KR20120026028A - An apparatus for generating power responsive to mechanical vibration - Google Patents

Abstract

A substrate having a plurality of integral flexible regions; At least two ferromagnetic masses each coupled to a corresponding one or more integral flexible regions such that the at least one ferromagnetic mass moves relative to the substrate in response to substrate acceleration, each ferromagnetic mass having an interior disposed such that the inner magnetic poles are separated by a flux gap At least two ferromagnetic masses having magnetic poles, wherein the magnetic poles of the inner magnetic poles on opposite sides of the flux gap are similar, the inner magnetic poles forming a steep flux gradient region within the flux gap; And a coil coupled to the substrate, wherein the coil is disposed within a steep flux gradient region exposed to varying magnetic flux resulting from the movement of the at least one ferromagnetic mass relative to the substrate.

Description

Power generating device responsive to mechanical vibration {AN APPARATUS FOR GENERATING POWER RESPONSIVE TO MECHANICAL VIBRATION}

Statement of Government Interest

The invention described herein may be manufactured and used by the government of the United States or for the government of the United States for government purposes without payment of any royalties to or for this purpose.

Federal Government-sponsored research and development

This application is assigned to the United States Government and is available for licensing for commercial purposes. No authorization is required when used for governmental purposes. For licensing and technical inquiries, call 92152 San Diego, California Code 20012, San Diego Space and Navel Warfare Systems Center Patent Attorneys Office; Call (619) 553-3001, fax (619) 553-3821. See navy case # 99735.

There is a growing interest in the field of small sensors in applications such as medical implants and embedded sensors in buildings. One planned purpose of micro-electro-mechanical systems (MEMS) technology is to develop low cost and high performance distributed sensor systems for medical, vehicle, manufacturing, robotics, and home applications. One area that has received little attention is how to effectively supply the power required for these sensor elements. Many applications require the sensor to be completely embedded in the structure without physical connection to the outside world. Ideally, the elements of these distributed systems have their own integrated power supplies to reduce the problems associated with interconnect, electronic noise and control system complexity. Efforts are underway to develop integrated chemical-based power supplies into MEMS devices. Although chemical power supply (battery) technology is well developed for this application, where shelf life or replacement accessibility is a limiting factor, the chemical power supply may not be suitable for that application. Another approach to powering such systems is to include renewable power supplies within the sensor elements to make them self-powered microsystems.

Renewable power supplies convert energy obtained from existing energy sources in the environment into electrical energy. Preferred energy sources depend on the application. Some possible energy sources include optical energy from ambient light, such as daylight, thermal energy obtained across a temperature gradient, volumetric flow energy obtained across a liquid or gas pressure gradient, and mechanical energy obtained from motion and vibration. do. Of these energy sources, light and thermal energy have already been developed for use in micro-power supplies. However, there are many applications where insufficient amounts of light or thermal energy exist, such as in medical implants. Thus, those skilled in the art have proposed many different power supplies that generate electricity from ambient mechanical energy. From the movement of our body to the hum of a computer, the ambient mechanical vibrations inherent in the environment can provide a constant power density of 10-50 μW / cc.

For example, some skilled artisans have found rudimentary vibration-based generators at Sheffield University [C.B. Williams, R. B. Yates, "Analysis of a micro-electric generator for micro-systems," 8th Intl. Conf. on Solid-State Sens. & Actuators, Stockholm, Sweden, 25-29 Jun 1995, 87-B4, pp. 369-72] and at the Massachusetts Institute of Technology [Scott Meninger, Jose Oscar Mur-Miranda, Rajeevan Amirtharajah, Anantha P. Chandrakasan, and Jeffrey H. Lang, "Vibration-to-Electric Energy Conversion," IEEE Trans, on VLSI Systems Vol. . 9, No. 1, pp. 64-76, Feb 2001]. Meninger et al. Describe a micro-generator that obtains vibrational energy by accumulating the voltage generated by vibration-induced changes in the variable capacitor.

