KR20110061888A - Apparatus for tray aligh of oled manufacturing - Google Patents

Abstract

PURPOSE: A tray align device for manufacturing an organic electroluminescence display device is provided to accurately clamp a donor substrate tray with a target substrate tray to be accurately aligned, thereby simplifying the structure of the tray align device. CONSTITUTION: A device body comprises a stage(101). A donor substrate tray for chucking a donor substrate and a target substrate tray for chucking a target substrate are arranged on a stage. A common clamp(200) is coupled with one side of the stage to clamp the target substrate tray and the donor substrate tray. A pushing unit(300) pressurizes a common clamp.

Description

Tray alignment apparatus for manufacturing organic light emitting display device {APPARATUS FOR TRAY ALIGH OF OLED MANUFACTURING}

The present invention relates to a tray alignment apparatus for manufacturing an organic light emitting display device, and more particularly, The present invention relates to a tray alignment device for manufacturing an organic light emitting display device, which can be accurately aligned by clamping a donor substrate tray for laminating (vacuum compression) and a target substrate tray with one driving means, thereby simplifying a structure.

An organic light emitting display (OLED) has a high response time with a response speed of 1 ms or less, low power consumption, and self-luminous, thereby providing a wide viewing angle, which is an advantage as an image display medium. In addition, low-temperature fabrication is possible, manufactured in a manner similar to the existing semiconductor process technology, and the manufacturing process is simple, attracting attention as a next-generation flat panel display device in the future.

An organic light emitting display device (or an organic light emitting display device) may be classified into a high molecular type device using a wet process and a low molecular type device using a deposition process according to a manufacturing process. The polymer type organic electroluminescent device is fabricated by laminating an organic layer including a light emitting layer by using an inkjet printing method or a spin coating method on a substrate including a pixel electrode, whereas the low molecular organic organic light emitting device is manufactured on a substrate including a pixel electrode. It is produced by laminating an organic layer including a light emitting layer by a vapor deposition process.

There are various methods of forming the organic layer including the light emitting layer, but there is a laser induced thermal image (LITI) method, which is a method using thermal transfer.

The laser thermal transfer method refers to a method of forming a pattern while a light source, which is a laser, is absorbed by a light-to-heat conversion layer of a donor substrate and converted into thermal energy, and the transfer layer of the donor substrate is transferred onto an element substrate by thermal energy.

According to this method, the donor substrate on which the transfer layer is formed and the region on which the transfer layer of the target substrate is to be applied are aligned at the correct position, and then, the donor substrate, for example, a donor film, is laminated on the target substrate. Next, transfer is performed by irradiating a light source to a donor film. Then a heat treatment process for solidifying and fixing the transferred material, The reversal and transfer process is in progress.

However, during such a process, the alignment of the position between the donor substrate and the target substrate is very important. If the alignment between the transfer layer of the donor substrate and the target substrate, which is the target to be transferred, is not properly aligned, laminating is not performed properly, and the organic layer of the transfer layer is not transferred to the correct position on the target substrate. This is because it leads to a defect.

In order to solve this problem, it is necessary to fix the donor substrate and the target substrate after the exact position alignment before each process. To this end, driving means for driving the fastening and releasing operations of the clamps clamping the donor substrate tray chucking the donor substrate on the stage and the target substrate tray chucking the target substrate are required separately. The problem is that the deposition and the before and after process is carried out in a vacuum state, there is a problem that the device structure can be complicated to separately provide such a clamp driving means in the vacuum chamber.

An object of the present invention is to provide an organic electroluminescent display device manufacturing tray which can be precisely aligned by clamping a donor substrate tray and a target substrate tray for laminating (vacuum pressing) with one driving means. It is to provide a device.

According to the present invention, there is provided an apparatus body having a stage on which a target substrate tray for chucking a target substrate and a donor substrate tray for chucking a donor substrate are disposed; A common clamp coupled to one side of the stage so as to be relatively rotatable to clamp the target substrate tray and the donor substrate tray; And a pushing unit provided in the apparatus main body to press the common clamp to achieve the tray alignment apparatus for manufacturing the organic light emitting display device.

The common clamp may include a donor substrate clamp for clamping the donor substrate tray; And a target substrate clamp coupled to the donor substrate clamp and integrally rotating together with the donor substrate clamp when the donor substrate clamp is rotated by a predetermined angle or more with respect to the stage.

