KR20110072928A - Manifold for chemical mixing and real time supply system for mixed chemical composition - Google Patents

Abstract

PURPOSE: A manifold for mixing the drug solution and a real time mixing apparatus for supplying liquid source including the same are provided to mix and supply a drug solution on a real time basis, to have no need of a blending tank due to a mixture control without hunting on the real time basis, and to deal with mixing ratio changes immediately. CONSTITUTION: The manifold for mixing the drug solution, which is applied to an apparatus for supplying liquid source for at least two kinds of drug solutions with desired mixing ratio, and mixes and supplies the drug solutions, includes at least two inlet ports(2), in which drug solutions are mixed respectively; a mixing chamber(4), in which the inlet port is combined, the drug solution is entered, and the side is a circumferential surface; and a vent(6) discharging the mixed drug solution from the mixing chamber to outside; In order to have a implant direction contacting the circumferential surface of the mixing chamber, the inlet port is combined with the mixing chamber closely to circumferential surface. Each inlet port has a setting configuration to be separated upward and downward of the mixing chamber. The inlet port is close to the circumferential surface, united with the mixing chamber, and at the same time is combined with the mixing chamber in an inclining form as to the horizontal plane to an acute angle. The upward and downward separation of each inlet port is separated to escape a rotation section within the mixing chamber receiving the drug solution from each inlet port, in order to avoid overlapping of the rotation section within the mixing chamber receiving the drug solution from each inlet port. The vent of the mixing chamber is located on the top of the mixing chamber.

Description

MANIFOLD FOR CHEMICAL MIXING AND REAL TIME SUPPLY SYSTEM FOR MIXED CHEMICAL COMPOSITION}

The present invention relates to a chemical liquid mixing manifold and a real-time mixed chemical liquid supplying apparatus including the same. When making and using a mixed composition used in a conventional semiconductor or LCD manufacturing process, the mixed composition is provided with a separate mixing tank. After manufacturing and storing, and supplying the same, in the case of the present invention can be directly mixed and supplied in real time, and the mixing ratio control can be controlled without hunting in real time (HUNTING), so no mixing tank is required, it is immediate to change the mixing ratio The present invention relates to a chemical liquid mixing manifold and a real-time mixed chemical liquid supply device including the same.

In general, various compositions are used for each process in the semiconductor manufacturing process and the LCD manufacturing process. In such a composition, the chemical liquid of various components is mixed and manufactured in the required composition in many cases.

Therefore, in order to manufacture the mixed chemical liquid as described above, as shown in Figure 7, each of the chemical liquids (L1, L2, L3, L4) of each component is supplied in the amount required in one mixing tank, and then agitator, etc. After mixing through, and confirming the composition ratio for this, if the composition ratio satisfies the requirements to supply the required amount, and the remainder is kept in the mixing tank as it is applied.

However, in such a configuration, it is necessary to provide a mixing tank that takes up a lot of volume and requires a lot of equipment cost, and even when the demand for the mixed chemical is high, the mixing process must be carried out separately. Because it must be stored, there is a problem that can not cope quickly with the accommodation of the mixed chemical liquid.

In addition, if the composition ratio of the mixed chemicals needs to be changed or the components need to be changed according to the process needs, there is a problem that the previously prepared mixed chemicals must be discarded. There are a lot of time and costly issues.

Therefore, it is possible to replace in real time according to the process change, easy to install even in a narrow space, the development of a chemical liquid supply device with a low installation cost burden is urgently needed.

In addition, in the case of such a real-time supply device, the problem is that since the mixing of the chemical liquid in real time, and the mixed chemical liquid is supplied immediately, the mixing of the chemical liquid is made in a fast time, uniform in the section to confirm the composition ratio In this case, the mixing should be completed, and the change in the ratio of each chemical composition in the chemical liquid thus mixed is small so that real time supply is possible. In the case of the conventional chemical liquid mixing manifold as shown in FIG. As the chemical liquid flowing through the manifold (solid arrow) hits the wall of the mixing chamber, a back pressure (dashed arrow) is generated to prevent the incoming chemical liquid from entering the mixing chamber. Therefore, due to such a back pressure, there is a problem that the concentration changes such as hunting (hunting) of the real-time concentration due to the inflow is not even.

Therefore, there is an urgent need for the development of a chemical mixing manifold capable of high mixing efficiency and minimizing the occurrence of back pressure.

