KR20120140522A - Manufacturing method of seramic substrate - Google Patents

Manufacturing method of seramic substrate Download PDF

Info

Publication number
KR20120140522A
KR20120140522A KR1020110060315A KR20110060315A KR20120140522A KR 20120140522 A KR20120140522 A KR 20120140522A KR 1020110060315 A KR1020110060315 A KR 1020110060315A KR 20110060315 A KR20110060315 A KR 20110060315A KR 20120140522 A KR20120140522 A KR 20120140522A
Authority
KR
South Korea
Prior art keywords
cavity
protective sheet
ceramic
ceramic laminate
manufacturing
Prior art date
Application number
KR1020110060315A
Other languages
Korean (ko)
Inventor
유원희
장병규
Original Assignee
삼성전기주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전기주식회사 filed Critical 삼성전기주식회사
Priority to KR1020110060315A priority Critical patent/KR20120140522A/en
Publication of KR20120140522A publication Critical patent/KR20120140522A/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/0097—Press moulds; Press-mould and press-ram assemblies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)

Abstract

The present invention provides a method of forming a cavity in a part of a green sheet of a plurality of green sheets, stacking a plurality of green sheets to prepare a ceramic laminate, and applying a protective sheet having the same opening as the cavity to an upper surface of the ceramic laminate. After the firing by the manufacturing method of the ceramic substrate including the step of pressing, applying a predetermined pressure to the ceramic laminate, and firing the pressed ceramic laminate, it is possible to prevent the problem that the cavity is deformed.

Description

Manufacturing method of a ceramic substrate {Manufacturing method of seramic substrate}

The present invention relates to a method for manufacturing a ceramic substrate, and more particularly, to a method for manufacturing a ceramic substrate for pressing a ceramic laminate having a cavity.

Ceramic substrates for storing electronic components such as semiconductor devices are usually manufactured by stacking a plurality of ceramic sheets. Low-temperature co-fired ceramic (LTCC) green sheets are usually used as ceramic sheets.

In the method of manufacturing a ceramic substrate using such a green sheet, first, a green sheet having a required specification is prepared, and then it is cut as many as necessary in the required dimensions.

Subsequently, a via hole is formed in the green sheet through punching, the via hole is filled with a conductive paste, and a central opening for forming a cavity is formed by punching a central portion of some green sheets to a predetermined size.

Next, each green sheet is laminated between the upper and lower jig, and the green sheets are pressed together by applying a predetermined pressure between the green sheet and the plate of the upper and lower jig through the intermediate sheet, and then the firing process has a desired cavity. Complete the ceramic substrate.

FIG. 1 is a cross-sectional view of a ceramic substrate according to the prior art, and the ceramic substrate manufactured as described above is shown in FIG. 1, by the pressure applied to the intermediate sheet when the green sheets 1 to 5 are compressed. ) There was a problem that the intermediate sheet is pushed into the inside.

For this reason, the problem that the edge of the cavity 11 bends after completion | finish of a baking process generate | occur | produced, and the phenomenon that the squareness of the cavity 11 fell.

It is an object of the present invention to provide a ceramic substrate and a method of manufacturing the same, which can prevent a cavity from deforming after firing by applying a protective sheet having the same opening as the cavity on the ceramic laminate when pressing the ceramic laminate. .

To this end, a method of manufacturing a ceramic substrate according to an embodiment of the present invention includes forming a cavity in a part of a green sheet of a plurality of green sheets; Stacking the plurality of green sheets to provide a ceramic laminate; Applying a protective sheet having an opening identical to the cavity to an upper surface of the ceramic laminate; Compressing by applying a predetermined pressure to the ceramic laminate; Firing the pressed ceramic laminate.

Here, the cavity may have an upper portion extending from the lower portion to form a step, and the opening of the protective sheet may have the same dimension as the upper portion of the cavity.

The protective sheet may extend downward from the upper surface of the green sheet on which the cavity is formed to the inside of the cavity.

In addition, the protective sheet may be a 'b' shape.

In addition, the pressing of the ceramic laminate by applying a predetermined pressure may compress the ceramic laminate by applying the predetermined pressure to the jig plate.

In addition, applying the protective sheet having the same opening as the cavity on the upper surface of the ceramic laminate may insert the protective sheet between the ceramic laminate and the jig plate to apply the protective sheet.

In addition, the protective sheet may be made of a PET film, the protective sheet may be made of SUS material.

