KR20110134657A - Method to improve sensitivity of surface plasmon resonance sensor, produce surface plasmon resonance sensor and apply thereof - Google Patents

Method to improve sensitivity of surface plasmon resonance sensor, produce surface plasmon resonance sensor and apply thereof Download PDF

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KR20110134657A
KR20110134657A KR1020100054356A KR20100054356A KR20110134657A KR 20110134657 A KR20110134657 A KR 20110134657A KR 1020100054356 A KR1020100054356 A KR 1020100054356A KR 20100054356 A KR20100054356 A KR 20100054356A KR 20110134657 A KR20110134657 A KR 20110134657A
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surface plasmon
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plasmon resonance
resonance sensor
dielectric
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김경식
박해성
이광칠
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연세대학교 산학협력단
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Abstract

PURPOSE: A method for improving the sensitivity of a surface plasmon resonance sensor and a manufacturing method and an application method for a surface plasmon resonance sensor are provided to improve the sensitivity of a surface plasmon resonance sensor by employing a metal-dielectric composite with a relatively large surface plasmon wave vector. CONSTITUTION: An application method of a surface plasmon resonance sensor is as follows. A metal-dielectric composite for generating surface plasmon resonance by incident light of specific wavelength is analyzed. A metal volume mixing ratio P which has different surface plasmon wave vectors according to the dispersion property of the analyzed metal-dielectric composite is determined. A metal-dielectric composite material in a single film shape that is regularly or irregularly mixed at a determined metal volume mixing ratio P is manufactured. A surface plasmon resonance sensor chip is manufactured out of the metal-dielectric composite material. While maintaining the fixed wavelength of incident light, a sensor chip having a different surface plasmon wave vector is replaced to adjust the effective permittivity and sensitivity of the plasmon resonance sensor.

Description

Method to improve sensitivity of surface plasmon resonance sensor, produce surface plasmon resonance sensor and apply

The present invention relates to a method for improving the sensitivity of a surface plasmon resonance sensor and a manufacturing method, and more particularly, to the sensitivity of a surface plasmon resonance sensor used to measure refractive index, thickness, and concentration change of a sample medium using surface plasmon resonance. It relates to an improvement method, a manufacturing method and a method of applying the same.

When two media with different refractive indices are present, when incident light enters the low refractive index medium from the high refractive index medium, some of the incident light is reflected at the interface of the two media, and the rest is refracted, and the incident light is incident upon a specific angle or more. All is reflected.

When the incident light is p-polarized light, the high refractive index medium is a dielectric, and the low refractive index medium is a metal thin film, the wave vector parallel to the metal thin film is the wave vector of the surface plasmon (the interface on which the analyte is located). The energy density of the incident light is absorbed by the metal thin film, which is called surface plasmon resonance (SPR).

The surface plasmon resonance phenomenon is applied to a variety of industries because it can be applied to a biosensor system for detecting an analyte in the bio field, and can be used for a wide range of analysis of specific reactivity and various types of analytes. Surface plasmon resonance sensor refers to an all-optical sensor that measures surface refractive index or concentration and gap using surface plasmon resonance.

The surface plasmon resonance sensor system having the surface plasmon resonance sensor chip can be measured while maintaining the intrinsic properties of the analyte without changing the activity or the original property of the analyte, and does not require pretreatment of the analyte, The advantage is that measurements can be made in a short time, which greatly simplifies the analytical procedure.

Surface plasmon resonance is a quantized collective oscillation of electrons occurring on the surface of a medium with negative real permittivity, such as metal, so when using pure materials, the intrinsic dispersion properties at fixed wavelengths The wavenumber vector is determined by the permittivity value determined by

Accordingly, in the process of realizing and using a high-sensitivity sensor based on surface plasmon resonance, pure metals at high energy wavelengths are changed by changing the wavelength of incident light by irradiation of higher energy photons, that is, incident light of short wavelength. Sensitivity is enhanced based on the inherent dispersion characteristics of

According to this approach, however, the use of high-energy photons prevents the photon energy from being used for excitation of the surface plasmon mode of the electron, and is used for transition between the internal energy levels of the electron, thus the critical wavelength at which no surface plasmon occurs. There is a limit to this.