In order to solve the problems as described above, the present invention provides a manifold for mixing the chemical solution with high mixing efficiency and minimize the occurrence of back pressure, thereby making and using a mixed composition used in the conventional semiconductor or LCD manufacturing process In this case, after preparing and storing the mixed composition having a separate mixing tank, and supplying the same, in the case of the present invention can be directly mixed and supplied in real time, control the mixing ratio control in real time without hunting (HUNTING) It is an object of the present invention to provide a chemical liquid mixing manifold and a real-time mixed chemical liquid supply device including the same, which do not require a mixing tank and can immediately respond to changes in the mixing ratio.

In order to achieve the above object, the present invention

A chemical liquid manifold for mixing and supplying at least two chemical liquids, which is applied to a chemical liquid supply device for mixing and supplying at least two chemical liquids in a desired ratio,

The chemical mixture manifold

At least two injection holes into which the chemical solutions are respectively injected;

A mixing chamber in which the injection holes are coupled to inject the chemical liquids and have a side surface of a circumferential surface thereof; And,

A discharge port for discharging the chemical liquid mixed to the outside from the mixing chamber,

The injection port is in contact with the circumferential surface in contact with the circumferential surface to have an injection direction in contact with the circumferential surface of the mixing chamber, each injection port for chemical liquid mixing, characterized in that spaced apart from each other in the vertical direction of the mixing chamber Provide a manifold.

Also,

At least two chemical liquid tanks individually containing the chemical liquids for mixing;

A quantitative transfer pump connected to the chemical liquid tank for individually transporting each chemical liquid according to a predetermined supply amount;

A continuous mixing device including the chemical liquid mixing manifold, continuously flowing from the chemical liquid tank by the transfer pump, mixed in a flow, and having a chemical composition in which the chemical liquids are uniformly mixed;

A composition detector for analyzing a component of the chemical composition flowing out of the continuous mixing device;

A controller for controlling the supply amount of the metering pump according to the composition detected from the composition detector; And,

It provides a real-time mixed chemical liquid supply device comprising a feeder for supplying the chemical composition produced in the continuous mixing device to the outside.

According to the chemical liquid mixing manifold of the present invention and a real-time mixed chemical liquid supplying apparatus including the same, by providing a chemical liquid mixing manifold capable of high mixing efficiency and minimizing back pressure, it is used in a conventional semiconductor or LCD manufacturing process. In the case of making and using a mixed composition, a separate mixing tank is prepared and stored, and then the mixed composition is supplied. In the case of the present invention, the present invention can be directly mixed and supplied in real time, and the mixing ratio control is real time. It can be controlled without hunting so that no mixing tank is required, and the effect of immediately responding to the change of the mixing ratio or the change of the mixture can be obtained.

Through this, it can be replaced in real time according to the process change, it is easy to install in a narrow space, and the effect of reducing the installation cost burden can be obtained.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to a chemical liquid mixing manifold, which is applied to a chemical liquid supply device for supplying a mixture of at least two chemical liquids according to a desired ratio, and the chemical liquid mixing manifold for mixing and supplying the chemical liquids. The manifold 10 includes at least two injection holes 2 into which the chemical solutions are respectively injected; A mixing chamber (4) having the injection hole (2) coupled thereto to inject the chemical liquids and having a side surface of the circumferential surface; And a discharge port 6 for discharging the chemical liquid mixed from the mixing chamber 4 to the outside, wherein the injection hole 2 has an injection direction in contact with the circumferential surface of the mixing chamber 4. It is in contact with the mixing chamber 4 in contact with each of the inlet 2 has a configuration that is spaced apart from each other in the vertical direction of the mixing chamber (4).

That is, as shown in the specific example of Figure 2, the mixing chamber has a circumferential side, the inlet is coupled to contact the circumferential side by the chemical liquid introduced as shown by the dashed arrow to the circumferential side of the mixing chamber In accordance with the flow, it is possible to reduce the fluid resistance compared to the conventional manifold as shown in Figure 1, increase the distance to flow without being subjected to back pressure, thereby minimizing the occurrence of back pressure due to the inflow of the chemical liquid, mixing the flow In accordance with the rotational movement in the chamber is to increase the mixing characteristics to achieve a uniform mixing between the chemical liquids.