The apparatus may further include a support connecting portion connecting the donor substrate clamp and the target substrate clamp.

The donor substrate clamp, the rotating body; A pressure body protruding from one side of the rotation body to pressurize the donor substrate tray when the rotation body is rotated; And it may include a film clamp spring disposed between the rotating body and the stage.

The target substrate clamp includes: a first body; A second body extending in a horizontal direction in the longitudinal direction of the first body; And a glass clamp spring disposed between the first body and the stage.

The support connecting portion, the connection receiving body that the donor substrate clamp is inserted and accommodated; And a connection body coupled to the connection receiving body and the target substrate clamp, respectively, to connect the connection receiving body and the target substrate clamp.

The connection receiving body may be formed with a through-hole formed so that the film clamp spring penetrates and contacts the stage.

The pushing unit may include: a multistage cylinder coupled to the apparatus main body having a multi-stage operation displacement; And a pushing roller which is connected to the multi-stage cylinder and presses one side of the common clamp to relatively rotate the shared clamp.

The multi-stage cylinder may be a two-stage cylinder.

The operation displacement of the second stage cylinder may be a first stage operation displacement for rotating the donor substrate clamp relative to the stage and a second stage operation displacement for rotating the donor substrate clamp and the target substrate clamp relative to the stage. have.

One side of the stage may be provided with a plurality of centering blocks for aligning the donor substrate tray and the target substrate tray.

The preset angle may be an angle when the rotation body contacts the connection body while the rotation body rotates relative to the connection accommodation body.

The target substrate may be glass, the target substrate tray may be a glass tray, the donor substrate may be a donor film, and the donor substrate tray may be a film tray.

According to the present invention, the donor substrate tray and the target substrate tray for laminating (vacuum pressing) with one driving means can be clamped and precisely aligned so that the structure can be simplified.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

1 is a perspective view of a tray alignment apparatus for manufacturing an organic light emitting display device according to an embodiment of the present invention, FIG. 2 is a perspective view of main parts of the apparatus main body of FIG. 1, FIG. 3 is an enlarged perspective view of part A of FIG. 4 is a diagram illustrating a centering block of a stage.

First, the manufacturing method of the organic light emitting display device will be described in detail as follows.

The organic light emitting display device is a next generation light emitting display device or device, and there are various methods of forming an organic layer including a light emitting layer, but a laser induced thermal image (LITI) which is a representative method will be described.

The laser thermal transfer method refers to a method in which a pattern is formed by transmitting a light source, which is a laser, through a light-to-heat conversion layer of a donor substrate, while the transfer layer of the donor substrate is transferred onto a target substrate.

The donor substrate generally has a structure in which a plurality of layers are formed on the base substrate, and includes a base substrate, a light-to-heat conversion layer positioned on the base substrate, and a transfer layer located between the base substrate and the light-to-heat conversion layer. Such donor substrates may be donor films or donor glass. In the present embodiment, the donor substrate will be described as a donor film and the target substrate will be limited to glass.

The light-to-heat conversion layer serves to convert the laser irradiated from the laser irradiation device into thermal energy, and the heat energy transfers the transfer layer onto the lower target substrate by changing the adhesion between the transfer layer and the light-to-heat conversion layer. Play a role.

The transfer process is generally carried out in the vacuum chamber 20. The stage 101 is provided in the vacuum chamber 20, and the donor film 12 is positioned on the target substrate and the upper portion of the target substrate on the stage 101. A laminating device for pressurization is positioned on the donor film 12.

The donor film 12 is aligned on the target substrate and then fixed. The donor film 12 preferably has a larger area than the target substrate.

This laminating process, which pressurizes on the donor film 12 in the vacuum chamber, is performed before the transfer process, and the laminating equipment is generally pressurized by using roller or gas pressurization or the like.

By performing the laminating process of pressurizing in a vacuum atmosphere as described above, the inflow of particles from the outside on the target substrate can be suppressed, and defects such as spots or defective pixels in the light emitting area of the organic light emitting display device can be prevented.

After the laminating process is performed, a transfer process of irradiating a laser to a region to be patterned is performed. In the region irradiated with the laser, the adhesive force of the transfer layer itself on the donor film 12 is lowered, the transfer layer in the region irradiated with the laser is peeled off, and the transfer layer is patterned on the target substrate.

