KR20120137920A - System for photo ionizing with high efficiency - Google Patents

Abstract

PURPOSE: An ionizing system for a light irradiating type with high efficiency is provided to optimally distribute electrical charges in consideration to even the shape of an ionizing object by quickly eliminating electrical charges from the ionizing object. CONSTITUTION: An ionizing system using X-rays comprises an ionizer(100), a clean air blower(200), a filter(320), a first duct(300), and a second duct(310). The ionizer irradiates soft x-rays in the direction of a filter(320). The irradiated soft x-ray ionizes the clean air which is supplied through the clean air blower(200). The filter prevents the soft x-rays from passing through. The filter has a configuration in which two or more layers are laminated having unmatched through holes. Ionized materials passing through the filter are supplied to a plurality of ionizing objects(101) passing through the first duct and the second duct.

Description

System for photo Ionizing with high efficiency

The present invention relates to a high-efficiency photo-irradiation static elimination system using soft X-rays that can remove the charge present in the antistatic object in a short time and provide an optimized charge distribution considering the shape of the antistatic object.

Recently, the demand of various electronic components has increased exponentially due to the advancement of the industry, and in particular, the importance of preventing disasters such as the destruction of the system and the electronic components by the electrostatic discharge is increasing. The damage caused by electrostatic discharge (ESD) has reached an unpredictable level, and the demand for development of suppression and prediction technology for electrostatic discharge is increasing, and the industrial ripple effect is evaluated as a very large technology.

In developed countries, research on electronic interference by electrostatic discharges, system failures of computers and communication devices, destruction mechanisms of semiconductor devices, and electrical overstress have been conducted in industries such as academia, semiconductors, telecommunications, optics, plants, and chemical plants. Basic research and applied research on correlation research among EOS) and development of technologies related to the prevention of electrostatic discharge (EDS) have been actively conducted.

In general, static eliminators are classified into voltage-applied static eliminators, self-discharge static eliminators, and irradiated static eliminators. At present, the most widely used voltage applying type static eliminating device neutralizes the charge of a charged object by generating air ions as corona discharge is generated by applying a high voltage using a needle electrode as a static eliminating electrode. This method has an excellent antistatic capability, and has a wide range of applications because of various models. AC, DC, and pulsed DC static eliminators have been developed and commercialized. This method has a relatively higher impact by humidity than other methods and has limited use in hazardous environments where gases and vapors contain combustible materials. In addition, as the ozone generation due to the discharge and the distance between the static eliminator and the charging apparatus increase, the static elimination performance is greatly reduced.

On the other hand, as a radiation type antistatic device used to prevent electrostatic discharge, there is a light irradiation type static eliminator (hereinafter referred to as "light irradiation type static eliminator") and ultraviolet irradiation type static eliminator. Ultraviolet irradiation type static eliminator is very limited as an effective antistatic technique in an inert gas or a reduced pressure vacuum atmosphere, it is a method of ionizing the gas near the charged object by irradiating the ultraviolet rays generated from the deuterium lamp. In addition, the photoirradiation static eliminator is an effective technique in an atmospheric inert gas or in an atmosphere containing oxygen. When irradiated with soft X-rays generated by a soft X-ray lamp, positive and negative gas ions are generated to neutralize a charged object. . Moreover, the photo-electrostatic static eliminator uses ionization of air molecules by radiation to produce ions necessary for static elimination. It uses alpha (α) rays or beta (β) rays with long half-lives and high ionizing ability. The radiation source surface of the irradiated static eliminator must be protected by a thin film to ensure its safety and to take into account the radiation safety of the static eliminator itself.

FIG. 1A is a configuration diagram of a conventional light irradiation type static eliminator using soft X-rays, and FIGS. 1B and 1C are diagrams for describing an effect of a conventional static x-ray emitter. Referring to FIG. 1A, an X-ray tube 1 for generating soft X-rays is a kind of hot electron bipolar vacuum tube that accelerates hot electrons from a heated cathode 3 using tungsten filament 6 to target 8. ) And X-rays are emitted. The soft X-rays radiated from the surface of the target 8 come out through a window 9 located near the target, and the air near the object to be staticized is ionized by the soft X-rays. By these ions, the electric charges present in the antistatic object may be removed.

