KR20110074334A - Optoelectrofluidic device integrated with microfluidic channels and droplet manipulation method using the same - Google Patents

Abstract

PURPOSE: An optoelectrofluidic device integrated with microfluidic channels and a droplet manipulation method using the same are provided to perform a 2D transporting, a merging, and a mixing processes. CONSTITUTION: A photoelectricity fluidics(1) comprises fine fluid which moves in a fine channel(101), a power device(111) for applying power to the photoelectricity fluidics, a formation unit(115) of the photoelectricity fluidics for forming microdroplets(107) by the fine channels. The fine channels are integrates to the photoelectricity fluidics.

Description

Opto-ELECTROFLUIDIC DEVICE INTEGRATED WITH MICROFLUIDIC CHANNELS AND DROPLET MANIPULATION METHOD USING THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optoelectronic fluid device in which microchannels are integrated. More specifically, microdrops are continuously generated, and microdrops are driven by using light-induced dielectrophoresis and electrowetting principles. The present invention relates to a photovoltaic fluid device in which microchannels are integrated and a microdrop driving method using the same.

Recently, the importance of sample pretreatment technology is emerging to analyze chemical and biosamples among microfluidic technologies. Programmable microdrop control techniques have been proposed and applied to several applications for mixing, measuring, and arranging various samples. The principle of the existing programmable microdrop control technology in microfluidic devices is based on magnetic drive [U. Lehmann et al., Sens. Actuators B Chem. 2007, 117, 457-463, Dielectrophoresis [TB Jones, Electromechanics of particles, 1995, New York: Cambridge University Press], Electrowetting-on-dielectric, EWOD [SK Cho et al., J. Microelectromech. Syst. 2003, 12, 70-80] or optical tweezers [RM Lorenz et al., Anal. Chem. 2007, 79, 224-228], but magnetic particles are essential for magnetic driving, and in the case of technologies such as dielectric electrophoresis and electrowetting, high costs such as patterning for fabricating devices containing fixed microelectrodes The process is accompanied by a complicated process of wiring. In addition, when using an optical element such as an optical forceps, a complicated device configuration for driving a laser or the like is required, and photodamage due to high optical and electrical energy is concerned. In addition, such a technique is not suitable for the development of a portable device due to the device characteristics.

Optoelectrofluidics technology that overcomes the limitations of existing microelectronic devices as described above and uses light to program, drive, manipulate, and analyze biomaterials such as micro or nano-sized particles, cells, and proteins. This is in the limelight. By irradiating light on a photoconductive material, light energy is converted into electric energy, which results in an uneven electric field, which induces an electrodynamic phenomenon, thereby controlling the movement of the microparticles or the microfluid.

The present invention enables the operation of microdroplets with a simple optical device and relatively low electrical energy by using a photoelectric fluid element having a simple configuration, instead of the existing complicated device and device configuration, and saves time and cost required for device fabrication. It is possible to minimize damage of the sample from external energy. In addition, since it is possible to integrate with a variety of microfluidic devices developed previously, it is possible to continuously form and manipulate microdroplets including various kinds of fluids.

The present invention was derived to solve the above-described problems, the first problem to be solved by the present invention is to form a microdrops of various concentrations and types continuously in a microchannel integrated opto-fluidic device, and to be portable The present invention provides a photovoltaic fluid device in which microchannels are integrated, which can be programmed by driving, merging, mixing, etc. of formed droplets with a simple optical system and relatively low voltage.

A second problem to be solved by the present invention is to provide a microdroplet driving method capable of driving microdroplets using the photovoltaic fluid device in which the microchannel is integrated.

The present invention to achieve the first object,

Microchannels through which microfluids move;

An optoelectronic fluid device in which the microchannels are integrated;

A power supply device for applying a voltage to the optoelectronic fluid element; And

It provides a photovoltaic fluid device integrated with a microchannel comprising a; light source for irradiating light to the microfluid injected through the microchannel.

Here, the optoelectronic fluid device may include a forming unit for forming microdrops from the microfluid and a driving unit for driving the microdrops.

In addition, the forming unit may be in communication with one or more injection unit for injecting the microfluid.

In addition, the driving unit may be in communication with the discharge portion for recovering the fine droplets.

In addition, one or more lenses for condensing the light may be provided in the path of the light emitted from the light source.

In addition, a display device for changing the pattern of the light may be provided in the path of the light irradiated from the light source.

