KR20120068677A - Sliding part and method of producing the sliding part - Google Patents

Abstract

PURPOSE: A sliding member and a method for manufacturing thereof are provided to effectively prevent a resin film from being taken off because an uneven portion on the surface of a base substrate strongly supports the resin film engaged with the uneven portion. CONSTITUTION: A sliding member comprises a base substrate(70) and a resin film. The base substrate has open pores. The resin film is composed of fusible resin, and has a coating part(72) and an anchor part(74). The coating part coats at least part of the surface of a base substrate. The anchor part is connected to the coating part and is charged in the pore holes.

Description

SLIDING PART AND METHOD OF PRODUCING THE SLIDING PART

The present invention relates to a sliding member and a method for manufacturing the sliding member, and more particularly, to a sliding member formed on the surface of the resin film for preventing dust generation, corrosion, and the like, and a manufacturing method thereof.

BACKGROUND OF THE INVENTION [0002] As a mechanical seal for sealing a hermetically sealed fluid such as a semiconductor manufacturing facility, there is a non-contact sealing device in which a fluid is introduced into a sliding surface and the sealing rings are brought into a non-contact state (see Patent Document 1 and the like). The non-contact sealing apparatus according to the prior art makes the sealing ring half by the pressure of the fluid introduced into the sliding surface, thereby preventing the wear of the sealing ring and the generation of dust due to wear.

However, even in a non-contact sealing device, wear of a sealing ring may occur in the case where supply of the fluid to be introduced to the sliding surface is stopped, or when the rotation speed of the rotating shaft is low. Therefore, even in a condition where the fluid film does not exist between the sliding surfaces, as a technique for preventing the wear of the sealing ring and dust generation due to wear, a technique for forming a film having self-lubrication on the surface of the substrate is disclosed. It is known (refer patent document 2 etc.).

Japanese Patent Laid-Open No. 2006-22834 Japanese Patent Application Laid-Open No. 2001-26792

However, the film of the sliding material according to the prior art has a problem in that adhesion to the substrate is insufficient and peels off easily from the substrate. In addition, there is an attempt to use a tetrafluoroethylene resin (PTFE) coating having excellent corrosion resistance to chemical liquids such as concentrated sulfuric acid as a coating of the sliding material, but such a coating is inferior in adhesion with the substrate. The inventors have attempted to form a base layer using a resin having better adhesion to the base material than a fluorine resin and to form a fluorine resin film on the base layer, but the adhesion of the film was still insufficient.

In the film of the sliding material according to the prior art, pinholes may be formed at the time of film formation, and there is a problem that the base layer and the base material are corroded by the chemical liquid infiltrated from the pinholes, and the film is peeled off. In addition, the sliding material according to the prior art has a problem that the film is easily peeled off by physical force when the film is thickened to prevent pinholes.

This invention is made | formed in view of such a subject, The objective is to provide the sliding material which has the resin film which is excellent in adhesiveness with a base material, and can prevent the generation | occurrence | production of the base material dust suitably, and its manufacturing method.

In order to solve the above problems, the sliding member according to the present invention has a substrate having open pores and a resin coating made of a molten resin, the resin coating covers at least a portion of the surface of the substrate And an anchor portion connected to the coating portion and filled in the open pores.

Since the sliding member according to the present invention has not only a coating portion covering the surface of the substrate but also an anchor portion filled in the open pores of the substrate, the adhesion between the resin coating and the substrate is high, and the resin coating does not peel off. Since the sliding member according to the present invention is formed of a molten resin, it is difficult to form pinholes in the resin coating, and the substrate can be reliably protected, thereby preventing peeling of the coating due to corrosion of the substrate. . In addition, the sliding material according to the present invention does not peel off from the substrate, and since it covers the substrate reliably, it is possible to appropriately prevent the substrate from abrasion and generation of dust.

For example, the base may be carbon. Carbon is a porous material containing many pores, and has pores of a complicated shape. Therefore, the sliding material which concerns on this invention can improve the effect which fixes a resin film by an anchor part by making a base material into carbon.