In the forming of a cavity in a part of the green sheets of the plurality of green sheets, the cavity may be formed by punching the part of the green sheets to a predetermined size.

As described above, according to the method of manufacturing a ceramic substrate according to an embodiment of the present invention, when the ceramic laminate is pressed, the cavity is deformed after firing by applying a protective sheet having the same opening as the cavity on the ceramic laminate. There is an advantage that can be prevented.

In other words, by inserting a protective sheet having the same opening as the cavity between the ceramic laminate and the jig plate to prevent the protection sheet from being pushed into the cavity due to the temperature and pressure applied to the jig plate when the ceramic laminate is pressed. There is an advantage in that the corner (edge) of the cavity is improved, and the squareness of the cavity can be secured.

Therefore, there is an advantage that the assembly process can be improved by reducing the defects of the package process by improving the position accuracy inside the cavity.

In addition, there is an advantage to secure the manufacturing technology of the ceramic substrate that can be completely sealed by preventing the phenomenon of the cavity is deformed.

1 is a cross-sectional view of a ceramic substrate according to the prior art.
2 to 4 are cross-sectional views illustrating a process of manufacturing a ceramic substrate according to an embodiment of the present invention.
5 is a cross-sectional view showing a modified example of the protective sheet in the ceramic substrate according to an embodiment of the present invention.
6 to 8 are cross-sectional views illustrating a process of manufacturing a ceramic substrate according to another embodiment of the present invention.
9 is a cross-sectional view showing a modified example of the protective sheet in the ceramic substrate according to another embodiment of the present invention.
10 is a result table comparing the horizontal separation distance of the cavity edge according to the present invention.

The terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms and the inventor may appropriately define the concept of the term in order to best describe its invention It should be construed as meaning and concept consistent with the technical idea of the present invention.

Therefore, the embodiments described in this specification and the configurations shown in the drawings are merely the most preferred embodiments of the present invention and do not represent all the technical ideas of the present invention. Therefore, It is to be understood that equivalents and modifications are possible.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 to 4 are cross-sectional views illustrating a process of manufacturing a ceramic substrate according to an embodiment of the present invention.

As shown in FIG. 2, the ceramic substrate 100 includes a plurality of green sheets 110 to 150, and for convenience of description herein, the first to fifth green sheets 110, 120, 130, 140, and 150. It will be described with respect to the ceramic substrate consisting of).

First, before describing the ceramic substrate, the green sheet will be described. The green sheet is made of a ceramic powder and a binder, and has a structure in which the ceramic powder is dispersed in a binder having liquid or viscosity. In addition, the mixture containing the ceramic powder and the binder as described above is processed into a sheet shape to produce a green sheet.

After the green sheet manufactured by the above method is cut to a predetermined size, a via hole (not shown) may be formed for electrical connection between each green sheet and an internal electrode (not shown), and the via hole irradiates a laser onto the green sheet. After the hole is formed, it may be formed through a process of filling a conductive material or plating an inner wall.

Hereinafter, a process of manufacturing a ceramic substrate according to an embodiment of the present invention will form a cavity in a part of a green sheet of a plurality of green sheets. In FIG. 2, a cavity 152 having an opening 152a having a predetermined size is formed in a central portion of the fifth green sheet 150 among the first to fifth green sheets 110, 120, 130, 140, and 150. .

In this case, the cavity 152 may be formed by punching a central portion of the fifth green sheet 150 to a predetermined size.

Then, as shown in FIG. 3, the first to fourth green sheets 110, 120, 130, and 140 are sequentially stacked, and the fifth green sheet having the cavity 152 formed on the fourth green sheet 140. 150 may be laminated to provide a ceramic laminate.

Next, as shown in FIG. 4, the protective sheet 160a having the same opening 162a as the cavity 152 is applied to and bonded to the upper surface of the fifth green sheet 150, which is the upper surface of the ceramic laminate.

More specifically, the protective sheet 160a is apply | coated by inserting the protective sheet 160a between the ceramic laminated body and the jig plate 50 which crimps | bonds the said ceramic laminated body. Such jig plate 50 is a means for applying a predetermined pressure to the ceramic laminate, and is usually made of stainless steel. In addition, by using the jig plate 50 to apply the ceramic laminate at a predetermined pressure for a few seconds at a predetermined temperature it is possible to press the ceramic laminate in one.