After the patterning process, the target substrate disposed below is removed from the donor film 12, and the target substrate from which the donor film 12 is removed is moved to another stage. In addition, when the post-treatment process such as forming a counter electrode on the patterned organic film is performed, the organic light emitting diode is completed.

However, an important technical problem during the laminating process and the transfer process as described above is the mutual alignment problem between the donor film 12 and the target substrate. In other words, a method of chucking the donor substrate and the target substrate, that is, the donor film 12 and the glass, into a separate tray is being studied. In this case, the alignment problem between the donor film and the glass is chucking the donor film tray and the glass chucking the donor film. This results in the problem of aligning the glass trays with each other. To this end, there is a need for a tray aligning device capable of placing donor films and glasses in the correct positions.

The tray alignment apparatus 10 for manufacturing an organic light emitting display device according to the present invention performs a role of aligning a glass tray and a film tray in a vacuum facility to receive a glass and a donor film in a vacuum atmosphere to perform a laminating process. do.

Hereinafter, the tray alignment apparatus 10 for manufacturing the organic light emitting display device according to the present embodiment will be described in detail.

For reference, in the present embodiment, the target substrate is glass, the target substrate tray is a glass tray, the donor substrate is a donor film, and the donor substrate tray refers to a film tray.

The tray alignment apparatus 10 for manufacturing an organic light emitting display device includes a stage 101 on which a glass tray 13 and a film tray 11 are received and seated, as shown in FIGS. 1 to 4. The main body 100 and the pushing unit 300 is provided on the upper portion of the stage 101 to provide a pressing force downward.

The glass tray 13 and the film tray 11 are put into the stage 101 and are seated. Here, the film tray 11 may be a tray in which a film press glass (not shown) and the donor film 12 are chucked together to eliminate distortion of the donor film 12.

One side of the stage 101 is provided with a plurality of centering blocks 110 for aligning the film tray 11 and the glass tray 13. One centering block 110 is provided on the x-axis and the y-axis of the stage 101.

When the film tray 11 and the glass tray 13 are placed on the stage 101, the trays 11 and 13 are formed in tray receiving spaces in the plurality of centering blocks 110 forming the outer boundary of the stage 101. 120 is inserted into the format. One end of the x-axis and y-axis of each tray (11, 13) is in close contact with the centering block 110, respectively, and the other end of each tray (11, 13) is aligned through the common clamp 200.

One side of the stage 101 is provided with a common clamp 200 which rotates relative to the film tray 11 and the glass tray 13 received by the stage 101. In the present embodiment, one common clamp 200 is provided on the x-axis and the y-axis, and the configuration thereof is also the same.

The common clamp 200 is coupled to the film clamp 210 and the film clamp 210 to clamp the film tray 11, as shown in detail in Figures 1 to 4, the film clamp 210 is a stage When relative rotation is more than a predetermined angle relative to the 101, the glass clamp 220 and the film clamp 210 to rotate together integrally with the film clamp 210, and support the film clamp 210 and the glass clamp 220 It includes a support connecting portion 230 for connecting. Here, the film clamp 210 is a clamp for chucking the donor film tray 11, and the glass clamp 220 is a clamp for chucking a glass tray (not shown).

The film clamp 210, the rotating body 212, and is formed to protrude from one side of the rotating body 212, the pressing body 211 for pressing the film tray 11 when the rotating body 212, and, The film clamp spring 214 is disposed between the rotating body 212 and the stage 101.

The pushing body 320 of the pushing unit 300 is disposed on the rotating body 212, and when the pushing unit 300 is pushed downward, the pushing roller 320 and the rotating body 212 are moved. As a result of the line contact, the rotating body 212 is rotated.

The pressure body 211 integrally formed with the rotation body 212 is formed to protrude upward from the rotation body 212. This enables the clamping while pressing the film tray 11 by pressing the body 211 when the operation of the pushing roller 320 is released.

On a predetermined region of the pressing body 211, a rotating shaft (not shown) is provided so that the film clamp 210 can be rotated relative to the support connecting portion 230.

The film clamp spring 214 is disposed between the pressing body 211 and the stage 101. Through this, the film clamp 210 enables the clamping operation to be performed, which will be described in detail in the description of the support connection 230.