For example, the carbon may be hard carbon. By using the substrate of hard carbon, the unevenness of the surface of the base material firmly supports the resin film engaged with the unevenness, so that the peeling of the resin film can be prevented more effectively.

For example, the sliding material which concerns on this invention may have a sliding surface in which the said resin film is not formed, and the non-sliding surface in which the said resin film is formed as surfaces other than the said sliding surface.

Such a sliding member can prevent wear of the sliding surface even in a situation where lubrication by a fluid is difficult to be obtained by exposing carbon having excellent self-lubrication without forming a resin film on the sliding surface. Further, by forming a resin film on the non-sliding surface, it is possible to prevent dust generation from the base material and adhesion of dust to the carbon, and to protect the base material from chemical liquids and the like.

For example, the open pores filled with the same molten resin as the resin film may be formed on the sliding surface on which the resin film is not formed. Since the open pores present on the sliding surface are filled with the molten resin, the sliding material can prevent chemicals and the like from penetrating into the base material through the open pores of the sliding surface, and also prevent dust generation from inside the base material. .

For example, the sliding material which concerns on this invention may be 5000 ppm or less of impurity content of the said base material. By setting the impurity content of the substrate to 5000 ppm, the corrosion resistance of the substrate itself is improved, so that peeling of the coating due to corrosion of the substrate can be prevented even when the substrate is aerated in a chemical solution.

For example, the sliding material which concerns on this invention may be 30 micrometers or less in thickness of the said coating | coated part. Since the sliding material according to the present invention is formed of a molten resin in the resin film, it is difficult to be formed in the pinhole in the resin film, and it is possible to protect the substrate from the chemical liquid even if the coating portion is made thin. Therefore, by making the thickness of the coating part less than 30 micrometers, such a sliding material becomes difficult to collapse a resin film by a physical force, and can peel off the film effectively.

The meltable resin may be a fluorine coefficient. Since the fluorine resin is excellent in corrosion resistance to chemical liquids such as concentrated sulfuric acid, fluorine, chlorine gas and cancellation, such a sliding member can more effectively protect the substrate from these chemical liquids.

The method for manufacturing a sliding material according to the present invention includes the steps of preparing a substrate having open pores, applying a coating material containing a meltable resin to a surface of the substrate, and the substrate coated with the molten resin. It characterized by having a step of heat treatment at a temperature equal to or higher than the melting point of.

In the method for producing a sliding material according to the present invention, when the coating material is applied by applying a coating material containing a molten resin to the base material, the coating material can be infiltrated into the open pores of the base material. The molten resin contained in the coating is melted by heat-treating the substrate to which the coating is applied at a temperature equal to or higher than the melting point of the molten resin, thereby forming a resin coating having the anchor portion and the coating portion as described above.

1 is a cross-sectional view of a sealing apparatus including a sliding material according to an embodiment of the present invention.
2 is a flowchart illustrating a method of manufacturing a sliding material according to an embodiment of the present invention.
3 is an electron microscope photograph of a cross section of a sliding material according to an embodiment of the present invention.

<Sealing Device> Fig. 1 is a cross-sectional view of a sealing device 10 including a first sealing ring 12 and a second sealing ring 14, which are sliding materials according to an embodiment of the present invention. The sealing device 10 is a non-contact sealing device that sends the supply fluid between the sliding surfaces by the supply fluid pressure P3 and makes the first sealing ring 12 and the second sealing ring 14 non-contact. As a sealing apparatus using the sliding material which concerns on it, it is not limited to a non-contact sealing apparatus.

The sealing device 10 is attached between the housing 60 which punched the hole, and the rotating shaft 50 inserted in the hole. The holding portion 40 of the cross-sectional L shape is attached to the hole on the end of the housing through two O-rings 65. The second sealing ring 14 is movably attached to the main surface of the inner circumferential hole of the holding part 40 via two O-rings 32. The second sealing ring 14 is locked by the snap ring 67 so as not to escape from the inner circumferential hole.

