KR20110056765A - Case for keeping mask of semiconductor and lcd manufacturing - Google Patents

Abstract

The present invention relates to a mask storage case for a semiconductor and LCD process, and more particularly, a mask is fixed to only one of the pair of cases without flow, so that the mask regardless of the coupling force of the pair of cases coupled to each other The present invention relates to a mask storage case for a semiconductor and LCD process in which a constant is fixed.

To this end, the mask is supported, the first case is provided with a plurality of mask coupling portion on the edge; a second case for shielding the mask supported on the first case; respectively installed on the circumferential surface of the first case and the second case A locking member for coupling the first case and the second case to each other, wherein the mask coupling portion is configured to secure the mask by compressing a seating portion on which one edge and a border of the mask are seated, and the other edge of the mask. It provides a mask storage case for a semiconductor and LCD process comprising a restraining portion, and a fastening member for fastening to each other through the restraining portion and the seating portion.

Mask, storage case, mask coupling part, seating part, binding part, fastening member, adhesive member for semiconductor and LCD process

Description

Case for keeping mask of semiconductor and LCD manufacturing

The present invention relates to a mask storage case for a semiconductor and an LCD process, and more particularly, a mask for a semiconductor and an LCD process such that a mask is firmly coupled to any one case regardless of a clamping force of a pair of cases. It's about a storage case.

In recent years, in the manufacturing process of display apparatuses, such as LCD and PDP, the increase in the number of panel surface attachments is common as a method of manufacturing cost reduction, and the size of the panel mother substrate tends to enlarge.

In this connection, blank masks and photomasks used for pattern transfer are also increasing in display manufacturing processes such as LCDs and PDPs.

In this case, the blank mask is used as a raw material of the photomask, and the photomask plays a role as a photographic plate in the production of semiconductor chips, which is a kind of design drawing in which a pattern circuit is designed in various ways on a glass plate coated with a material such as chromium. Can be.

At this time, with the development of science and technology, semiconductor chips have also been highly integrated, and patterns formed on masks have also been gradually integrated, requiring more fineness and high precision and high density.

In producing and storing such a mask, the mask should not be exposed to foreign matters or static electricity so as not to damage the fine pattern circuit of the mask, as well as to be protected from external impact.

Therefore, according to the type and size of the mask, it is possible to stably store the mask by using each of the various types of mask storage case.

Hereinafter, a mask storage case for a semiconductor and an LCD process according to the prior art will be described with reference to FIGS. 1 to 2B.

 The mask storage case for the semiconductor and the LCD process is a pair of first and second cases (10, 20) to be assembled with each other, the bracket is fixed to the inside of the first case 10 to fix the mask for the semiconductor and LCD process ( 30 and a locking member 40 fixed to the outside of the cases 10 and 20 to couple the pair of first and second cases 10 and 20 to each other, and installed at the lower end of the second case 20. It is composed of a moving wheel (50).

In this case, the bracket 30 is installed at the edge of the first case 10 in which the mask for semiconductor and LCD process is accommodated, and the fixing groove 31 for receiving the edge of the mask for semiconductor and LCD process as shown in FIG. 2A. ).

In addition, as shown in FIG. 1, the close contact portion 60 is formed at each corner of the first and second cases 10 and 20.

The close contact portion 60 is a portion where each corner portion of the mask for semiconductor and LCD processes is seated, and each close contact portion 60 is provided with a buffer member 70 as shown in FIG. 2B.

In addition, the locking member 40 may be installed in plural along the circumferential surfaces of the first and second cases 10 and 20, and the locking portion 41 may be installed in the first case 10 and the second case 20. The hook hook 42 for fastening the hook portion 11 is installed.

And, the movement wheel 50 is provided for the convenience of the movement of the case (10, 20), a plurality of installed on the lower end of each of the first case 10 and the second case 20 to be balanced.

The state in which the mask for semiconductor and LCD process is accommodated in the mask storage case for semiconductor and LCD process having the above configuration will be described with reference to FIGS. 2A and 2B.

First, each corner of one surface of the mask for semiconductor and LCD process is seated on the buffer member 70 of the contact portion 60, and the four sides of the mask for semiconductor and LCD process are inserted into the fixing groove 31 of the bracket 30. .

Thereafter, the first case 10 is covered using the second case 20 to protect the masks for semiconductor and LCD processes.

At this time, each corner of the other surface of the mask for semiconductor and LCD process is pressed to the buffer member 70 of the contact portion 60 provided in the second case 20.