However, such a conventional light irradiation type static eliminator has a disadvantage in that it does not evenly discharge the static elimination object, and as a result, there is a problem in that the static elimination time is actually long. That is, referring to FIG. 1B, the soft X-rays emitted from the conventional light irradiation type static eliminator 1 have a predetermined angle θ when they are directed to the static elimination object, as shown in FIGS. 1C and 1D. Departure will increase the elimination time by more than 10 times. 1C and 1D clearly show that as the angle θ increases, the decay time gradually increases, but when the angle θ exceeds 45, the decay time increases several tens of times.

An object of the present invention is to provide a highly efficient photo-irradiation antistatic system using soft X-rays that can remove the charge present in the antistatic object in a short time and provide an optimized charge distribution considering the shape of the antistatic object. .

The present invention provides an electrostatic eliminator for use in a high efficiency photo-irradiation antistatic system using soft X-rays that not only removes the charge present in the antistatic object in a short time, but also provides an optimized charge distribution considering the shape of the antistatic object. It is intended for work.

The object is a blower for supplying air; An electrostatic discharger emitting soft X-rays to ionize the supplied air; A first conduit configured to provide a conduit for receiving a material ionized by the soft X-ray and supplying the object to an antistatic object; And a second conduit communicating with the first conduit and supplying the ionized material to at least two antistatic objects, respectively.

The antistatic system may further include a filter for blocking soft X-rays emitted from the static eliminator, wherein the filter may pass the ionic material.

In addition, the diameter of each of the second conduits providing the ionized material to each of the static elimination objects may be larger as the distance from the static eliminator.

On the other hand, a valve is mounted on the second conduit for providing the ionized material to each of the antistatic object, the degree of opening and closing of the valve may depend on the degree away from the static eliminator.

In addition, the static eliminator is a heater for emitting electrons; A target in which electrons emitted from the heater collide with each other; And an electron density adjusting unit for differently adjusting the density of electrons colliding with the target for each region constituting the target.

On the other hand, the static eliminator is a first grid for accelerating electrons emitted by the heater; And a second grid for controlling the angle of electrons accelerated in the first grid, wherein the electron density adjusting unit controls the direction of the electrons controlled by the second grid to strike the targets. The density may be adjusted for each region of the target.

In addition, the density of electrons striking the target may be higher from the center of the target toward the surroundings.

On the other hand, the static eliminator further includes a bulb to maintain a vacuum state, the heater and the target is located inside the bulb, the electron density control unit may be formed on the outer peripheral surface of the bulb.

According to the present invention, it is possible to remove charges existing in the static elimination object in a short time, and to provide an optimized charge distribution considering the shape of the static elimination object.

1A is a configuration diagram of a static eliminator for emitting conventional soft X-rays, and FIGS. 1B and 1C are diagrams for describing an effect of a static eliminator for emitting conventional soft X-rays.
Figure 2a is a block diagram of a high efficiency light irradiation static elimination system according to an embodiment of the present invention.
Figure 2b is a block diagram of a high efficiency light irradiation static elimination system according to another embodiment of the present invention.
Figure 3a is a block diagram of a static eliminator used in the high efficiency light irradiation static elimination system according to an embodiment of the present invention.
Figure 3b is a block diagram of a static eliminator used in a high efficiency light irradiation static elimination system according to another embodiment of the present invention.
4A is a view showing the configuration of a window of the static eliminator used in the high efficiency light irradiation static elimination system according to an embodiment of the present invention.
4B is a diagram showing the density of electrons colliding with a target according to an embodiment of the present invention.
5a to 5c show the electron density control unit according to an embodiment of the present invention.
6 is a view for explaining the density of ions formed by the static eliminator used in the high-efficiency light irradiation static elimination system according to an embodiment of the present invention.
7 is a view showing the irradiation angle of the soft X-rays irradiated to the static elimination object from the static eliminator used in the high efficiency light irradiating antistatic system according to an embodiment of the present invention.
8 is a view showing the irradiation shape of the soft X-rays irradiated from the static eliminator used in the high efficiency light irradiation static elimination system according to an embodiment of the present invention, Figure 8a is a circular irradiation shape, Figure 8b is a polygonal irradiation shape It is a diagram showing.

BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, and advantages of the present invention will become more readily apparent from the following description of preferred embodiments with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

In this specification, when an element is referred to as being on another element, it may be directly formed on another element, or a third element may be interposed therebetween. Also in the figures, the thickness of the components is exaggerated for an effective description of the technical content.

