KR20120127347A - Remote controller of semiconductor measuring device using joystick - Google Patents

Abstract

PURPOSE: A remote controller for a semiconductor measuring apparatus using a joystick is provided to easily determine a cause of error occurrence from operation images of the semiconductor measuring apparatus taken a picture by a screen or a camera of the semiconductor measuring apparatus in error occurrence time by reproducing a stored moving picture. CONSTITUTION: A KVM(Kilobyte Virtual Machine) module(120) is connected to a keyboard, a mouse, and a monitor input-output terminal of a semiconductor measuring apparatus(20). An image distributor(130) distributes a display signal outputted from the semiconductor measuring apparatus is to a scaling module. A scaling module(140) converts an analog display signal inputted from the image distributor into an HD(High Definition) class digital signal. A signal converter module(150) converts images receiving from the scaling module into an HD-SDI(System Deployment Image). A DVR(Digital Video Recorder) module(160) stores the HD-SDI provided from the signal converter module. [Reference numerals] (110) IP controller; (121) Input device connection means; (122) Image connection means; (123) KVM control means; (130) Image distributor; (140) Scaling module; (150) Signal converter module; (170) Joystick signal processing module; (180) HD camera; (191) Communication means; (192) Control means; (AA) Keyboard,mouse; (BB) Monitor output; (CC) TDI monitor output; (DD) Tower lamp signal; (EE) Stage control signal

Description

REMOTE CONTROLLER OF SEMICONDUCTOR MEASURING DEVICE USING JOYSTICK}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a remote control apparatus for semiconductor metrology equipment, and more specifically, to stage control by manual during defect review after recipe setup or wafer inspection.

Generally, a semiconductor device is manufactured by repeating unit processes such as a photolithography process for forming a circuit pattern on a wafer, an ion implantation process, a thin film deposition process for depositing a thin film, and a planarization process for polishing the deposited thin film.

At this time, the process progress condition of each unit process is stored as a recipe, and the manufacturing facility and the driving program automatically perform the process with reference thereto, and the worker sets up the recipe for each semiconductor device to be manufactured.

On the other hand, a wafer inspection process is performed to check whether there is an abnormality in the wafer, and then the operator manually controls the stage as needed.

Such manual operation of the stage is performed when it is determined that the operator needs to monitor the manufacturing process in the semiconductor line.

On the other hand, fine dust generated by an operator or the like may cause a fatal result in the semiconductor process. Therefore, in order to check or operate the malfunction of the equipment, the operator may enter the semiconductor line only after wearing the protective clothing.

Accordingly, technologies for controlling a remote site without a worker entering a clean room when various semiconductor equipment such as a semiconductor are manufactured and inspected are being developed.

Even in the case of manual operation of the stage, it is necessary to manually view the equipment and operate the stage manually according to the judgment of the operator, so that it is not easy to control at the remote place, The necessity is the same.

However, the remote control technology for existing process equipment is focused on the side of database and scheduling technology for production automation, so that it is difficult to apply precise control by the operator and remote control of the measurement operation as it is.

Therefore, there is a need for the development of a control system for intuitively and accurately operating semiconductor measuring equipment at remote locations.

[Patent 1] Korean Patent Publication No. 10-2008-59730 "Stage Lifting Device for Focusing Overlay Measuring Equipment" [Document 2] Republic of Korea Patent No. 10-292028 "Real-time control method of semiconductor equipment"

The present invention is the patent application No. 10-2012-0017880 dated February 22, 2012 "Remote Monitoring and Control System of Semiconductor Equipment" by the applicant, Patent Application No. 10-2012-0052544 dated May 17, 2012 It is a further improvement of the "CD-SEM remote control unit"

It is an object of the present invention to provide a remote control device for semiconductor measurement equipment using a joystick to enable manual stage control from a remote location by providing a joystick in a remote control device for semiconductor measurement equipment.

