KR20110060287A - Pivot bearing and turbo molecular pump having the sam - Google Patents

Pivot bearing and turbo molecular pump having the sam Download PDF

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Publication number
KR20110060287A
KR20110060287A KR1020090116830A KR20090116830A KR20110060287A KR 20110060287 A KR20110060287 A KR 20110060287A KR 1020090116830 A KR1020090116830 A KR 1020090116830A KR 20090116830 A KR20090116830 A KR 20090116830A KR 20110060287 A KR20110060287 A KR 20110060287A
Authority
KR
South Korea
Prior art keywords
rotating body
pivot bearing
rotating shaft
guide ring
rotating
Prior art date
Application number
KR1020090116830A
Other languages
Korean (ko)
Inventor
이부락
Original Assignee
주식회사 에스비비테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 에스비비테크 filed Critical 주식회사 에스비비테크
Priority to KR1020090116830A priority Critical patent/KR20110060287A/en
Publication of KR20110060287A publication Critical patent/KR20110060287A/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C11/00—Pivots; Pivotal connections
    • F16C11/04—Pivotal connections
    • F16C11/06—Ball-joints; Other joints having more than one degree of angular freedom, i.e. universal joints
    • F16C11/0685—Manufacture of ball-joints and parts thereof, e.g. assembly of ball-joints
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

PURPOSE: A pivot bearing and a turbo-molecular pump comprising the same are provided to enhance durability since a rotating shaft is supported in the radial direction of a rotating shaft. CONSTITUTION: A pivot bearing comprises a rotating body(110), a base(120), and a guide ring(130). The rotating body is prepared on the end of a rotating shaft(30). The base comprises a space(125) for supporting the rotating body in the axis direction of the rotating shaft. The guide ring is prepared on the base to support the rotating body in the radial direction of the rotating shaft. The rotating body is formed in a partial globe shape by an area making contact with the space and another area making contact with the guide ring.

Description

Pivot bearings and turbomolecular pumps including the same {PIVOT BEARING AND TURBO MOLECULAR PUMP HAVING THE SAM}

The present invention relates to a pivot bearing and a turbomolecular pump including the same, and more particularly, to a pivot bearing and a turbomolecular pump including the improved bearing structure of the rotating shaft.

Generally, a pivot bearing is a kind of bearing which supports a rotating shaft axially. The pivot bearing includes a rotating body at the end of the rotating shaft and a base supporting the lower surface of the rotating body. The rotating body is accommodated in the base by the rotation of the rotating shaft to rotate.

However, such a conventional pivot bearing has a relatively large contact area between the rotating body and the base portion, which may easily wear out and deteriorate reliability.

In addition, the conventional pivot bearing does not have a configuration for supporting the rotating body in the radial direction of the rotating shaft has a structure that can not support the rotating shaft in the radial direction.

The problem to be solved by the present invention is to provide a pivot bearing with improved durability.

On the other hand, another problem to be solved by the present invention is to provide a pivot bearing and an improved turbomolecular pump including the same.

The problem to be solved in accordance with the present invention, in the pivot bearing for supporting a rotating shaft, a rotating body provided at the end of the rotating shaft; A base provided in contact with the rotating body in the axial direction of the rotating shaft, provided with a partial spherical groove, and having a rotating body accommodating part in one point contact with the rotating body; It is achieved by including a guide ring provided in the base to contact the support in the radial direction of the rotating shaft.

The rotating body accommodating portion is provided with a partially spherical groove and is characterized in one-point contact with the rotating body.

The rotating body is characterized in that at least a region in contact with the rotating body receiving portion and the region in contact with the guide ring is provided in a partial sphere.

Preferably, the rotor and the guide ring are in line contact.

At least one of the base, the rotating body, and the guide ring may be made of a material including at least one of ceramic, tungsten carbide, ruby, and sapphire.

On the other hand, another problem to be solved, according to the present invention, in the turbomolecular pump, the fixed blade and the rotary blade; A rotating shaft for transmitting rotational force to the rotating blades; It is achieved by including the above-described pivot bearing for supporting the end region of the axis of rotation.

According to the present invention, it is possible to provide a pivot bearing and an improved turbomolecular pump including the same.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In order to clearly describe the present invention, parts irrelevant to the description are omitted, and like reference numerals designate like elements throughout the specification.

Hereinafter, with reference to the accompanying drawings, a pivot bearing 100 and a turbomolecular pump 1 including the same according to a preferred embodiment of the present invention will be described in detail.

1 is a partial cutaway perspective view of a turbomolecular pump 1 having a pivot bearing 100 according to a preferred embodiment of the present invention.

The turbomolecular pump 1 according to the present invention supports a fixed blade 10 and a rotary blade 20, a rotary shaft 30 for transmitting rotational force to the rotary blade 20, and a lower region of the rotary shaft 30. Pivot bearing 100. Here, all configurations except the pivot bearing 100 may be applied to a variety of known structures, and will not be described in detail because it is irrelevant to the subject matter of the present invention.