The apparatus may further include a stage capable of adjusting the position of the optoelectronic fluid device.

In addition, it may further include one or more auxiliary light sources for observing the inside of the optoelectronic fluid device,

In addition, the microchannel may be made of any one of a polymer material, a photoconductor, glass, and silicon.

In addition, the microfluid may include one or more of cells, proteins, and polymeric particles.

In addition, the photovoltaic fluid element may include a photoconductive layer to which a voltage is selectively applied only to the region to which light is irradiated, and a ground layer for forming an electric field in the photovoltaic fluid element from a voltage applied to the photoconductive layer. have.

The photoconductive layer may include a flat electrode for applying a voltage using the power supply device and a photoconductive material for selectively applying a voltage only to a region to which the light is irradiated.

In addition, the plate electrode may be made of a transparent conductive material.

In addition, the photoconductive material may be made of any one of hydrogenated intrinsic amorphous silicon, cadmium sulfide (CdS), and a photo transistor.

In addition, the optoelectronic fluid device may further include an intermediate layer between the photoconductive material and the plate electrode.

In addition, the intermediate layer may be made of doped amorphous silicon or molybdenum.

In addition, the optoelectronic fluid device may further include a protective layer on the photoconductive material.

In addition, the protective layer may be made of silicon nitride or silicon oxide.

In addition, the ground layer may be made of a transparent conductive material.

In addition, the transparent conductive material may be made of indium tin oxide (ITO) or a gold thin film.

In addition, the optoelectronic fluid device may further include an adsorption preventing layer on the protective layer.

In addition, the adsorption prevention layer is preferably made of an amorphous fluoropolymer (amorphous fluoropolymer).

In addition, the light source is preferably any one of laser, pulsed laser, fluorescence emission, or Raman scattering.

In addition, the microfluid may include a first microfluid and a second microfluid which are non-mixing fluids, and the first microfluid passing through the microchannel may be changed into microdrops by the second microfluid. .

In addition, the first microfluid may include one or more of cells, proteins, and polymeric particles.

In addition, when the voltage is applied and the light is irradiated, the microdroplets may be moved in the direction of the irradiated region by the electrophoresis or electrowetting, or in the opposite direction.

In addition, the voltage applied from the power supply device is preferably an AC or DC voltage.

In addition, when the AC voltage is applied, the driving direction of the microdroplets may be changed according to the frequency.

In addition, when the DC voltage is applied, the microdroplets may be moved by electrophoresis.

In addition, the display device is preferably any one of a DMD, LCD, PDP, OLED, laser.

In addition, the auxiliary light source is preferably any one of a halogen lamp, fluorescent light emission, laser.

In addition, the size of the microdroplets may be adjusted by changing the flow rate of the first microfluid or changing the height or width of the microchannel.

In addition, the size of the microdroplets may be adjusted by changing the flow rate of the second microfluid or changing the flow rate ratio of the first microfluid to the second microfluid.

According to another aspect of the present invention,

Injecting microfluid into the optoelectronic fluid device having the microchannel formed thereon;

Forming microdroplets with the microfluid injected into the optoelectronic fluid device; And

And driving the microdrops by irradiating light from a light source to the photovoltaic fluid element and applying a voltage to the photovoltaic fluid element.

Here, before the step of injecting the microfluid, may further comprise the step of injecting a sample containing one or more of cells, proteins, polymeric particles into the microfluid.

In addition, in the forming of the microdroplets, the size of the microdroplets may be adjusted by adjusting the flow rate of the microfluid injected through the microchannel or adjusting the height or width of the microchannel.

In addition, in the driving of the microdrops, the light irradiated from the light source may be irradiated to a specific region for driving the microdrops.

In addition, in the driving of the microdrops, the microdrops may be moved toward the specific region or in the opposite direction by electrophoresis or electrowetting.

By using the photovoltaic fluid element and the microdrop driving method in which the microchannels are integrated according to the present invention, it is possible to program the microdrops with relatively low electrical energy using a simple optical device, thereby enabling two different ones. Two-dimensional transport, merging and mixing of microdroplets having the above samples can be performed. In particular, by integrating the microchannel in which the microdroplet forming unit and the driving unit are completely separated in the optoelectronic fluid element, continuous microdrop formation and optohydrodynamic driving in a single optoelectronic fluid element are possible. The present invention with this advantage could be used in biological applications and analytical applications by providing a simple and easy to use structure compared to existing fluid manipulation techniques. In particular, the advantage of being able to drive a large number of micro droplets at the same time is expected to contribute to high-throughput screening. In addition, the photoelectric driving principle using the virtual electrode formed by the imaging device may be applied to an automated cell analysis experiment.

