric organic material and tourmaline powder.
또한, 본 발명의 제5 관점에 따른 압전센서는 하는 압전재료의 양면에 전극을 형성하여 이루어지는 압전센서에 있어서, 상기 압전재료는 강유전무기물질과 전기석 분말 및 영구자석 분말의 혼합물로 이루어지는 것을 특징으로 한다.In addition, the piezoelectric sensor according to the fifth aspect of the present invention is a piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material, characterized in that the piezoelectric material is composed of a mixture of ferroelectric inorganic material, tourmaline powder and permanent magnet powder. do.
또한, 본 발명의 제6 관점에 따른 압전센서는 압전재료의 양면에 전극을 형성하여 이루어지는 압전센서에 있어서, 상기 압전재료는 강유전무기물질과 전기석 분말,영구자석 분말 및 유기물의 혼합물로 이루어지는 것을 특징으로 한다.In addition, the piezoelectric sensor according to the sixth aspect of the present invention is a piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material, wherein the piezoelectric material is made of a mixture of ferroelectric inorganic materials, tourmaline powder, permanent magnet powder and organic material. It is done.
또한, 본 발명의 제7 관점에 따른 압전센서는 압전재료의 양면에 전극을 형성하여 이루어지는 압전센서에 있어서, 상기 압전재료는 강유전무기물질과 전기석 분말, 영구자석 분말 및 강유전유기물질의 혼합물로 이루어지는 것을 특징으로 한다.In addition, the piezoelectric sensor according to the seventh aspect of the present invention is a piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material, the piezoelectric material is made of a mixture of ferroelectric inorganic material, tourmaline powder, permanent magnet powder and ferroelectric organic material It is characterized by.
또한, 본 발명의 제8 관점에 따른 압전센서는 압전재료의 양면에 전극을 형성하여 이루어지는 압전센서에 있어서, 상기 압전재료는 강유전 유기물질과 전기석 분말 및 영구자석 분말의 혼합물로 이루어지는 것을 특징으로 한다. In addition, the piezoelectric sensor according to the eighth aspect of the present invention is a piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material, wherein the piezoelectric material is made of a mixture of ferroelectric organic material, tourmaline powder and permanent magnet powder. .
또한, 본 발명의 제9 관점에 따른 압전센서 제조방법은 강유전무기물질과 전기석 분말을 혼합하여 압전재료를 생성하는 제1 단계와, 상기 압전재료의 양면에 전극을 형성하는 제2 단계를 포함하여 구성되는 것을 특징으로 한다. In addition, the method of manufacturing a piezoelectric sensor according to the ninth aspect of the present invention includes a first step of generating a piezoelectric material by mixing ferroelectric inorganic materials and tourmaline powder, and a second step of forming electrodes on both surfaces of the piezoelectric material. It is characterized in that the configuration.
또한, 본 발명의 제10 관점에 따른 압전센서 제조방법은 강유전무기물질과 전기석 분말 및 유기물질을 혼합하여 압전재료를 생성하는 제11 단계와, 상기 압전재료의 양면에 전극을 형성하는 제12 단계를 포함하여 구성되는 것을 특징으로 한다.In addition, the piezoelectric sensor manufacturing method according to the tenth aspect of the present invention comprises the eleventh step of generating a piezoelectric material by mixing the ferroelectric inorganic material, tourmaline powder and organic material, and the twelfth step of forming electrodes on both sides of the piezoelectric material Characterized in that comprises a.
또한, 본 발명의 제11 관점에 따른 압전센서 제조방법은 강유전무기물질과 전기석 분말 및 강유전유기물질을 혼합하여 압전재료를 생성하는 제21 단계와, 상기 압전재료의 양면에 전극을 형성하는 제22 단계를 포함하여 구성되는 것을 특징으로 한다.In addition, the piezoelectric sensor manufacturing method according to the eleventh aspect of the present invention is a twenty-first step of generating a piezoelectric material by mixing the ferroelectric inorganic material, tourmaline powder and ferroelectric organic material, and the twenty-second forming an electrode on both sides of the piezoelectric material Characterized in that comprises a step.
또한, 본 발명의 제12 관점에 따른 압전센서 제조방법은 강유전유기물질과 전기석 분말을 혼합하여 압전재료를 생성하는 제31 단계와, 상기 압전재료의 양면에 전극을 형성하는 제32 단계를 포함하여 구성되는 것을 특징으로 한다.In addition, the method of manufacturing a piezoelectric sensor according to a twelfth aspect of the present invention includes a thirty-one step of generating a piezoelectric material by mixing ferroelectric organic materials and tourmaline powder, and a thirty-second step of forming electrodes on both surfaces of the piezoelectric material. It is characterized in that the configuration.
또한, 본 발명의 제13 관점에 따른 압전센서 제조방법은 강유전무기물질과 전기석 분말 및 영구자석 분말을 혼합하여 압전재료를 생성하는 제41 단계와, 상기 압전재료의 양면에 전극을 형성하는 제42 단계를 포함하여 구성되는 것을 특징으로 한다.In addition, the piezoelectric sensor manufacturing method according to the thirteenth aspect of the present invention comprises the step 41 of mixing the ferroelectric inorganic material, tourmaline powder and permanent magnet powder to produce a piezoelectric material, and for forming electrodes on both sides of the piezoelectric material Characterized in that comprises a step.
또한, 본 발명의 제14 관점에 따른 압전센서 제조방법은 강유전무기물질과 전기석 분말, 영구자석 분말 및 유기물질을 혼합하여 압전재료를 생성하는 제51 단계와, 상기 압전재료의 양면에 전극을 형성하는 제52 단계를 포함하여 구성되는 것을 특징으로 한다. In addition, the piezoelectric sensor manufacturing method according to the fourteenth aspect of the present invention comprises the 51st step of producing a piezoelectric material by mixing the ferroelectric inorganic material, tourmaline powder, permanent magnet powder and organic material, and forming electrodes on both sides of the piezoelectric material It characterized in that it comprises a 52-step.