The glass clamp 220 includes a first body 221, a second body 222 extending in a horizontal direction in the longitudinal direction of the first body 221, and a space between the first body 221 and the stage 101. It includes a glass clamp spring 224 disposed in.

A glass clamp spring 224 is interposed between the bottom of the first body 221 and the stage 101, through which the first body 221 presses the glass tray 13.

In addition, the second body 222 is coupled to the connection body 232 of the support connector 230, the glass clamp 220 and the support connector 230 are connected to each other.

Like the film clamp 210, the glass clamp 220 is also disposed between the first body 221 and the stage 101 so that the clamping operation can be performed through the elastic restoring force.

On the other hand, the support connecting portion 230 is to interconnect the film clamp 210 and the glass clamp 220. To this end, the support connector 230 includes a connection receiving body 231 into which the film clamp 210 is inserted and accommodated, and a connection body 232 connecting the connection receiving body 231 and the glass clamp 220. .

The connection receiving body 231 is provided with a through hole (not shown) through which the film clamp spring 214 penetrates and contacts the stage 101.

Through this, the film clamp spring 214 is supported by contact with the stage 101 through the through hole (not shown) of the connection receiving body 231, even if the film clamp 210 is rotated to support the load 230 Will not be added.

In other words, when the cylinder shaft 312 extends downward by the first stage operation displacement in the second stage 310, only the film clamp 210 stages the glass clamp 220 and the support connecting portion 230 without rotating. Relative rotation is made with respect to (101). Even when the film clamp 210 is relatively rotated, no load is applied to the support connector 230. This is because one end of the film clamp spring 214 is connected to the rotating body 212 and the other end is formed through the through hole (not shown) of the connection receiving body 231 and is supported on the stage 101.

As a result, the film clamp 210 rotates relative to the connection receiving body 231, and the connection receiving body 231 and the film clamp 210 are formed from the moment when the bottom surface of the pressure body 211 contacts the connection receiving body 231. Will be rotated together.

In addition, when the cylinder shaft 312 extends downward by two-stage operation displacement in the two-stage cylinder 310, the film clamp 210, the support connecting portion 230, and the glass clamp 220 are integrally provided with the stage 101. You will be rotated against.

In such a configuration, when the pushing roller 320 of the pushing unit 300 is pressed to the first stage, the film clamp 210 is rotated within a preset angle, and the film clamp 210 is connected to the support connecting portion 230. The opponent will be rotated. Here, the preset angle means an angle at which the pressing body 212 contacts the connection receiving body 231 while being rotated relative to the connection receiving body 231.

Through this, by setting the operation displacement of the two-stage cylinder 310 to the first stage and the second stage, it is possible to release the clamping only the film clamp 210 by changing the rotation angle of the pressing body 211 corresponding to each operation displacement, The film clamp 210 and the glass clamp 220 may be released together with the clamping.

On the other hand, since the scope of the present invention is not limited thereto, the structure and method of allowing the film clamp 210 and the glass clamp 220 to rotate integrally during the two-stage operation displacement of the two-stage cylinder 310 may be appropriately changed. Can be.

As described above, a film clamp spring 214 and a glass clamp spring 224 are provided between the film clamp 210, the glass clamp 220, and the stage 101, respectively. These springs 214 and 224 are formed of the pushing unit 300 in which the film tray 11 and the glass tray 13 are chucked in the tray receiving space 120 and then applied to the pressing body 211 of the film clamp 210. When the pressing force is released, the film clamp 210 and the glass clamp 220 rotate by the elastic restoring force. Accordingly, the film clamp 210 and the glass clamp 220 clamp the film tray 11 and the glass tray 13.

Through such a configuration, the common clamp 200 operates by dividing the operation displacement of the two-stage cylinder 310 into one and two stages even if only one two-stage cylinder 310 is provided in the film clamp 210. Only 210 may be rotated relative to the stage 101 or relative to both the film clamp 210 and the glass clamp 220.

By simplifying the driving means as described above, there is an advantage of simplifying and simplifying the structure of the tray alignment device 10 for manufacturing an organic light emitting display device.

The pushing unit 300 is coupled to the two-stage cylinder 310 coupled to the apparatus body 101, the two-stage cylinder 310 and connected to one end of the film clamp 210 to the film clamp 210 relative It includes a pushing roller 320 to rotate.