And, to adjust the wavelength of the incident light irradiation, there is a disadvantage that the trouble of having to replace the light source of the system and the damage of the sample due to the use of short wavelength light source occurs, especially in biological experiments such as DNA, antigen-antibody reaction There is a potential risk.

Due to these limitations, many methods for increasing the sensitivity of the surface plasmon resonance sensor without changing the wavelength of incident light have been studied. Examples include nano-based arrays, nano hole arrays, nano slit arrays, and diffraction gratings. There is a method of using a metric sized surface structure, but these prior arts have a problem that requires a high technology for producing a complex nanometer sized periodic structure.

The present invention devised to solve the problems described above, the surface plasmon resonance sensor more simply and reliably, without the risk of damage to the sample due to the use of a short wavelength light source, or the difficulty of implementing a complex nanometer-sized periodic structure An object of the present invention is to provide a method for improving the sensitivity of a surface plasmon resonance sensor, a manufacturing method, and a method of applying the same, to improve the sensitivity of the plasmon resonance sensor.

The present invention for achieving the object as described above, in manufacturing the sensor chip provided in the surface plasmon resonance sensor, consisting of a metal-dielectric composite material, not a pure material such as metal, dielectric, surface plasmon wave vector (surface plasmon The technical gist of the method of improving the sensitivity of the surface plasmon resonance sensor is characterized by adopting a metal-dielectric composite material having a relatively large wave vector.

Where the surface plasmon wave vector

Figure pat00001
Quot;
Figure pat00002
Surface plasmon wave vector
Figure pat00003
, The amount of change in the plasmon resonance angle
Figure pat00004
And angular sensitivity
Figure pat00005
It is desirable to change.

Where the plasmon resonance angle is

Figure pat00006
, The refractive index of the prism provided in the surface plasmon resonance sensor
Figure pat00007
, The wave vector in vacuum to the p-polarized incident light
Figure pat00008
, The refractive index of the dielectric sample
Figure pat00009
All.

And surface plasmon wave vector

Figure pat00010
Dismiss
Figure pat00011
Wave vector of incident light passing through the prism
Figure pat00012
On a two-dimensional graph,
Figure pat00013
It is desirable to extract from the intersection of the straight line by value and the surface plasmon dispersion curve of the metal-dielectric composite material.

Surface plasmon wave vector

Figure pat00014
Quot;
Figure pat00015
Figure pat00016
Figure pat00017
Real part effective dielectric constant of metal-dielectric composite single thin film by approximation
Figure pat00018
It is preferable to change the value as a variable.

Here, the wave vector of the P-polarized light in vacuum

Figure pat00019
, The refractive index of the sample
Figure pat00020
All.

And, real part effective dielectric constant of metal-dielectric composite single thin film

Figure pat00021
Surface plasmon wave vector by reducing the absolute value of
Figure pat00022
It is desirable to increase.

In addition, the effective dielectric constant of the metal-dielectric composite single thin film is the effective dielectric constant of the d-dimensional metal-dielectric composite single thin film by three-dimensional Bruggeman effective medium theory.

Figure pat00023
Figure pat00024
It is preferable to calculate by a formula.

Here, the metal volume mixing ratio is P, and the dielectric constant of the metal is

Figure pat00025
, Dielectric constant of
Figure pat00026
to be.

The metal-dielectric composite single thin film preferably has a form in which a metal and a dielectric are mixed irregularly.

In addition, the present invention, in manufacturing the sensor chip included in the surface plasmon resonance sensor, it is composed of a metal-dielectric composite material, it is to control the dispersion characteristics of the surface plasmon wave vector by adjusting the metal volume mixing ratio P desirable.

Here, the sensor chip of the surface plasmon resonance sensor, preferably has a single thin film structure made of a metal-dielectric composite material.