However, simply combining the inlet in the tangential direction does not minimize the interference between the incoming chemicals, so that the inlet in contact with the tangential direction is spaced apart from each other in the vertical direction of the mixing chamber to minimize the interference between them. It is necessary to be. The separation distance can be adjusted in various ranges, and as a specific example of this, as shown in FIG. 2, the distance between the centers of each injection hole is configured to about half the diameter of the injection hole, so that the configuration substantially overlaps the injection hole to some extent. As shown in FIG. 3, the distance between the centers of the respective injection holes may be larger than the diameter of the injection holes, so that the distances between the injection holes may not be substantially overlapped. That is, in the case of FIG. 2, when the rotational direction in the mixing chamber flows in a counterclockwise direction, all in a constant rotational direction, the flow of another layer adjacent to this in view of one inlet is applicable. It may also act as a form to help the inflow of the drug solution, it may be configured in this way, if you want to reduce the interference between each inlet as shown in Figure 3, it is possible to maintain a sufficient separation distance, In this case, it is not necessary for each inlet to be combined so that interference is essentially the same rotational direction for each layer, and if it is required to achieve the mixing in a short time as necessary, the inflow directions of the chemical liquids in each layer are mutually different. It can also be configured to be reversed.

The rotation of each layer is independent through the vertical spaced apart to minimize the interference as shown in FIGS. 3 to 4. For convenience, the inlet is not shown and is indicated by a thick solid arrow (shown with a dotted line when located behind the mixing chamber), and the flow of the injected chemical liquid is as shown by a thin dotted line arrow, and the inlet is to be manufactured. It may be disposed according to the number of chemical liquids required for the mixed composition, and may be further provided with a preliminary inlet if necessary. In addition, the inflowing chemical liquid may form the required chemical composition while the material remains intact after mixing, or may react with other incoming chemical liquid to form a third substance after mixing to form the required chemical composition. . In addition, the chemical liquid includes both liquid and colloidal forms, including liquid and powder.

Preferably, the inlet 2 is coupled to the mixing chamber 4 in contact with the circumferential surface and at the same time inclined at an acute angle with respect to the horizontal plane. Specific examples thereof are as shown in FIGS. 5 and 6 (b). Through this, the rotational distance of the flow can be further increased, so that the back pressure can be further improved, and the mixing efficiency can be further increased by generating the shangdong of the flow. In this case, the vertical space of each of the injection holes 2 is a rotational section R in the mixing chamber 4 of the chemical liquid injected from each of the injection ports 2 (the ellipse of the rotational section of the chemical liquid introduced from the injection port). The dotted line shows the ideal rotation, and the dotted line means the section that rotates close to the back side of the mixing chamber, and the solid line means the section that rotates close to the front side of the mixing chamber.) Mixing of the chemical liquids injected from each inlet 2 so as not to overlap each other It is preferable to be spaced apart from each other the rotation section (R) in the chamber (4). Through this, it is possible to minimize the interference between the influent chemicals, an example thereof is as shown in FIG.

In addition, as shown in the specific examples in Fig. 2 and 3 (b), each of the inlet 2 is preferably a circumference of the mixing chamber 4, when viewed from the top of the mixing chamber (4) Spaced apart at regular intervals along the direction is good to improve the mixing efficiency.

As described above, the mixing chamber has a circumferential side surface and an outlet for providing a mixed composition in the mixing chamber in order to arrange the inlet in contact with the surface and smoothly mix the introduced chemical liquid. .

Preferably, the outlet 6 of the mixing chamber 4 is located above the mixing chamber 4. This is because the mixed composition is discharged in the form of being pushed up by the pressure, the flow is stabilized, it is good because it is possible to obtain the effect that the mixing is completed and discharged. In addition, more preferably, as shown in Figure 4, each of the injection port (2), it is preferable that the injection port 2 of the chemical liquid having a lower specific gravity among the injected chemical liquid is further located below the vertical direction. In other words, the lowest specific gravity chemicals are injected into the lowermost portion in the order of the inlets arranged from the bottom to the uppermost portion, so that the mixing is more evenly performed in the mixed composition discharged to the upper portion. This is more useful in the case where the viscosity of the incoming chemical liquid is high, or reactive, such as when a third material is formed through the reaction between the incoming chemical liquid.

In addition, when high mixing performance is required as described above, a line mixer coupled to the outlet of the mixing chamber may be further included as necessary. Specific examples thereof are as shown in FIGS. 2 and 8. The line mixer may be a conventional line mixer (line mixer or in-line mixer or line static mixer). In the line mixer, as illustrated in FIG. 8, a plurality of turbulence forming members 8a are provided in the piping in left and right directions (directions that impede the flow of a fluid). The fluid flowing through collides with the turbulent flow forming member 8a to change the flow direction of the fluid, thereby converting the laminar flow into turbulent fluid and allowing the fluids to be uniformly mixed. The turbulence forming member 8a serves as a stirrer in the static pipe and is also called a mixing element. As shown in Fig. 8, the turbulence forming member 8a is a helical type mixing element having an oblique inclined surface so as to induce an oblique flow of raw material components with respect to the long axis of the pipe through which the fluid flows. Can be used. The turbulence forming member 8a is preferably made of a corrosive and durable material such as stainless steel.