2 and 3, the pivot bearing 100 according to the preferred embodiment of the present invention will be described in detail. Prior to the description, in this embodiment, the pivot bearing 100 is shown to be applied to the turbomolecular pump 1 of the magnetic levitation type, it will be understood that it can also be applied to the turbomolecular pump of the ball bearing type.

2 is an exploded perspective view showing a pivot bearing 100 according to a preferred embodiment of the present invention, Figure 3 is a cross-sectional view showing a pivot bearing 100 according to a preferred embodiment of the present invention.

The pivot bearing 100 according to the present embodiment includes a rotating body 110, a base 120, and a guide ring 130.

The rotating body 110 is provided at the lower end of the rotating shaft 30 disposed in the vertical direction. The rotating body 110 rotates together with the rotating shaft 30. The rotating body 110 may be integrally formed with the rotating shaft 30. However, as shown in FIGS. 2 and 3, the rotating body 110 may be provided to be fitted by the protrusion 35 and the protrusion receiving portion 115 having a non-circular cross-sectional shape with the rotation shaft 30. have.

In the present embodiment, the projection 35 having a non-circular cross-sectional shape is provided at the lower end of the rotary shaft 30, the projection accommodating the projection 35 of the rotary shaft 30 is fitted to the upper portion of the rotating body 110 Part 115 is formed. On the contrary, the upper part of the rotating body 110 is provided with a projection 35 having a non-circular cross-sectional shape, the lower end of the rotating shaft 30, the projection receiving portion (34) is fitted with the projection 35 of the rotating shaft 30 ( 115 may be formed.

The rotating body 110 is in contact with and supported by the rotating body receiving portion 125 of the base 120 which will be described later. The rotating body 110 is preferably provided at least partially spherical. It is preferable that the cross-sectional shape along the axial direction of the rotating shaft 30 is the semicircle or more, and, as for the rotating body 110, the cross-sectional shape is more preferable. The rotating body 110 may have an ellipse in cross-sectional shape along the axial direction of the rotating shaft 30, but is preferably a round shape. That is, the rotating body 110 is most preferably provided as a true sphere. The reason for this is that, as compared with providing the rotating body 110 in a hemisphere, providing a spherical sphere can increase the precision in the manufacturing process. However, the rotating body 110 may be provided in a top shape.

The lower end area of the rotating body 110 is in contact with the rotating body receiving portion 125 of the base 120, the contact is supported in the radial direction of the rotating body 110 in the guide ring 130. Thus, the contact area of the rotor 110 in contact with the rotor accommodating part 125 and the guide ring 130 may be minimized to improve wear resistance.

Rotating body 110 is preferably made of a material containing at least one of a ceramic, tungsten carbide, ruby and sapphire strong wear resistance than other materials. The base 120 is disposed below the rotating body 110.

Base 120 is provided in a plate shape, in this embodiment is provided as a disc. The base 120 is disposed below the rotating body 110 along the axial direction of the rotating shaft 30. The upper plate surface of the base 120 is formed with a rotating body receiving portion 125 having an upper portion.

The rotor accommodating part 125 accommodates a lower region of the rotor 110. The rotating body accommodating part 125 is formed to be inclined downward with respect to one point area. In this embodiment, the rotor accommodating part 125 is formed as a groove of a partial sphere. Here, the lower end region of the rotor accommodating part 125 contacts and supports the lower end region of the rotor 110. It is preferable that the radius of the rotating body accommodating part 125 is larger than the radius of the rotating body 110. In other words, it is preferable that the rotor accommodating part 125 has a flatness, that is, a flatness index is higher than that of the rotor 110.

The rotating body 110 and the rotating body accommodating portion 125 have one point contact, and preferably have a small contact area close to the point contact. Accordingly, the contact area of the rotating body 110 in contact with the rotating body accommodating part 125 may be minimized to improve wear resistance.

Lubricant may be accommodated in the rotor accommodating part 125. Thus, wear resistance of the rotor 110 and the base 120 may be improved, and frictional heat due to the rotation of the rotor 110 may be cooled. However, when the non-lubricated structure is possible, such as when the rotor 110 is made of a ceramic material, the lubricant may not be provided.

The base 120 may be made of a material including at least one of ceramics, tungsten carbide, ruby and sapphire, which are more wear resistant than other materials. The base 120 is preferably made of a different material from the rotating body 110, but may be provided of the same material as the rotating body 110. The guide ring 130 is disposed above the base 120.

The guide ring 130 is provided on the base 120. The guide ring 130 is provided in a ring shape, and an inner circumferential surface of the guide ring 130 contacts and supports the rotating body 110 in the radial direction of the rotation shaft 30. 2 and 3, when the rotating body 110 is provided in a spherical shape, the guide ring 130 preferably contacts and supports the central region of the rotating body 110 in the vertical direction. Here, the rotating body 110 and the guide ring 130 is preferably in line contact. Thus, the contact area of the rotating body 110 in contact with the guide ring 130 can be minimized to improve wear resistance.

