KR20120137662A - Traveling vacuum robot - Google Patents

Traveling vacuum robot Download PDF

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Publication number
KR20120137662A
KR20120137662A KR1020110056637A KR20110056637A KR20120137662A KR 20120137662 A KR20120137662 A KR 20120137662A KR 1020110056637 A KR1020110056637 A KR 1020110056637A KR 20110056637 A KR20110056637 A KR 20110056637A KR 20120137662 A KR20120137662 A KR 20120137662A
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KR
South Korea
Prior art keywords
rail
magnetic
rotating member
linear driving
vacuum
Prior art date
Application number
KR1020110056637A
Other languages
Korean (ko)
Inventor
김원경
이성직
오영일
Original Assignee
주식회사 나온테크
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Publication date
Application filed by 주식회사 나온테크 filed Critical 주식회사 나온테크
Priority to KR1020110056637A priority Critical patent/KR20120137662A/en
Publication of KR20120137662A publication Critical patent/KR20120137662A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages
    • B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Abstract

A plurality of first rails extending in a longitudinal direction and vertically fastened to a lower end of the vacuum plate and a vacuum plate including a block guiding along the first rail, the first rail being in the same direction as the first rail; A linear driving part including a driving part disposed on the rail and linearly moving along the second rail and the linear driving part, the linear driving part moves along the second rail when driven, and rotates in contact with a lower end of the vacuum plate. A driving base provided with a lower magnetic movement and a linear movement along the first rail, and the upper base and the upper magnetic to rotate corresponding to the lower magnetic and a predetermined distance from the center of the conveying base 2 An arm portion having two link members and one end portion of the arm portion and the other end portion The present invention relates to a traveling vacuum robot including a hand part having a support part on which a substrate is mounted.

Description

Traveling Vacuum Robot

The present invention relates to a traveling vacuum robot, and more particularly, does not directly transmit power to an arm drive unit, a rotation drive unit, a travel drive unit, etc. of a robot disposed in a process chamber in a vacuum state through a conventional magnetic fluid sealing device. The present invention relates to a traveling vacuum robot using magnetic force to transmit power without connection or contact.

Generally, in the manufacturing process of a semiconductor device, a to-be-processed object, such as a semiconductor wafer, is carried in a vacuum processing apparatus, and a predetermined process is performed. Until the device is completed, it is common that a plurality of kinds of processes such as film formation, etching, and heating of the wafer are performed in each processing apparatus.

In this case, each time the wafer or substrate is brought in and out of the separate process apparatus, the process chamber (or load lock chamber) of each process apparatus is opened to the atmosphere. For this reason, much time is required for vacuum evacuation of a process chamber (load lock chamber), and the throughput of a process will fall. In addition, depending on the processing contents, such as in the case of performing continuous film formation, there is also a process that is very reluctant to attach a natural oxide film or moisture to the wafer surface.

Thus, for example, a so-called clustered processing system has been developed in which a common conveyance chamber in a vacuum atmosphere is defined to radially connect a plurality of vacuum processing apparatuses around a polygonal common container. In addition, between a plurality of clustered processing systems, a large amount of wafers are conveyed at a low speed by an automatic transfer device (AGV or RGV) or the like.

However, today, the demand for high density, high integration and small quantity production of semiconductor devices is increasing, and the efficiency of processing is increasing. A cluster processing system having a larger number of processing apparatuses (for example, 5 or more) than the number of processing apparatuses (for example, three or more) conventionally required, or more advanced, has adopted an inline system method.

In order to perform each of these processes, a robot for transferring a substrate between the processes must be disposed in the process of performing each process. In order to transmit a driving force to such a robot, a driving device for transmitting a driving force such as a motor is disposed around the process chamber. When a device that transfers driving force, such as a motor, to a robot that transports the substrate is located inside the chamber, the foreign matter generated during the driving adversely affects the substrate. In order to prevent this, conventionally, the driving force is transmitted to the robot by using a magnetic fluid sealing device to maintain the sealing in the path for transmitting the driving force or the driving force through the wall of the chamber. However, when the magnetic fluid sealing device is used, the structure of the magnetic fluid sealing device is complicated, and the price of the equipment is increased by purchasing an expensive magnetic fluid sealing device.