Embodiments described herein will be described with reference to cross-sectional views and / or plan views that are ideal illustrations of the present invention. In the drawings, the thicknesses of films and regions are exaggerated for effective explanation of technical content. Therefore, the shape of the exemplary diagram may be modified by manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention are not limited to the specific forms shown, but also include changes in the shapes that are produced according to the manufacturing process. Also, the regions illustrated in the figures have attributes, and the shape of the regions illustrated in the figures is intended to illustrate a particular form of region of the device and is not intended to limit the scope of the invention. Although the terms first, second, etc. have been used in various embodiments of the present disclosure to describe various components, these components should not be limited by these terms. These terms have only been used to distinguish one component from another. The embodiments described and exemplified herein also include their complementary embodiments.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. The terms "comprises" and / or "comprising" used in the specification do not exclude the presence or addition of one or more other elements.

Hereinafter, the present invention will be described in detail with reference to the drawings. In describing the specific embodiments below, various specific details have been set forth in order to explain the invention in greater detail and to assist in understanding it. However, those skilled in the art can understand that the present invention can be used without these various specific details. In some cases, it is mentioned in advance that parts of the invention which are commonly known in the description of the invention and which are not highly related to the invention are not described in order to prevent confusion in explaining the invention without cause.

Hereinafter, with reference to the accompanying drawings with respect to the high-efficiency light irradiation type antistatic system according to an embodiment of the present invention will be described in detail.

Figure 2a is a block diagram of a high efficiency light irradiation static elimination system according to an embodiment of the present invention. Referring to FIG. 2A, a static elimination system using soft X-rays according to an embodiment of the present invention may include a static eliminator 100, a clean air blower 200, a filter 320, a first conduit 300, and a second conduit ( 310).

The static eliminator 100 generates soft X-rays and irradiates them toward the filter 320. The irradiated soft X-rays ionize the clean air supplied by the clean air blower 200. The ionized material may be a clean air blower ( 200) and / or another blower (not shown). May pass through filter 320.

On the other hand, the filter 320 has a configuration to prevent the soft X-rays to pass. According to an exemplary embodiment of the present invention, as shown in FIG. 2A, the filter 320 has a structure in which at least two layers having through holes inconsistent with each other are stacked, and a material that is hard to pass soft X-rays.

Ionized materials (hereinafter, referred to as “ions”) passing through the filter 320 are supplied to the plurality of antistatic objects 101 through the first conduit 300 and the second conduit 310.

According to an embodiment of the present invention, the valves 330 may be mounted in the second conduit 310 to adjust the amount of ions. For example, since a lot of ions are supplied to the central conduit 310 close to the static eliminator 100, some of the valves in the central conduit 310 are partially closed, and the valve in the conduit far from the static eliminator 100 is fully open. As a result, the amount of ions can be evenly provided to the antistatic object.

Figure 2b is a block diagram of a high efficiency light irradiation static elimination system according to another embodiment of the present invention. Referring to FIG. 2B, the high-efficiency light irradiation static elimination system according to an embodiment of the present invention includes a static eliminator 100, a clean air blower 200, a filter 320, a first pipe line 300, and a second pipe line ( 310). Compared with the embodiment illustrated in FIG. 2A, the diameters of the second conduits 310 are different from each other. That is, the diameter of the second conduit closer to the static eliminator is smaller, and the farther it is, the larger its diameter. This makes it possible to evenly supply ions to the static elimination object.

Figure 3a is a block diagram of a static eliminator used in the high efficiency light irradiation static elimination system according to an embodiment of the present invention.

The static eliminator 100 according to the embodiment of the present invention includes a bulb 10, a heater 11, a cathode 12, a case 16, a heat sink 17, a target 18, and an electron density control unit ( 30). Here, the inside of the bulb 10 is maintained in a vacuum, electrons are emitted from the heated heater 11, electrons emitted from the heater 11 is accelerated toward the target 18 by the cathode 12, and accelerated The electrons strike the target 18 and emit soft X-rays.

According to an embodiment of the present invention, the electron density adjusting unit 30 may adjust the density of electrons that strike the target 18. Specifically, the electron density adjusting unit 30 may differently adjust the density of electrons colliding with the target 18 for each region constituting the target 18. Here, the region constituting the target 18 may be at least two regions. For example, the target 18 may include a first region including a center thereof and a second region surrounding the first region. Here, according to an embodiment of the present invention, the electron density adjusting unit 30 may differently control the density of the electrons hitting the first region and the density of the electrons hitting the second region. In this embodiment, it is preferable to make the density of the electrons striking the second region larger.