또한, 본 발명의 제15 관점에 따른 압전센서 제조방법은 강유전무기물질과 전기석 분말, 영구자석 분말 및 강유전유기물질을 혼합하여 압전재료를 생성하는 제61 단계와, 상기 압전재료의 양면에 전극을 형성하는 제62 단계를 포함하여 구성되는 것을 특징으로 한다.In addition, the piezoelectric sensor manufacturing method according to the fifteenth aspect of the present invention comprises the 61st step of producing a piezoelectric material by mixing ferroelectric inorganic material and tourmaline powder, permanent magnet powder and ferroelectric organic material, and the electrode on both sides of the piezoelectric material And a sixty sixth step of forming.
또한, 본 발명의 제16 관점에 따른 압전센서 제조방법은 강유전유기물질과 전기석 분말 및 영구자석 분말을 혼합하여 압전재료를 생성하는 제71 단계와, 상기 압전재료의 양면에 전극을 형성하는 제72 단계를 포함하여 구성되는 것을 특징으로 한다. In addition, the piezoelectric sensor manufacturing method according to the sixteenth aspect of the present invention comprises the step 71 of producing a piezoelectric material by mixing a ferroelectric organic material, tourmaline powder and permanent magnet powder, 72nd to form electrodes on both sides of the piezoelectric material Characterized in that comprises a step.
본 발명에 의하면 강유전물질에 전기석 분말이나 전기석 분말과 영구자석 분말을 혼합하여 양호한 압전특성을 갖는 압전재료의 양측에 전극을 형성함으로써, 압전특성이 양호하도록 된 압전센서의 제작이 가능하게 된다.According to the present invention, the electrode is formed on both sides of the piezoelectric material having good piezoelectric properties by mixing tourmaline powder, tourmaline powder and permanent magnet powder in the ferroelectric material, thereby making it possible to manufacture the piezoelectric sensor with good piezoelectric properties.
도1은 본 발명의 제1 실시예에 따른 압전센서의 구성을 설명하기 위한 도면.1 is a view for explaining the configuration of a piezoelectric sensor according to a first embodiment of the present invention.
이하, 도면을 참조하여 본 발명에 따른 실시예를 설명한다. 단, 이하에 설명하는 실시예는 본 발명의 하나의 바람직한 구현예를 예시적으로 나타낸 것으로서, 이러한 실시예의 예시는 본 발명의 권리범위를 제한하기 위한 것이 아니다. 본 발명은 그 기술적 사상을 벗어나지 않는 범위내에서 다양하게 변형시켜 실시할 수 있다.Hereinafter, embodiments according to the present invention will be described with reference to the drawings. However, the embodiments described below are illustrative of one preferred embodiment of the present invention, and examples of such embodiments are not intended to limit the scope of the present invention. The present invention can be variously modified without departing from the technical idea thereof.
도1은 본 발명에 따른 압전센서의 구성을 개략적으로 도시한 도면이다.1 is a view schematically showing the configuration of a piezoelectric sensor according to the present invention.
도1에 도시된 바와 같이 본 발명에 따른 압전센서는 압전재료(10)의 양면에 제1 및 제2 전극(20)을 각각 코팅하여 이루어진다.As shown in FIG. 1, the piezoelectric sensor according to the present invention is formed by coating the first and
여기서, 상기 제1 및 제2 전극(20)은 전도성을 갖는 물질, 즉 금속물질로서 이루어질 수 있다.Here, the first and
또한, 상기 압전재료(10)는 다음과 같은 형태로 이루어질 수 있다.In addition, the
1. 강유전무기물과 전기석 분말의 혼합.1. Mixing of ferroelectric mineral and tourmaline powder.
2. 강유전무기물과 전기석 분말 및 유기물의 혼합.2. Mixing of ferroelectric mineral, tourmaline powder and organic matter.
3. 강유전무기물과 전기석 분말 및 강유전유기물의 혼합.3. Mix of ferroelectric minerals, tourmaline powder and ferroelectric organics.
4. 강유전유기물과 전기석 분말의 혼합.4. Mixing ferroelectric organic and tourmaline powder.
5. 강유전무기물과 전기석 분말 및 영구자석 분말의 혼합.5. Mix of ferroelectric mineral, tourmaline powder and permanent magnet powder.
6. 강유전무기물과 전기석 분말, 영구자석 분말 및 유기물의 혼합.6. Mixing of ferroelectric mineral and tourmaline powder, permanent magnet powder and organic matter.
7. 강유전무기물과 전기석 분말, 영구자석 분말 및 강유전유기물의 혼합.7. Mix of ferroelectric mineral and tourmaline powder, permanent magnet powder and ferroelectric organic matter.
8. 강유전유기물과 전기석 분말 및 영구자석 분말의 혼합. 8. Mixing ferroelectric organic and tourmaline powder and permanent magnet powder.
여기서, 상기 혼합되는 물질의 혼합비율은 필요에 따라 적절하게 설정될 수 있다. Here, the mixing ratio of the material to be mixed may be appropriately set as necessary.
또한, 상기 압전재료(10)를 구성하는 강유전 물질과 전기석 분말의 혼합방법으로는In addition, as a method of mixing the ferroelectric material and tourmaline powder constituting the
1. 강유전 물질의 분말과 전기석 분말을 혼합한 후, 이를 용매에 녹여서 혼합용액을 생성.1. After mixing powder of ferroelectric material and tourmaline powder, dissolving it in solvent to produce mixed solution.
2. 강유전 물질 용액에 전기석 분말을 용해시켜 혼합용액을 생성.2. Dissolve tourmaline powder in ferroelectric material solution to produce mixed solution.
3. 강유전 물질 용액에 전기석 분말의 용액을 혼합하여 혼합용액을 생성.3. A solution of tourmaline powder is mixed with ferroelectric material solution to produce a mixed solution.
4. 강유전 물질의 분말과 전기석 분말을 혼합 및 소결하여 타겟을 생성.4. The target is produced by mixing and sintering ferroelectric powder and tourmaline powder.
등의 방법을 사용할 수 있다.And the like can be used.