The guide ring 130 may be formed of a material including at least one of ceramics, tungsten carbide, ruby, and sapphire, which are more resistant to wear than other materials. The guide ring 130 is preferably made of a different material from the rotating body 110, but may be provided of the same material as the rotating body 110. In addition, the guide ring 130 may be provided with a material different from the base 120, or may be provided with the same material as the base 120. In this embodiment, the rotating body 110 is provided with a ceramic material, and the base 120 and the guide ring 130 are provided with sapphire or ruby. Of course, each component may be provided with a metal material such as steel or stainless steel.

On the other hand, the pivot bearing 100 according to the present embodiment may further include a bearing cover 140. The bearing cover 140 supports the guide ring 130 with respect to the base 120. The bearing cover 140 has a rotating shaft passage hole 145 so that the rotating shaft 30 passes, and is fitted to the base 120. The base 120 may have a ring accommodating part 127 for accommodating the guide ring 130 because the peripheral area of the rotor accommodating part 125 is deeply recessed relative to the height of the guide ring 130. The bearing cover 140 is fitted to the inner circumferential surface of the side wall 129 of the ring receiving portion 127. Here, the sealing member 150 may be mounted between the side wall 129 of the ring receiving portion 127 and the bearing cover 140. Thus, foreign matters may be prevented from entering the peripheral area of the rotating body 110, and when lubricating oil is applied around the rotating body 110, the lubricating oil may be prevented from scattering from the rotating body accommodating part 125. Will be.

On the other hand, in the present embodiment has been described and illustrated that the rotation shaft 30 is disposed in the vertical direction, but is not limited to this, the rotation shaft 30 may be arranged to have a horizontal direction or a predetermined angle.

In addition, although the pivot bearing 100 according to the present embodiment is described and illustrated as being installed at the lower end of the rotating shaft 30, the pivot bearing 100 may be installed at the upper end of the rotating shaft 30.

Although some embodiments of the invention have been shown and described, it will be apparent to those skilled in the art that modifications may be made to the embodiment without departing from the spirit or spirit of the invention. . It is intended that the scope of the invention be defined by the claims appended hereto and their equivalents.

1 is a partially cutaway perspective view of a turbomolecular pump according to a preferred embodiment of the present invention;

2 is an exploded perspective view showing a pivot bearing according to a preferred embodiment of the present invention;

3 is a cross-sectional view showing a pivot bearing according to a preferred embodiment of the present invention.

* Description of the symbols for the main parts of the drawings *

1: turbomolecular pump 10: fixed wing

20: rotating blade 30: rotating shaft

100: pivot bearing 110: rotating body

120: base 125: rotating body receiving portion

127: ring receiving portion 130: guide ring

140: bearing cover 150: sealing member

Claims (5)

In a pivot bearing supporting a rotating shaft, A rotating body provided at an end of the rotating shaft; A base provided in contact with the rotating body in the axial direction of the rotating shaft, provided with a partial spherical groove, and having a rotating body accommodating part in one point contact with the rotating body; And a guide ring provided in the base to contact and support the rotating body in a radial direction of the rotating shaft. The method of claim 1, And the rotor has at least a region in contact with the rotor accommodating portion and a region in contact with the guide ring in a partial spherical shape. The method of claim 2, And the rotating body and the guide ring are in line contact with each other. The method of claim 3, wherein At least one of the base, the rotating body and the guide ring is a pivot bearing, characterized in that provided with a material comprising at least one of ceramic, tungsten carbide, ruby and sapphire. In the turbomolecular pump, A fixed wing and a rotating wing; A rotating shaft for transmitting rotational force to the rotating blades; A turbomolecular pump comprising a pivot bearing according to any one of claims 1 to 4 for supporting an end region of the rotary shaft.
KR1020090116830A 2009-11-30 2009-11-30 Pivot bearing and turbo molecular pump having the sam KR20110060287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020090116830A KR20110060287A (en) 2009-11-30 2009-11-30 Pivot bearing and turbo molecular pump having the sam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090116830A KR20110060287A (en) 2009-11-30 2009-11-30 Pivot bearing and turbo molecular pump having the sam

Publications (1)

Publication Number Publication Date
KR20110060287A true KR20110060287A (en) 2011-06-08

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Family Applications (1)

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KR1020090116830A KR20110060287A (en) 2009-11-30 2009-11-30 Pivot bearing and turbo molecular pump having the sam

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021102128A (en) * 2015-03-18 2021-07-15 アビオメド オイローパ ゲーエムベーハー Blood pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021102128A (en) * 2015-03-18 2021-07-15 アビオメド オイローパ ゲーエムベーハー Blood pump

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