KR20120117287A - Lighting device for monitoring tester - Google Patents

Lighting device for monitoring tester Download PDF

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Publication number
KR20120117287A
KR20120117287A KR1020110034953A KR20110034953A KR20120117287A KR 20120117287 A KR20120117287 A KR 20120117287A KR 1020110034953 A KR1020110034953 A KR 1020110034953A KR 20110034953 A KR20110034953 A KR 20110034953A KR 20120117287 A KR20120117287 A KR 20120117287A
Authority
KR
South Korea
Prior art keywords
light
lighting
lighting member
inspection equipment
inspection
Prior art date
Application number
KR1020110034953A
Other languages
Korean (ko)
Inventor
정기태
Original Assignee
에이비씨배터리 (주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에이비씨배터리 (주) filed Critical 에이비씨배터리 (주)
Priority to KR1020110034953A priority Critical patent/KR20120117287A/en
Publication of KR20120117287A publication Critical patent/KR20120117287A/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V14/00—Controlling the distribution of the light emitted by adjustment of elements
    • F21V14/04—Controlling the distribution of the light emitted by adjustment of elements by movement of reflectors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/04—Optical design
    • F21V7/043—Optical design with cylindrical surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2105/00—Planar light sources
    • F21Y2105/10—Planar light sources comprising a two-dimensional array of point-like light-generating elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S362/00—Illumination
    • Y10S362/80—Light emitting diode

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Led Device Packages (AREA)
  • Planar Illumination Modules (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

In the present invention is applied to the inspection equipment for inspecting the presence of defects, such as semiconductors and various components that are installed in the semiconductor production line, etc., by allowing the light generated from the LED (Light Emitting Diode) element to be projected and reflected through the reflector Even if the LED element is used for a long time, the uniformity of light between each LED element can be ensured, the illuminance suitable for the object to be inspected can be obtained, and the object to be inspected can be obtained even at a relatively low amount of light. Compared to using the light directly by the light emitter alone, it is possible to take a picture while reducing the extinction of light and to obtain sufficient light required for inspection, and to use a relatively small number of LED elements as desired. Even if the desired amount of light can be obtained to reduce the heat generated from the LED element The lock a new inspection area cost light fixtures are disclosed.
Lighting equipment for inspection equipment according to the present invention is applied to inspection equipment for inspecting the presence or absence of defects of various components such as semiconductors and automobile parts, lighting for inspection equipment having a lighting member that emits light upon application of current An apparatus, comprising: a printed circuit board electrically connected to an external power source; A plurality of LED elements mounted side by side at a predetermined interval on one surface of the printed circuit board and emitting light according to an application of a current; In front of the lighting member is the upper portion is rotated step by step at the top of the lighting member in a state of adjusting the angle upward or downward in accordance with the rotation operation of the control lever to transmit and reflect the light generated from the LED element on the lighting member It further comprises a reflector.

Description

Lighting equipment for inspection equipment {LIGHTING DEVICE FOR MONITORING TESTER}

The present invention relates to a lighting apparatus for inspection equipment, and more particularly, is applied to inspection equipment for inspecting the presence of defects such as semiconductors and various components that are installed in semiconductor production lines and the like, LED (Light Emitting) By the light emitted from the element is projected and reflected through the reflector, it is possible to secure the uniformity of light between each LED element even if the LED element is used as a light source for a long time. It is possible to obtain an object to be inspected even with a relatively small amount of light, while reducing the extinction of light and using a sufficient amount of light required for inspection as compared to using the light directly with the light emitter alone. To obtain the desired amount of light even with a relatively small number of LED elements. The present invention relates to an inspection area at a cost of lighting fixtures to reduce the heat generated from the LED element.

In general, an inspection apparatus for inspecting a defect of a manufactured product is applied in a semiconductor manufacturing process or a part manufacturing process applied to various industrial fields.

At present, the lighting device for inspection equipment, which is widely used in the inspection of components such as semiconductors, uses a single fluorescent lamp as a light source to give a uniform enough light intensity to the lighting area, and a large number of relatively small devices. Two methods have been applied to ensure uniform illuminance by diffusing light energy using the LED element as a light source.