In order to achieve the above object, in the remote control apparatus of the semiconductor measuring equipment according to the present invention, a remote computer 10 connected remotely through a network may include a KVM module 120, a DVR module 160, and a joystick signal processing module ( 170) or an IP controller that controls the ip configuration of the KVM module 120, DVR module 160, joystick signal processing module 170 or ICS module 190 to access one or more of the ICS module 190. 110;

Input device connection means (121) connected to the input device connector of the semiconductor measurement equipment (20); An image connecting means 122 connected to a display connector of the semiconductor measuring device 20 and receiving a display signal from the semiconductor measuring device 20; And a KVM control unit 123 for transmitting the input device signal from the remote computer 10 connected from the remote site to the semiconductor measuring equipment 20 through the input device connecting unit 121. 120;

An image divider (130) for distributing a display signal output from the semiconductor measuring equipment (20) from the KVM module (120) and providing it to a scaling module;

A scaling module 140 for converting an analog display signal input from the image divider 130 into an HD class digital signal and providing the converted signal to a signal converter module;

A signal converter module 150 for converting an image received from the scaling module 140 into an HD-SDI image and applying it to the DVR module;

DVR module 160 for storing the HD-SDI image provided from the signal converter module 150;

A joystick signal processing module 170 which converts the joystick coordinate values from the remote computer 10 connected from the remote place into the x and y axis control signals of the stage and outputs them to the semiconductor measuring device 20;

One or more HD cameras 180 which are installed toward the semiconductor measuring equipment to capture an image and output the captured image to a DVR module;

Communication means (191) connected to the tower lamp signal output port of the semiconductor measuring device (20); And an ICS control unit 182 which reads the tower lamp signal inputted from the semiconductor measuring equipment and provides the same to a remote computer 10 when it corresponds to a predetermined value. ,

The DVR module 160 further stores the image photographed by the HD camera 180 and provides a pre-stored image at the request of a remote computer 10 connected from a remote location, or from the HD camera 180. Characterized in that the image is transmitted in real time.

At this time, the joystick signal processing module 170 receives a joystick coordinate value from the remote computer 10 connected from the remote place, and switches the mode to switch to the manual operation mode of the stage with the semiconductor measuring equipment 20. After the signal is applied, it is converted into the x and y axis control signals of the stage and output.

Meanwhile, as the x and y axis control signals of the stage are applied to the semiconductor measuring device 20 by the joystick signal processing module 170, the semiconductor measuring device 20 controls the stage according to the applied control signal. if,

The signal converter module 150 is further provided with a stage operation image displayed on the TDI monitor of the semiconductor measuring equipment 20 to convert it into an HD-SDI image and apply it to the DVR module.

According to the present invention, there is an effect that stage control can be performed manually at a remote location during defect setup after recipe setup or wafer inspection.

Furthermore, it is possible to monitor the operation image of the semiconductor measuring equipment taken through the screen of the semiconductor measuring equipment and a plurality of cameras in real time from a remote location.

In addition, when an error occurs, the operator can recognize the fact in real time through a remote computer, and furthermore, by playing back the stored video, the operation of the semiconductor measuring equipment captured by the camera and the screen of the semiconductor measuring equipment at the time of the error occurs. The reason for the occurrence of the error can be easily determined.

1 is a connection diagram illustrating a connection relationship between a remote control device of a semiconductor measurement device and a semiconductor measurement device and a remote computer using a joystick according to the present invention.
2 is a functional block diagram illustrating the configuration of a remote control device for semiconductor measuring equipment using a joystick according to the present invention;
3 is a reference diagram showing the external appearance of a remote control device for semiconductor measurement equipment using a joystick according to the present invention;
4 is a reference diagram for explaining a process of controlling a stage by a joystick operation;
5 is an exemplary screen illustrating a state of remotely monitoring and controlling a semiconductor measuring device through a screen of a remote computer.

Hereinafter, with reference to the preferred embodiments of the present invention and the accompanying drawings will be described in detail the present invention. In order to clarify the present invention, contents which are not related to the configuration of the present invention will be omitted, and the same reference numerals are used for the same components.

On the other hand, when an element is referred to as being "comprising" another element in the description of the invention or in the claims, it is not interpreted as being limited to only that element, Elements may be further included.

Also, in the description of the invention or the claims, the components named as "means", "parts", "modules", "blocks" refer to units that process at least one function or operation, Each of which may be implemented by software or hardware, or a combination thereof.