Thereafter, the cases 10 and 20 are coupled to each other by using the locking member 40.

As a result, the storage of the mask for semiconductor and LCD process is completed, and the user moves the mask storage case for the semiconductor and LCD process to store it in a predetermined place.

However, the mask storage case for the conventional semiconductor and LCD process has the following problems.

First, looking at the state in which the mask for semiconductor and LCD process is stored, it can be seen that the close contact portion 60 compresses one surface and the other side of the mask for semiconductor and LCD process due to the coupling between the cases 10 and 20.

That is, if the cases 10 and 20 are not bonded to each other, since the compressive force for supporting the mask for the semiconductor and the LCD process does not occur, the mask for the semiconductor and the LCD process is completely formed in the cases 10 and 20. It is not stored.

Accordingly, in order to store the semiconductor and LCD masks without flow, the pair of cases 10 and 20 must be coupled to each other.

When the second case 20 is opened, the pressing force of the contact part 60, which presses the mask for the semiconductor and the LCD process, is released, so that the coupling to the mask for the semiconductor and the LCD process is also released.

Second, when the case 10, 20 is moved to a predetermined place, when the surface is uneven surface, even if the contact portion 60 is pressing the mask for the semiconductor and LCD process, the play is caused by vibration Done.

In this case, the compressive force of the close contact portion 60 is proportional to the fastening force of the locking members 40 installed in the cases 10 and 20, and when the fastening force of the locking member 40 is weakened, it is applied to the masks for semiconductor and LCD processes. The fixing power may be weakened.

Accordingly, the friction between the close contact portion 60 and the mask and bracket for the semiconductor and LCD process 30 and the mask for the semiconductor and LCD process occurs a problem that may damage the mask for the semiconductor and LCD process.

Third, as the buffer member 70 provided on the contact portion 60 of the first case 10 and the second case 20 compresses one corner surface and the other surface of the mask for semiconductor and LCD process, the semiconductor and LCD Markings of the buffer member 70 may be formed in the process mask.

In this case, when the blank mask is stored, the process of manufacturing the photomask may not be performed smoothly according to the formation of the marks of the buffer member 70, and the defect rate of the completed photomask is increased.

The present invention has been made to solve the above problems, an object of the present invention is to ensure that the fixing to the mask is made independently in any one case, regardless of the tightening force between the pair provided, the coupling to the mask is It is to provide a mask storage case for semiconductor and LCD process to maintain a solid and stable.

To this end, the mask is supported, the first case is provided with a plurality of mask coupling portion on the edge; a second case for shielding the mask supported on the first case; respectively installed on the circumferential surface of the first case and the second case Locking member for coupling the first case and the second case to each other, comprising: The mask coupling portion, the seating portion is seated on one side and the edge of the mask, and the other edge of the mask is pressed to secure the mask Provides a mask storage case for a semiconductor and LCD process comprising a restraining portion, and a fastening member for fastening to each other by passing through the restraining portion and the seating portion.

At this time, it is preferable that provisional assembly means for provisional assembly is further provided between the seating portion and the restriction portion.

At this time, the provisional assembly means, it is preferable that the coupling portion formed on the other of the insertion portion formed in any one of the seating portion and the restraining portion inserted into the insertion portion.

At this time, the provisional assembly means, it is preferable that the rotating portion is made to be rotated toward the seating portion.

At this time, it is preferable that the rotating part includes a rotating protrusion formed at both ends of the restraint part, and a fixed body having a rotating groove for rotating the rotating protrusion.

At this time, the rotation groove, it is preferable that the guide groove is formed with an opening for guiding the insertion of the rotational projection of the restraint portion, and the coupling groove extending from the guide groove coupled to the rotational projection.

In addition, the contact member is preferably Teflon (teflon).

At this time, it is preferable that a flexible hose is interposed between the contact member and the restraint part and the contact member and the seating part.

At this time, it is preferable that the portion corresponding to one surface and the other surface of the contact member is inclined in a state spaced apart from the mask.

In addition, it is preferable that a protrusion formed toward the fastening member is formed at a portion of the second case corresponding to the fastening member of the mask coupling portion to interfere with the loosening of the fastening member.

According to the mask storage case for semiconductor and LCD process according to the present invention has the following effects.

First, the mask coupling part is installed in the first case, so that the mask coupling part independently supports the mask for semiconductor and LCD process.

That is, the mask for semiconductor and LCD process can be firmly fixed regardless of the fastening force of the first case and the second case.