Hereinafter, the present invention will be described in more detail with reference to preferred examples. However, these examples are intended to illustrate the present invention in more detail, it will be apparent to those skilled in the art that the scope of the present invention is not limited thereby.

1 is a view showing an optoelectronic fluid device 1 in which a microchannel is integrated according to a first embodiment of the present invention.

An optoelectronic fluid device 1 according to an embodiment of the present invention includes a microchannel 101 through which a microfluid is moved; An optoelectronic fluid device (1) in which the microchannels are integrated; A power supply device 111 for applying a voltage to the optoelectronic fluid element; And a light source 115 irradiating light to the microfluid that has passed through the microchannel.

The optoelectronic fluid device 1 according to the present invention includes a forming unit 102 capable of forming the microdrops 107 by the microchannels and a driving unit 103 capable of driving the formed microdrops electrodynamically. . The forming unit 102 includes at least one T-shaped channel 104 in which microdrops are formed, and a moving channel 105 for moving the microdroplets formed in connection with the T-shaped channel to the driving unit.

In addition, at least one injection unit 106 for injecting microfluid may be communicated with the forming unit 102 of the optoelectronic fluid device 1. The size of the microdroplets may be adjusted by adjusting the flow rate of the microfluid or adjusting the height and width of the T-channel through the injection unit.

The above-described forming part, driving part, and microchannel may be made of any one of a polymer material such as PDMS and PMMA, a photoresist, glass, and silicon. In addition, the microfluid injected into the injection unit may include one or more of cells, proteins, and polymeric particles.

Formation of the microdrops 107 flows the first microfluid (eg water) and the second microfluid (eg oil), which are unmixed fluids, at both ends of the T-shaped microchannel, and the first microfluid The second microfluid may be formed while passing through the microchannel. In addition, by injecting a sample of cells, proteins, polymeric particles, etc. into the first microfluid, microdrops that are driven, observed, and analyzed may be formed.

The microdrops 107 formed by the microfluid including the sample move through the moving channel 105 connected to the driving unit. The height of the forming portion is 68㎛ to ensure that the microdrops of sufficient size can be formed, the height of the drive portion can be manufactured to prevent the movement speed of the microdroplets drop by adsorption to 125㎛. The height of the forming portion and the driving portion can be adjusted according to the process conditions.

Two or more injection parts 106 and T-shaped channels 104 may exist to form different types of micro droplets at the same time, and the driving part 103 may include one or more discharge parts 108. Droplets can be recovered.

The height and the shape of the cross section of the driving unit 103 determine the strength of the electric field due to the voltage applied between the photoconductive layer 109 and the ground layer 110, and the lower the height, the greater the strength of the electric field.

The voltage applied by the power supply 111 may be an alternating current or a direct current voltage, and when the alternating voltage is applied, the driving direction of the microdroplets may be changed according to the frequency. In addition, when a DC voltage is applied, the microdroplets may be moved by electrophoresis.

When the light 112 is irradiated to the driving unit 103 from the light source 115 and a voltage is applied, the microdroplets moved from the forming unit through the microchannels are formed in the region irradiated with light by electrophoresis or electrowetting. Can move in the opposite or the opposite direction.

The microbubbles including the different samples from the driving unit 103 may be mixed with each other by moving and merging by electrophoresis or electrowetting, the mixed microbubbles may be moved again, and recovered through the discharge unit 108. can do.

The light source 115 may be any one of laser, pulsed laser, fluorescence emission, or Raman scattering, and the path of light emitted from the light source 115 may include a digital micromirror device (DMD), an LCD, Display devices 114 such as PDPs, OLEDs, and lasers may be provided. The display device may change the driving direction of the microdroplets by changing the pattern of light irradiated to the driver 103, that is, the shape or brightness of the light.

One or more lenses 113 may be installed to condense the light passing through the display device.