On the other hand, the protective sheet 160a is used to block the ceramic laminate from being attached to the jig plate 50 when pressing the ceramic laminate, PET (polyethylene terephthalate) material or polyphenyl sulfide (PPS) material, etc. It may be made of a film of.

In addition, the protective sheet 160a may be made of SUS material (SUS310, inconel) having excellent durability against heat and pressure.

As described above, after applying the protective sheet 160a, a predetermined pressure is applied to the jig plate 50 to press the ceramic laminate, and the pressed ceramic laminate is fired.

5 is a sectional view showing a modification of the protective sheet in the ceramic substrate according to an embodiment of the present invention.

Referring to FIG. 5, the protective sheet 160b extends downward from the upper surface of the fifth green sheet 150 on which the cavity 152 is formed, into the cavity 152.

Then, since the opening 152a of the cavity 152 can be protected by the protective sheet 160b, the edge of the cavity 152 is prevented from being bent, and the right angle of the cavity 152 can be secured. There are advantages to it.

Hereinafter, a configuration having the same function will be omitted since it has been described in one embodiment of the present invention.

6 to 8 are cross-sectional views illustrating a process of manufacturing a ceramic substrate according to another embodiment of the present invention.

As shown in FIG. 6, a cavity is formed in some green sheets among a plurality of green sheets. In FIG. 6, a cavity 152 is formed in a central portion of the fourth and fifth green sheets 140 and 150 among the first to fifth green sheets 110, 120, 130, 140, and 150.

At this time, the cavity 152 has an upper portion than the lower portion to form a step. That is, if the lower portion of the cavity 152 is called a one-stage cavity, and the upper portion of the cavity 152 is a two-stage cavity, a fourth stage is formed in the fourth green sheet 140, and the fifth green sheet 150 is formed. Forms a two-stage cavity. Then, the size of the opening 152a of the second stage cavity is larger than that of the opening 152b of the first stage cavity.

Next, the first to third green sheets 110, 120, and 130 are stacked in order, and the fourth green sheet 140 having a first stage cavity is laminated on the third green sheet 130, and the fourth A ceramic laminate as illustrated in FIG. 7 may be prepared by stacking the fifth green sheet 150 having the two-stage cavity formed on the green sheet 140.

Then, the protective sheet 160a having the same opening 162a as the two-stage cavity is applied to the upper surface of the fifth green sheet 150 which is the upper surface of the ceramic laminate. Here, the opening 162a of the protective sheet 160a may be formed to have the same dimensions as the opening 152a of the two-stage cavity.

More specifically, by inserting a protective sheet 160a having an opening 162a having the same dimensions as the opening 152a of the two-stage cavity between the ceramic laminate and the jig plate 50 for pressing the ceramic laminate. The protective sheet 160a is apply | coated. Such jig plate 50 is a means for applying a predetermined pressure to the ceramic laminate, and is usually made of stainless steel. In addition, by using the jig plate 50 to apply the ceramic laminate at a predetermined pressure for a few seconds at a predetermined temperature it is possible to press the ceramic laminate in one.

On the other hand, the protective sheet 160a is used to block the ceramic laminate from being attached to the jig plate 50 when pressing the ceramic laminate, PET (polyethylene terephthalate) material or polyphenyl sulfide (PPS) material, etc. It may be made of a film of.

In addition, the protective sheet 160a may be made of SUS material (SUS310, inconel) having excellent durability against heat and pressure.

As described above, after applying the protective sheet 160a, a predetermined pressure is applied to the jig plate 50 to press the ceramic laminate, and the pressed ceramic laminate is fired.

9 is a cross-sectional view illustrating a modified example of the protective sheet in the ceramic substrate according to another embodiment of the present invention. Referring to FIG. 9, the protective sheet 160b includes the fifth green sheet 150 having the two-stage cavity 152 formed therein. It may extend downward from the upper surface of the inside of the cavity 152.

Hereinafter, a configuration having the same function will be omitted since it has been described in another embodiment of the present invention.

10 shows a result table comparing the horizontal separation distance of the cavity edge according to the present invention.

Figure 10a is a flatness of the first-stage cavity and the second-stage cavity according to the conventional method, Figure 10b shows the flatness of the first-stage cavity and the second-stage cavity according to the present invention, the flatness is the corner of the cavity spaced apart from the horizontal line You can find out by measuring the distance.

Comparing FIG. 10A and FIG. 10B, it can be seen that the distance of the corner of the cavity according to the present invention is far from the horizontal line is significantly reduced to about 1/10 compared to the conventional method, indicating good flatness.