Others have recently improved on previous efforts. For example, Ching et al. Describe micromachined generators with sufficient power to drive off-the-shelf circuits [Neil N.H. Ching, H.Y Wong, Wen J. Li, Philip H. W. Leong, and Zhiyu Wen, "A laser-micro-machined multi-modal resonating power transducer for wireless sensing systems," Sensors and Actuators A: Physical, Vol. 97-98, pp. 685-690, 2002.]. For this task, Ching et al. Prefer micromachining methods to build their vibration-induced generators, because they provide precise control of the mechanical resonances needed for generator efficiency, and batches for low-cost mass production of commercially available generators. This is because it provides batch fabricability. Similarly, Williams et al. Then describe a simple inertial generator built according to a previous theoretical analysis, also produced by micromachining [C.B. Williams, C. Shearwood, M.A. Harradine, P.H. Mellor, T.S. Birch and R.B. Yates, "Development of an electromagnetic micro-generator," IEE Proc. -Circuits Devices Syst., Vol. 148, No. 6, pp. 337-342, Dec 2001]. Other examples include laser-micronized electromagnetic generators described by Li et al. [Wen J. Li, Terry C.H. Ho, Gordon M.H. Chan, Philip H.W. Leong and Hui Yung Wong, "Infrared Signal Transmission by a Laser-Micro-machined Vibration- Induced Power Generator," Proc. 43rd IEEE Midwest Symp. on Circuits and Systems, Lansing MI, 08-11Aug2000, pp236-9], which provides enough 2VDC power to send a 140ms pulse train every minute when subjected to 250 micron vibration in the 64-120 Hz region.

In US Pat. No. 6,127,812, Ghezzo et al. Describe an energy extractor comprising a capacitor that undergoes capacitance and voltage changes in response to movement of the capacitor plate or dielectric material. In one embodiment, a third plate is positioned between the first and second plates to produce two capacitors of varying capacitance. In another embodiment, one capacitor plate is attached by a flexible arm that allows movement across the other capacitor plate. The above capacitors can be used alone or in combination with one or more other capacitors and are rectified individually or cascaded to power a rechargeable energy source. The capacitor above can be fabricated on a substrate with a supporting electronic device such as a diode. Gecho et al. Employ varying capacitances and do not consider or suggest any solution to the task of manufacturing electromagnetic micro-generators.

In US Pat. No. 6,722,206 B2, Takeda describes a force sensing device with elements of magnetic material mounted to a substrate such that other electromagnetic material elements receive a magnetic field generated by the magnetic member. The movable member is mounted to oscillate in response to vibration, which oscillates the magnetic field experienced by the electromagnetic material, thereby changing the electrical properties of the electromagnetic material. Takeda does not consider or suggest any solution to the task of manufacturing electromagnetic micro-generators.

Despite the efforts of some of those skilled in the art, there is still a need in the art for an electromagnetic micro-generator suitable for mass production inexpensively on a MEMS scale that can generate enough power to operate today's microchips. All electromagnetic devices known in the art generally employ a single magnetic mass that oscillates on a spring element to change the magnetic flux in a nearby stationary coil. Thus, these devices are limited in power output capacity by limited mass of a single magnet, limited room for the number of coils in the flux field of a single magnet, and limited flux gradients available in the coil due to a single magnetic pole exposed to it. These unresolved problems and defects are clearly recognized in the art and resolved in the manner described below by the present invention.

Disclosed herein is a vibration energy acquisition device comprising a substrate having a plurality of integral flexible regions, at least two ferromagnetic masses, and a coil. Each ferromagnetic mass is coupled to a corresponding one or more integral flexible regions such that at least one ferromagnetic mass moves relative to the substrate in response to substrate acceleration. Each ferromagnetic mass has internal magnetic poles arranged such that the internal magnetic poles are separated from each other by the flux gap. The stimulus of each internal stimulus is similar to that of the internal stimulus on the opposite side of the flux gap. The internal magnetic poles form a steep flux gradient region within the flux gap. The coil is coupled to the substrate and disposed in a steep flux gradient region that is exposed to varying magnetic flux resulting from the movement of the at least one ferromagnetic mass with respect to the substrate.

In an alternative embodiment of the energy harvesting device described above, the two ferromagnetic masses can be arranged to be firmly coupled to each other and move simultaneously.

In another alternative embodiment of the energy harvesting device described above, the combined ferromagnetic mass may be configured to move linearly relative to the substrate in response to substrate acceleration.

In another alternative embodiment of the energy harvesting device described above, a conductor may be coupled to the coil to conduct current flowing in response to varying magnetic flux.