In addition, it is preferable that the sensor chip of the surface plasmon resonance sensor has a single thin film structure in which a metal and a dielectric are simultaneously deposited on a substrate.

Then, it is desirable to relatively increase the surface plasmon wave vector value by reducing the metal volume mixing ratio P.

In addition, the present invention, the dispersion characteristics analysis step of analyzing the dispersion characteristics of the metal-dielectric composite material for generating surface plasmon resonance by the incident light of a constant wavelength; A mixing ratio determining step of determining each of metal volume mixing ratios P having different surface plasmon wave vector values according to dispersion characteristics of the metal-dielectric composite material analyzed in the dispersion characteristic analyzing step; A composite material manufacturing step of manufacturing a metal-dielectric composite material having a single thin film form in which a regular arrangement or irregular mixing is performed with the metal volume mixing ratio P selected in the mixing ratio determining step; And a sensor applying step of fabricating, mounting and sensing the sensor chip of the surface plasmon resonance sensor using the metal-dielectric composite material produced in the composite material manufacturing step. Another technical point.

Here, a sensitivity adjustment step of adjusting and sensing the effective dielectric constant and the sensitivity of the plasmon resonance sensor by replacing the sensor chip having different surface plasmon wave vector values while maintaining a constant wavelength of the incident light after the sensor application step It is preferable that it is comprised including further.

According to the present invention with the above-described configuration, the conventional plasmonic resonance relies on the intrinsic properties of pure materials at a fixed wavelength by fabricating and applying a metal-dielectric composite material having a relatively large surface plasmon wave vector. It is effective to increase the sensitivity of the surface plasmon resonance sensor based on the plasmonic resonance or the phononic resonance phenomenon.

That is, the sensitivity of the surface plasmon resonance sensor can be adjusted while variously applying materials having different surface plasmon wave vector values while maintaining a constant wavelength of the incident light.

Through the fabrication of composite materials through regular arrangement or irregular mixing of metals and dielectrics, it is possible to artificially design the dielectric constant of an active medium to generate surface plasmon resonance, thereby controlling the dielectric constant at a fixed wavelength. Another effect is that the behavior of the surface plasmon waves generated can be directly adjusted by providing an active medium with optimized dispersion properties for the sensor system using plasmon resonance.

Accordingly, there is a risk of damage to the sample caused by the use of a short wavelength light source, which is generated in the process of adjusting the wavelength of incident light, or a process for implementing a complex nanometer-sized periodic structure to use a light source having a constant wavelength. There is another effect of making it possible to implement a reliable and sensitive optical sensor system by a simpler process, eliminating time, effort and cost.

And, by replacing the existing sensor chip composed of pure material with a sensor chip composed of a metal-dielectric composite material or a metal-dielectric composite material having a different metal volume mixing ratio P, the sensitivity is easily realized. Another benefit is that, as applicable, it is highly compatible with existing surface plasmon resonance sensor systems.

Figure 1-Graph showing the results of angular sensitivity calculation using surface plasmon wave vector function for each water and air sample
FIG. 2-Graph showing surface plasmon dispersion curves of metal pure materials and metal-dielectric composites, respectively
3-Graph depicting plasmon dispersion curve according to metal volume mixing ratio
4-Graph showing the change in angular sensitivity at each wavelength as the metal volume mixing ratio is adjusted.
5 is a graph showing the results of calculation using the media approximation of the surface plasmon wave vector and the thickness of the sensor chip without the approximation.
FIG. 6-Graph showing the amount of change in the surface plasmon resonance angle with respect to the refractive index change of the water sample for each of the pure metal and the metal-dielectric composite.
FIG. 7-Graph showing the amount of change in surface plasmon resonance angle with respect to the change in refractive index of an air sample for each of the pure metal and the metal-dielectric composite.
8-A graph showing the change in plasmon resonance angle for metal-dielectric composites fabricated with different metal volume mixing ratios.

With reference to the drawings it will be described in detail a method for improving the sensitivity of the surface plasmon resonance sensor, a manufacturing method and its application method according to the present invention.