Accordingly, even when the vibration occurs in the case and the fastening force of the second case to the first case is weakened, the fixing force to the mask for semiconductor and LCD process can be maintained.

Second, the contact member adhered to the edge and the other surface of the mask for the semiconductor and LCD process does not leave a mark on the surface of the mask for the semiconductor and LCD process, so that the process for the mask for the semiconductor and LCD process is poor due to the marks. It doesn't happen.

Hereinafter, a mask storage case (hereinafter, referred to as a "storage case") for a semiconductor and an LCD process according to a preferred embodiment of the present invention will be described with reference to the accompanying Figures 3 to 4b.

The storage case is composed of a pair of first case 100 and the second case 200, the locking member 300 is installed on the peripheral surface of the first case 100 and the second case 200.

The first case 100 is a portion on which a mask for semiconductor and LCD process (hereinafter referred to as a 'mask') is seated and has a rectangular shape.

At this time, a predetermined space is formed inside the first case 100, the mask coupling portion 110 for supporting the mask, the reinforcing partition wall 120 for reinforcing the first case, and each corner The close contact portion 60 is installed.

Unlike the prior art, the mask coupling unit 110 serves to support the mask alone regardless of the coupling of the second case 200.

In this case, the mask coupling unit 110 is installed at each corner and edge of the first case 100, the number of installation is not limited.

In this case, only the mask coupling part 110 may be installed without the contact part 60.

Meanwhile, the mask coupling part 110 includes a seating part 120, a restraining part 130, a fastening member 140, and an adhesive member 150.

The seating part 120 is a portion at which one edge of the mask and an edge are seated, and a contact surface 121 to which one surface of the mask contacts, and an end surface 122 that is bent from the contact surface 121 and the edge of the mask contacts. Is done.

That is, the shape of the seating part 120 is formed in the form of 'L' when viewed from the side.

Meanwhile, a fastening hole 123 for fastening the fastening member 150 is formed at the front of the seating part 120.

In addition, the contact surface 121 and the end surface 122 of the seating portion 120 is formed with the contact member grooves 121a and 122a, which will be described later, respectively, and the contact member grooves 121a and 122a may have soft materials. It is formed only when provided with a hose.

The restraint unit 130 is fastened to the seating unit 120 to fix the mask, and is provided separately from the seating unit 120.

At this time, the shape of the restraint unit 130 is not limited, and may be any one that can compress the other surface of the mask seated on the seating portion 120.

At this time, the fastening hole 133 for fastening the fastening member 150 is also formed in the restraint part 130, and the fastening hole 133 corresponds to the fastening hole 123 of the seating part 120. Is done.

In addition, the contact member groove 131 is also formed in the restraint unit 130, and is formed only when a soft hose is provided.

On the other hand, between the mounting portion 120 and the restraining portion 130 is preferably provided with a temporary assembly means.

Temporary assembling means is to perform pre-assembly before the fastening member 140 fastens the seating part 120 and the restraining part 130, and serves to facilitate the fastening of the fastening member 140.

As shown in FIGS. 3 to 4B, the provisional assembly means includes a pivoting part 160 such that the restraining part 130 can be rotated toward the seating part 120.

The rotating part 160 includes a rotating protrusion 161 formed at both ends of the restricting part 130 and a fixing body 163 having a rotating groove 162 to which the rotating protrusion 161 is coupled.

At this time, the fixing body 163 is preferably formed at the lower end of the seating part 120, which is a portion corresponding to the rotation protrusion 161 of the restraining part 130.

At this time, the rotation groove 162 is composed of a guide groove 162a and the coupling groove 162b.

The guide groove 162a is a portion for guiding the rotation protrusion 161 to be coupled to the coupling groove 162b, and is formed with one side of the fixing body 163 opened.

At this time, the guide groove 162a is formed to be open toward the lower side of the fixing body 163 on the drawings (Figs. 4A, 4B).

In addition, the coupling groove 162b is a portion to which the rotation protrusion 161 guided through the guide groove 162a is coupled, and extends from the guide groove 162a.

That is, the guide groove 162a and the coupling groove 162b are formed in a straight line with each other, and are integrally formed.

By such a configuration, before the fastening member 140 is fastened, the fastening members 150 are easily corresponded to respective fastening holes 123 and 133 formed in the seating part 120 and the restraining part 130. It can be easier.

On the other hand, although not shown, as an example of the rotating unit 160, it is also possible to rotate the restraining unit 130 using a hinge or the like.