이때, 상기 강유전 물질과 전기석 분말의 혼합방식은 강유전 물질과 전기석 분말 및 영구자석 분말의 혼합에 대해서도 동일하게 적용할 수 있다.In this case, the mixing method of the ferroelectric material and the tourmaline powder may be equally applicable to the mixing of the ferroelectric material, tourmaline powder and permanent magnet powder.
또한, 상기 압전재료(10)에 혼합되는 강유전 무기물로는 일반적으로 PZT가 사용될 수 있다.In addition, PZT may be generally used as the ferroelectric inorganic material mixed with the
또한, 상기 압전재료(10)에 혼합되는 강유전 유기물로는 β상 PVDF가 사용될 수 있다.In addition, β-phase PVDF may be used as the ferroelectric organic material mixed in the
여기서, 상기 압전재료(10)에 혼합되는 강유전 유기물로서 β상 PVDF를 사용하는 경우에 있어서는 PVDF를 강유전무기물 및/또는 전기석 분말이나 전기석 분말과 영구자석 분말과 혼합하여 압전재료(10)를 생성한 후, 이 압전재료(10)를 일정 온도 이상으로 열처리 한 후 β상이 형성되는 온도로 급속냉각시킴으로써 압전재료(10)를 완성하게 된다. 예컨대, 상기 β상 PVDF를 형성하는 방법으로는 압전재료(10)에 전극(20)을 코팅할 때 열처리 후 급속냉각하거나 또는 압전재료(10)의 양면에 전극(20)을 코팅한 상태에서 다시 열처리를 수행한 후 급속냉각시키는 등의 방법이 있을 수 있다.이때, 상기 β상 PVDF를 형성하는 열처리 온도는 약 200℃이고, 급속냉각 온도는 약 65℃로 설정될 수 있다.In the case where β-phase PVDF is used as the ferroelectric organic material to be mixed with the
또한, 상기 압전재료(10)에 혼합되는 유기물로는 일반적인 모노머(monomer), 올리고머(oligomer), 폴리머(polymer), 코폴리머(copolymer), 바람직하게는 유전율이 높은 유기물 재료가 사용될 수 있다.In addition, as the organic material mixed in the
이들 재료로서는 예컨대 PVP(polyvinyl pyrrolidone), PC(poly carbonate), PVC(polyvinyl chloride), PS(polystyrene), 에폭시(epoxy), PMMA(polymethyl methacrylate), PI(polyimide), PE(polyehylene), PVA(polyvinyl alcohol), 나일론 66(polyhezamethylene adipamide), PEKK(polytherketoneketone) 등이 있다.These materials include, for example, polyvinyl pyrrolidone (PVP), polycarbonate (PC), polyvinyl chloride (PVC), polystyrene (PS), epoxy (epoxy), polymethyl methacrylate (PMMA), polyimide (PE), poly (ethylene) (PE), and PVA ( polyvinyl alcohol), nylon 66 (polyhezamethylene adipamide), and PEKK (polytherketoneketone).
또한, 상기 유기물로서는 불화 파라-자일렌(fluorinated para-xylene), 플루오로폴리아릴에테르(fluoropolyarylether), 불화 폴리이미드(fluorinated polyimide), 폴리스티렌(polystyrene), 폴리(α-메틸 스티렌)(poly(α-methyl styrene)), 폴리(α-비닐나프탈렌)(poly(α-vinylnaphthalene)), 폴리(비닐톨루엔)(poly(vinyltoluene)), 폴리에틸렌(polyethylene), 시스-폴리부타디엔(cis-polybutadiene), 폴리프로필렌(polypropylene), 폴리이소프렌(polyisoprene), 폴리(4-메틸-1-펜텐)(poly(4-methyl-1-pentene)), 폴리(테트라플루오로에틸렌)(poly(tetrafluoroethylene)), 폴리(클로로트리플루오로에틸렌)(poly(chlorotrifluoroethylene), 폴리(2-메틸-1,3-부타디엔)(poly(2-methyl-1,3-butadiene)), 폴리(p-크실릴렌)(poly(p-xylylene)), 폴리(α-α-α'-α'-테트라플루오로-p-크실릴렌)(poly(α-α-α'-α'-tetrafluoro-p-xylylene)), 폴리[1,1-(2-메틸 프로판)비스(4-페닐)카보네이트](poly[1,1-(2-methyl propane)bis(4-phenyl)carbonate]), 폴리(시클로헥실 메타크릴레이트)(poly(cyclohexyl methacrylate)), 폴리(클로로스티렌)(poly(chlorostyrene)), 폴리(2,6-디메틸-1,4-페닐렌 에테르)(poly(2,6-dimethyl-1,4-phenylene ether)), 폴리이소부틸렌(polyisobutylene), 폴리(비닐 시클로헥산)(poly(vinyl cyclohexane)), 폴리(아릴렌 에테르)(poly(arylene ether)) 및 폴리페닐렌(polyphenylene) 등의 비극성 유기물이나, 폴리(에틸렌/테트라플루오로에틸렌)(poly(ethylene/tetrafluoroethylene)), 폴리(에틸렌/클로로트리플루오로에틸렌)(poly(ethylene/chlorotrifluoroethylene)), 불화 에틸렌/프로필렌 코폴리머(fluorinated ethylene/propylene copolymer), 폴리스티렌-코-α-메틸 스티렌(polystyrene-co-α-methyl styrene), 에틸렌/에틸 아크릴레이트 코폴리머(ethylene/ethyl acrylate copolymer), 폴리(스티렌/10%부타디엔)(poly(styrene/10%butadiene), 폴리(스티렌/15%부타디엔)(poly(styrene/15%butadiene), 폴리(스티렌/2,4-디메틸스티렌)(poly(styrene/2,4-dimethylstyrene), Cytop, Teflon AF, 폴리프로필렌-코-1-부텐(polypropylene-co-1-butene) 등의 저유전율 코폴리머 등이 사용될 수 있다.In addition, as the organic material, fluorinated para-xylene, fluoropolyarylether, fluorinated polyimide, polystyrene, poly (α-methyl styrene) (poly (α) -methyl styrene), poly (α-vinylnaphthalene), poly (vinyltoluene), polyethylene, cis-polybutadiene, poly Propylene, polyisoprene, poly (4-methyl-1-pentene), poly (tetrafluoroethylene), poly ( Chlorotrifluoroethylene (poly (chlorotrifluoroethylene), poly (2-methyl-1,3-butadiene) (poly (2-methyl-1,3-butadiene)), poly (p-xylylene) (poly ( p-xylylene)), poly (α-α-α'-α'-tetrafluoro-p-xylylene) (poly (α-α-α'-α'-tetrafluoro-p-xylylene)), poly [1,1- (2-methyl propane) bis (4-phenyl) carbonate] (poly [1,1- (2-methyl propane) bis (4-phenyl) carbonate]), poly (cyclohexyl methacrylate), poly (chlorostyrene), poly (2,6- Dimethyl-1,4-phenylene ether) (poly (2,6-dimethyl-1,4-phenylene ether)), polyisobutylene, poly (vinyl cyclohexane), Nonpolar organic substances such as poly (arylene ether) and polyphenylene, poly (ethylene / tetrafluoroethylene), poly (ethylene / chlorotri Poly (ethylene / chlorotrifluoroethylene), fluorinated ethylene / propylene copolymer, polystyrene-co-α-methyl styrene, ethylene / ethyl acryl Ethylene / ethyl acrylate copolymer, poly (styrene / 10% butadiene) (poly (styrene / 10% butadiene), poly (styrene / 15% butadiene) (pol y (styrene / 15% butadiene), poly (styrene / 2,4-dimethylstyrene) (poly (styrene / 2,4-dimethylstyrene), Cytop, Teflon AF, polypropylene-co-1-butene (polypropylene-co- Low dielectric constant copolymers such as 1-butene) and the like can be used.
그리고, 그 밖에 폴리아센(polyacene), 폴리페닐렌(polyphenylene), 폴리(페닐렌 비닐렌) (poly(phenylene vinylene)), 폴리플루오렌(polyfluorene)과 같은 공액 탄화수소 폴리머, 및 그러한 공액 탄화수소의 올리고머; 안트라센(anthracene), 테트라센(tetracene), 크리센(chrysene), 펜타센(pentacene), 피렌(pyrene), 페릴렌(perylene), 코로넨(coronene)과 같은 축합 방향족 탄화수소 (condensed aromatic hydrocarbons); p-쿼터페닐(p-quaterphenyl)(p-4P), p-퀸쿼페닐(p-quinquephenyl)(p-5P), p-섹시페닐(p-sexiphenyl)(p-6P)과 같은 올리고머성 파라 치환 페닐렌 (oligomeric para substituted phenylenes); 폴리(3-치환 티오펜) (poly(3-substituted thiophene)), 폴리(3,4-이치환 티오펜) (poly(3,4-bisubstituted thiophene)), 폴리벤조티오펜 (polybenzothiophene)), 폴리이소티아나프텐 (polyisothianaphthene), 폴리(N-치환 피롤) (poly(N-substituted pyrrole)), 폴리(3-치환 피롤) (poly(3-substituted pyrrole)), 폴리(3,4-이치환 피롤) (poly(3,4-bisubstituted pyrrole)), 폴리퓨란(polyfuran), 폴리피리딘(polypyridine), 폴리-1,3,4-옥사디아졸 (poly-1,3,4-oxadiazoles), 폴리이소티아나프텐(polyisothianaphthene), 폴리(N-치환 아닐린) (poly(N-substituted aniline)), 폴리(2-치환 아닐린) (poly(2-substituted aniline)), 폴리(3-치환 아닐린) (poly(3-substituted aniline)), 폴리(2,3-치환 아닐린) (poly(2,3-bisubstituted aniline)), 폴리아줄렌 (polyazulene), 폴리피렌 (polypyrene)과 같은 공액 헤테로고리형 폴리머; 피라졸린 화합물 (pyrazoline compounds); 폴리셀레노펜 (polyselenophene); 폴리벤조퓨란 (polybenzofuran); 폴리인돌 (polyindole); 폴리피리다진 (polypyridazine); 벤지딘 화합물 (benzidine compounds); 스틸벤 화합물 (stilbene compounds); 트리아진 (triazines); 치환된 메탈로- 또는 메탈-프리 포르핀 (substituted metallo- or metal-free porphines), 프탈로시아닌 (phthalocyanines), 플루오로프탈로시아닌 (fluorophthalocyanines), 나프탈로시아닌 (naphthalocyanines) 또는 플루오로나프탈로시아닌 (fluoronaphthalocyanines); C60 및 C70 풀러렌(fullerenes); N,N'-디알킬, 치환된 디알킬, 디아릴 또는 치환된 디아릴-1,4,5,8-나프탈렌테트라카르복실릭 디이미드 (N,N'-dialkyl, substituted dialkyl, diaryl or substituted diaryl-1,4,5,8-naphthalenetetracarboxylic diimide) 및 불화 유도체; N,N'-디알킬, 치환된 디알킬, 디아릴 또는 치환된 디아릴 3,4,9,10-페릴렌테트라카르복실릭 디이미드 (N,N'-dialkyl, substituted dialkyl, diaryl or substituted diaryl 3,4,9,10-perylenetetracarboxylic diimide); 배쏘페난쓰롤린 (bathophenanthroline); 디페노퀴논 (diphenoquinones); 1,3,4-옥사디아졸 (1,3,4-oxadiazoles); 11,11,12,12-테트라시아노나프토-2,6-퀴노디메탄 (11,11,12,12-tetracyanonaptho-2,6-quinodimethane); α,α'-비스(디티에노[3,2-b2',3'-d]티오펜) (α,α'-bis(dithieno[3,2-b2',3'-d]thiophene)); 2,8-디알킬, 치환된 디알킬, 디아릴 또는 치환된 디아릴 안트라디티오펜 (2,8-dialkyl, substituted dialkyl, diaryl or substituted diaryl anthradithiophene); 2,2'-비벤조[1,2-b:4,5-b']디티오펜 (2,2'-bibenzo[1,2-b:4,5-b']dithiophene) 등의 유기 반-전도성(semi-conducting) 재료나 이들의 화합물, 올리고머 및 화합물 유도체 등이 사용될 수 있다.And other conjugated hydrocarbon polymers such as polyacene, polyphenylene, poly (phenylene vinylene), polyfluorene, and oligomers of such conjugated hydrocarbons. ; Condensed aromatic hydrocarbons such as anthracene, tetratracene, chrysene, pentacene, pyrene, perylene and coronene; oligomeric para substitutions such as p-quaterphenyl (p-4P), p-quinquephenyl (p-5P), p-sexiphenyl (p-6P) Oligomeric para substituted phenylenes; Poly (3-substituted thiophene), poly (3,4-bisubstituted thiophene), polybenzothiophene, poly Isothianaphthene, poly (N-substituted pyrrole), poly (3-substituted pyrrole), poly (3,4-disubstituted pyrrole) ) (poly (3,4-bisubstituted pyrrole)), polyfuran, polypyridine, poly-1,3,4-oxadiazoles, polyiso