According to another embodiment of the present invention, the target 18 may include a first region including a center thereof, a second region surrounding the first region, and a third region surrounding the second region. Here, according to an embodiment of the present invention, the electron density adjusting unit 30 may differently adjust the density of electrons that strike the above-described first to third regions. In this embodiment, the density of electrons that strikes the second region is greater than the density of electrons that strike the first region, and the density of electrons that hit the third region increases the density of electrons that strike the second region. It is preferable.

According to another embodiment of the present invention, the target 18 may include at least four or more regions, and the density of electrons in these four regions may be adjusted differently. Here, the four or more regions may be determined according to the distance away from the central region of the target 18, and the further away from the central region, the higher the density of the colliding electrons may be adjusted.

Preferably, the electron density adjusting unit 30 targets 18 so that the density of electrons striking the peripheral region of the center is higher than the density of electrons striking the central region of the target 18 as shown in FIG. You can adjust the direction of the electrons toward

Figure 3b is a block diagram of a static eliminator used in a high efficiency light irradiation static elimination system according to another embodiment of the present invention.

Referring to FIG. 3B, the static eliminator 100 includes a bulb 10, a heater 11, a cathode 12, a case 16, a heat sink 17, a target 18, and an electron density control unit 30. In addition, it further includes a series of grids to control the direction of the electrons.

The bulb 10 is vacuumed inside and made of glass having a high melting point. In order to prevent oxidation and combustion of the heater 11 corresponding to the filament, it is desirable to maintain a high vacuum in order to improve the life and performance of the heater 11.

The hot electron emitter comprises a heater 11 and a cathode 12. The heater 11 is heated by high pressure electric energy to generate electrons. According to an embodiment of the present invention, the heater 11 may be a tungsten filament having excellent electrical and thermal characteristics.

The cathode 12 accelerates hot electrons generated by the heater 11 toward the target 18, and the accelerated electrons are moved toward the target 18.

The first grid 13 may accelerate the electrons 19 or control the emission angle, and the second grid 14 may control the emission angle of the electrons 19 accelerated in the first grid 13. In addition, the third grid 15 may control the emission area of the electrons 19 controlled by the second grid 14. As such, according to the exemplary embodiment of the present invention, the electrons collide with the target 18 by the first grid 12, the second grid 13, the third grid 15, and the electron density control unit 30. The density of can be adjusted.

In the present embodiment, three grids are used, but this is merely an example and may be configured to use fewer or more grids.

According to an embodiment of the present invention, the window in which the electrons 19 collide may include a target 18, a heat sink 17, and a case 16.

According to an embodiment of the present invention, the target 18 may be formed of beryllium coated with titanium in a substantially circular shape, but is not limited to such a shape or a material.

According to an embodiment of the present invention, when electrons collide with the target 18, soft X-rays having a wavelength of about 1.2 to 1.5 angstroms may be generated.

Meanwhile, it should be understood that the above-described flow of electrons (dotted lines) shown in FIGS. 3A and 3B do not necessarily move along the dotted lines, but are schematically drawn to explain the technical idea of the present invention.

Referring to FIG. 4A, a substantially circular heat sink 17 may be positioned on an outer circumference of the target 18. According to an embodiment of the present invention, copper (Cu) having excellent thermal conductivity is applied to the heat sink 17 to prevent overheating of the target 18. An approximately circular case 16 may be integrally coupled with the bulb 10 on the outer circumference of the heat sink 17. The case 16 is preferably made of aluminum (Al) material for conducting and dissipating heat transferred to the heat sink 17.

As described above, the window according to the exemplary embodiment of the present invention has a configuration in which heat generated from the target 18 due to the collision of the electrons 19 is transferred to the case 16 through the heat sink 17 and effectively releases heat. It can serve as a heater sink.

Referring to FIG. 3B, the electron density adjusting unit 30 may be positioned on the outer circumferential surface of the bulb 10. The electron density adjusting unit 30 may adjust the irradiation angle of the electrons 19 controlled by the third grid 15.

Referring to FIG. 4B, the electron density control unit 30 according to an exemplary embodiment of the present invention is an area that is farther away from the center of the target 18 than electrons that strike the center area of the target 18. Adjust the number of electrons to be higher. As a result, X-rays emitted around the target 18 may be stronger than soft X-rays emitted from the center of the target 18.

According to an embodiment of the present invention, the electron density control unit 30 may be a permanent magnet or an electromagnet or a combination thereof.