Further, a plurality of holes are formed in the side circumferential surface of the inner circumferential hole of the holding portion 40 along the circumferential direction, and a spring 41 is disposed in each hole. The spring 41 elastically presses the second sealing ring 14 toward the first sealing ring 12. Although not shown, the holding portion 40 and the second sealing ring 14 are stopped by pins.

The fixed part 21 is fixedly attached to the rotating shaft 50 via the O-ring 33. As shown in FIG. The O-ring 31 is provided in the side peripheral surface of the edge part of this fixing part 21, and the 1st sealing ring 12 is attached to the fixing part 21 via the O-ring 31. As shown in FIG. The first sealing ring 12 is fitted with both sides in the axial direction by the first pressing portion 22 and the fixing portion 21, and the movement in the axial direction is restricted. In addition, the fixing part 21 and the first pressing part 22 are fixed to the rotating shaft 50 via the second pressing part 23. The second pressing portion 23 is screwed with the rotary shaft 50 to each other, tightening the fixing portion 21 and the first pressing portion 22 to be fixed.

The communication path 61 communicating with each other is formed in the housing 60 and the holding part 40. The communication passage 61 communicates with the fluid supply passage 20 of the second sealing ring 14. The fluid supply passage 20 of the second sealing ring 14 passes through the interior of the second sealing ring 14, and the first sliding surface 13 and the second sliding surface of the second sealing ring 14 of the first sealing ring 14. It communicates between the relative sliding surfaces between (15). A pipe is connected to the communication path 61 so that the supply fluid pressure P3 can be supplied from the fluid supply source (not shown).

A sealed fluid exists on the high pressure side P1 in the cabin, and the inside of the outside of the cabin becomes the low pressure side P2 than the sealing device 10. The outside of this outside may be low pressure like a vacuum. The pressure of the supply fluid pressure P3 is kept equal to or higher than the pressure on the high pressure side P1.

In the sealing device 10 configured as described above, the supply fluid supplied from the fluid supply source to the fluid supply passage 20 passes through the fluid supply passage 20 to form the first sliding surface 13 and the second sliding surface 15. Flow between the relative sliding surfaces. The first sliding surface 13 of the first sealing ring 12 traverses the fluid guide groove 16 formed along the main direction and the fluid guide groove 16 in the radial direction and has a dynamic pressure between the relative sliding surfaces ( A dynamic pressure generating groove 18 for generating movement is formed. The supply fluid is supplied to the front surface between the relative sliding surfaces by the fluid guide groove 16 and the dynamic pressure generating groove 18 to make the non-contacting state between the relative sliding surfaces.

In addition, an introduction passage (not shown) is formed in the second sliding surface 15 to introduce a sealed fluid on the high pressure side P1 into the dynamic pressure generating groove 18. Even when the supply of the supply fluid pressure P3 is unexpectedly stopped, the sealed fluid on the high pressure side P1 is automatically introduced between the relative sliding surfaces through the introduction passage. Therefore, even if the supply of the supply fluid pressure P3 is stopped, the sealing device 10 is in a non-contact state between the relative sliding surface by the action of the introduction flow path and the dynamic pressure generating groove 18 for introducing the sealed fluid between the sliding surfaces. Can be maintained.

<Sliding material> Hereinafter, the material surface of the sealing rings 12 and 14 is demonstrated. The sealing rings 12 and 14 have a base material which has open pores, and the resin film which consists of molten resin.

<Base material> The base material has an external shape almost the same as the external shape of the sealing rings 12 and 14 whole. The substrate also has open pores that are pores that open on the surface of the substrate. The open pores may be formed by making a material constituting the substrate into a porous material such as carbon, or may be formed by mechanically or chemically processing a non-porous material such as a metal material.