In addition, the above-described photovoltaic fluid element may be placed, for example, on a stage (not shown) of an electron microscope, and the stage may be used to precisely adjust the position of the photovoltaic fluid element. In addition, at least one auxiliary light source (not shown) may be installed to observe the inside of the optoelectronic fluid device, and the sample included in the microdroplet may be observed while observing the driving direction and current position of the microdroplets driven through the auxiliary light source. Can be analyzed.

The auxiliary light source is preferably any one of a halogen lamp, fluorescent light emission or laser.

The photovoltaic fluid element 1 includes a photoconductive layer 109 in which voltage is selectively applied only to a region to which light 112 is irradiated, and a ground layer 110 for forming an electric field in the photovoltaic fluid element from a voltage applied to the photoconductive layer. ) May be included.

2 is a view showing a manufacturing process of an opto-electronic fluid device in which the microchannels are integrated according to the first embodiment of the present invention.

First, the PDMS 203 is spin coated onto the silicon wafer 202 on which the photoresist 201 is patterned. The photoresist 201 is, for example, preferably SU-8, a negative photoresist in which only UV (Ultra Violet) irradiated portion is cured. The length, width, and height of the photoresist may be adjusted according to design and process conditions. Can be. Before the polymerization, the PDMS (a mixture of a prepolymer and a curing agent mixed with a 10: 1) is spin-coated on a pattern using a syringe 204 connected to an air compressor in a portion to be a driving part of a silicon wafer. Remove the PDMS. For the polymerization reaction, the cured PDMS thin film is preferably prepared by curing at 75 ° C. for 1 hour. As a result, the perforated portion becomes the driving portion 208, and the other portion becomes the forming portion 207. After the separation from the silicon wafer and then attached to the ground layer 205 after the plasma (Plasma) treatment to form a fine channel in which the forming unit 207 and the driving unit 208 is completely separated. Finally, the microchannels are attached to the photoconductive layer 209 to fabricate the optoelectronic fluid device in which the microchannels are integrated.

Here, the photoconductive layer 209 selectively applies voltage only to the flat electrode 210 made of a transparent conductive material (for example, a transparent electrode such as indium tin oxide (ITO) or a gold thin film) and a region to which light is irradiated. The photoconductive material 206 may be included. In addition, the ground layer 205 may also be made of the same material as the flat electrode 210 described above.

The photoconductive material 206 may be preferably made of any one of hydrogenated intrinsic amorphous silicon, cadmium sulfide (CdS), and a photo transistor.

In addition, an intermediate layer 211 may be formed between the photoconductive material 206 and the plate electrode 210, and the intermediate layer 211 may be made of doped amorphous silicon or molybdenum. Can be. In addition, a protective layer 212 may be formed on the photoconductive material 206 to protect the photoconductive material 206, and the protective layer 212 may be formed of silicon nitride or silicon oxide. It can be prepared as. In addition, the adsorption protective layer 213 made of amorphous fluoropolymer such as FluoroPel of Cytonix, CYTOP of Asahi Glass, Teflon AF of DuPont, etc. on the protective layer 212 to prevent the adsorption of microdroplets. ) May be formed.

3 shows an optoelectronic fluid device 3 in which a microchannel 301 is integrated according to a second embodiment of the present invention. The optoelectronic fluid device according to the present invention may include a forming unit 302 capable of forming microdrops and a driving unit 303 capable of driving the formed microdrops optoelectronic hydrodynamically. The forming unit 302 includes a T-channel 304 in which the microdrops 308 are formed and a moving channel 305 for moving the microdrops formed in connection with the T-channel to the driving unit 303. And a fine hole 306 for connecting the discharge portion and the drive portion.

At least one microfluidic injection unit 307 for injecting microfluids into the injection unit 307 may be included. By adjusting the flow rate through the injection portion or by adjusting the height and width of the T-channel can be adjusted the size of the fine droplets.

The forming unit, the driving unit, and the microchannel may be formed of one of polymer materials such as PDMS and PMMA, photoresist, glass, and silicon. In addition, the microfluid injected into the injection unit may include one or more samples such as cells, proteins, polymeric particles, and the like.

The droplets 308 including the sample are moved through the microchannels connected to the driving unit. The height of the forming unit 302 is 25㎛ to ensure that the microdrops of sufficient size can be formed, the height of the drive unit 303 is 50㎛ can be manufactured to prevent the movement speed of the droplets drop by the adsorption. The height of the forming portion and the driving portion can be adjusted according to the process conditions.

Two or more injection portions and T-shaped channels may exist to form different types of microdroplets simultaneously.