Also preferably, in the inner surface of the mixing chamber 4, the inner surface of the mixing chamber 4 which is in contact with the outlet of the inlet 2 may be arranged in parallel in a direction perpendicular to the direction of injection of the plurality of protrusions 9 or the inlet 2. It is preferable that a plurality of riblets 9 'are formed. A specific example thereof is as shown in FIG. 6. FIG. 6A illustrates a case where a plurality of protrusions are disposed, and in addition to the case where a plurality of protrusions are disposed, a bead having a diameter of several micrometers to several millimeters may be applied to the inner surface to generate a minute protrusion shape on the inner surface. In this way, it is possible to form a fine turbulence in the interior without disturbing the flow of the flow itself, so that the mixing can be made well. Also, by forming a riblet as shown in FIG. 6 (b), an effect similar to that of the protrusion may be obtained.

When the manifold for chemical liquid mixing of the present invention is applied as described above, the occurrence of back pressure is remarkably reduced as compared with the case of applying the manifold as shown in FIG. 1, and the pressure in the pipe is measured with time. As a result, the effect of reducing the pressure fluctuation rate to 1/5 was obtained.

In another aspect, the present invention provides a real-time mixed chemical liquid supply apparatus having a manifold of the present invention, which includes at least two chemical liquid tanks (20a, 20b, 20c, 20d) for individually receiving the mixed chemical liquids; A quantitative transfer pump 30 connected to the chemical liquid tanks 20a, 20b, 20c, and 20d to individually transfer the chemical liquids according to a predetermined supply amount; The chemical liquid mixing manifold 10 of the present invention is continuously introduced from the chemical liquid tanks 20a, 20b, 20c, and 20d by the transfer pump 30, and mixed in a flow. A continuous mixing device 10 ′ through which the uniformly mixed chemical composition flows out; A composition detector 40 for analyzing the components of the chemical composition flowing out of the continuous mixing device 10 '; A controller (50) for controlling the supply amount of the metering pump (30) in accordance with the composition detected from the composition detector (40); And a feeder 60 for supplying the chemical composition produced in the continuous mixing device 10 'to the outside.

A specific example thereof is as shown in FIG. 8. This makes it possible to supply in real time while maintaining a constant composition ratio while mixing in the flow of the tube without the mixing tank.

The chemical liquid tank is a conventional tank commonly applicable to Figs. 7 to 8, and the chemical liquid mixing manifold is as described above, and as described above, the chemical liquid of the continuous mixing device 10 ' The mixing manifold 10 may further include a line mixer 8 coupled to the outlet 6 of the mixing chamber 4 to increase the mixing efficiency. In the line mixer 8, as described above, a plurality of turbulence forming members are installed in the pipe in the left and right directions so that the fluid flowing inside the pipe collides with the turbulence forming member so that the flow direction of the fluid is changed. Of course, it can have a form of mixing the fluid uniformly.

Next, the quantitative transfer pump 30 may be a transfer pump for supplying a conventional quantitative supply, preferably a pulsation-free pulsation oil supply to supply a constant amount of the chemical liquid according to a predetermined value while preventing the pulsation of the chemical liquid The pump may be advantageous for accurate volume control.

Next, the composition detector 40 may be applied to a conventional composition detector that can determine whether the desired composition ratio is obtained by analyzing the components of the mixed chemical composition, preferably using a near infrared (NIR) spectrometer It is good because it can secure high reliability and excellent real-time response, and is easy to install and change.

The composition ratio detected from the composition detector is input to the controller so that the controller can adjust the feed amount by appropriately adjusting the metering pump. The dotted line connection between the blocks shown in FIG. 8 means signal transmission, and the solid line connection means fluid flow.

The chemical composition prepared through the control of such a controller is finally provided through a feeder, and this may include a case in which the filling is directly connected to a filling machine or a process line of a manufacturing process.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various modifications and changes made by those skilled in the art without departing from the spirit and scope of the present invention described in the claims below. Changes are also included within the scope of the invention.

1 is a perspective view schematically showing a manifold shape for general chemical liquid mixing.

FIG. 2 is a perspective view schematically showing an embodiment of a chemical liquid mixing manifold of the present invention, in which a line mixer is combined.

Figure 3 is another embodiment for explaining the operation example of the chemical liquid mixing manifold of the present invention, schematically showing a perspective view and a plan view thereof.

4 is a schematic perspective view and a front view showing a flow of another embodiment for explaining the operation of the chemical liquid mixing manifold of the present invention shown in FIG.