In the present invention, based on the effective medium theory, a pure material having a dielectric constant inherent to a pure material (hereinafter, referred to as a negative dielectric constant value) at a fixed wavelength through regular and irregular mixing or arrangement of heterogeneous pure materials is called an active medium. And a technique for designing dispersion characteristics of a composite material having a value different from that of the refractive index.

Effective medium theory refers to pure materials through regular or irregular arrangements or mixtures of materials with different properties, such as metals, dielectrics, and semiconductors, in all electromagnetic fields covering the UV, Optical, IR, THz, and Microwave regions. It means an analysis method for a composite material having a dielectric constant and refractive index different from the dielectric constant and refractive index of.

Here, the composite material includes a material produced by regularly and irregularly mixing different materials among pure materials such as metals, dielectrics, and semiconductors, and refers to an active medium whose optical properties are changed through artificial treatment of pure materials.

Active media include negative refractive index materials as well as natural materials with negative real dielectric constants that can cause surface plasmon resonance (SPR) and phonon resonance phenomena. The term includes natural or artificially designed metamaterials with negative permittivity or negative permeability in the electromagnetic band of a specific wavelength.

The method for improving the sensitivity of the surface plasmon resonance sensor according to the present invention relates to a technique for implementing a change in dielectric constant of a composite material for improving sensitivity in a high sensitivity surface plasmon resonance sensor. Surface plasmon wave vector

Figure pat00027
A method for increasing the angular sensitivity of the surface plasmon resonance sensor (SPR sensor) through the increase of.

Surface plasmon wave vector

Figure pat00028
The action of increasing is realized by various embodiments, but most preferably is a surface plasmon wave vector that is not a pure material such as a metal, a dielectric
Figure pat00029
Since it can be stably realized by a simple configuration of applying a larger metal-dielectric composite material, an embodiment of applying the metal-dielectric composite material will be described below.

Surface plasmon wave vector

Figure pat00030
The increase of the angular sensitivity through the increase of is derived from the resonance condition by the interaction between the surface plasmon and the incident light, and is carried out by designing the dispersion characteristics of the active medium, and has the simplest structure of the single-film metal-dielectric composite material Apply.

Hereinafter, the surface plasmon wave vector through a process derived from the resonance conditions of the surface plasmon and the incident light

Figure pat00031
The surface plasmon wave vector is formally proved by increasing the angular sensitivity of the surface plasmon resonance sensor.
Figure pat00032
In order to increase, the surface plasmon dispersion characteristics are designed to reduce the absolute value of the real part of the dielectric constant of the active medium using a metal-dielectric composite material.

Surface plasmon wave vector of surface plasmon resonance system with finite metal thin film thickness

Figure pat00033
Infinite Thickness Active Medium and Refractive Index
Figure pat00034
Surface plasmon wave vector defined at the interface of the dielectric sample with
Figure pat00035
, The perturbation component of the surface plasmon wave vector re-emitted from the prism due to the finite thickness of the active medium
Figure pat00036
It consists of.

Effect of light emitted again

Figure pat00037
Can be ignored, so the surface plasmon wave vector
Figure pat00038
Is
Figure pat00039
In order to excite the plasmon wave at the surface using a universal prism coupler, the wave vector component and the surface plasmon wave vector of incident light that exist along the interface through the inside of the prism
Figure pat00040
The surface plasmon resonance binding conditions are as follows.

Figure pat00041

Figure pat00042
Figure pat00043

here,

Figure pat00044
Is the wave vector of the P-polarized light in vacuum,
Figure pat00045
Permittivity of silver metal (active medium),
Figure pat00046
Is the refractive index of the dielectric sample,
Figure pat00047
The refractive index of the prism,
Figure pat00048
Silver surface plasmon resonance angle,
Figure pat00049
Is a wave vector of incident light.

Surface plasmon resonance sensor

Figure pat00050
Is based on the relative dielectric constant of the dielectric sample
Figure pat00051
The amount of change is determined by changing the incident angle of the incident light.
Figure pat00052
It means to balance with change.