In addition, a spacer 313 and a fine channel structure for separating the photoconductive layer 309 and the ground layer 310 may be provided to form a microfluidic flow path in the driver 303. The height of the spacer and the shape of the cross section of the driving unit determine the strength of the electric field due to the voltage applied between the photoconductive layer and the ground layer, and the lower the height, the greater the strength of the electric field.

When the light 312 is irradiated to the driving unit 303 and a voltage is applied, the microdroplets moved from the forming unit through the microchannels are in the direction or the opposite direction of the region to which the light is irradiated by electrophoresis or electrowetting. Can move.

The microdroplets including different samples in the driving unit may be moved and merged by electrophoresis or electrowetting, mixed with each other, the mixed microdroplets may be moved again, and recovered through the discharge unit.

4 is a view illustrating a manufacturing process of an optoelectronic fluid device in which microchannels are integrated according to a second embodiment of the present invention.

First, the photoresist 401 is patterned on the silicon wafer 402. As the photoresist, for example, SU-8, which is a negative photoresist in which only UV (Ultra Violet) irradiated portion is cured, may be adjusted, and the length, width, and height of the photoresist may be adjusted according to design and process conditions. The PDMS 403 before the polymerization is poured onto the fabricated pattern, and preferably cured at 65 ° C. for 3 hours so that the formed pattern can be formed on the PDMS, and then separated from the pattern formed on the silicon wafer. A hole 405 is formed in the ground layer 404 so that the microdrops recovered from the discharge portion of the formation portion can be moved to the microfluidic flow path through the ground layer 404. The separated PDMS is attached to the upper part of the ground layer of the optoelectronic fluid device after the plasma treatment to manufacture the optoelectronic fluid device in which the microchannels are integrated. A spacer 407 is formed to separate the photoconductive material 406 from the ground layer 404.

FIG. 5 is a view showing a third embodiment in which an injection unit 506 of a sample including one of cells, proteins, and polymeric particles is added to the microchannels of the microchannel integrated photovoltaic fluid device according to the present invention. to be. As shown in FIG. 5, the microchannel integrated photovoltaic fluid device 5 further includes an injection unit 506 of a sample including one of cells, proteins, and polymeric particles. The microdrops 508 including the sample may be formed in the channel.

6A and 6B illustrate results of formation of microdroplets in microchannels according to a first embodiment of the present invention. The width of the microchannels through which oil, the second microfluid flows, is 80 μm, and the width of the microchannels through which water, the first microfluid flows, is 60 μm, and the width can be designed differently according to the size of the microdrops to be formed. . The flow rate of oil is 80 μl / h, the flow rate of water is 8 μl / h, and the flow rate of each microfluid may be injected according to the size of the microdrops to be formed. Figure 6b is the result of measuring the volume of the microdroplets formed while adjusting the ratio of the flow rate of oil and water. As the flow rate of water is lower than the flow rate of oil, small droplets may be formed.

7A and 7B show a result of driving microdroplets in a driving unit according to a first embodiment of the present invention. In the forming part, fine droplets of distilled water containing red food dye were formed, and when the applied alternating current voltage was 27 V and the frequency was 100 kHz, the three water droplets were moved two-dimensionally and merged. . The light source used at this time was a halogen lamp and a liquid crystal display (LCD) was used as a display device for changing the pattern of irradiated light. In addition, a condenser lens was used to collect the irradiated light, an objective lens was used as the lens for observation, and a charge coupled device (CCD) was used as the detector. Figure 7b is a graph showing the moving speed of the microdroplets having three different volumes according to the applied alternating voltage. According to the existing theory of electrophoresis, as the applied voltage increases, the gradient of the electric field increases, so the speed of movement of microdroplets increases. However, when a high voltage of 40 V or more is applied, the adsorption phenomenon is intensified by the electrowetting effect. The movement speed decreases. In addition, in the case of fine droplets having a diameter larger than the height of the driving unit, the movement speed tends to be relatively decreased due to the friction phenomenon caused by the adsorption.

FIG. 8 is a flowchart illustrating a method for driving microdrops using an optoelectronic fluid device in which microchannels are integrated according to an embodiment of the present invention.