The second stage cylinder 310 is provided outside the vacuum chamber 20, and includes a cylinder body 311 and a cylinder shaft 312 connected to the cylinder body 311. The cylinder shaft 312 of the second stage cylinder 310 penetrates through the vacuum chamber 20 and contacts the pressing body 211 of the film clamp 210. The operation displacement of the two-stage cylinder 310 is a one-stage operation in which the film clamp 210 is rotated relative to the stage 101, and the film clamp 210 and the glass clamp 220 are rotated relative to the stage 101. It consists of two stages of displacement.

On the other hand, the cylinder shaft 312 of the two-stage cylinder 310 exposed to the external environment vertically penetrates the area of the stage 101 inside the apparatus main body 10 in a vacuum state. Nevertheless, welded bellows 313 are provided on the cylinder shaft 312 so that the inside of the apparatus main body 10 is maintained in a vacuum state.

One end of the cylinder shaft 312 is connected to the cylinder body 311 and the other end is provided with a pushing roller 320. The pushing roller 320 is provided as a freely rotatable roller. The pushing roller 320 is in line contact with the pressing body 211 of the film clamp 210 and serves to press the film clamp 210 and the glass clamp 220 downward.

Through this, the second stage 310 is operated so that the friction does not occur between the pressing body 211 and the pushing roller 320 in contact with the pressing body 211 even if the pressing force acts downward, the pressing body 211 and the pushing roller ( While preventing the breakage of the 320, the particle generation in the vacuum chamber 20 is prevented.

In addition, the pressing roller 320 and the pressing body 211 by pressing the pressure without maintaining (slip) (no slip), the pressing force of the pushing unit 300 can be properly transmitted to the film clamp 210.

Through such a configuration, the pushing unit 300 can rotate the common clamp 200 relative to the stage 101 even when the pressing body 211 of the film clamp 210 is pressed, and the device structure is simplified. There is this.

However, since the configuration of the pushing unit 300 is not limited to the present embodiment, the configuration of the pushing unit 300 may be changed. When the number or shape of the pushing roller 320 is different, the pressing force of the pushing unit 300 may be set differently.

5 is a view illustrating the rotation of the film clamp during the first stage operation of the two-stage cylinder of the portion A of FIG. It is a figure which shows rotation.

Hereinafter, an operation process of the alignment device for clamping each tray in this configuration will be described in detail with reference to FIGS. 1 to 6.

First, when the second stage 310 is operated and the second stage is operated, the cylinder shaft 312 extends downward by the second stage displacement. The pushing roller 320 connected to one end of the cylinder shaft 312 rotates without sliding and presses the pressing body 211 of the film clamp 210. The film clamp 210 is then rotated in the counterclockwise direction. When the film clamp 210 is rotated due to the one-stage operation displacement, the film clamp 210 rotates by sliding on a rotation shaft (not shown).

Since the rotation angle is a predetermined angle, that is, the film clamp 210 and the connection receiving body 231 rotates integrally from the moment when the bottom surface of the pressing body 212 and the connection receiving body 231 contacts. Accordingly, the glass clamp 220 integrally coupled with the connection receiving body 231 and the support connecting portion 230 also rotates relative to the stage 101. As a result, the film clamp 210 and the glass clamp 220 are simultaneously clamped.

After that, the glass tray 13 is inserted into the stage 101 and seated. Then, when the two-stage cylinder 310 is operated up, the pressing of the film clamp 210 and the glass clamp 220 of the pushing roller 320 is released. As the glass clamp 220 rotates clockwise, the side portion of the glass tray 13 is fixed in surface contact with the plurality of centering blocks 110, and one end of the glass clamp 220 and the glass tray 13 is fixed. Will come into contact with each other. As a result, the glass tray 13 is centered and fixed.

Next, when the first stage operation is performed in the second stage cylinder 310, the pushing roller 320 pressurizes the pressing body 211 of the film clamp 210. At this time, the film clamp 210 rotates at a predetermined angle or less. . Therefore, only the film clamp 210 rotates relative to release the clamping, and the glass clamp 220 is still clamped to the glass tray 13.