Next, the fastening member 140 serves to constrain the flow of the mask by fixing the restraint part 130 to the seating part 120, and fastening holes 123 and 133 of the restraint part 130 and the seating part 120. It is provided with a fastening bolt passing through.

At this time, the fastening member 140 is preferably a butterfly bolt.

On the other hand, the seating portion 120 and the restraint portion 130, the edge of the mask, the edge, the contact surface, the other surface contact portion 150 is further provided with the contact member 150 is installed.

The contact member 150 is to maximize the fixing force of the seating portion 120 and the restraining portion 130 to the mask, it may be provided as a soft hose as shown in Figure 4a and 4b.

At this time, the specific material of the hose is preferably a soft resin with little gas generation.

Next, the second case 200 serves as a cover to protect the first case 100 in which the mask is accommodated from the outside.

In this case, the second case 200 also has a rectangular shape corresponding to the first case 100, and has a rectangular shape.

At this time, the reinforcing partition wall 120 and the contact portion 60 corresponding to the first case 100 are also formed inside the second case 200.

At this time, it is preferable that a protrusion 210 is formed at a portion of the inner side of the second case 200 corresponding to the fastening member 140.

The protrusion 210 protrudes from the first case 100 toward the fastening member 140, and serves to prevent the fastening member 140 from being released from the mask coupling part 110.

That is, the protrusion 210 prevents the fastening member 140 from being completely released by interfering with the unfastening of the fastening member 140 and protruding from the mask coupling part 110.

Next, the locking member 300 is coupled to the first case 100 and the second case 200 in a state facing each other to serve to restrain not separated from each other.

In this case, the locking member 300 is installed along a circumferential surface of the first case 100 and the second case 200, and installed in any one of the first case 100 and the second case 200. It consists of a catching part 310 and a catching hook 320 installed on the other.

At this time, as shown in the figure, the locking member 300 is preferably made of a locking device called a cicada.

Hereinafter, a process of storing a mask in a storage case having the above configuration will be described.

First, by releasing the fastening member (butter bolt) 140 of the mask coupling portion 110 installed in the first case 100, the contact surface 121 and the end surface 122 of the seating portion 120 to open the restraining portion ( 130) flip back.

At this time, the pivoting projection 161 of the restriction 130 is rotated on the coupling groove 162b of the rotation groove 162.

Thereafter, the edge of the mask is seated on each seating part 120.

At this time, one edge and the edge of the mask is in contact with the contact member 150 installed in the mounting portion 120, respectively.

Thereafter, the contact member 150 of the restraint part 130 rotates the restraint part 130 to compress the other surface of the edge of the mask.

Such a state is a state in which the fastening holes 123 and 133 of the restraining part 130 and the seating part 120 communicate with each other, and are temporarily assembled.

 Thereafter, the fastening member 140 passes through the fastening hole 133 of the restraint part 130 to be screwed to the fastening hole 123 of the seating part 120.

Accordingly, one edge and the other surface of the mask are compressed by the contact member 150 of the restraining part 130 and the seating part 120, and the mask may be accommodated in the first case 100 without flow.

Thereafter, the first case 100 is covered by using the second case 200 to protect the mask from the outside.

Thereafter, the first case 100 and the second case 200 are coupled using the locking member 300 so as not to be separated from each other.

As a result, the storage of the mask is completed, and the mask is maintained firmly fixed by the mask coupling unit 110.

According to the preferred embodiment described so far, the rotating unit 160 has been described as a temporary assembly means for temporarily assembling before the restraining unit 130 and the seating unit 120 are fastened to each other.

At this time, the rotation unit 160 should be secured to the space to rotate the restraint unit 130, if the rotation space is difficult to secure the restraint unit 130 without rotating to the seating unit 120 Can also be preassembled directly.

This is presented as another embodiment of the present invention, and will be described with reference to FIGS. 5A to 5D.

Prior to the description, the same components as in the preferred embodiment of the present invention will be denoted by the reference numerals, and detailed description thereof will be omitted.

Mask coupling portion 110 of the storage case according to another embodiment of the present invention is configured to include a seating portion 120, a restraining portion 130, and a fastening member 140.

At this time, the temporary assembly means is provided between the seating portion 120 and the restraining portion 130.

The provisional assembly means includes an insertion unit 170 formed on any one of the seating unit 120 and the restraining unit 130, and a coupling protrusion 180 inserted into the insertion unit 170.

In this case, the insertion unit 170 is for insertion of the coupling protrusion 180, may be made in the form of a through hole, it may be made in the form of a groove.