Therefore, the sensitivity of the surface plasmon resonance sensor may be defined as the magnitude of the change in the surface plasmon resonance angle caused by the change in the refractive index of the dielectric sample, and both sides of Equation 1 may be defined as the refractive index of the dielectric sample.

Figure pat00053
Incident angle
Figure pat00054
Differentiating with respect to, the equation is given by the following equation.

Figure pat00055

The term on the left side of [Equation 2] can be expressed as the following [Equation 3].

Figure pat00056

The right side term of [Equation 2] can be expressed as the following [Equation 4].

Figure pat00057

Angular sensitivity by substituting [Equation 3] and [Equation 4] into [Equation 2]

Figure pat00058
The surface plasmon wave vector as shown in Equation 5
Figure pat00059
It can be expressed as a function of.

Figure pat00060

Where the plasmon resonance angle is

Figure pat00061
, The refractive index of the prism provided in the surface plasmon resonance sensor
Figure pat00062
, The wave vector of the P-polarized light
Figure pat00063
, The refractive index of the dielectric sample
Figure pat00064
All.

In a given surface plasmon resonance sensor system, the refractive index of the prism

Figure pat00065
Refractive index of dielectric sample
Figure pat00066
Has a constant value, so from [Equation 5]
Figure pat00067
By increasing, we can see that a larger resonance angle change and angular sensitivity can be obtained.

1 shows an SF5 prism (

Figure pat00068
= 1.66), using water (
Figure pat00069
= 1.33) and air (
Figure pat00070
= 1.00) is a graph showing the result of calculating the sensitivity to the sample, the result shown in [Equation 5] from FIG.
Figure pat00071
It can be reconfirmed that increasing the sensitivity can increase each sensitivity.

FIG. 2 is a graph showing the surface plasmon dispersion curves of the metallic pure material and the metal-dielectric composite material. As can be seen from the blue circle display, the surface plasmon wave is generated in order to generate a resonance coupling between the incident light of a specific wavelength and the surface plasmon. The magnitude of the wave vector of the incident light passing through the vector and the prism must be adjusted to match.

As can be seen from the difference between the display points of the blue circle and the red rectangle of FIG. 2, if the scattering characteristics of the surface plasmon can be controlled and designed, a larger surface plasmon wave vector and surface plasmon resonance coupling can be achieved. From the above, it can be seen that the angular sensitivity of the surface plasmon resonance sensor can be improved by fabricating a metal-dielectric composite single thin film.

3 is a graph showing a plasmon dispersion curve according to a metal volume mixing ratio. When a metal-dielectric single thin film using silver and silicon dioxide is used, the size of the surface plasmon wave vector can be controlled by adjusting the metal mixing ratio P. And as the mixing ratio P of the metal is reduced, the intersection between the surface plasmon wave vector and the wave vector of the incident light, the larger surface plasmon wave vector

Figure pat00072
Since it has a value, it can be expected to improve each sensitivity.

In other words, the uniaxial axis can be

Figure pat00073
Wave vector of incident light passing through the prism
Figure pat00074
On a two-dimensional graph,
Figure pat00075
Surface plasmon wave vector from the intersection of a straight line by value and the surface plasmon dispersion curve of the metal-dielectric composite
Figure pat00076
Through the process of extracting
Figure pat00077
Value, or specify
Figure pat00078
Can be derived and designed to have a value.

Derived from Equation 1

Figure pat00079
Figure pat00080
Figure pat00081
From approximation, surface plasmon wave vector
Figure pat00082
Is the real effective dielectric constant of the metal-dielectric composite single thin film.
Figure pat00083
Variable and the absolute value of the real dielectric constant of the active medium
Figure pat00084
Surface plasmon wave vector by reducing
Figure pat00085
You can see that you can increase the value.

That is, by using a metal-dielectric single composite thin film, it is possible to design the dispersion characteristics of surface plasmon waves while controlling the dielectric constant of the plasmon active medium for incident light of a given wavelength.