In the conventional lighting equipment for inspection equipment to which a single light source, such as the first fluorescent lamp is applied, it is possible to inspect the subject of the wavelength range using a single light of a general or special wavelength band, in which case the light generated from the light source is a single bright Since it is irradiated with light or a single wavelength, there is a problem that the uniformity of light deteriorates when used for a long time.

In addition, in the lighting device for a conventional inspection equipment that the second plurality of LED elements are applied as a light source, as the plurality of LED elements are applied, the uniformity of light between the LED elements varies according to the change in the resistance value of each LED element. Therefore, there is a serious problem that the inspection equipment may be misidentified due to irregular light intensity when the camera finds a defective item.

In addition, the conventional lighting equipment for inspection equipment is applied to the plurality of LED elements as a light source there is a problem that it is economically disadvantageous because the cooling system must be provided at a separate cost due to the heat generated by the long time use.

The present invention is to solve such a conventional problem, the object of the present invention is applied to the inspection equipment for inspecting the presence of defects, such as semiconductors and various components are installed in the semiconductor production line, etc., LED (Light Emitting Diode) The light emitted from the device is projected and reflected through the reflector to provide a new luminaire for the inspection equipment to ensure the uniformity of light between each LED element even if the LED element using a light source for a long time.

Another object of the present invention is to provide a new luminaire for inspection equipment that allows to obtain a light intensity suitable for the inspection object, and to photograph the inspection object even with a relatively small amount of light.

Another object of the present invention is to reduce the extinction of light and to obtain a sufficient amount of light required for inspection, as compared to using the direct light of the light emitter alone, and to provide a relatively small number of desired LED elements It is to provide a new luminaire for inspection equipment that can reduce the heat generated from the LED element by obtaining the desired amount of light even if used.

In order to achieve the above object, the lighting equipment for inspection equipment according to the present invention is applied to inspection equipment for inspecting the presence or absence of defects of various components such as semiconductors and automobile parts, and generates light while emitting light upon application of current. A lighting apparatus for inspection equipment having a lighting member, the lighting member comprising: a printed circuit board electrically connected to an external power source; A plurality of LED elements mounted side by side at a predetermined interval on one surface of the printed circuit board and emitting light according to an application of a current; In front of the lighting member is the upper portion is rotated step by step at the top of the lighting member in a state of adjusting the angle upward or downward in accordance with the rotation operation of the control lever to transmit and reflect the light generated from the LED element on the lighting member It further comprises a reflector.

In the present invention, the reflecting plate has a feature of being formed in a curved shape inwardly facing the flat surface or the lighting member.

According to the present invention, since the light generated from the LED (Light Emitting Diode) element is reflected through the reflecting plate installed on the front surface of the lighting member, evenly using the LED element for a long time, the uniformity of light between each LED element This can be secured, and the illuminance suitable for the inspection object can be obtained.

In addition, according to the present invention, the inspection object can be photographed at a relatively small amount of light, and a desired amount of light can be obtained even by using a relatively small number of LED elements, thereby reducing the heat generated from the LED element. There is an effect.

In addition, the present invention can reduce the extinction of light as compared to using the light directly by the light emitter alone, and the light can be obtained with a sufficient amount of light required for inspection.

1 is a perspective view showing an example in which the lighting device for inspection equipment according to the present invention is applied.
2 is a plan view showing a lighting apparatus for inspection equipment according to the present invention.
3 is a cross-sectional view showing a lighting device for inspection equipment according to the present invention.
4 is a cross-sectional view showing an operating state of the lighting device for inspection equipment according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 to 4, the lighting equipment 10 for the inspection equipment according to the present invention is installed in the transfer line 22 of the product, such as semiconductor defects of various components 24, such as semiconductor elements that are transferred along the transfer line It is applied to check the presence or absence.

In the lighting device for inspection equipment 10 according to the present invention as described above is provided with a lighting member 12 for generating light while emitting light according to the application of current.

The lighting member 12 is configured such that a plurality of LED elements 16 emitting light in response to the application of a current on one surface of the printed circuit board 14 electrically connected to an external power source are mounted side by side at a predetermined interval. do.