In yet another alternative embodiment of the energy harvesting device described above, the coil is a plurality of independent coils coupled to the substrate, the plurality of independent coils comprising a plurality of independent coils disposed in a flux gap that is exposed to varying magnetic flux. Can be.

In another alternative embodiment of the energy harvesting device described above, the coil may be disposed in the flux gap and outside of the volume defined by the perimeter of the coupled ferromagnetic mass.

In another alternative embodiment of the energy harvesting device described above, the coil may be disposed in the flux gap and outside of the volume defined by the perimeter of the coupled ferromagnetic mass.

The vibration energy obtaining device may be configured as a micro-electro-mechanical system (MEMS) generator comprising a substrate having a plurality of integral flexible regions, at least one monolithic micro-generator, a coil, and a conductor. In this embodiment, each monolithic micro-generator includes at least two ferromagnetic masses. Each ferromagnetic mass may be coupled to a corresponding one or more integral flexible regions such that at least one ferromagnetic mass moves relative to the substrate in response to substrate acceleration. Each ferromagnetic mass has internal magnetic poles arranged such that the internal magnetic poles of the ferromagnetic mass have the same magnetic properties and are separated from each other by the flux gap. The internal magnetic poles form steep flux gradient regions within the flux gap. The coil is coupled to the substrate and is disposed in a flux gap that is exposed to varying magnetic flux resulting from the movement of at least one ferromagnetic mass relative to the substrate. Conductors are coupled to each micro-generator coil to conduct current flowing in response to magnetic flux changes.

For a more complete understanding of the invention, reference is now made to the following detailed description of the embodiments as shown in the accompanying drawings, wherein like reference numerals designate like features throughout the several views.
1 is a schematic diagram illustrating a damped mass-spring model representing a micro-generator system of the present invention.
FIG. 2 shows the theoretical relationship between coil voltage, flux density and relative displacement according to the conventional electromagnetic theory for the model of FIG. 1.
3 is a diagram showing an edge view of several different coil / flux configurations usable in the micro-generator system of the present invention.
4 is a diagram showing an edge perspective view of an exemplary embodiment of the micro-generator of the present invention.
5 is a diagram illustrating a longitudinal perspective view of an exemplary embodiment of a micro-electro-mechanical system (MEMS) generator system of the present invention.
6, including FIGS. 6A to 6D, is a diagram showing a longitudinal cross-sectional view of an exemplary magnet layer fabrication process of the present invention.
FIG. 7, including FIGS. 7A through 7E, is a diagram illustrating a longitudinal cross-section of an exemplary magnet layer fabrication process of the present invention.
8 is a diagram illustrating a front view of the exemplary magnet layer embodiment of FIGS. 6 and 7.
9, including FIGS. 9A to 9D, is a diagram illustrating a longitudinal cross-sectional view of an exemplary coil layer fabrication process of the present invention.
FIG. 10 shows a front view of the example coil layer embodiment of FIG. 9.
FIG. 11, including FIGS. 11A-C, is a diagram illustrating a longitudinal cross-sectional view of a first exemplary micro-generator manufacturing process of the present invention using the magnet layer embodiment of FIG. 6.
12, including FIGS. 12A and 12B, is a diagram illustrating a longitudinal cross-sectional view of a second exemplary micro-generator manufacturing process of the present invention using the magnet layer embodiment of FIG.

1 is a schematic diagram illustrating a damped mass-spring model representing a micro-generator system of the present invention. Both electrical and mechanical attenuation must be considered in analyzing and optimizing designs for specific ambient vibration spectra. Referring to FIG. 1, for time t, mass m, spring constant k, electrical attenuation coefficient b _e , mechanical attenuation coefficient b _m , and displacement function z (t), the power P available from the coil current is given by Equation 1 It can be expressed as shown:

Energy conservation yields Equation 2:

Laplacian transformation and substitution of variables can provide the following equations (3) to (10):

At this time,

이다., Where

to be.

therefore,

ego,

Or

이다., Where

to be.

This is a nonlinear problem, and due to the nonlinear nature of the reaction force from the coil current, the system resonance can be optimized with reference to Equation 7 for a given application without undue experimentation. In general, the inventors have found that higher electrical attenuation b _e improves power output performance at frequencies below the mechanical resonance frequency f _r = 2πω _n of the system.