5A to 5D illustrate various embodiments of the temporary assembling means, and illustrate various forms of the insertion unit 170 and the coupling protrusion 180.

5A and 5B show the recess 170 formed in the recess 120 and the coupling protrusion 180 formed in the restraint unit 130, and the position of the insert 170 is in a situation. Can be varied to suit.

That is, as can be seen through the drawing, the coupling protrusion 180 of the restraint part 130 is inserted into the insertion part 170 of the seating part 120 to temporarily assemble the seating part 120 and the restraining part 130. , The fastening to the mask is completed by the fastening portion material 140 is completed.

At this time, the space (t) spaced apart from each other between the restraining portion 130 and the seating portion 120 is preferably formed.

That is, by securing the flow space of the restraint part 130, the fastening force of the restraint part 130 and the seating part 120 can be maximized.

On the other hand, Figure 5c is in the form of a coupling protrusion 180, made in the form of a pin protruding from the seating portion 120, the corresponding insertion portion 170 may be made of a through hole formed in the restraint portion 130.

In such a configuration, the fitting part 180 of the restraining part 130 is temporarily assembled to the coupling protrusion 180 of the seating part 120, and then the seating part 120 and the restraining part (using the fastening member 140). The fastening to the mask is completed by tightening 130).

In addition, Figure 5d is formed in the form of the engaging projection 180, each protruding on both sides of the restriction portion 130, in the form of grooves formed on both sides of the seating portion 120 in the form of the insertion portion 170, respectively It may be done.

As described so far, other embodiments of the present invention have shown other examples of the provisional assembly means, it can be seen that the configuration of the coupling protrusion 180 and the insertion unit 170 can be removable from each other.

At this time, the position of the coupling protrusion 180 and the insertion unit 170 may be changed, and their shape may also be a fitting configuration.

On the other hand, the adhesive member 150 disclosed in the preferred embodiment and the other embodiments of the present invention described so far has been described as a soft hose.

Such a soft hose may have marks of the contact member 150 on the edge of the mask while the mask is pressed onto the mask coupling unit 110.

This is because, since the material of the contact member 150 is soft, the pressed marks of the contact member 150 are generated in the mask.

In this case, when the stored mask is a blank mask, a problem may occur in the manufacturing process of the photomask due to the marks of the contact member 150.

In order to solve this problem, the material of the contact member may be replaced with a hard member rather than a soft member.

This is presented as another embodiment of the present invention, and will be described with reference to FIGS. 6A and 6B.

The mask coupling part of the mask storage case according to another embodiment of the present invention includes a seating part 120, a restraining part 130, a fastening member 140, and a close contact member 150.

At this time, the material of the contact member 150 is preferably Tefron (tefron).

The teflon is a resin with less gas generation, and is intended to prevent the mask from being lost due to the gas generated from the resin.

At this time, the contact member 150 is installed in the seating part 120 and the restraining part 130, respectively, the seating part 120 and the restraint part 130 is not formed in a separate close contact member groove.

At this time, the contact member 150 is preferably formed to be inclined upwardly to minimize the portion in contact with the surface of the mask, as shown in Figure 6a and 6b.

This is to prevent damage to the mask that may occur due to the hard contact member 150 by minimizing contact of one surface and the other surface of the mask with respect to the contact member 150.

That is, the adhesion member 150 is in close contact with the edge of the mask, it is possible to prevent damage to the mask by minimizing the range of the contact member 150 in contact with the surface of the mask.

Accordingly, the part contacting the contact member 150 becomes the edge and the edge of the mask.

On the other hand, the mask is in close contact with the hard contact member 150 made of a hard, can not expect a buffering action for the mask, in order to solve this, as shown in Figure 6b the close contact member 150 and the restraining portion 130 and A flexible hose may be interposed between the contact member 150 and the seating part 120.

In addition, as shown in Figure 6c, it can be expected to buffer the mask by inserting a soft hose in the interior of the contact member 150.

At this time, the contact member 150 may be formed to be convex in a shape corresponding thereto so that the soft hose can be inserted, the surface of the contact member 150 may protrude convexly by the expansion force of the soft hose. .

That is, such a configuration has technical features that can be expected to have a buffer action on the mask, as well as preventing marks on the surface of the mask.

As described so far, the mask storage case for the semiconductor and LCD process according to the present invention is irrespective of the fastening force of the locking member 300 as a separate coupling mask 110 is installed in the first case 100. There is a technical feature to firmly fix the mask for semiconductor and LCD process.