As shown in FIG. 8, the microdrop driving method using the photovoltaic fluid device in which the microchannels are integrated according to an embodiment of the present invention includes the steps of: injecting microfluidic fluid into the photovoltaic fluid device having the microchannels formed (S10); Forming microdroplets with the microfluid injected into the optoelectronic fluid device (S20); And driving the microdrops by irradiating light from a light source to the optoelectronic fluid element and applying a voltage (S30).

Microfluidic injection step (S10) is a step of injecting the microfluid into the at least one injection unit formed in the optoelectronic fluid device, the sample containing one or more of cells, proteins, polymeric particles to the microfluid to be injected before this step To form microdroplets containing the sample.

The microdrop formation step (S20) is a step of forming microdrops by passing the microfluid through the microchannel. In this step, the size of the microdrops formed by adjusting the flow rate of the microfluid injected through the microchannel or adjusting the height or width of the microchannel can be adjusted.

The fine droplet driving step (S30) is a step of driving the fine droplets in a desired direction by irradiating light and applying a voltage to the fine droplets formed in the driving unit of the optoelectronic fluid element. In this step, the micro-droplets can be driven in a desired direction by irradiating the light irradiated from the light source to a specific area in consideration of the direction in which the micro-droplets will be moved. At this time, the microdroplets may be moved toward the specific region or the opposite direction by electrophoresis or electrowetting.

As described above with reference to the drawings illustrating a photovoltaic fluid element and method for driving fine droplets according to the present invention, the present invention is not limited by the embodiments and drawings disclosed herein, the present invention Various modifications can be made by those skilled in the art within the spirit and scope.

1 is a view schematically illustrating the formation and driving of microdrops using an optoelectronic fluid device in which microchannels are integrated according to a first embodiment of the present invention.

2 is a view showing a manufacturing process of an opto-electronic fluid device in which the microchannels are integrated according to the first embodiment of the present invention.

3 is a view schematically showing the formation and driving of fine droplets using the photovoltaic fluid device in which the microchannels are integrated according to the second embodiment of the present invention.

4 is a view illustrating a manufacturing process of an optoelectronic fluid device integrated with a microchannel according to a second embodiment of the present invention.

FIG. 5 is a view schematically illustrating formation and driving of microdrops using an optoelectronic fluid device in which microchannels are integrated according to a third embodiment of the present invention.

6A and 6B illustrate a result of forming microdrops in a microchannel according to a first embodiment of the present invention.

7A and 7B illustrate driving results of fine droplets in a driving unit according to a first exemplary embodiment of the present invention.

FIG. 8 is a flowchart illustrating a method for driving microdrops using an optoelectronic fluid device in which microchannels are integrated according to an embodiment of the present invention.

Claims (38)