5A and 5B, the electron density control unit 30 may be formed of one body or at least two separated forms on the outer circumferential surface of the bulb. For example, a ring-shaped electron density control unit 30 may be configured on the outer peripheral surface of the bulb as shown in FIG. 5A, and a pair of corresponding semi-circular electron density control units 31 is configured on the outer peripheral surface of the bulb as shown in FIG. 5B. As shown in FIG. 5C, two pairs of corresponding arc-shaped electron density adjusting units 32 may be formed on the outer circumferential surface of the bulb. Therefore, the electronic density control unit 30 according to the present invention can adjust the intensity of the soft X-rays in consideration of the shape of the antistatic object and the distance to the antistatic object.

For example, if the shape of the static elimination object is rectangular, the electron density control unit 32 may adjust the shape of the soft X-ray to be rectangular or similar thereto.

As described above, if the intensity or shape of the soft X-rays is adjusted, the distribution of air ionized by the soft X-rays may be adjusted in association with the same.

6 is for explaining the density of ions formed by the soft X-rays irradiated from the static eliminator 100 of the present invention. Referring to FIG. 6, in the present invention, the same ion may be provided at various positions of the antistatic object, for example, a, b1 and b2, c1 and c2, and d1 and d2. To this end, in the electron density control unit 30 according to an embodiment of the present invention, the intensity of the soft X-rays generated in the peripheral region of the center of the target 18 is higher than the soft X-rays generated in the central region of the target 18. The density of electrons striking the target 18 is adjusted to be strong.

FIG. 7 schematically shows a range in which the soft X-rays 20 ionize clean air between the static elimination object 101 and the static eliminator 100. As shown in FIG. 7, the electron density control unit 30 according to the present invention has the ions provided to the antistatic object 101 even when θ1, which is an angle that covers the entire antistatic object 101, is 45 degrees or more. The electron density striking the target 18 may be adjusted to be uniform throughout the antistatic object 101.

8A and 8B exemplarily show an irradiation shape of soft X-rays. Referring to these drawings, the electron density control unit 30 according to the present invention can control the shape of the soft X-rays (that is, the shape of the ions provided to the antistatic object) in accordance with the shape of the antistatic object 101 in various ways Indicates.

As such, the present invention can remove the charges present in the static elimination object in a short time by adjusting the intensity and shape of the soft X-rays in consideration of the distance to the static elimination object and its shape, as well as the optimized charge considering the shape of the antistatic object. Distribution can be provided.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

10: bulb 11: heater
12: cathode 13, 14, 15: grid
16: case 17: heat sink
18: target 19: electron
20: soft X-ray 30, 31, 32: electronic density control unit
100: static eliminator 101: antistatic object
200: clean air blower 300: first pipe
310: second pipe line 320: filter
330: control valve

Claims (8)

A blower for supplying air;
An electrostatic discharger emitting soft X-rays to ionize the supplied air;
A first conduit configured to provide a conduit for receiving a material ionized by the soft X-ray and supplying the object to an antistatic object; And
And a second conduit communicating with said first conduit for supplying said ionized material to at least two antistatic objects, respectively. The method of claim 1,
And a filter for blocking soft x-rays emitted from the static eliminator.
The filter is a high efficiency light-emitting static elimination system, characterized in that for passing the ionic material. The method of claim 1,
And the diameter of each of the second conduits providing the ionized material to each of the static elimination objects increases as the distance from the static eliminator increases. The method of claim 1,
A valve is installed in the second conduit for providing the ionized material to each of the static elimination objects, the degree of opening and closing of the valve is dependent on the degree away from the static eliminator. The method of claim 1, wherein the static eliminator
A heater emitting electrons;
A target in which electrons emitted from the heater collide with each other; And
And an electron density adjusting unit for differently adjusting the density of electrons colliding with the target for each region constituting the target. The method of claim 5, wherein the static eliminator
A first grid for accelerating electrons emitted by the heater; And
And a second grid for controlling the angle of the electrons accelerated in the first grid.
The electron density control unit, the high efficiency light-emitting static elimination system, characterized in that for adjusting the direction of the electrons controlled by the second grid to adjust the density of the electrons hit the target for each region of the target. The method of claim 5,
And the density of electrons striking the target increases from the center of the target toward the periphery. The method of claim 7, wherein the static eliminator
Further comprising a bulb to maintain a vacuum state,
The heater and the target is located inside the bulb, the electron density control unit is a high efficiency light irradiation type static elimination system, characterized in that formed on the outer peripheral surface of the bulb.

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