Figure pat00086
Surface plasmon wave vector with control to reduce the absolute value of
Figure pat00087
Can be increased.

In manufacturing the sensor chip of the surface plasmon resonance sensor, it is possible to control the dispersion characteristic of the surface plasmon wave vector by adjusting the metal volume dielectric ratio and adjusting the metal volume mixing ratio P, By decreasing the surface plasmon wave vector value can be relatively increased.

In the implementation of the metal-dielectric composite material at a specific metal volume mixing ratio P, the metal-dielectric composite material may be manufactured to have a single thin film form that is regularly arranged or irregularly mixed by co-depositing a metal and a dielectric on a substrate. .

In the case where the metal-dielectric composite single thin film has an irregular mixture of metal and dielectric, the effective dielectric constant of the metal-dielectric composite single thin film is obtained by the three-dimensional Bruggeman effective medium theory. Effective permittivity of one-dimensional metal-dielectric composite thin film

Figure pat00088
It is preferable to follow the formula (Equation 6).

Figure pat00089

Figure pat00090

Here, the metal volume mixing ratio is P, the dielectric material volume mixing ratio is 1-p, the dielectric constant of the metal is

Figure pat00091
, Dielectric constant of
Figure pat00092
Dimension d applies to 3.

Based on the three-dimensional Brugman effective medium theory, the effective permittivity of a silver-silicon dioxide composite single thin film is determined between the permittivity of pure silver and silicon dioxide, and FIG. 4 shows a metal-dielectric composite single thin film using silver and silicon dioxide. As a result of applying, the sensitivity of each 50 nm-thick silver-silicon dioxide composite single thin film having various metal volume mixing ratio p can be examined.

5 is a result of calculating the surface plasmon wave vector using an infinite medium approximation over a wide wavelength region (

Figure pat00093
, Dashed lines) and the result of approximation for finite media (
Figure pat00094
, Solid line), it can be seen that the approximate equation ([Equation 1]) of the infinite medium has a similar behavior to the finite medium approximation formula considering the thickness of the metal thin film.

In addition, by using the incident light of any wavelength, by controlling the metal volume mixing ratio P, the surface plasmon wave vector value larger than the surface plasmon wave vector in the pure metal can be obtained, that is, having a higher angular sensitivity than the pure metal. This means that surface plasmon resonance sensors can be fabricated.

6 and 7 graphically show surface plasmon resonance coupling conditions of a silver-silicon dioxide mixed single thin film having a silver and metal volume mixing ratio of 0.68 (p = 0.68) for water and air samples, respectively. Change in refractive index of the sample when incident light is used

Figure pat00095
It can be seen that the change in the surface plasmon resonance angle for = 0.01 is about 1.3 times from 0.79 ° to 1.68 ° for water and about 1.3 times from 0.48 ° to 0.63 ° for air.

FIG. 8 shows the results of experiments on air samples to experimentally demonstrate the control of the dispersion characteristics of plasmon active media, using a RF-DC cosputter, on a BK7 substrate. While simultaneously mixing and stacking silicon dioxide, a 50 nm silver-copper dioxide mixed single thin film was produced, and the metal volume mixing ratio p was controlled while varying the operating power for sputtering silver and silicon dioxide.

As the sputtering power relative to silicon dioxide increases, the surface plasmon resonance angle is formed at a larger angle and the real part absolute value of the effective dielectric constant

Figure pat00096
And the metal volume mixing ratio p decreases. From this, the metal volume mixing ratio P of the metal-dielectric composite single thin film is controlled, thereby controlling the dispersion characteristics to increase the size of the surface plasmon wave vector, thereby controlling the high sensitivity surface plasmon. Prove that the resonance sensor can be implemented.

Sensitivity improvement method and manufacturing method of the surface plasmon resonance sensor according to the present invention having the configuration as described above, can be applied to the surface plasmon resonance sensor through the dispersion characteristic analysis step, mixing ratio determination step, composite material production step, sensor application step The sensitivity of the plasmon resonance sensor may be easily adjusted through a sensitivity adjustment step after the sensor application step.