2 is a chart showing expected coil voltage, flux density and relative displacement for various electrical and mechanical assumptions. Acceleration is assumed to be constant 1.0 m / sec ² , B _max = 1 Tesla, k = 1 N / m, velocity = 50 mm / sec, mass = 1 mg, and x = 1 mm over the entire frequency range do. We conducted both experimental and theoretical tests and found that the predictions disclosed in FIG. 2 are in good agreement with the experimental measurements implemented on a larger physical scale.

A macro-scale version of the energy acquisition device was manufactured to confirm the expected voltage output per coil. The experimental setup consisted of 1 Tesla magnet 1 inch in diameter and 3/16 inch thick. It was attached to the spring with sufficient spring force, causing a displacement of 2.5 mm under an acceleration of 1.0 m / s ² at a frequency of 20 Hz. The number of turns in the coils varied sequentially from 5 to 40 in 5 increments, and voltage output measurements were made for each configuration. The voltage generated per winding of the coil was observed to be very close to the expected value of 1 mV / wound using the simple one-dimensional (1-D) model described above.

Detailed analysis was performed by modeling the magnetic flux density in two dimensions and summing the total flux density perpendicular to the surface of the coil. The input was once again assumed to be a 20 Hz sinusoidal input at 1.0 m / s ² . At each time step, speed, displacement from coil to magnet, and total magnetic flux density perpendicular to the surface were calculated. The results of this detailed analysis confirmed large experimental observations of 1 mV / wound and simple 1-D calculations.

3 is a diagram illustrating a longitudinal view of several different coil / flux configurations. In FIG. 3, a coil 20 is disposed in the flux gap 22 formed by the two magnetic masses 24, 26. 3 (a) and 3 (b), “seep” flux gradient regions are formed in the flux gap 22 by similar magnetic poles on each edge of the flux gap 22. In FIGS. 3 (c) and 3 (d), “shallow” flux gradient regions are formed in the flux gap 22 by dissimilar magnetic poles on each edge of the flux gap 22. In FIG. 3A, the coil 20 generates a sudden change in magnetic flux in the coil 20 by any vertical movement Z (t) of the mass 24 and the mass 26 relative to the coil 20. Disposed in the flux gap 22 so as to. Similarly, in FIG. 3 (b), the coil 20 exhibits a sudden change in the magnetic flux in the coil 20 by any simultaneous vertical movement Z (t) of both masses 24-26 relative to the coil 20. Disposed in the flux gap 22 to produce. On the other hand, in FIG. 3 (c), the coil 20 has a limited change in the magnetic flux in the coil 20 by any vertical movement Z (t) of the mass 24 and the mass 26 relative to the coil 20. Disposed in the flux gap 22 to produce. Similarly, in FIG. 3 (d), the coil 20 has a limited change in magnetic flux in the coil 20 at any simultaneous horizontal motion Y (t) of both masses 24-26 relative to the coil 20. Disposed in the flux gap 22 to produce. Clearly, the coil / flux configuration shown in FIGS. 3A and 3B is preferred, and in particular, the configuration of FIG. 3B is preferred for the implementation of the micro-generator of the present invention. In addition, additional magnetic masses may also be added, and existing masses reorganized to form other useful geometric configurations are well suited for implementation as an alternative embodiment of the micro-generator of the present invention.

4 is a diagram illustrating a longitudinal perspective view of an exemplary embodiment of the micro-generator 28 of the present invention. Micro-generator 28 includes a coil 30 consisting of a plurality of windings of electrically conductive material coupled to coil terminals 32 and 34. The coil 30 is disposed in the flux gap 36 bounded by the inner surfaces 38, 40 of the magnetic masses 42, 44, respectively. The inner surfaces 38, 40 are shown as the north poles of the magnetic masses 42, 44, but may be either polarity as long as both inner surfaces 38, 40 have the same irritation. The magnetic mass 42 is supported by a plurality of flexible elements (springs) exemplified by the flexible element 46. Similarly, magnetic mass 44 is supported by a plurality of flexible elements exemplified by flexible element 48. The free ends of the flexible elements 46 and 48 are fixed in any useful manner (not shown) with respect to the coil 30 such that the magnetic masses 42 and 44 are Z relative to the coil 30 in response to external mechanical vibrations. Allow to move in the (t) direction.