In the present invention, the front of the illumination member 12 is configured to be provided with a separate reflector plate 20 for transmitting and reflecting the light generated from the LED element 16 toward the test object 24.

The reflector 20 is configured to be angled upward or downward in accordance with the rotation operation of the control lever 18 in a state in which the upper part is pivotally coupled to the lower end or the upper end of the lighting member 12.

The reflecting plate 20 is formed in the form of a curved surface plate or a flat plate surface inwardly facing the lighting member 12, in the embodiment of the present invention will be described by illustrating a reflecting plate 20 in the form of a curved plate. .

The operation of the present invention made as described above is as follows.

1 to 4, the lighting equipment for inspection equipment 10 according to the present invention is installed on the lower side of the product transfer line 22, such as a semiconductor production line or an automotive parts factory or a parts factory of home appliances. The defects of the inspection object 24, such as the various components to be transported along the inspection.

In this process, as shown in Figure 4, the moment the test object 24 placed on the transfer line 22 passes through the upper portion of the lighting member 12, the LED element 16 constituting the lighting member 12 Lights up while lights up.

As such, when the LED material 16 constituting the lighting member 12 is turned on, the emitted light is reflected by the reflecting plate 20 provided at the front of the lighting member 12 and placed on the upper transfer line 22. The inspection object 24 is irradiated.

At this time, since the light irradiated from the LED element 16 is reflected while being reflected by the reflector 20, the uniformity of the light irradiated to the inspection object 24 is greatly improved.

In this state, a separate camera (not shown) photographs the inspection object 24, and the image of the photographed inspection object 24 is determined to have a defect through separate monitoring.

 On the other hand, if you want to adjust the irradiation angle of the light from the LED element 16 toward the inspection object 24 by the difference in size, shape or inclination of the inspection object 24, the adjustment is installed at the bottom of the reflecting plate 20 When the lever 18 is rotated to the left or the right, the reflector 20 is able to secure an appropriate illuminance to the inspection object 24 because the angle of irradiation of the light is adjusted as the angle increases or contracts.

10: lighting fixture 12: lighting member
14: printed circuit board 16: LED element
18: adjustment lever 20: reflector
22: transfer line 24: inspection object.

Claims (2)

Applied to the inspection equipment for inspecting the defects of various components such as semiconductors and automobile parts, in the lighting equipment 10 for the inspection equipment having a lighting member 12 for generating light while emitting light according to the application of current ,
The lighting member 12 includes a printed circuit board 14 electrically connected to an external power source; A plurality of LED elements 16 mounted side by side at a predetermined interval on one surface of the printed circuit board 14 and emitting light according to an application of a current;
In front of the lighting member 12 in the state that the upper portion is pivotally coupled to the upper end of the lighting member in accordance with the rotation operation of the control lever 18, the angle of the upper or lower LED element 16 on the lighting member 12 Lighting equipment for inspection equipment, characterized in that it further comprises a reflecting plate 20 for transmitting and reflecting light generated from. The method of claim 1,
The reflecting plate 20 is a lighting device for the inspection equipment, characterized in that the surface facing the flat surface or the lighting member 12 made in the form of curved curved surface inward.
KR1020110034953A 2011-04-15 2011-04-15 Lighting device for monitoring tester KR20120117287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110034953A KR20120117287A (en) 2011-04-15 2011-04-15 Lighting device for monitoring tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110034953A KR20120117287A (en) 2011-04-15 2011-04-15 Lighting device for monitoring tester

Publications (1)

Publication Number Publication Date
KR20120117287A true KR20120117287A (en) 2012-10-24

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ID=47285268

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110034953A KR20120117287A (en) 2011-04-15 2011-04-15 Lighting device for monitoring tester

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KR (1) KR20120117287A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102421168B1 (en) 2022-04-12 2022-07-14 주식회사 엔비컨스 Lighting apparatus for inspecting reflective surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102421168B1 (en) 2022-04-12 2022-07-14 주식회사 엔비컨스 Lighting apparatus for inspecting reflective surface
WO2023200158A1 (en) * 2022-04-12 2023-10-19 주식회사 엔비컨스 Reflection inspection lighting apparatus

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E601 Decision to refuse application