In the dispersion-specific analysis step, the dispersion characteristics of the metal-dielectric composite material for generating surface plasmon resonance by the incident light of a constant wavelength are analyzed, and in the mixing ratio determination step, the metal-dielectric analyzed in the dispersion characteristic analysis step According to the dispersion properties of the composite material, each of the metal volume mixing ratios P having different surface plasmon wave vector values is determined, and the surface plasmon dispersion properties of the metal-dielectric composite material are designed.

In the composite material manufacturing step, the metal-dielectric composite material having a single thin film form, which is regularly arranged or irregularly mixed, is manufactured with the metal volume mixing ratio P selected in the mixing ratio determining step, and the sensor applying step In the above, by fabricating and mounting the sensor chip of the surface plasmon resonance sensor with the metal-dielectric composite material produced in the composite material manufacturing step, it is applied to the surface plasmon resonance sensor.

In the sensitivity adjustment step, after the sensor application step, while maintaining the wavelength of the incident light, and through the sensitivity adjustment step of replacing the sensor chip having different surface plasmon wave vector value, within the dielectric constant range of the two pure materials to be mixed The effective dielectric constant can be controlled without changing the wavelength, and the sensitivity of the surface plasmon resonance sensor can be adjusted.

According to the method for improving the sensitivity of the surface plasmon resonance sensor according to the present invention having the above-described configuration, a manufacturing method, and an application method thereof, various materials having different surface plasmon wave vector values may be maintained while maintaining a constant wavelength of incident light. During application, the sensitivity of the surface plasmon resonance sensor can be adjusted.

Through the fabrication of composite materials through regular arrangement or irregular mixing of metals and dielectrics, it is possible to artificially design the dielectric constant of an active medium to generate surface plasmon resonance, thereby controlling the dielectric constant at a fixed wavelength. The behavior of surface plasmon waves generated can be directly controlled by providing an active medium with optimized dispersion properties for sensor systems using plasmon resonance.

Accordingly, there is a risk of damage to the sample caused by the use of a short wavelength light source, which is generated in the process of adjusting the wavelength of incident light, or a process for implementing a complex nanometer-sized periodic structure to use a light source having a constant wavelength. By eliminating time, effort, and cost, a simpler process can realize a reliable and sensitive optical sensor system.

In addition, in the process of applying the present invention to the surface plasmon resonance sensor, replacing the existing sensor chip consisting of a pure material with a sensor chip composed of a metal-dielectric composite material, or a metal having a different metal volume mixing ratio P- By replacing it with a dielectric composite material, high sensitivity can be easily implemented and applied, which is highly compatible with existing surface plasmon resonance sensor systems.

The present invention has been described with reference to preferred embodiments of the present invention, but the present invention is not limited to these embodiments, and the claims and detailed description of the present invention together with the embodiments in which the above embodiments are simply combined with existing known technologies. In the present invention, it can be seen that the technology that can be modified and used by those skilled in the art are naturally included in the technical scope of the present invention.

Claims (13)

In manufacturing the sensor chip provided in the surface plasmon resonance sensor,
Improved sensitivity of surface plasmon resonance sensor composed of metal-dielectric composite material which is not pure material such as metal and dielectric and adopts metal-dielectric composite material with relatively large surface plasmon wave vector Way.
The surface plasmon wave vector of claim 1.
Figure pat00097
Quot;
Figure pat00098

Surface plasmon wave vector
Figure pat00099
, The amount of change in the plasmon resonance angle
Figure pat00100
And angular sensitivity
Figure pat00101
Method for improving the sensitivity of the surface plasmon resonance sensor, characterized in that for changing the.
Where the plasmon resonance angle is
Figure pat00102
, The refractive index of the prism provided in the surface plasmon resonance sensor
Figure pat00103
, The wave vector of the P-polarized light
Figure pat00104
, The refractive index of the dielectric sample
Figure pat00105
All.
The surface plasmon wave vector of claim 1.
Figure pat00106
Quot;
Dismiss
Figure pat00107
Wave vector of incident light passing through the prism
Figure pat00108
On a two-dimensional graph,
Figure pat00109
Method for improving the sensitivity of the surface plasmon resonance sensor, characterized in that extracted from the intersection of the straight line by the value and the surface plasmon dispersion curve of the metal-dielectric composite material.
The surface plasmon wave vector of claim 1.
Figure pat00110
Quot;
Figure pat00111
Figure pat00112
Figure pat00113