5 is a diagram showing a longitudinal perspective view of an exemplary embodiment of a micro-electro-mechanical system (MEMS) generator system 50 of the present invention. MEMS generator 50 comprises a plurality of micro-generators of the present invention, illustrated by micro-generator 28, wherein the individual coil terminals are powered by the MEMS generator terminal 52 54). Preferably, the plurality of micro-generators making up the MEMS generator 50 are coupled together for a fixed exposure to the same ambient vibrations.

6, including FIGS. 6A to 6D, is a diagram showing a longitudinal cross-sectional view of an exemplary magnet layer fabrication process of the present invention. This process begins with the semiconductor wafer 56 as shown in Fig. 6 (a). The material may be crystalline silicon or any other useful semiconductor material. The discussion below is limited to the preparation of a single magnet layer, but one of ordinary skill in the art can make many such magnet layer elements simultaneously on a single semiconductor wafer in a single process and can be separated from the wafer in a wafer dicing process well known in the art. Can be easily recognized. FIG. 6A shows the results of the first step of this process, preparing the upper surface 58 and the lower surface 60 for processing in a conventional manner by cleaning and polishing as needed. 6 (b) is the result of the next step of this process, masking and deep reactive ion etching (DRIE) of the bottom surface 60 to define the magnet well 62. Shows. FIG. 6C shows the results of the next step of this process, which is the masking and DRIE of the top surface 58 to define the coil layer grooves 64. 6 (d) is a masking and DRIE of the top surface 58 to complete the magnet layer sub-element 69 as shown substantially defining the integral flexible region 66 and the coupling post 68. The results of the next two steps of this process are shown. Bonding post 68 is also shown in wafer front view in FIG. 8 (magnetic well 62 should be separated by hidden lines to illustrate the exemplary process of FIG. 6 and solid lines for the exemplary process of FIG. 7). The final thickness of the integral flexible region 66 is established to provide the spring constant needed for the required resonant frequency of the final micro-generator (FIG. 11 below). The open area 71 of FIG. 8 is completely etched away to leave the magnet well 62 joined by only the flexible area 66. The final step in this magnet layer fabrication process is the placement of the ferromagnetic mass 70 into the magnet well 62 of the magnet layer sub-element 69 (shown in Fig. 11 (c)), which is shown in Fig. 6 (d). It may be achieved immediately after completion of the magnet layer sub-element 69 shown in FIG. 11 or may be postponed until after assembly of the micro-generator magnet layer and coil layer element (FIG. 11).

7, including FIGS. 7A to 7E, is a diagram showing a longitudinal cross-section of an alternative magnet layer fabrication process of the present invention. This process also begins with the semiconductor wafer 56 as shown in Fig. 7A. FIG. 7A shows the results of the first step of this process, preparing the upper surface 58 and the lower surface 60 for processing in a conventional manner by cleaning and polishing as needed. FIG. 7B shows the results of the next step of this process, which is the masking and DRIE of the top surface 58 to define the coil layer grooves 64. FIG. 7C shows the results of the next step of this process, which is the masking and DRIE of the top surface 58 to define the magnet well 62. FIG. 7 (d) shows the integral flexible region 66 and also the wafer front view in FIG. 8 (magnetic well 62 is shown in hidden lines to illustrate the example process of FIG. 6 and for the example process of FIG. 7. Must be distinguished by a solid line] The result of the next two steps of this process, which is the masking and DRIE of the upper surface 58 to define the binding post 68. The final thickness of the integral flexible region 66 is established to provide the spring constant needed for the required resonant frequency of the final micro-generator (Figure 12 below).

8 shows an open area 71 that can be completely etched away to leave the magnet well 62 coupled by only the flexible area 66. 7 (e) shows the result of the final step of this process, which is the placement of the ferromagnetic mass 70 into the magnet well 62. The ferromagnetic mass 70 should comprise a suitable "hard" ferromagnetic material, for example sputtered CoPtCr having a 40 KOe field, one pole coupled to the base of the magnetic well 62 and the other pole closed. It should be placed exposed on top of the mass 70 to complete the magnet layer element 72 as shown substantially.