Polyisothianaphthene, poly (N-substituted aniline), poly (2-substituted aniline), poly (2-substituted aniline), poly (3-substituted aniline) (poly Conjugated heterocyclic polymers such as (3-substituted aniline), poly (2,3-bisubstituted aniline), polyazulene, polypyrene; Pyrazoline compounds; Polyselenophene; Polybenzofuran; Polyindole; Polypyridazine; Benzidine compounds; Stilbene compounds; Triazines; Substituted metallo- or metal-free porphines, phthalocyanines, fluorophthalocyanines, naphthalocyanines or fluoronaphthalocyanines; C 60 and C 70 fullerenes; N, N'-dialkyl, substituted dialkyl, diaryl or substituted diaryl-1,4,5,8-naphthalenetetracarboxylic diimide (N, N'-dialkyl, substituted dialkyl, diaryl or substituted diaryl-1,4,5,8-naphthalenetetracarboxylic diimide) and fluorinated derivatives; N, N'-dialkyl, substituted dialkyl, diaryl or substituted diaryl 3,4,9,10-perylenetetracarboxylic diimide (N, N'-dialkyl, substituted dialkyl, diaryl or substituted diaryl 3,4,9,10-perylenetetracarboxylic diimide); Bathophenanthroline; Diphenoquinones; 1,3,4-oxadiazoles (1,3,4-oxadiazoles); 11,11,12,12-tetracyanonaphtho-2,6-quinodimethane (11,11,12,12-tetracyanonaptho-2,6-quinodimethane); α, α'-bis (dithieno [3,2-b2 ', 3'-d] thiophene) (α, α'-bis (dithieno [3,2-b2', 3'-d] thiophene) ); 2,8-dialkyl, substituted dialkyl, diaryl or substituted diaryl anthrathiothiophenes (2,8-dialkyl, substituted dialkyl, diaryl or substituted diaryl anthradithiophene); Organic groups such as 2,2'-bibenzo [1,2-b: 4,5-b '] dithiophene (2,2'-bibenzo [1,2-b: 4,5-b'] dithiophene) Semi-conducting materials or their compounds, oligomers and compound derivatives can be used.
한편, 본 발명자가 연구한 바에 따르면 상기한 강유전 물질에 대하여 전기석 분말이나 전기석 분말과 영구자석 분말을 혼합하게 되면 그 혼합비율에 따라 강유전물질의 자발분극값이 변동된다는 것이 확인되었다.On the other hand, according to the study by the present inventors, when the tourmaline powder, the tourmaline powder and the permanent magnet powder are mixed with the ferroelectric material, the spontaneous polarization value of the ferroelectric material is changed according to the mixing ratio.
따라서, 강유전물질에 전기석 분말이나 전기석 분말과 영구자석 분말을 혼합하여 압전재료(10)을 생성하는 경우 혼합되는 전기석 분말이나 전기석 분말과 영구자석 분말의 중량에 따라 자발분극값이 변동되는 것을 이용하여 필요에 따라 강유전물질에 혼합되는 전기석 분말이나 전기석 분말과 영구자석 분말의 중량비를 조절할 수 있다.Therefore, when the
따라서, 본 발명에 의하면 강유전물질에 전기석 분말이나 전기석 분말과 영구자석 분말을 혼합하여 양호한 압전특성을 갖는 압전재료의 양측에 전극을 형성함으로써, 압전특성이 양호한 압전센서의 제작이 가능하게 된다.Therefore, according to the present invention, the electrode is formed on both sides of the piezoelectric material having good piezoelectric properties by mixing tourmaline powder, tourmaline powder and permanent magnet powder in the ferroelectric material, thereby making it possible to manufacture a piezoelectric sensor having good piezoelectric properties.
10 : 압전재료, 20 : 전극.10: piezoelectric material, 20: electrode.
Claims (68)
상기 압전재료는 강유전무기물질과 전기석 분말의 혼합물로 이루어지는 것을 특징으로 하는 압전센서.In the piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material,
The piezoelectric material is a piezoelectric sensor, characterized in that consisting of a mixture of ferroelectric inorganic materials and tourmaline powder.
상기 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서.The method of claim 1,
The ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 압전재료는 강유전무기물질과 전기석 분말 및 유기물의 혼합물로 이루어지는 것을 특징으로 하는 압전센서.In the piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material,
The piezoelectric material is a piezoelectric sensor, characterized in that consisting of a mixture of ferroelectric inorganic materials, tourmaline powder and organic matter.
상기 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서.The method of claim 3,
The ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 압전재료는 강유전무기물질과 전기석 분말 및 강유전유기물질의 혼합물로 이루어지는 것을 특징으로 하는 압전센서.In the piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material,
The piezoelectric material is a piezoelectric sensor, characterized in that consisting of a mixture of ferroelectric inorganic material, tourmaline powder and ferroelectric organic material.