1 is a connection diagram illustrating a connection relationship between a remote control device of a semiconductor measurement device and a semiconductor measurement device and a remote computer using a joystick according to the present invention.

2 is a functional block diagram illustrating a configuration of a remote control apparatus for semiconductor measuring equipment using a joystick according to the present invention.

As shown in FIG. 1, the semiconductor measuring device 20 is connected to the remote control apparatus 100 of the semiconductor measuring device using the joystick according to the present invention.

The semiconductor measuring equipment 20 and the remote control device 100 of the semiconductor measuring equipment using the joystick are installed in the adjacent line of the semiconductor measuring equipment 20 and the remote of the semiconductor measuring equipment using the semiconductor measuring equipment 20 and the joystick. The control device 100 may be connected by several cables according to a standard for data transmission and reception as described below.

On the other hand, the remote computer 10 is connected to the remote control device 100 of the semiconductor measurement equipment using the joystick according to the present invention through a network at a remote location.

In this case, the network may be a local area network (LAN) or a relatively long range wide area network (WAN), or may be a wide-ranging Internet network covering wired and wireless communication methods.

The operator connects to the remote control device 100 of the semiconductor measuring equipment using the joystick according to the present invention using the remote computer 10 to monitor the situation of the semiconductor measuring equipment 20 in real time.

In this case, during the setup of the recipe or the review of the defect after wafer inspection, the stage control of the semiconductor measuring apparatus 20 may be manually performed using a joystick connected to the remote computer 10.

5 is an exemplary screen illustrating a state of remotely monitoring and controlling a semiconductor measuring device through a screen of a remote computer.

As illustrated in FIG. 5, a screen output from the semiconductor measuring device and an operation image of the semiconductor measuring device photographed through three cameras are displayed in real time on the right side, and a user interface for controlling the semiconductor measuring device on the left side. It can be confirmed that is provided.

The operator can manually control the stage of the semiconductor measuring equipment 20 by operating the joystick while watching the screen of the semiconductor measuring equipment.

In particular, the semiconductor metrology equipment includes a separate TDI monitor for displaying the stage image in addition to the main monitor. The TDI image is displayed on the user interface as shown in FIG. 5 to experience the same experience as directly operating the stage in a line. can do.

On the other hand, according to Figure 2 remote control device 100 of the semiconductor measurement equipment using the joystick according to the present invention is the IP controller 110, KVM module 120, image distributor 130, signal converter module 150 And a DVR module 160, a joystick signal processing module 170, an HD camera 180, and an ICS module 190.

The remote control device 100 of the semiconductor measuring equipment using the joystick according to the present invention can be manufactured as illustrated in FIG.

The IP (Internet Protocol) controller 110 includes one of a KVM module 120, a DVR module 160, a joystick signal processing module 170, or an ICS module 190 connected to a remote computer 10 remotely connected through a network. The IP configuration of the KVM module 120, the DVR module 160, the joystick signal processing module 170, or the ICS module 190 is controlled to allow the above access.

The IP controller 110 can accurately arrive at the KVM module 120, the DVR module 160, the joystick signal processing module 170, or the ICS module 190 by the software installed in the remote computer 10. Route.

The keyboard video mouse switch (KVM) module 120 includes an input device connecting unit 121, an image connecting unit 122, and a KVM control unit 123.

The input device connecting unit 121 is connected to a keyboard or mouse connection port of the semiconductor measuring device 20. The semiconductor measuring equipment 20 supports an input device such as a keyboard or a mouse for controlling the operation, and generally includes two or more PS2s for connection thereof. The input device connecting unit 121 is connected to the PS2 or one USB cable. By the port of the semiconductor measuring equipment 20.

On the other hand, the image connecting means 122 is connected to the display connector of the semiconductor measuring equipment 20 receives a display signal from the semiconductor measuring equipment 20.

The semiconductor measuring equipment 20 has a display connector of a standard such as DVI or D-SUB for outputting an image through a monitor, and the image connecting means 122 is connected to the display connector of the semiconductor measuring equipment 20 to the The monitor display output and the display output of the TDI monitor are provided from the semiconductor metrology equipment 20.