Therefore, the edge (edge) of the cavity is improved, there is an advantage that can secure the squareness of the cavity.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, Various changes and modifications will be possible.

110 to 150. Multiple green sheets 152. Cavity
152a. Apertures 160a, 160b. Protective sheet
50. Jig Plate

Claims (9)

Forming a cavity in some green sheets of the plurality of green sheets;
Stacking the plurality of green sheets to provide a ceramic laminate;
Applying a protective sheet having an opening identical to the cavity to an upper surface of the ceramic laminate;
Compressing by applying a predetermined pressure to the ceramic laminate;
Firing the pressed ceramic laminate;
The method of claim 1,
The cavity
The upper part extends from the lower part to form a step,
The opening of the protective sheet,
A method of manufacturing a ceramic substrate having the same dimensions as the upper portion of the cavity.
The method according to claim 1 or 2,
The protective sheet,
The method of manufacturing a ceramic substrate extending downward from the upper surface of the green sheet on which the cavity is formed into the cavity.
The method of claim 1,
The protective sheet,
A method of manufacturing a ceramic substrate having a 'b' shape.
The method of claim 1,
Pressing by applying a predetermined pressure to the ceramic laminate,
And applying the predetermined pressure to a jig plate to press the ceramic laminate.
The method of claim 5, wherein
Applying a protective sheet having the same opening as the cavity on the upper surface of the ceramic laminate,
A method of manufacturing a ceramic substrate, wherein the protective sheet is applied between the ceramic laminate and the jig plate to apply the protective sheet.
The method of claim 1,
The protective sheet,
A method of manufacturing a ceramic substrate composed of a PET film.
The method of claim 1,
The protective sheet,
A method of manufacturing a ceramic substrate made of SUS material.
The method of claim 1,
Forming a cavity in a part of the green sheet of the plurality of green sheets,
And forming the cavity by punching the green sheet to a predetermined size.
KR1020110060315A 2011-06-21 2011-06-21 Manufacturing method of seramic substrate KR20120140522A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110060315A KR20120140522A (en) 2011-06-21 2011-06-21 Manufacturing method of seramic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110060315A KR20120140522A (en) 2011-06-21 2011-06-21 Manufacturing method of seramic substrate

Publications (1)

Publication Number Publication Date
KR20120140522A true KR20120140522A (en) 2012-12-31

Family

ID=47906553

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110060315A KR20120140522A (en) 2011-06-21 2011-06-21 Manufacturing method of seramic substrate

Country Status (1)

Country Link
KR (1) KR20120140522A (en)

Similar Documents

Publication Publication Date Title
US10714261B2 (en) Multilayer ceramic capacitor
KR101628055B1 (en) Low shaped multilayer ceramic capacitor
JP4889037B2 (en) Surface mount electrolytic capacitor and manufacturing method thereof
KR20120140522A (en) Manufacturing method of seramic substrate
CN107408537B (en) Substrate for housing electronic component and electronic component mounting package
JP2010093037A (en) Multilayer ceramic capacitor and method of manufacturing the same
JP2016072485A (en) Multilayer ceramic capacitor
US20160191013A1 (en) Wave filter packages and methods for manufacturing the same
US9934906B2 (en) Electrical device
JP2014172100A (en) Slit blade for forming pressing groove and manufacturing method for ceramic package
JP6231414B2 (en) Mounting board and package using the same
JP2015023262A (en) Method for manufacturing multilayer ceramic electronic component
US9745990B2 (en) Fan frame and assembling method thereof
JP2015201537A (en) Coil component and manufacturing method for the same
JP5891689B2 (en) Capacitor
CN103094219A (en) Integration method for three-dimensional high-density thick-film multi-chip assembly
JP5019629B2 (en) Capacitor element manufacturing method and manufacturing apparatus thereof
KR100898977B1 (en) Method of manufacturing printed circuit board
KR100978654B1 (en) Pressing jig for ceramic lamination and manufacturing method for multi-layer ceramic substrate
JP2010050390A (en) Method for manufacturing stacked coil component
JP2009188096A (en) Manufacturing method for ceramic laminated wiring board
KR20150034663A (en) Aligning device and method for producing electronic component using the aligning device
KR20090089530A (en) Manufacturing method of ceramic substrate
TWI538588B (en) Production method for airtight via of a substrate
KR101303065B1 (en) Pressing apparatus and methdod for manufacturing ceramic substrate having cavity using the same

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application