Examples of the material for the substrate include carbon, silicon carbide, alumina, silicon nitride, zirconia, sialon, chromium oxide, chromium carbide, various cermets, metals, and the like, but carbon is preferable. This is because carbon is originally a porous material, and thus it can be a substrate having complex pores in a three-dimensional network shape by simply sintering the starting material. When the base material is made of a porous material such as carbon, the porosity of the base material (JCAS-11) is about 1 to 25% and has a predetermined amount or more of open pores, and a bending strength (about 60 MPa or more) of a predetermined value or more. Although it is preferable from a viewpoint of providing, it is not specifically limited.

Moreover, when making a base material carbon, it is more preferable that carbon is a hard carbon. Shore hardness HsD of a preferred hard carbon is 80 or more. Since the base material is a hard carbon, the unevenness on the surface of the base material firmly supports the resin film that is engaged with the unevenness, so that the sealing rings 12 and 14 can more effectively prevent the resin film from peeling off.

When the substrate is made of carbon, the carbon component may be either graphite or carbonaceous, but is preferably carbonaceous from the viewpoint of preventing peeling of the resin coating, and the preferred graphitization degree of carbon constituting the substrate is 50. Less than or equal to Since graphite carbon tends to be hydrophobic, carbon of a base material becomes carbonaceous, and it can maintain the intake of the liquid in coating of coating material easily, and can introduce | transduce paint into an open pore easily. Therefore, when the base material is made of carbonaceous carbon, it is possible to form a resin film having more anchor portions, and a sliding material having a resin film that is more difficult to peel off can be formed. Moreover, by making carbon of a base material into a carbonaceous substance, the chemical | medical solution reacts with the graphite component of a base material, and can produce the interlayer compound peculiar to graphite, and can suppress the phenomenon which causes peeling of a resin film.

In addition, it is preferable to make content of the impurity contained in a base material into 5000 ppm or less from a viewpoint of improving corrosion resistance. Among the impurities contained in the base material, iron tends to promote corrosion of the base material, and therefore the Fe component contained in the base material is particularly preferably 1000 ppm or less.

<Resin film> FIG. 3 is an electron micrograph of the cross section of the sealing rings 12 and 14 which are the sliding materials which concern on one Embodiment of this invention. As shown in Fig. 3, the resin film has a covering portion 72 covering at least a part of the surface of the substrate 70, and an anchor portion 74 filled in the open pores. The anchor portion 74 is connected to the coating portion 72, and the coating portion 72 is anchored to the surface of the substrate 70, thereby exhibiting an effect of increasing the adhesion of the resin film to the substrate 70.

The resin coating may be formed on the entirety of the sealing rings 12 and 14, and when the base material 70 is carbon, the resin coating is not formed on the sliding surfaces 13 and 15 (see Fig. 1). Instead, the resin film can be formed on the non-sliding surface, which is a surface other than the sliding surfaces 13 and 15. Since the supply fluid is supplied to the sliding surfaces 13 and 15 through the dynamic pressure generating groove 18 and the like, it is difficult to contact the chemical liquid in the sealed fluid. Therefore, wear of the sliding surface can be prevented even when the sliding surfaces 13 and 15 are in contact with each other, such as when the rotational speed of the rotating shaft 50 is lowered by exposing carbon having excellent self-lubrication.

The resin film is made of a molten resin that is melted by heating. Examples of the meltable resin used for the resin film include fluorine resins. In particular, in order to obtain a sliding material having excellent corrosion resistance against chemical liquids such as concentrated sulfuric acid, fluorine, chlorine gas, and cancellation, it is preferable that the molten resin constituting the resin film is a fluorine resin. The molten resin constituting the resin coating is tetrafluoroethylene perfluoroalkyl vinyl ether copolymer (PFA), trifluoroethylene hexafluoropropylene copolymer (FEP), tetrafluoroethylene / ethylene among fluorine resins. The copolymer (ETFE) is particularly preferred because it easily melts during heat treatment and can form a resin film with less defects.