Real part effective dielectric constant of metal-dielectric composite single thin film by approximation
Figure pat00114
Method for improving the sensitivity of the surface plasmon resonance sensor, characterized in that is changed by the variable.
Here, the wave vector of the P-polarized light in vacuum
Figure pat00115
, The refractive index of the sample
Figure pat00116
All.
The method of claim 4, wherein
Real Partial Effective Permittivity of Metal-Dielectric Composite Single Thin Films
Figure pat00117
Surface plasmon wave vector by reducing the absolute value of
Figure pat00118
Method for improving the sensitivity of the surface plasmon resonance sensor, characterized in that to increase the.
The effective dielectric constant of claim 4, wherein the effective dielectric constant of the metal-dielectric composite single thin film is
Effective permittivity of d-dimensional metal-dielectric composite single thin film by three-dimensional Bruggeman effective medium theory
Figure pat00119

Figure pat00120

Method for improving the sensitivity of the surface plasmon resonance sensor, characterized in that calculated by the equation.
Here, the metal volume mixing ratio is P, and the dielectric constant of the metal is
Figure pat00121
, Dielectric constant of
Figure pat00122
to be.
The method of claim 6, wherein the metal-dielectric composite single thin film,
Method for improving the sensitivity of the surface plasmon resonance sensor characterized in that the irregularly mixed form of the metal and the dielectric.
In manufacturing the sensor chip provided in the surface plasmon resonance sensor,
A method for producing a surface plasmon resonance sensor comprising a metal-dielectric composite material and controlling the dispersion characteristic of the surface plasmon wave vector by adjusting the metal volume mixing ratio P.
The method of claim 8, wherein the sensor chip of the surface plasmon resonance sensor,
A method for producing a surface plasmon resonance sensor, characterized in that it has a single thin film structure made of a metal-dielectric composite material.
According to claim 8, The sensor chip of the surface plasmon resonance sensor,
A method of manufacturing a surface plasmon resonance sensor, comprising a single thin film structure in which a metal and a dielectric are co-deposited on a substrate.
The method of claim 9 or 10,
A method for producing a surface plasmon resonance sensor, characterized by relatively increasing the surface plasmon wave vector value by reducing the metal volume mixing ratio P.
A dispersion characteristic analysis step of analyzing the dispersion characteristics of the metal-dielectric composite material for generating surface plasmon resonance by incident light of a constant wavelength;
A mixing ratio determining step of determining each of metal volume mixing ratios P having different surface plasmon wave vector values according to dispersion characteristics of the metal-dielectric composite material analyzed in the dispersion characteristic analyzing step;
A composite material manufacturing step of manufacturing a metal-dielectric composite material having a single thin film form in which a regular arrangement or irregular mixing is performed with the metal volume mixing ratio P selected in the mixing ratio determining step; And
A sensor applying step of manufacturing, mounting and sensing a sensor chip of a surface plasmon resonance sensor using the metal-dielectric composite material produced in the composite material manufacturing step;
Application method of the surface plasmon resonance sensor, characterized in that comprising a.
The method of claim 12,
A sensitivity adjustment step of adjusting and sensing the effective dielectric constant and the sensitivity of the plasmon resonance sensor by replacing the sensor chip having different surface plasmon wave vector values while maintaining a constant wavelength of the incident light after the sensor application step;
Application method of the surface plasmon resonance sensor, characterized in that further comprises a.
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AU2006329841A1 (en) * 2005-12-16 2007-07-05 Indiana University Research & Technology Corporation Sub-micron surface plasmon resonance sensor systems
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