Microchannels through which microfluids move; An optoelectronic fluid device in which the microchannels are integrated; A power supply device for applying a voltage to the optoelectronic fluid element; And And a microchannel integrated therein, the light source irradiating light onto the microfluid injected through the microchannel. The method of claim 1, The optoelectronic fluid device of claim 1, wherein the optoelectronic fluid device includes a formation unit for forming microdrops from the microfluid and a driving unit for driving the microdrops. The method of claim 2, And the at least one injection unit for injecting the microfluid is in communication with the forming unit. The method of claim 2, And a discharge part capable of recovering the fine droplets in communication with the driving part. The method of claim 1, The microchannel integrated opto-electronic fluid device, characterized in that the path of the light irradiated from the light source is provided with one or more lenses for condensing the light. The method of claim 1, Microchannel integrated opto-electronic fluid element, characterized in that the display device for changing the pattern of the light is provided in the path of the light irradiated from the light source The method of claim 1, And a stage capable of adjusting the position of the optoelectronic fluid device. The method of claim 1, The microchannel integrated optoelectronic fluid device, characterized in that it further comprises at least one auxiliary light source for observing the inside of the optoelectronic fluid device. The method of claim 1, The microchannel is a microchannel integrated opto-electronic fluid device, characterized in that made of any one material of a polymeric material, photosensitive member, glass, silicon. The method of claim 1, The microfluidic microchannel integrated optoelectronic fluid device, characterized in that it comprises one or more of cells, proteins, polymeric particles. The method of claim 1, The optoelectronic fluid device, And a photoconductive layer selectively applying a voltage only to the region to which light is irradiated, and a ground layer for forming an electric field in the photovoltaic fluid element from a voltage applied to the photoconductive layer. Optoelectronic Fluid Device. The method of claim 11, The photoconductive layer, And a flat electrode for applying a voltage using the power supply device and a photoconductive material for selectively applying a voltage only to a region to which the light is irradiated. The method of claim 12, And the flat plate electrode is made of a transparent conductive material. The method of claim 12, The photoconductive material is a microchannel integrated opto-electronic fluid device, characterized in that made of any one of hydrogenated intrinsic amorphous silicon (CyS), cadmium sulfide (CdS), a photo transistor. The method of claim 12, The optoelectronic fluid device, And an intermediate layer between the photoconductive material and the plate electrode. The method of claim 15, And the intermediate layer is made of doped amorphous silicon or molybdenum. The method of claim 12, The optoelectronic fluid device, The microchannel integrated photovoltaic fluid device further comprising a protective layer on the photoconductive material. The method of claim 17, The protective layer is a microchannel integrated optoelectronic fluid device, characterized in that made of silicon nitride (Silicon nitride) or silicon oxide (Silicon oxide). The method of claim 11, The microchannel integrated opto-electronic fluid device, characterized in that the ground layer is made of a transparent conductive material. The method of claim 13 or 19, The transparent conductive material is indium tin oxide (ITO) or gold thin film integrated microelectronic device, characterized in that consisting of a thin film. The method of claim 17, The optoelectronic fluid device, The microchannel integrated photoelectric fluid device, characterized in that further comprising an adsorption prevention layer on the protective layer. The method of claim 21, The adsorption prevention layer is a microchannel integrated photovoltaic fluid device, characterized in that consisting of amorphous fluoropolymer (Amorphous fluoropolymer). The method of claim 1, The light source may be any one of a laser, a pulsed laser, fluorescence emission, or Raman scattering. The method of claim 1, The microfluid includes a first microfluid and a second microfluid which are non-mixable fluids, And the first microfluid that has passed through the microchannel is changed into microdrops by the second microfluid. The method of claim 24, The first microfluidic microchannel integrated optoelectronic fluid device, characterized in that it comprises one or more of cells, proteins, polymeric particles. The method of claim 24, When the voltage is applied and the light is irradiated, the microdrops are moved in the direction of the irradiated region by the electrophoresis or electrowetting, or in the opposite direction, the microchannel integrated photoelectric fluid device. The method of claim 24, And a voltage applied from the power supply device is an alternating current or a direct current voltage. The method of claim 27, When the AC voltage is applied, the microchannel integrated opto-electronic fluid device, characterized in that the driving direction of the microdrops is changed according to the frequency. The method of claim 27, When the direct current voltage is applied, the micro-channel integrated opto-electronic fluid element, characterized in that the droplets are moved by electrophoresis. The method of claim 6, The display device is a microchannel integrated optoelectronic fluid device, characterized in that any one of the DMD, LCD, PDP, OLED, laser. The method of claim 8, The auxiliary light source is a microchannel integrated photovoltaic fluid device, characterized in that any one of a halogen lamp, fluorescent light emission, laser. The method of claim 22, The size of the microdrops is microchannel integrated photovoltaic fluid element, characterized in that the control by changing the flow rate of the first microfluidic or the height or width of the microchannel. The method of claim 24, And the size of the microdrops is controlled by changing a flow rate of the second microfluid or by changing a flow rate ratio of the first microfluid to the second microfluid. Injecting microfluid into the optoelectronic fluid device having the microchannel formed thereon; Forming microdroplets with the microfluid injected into the optoelectronic fluid device; And And driving the microdrops by irradiating light from a light source to the photovoltaic fluid element and applying a voltage to the photovoltaic fluid element. The method of claim 34, wherein Before the step of injecting the microfluid, using the microchannel integrated opto-electronic fluid device, further comprising the step of injecting a sample containing at least one of cells, proteins, polymeric particles into the microfluid Fine droplet driving method. The method of claim 34, wherein In the step of forming the microdroplets, Method for driving microdrops using an integrated photovoltaic fluid device, characterized in that for controlling the flow rate of the microfluid injected through the microchannel or the height or width of the microchannel to control the size of the microdroplets . The method of claim 34, wherein In driving the microdrops, The method of claim 1, wherein the light emitted from the light source is irradiated to a specific region for driving the micro droplets. The method of claim 37, In driving the microdrops, The microdrops, the microdrops drive method using a microchannel integrated photoelectric fluid element, characterized in that the movement toward the specific region or the opposite direction by electrophoresis or electrowetting.

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