상기 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서.The method of claim 5,
The ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 강유전유기물질은 β상 PVDF인 것을 특징으로 하는 압전센서.The method of claim 5,
The ferroelectric organic material is a piezoelectric sensor, characterized in that β-phase PVDF.
상기 압전재료는 강유전유기물질과 전기석 분말의 혼합물로 이루어지는 것을 특징으로 하는 압전센서.In the piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material,
The piezoelectric material is a piezoelectric sensor, characterized in that consisting of a mixture of ferroelectric organic material and tourmaline powder.
상기 강유전유기물질은 β상 PVDF인 것을 특징으로 하는 압전센서.9. The method of claim 8,
The ferroelectric organic material is a piezoelectric sensor, characterized in that β-phase PVDF.
상기 압전재료는 강유전무기물질과 전기석 분말 및 영구자석 분말의 혼합물로 이루어지는 것을 특징으로 하는 압전센서.In the piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material,
The piezoelectric material is a piezoelectric sensor, characterized in that consisting of a mixture of ferroelectric inorganic materials, tourmaline powder and permanent magnet powder.
상기 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서.The method of claim 10,
The ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 압전재료는 강유전무기물질과 전기석 분말,영구자석 분말 및 유기물의 혼합물로 이루어지는 것을 특징으로 하는 압전센서.In the piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material,
The piezoelectric material is a piezoelectric sensor, characterized in that consisting of a mixture of ferroelectric inorganic material and tourmaline powder, permanent magnet powder and organic material.
상기 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서.The method of claim 12,
The ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 압전재료는 강유전무기물질과 전기석 분말, 영구자석 분말 및 강유전유기물질의 혼합물로 이루어지는 것을 특징으로 하는 압전센서.In the piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material,
The piezoelectric material is a piezoelectric sensor, characterized in that consisting of a mixture of ferroelectric inorganic material and tourmaline powder, permanent magnet powder and ferroelectric organic material.
상기 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서.15. The method of claim 14,
The ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 강유전유기물질은 β상 PVDF인 것을 특징으로 하는 압전센서.15. The method of claim 14,
The ferroelectric organic material is a piezoelectric sensor, characterized in that β-phase PVDF.
상기 압전재료는 강유전 유기물질과 전기석 분말 및 영구자석 분말의 혼합물로 이루어지는 것을 특징으로 하는 압전센서.In the piezoelectric sensor formed by forming electrodes on both sides of the piezoelectric material,
The piezoelectric material is a piezoelectric sensor, characterized in that consisting of a mixture of ferroelectric organic material, tourmaline powder and permanent magnet powder.
상기 강유전 유기물질은 β상 PVDF인 것을 특징으로 하는 압전센서.18. The method of claim 17,
The ferroelectric organic material is a piezoelectric sensor, characterized in that β-phase PVDF.
상기 압전재료의 양면에 전극을 형성하는 제2 단계를 포함하여 구성되는 것을 특징으로 하는 압전센서 제조방법.A first step of producing a piezoelectric material by mixing ferroelectric inorganic materials and tourmaline powder;
Piezoelectric sensor manufacturing method characterized in that it comprises a second step of forming electrodes on both sides of the piezoelectric material.
상기 제1 단계는 강유전무기물질의 분말과 전기석 분말을 혼합한 후 이를 용매에 녹여서 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.20. The method of claim 19,
The first step is a piezoelectric sensor manufacturing method characterized in that the powder of ferroelectric inorganic material and tourmaline powder is mixed and then dissolved in a solvent to form a piezoelectric material with the resulting mixed solution.
상기 제1 단계는 강유전무기물질 용액에 전기석 분말을 용해시켜 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.20. The method of claim 19,
The first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by dissolving tourmaline powder in a ferroelectric inorganic material solution.
상기 제1 단계는 강유전무기물질 용액에 전기석 분말 용액을 혼합하여 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.20. The method of claim 19,
The first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by mixing a tourmaline powder solution to a ferroelectric inorganic material solution.
상기 제1 단계는 강유전무기물질 용액에 전기석 분말을 혼합 및 소결하여 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법. 20. The method of claim 19,
The first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material by mixing and sintering tourmaline powder in the ferroelectric inorganic material solution.
상기 제1 단계에서 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서 제조방법.20. The method of claim 19,
In the first step, the ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 압전재료의 양면에 전극을 형성하는 제12 단계를 포함하여 구성되는 것을 특징으로 하는 압전센서 제조방법.An eleventh step of generating a piezoelectric material by mixing ferroelectric inorganic materials, tourmaline powder and organic materials;
And a twelfth step of forming electrodes on both sides of the piezoelectric material.
상기 제11 단계는 강유전무기물질의 분말과 전기석 분말 및 유기물 물질의 분말을 혼합한 후 이를 용매에 녹여서 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.26. The method of claim 25,
The eleventh step is a piezoelectric sensor manufacturing method characterized in that the powder of ferroelectric inorganic material and the tourmaline powder and the powder of the organic material is mixed and then dissolved in a solvent to form a piezoelectric material with a mixed solution produced.
상기 제11 단계는 강유전무기물질과 유기물질의 용액에 전기석 분말을 용해시켜 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.26. The method of claim 25,
The eleventh step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by dissolving tourmaline powder in a solution of ferroelectric inorganic material and organic material.
상기 제11 단계는 강유전무기물질과 유기물질의 용액에 전기석 분말 용액을 혼합하여 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.26. The method of claim 25,
The eleventh step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution generated by mixing a tourmaline powder solution to a solution of ferroelectric inorganic material and organic material.
상기 제11 단계는 강유전무기물질과 유기물질의 용액에 전기석 분말을 혼합 및 소결하여 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법. 26. The method of claim 25,
The eleventh step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material by mixing and sintering tourmaline powder in a solution of ferroelectric inorganic material and organic material.
상기 제11 단계에서 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서 제조방법.26. The method of claim 25,
In the eleventh step, the ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 압전재료의 양면에 전극을 형성하는 제22 단계를 포함하여 구성되는 것을 특징으로 하는 압전센서 제조방법.A twenty-first step of producing a piezoelectric material by mixing ferroelectric inorganic materials, tourmaline powder and ferroelectric organic materials;
And a twenty-second step of forming electrodes on both sides of the piezoelectric material.