The present invention has been made to solve the conventional problems as described above, and provides a traveling vacuum robot that delivers the driving force required to the robot while maintaining the sealing using magnetic force without transmitting the driving force through the wall of the chamber. For the purpose.

In addition, it is an object of the present invention to provide a running vacuum robot that is easy to manage and inexpensive compared to the conventional one by maintaining a vacuum state without using a magnetic fluid sealing device.

In order to achieve the above object, the first rail is disposed in the process chamber inner plane in the process direction, perpendicular to the process chamber inner plane, and at least one second rail is disposed in the same direction as the first rail. A linear driving part including a driving part arranged to be linearly moved along the second rail and the linear driving part, and the linear driving part moves along the second rail when driven, and contacts the lower end of the vacuum plate to perform a rotational motion. The drive base is provided with a lower magnetic to move along a straight line along the first rail, the transfer base portion provided with an upper magnetic that rotates corresponding to the lower magnetic and the two links spaced a predetermined distance from the center of the transfer base portion An arm portion having a member and one end portion of the arm portion, and the other end portion of which the substrate is seated. The hand-driving part vacuum robot is provided with a portion is provided.

Preferably, the gap between the north pole and the south pole of the upper magnetic and the lower magnetic is formed at equal intervals.

Preferably, the linear driving unit further includes a reinforcing plate to prevent tilting due to the magnetic force of the lower magnetic.

It is preferable that a plurality of linear driving units be provided along the first rail.

Preferably, the driving base part has a locking step for preventing the second rail from inclining by the magnetic force of the lower magnetic part and the upper magnetic part.

The traveling vacuum robot according to the present invention has an effect of providing a traveling vacuum robot that transmits the driving force required to the robot while maintaining the sealing by using the magnetic force generated in the magnetic without passing the driving force through the wall of the chamber. .

In addition, by maintaining the vacuum state without using the magnetic fluid sealing device, there is an effect that it is easy to manage, and to provide a traveling type vacuum robot which is cheaper than the conventional one.

In addition, by using a magnetic force generated in the magnetic to maintain the vacuum state can be transferred to the substrate between the process and the process has the effect of providing a traveling vacuum robot that does not require a separate process to re-create the vacuum state.

1 is a perspective view of a traveling vacuum robot according to a preferred embodiment of the present invention.
2 is a cross-sectional view of a traveling vacuum robot according to a preferred embodiment of the present invention.
Figure 3 is a side view of the linear drive unit according to the present invention.
4 is a rear view of the housing according to the invention.
Figure 5 is a bottom view of the first magnetic in the present invention.
FIG. 6 is an enlarged view of portion A of FIG. 2; FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, detailed descriptions according to related known functions or configurations will be omitted when it is determined that the detailed description may unnecessarily obscure the subject matter of the present invention. In describing the present invention, even if the embodiments are different, the same reference numerals are used for the same configuration, and the description thereof may be omitted as necessary.

Referring to Figure 1, the driving vacuum robot according to the present invention is a linear driving unit 20 for driving a linear movement, a driving base portion 30 for moving a certain section and rotational movement for the process, the driving base portion ( 30) and the transfer base 40 to move a certain distance, the arm portion 50 to repeat the linear movement when the substrate is seated, and the hand portion 60 is the substrate is seated.

The vacuum plate 10 distinguishes the inside of the process chamber in a vacuum state from the outside of the process chamber in an atmospheric pressure state. In the vacuum plate 10, a plurality of first rails 120 extending in a longitudinal direction are disposed in parallel to be spaced apart by a predetermined distance. A plurality of blocks guiding in a straight line along the first rail 120 are arranged. The cover 140 is disposed around the block to block foreign substances that may occur while the block is running. Cover 140 is preferably formed to surround the block.

The vacuum plate 10 has a vacuum cover 160 is disposed to maintain a vacuum state between the plurality of first rails 120 are arranged and to be easily accessible from the outside of the chamber during the maintenance operation of the robot. The vacuum plate 10 has a long hole formed therein so that the vacuum cover 160 may be disposed, and the fastener is fastened at a predetermined interval so that the vacuum cover 160 is fastened around the long hole. The vacuum cover 160 is preferably formed of a thin plate to be attached to the upper magnetic 420 and the lower magnetic 320 to be described later magnetically. In addition, the vacuum cover 160 is preferably used a steel material so that the properties of the magnetic force is transmitted. The vacuum cover 160 may be polished to prevent corrosion of the steel material.