On the other hand, the KVM control means 123 receives an input device signal from a remote computer 10 connected from a remote place and transmits the input device signal to the semiconductor measuring equipment 20 through the input device connecting means 121.

That is, when a remote operator places a keyboard or mouse input using the remote computer 10, the operator transmits the keyboard or mouse to the semiconductor measuring equipment 20.

Meanwhile, the image distributor 130 receives the display signals of the TDI monitor and the monitor of the semiconductor measuring device 20 received through the image connecting unit 122 in the form of analog signals, and scales the scaling module 140 and the semiconductor equipment. To a monitor (not shown).

The scaling module 140 converts each of the received display signals of the monitor and the TDI monitor of the semiconductor measuring device 20 into a DVI signal of the HD standard and then transmits the converted signals to the signal converter module 150.

The signal converter module 150 converts the high-definition digital image provided from the scaling module 140 into an HD-SDI signal once more in order to transmit it to the DVR module 160. The HD-SDI video is provided to the DVR module 160 through the coaxial cable by the signal converter module 150.

That is, as shown in FIG. 2, the monitor output of the semiconductor measurement equipment 20 is applied to the scaling module 140 via the image distributor 130, converted by the signal converter module 150, and recorded by the DVR 160. And stored.

Meanwhile, the output of the TDI monitor, which is a separate auxiliary monitor displaying the stage image of the semiconductor metrology equipment 20, is applied to the scaling module 140 via the image distributor 130, and converted by the signal converter module 150. Recorded and stored in the DVR (160).

DVR device according to the prior art has a resolution limit of 320 * 240 due to the bus specification because it is connected to the semiconductor measuring equipment 20 and the BNC method to store the image, in the present invention 720P (1280 * 720) HD or Full HD 1080P (1920 * 1080) or higher level video recording is possible.

Due to the characteristics of semiconductor measuring equipment, the cause of errors and malfunctions can be identified through the recorded equipment video. However, the resolution of the existing 320 * 240 cannot clearly recognize the letters reflected on the equipment video. By storing, the problem of resolution is solved.

The digital video recorder (DVR) module 160 stores a high resolution image provided from the signal converter module 150. Meanwhile, the DVR module 160 further stores the video signal transmitted from the HD camera 180.

Meanwhile, the DVR module 160 provides a pre-stored image at the request of the remote computer 10 or transmits the image provided from the HD camera 180 in real time.

Generally, the SD camera supports 490,000 pixels, but the HD camera 180 supports 2 million pixels so that the recording can be made more clearly and clearly.

The HD camera 180 may be installed toward the semiconductor measuring equipment 20 in a line.

When the joystick signal processing module 170 receives the joystick coordinate values from the remote computer 10 connected from a remote location, the joystick signal processing module 170 converts the joystick signal values into the x and y axis control signals of the stage and outputs them to the semiconductor measuring equipment 20.

That is, when the operator manipulates the joystick provided in the remote computer 10, the remote computer 10 generates the x-axis and y-axis joystick coordinate values and transmits the coordinate values to the IP controller 110 through the network. ) Provides the joystick coordinate value received by the joystick signal processing module 170.

The joystick signal processing module 170 first switches the stage operation mode of the semiconductor measurement equipment 20 to the manual mode.

Thereafter, the input joystick coordinate values are analyzed, and the x-axis control signal is generated so that the stage moves to the right when the x coordinate is a positive value and the stage moves to the left when the x coordinate is a negative value. Is applied.

Accordingly, as shown in FIG. 4, the stage can be moved left and right by the operator operating the joystick left and right at a remote location.

Meanwhile, the y-axis control signal is generated and applied to the semiconductor measuring apparatus 20 so that the stage moves backward when the y coordinate is a positive value, and when the y coordinate is negative, the stage moves forward.

This allows the stage to move back and forth as shown in FIG. 4 by the operator operating the joystick back and forth at a remote location.

Meanwhile, as the x and y axis control signals of the stage are applied to the semiconductor measuring device 20 by the joystick signal processing module 170, the semiconductor measuring device 20 controls the stage according to the applied control signal. if,

The signal converter module 150 is further provided with a stage manipulation image displayed on the TDI monitor of the semiconductor measuring equipment 20 and converted into an HD-SDI image to be provided to the DVR module 160, which is then provided by the DVR module 160. Record.