9, including FIGS. 9A to 9D, is a diagram illustrating a longitudinal cross-sectional view of an exemplary coil layer fabrication process of the present invention. This process begins with the semiconductor wafer 74 as shown in Fig. 9A. The material may be crystalline silicon or any other useful semiconductor material. The discussion below is limited to the preparation of a single coil layer, but those skilled in the art will appreciate that many such coil elements can be manufactured simultaneously on a single semiconductor wafer in a single process and can be separated from the wafer in a wafer dicing process well known in the art. It is easy to recognize. 9 (a) shows the results of the first step of this process, preparing the upper surface 76 and lower surface 78 for processing in a conventional manner by cleaning and polishing as needed. 9 (b) shows the results of the next step of this process, which is the masking and DRIE of the top surface 76 to define the coil well 80. 9 (c) shows the result of the next step of this process, placing the conductive coil 82 in the coil well 80. The placement of the coils 82 may be any of several useful techniques known in the art, such as, for example, ion deposition of copper or aluminum conductors in a masked pattern, or for example conductor layers (not shown). Can be achieved by coupling to the base of the coil well 80 and masking and etching the conductive layer to produce the required coil geometry. The coil may comprise, for example, 2,500 windings within a radius of 1 mm. FIG. 9 (d) is a masking and DRIE of the top surface 76 or bottom surface 78 for completing the coil layer element 86 as shown substantially defining the coupling post through hole 84. The result of the final stage of the process is shown.

10 shows the bond post through hole 84 in a wafer front view. 10 also shows two conductive terminals 88, 90 arranged to allow electrical connection to the coil 82.

FIG. 11, including FIGS. 11A-C, is a diagram showing a longitudinal cross-sectional view of the fabrication of a first exemplary embodiment of the micro-generator 92 of the present invention, shown in FIG. 11 (c). 11 (a) shows the results of the first step of this process, coupling the coil layer element 86 to the first magnet layer sub-element 69A at the bonding surface 94A. 11 (b) couples the second magnet layer sub-element 69B to the coil layer element 86 at the bonding surface 94B and to the first magnet layer sub-element 69A at the bonding post surface 96. The result of the second step of this process is shown. Note that sufficient clearance is provided to allow the coil 82 to remain mechanically isolated from the coupling post surface 96 except for the mechanical coupling provided by the compliant region 66. The final step in this micro-generator manufacturing process is to place the ferromagnetic masses 70A and 70B, respectively, in the magnetic well 62 of the magnet layer sub-elements 69A and 69B, which instead replaces the micro-generator 92. May be achieved immediately after completion of the magnet layer sub-element 69 before commencement of the assembly.

12, including FIGS. 12A and 12B, is a diagram illustrating a longitudinal cross-sectional view of the fabrication of a second exemplary embodiment of the micro-generator 98 of the present invention, shown in FIG. 12B. 12 (a) shows the result of the first step of this process, coupling the coil layer element 86 to the first magnet layer element 72A at the bonding surface 100A. 12 (b) joins the second magnet layer element 72B to the coil layer element 86 at the bonding surface 100B and to the first magnet layer element 72A at the bonding post surface 102. Shows the result of the second step. Note that, except for the mechanical coupling provided by the compliant region 66, sufficient clearance is provided to allow the coil 82 to remain mechanically isolated from the coupling post surface 102.

Based on the measurements and calculations, we propose that the MEMS generator of the present invention can provide an output power of 10 to 500 mW / cc at an output voltage of 100 mV to 5,000 mV.

Apparently, those skilled in the art can readily devise other and alternative embodiments of the present invention in view of these teachings. Accordingly, the invention should be limited only by the following claims, including all such and modified embodiments, when viewed in conjunction with the above specification and accompanying drawings.

Many additional changes in details, materials, steps, and arrangements of parts described and illustrated herein to illustrate the nature of the invention have been made by those skilled in the art within the spirit and scope of the invention as expressed in the appended claims. It should be understood that this can be done.

From the above description of systems and methods for detecting objects within a search space, it is clear that various techniques can be used to implement the concept of system 10 without departing from its scope. The described embodiments are to be considered in all respects as illustrative and not restrictive. In addition, it is to be understood that the system 10 is not limited to the specific embodiments described herein and that many embodiments are possible without departing from the scope of the claims.