The linear driving unit 20 is driven and positioned in a straight line to a certain section where the process is possible. In the linear driving unit 20, the plate plate 220 is vertically disposed along one side of the long hole formed in the vacuum plate 10. The plate plate 220 may be further formed with a reinforcing plate to prevent the inclination (tilt) in one direction due to the magnetic force of the upper magnetic 420 and the lower magnetic 320. In the linear driving unit 20, the second rail 240 is disposed along the length direction of the plate plate 220. The second rail 240 is disposed at least one spaced apart from the lower end of the vacuum plate 10 by a predetermined distance. In this embodiment, a plurality of second rails 240 are disposed to smoothly drive the linear driving. A plurality of guide blocks guiding in a straight line along the second rail 240 is disposed.

At one end of the linear driver 20, a driver 260 having an electric motor and a speed reducer for increasing torque is disposed. The linear driving unit 20 includes a housing 280 that is engaged with a block guiding linearly along the second rail 240. The housing 280 is fastened to a rotation shaft and a pulley of the driving unit 260 on one side to receive the driving force. When the housing 280 receives the driving force, the fastened driving base part 30 moves linearly along the second rail 240. The housing 280 is provided with a locking step 282 in contact with the block to prevent the second rail 260 from being pulled to one side by the magnetic force of the first magnetic 322 and the second magnetic 324. The catching jaw 282 is preferably arranged in pairs on the outside of the block is formed to prevent the pulling phenomenon. The linear driving unit 20 is preferably arranged in plural on one side and the other side along the long hole so that there is no pulling phenomenon and more precise straightness.

 The driving base part 30 moves in a straight line along the second rail 240 and rotates. The driving base part 30 is disposed in the first rotating member 340 and the first rotating member 340 to rotate the lower magnetic 320 and the third rotating member 440 which will be described later. It includes two rotating member 360.

The driving base portion 30 has a cylindrical shape and is inserted into and disposed in the housing 280. The lower magnetic 320 is disposed on the driving base part 30 so that, for example, the N pole and the S pole formed on the lower magnetic 320 are alternately disposed at an angle of 45 degrees. In order to raise the precision of control, it is desirable to arrange | position alternately at an angle of 10 degrees or less. However, the gap between N pole and S pole can be adjusted according to the required precision.

The lower magnetic 320 is provided separately from the first magnetic 322 and the second magnetic 324 to enable each rotation. The first magnetic 322 is connected to the first rotating member 340 and the second magnetic 324 is connected to the second rotating member 360.

The first rotating member 340: a reducer is inserted into the housing 280 and fastened to the lower end of the first magnetic 322 and disposed. The first rotating member 340 rotates by a driving force transmitted through the second driving unit (not shown). It rotates as the first magnetic member 322 rotates when the first rotating member 340 rotates. The second rotating member 360 (reduction gear) is disposed to be inserted into the first rotating member 340 and is connected to the second magnetic 324. As a result, the second rotating member 360 rotates when the second magnetic member is rotated. 324 also rotates. The first rotating member 340 and the second rotating member 360 may be connected to any power device such as a cylinder and a motor which can be controlled while the first magnetic 322 and the second magnetic 324 rotate.

The transfer base portion 40 is positioned to a position where the process of the substrate can proceed. The transfer base portion 40 is located in the transfer plate 410 and the transfer plate 410 which are fastened to the block in the first rail 120 and the upper magnetic 420 having magnetic properties corresponding to the lower magnetic 320. And the third rotary member 440 and the upper magnetic 420 are fastened to the upper magnetic 420 and the first rotary member 340 rotates corresponding to the rotation, and the second rotary member 360 is rotated. The fourth rotating member 460 is rotated corresponding to the.

The transfer plate 410 is fastened and fixed to a block guiding along the first rail 120 disposed on both sides along the long hole. The transfer plate 410 is disposed in a structure that traverses the long hole in order to fasten the block of the first rail 120 disposed along both sides of the long hole. The structure of the transfer plate 410 is to obtain structural safety and straightness without being affected by the magnetic force from the upper magnetic 420. The transfer plate 410 is formed in a wide plate shape having a predetermined thickness and is disposed such that the third rotating member 440 is inserted therein.