상기 제21 단계는 강유전무기물질의 분말과 전기석 분말 및, 강유전유기물질의 분말을 혼합한 후 이를 용매에 녹여서 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.32. The method of claim 31,
The twenty-first step is a piezoelectric sensor manufacturing method characterized in that the powder of the ferroelectric inorganic material and tourmaline powder, and the powder of the ferroelectric organic material is mixed and then dissolved in a solvent to form a piezoelectric material with the resulting mixed solution.
상기 제21 단계는 강유전무기물질과 강유전유기물질의 용액에 전기석 분말을 용해시켜 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.32. The method of claim 31,
The twenty-first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by dissolving tourmaline powder in a solution of ferroelectric inorganic material and ferroelectric organic material.
상기 제21 단계는 강유전무기물질과 강유전유기물질의 용액에 전기석 분말 용액을 혼합하여 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.32. The method of claim 31,
The twenty-first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by mixing a tourmaline powder solution to a solution of ferroelectric inorganic material and ferroelectric organic material.
상기 제21 단계는 강유전무기물질과 강유전유기물질의 용액에 전기석 분말을 혼합 및 소결하여 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법. 32. The method of claim 31,
The twenty-first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material by mixing and sintering tourmaline powder in a solution of ferroelectric inorganic material and ferroelectric organic material.
상기 제21 단계에서 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서 제조방법.32. The method of claim 31,
In the twenty-first step, the ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 제21 단계에서 강유전유기물질은 β상 PVDF인 것을 특징으로 하는 압전센서 제조방법.32. The method of claim 31,
In the twenty-first step, the ferroelectric organic material is β-phase PVDF, characterized in that the piezoelectric sensor manufacturing method.
상기 압전재료의 양면에 전극을 형성하는 제32 단계를 포함하여 구성되는 것을 특징으로 하는 압전센서 제조방법.A thirty-first step of generating a piezoelectric material by mixing the ferroelectric organic material and the tourmaline powder;
And a thirty-second step of forming electrodes on both sides of the piezoelectric material.
상기 제31 단계는 강유전유기물질의 분말과 전기석 분말을 혼합한 후 이를 용매에 녹여서 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 38,
The thirty-first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by mixing the powder of ferroelectric organic material and tourmaline powder and then dissolving it in a solvent.
상기 제31 단계는 강유전유기물질의 용액에 전기석 분말을 용해시켜 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 38,
The thirty-first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by dissolving tourmaline powder in a solution of ferroelectric organic material.
상기 제31 단계는 강유전유기물질의 용액에 전기석 분말 용액을 혼합하여 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 38,
The thirty-first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution generated by mixing a tourmaline powder solution to a solution of ferroelectric organic material.
상기 제31 단계는 강유전유기물질의 용액에 전기석 분말을 혼합 및 소결하여 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법. The method of claim 38,
The thirty-first step is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material by mixing and sintering tourmaline powder in a solution of ferroelectric organic material.
상기 제31 단계에서 강유전유기물질은 β상 PVDF인 것을 특징으로 하는 압전센서 제조방법.The method of claim 38,
The ferroelectric organic material is a piezoelectric sensor manufacturing method characterized in that the β-phase PVDF in step 31.
상기 압전재료의 양면에 전극을 형성하는 제42 단계를 포함하여 구성되는 것을 특징으로 하는 압전센서 제조방법.A 41 th step of producing a piezoelectric material by mixing ferroelectric inorganic materials, tourmaline powder and permanent magnet powder;
Piezoelectric sensor manufacturing method characterized in that it comprises a 42 step of forming electrodes on both sides of the piezoelectric material.
상기 제41 단계는 강유전무기물질의 분말과 전기석 분말 및 영구자석 분말을 혼합한 후 이를 용매에 녹여서 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 44,
Wherein the step 41 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by mixing the powder of ferroelectric inorganic materials, tourmaline powder and permanent magnet powder and then dissolved in a solvent.
상기 제41 단계는 강유전무기물질 용액에 전기석 분말 및 영구자석 분말을 용해시켜 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 44,
The step 41 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by dissolving tourmaline powder and permanent magnet powder in a ferroelectric inorganic material solution.
상기 제41 단계는 강유전무기물질 용액에 전기석 분말 용액 및 영구자석 분말 용액을 혼합하여 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 44,
Step 41 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution generated by mixing a tourmaline powder solution and a permanent magnet powder solution to a ferroelectric inorganic material solution.
상기 제41 단계는 강유전무기물질 용액에 전기석 분말 및 영구자석 분말을 혼합 및 소결하여 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법. The method of claim 44,
The step 41 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material by mixing and sintering tourmaline powder and permanent magnet powder in the ferroelectric inorganic material solution.
상기 제41 단계에서 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서 제조방법.The method of claim 44,
In step 41, the ferroelectric inorganic material is a piezoelectric sensor characterized in that the PZT.
상기 압전재료의 양면에 전극을 형성하는 제52 단계를 포함하여 구성되는 것을 특징으로 하는 압전센서 제조방법.A 51 st step of generating a piezoelectric material by mixing ferroelectric inorganic materials with tourmaline powder, permanent magnet powder, and organic materials;
Piezoelectric sensor manufacturing method characterized in that it comprises a 52 step of forming electrodes on both sides of the piezoelectric material.
상기 제51 단계는 강유전무기물질의 분말과 전기석 분말, 영구자석 분말 및 유기물 물질의 분말을 혼합한 후 이를 용매에 녹여서 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.51. The method of claim 50,
Wherein the step 51 is a piezoelectric sensor manufacturing method characterized in that the powder of ferroelectric inorganic material and tourmaline powder, permanent magnet powder and powder of the organic material is mixed and then dissolved in a solvent to form a piezoelectric material with the resulting mixed solution.