Accordingly, the TDI monitor image is further displayed on the user interface screen as illustrated in FIG. 5.

Accordingly, the user can check the image of the stage operated in the manual mode according to the joystick operation on the screen of the remote computer 10 in real time. In addition, the operation screen of the measurement equipment 20 by the joystick output through the TDI monitor is recorded by the DVR module 160 and can be reproduced and viewed.

The ICS module 190 includes communication means 191 and ICS control means 182. At this time, the communication means 191 is connected to the tower lamp signal output port of the semiconductor measurement equipment (20). Meanwhile, at this time, the ICS module 190 receives power and supplies power to external semiconductor measuring equipment or other additional equipment.

The tower lamp signal output port may communicate with the serial communication method, and in this case, SECS (SEMI Equipment Communications Standard) protocol may be preferably used.

The ICS module 190 transmits the semiconductor measuring equipment 20 to the tower lamp signal output port when an error occurs and receives it through the communication means 191.

The ICS control means 182 reads the tower lamp signal input from the semiconductor measuring equipment 20 in this way and determines whether an error has occurred.

If it is determined that an error has occurred, the ICS control means 182 notifies the remote computer 10 via the communication means 191.

As a result, the remote computer 10 indicates that an error has occurred in the semiconductor measuring equipment 20 as illustrated in FIG. 5 on the monitor screen.

On the other hand, the ICS control means 182 further reads the tower lamp signal to determine the type of error in the occurrence of the error of the semiconductor measuring equipment 20, and generates information on the time of error occurrence, the error occurrence time and error type for each equipment You can create a history that contains information.

That is, it generates information on which error occurred in which equipment 20 and when provided to the remote computer 10, the remote computer 10 screen as shown by way of example in the lower left of FIG. The state of the semiconductor measuring equipment 20 may be displayed on the screen as time passes.

In this case, the error occurrence may be overlaid and displayed on the screen of the semiconductor measuring device and an operation image of the semiconductor measuring device as illustrated in the right side of FIG. 5.

To this end, the ICS control means 182 reads the tower lamp signal to determine the type of error when the error occurs in the semiconductor measuring equipment 20, by using this to determine the portion of the error in the semiconductor measuring equipment 20.

In this case, the DVR module 160 is a high-definition camera (HD camera) that photographed the error occurrence portion of the semiconductor measuring equipment (20) in providing real-time images to the remote computer 10 through the plurality of cameras (161, 162) An error occurrence may be overlaid and displayed on the image photographed by 180).

On the other hand, the ICS control means 182 may read the tower lamp signal and provide it to the DVR module 160 when an error occurs in the semiconductor measuring equipment 20.

In this case, the DVR module 160 may overlay and display an error occurrence in the video when the video is recorded.

Furthermore, the DVR module 160 stores the information at the time of error when storing the video, so if the operator wants to play the video at the time of the error using the remote computer 10, the user manually turns the bookmark function without searching. You can easily play the video before and after the error occurred as if using.

On the other hand, as shown in Figure 4, it can be seen that the outlet port is exposed, the ICS module 190 is further provided with such an outlet port. The ICS module 190 receives power and provides power to other equipment connected through the outlet port. That is, power can be supplied by plugging an outlet of an external semiconductor measuring device or other additional equipment into the port.

The ICS module 190 may turn on or off the outlet port according to the control of the remote computer 10 connected through the network.

While the present invention has been described with reference to the accompanying drawings and embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. . Accordingly, the scope of the present invention should be determined only by the technical idea of the appended claims, and is not limited to the above embodiments.

The present invention can be applied to a technique for remotely monitoring a semiconductor process and inspection equipment.