5 is a front view schematically showing another embodiment of the manifold for chemical liquid mixing of the present invention.

Figure 6 is a partial cross-sectional view schematically showing other embodiments of the interior of the mixing chamber applied to the chemical liquid mixing manifold of the present invention.

7 is a view showing a system schematic diagram of a mixed chemical liquid supply apparatus having a conventional mixing tank.

8 is a diagram showing a system schematic diagram of a real-time mixed chemical liquid supply apparatus to which the chemical liquid mixing manifold of the present invention is applied.

Explanation of symbols on the main parts of the drawings

2: inlet port 4: mixing chamber

6: outlet 8: line mixer

8a: turbulence forming member 9: projection

9 ': riblet 10: manifold for chemical mixing

10 ': Continuous mixer 20a, 20b, 20c, 20d: chemical tank

30: metering pump 40: composition detector

50: controller 60: feeder (filler)

Claims (13)

A chemical liquid manifold for mixing and supplying at least two chemical liquids, which is applied to a chemical liquid supply device for mixing and supplying at least two chemical liquids in a desired ratio, The chemical mixture manifold At least two injection holes into which the chemical solutions are respectively injected; A mixing chamber in which the injection holes are coupled to inject the chemical liquids and have a side surface of a circumferential surface thereof; And, A discharge port for discharging the chemical liquid mixed to the outside from the mixing chamber, The injection port is in contact with the circumferential surface in contact with the circumferential surface to have an injection direction in contact with the circumferential surface of the mixing chamber, each injection port for chemical liquid mixing, characterized in that spaced apart from each other in the vertical direction of the mixing chamber Manifold. The method of claim 1, The injection port is coupled to the mixing chamber in contact with the circumferential surface and at the same time inclined at an acute angle with respect to the horizontal plane chemical liquid mixing manifold, characterized in that coupled to the mixing chamber. The method of claim 2, The chemical liquid mixing is characterized in that spaced apart from each other in the vertical direction spaced apart from the rotation interval in the mixing chamber of the chemical liquid injected from each injection port so that the rotating sections in the mixing chamber of the chemical liquid injected from the respective injection ports do not overlap each other. Manifold The method of claim 1, Each injection hole is a chemical liquid mixing manifold, characterized in that spaced at regular intervals in the circumferential direction of the mixing chamber, when viewed from the top of the mixing chamber. The method of claim 1, The outlet of the mixing chamber is a chemical liquid mixing manifold, characterized in that located above the mixing chamber. The method of claim 5, Each injection hole is a chemical liquid mixing manifold, characterized in that the injection hole of the chemical liquid having a lower specific gravity among the injected chemical liquid is located further lower than the vertical direction. 6. The method according to claim 1 or 5, The chemical liquid mixing manifold further comprises a line mixer coupled to the outlet of the mixing chamber. The method of claim 1, Among the inner surface of the mixing chamber, a plurality of protrusions or a plurality of riblets (pariblet) arranged in parallel in the direction perpendicular to the injection direction of the injection port is formed on the inner surface of the inlet contacting the outlet of the injection hole Manifold. At least two chemical liquid tanks individually containing the chemical liquids for mixing; A quantitative transfer pump connected to the chemical liquid tank for individually transporting each chemical liquid according to a predetermined supply amount; A continuous mixing device including the chemical liquid mixing manifold of claim 1, continuously flowing from the chemical liquid tank by the transfer pump, mixed in a flow, and flowing out of the chemical composition in which the chemical liquids are uniformly mixed; A composition detector for analyzing a component of the chemical composition flowing out of the continuous mixing device; A controller for controlling the supply amount of the metering pump according to the composition detected from the composition detector; And, Real-time mixed chemical liquid supply device comprising a feeder for supplying the chemical composition produced in the continuous mixing device to the outside. 10. The method of claim 9, The metering feed pump is a real-time mixed chemical liquid supply device, characterized in that the pulsation-free constant flow pump for supplying the chemical liquid in a predetermined amount according to a set value while preventing the pulsation of the chemical liquid. 10. The method of claim 9, The chemical liquid mixing manifold of the continuous mixing device further comprises a line mixer coupled to the outlet of the mixing chamber. 10. The method of claim 9, The line mixer is characterized in that a plurality of turbulence forming members are installed in the pipe in the left and right directions, so that the fluid flowing inside the pipe collides with the turbulence forming member to change the flow direction of the fluid, thereby uniformly mixing the fluids. Real time mixed chemical liquid supply device. 10. The method of claim 9, And the composition detector is a near infrared (NIR) spectrometer.

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