상기 제51 단계는 강유전무기물질과 유기물질의 용액에 전기석 분말 및 영구자석 분말을 용해시켜 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.51. The method of claim 50,
Step 51 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by dissolving tourmaline powder and permanent magnet powder in a solution of ferroelectric inorganic material and organic material.
상기 제51 단계는 강유전무기물질과 유기물질의 용액에 전기석 분말 용액과 영구자석 분말 용액을 혼합하여 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.51. The method of claim 50,
Step 51 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by mixing a tourmaline powder solution and a permanent magnet powder solution to a solution of ferroelectric inorganic materials and organic materials.
상기 제51 단계는 강유전무기물질과 유기물질의 용액에 전기석 분말 및 영구자석 분말을 혼합 및 소결하여 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법. 51. The method of claim 50,
Step 51 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material by mixing and sintering the tourmaline powder and permanent magnet powder in a solution of ferroelectric inorganic material and organic material.
상기 제51 단계에서 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서 제조방법.51. The method of claim 50,
In the 51st step, the ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 압전재료의 양면에 전극을 형성하는 제62 단계를 포함하여 구성되는 것을 특징으로 하는 압전센서 제조방법.A sixty-first step of generating a piezoelectric material by mixing ferroelectric inorganic materials with tourmaline powder, permanent magnet powder, and ferroelectric organic materials;
And a sixty-sixth step of forming electrodes on both sides of the piezoelectric material.
상기 제61 단계는 강유전무기물질의 분말과 전기석 분말, 영구자석 분말 및 강유전유기물질의 분말을 혼합한 후 이를 용매에 녹여서 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.57. The method of claim 56,
Step 61 is a piezoelectric sensor manufacturing method characterized in that the powder of ferroelectric inorganic material and tourmaline powder, permanent magnet powder and powder of ferroelectric organic material is mixed and then dissolved in a solvent to form a piezoelectric material with a mixed solution generated.
상기 제61 단계는 강유전무기물질과 강유전유기물질의 용액에 전기석 분말과 영구자석 분말을 용해시켜 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.57. The method of claim 56,
Step 61 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution generated by dissolving tourmaline powder and permanent magnet powder in a solution of ferroelectric inorganic material and ferroelectric organic material.
상기 제61 단계는 강유전무기물질과 강유전유기물질의 용액에 전기석 분말 용액 및 영구자석 분말 용액을 혼합하여 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.57. The method of claim 56,
Step 61 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by mixing a tourmaline powder solution and a permanent magnet powder solution to a solution of ferroelectric inorganic material and ferroelectric organic material.
상기 제61 단계는 강유전무기물질과 강유전유기물질의 용액에 전기석 분말과 영구자석 분말을 혼합 및 소결하여 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법. 57. The method of claim 56,
Step 61 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material by mixing and sintering tourmaline powder and permanent magnet powder in a solution of ferroelectric inorganic material and ferroelectric organic material.
상기 제61 단계에서 강유전무기물질은 PZT인 것을 특징으로 하는 압전센서 제조방법.57. The method of claim 56,
In step 61, the ferroelectric inorganic material is a piezoelectric sensor, characterized in that the PZT.
상기 제61 단계에서 강유전유기물질은 β상 PVDF인 것을 특징으로 하는 압전센서 제조방법.57. The method of claim 56,
The ferroelectric organic material is a piezoelectric sensor manufacturing method characterized in that the β-phase PVDF in step 61.
상기 압전재료의 양면에 전극을 형성하는 제72 단계를 포함하여 구성되는 것을 특징으로 하는 압전센서 제조방법.A 71 st step of generating a piezoelectric material by mixing ferroelectric organic materials, tourmaline powder and permanent magnet powder;
Piezoelectric sensor, characterized in that it comprises a seventy-stage step of forming electrodes on both sides of the piezoelectric material.
상기 제71 단계는 강유전유기물질의 분말과 전기석 분말 및 영구자석 분말을 혼합한 후 이를 용매에 녹여서 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 63, wherein
Wherein step 71 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by mixing the powder of ferroelectric organic material, tourmaline powder and permanent magnet powder and then dissolved in a solvent.
상기 제71 단계는 강유전유기물질의 용액에 전기석 분말 및 영구자석 분말을 용해시켜 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 63, wherein
Wherein step 71 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution produced by dissolving tourmaline powder and permanent magnet powder in a solution of ferroelectric organic material.
상기 제71 단계는 강유전유기물질의 용액에 전기석 분말 용액 및 영구자석 분말 용액을 혼합하여 생성된 혼합용액으로 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법.The method of claim 63, wherein
Step 71 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material with a mixed solution generated by mixing a tourmaline powder solution and a permanent magnet powder solution to a solution of ferroelectric organic material.
상기 제71 단계는 강유전유기물질의 용액에 전기석 분말 및 영구자석 분말을 혼합 및 소결하여 압전재료를 형성하는 것을 특징으로 하는 압전센서 제조방법. The method of claim 63, wherein
Wherein step 71 is a piezoelectric sensor manufacturing method characterized in that to form a piezoelectric material by mixing and sintering tourmaline powder and permanent magnet powder in a solution of ferroelectric organic material.
상기 제71 단계에서 강유전유기물질은 β상 PVDF인 것을 특징으로 하는 압전센서 제조방법.
The method of claim 63, wherein
The ferroelectric organic material is a piezoelectric sensor manufacturing method characterized in that the β-phase PVDF in step 71.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20160116603A (en) * | 2015-03-30 | 2016-10-10 | 서울시립대학교 산학협력단 | Piezoelectric device using PVDF film bonded with azobenzene and manufacturing method thereof |
| WO2018221894A1 (en) * | 2017-05-29 | 2018-12-06 | 주식회사 중일산업 | Piezoelectric sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20160116603A (en) * | 2015-03-30 | 2016-10-10 | 서울시립대학교 산학협력단 | Piezoelectric device using PVDF film bonded with azobenzene and manufacturing method thereof |
| WO2018221894A1 (en) * | 2017-05-29 | 2018-12-06 | 주식회사 중일산업 | Piezoelectric sensor |
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