The upper magnetic 420 is located on the upper surface of the vacuum cover 160 is magnetically attached to the vacuum cover 160. The upper magnetic 420 is disposed at the inner bottom of the transfer plate 410. The upper magnetic 420 is provided with a third magnetic 440 / fourth magnetic 460 that rotates corresponding to the first magnetic 322 / second magnetic 324. The third magnetic 440 / fourth magnetic 460 is formed in a ring shape. The third magnetic section 440 and the fourth magnetic section 460 are arranged by sequentially repeating a plurality of N poles and S poles. The intervals at which the N poles and the S poles are disposed correspond to the intervals at which the magnetic poles of the first magnetic 322 / second magnetic 324 are disposed. For example, the north pole and the south pole may be disposed at a 45 degree angle. In order to increase the precision of the control, it is preferable to arrange at equal angles of 10 degrees or less. However, depending on the precision of the north pole and south pole may be possible to adjust the angle. The strength of the magnetic force is that when the first magnetic 322 and the second magnetic 324 is rotated, the magnetic force is transferred to the vacuum cover 160 so that the third magnetic 422 and the fourth magnetic 424 correspond to be rotated. It is irrelevant. However, a higher magnetic force may be required for precise control of the robot.

The third rotating member 440 is inserted into and coupled to the transfer plate 410. When the first rotating member 340 rotates, the third rotating member 440 rotates the first magnetic 322 and the third magnetic 440, and thus the third rotating member 440 also rotates. In the third rotating member 440, the first link member 520 is rotated together by fastening the first link member 520 of the right arm, which will be described later, to one side. The position of the linear movement of the arm portion 50 is determined by the rotation angles of the third and fourth rotating members 440 and 460.

The fourth rotating member 460 is disposed to be inserted into the third rotating member 440. The fourth rotating member 460 is located at one side of the left arm to be described later.

The upper magnetic 420 and the lower magnetic 320 may attract and attach metallic foreign substances generated during driving. This prevents contamination of the process with metallic foreign objects.

The arm portion 50 is driven in a four-section link manner to allow the hand portion 60 to linearly move toward the substrate. The arm part 50 is fastened to be spaced apart from both sides by a predetermined distance from the center of the fourth rotating member 460 and the third rotating member 440. The arm on the left side of the fourth rotating member 460 shown in the present invention is designated as the left arm for convenience and the arm on the right side is designated as the right arm. One end of the left arm / right arm is fastened to the fourth and third rotary members 460 and 440, respectively, and the other end is fastened to the hand part, respectively. The left arm / right arm includes a first link member 520 fastened to the fourth rotating member 460 and the third rotating member 440 in a rectangular bar shape. Stoppers are disposed on both sides of the first link member 520 to physically prevent an arm connected to the third rotating member 440 and the fourth rotating member 460 from colliding with each other. The stopper preferably uses a soft material that prevents the impact of the arm during rotation and absorbs the impact. In order to increase the structural rigidity of the first link member 520, it is preferable to be made of a lightweight metal material such as aluminum. The first link member 520 is formed such that the second link member 560, which will be described later, is bent at a predetermined angle in order to smoothly move in a straight line direction. The second link member 560 is fastened to the rotation joint 560 on one side and the hand part 60 to be rotatable on the other side. The second link member 560 is formed in a rectangular bar shape to have a predetermined portion of rigidity. In order to increase the structural rigidity of the second link member 560, it is preferably made of a lightweight metal material such as aluminum. The second link member 560 may be formed to dig inside to reduce the weight of the entire device.

The hand part 60 is disposed above the fourth rotating member 460 and moves in a straight line with respect to the process direction. The hand portion 60 is fastened to the left arm / right arm, respectively, and the third rotary member 440 / fourth rotary member 460 moves in a straight line when rotating. Hand portion 60 is preferably made of a lightweight metal material such as aluminum to increase structural rigidity and at the same time reduce the weight of the overall device.

The hand portion 60 has a finger on which the substrate is seated. Fingers are preferably made of a material that is less vibration generated without damaging the substrate and the wafer due to static electricity. The finger is provided with a mounting groove so that the substrate does not shake when seated.