That is, even if the first case 100 and the second case 200 are not coupled to each other, the mask may be separately supported by the mask coupling unit 110.

In addition, since the mask is temporarily assembled by the temporary assembling means in the process of fixing the mask coupling portion 110, there is a technical feature that can be easily fastened to the fastening member 140.

In addition, while using the hard adhesion member 150, the marks of the adhesion member 150 on the surface of the mask does not remain, while the damage does not occur on the surface of the mask, as well as a technical feature that can perform a buffer action There is this.

1 is an exploded perspective view showing a mask storage case for a semiconductor and LCD process according to the prior art

2A and 2B are main cross-sectional views showing only main parts of a semiconductor mask in a state in which a mask for semiconductor and LCD process is accommodated in a storage case;

Figure 3 is an exploded perspective view showing a mask storage case for semiconductor and LCD process according to a preferred embodiment of the present invention

Figure 4a is an exploded perspective view showing the mask coupling portion of the mask storage case for semiconductor and LCD process according to a preferred embodiment of the present invention

Figure 4b is a perspective view showing a mask coupling portion of the mask storage case for semiconductor and LCD process according to a preferred embodiment of the present invention

5A to 5D are side views illustrating a mask coupling part of a mask storage case for semiconductor and LCD process according to another embodiment of the present invention.

6a to 6c are side views showing the main portion of the mask coupling portion of the mask storage case for semiconductor and LCD process according to another embodiment of the present invention.

* Description of Major Symbols in Drawings *

100: first case 110: mask coupling portion

120: mounting portion 121: contact surface

121a, 122a, 131: buffer member groove 122: end surface

123,133 fastener 130: restraint part

140: fastening member (butter bolt) 150: contact member

160: rotation unit 161: rotation projection

162: Meeting Home 162a: Information Home

162b: coupling groove 163: fixture

170: insertion portion 180: coupling projection

200: second case 210: protrusion

300: locking member

Claims (13)

A first case in which a mask is supported and a plurality of mask coupling parts are installed at edges thereof; A second case for shielding a mask supported by the first case; Is installed on the circumferential surface of the first case and the second case, respectively, and locking member for coupling the first case and the second case: The mask coupling portion, A semiconductor comprising: a seating portion on which one edge and a border of the mask are seated; a restraining portion for compressing the other edge of the mask to fix the mask; and a fastening member for fastening to each other through the restraining portion and the seating portion. And mask storage case for LCD process. The method of claim 1, Mask mounting case for a semiconductor and LCD process, characterized in that further provision means for temporarily assembling between the seating portion and the restraint portion. 3. The method of claim 2, The temporary assembly means, Mask mounting case for semiconductor and LCD process, characterized in that the coupling portion formed in the other one of the seating portion and the restraint portion formed in the insertion portion inserted into the insertion portion. 3. The method of claim 2, The temporary assembly means, Mask storage case for semiconductor and LCD process, characterized in that consisting of a rotating part to be rotated toward the seating portion. The method of claim 4, wherein The rotating part, A rotation protrusion formed at both ends of the restraint portion, Mask storage case for semiconductor and LCD process, characterized in that consisting of a fixed body formed with a rotation groove for the rotation of the rotation projection. The method of claim 5, The rotating groove, Mask storage case for semiconductor and LCD process, characterized in that the guide groove is formed with an opening for guiding the insertion of the rotational projection of the restraint portion, and the coupling groove extending from the guide groove coupled to the rotational projection. The method according to any one of claims 1 to 6, An adhesion member is installed between the seating portion and the restraint portion, and one side, the edge, and the other side of the mask are in close contact with each other by the adhesion member. The method of claim 7, wherein The close contact member is a mask storage case for semiconductor and LCD process, characterized in that the flexible hose. The method of claim 7, wherein The close contact member is a Teflon (teflon) characterized in that the mask storage case for semiconductor and LCD process. The method of claim 9, A mask storage case for a semiconductor and LCD process, characterized in that a soft hose is interposed between the contact member and the restraint part and the contact member and the seating part. The method of claim 9, The mask storage case for a semiconductor and LCD process, characterized in that the portion corresponding to one surface and the other surface of the contact member is inclined in a state separated from the mask. The method of claim 9, A soft hose is inserted into the contact member so that the surface of the contact member protrudes convexly toward the mask. The method according to any one of claims 1 to 6, A mask storage case for a semiconductor and an LCD process of claim 2, wherein a protrusion corresponding to the fastening member is formed at a portion corresponding to the fastening member of the mask coupling part to interfere with the unwinding of the fastening member.

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