Thereafter, the film tray 11 is inserted into and placed on the stage 101. Then, when the up (first stage of the second stage) operation of the two-stage cylinder 310 proceeds, the pushing roller 320 releases the pressing body 211 of the film clamp 210 and the film clamp 210 watches. As a result of the rotation in the direction, the film tray 11 is caused to be centered and clamped.

Since the trays are fixed by the clamping method as described above, the driving rate of the alignment and the stage 101 does not occur, and thus the process rate can be increased, and the film clamp 210 can be increased by only pressing the pressing body 211 as a simple structure. And the glass clamp 220 can be operated to facilitate alignment.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

1 is a perspective view of a tray alignment apparatus for manufacturing an organic light emitting display device according to an exemplary embodiment of the present invention.

2 is a perspective view illustrating main parts of the apparatus main body of FIG. 1.

3 is an enlarged perspective view of a portion A of FIG. 2.

4 is a diagram illustrating a centering block of a stage.

5 is a view showing the rotation of the film clamp during the first stage operation of the two-stage cylinder in the portion A of FIG.

FIG. 6 is a view illustrating a rotation of the film clamp and the glass clamp during the two-stage operation of the two-stage cylinder in the portion A of FIG.

* Explanation of symbols for the main parts of the drawings

10: device body 100: stage

110: centering block 120: tray receiving space

200: public clamp 210: film clamp

211: pressurized body 220: glass clamp

221: first body 222: second body

230: support connecting portion 231: donor substrate clamp support body

300: pushing unit 310: two-stage cylinder

320: pushing roller

Claims (13)

An apparatus body having a stage on which a target substrate tray for chucking a target substrate and a donor substrate tray for chucking a donor substrate are disposed; A common clamp coupled to one side of the stage so as to be relatively rotatable to clamp the target substrate tray and the donor substrate tray; And And a pushing unit provided in the apparatus main body to press the common clamp. The method of claim 1, The common clamp, A donor substrate clamp for clamping the donor substrate tray; And And a target substrate clamp coupled to the donor substrate clamp, the target substrate clamp being integrally rotated together with the donor substrate clamp when the donor substrate clamp is rotated by a predetermined angle or more with respect to the stage. Tray Alignment Unit. The method of claim 1, And a support connecting portion for connecting the donor substrate clamp and the target substrate clamp to each other. The method of claim 2, The donor substrate clamp, Rotating body; A pressure body protruding from one side of the rotation body to pressurize the donor substrate tray when the rotation body is rotated; And And a film clamp spring disposed between the rotatable body and the stage. 5. The method of claim 4, The target substrate clamp, A first body; A second body extending in a horizontal direction in the longitudinal direction of the first body; And And a glass clamp spring disposed between the first body and the stage. The method of claim 5, The support connection portion, A connection receiving body into which the donor substrate clamp is inserted and received; And And a connection body coupled to the connection receiving body and the target substrate clamp, respectively, to connect the connection receiving body and the target substrate clamp. The method of claim 6, And a through-hole formed in the connection housing body so that the film clamp spring penetrates and is in contact with the stage. The method of claim 1, The pushing unit, A multistage cylinder coupled to the apparatus body, the operation displacement of which is multistage; And And a pushing roller which is connected to the multi-stage cylinder and presses one side of the common clamp to relatively rotate the shared clamp. The method of claim 8, The multi-stage cylinder is a tray alignment device for manufacturing an organic light emitting display device, characterized in that the two-stage cylinder. 10. The method of claim 9, The operation displacement of the two-stage cylinder is a one-stage operation displacement for rotating the donor substrate clamp relative to the stage and a two-stage operation displacement for rotating the donor substrate clamp and the target substrate clamp relative to the stage. A tray alignment device for manufacturing an organic light emitting display device. The method of claim 1, One side of the stage is a tray alignment device for manufacturing an organic light emitting display device, characterized in that a plurality of centering blocks for aligning the donor substrate tray and the target substrate tray. The method of claim 2, The predetermined angle is a tray alignment device for manufacturing an organic light emitting display device, characterized in that an angle when the rotating body rotates relative to the connecting receiving body and the rotating body contacts the connecting receiving body. The method of claim 1, The target substrate is glass, the target substrate tray is a glass tray, The donor substrate is a donor film, and the donor substrate tray is a film tray, characterized in that the tray alignment device for manufacturing an organic light emitting display device.

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