   Hereinafter, the operation of the embodiment of the present invention will be described in connection with the accompanying drawings.

After the process is completed, the substrate is driven to the standby state to proceed with the next process. When the driving unit 260 drives and transmits a driving force to the linear driving unit 20, the driving unit 260 moves to the section where the substrate is located along the second rail 240. When the first rotating member 340 and the second rotating member 360 rotate under the driving force, the third rotating member 440 and the fourth rotating member 460 rotate. Then, as the first link member 520 is gradually rotated, the second link member 560 is pushed forward. The hand part 60 connected to the second link member 560 also makes a linear movement forward. The substrate after the process is seated on the substrate support portion formed in the hand portion 60.

When the substrate is completely mounted, the third rotating member 440 and the fourth rotating member 460 rotate in opposite directions. The second link member 560 then retracts, resulting in a shape in which the arms eventually fold. The linear drive unit 20 is driven to reach the process chamber position where the next process is located. The third rotating member 440 or the fourth rotating member 460 is rotated according to the position of the process chamber to position the substrate in the next process direction. When the position of the substrate is determined, the third rotating member 440 and the fourth rotating member 460 rotate so that the arm moves linearly. When the arm moves in a straight line, the pin in the process chamber rises to seat the substrate, and the third rotating member 440 and the fourth rotating member 460 rotate in opposite directions. This is repeatedly driven according to the process in which the substrate is located.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore to be understood that the embodiments described above are illustrative and not restrictive in every respect and that the scope of the present invention is defined by the appended claims rather than the foregoing description, And all changes or modifications derived from equivalents thereof should be construed as being included within the scope of the present invention.

1: traveling vacuum robot
10: vacuum plate
120: first rail 140: cover 160: vacuum cover
20: linear drive part
220: plate plate 240: second rail 260: drive unit 280: housing
30: driving base part
320: lower magnetic 322: the first magnetic 324: the second magnetic
340: first rotating member
360: second rotating member
40: transfer base portion 410: transfer plate
420: upper magnetic 422: third magnetic 424: fourth magnetic
440: third rotating member
460: fourth rotating member
50: arm part
520: first link member 540: rotary joint 560: second link member
60: hand part
620: finger

Claims (5)

A first rail is disposed in the process chamber inner plane in the process direction, and is vertically fastened to the process chamber inner plane, and at least one second rail is disposed in the same direction as the first rail and linearly moves along the second rail. A linear driving part including a driving part;
A driving base fastened to the linear driving unit and provided with a lower magnetic body moving along the second rail when the linear driving unit is driven and rotating in contact with the lower end of the vacuum plate;
A transfer base part moving in a straight line along the first rail and having an upper magnetic body rotating corresponding to the lower magnetic body;
An arm part spaced apart from a center of the transfer base part by two link members; And
The hand portion is fastened to one end of the arm portion and the other end is provided with a support portion on which the substrate is seated.
Driven vacuum robot included. The method according to claim 1,
A traveling vacuum robot, wherein the gap between the N pole and the S pole of the upper magnetic and the lower magnetic is arranged at an equiangular angle of 9 degrees or less to increase accuracy. The method according to claim 1 or 2,
The linear driving unit further comprises a reinforcing plate for preventing the tilt due to the magnetic force of the lower magnetic. The method according to claim 3,
The driving type vacuum robot, characterized in that a plurality of linear driving unit is provided along the first rail. The method of claim 4,
The driving base part is a traveling vacuum robot, characterized in that the locking step is formed to prevent the second rail is inclined by the magnetic force of the lower magnetic and the upper magnetic.
KR1020110056637A 2011-06-13 2011-06-13 Traveling vacuum robot KR20120137662A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110056637A KR20120137662A (en) 2011-06-13 2011-06-13 Traveling vacuum robot

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Application Number Priority Date Filing Date Title
KR1020110056637A KR20120137662A (en) 2011-06-13 2011-06-13 Traveling vacuum robot

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KR20120137662A true KR20120137662A (en) 2012-12-24

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11702299B2 (en) * 2019-06-26 2023-07-18 Semes Co., Ltd. Transport robot and substrate treating apparatus comprising the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11702299B2 (en) * 2019-06-26 2023-07-18 Semes Co., Ltd. Transport robot and substrate treating apparatus comprising the same

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