By forming the resin film from the meltable resin, it is possible to form the resin film by melting the meltable resin on the surface of the substrate as described later. The resin film thus formed has good adhesiveness with the base material and few defects such as pinholes. Although the thickness of the coating | coated part 72 shown in FIG. 3 is not specifically limited, It is preferable to set it as 30 micrometers or less. By setting the thickness of the coating part 72 to 30 micrometers or less, it can prevent that a resin film collapses by a mechanical force, and can prevent that a resin film peels from a base material.

<Production of Sliding Material> FIG. 2 is a flowchart for explaining an example of a manufacturing method of the sealing rings 12 and 14 of the present invention. In step S01 shown in Fig. 2, a substrate is prepared. A base material is created by the method according to the material which comprises molding, baking, sintering, and machining.

When the substrate is made of carbon, the substrate is produced by molding the raw material and sintering it. The raw material may be a mixture of carbonaceous raw material (coke), artificial graphite or natural graphite with a binder (coal tar pitch, etc.), or may be used mesophase, bulk mesophase, etc. having self-sintering properties.

It is preferable that the graphite component contained in the raw material is suppressed from the viewpoint of satisfactorily maintaining the paint intake when the coating material is coated using the base material after sintering as carbonaceous carbon. In addition, from the viewpoint of improving the corrosion resistance of the substrate, it is preferable to use a high purity carbon raw material for the raw material of the substrate. Although the sintering temperature which sinters a raw material is not specifically limited, It is preferable to set it as about 1000 degreeC-2200 degreeC from a viewpoint of preventing the graphitization of a raw material component.

In step S02 shown in FIG. 2, the surface treatment of a base material is performed. When the base material is not a porous material such as carbon, in step S02, surface treatment such as sand blast can be performed to form open pores in the base material. In the case where the substrate is a porous material such as carbon, the surface of the substrate can be polished or the like in Step S02 as necessary to adjust the roughness of the substrate surface.

In step S03 shown in FIG. 2, the base material just before apply | coating paint is heated. And in step S04, the coating material which consists of a dispersion liquid of meltable resin is apply | coated to the surface of the base material heated and the temperature rising. It is preferable that the temperature which heats a base material shall be 50 degreeC-100 degreeC. However, if the substrate is multi-porous or has good compatibility with the paint, there is no problem even at room temperature. The coating can be easily penetrated by irregularities formed on the surface of the substrate such as open pores of the substrate by applying the coating in a state in which the substrate is heated to such a temperature. In addition, by infiltrating the paint into the open pores of the substrate in the coating step (step S04), the resin film having the anchor portion can be appropriately formed in the heat treatment step (step S05) described later. In this embodiment, although coating is performed on the whole surface of a base material, you may perform only a part by masking the part which you do not want to apply.

In step S05 shown in Fig. 2, the substrate to which the paint is applied is heat-treated at a temperature slightly above the melting point or melting point of the molten resin contained in the coating, followed by cooling, and a resin coating having an anchor portion and a coating portion on the surface of the substrate. To form. By the heat treatment step (step S05), the molten resin contained in the coating is melted to form a resin film having good continuity and fewer defects on the surface of the substrate.

In the heat treatment step (step S05), the molten resin contained in the paint that has infiltrated the open pores of the substrate in the coating step (step S04) is also melted in the same manner as the resin contained in the paint present on the surface of the substrate, so that the molten resin is opened. The environment is easy to break into. Therefore, in the heat treatment step (step S05), at least the openings of the open pores are filled by the molten resin that has entered the open pores, and the melted resin (coated portion) present on the surface and the melted resin present in the open pores ( Connection with the anchor) is also secured.