Claims (32)

Vibration energy acquisition device,
A substrate having a plurality of integral flexible regions;
As two ferromagnetic masses, two ferromagnetic masses are each coupled to corresponding one or more integral flexible regions such that at least one ferromagnetic mass moves relative to the substrate in response to substrate acceleration, and each ferromagnetic mass has an internal magnetic pole coupled by a flux gap. Two magnetic poles having internal magnetic poles arranged to be separated from each other, the magnetic poles of each of the internal magnetic poles being similar to the magnetic poles of the internal magnetic poles on opposite sides of the flux gap, the ferromagnetic mass being arranged to form steep flux gradient regions within the flux gap. Ferromagnetic mass; And
A coil coupled to a substrate, the coil disposed in a steep flux gradient region exposed to varying magnetic flux resulting from the movement of at least one ferromagnetic mass relative to the substrate.
Vibration energy acquisition device comprising a. The vibration energy obtaining device according to claim 1, wherein the two ferromagnetic masses are arranged to be firmly coupled to each other and to move simultaneously. The device of claim 2, wherein the coupled ferromagnetic mass moves linearly relative to the substrate in response to substrate acceleration. The device of claim 1, further comprising a conductor coupled to the coil for conducting a current flowing in response to the changing magnetic flux. The coil of claim 4, wherein
And a plurality of independent coils coupled to the substrate, wherein the plurality of independent coils are disposed in a flux gap that is exposed to varying magnetic flux. The device of claim 1, wherein the coil is disposed within the flux gap and outside of the volume defined by the circumference of the coupled ferromagnetic mass. The vibration energy obtaining device according to claim 1, wherein the coil is disposed in the volume gap and inside the volume defined by the circumference of the coupled ferromagnetic mass. Micro-electro-mechanical system (MEMS) generator,
A substrate having a plurality of integral flexible regions;
At least one monolithic micro-generator, each monolithic micro-generator
At least two ferromagnetic masses, wherein at least two ferromagnetic masses are each coupled to corresponding one or more integral flexible regions such that at least one ferromagnetic mass moves relative to the substrate in response to substrate acceleration, and each ferromagnetic mass is an internal magnetic pole of the ferromagnetic mass. At least two ferromagnetic masses having internal magnetic poles having the same magnetic polarity and arranged to be separated from each other by the flux gap, the internal magnetic poles forming a steep flux gradient region within the flux gap; And
A coil coupled to a substrate, the coil disposed in a steep flux gradient region exposed to varying magnetic flux resulting from the movement of at least one ferromagnetic mass relative to the substrate.
At least one monolithic micro-generator comprising a; And
Conductors coupled to each micro-generator coil to conduct current flowing in response to flux changes
Micro-electro-mechanical system (MEMS) generator comprising a. 10. The micro-electro-mechanical system (MEMS) generator of claim 8, wherein in one or more monolithic micro-generators, the two ferromagnetic masses are arranged to be firmly coupled to each other and simultaneously move. The micro-electro-mechanical system of claim 8, wherein in the one or more monolithic micro-generators, each ferromagnetic mass and corresponding one or more integral flexible regions form a resonant mass-spring system having a resonant frequency of 10 Hz to 50 Hz. (MEMS) generator. The micro-electro-mechanical system (MEMS) of claim 8, wherein in one or more monolithic micro-generators, the coil comprises a plurality of independent coils coupled to the substrate and disposed in a flux gap where the coils are exposed to varying magnetic flux. generator. The micro-electro-mechanical system (MEMS) generator of claim 8 wherein the substrate consists essentially of crystalline silicon. 9. The micro-electro-mechanical system (MEMS) generator of claim 8 wherein the coil is disposed within the flux gap and outside of the volume defined by the perimeter of the coupled ferromagnetic mass. 10. The micro-electro-mechanical system (MEMS) generator of claim 8 wherein the coil is disposed within the volume gap and within the volume defined by the perimeter of the coupled ferromagnetic mass. 10. The micro-electro-mechanical system (MEMS) generator of claim 9 wherein the coupled ferromagnetic mass moves linearly relative to the substrate in response to substrate acceleration. Energy acquisition device,
A substrate having a plurality of integral flexible regions;
As at least two ferromagnetic masses, at least two ferromagnetic masses are each coupled to corresponding one or more integral flexible regions such that at least one ferromagnetic mass moves relative to the substrate in response to substrate acceleration, and each ferromagnetic mass has an internal magnetic flux flux gap. At least two ferromagnetic masses having internal magnetic poles disposed to be separated from each other by the magnetic poles of each internal magnetic pole similar to the magnetic poles of the internal magnetic poles on opposite sides of the flux gap;