10: remote computer
20: semiconductor measuring equipment
100: remote control device for semiconductor measuring equipment using joystick
110: IP controller
120: KVM Module
121: input device connection means
122: video connection means
123 KVM control means
130: video distributor
140: scaling module
150: signal converter module
160: DVR Module
170: joystick signal processing module
180: HD camera
190: ICS module
191: means of communication
192: ICS control means

Claims (8)

The KVM module (so that the remote computer 10, which is remotely connected through the network, can access one or more of the KVM module 120, the DVR module 160, the joystick signal processing module 170, or the ICS module 190). 120, an IP controller 110 for controlling an ip configuration of the DVR module 160, the joystick signal processing module 170, or the ICS module 190;
A KVM module 120 connected to a keyboard, a mouse, and a monitor input / output terminal of the semiconductor measuring device 20;
An image divider (130) for distributing a display signal output from the semiconductor measuring equipment (20) from the KVM module (120) and providing it to a scaling module;
A scaling module 140 for converting an analog display signal input from the image divider 130 into an HD class digital signal and providing the converted signal to a signal converter module;
A signal converter module 150 for converting an image received from the scaling module 140 into an HD-SDI image and applying it to the DVR module;
DVR module 160 for storing the HD-SDI image provided from the signal converter module 150;
A joystick signal processing module 170 which converts the joystick coordinate values from the remote computer 10 connected from the remote place into the x and y axis control signals of the stage and outputs them to the semiconductor measuring device 20;
And one or more HD cameras 180 installed to face the semiconductor measuring equipment and outputting the captured image to the DVR module.
The DVR module 160 further stores the image photographed by the HD camera 180 and provides a pre-stored image at the request of a remote computer 10 connected from a remote location, or from the HD camera 180. Remote control device for semiconductor measurement equipment using a joystick, characterized in that for transmitting the image in real time. The method of claim 1,
The joystick signal processing module 170 receives a joystick coordinate value from a remote computer 10 connected from the remote place, and transmits a mode change signal to the semiconductor measuring device 20 to switch to a manual operation mode of a stage. Remote control device of the semiconductor measuring equipment using the joystick, characterized in that after applying, converting the output signal to the x and y-axis of the stage. The method of claim 2,
As the x and y axis control signals of the stage are applied to the semiconductor measuring equipment 20 by the joystick signal processing module 170, when the semiconductor measuring equipment 20 controls the stage according to the applied control signal,
The signal converter module 150 is further provided with a stage operation image displayed on the TDI monitor of the semiconductor measuring equipment 20 to convert the HD-SDI image to the DVR module, characterized in that applied to the DVR module Remote control device. The method of claim 1,
Communication means (191) connected to the tower lamp signal output port of the semiconductor measuring device (20); And an ICS control unit 192 which reads the tower lamp signal input from the semiconductor measuring equipment and provides the same to a remote computer 10 when the tower lamp signal corresponds to a predetermined value. But
The ICS control means 192 reads the tower lamp signal to determine the type of error when an error occurs in the semiconductor measuring equipment, generates error time information, and generates a history including error time and error type information for each device. Remote control device for semiconductor measurement equipment using a joystick characterized in that the generation. The method of claim 4, wherein
The ICS control means 192 reads the tower lamp signal to determine whether an error occurs in the semiconductor measuring equipment 20,
The DVR module 160 is a remote control device for semiconductor measurement equipment using a joystick, characterized in that by overlaying the error occurs in the video when the video recording as the error occurs. The method of claim 5, wherein
The DVR module 160 is a remote control device for semiconductor measurement equipment using a joystick, characterized in that to store the error occurrence time information when recording the video as an accompanying information of the video. The method of claim 4, wherein
The ICS control means 192 reads the tower lamp signal to determine the type of error when an error occurs in the semiconductor measuring equipment 20, by using this to determine the portion of the error in the semiconductor measuring equipment 20,
The DVR module 160 identifies the HD camera 180 that photographs the portion where the error occurs in providing the images captured by the plurality of HD cameras 180 to the remote computer 10 in real time. 180) a remote control device for semiconductor measuring equipment using a joystick, characterized in that the display of the error occurs in the image captured by the overlay. The method of claim 1,
The KVM module 120 includes an input device connecting unit 121 connected to an input device connector of the semiconductor measuring device 20; An image connecting means 122 connected to a display connector of the semiconductor measuring device 20 and receiving a display signal from the semiconductor measuring device 20; And KVM control means 123 for transmitting the input device signal from the remote computer 10 connected from the remote site to the semiconductor measuring equipment 20 through the input device connection unit 121. Remote control device for semiconductor measurement equipment using a joystick characterized in that.

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