In step S06 shown in Fig. 2, the sliding surface is wrapped to remove the coating portion of the resin film formed on the sliding surface. By lapping process (step S06), the carbon base material excellent in self-lubrication can be exposed to a sliding surface. In addition, since the anchor portion which is a part of the resin film formed in the heat treatment process (step S05) remains in the open hole of the wrapped sliding surface, the open hole filled with the same molten resin as the resin film covering the non-sliding surface is formed on the sliding surface after the lapping process. Formed. As a result, the sealing rings 12 and 14 may prevent chemical liquids from entering the substrate through the open pores present on the sliding surfaces 13 and 15, and also prevent dust from occurring inside the substrate. have.

Since the sealing rings 12 and 14 produced in this way have the resin film which covers the surface of a base material, it can prevent the generation | occurrence | production of the dust of a base material, and can also prevent that a dust adheres to a base material. Therefore, the sealing apparatus 10 which uses such a sealing ring is used suitably for the apparatus which does not like dust, such as a semiconductor manufacturing facility.

Moreover, since the sealing rings 12 and 14 have not only the coating | coating part which a resin film coat | covers the surface of a base material, but the anchor part filled in the opening of a base material, adhesiveness of a resin film and a base material is high, and a resin film does not peel off. Do not. In particular, the sealing rings 12 and 14 having the resin film made of fluorine resin such as PFA, FEP and ETFE have excellent corrosion resistance against concentrated sulfuric acid and the like.

According to the above-described manufacturing method, since the sealing rings 12 and 14 having high adhesion between the substrate and the resin can be manufactured, the sealing ring 12 exhibiting the effect of preventing dust, preventing adhesion of foreign matters and preventing corrosion (14) can be produced by a simple manufacturing method that does not require the formation of a primer layer.

[Example]
EMBODIMENT OF THE INVENTION Hereinafter, although this invention is demonstrated based on an Example, this invention is not limited to these Examples.

Example 1
In Example 1, after forming a sliding material according to the manufacturing process demonstrated in embodiment mentioned above, the sliding material was subjected to the corrosion test.

In Example 1, the base material was produced by using a calcination coke and a coar tar pitch as starting materials, and sintering it at 1500 degreeC (step S01 of FIG. 2). The shape of the base material was made into a disk of Ф41xL17mm. As a result of analyzing the physical properties of the substrate, the porosity (catchering method) was 20%, the amount of impurities (residue after combustion at 900 ° C) was 800 ppm, and the amount of Fe component (residue of X-rays) was about 200 ppm. (About 25% of the residue) and graphitization degree (Shakjin method) was 5%. The surface roughness of the substrate was ground so that the surface roughness Rz (JIS B0601-1994) was 12.5Z (step S02 in Fig. 2).

Next, the produced substrate was ultrasonically washed in pure water and then dried. Then, the substrate was heated to room temperature, and then the spray liquid (concentration 15%) of the molten resin was applied to the substrate (step S04 in Fig. 2), followed by heat treatment at 380 DEG C (step S05 in Fig. 2) to form a resin coating on the surface of the substrate. Formed. Table 1 shows the fabrication conditions and material analysis results of the sliding material according to Example 1. The substrate heating step (step S03) and lapping step (step S06) shown in FIG. 2 are not performed.

Base material Sintering Temperature
(℃) Material analysis result Resin film formation method Raw material1 Raw material 2 Raw material 3 Porosity
(%) Impurity Content
(ppm) Fe component (ppm) Graphitization degree
(%) Example 1 Calcined coke Coultar Pitch - 1500 20 800 200 5 Method 1 Example 2 Calcined coke Coultar
pitch - 2800 15 400 20 50 Method 1 Example 3 Calcined coke Coultar Pitch Artificial graphite 1500 18 700 100 50 Method 1 Example 4 bulk
Mesoface - - 2000 5 500 100 10 Method 1 ' Reference Example 1 Calcined coke Coultar Pitch Natural graphite 1200 12 70000 3500 30 Method 1 Reference Example 2 Calcined coke Coultar Pitch - 1500 20 800 200 5 Method 2

In Example 1, 9 types of samples (sliding material) which produced the same base material but differ in the thickness of the molten resin of a resin film and the coating layer of a resin film were produced. That is, sliding materials having a thickness of 5 μm, 10 μm, and 30 μm of coating portions were produced for three types of melt resins (PFA, FEP, and ETFE), respectively. And the thickness of the coating part was adjusted by repeating an application | coating process (step S04 of FIG. 2).