A coil coupled to a substrate, the coil comprising: a coil disposed within a flux gap that is exposed to varying magnetic flux resulting from the movement of at least one ferromagnetic mass relative to the substrate; And
Conductor coupled to coil to conduct current flowing in response to changing magnetic flux
Energy acquisition device comprising a. The method of claim 16,
Two ferromagnetic masses are firmly coupled to one another and arranged to move simultaneously. The method of claim 16,
Each ferromagnetic mass and corresponding one or more integral flexible regions form a resonant mass-spring system having a resonant frequency of 10 Hz to 50 Hz. The method of claim 16,
And a plurality of independent coils coupled to the substrate, the apparatus further comprising a plurality of independent coils disposed in the flux gap where the coils are exposed to varying magnetic flux. The method of claim 16,
An energy acquisition device, wherein the substrate consists essentially of crystalline silicon. The method of claim 16,
And the internal stimulus forms a steep flux gradient region within the flux gap. Micro-electro-mechanical system (MEMS) generator,
A substrate having a plurality of integral flexible regions;
At least one monolithic micro-generator, each monolithic micro-generator
At least two ferromagnetic masses, wherein at least two ferromagnetic masses are each coupled to corresponding one or more integral flexible regions such that at least one ferromagnetic mass moves relative to the substrate in response to substrate acceleration, and each ferromagnetic mass is an internal magnetic pole of the ferromagnetic mass. At least two ferromagnetic masses, having the same magnetic pole and having internal magnetic poles arranged to be separated from one another by the flux gap, and
A coil coupled to a substrate, wherein the coil is disposed within a flux gap that is exposed to varying magnetic flux resulting from the movement of at least one ferromagnetic mass relative to the substrate.
At least one monolithic micro-generator comprising a; And
Conductors coupled to each micro-generator coil to conduct current flowing in response to flux changes
Micro-electro-mechanical system (MEMS) generator comprising a. The method of claim 22,
In one or more monolithic micro-generators, two ferromagnetic masses are firmly coupled to one another and arranged to move simultaneously. The method of claim 22,
In one or more monolithic micro-generators, each ferromagnetic mass and corresponding one or more integral flexible regions form a resonant mass-spring system having a resonant frequency of 10 Hz to 50 Hz. The method of claim 22,
In one or more monolithic micro-generators, a plurality of independent coils coupled to a substrate, the micro-electro-mechanical system (MEMS) generator comprising a plurality of independent coils disposed in a flux gap where the coils are exposed to varying magnetic flux. The method of claim 22,
A micro-electro-mechanical system (MEMS) generator in which the substrate consists essentially of crystalline silicon. Energy harvester,
A substrate having a plurality of integral flexible regions;
As two ferromagnetic masses, the two ferromagnetic masses are each coupled to one or more integral flexible regions such that at least one ferromagnetic mass moves linearly with respect to the substrate in response to substrate acceleration, and each ferromagnetic mass has a flux inside the ferromagnetic mass. Having internal magnetic poles arranged to be separated from each other by a gap, the magnetic pole of each internal magnetic pole is similar to the magnetic pole of the internal magnetic pole on the opposite side of the flux gap, the internal magnetic pole forming a steep flux gradient region within the flux gap; Ferromagnetic masses;
A coil coupled to a substrate, the coil comprising: a coil disposed within a flux gap that is exposed to varying magnetic flux resulting from the motion of the ferromagnetic mass relative to the substrate; And
Conductor coupled to coil to conduct current flowing in response to changing magnetic flux
Energy obtainer comprising a. 28. The energy harvester of claim 27, wherein the two ferromagnetic masses are arranged to be firmly coupled to one another and to move simultaneously. 28. The energy harvester of claim 27, wherein each ferromagnetic mass and one or more integral flexible regions form a resonant mass-spring system having a resonant frequency of 10 Hz to 50 Hz. 28. The energy harvester of claim 27, wherein the substrate consists essentially of crystalline silicon. 10. The micro-electro-mechanical system (MEMS) generator of claim 9 wherein the coupled ferromagnetic mass moves linearly relative to the substrate in response to substrate acceleration. 24. The micro-electro-mechanical system (MEMS) generator of claim 23 wherein the coupled ferromagnetic mass moves linearly relative to the substrate in response to substrate acceleration.

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