The corrosion test was performed to evaluate the adhesion strength of the resin film after immersion in nine types of sliding materials for 100 or 300 hours in 99% sulfuric acid. Tape pulling strength was measured in accordance with JIS K5400 (board wood test). The evaluation results are shown in Table 2.

Coating
material PFA FEP ETFE Coating
Thickness (μm) 5 10 30 5 10 30 5 10 30 evaluation
Hours (hrs.) 100 300 100 300 100 300 100 300 100 300 100 300 100 300 100 300 100 300 Example 1 ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ Example 2 ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ Example 3 ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ Example 4 ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ Reference Example 1 △ △ △ △ ○ △ △ △ △ △ ○ △ △ △ △ △ ○ △ Reference Example 2 △ △ △ △ ○ △ △ △ △ △ ○ △ △ △ △ △ ○ △ ○: There is peeling of the resin film △: There is peeling of the resin film

Example 2
In Example 2, the sliding material was formed like Example 1 except having changed the sintering temperature at the time of sintering a base material into 2800 degreeC, and the corrosion test of the sliding material similar to Example 1 was done.

The physical properties of the substrate according to Example 2 were analyzed. The porosity was 15%, the impurity amount was 400 ppm, the Fe component amount was about 20 ppm (about 5% of the residue), and the graphitization degree was 50%. Table 1 shows the fabrication conditions and material analysis results of the sliding material according to Example 2, and the results of the corrosion resistance test in Table 2.

Example 3
In Example 3, the sliding material was formed like Example 1 except having added artificial graphite to the base material, and the corrosion test of the sliding material similar to Example 1 was done.

The physical properties of the substrate according to Example 3 were analyzed. The porosity was 18%, the amount of impurities was 700 ppm, the amount of Fe was about 100 ppm (about 15% of the residue), and the degree of graphitization was 50%. Table 1 shows the production conditions and material analysis results of the sliding material according to Example 3, and the results of the corrosion resistance test are shown in Table 2.

[Example 4]
In Example 4, the bulk mesophase was used as the base material, and the sintering temperature was changed to 2000 ° C., and the base material was heated to 60 ° C. (step S03 was carried out) to apply the dispersion of the molten resin to the same as in Example 1. The sliding material was formed, and the corrosion test of the sliding material similar to Example 1 was done. The reason why the substrate was heated to 60 ° C. when the dispersion of the molten resin was applied was because the porosity of the substrate according to Example 4 was low, so that the paint easily penetrated into the pores of the substrate.

The physical properties of the substrate according to Example 4 were analyzed. The porosity was 5%, the impurity amount was 500 ppm, the Fe component amount was about 100 ppm (about 20% of the residue), and the graphitization degree was 10%. Table 1 shows the construction conditions and the material analysis results of the sliding material according to Example 4, and the results of the corrosion resistance test are shown in Table 2.

Reference Example 1
In Reference Example 1, a sliding material was formed in the same manner as in Example 1 except that natural graphite, which is a low-purity carbon material, was added to the base material, and the sintering temperature was changed to 1200 ° C. The test was done.

The physical properties of the substrate according to Reference Example 1 were analyzed. The porosity was 12%, the impurity amount was 70000 ppm (7%), the Fe component amount was about 3500 ppm (about 5% of the residue), and the graphitization degree was 30%. Table 1 shows the fabrication conditions and the material analysis results of the sliding material according to the reference example 1 and Table 2 shows the results of the corrosion resistance test.

Reference Example 2
In Reference Example 2, a sliding member was formed in the same manner as in Example 1 except that the resin film formation method was changed, and the same corrosion test as that in Example 1 was performed. The resin film forming method according to the reference example 2 was the same as that of Example 1 except adding the process of forming a primer layer on the surface of a base material after step S02 shown in FIG.

In Reference Example 2, after the surface treatment step (step S02) of the substrate was completed, the substrate was subjected to ultrasonic cleaning, and then, a primer layer was formed by applying a coating material for the primer layer containing P, Fr, and fluorine resin on the surface of the substrate. Thereafter, step S04 to step S05 shown in FIG. 2 were carried out as in Example 1 to form a film on the primer layer.

Comprehensive evaluation
As shown in Table 2, in Examples 1 to 4, peeling of the resin film was not observed in the measurement of the tape peeling strength after sulfuric acid immersion. On the other hand, in the reference example 1, peeling of a coating resin was seen in the measurement of the tape peeling strength after sulfuric acid immersion, and it turned out that the adhesiveness of the resin film with respect to a base material falls. In addition, in Reference Example 2, the peeling of the resin film was observed for the samples having the thickness of the coating layer of 5 μm and 10 μm, and it was found that the adhesion of the resin film to the substrate was reduced. There was no peeling of the coating film about the evaluation time of 100 hours with respect to the sample whose thickness of the coating film in Reference Examples 1 and 2 was 30 micrometers, but it peeled in Reference Examples 1 and 2 when the evaluation time became 300 hours.

Comparing the sample according to Examples 1 to 4 with the sample according to Reference Example 1, it can be seen that the impurity content and the Fe content included in the substrate are significantly different as shown in Table 1. In the reference example 1, since the impurity content and Fe content of a base material are many, it is thought that a base material itself is easy to corrode by concentrated sulfuric acid. Therefore, in Reference Example 1, it is thought that the corrosion of the substrate itself has progressed due to the sulfuric acid immersion, and the adhesion of the resin film to the substrate is lowered. On the other hand, in the samples according to Examples 1 to 4, since the impurity content and the Fe content of the substrate are small, it is considered that the corrosion of the substrate did not proceed even by sulfuric acid immersion and the adhesion of the resin film to the substrate was maintained.

Comparing the sample according to Example 1 with the sample according to Reference Example 2, as shown in Table 1, only the resin film forming method is different. In Reference Example 2, since the film was formed on the primer layer, the film formed on the sliding material according to Reference Example 2 was different from that in Example 1, and the anchor portion filled in the open pores of the substrate and the coating portion on the surface of the substrate were connected. It is not considered to have a structure (see Fig. 3). Therefore, the film of Reference Example 2 is inferior in adhesiveness to the resin film of Example 1, and it is considered that peeling occurred for some samples. On the other hand, since the sliding material which concerns on Example 1 had the resin film which the anchor part filled in the opening of the base material, and the coating part of the base material surface connected, it is thought that the adhesiveness of the resin film with respect to a base material was favorable.

Claims (9)

Base material having open pores,
It has a resin film made of a molten resin,
And the resin coating has a coating portion covering at least a portion of the surface of the substrate and an anchor portion connected to the coating portion and filled in the open pores. The sliding member according to claim 1, wherein the base material is carbon. The sliding material of claim 2, wherein the carbon is hard carbon. The sliding member according to claim 2 or 3, further comprising a sliding surface on which the resin film is not formed and a non-sliding surface on which the resin film is formed on a surface other than the sliding surface. 5. The sliding material according to claim 4, wherein the sliding surface is provided with the open pores filled with the same molten resin as the resin film. The method according to any one of claims 1 to 5,
The impurity content of the said base material is 5000 ppm or less, The sliding material characterized by the above-mentioned. The sliding member according to any one of claims 1 to 6, wherein the coating portion has a thickness of 30 µm or less. The sliding material according to any one of claims 1 to 7, wherein the molten resin is a fluorine resin. The process of preparing the base material having open pores,
Applying a coating material containing a molten resin to the surface of the substrate;
And a step of heat-treating the base material coated with the paint at a temperature equal to or higher than the melting point of the meltable resin.

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