KR20110043621A - System and methods for in-line monitoring of particles in opaque flows and selective object manipulation in multi-component flow - Google Patents
System and methods for in-line monitoring of particles in opaque flows and selective object manipulation in multi-component flow Download PDFInfo
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- G01N35/1095—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices for supplying the samples to flow-through analysers
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Abstract
Systems and methods are disclosed for monitoring particles, in particular for in-line particle monitoring and selective object manipulation with multicomponent flow. One example of a system may include a detection system for monitoring components such as particles in an opaque flow carrier. The example system defines a flowable sample that is opaque for at least the first wavelength range of the light wave and compresses the flowable sample in the first direction, while the second is parallel to and perpendicular to the flow direction of the flowable sample. Direction, while extending the sample in a third direction orthogonal to the first and second directions. Once the sample is compressed in the first direction, the sample becomes transparent for at least one wavelength in the first wavelength range that enables optical means for particle detection. The system may also include a device such as a valve or actuator for manipulating the detected component from other components in the flow carrier. A controller or other processor may receive and process the detected component data and may distinguish the component of interest from the remaining flowable sample. Once the component is recognized, the controller operates in synchronization with the flow manipulation device and detection system to manipulate the detected component from the flow carrier.
Description
The objects disclosed herein generally filter or separate multiple components in flow carriers, such as liquids or gases, as well as techniques for detecting and characterizing particles in concentrated liquid systems such as slurries, emulsions and suspensions. And the field of manipulation, including. More particularly, the present invention relates to the field of operations, including filtering or separating multiple components in flow carriers at industrial flow rates.
Liquid systems with high particulate concentrations are widely used in industry. Examples of such systems are slurries used in the chemical mechanical planarization (CMP) process in the semiconductor industry and emulsions used in the pharmaceutical industry.
Optical methods for detection and characterization have been used to monitor particle parameters in gas and liquid media. United States Patent No. 6,710,874 to Mavliev discloses an apparatus and method for the optical characterization of particles in high concentration systems, the entirety of which is incorporated herein by reference.
Flow-through separators are known, such as filters or other types of mechanical separators. Separation efficiency depends on differences in the characteristics of the components to be separated. In some cases, one of the components to be separated may differ by one or more measurable variables and may have a lower concentration in the flow carrier compared to another component. One such case is the filtration of abrasive slurries from oversized particles. Typical polishing slurries are composed of particle ensembles of high concentration (10 ^ 12 / cc) and the desired size (typically 50-500 nm): These particles are required to carry out the polishing process. In certain situations even larger (large) particles of
A method for separating particles is disclosed in US Pat. No. 7,294,249 to Gawad. This method requires the influence and separation of particles by dielectrophoresis, a measurement channel region for characterizing the particles, and a classification region for particle classification identified in the measurement channel region by dielectric migration. The classification includes a switching element, which allows active flow of particles into two or more subchannels corresponding to criteria registered in the measurement channel region. The method allows for the rapid and accurate classification of particles, especially biological cells in suspension, while in particular it cannot be carried out to separate particles in multicomponent fluids such as slurries at industrial flow rates.
The particle separation methods disclosed in U.S. Pat.Nos. 7,318,902 and 7,472,794 to Okay, which are incorporated herein by reference, provide laminar fluid flow in microfluidic flow devices with flow impairments. I use it. External means are used to adjust the flow rate, which makes the invention inapplicable to the patent field. Flow obstruction is not particularly desirable for high particle content flow operations such as slurries and emulsions. US Pat. No. 7,428,971 to Hirano et al. And US Pat. No. 7,366,377 to Gettin et al. And US Pat. No. 7,068,874 to Wang et al. Relate to particle manipulation in flow using optical means. These methods may be useful in the field of cell sorting, but are not useful for manipulating objects, especially at industrial flow rates, in opaque fluids with high particle content (such as slurries and emulsions).
Methods and apparatus for filtration or particle separation from multi-component flows, including in-line monitoring of particles in opaque fluids as well as flows with components (particles) to be preserved and flows with high particle content such as slurries and emulsions, are required It is becoming. Preference is also given to methods that do not depend on flow variables such as optical transparency, viscosity, flow rate or laminarity, and methods and apparatus that can operate in industrial conditions.
summary
The particle monitoring system is located in a cuvette and a cuvette configured to define an opaque flowable sample for at least a first wavelength range of light waves and compresses the flowable sample in a first direction, while compressing the sample in parallel with the flow direction A transparent flow compression element adapted to extend in a second direction orthogonal to the first and second directions while controlling in a second direction orthogonal to the first direction, the sample being compressed in the first direction Is transparent for at least one wavelength in the wavelength range of the light wave.
Particle monitoring methods define an opaque flowable sample at least for a first wavelength range of light waves, measure the transparency of the flowable sample, compress the flowable sample in the first direction, while compressing the sample in the flow direction and parallel to the first direction. Controlling in a second direction orthogonal to and extending the sample in a first direction and a third direction orthogonal to the second direction, and identifying the characteristics of the particles contained in the compressed sample, the sample being in the first direction When it is compressed to be transparent to at least one wavelength in the wavelength range of the light wave.
The system for selective object manipulation in a multicomponent flow includes means for detecting and mapping components in the flow carrier, means for manipulating components in the flow carrier, and means for controlling the manipulation of the detected components; The component manipulation means is adapted to remove or separate the detection component from other components in the flow carrier and the control means is adapted to synchronize the manipulation means with the detection means.
In one embodiment, the detection and mapping means is a cuvette configured to define an opaque fluidic sample that is opaque for at least the first wavelength range of the light wave, located in the cuvette and compressing the fluidic sample in the first direction, while compressing the sample in the flow direction. Using at least one wavelength and a transparent flow compression element adapted to extend in a third direction that is parallel to and perpendicular to the first direction and is orthogonal to the first and second directions. A monitor for monitoring the flowable sample, wherein when the sample is compressed in the first direction, the sample is transparent to at least one wavelength in the wavelength range of the light wave.
Selective object manipulation methods in multicomponent flows include manipulating the detected components in the flow carrier, including detecting and mapping components in the flow carrier and removing or separating them from another component, wherein the operating steps of the detected components It is synchronized with the detection and mapping phase.
In one embodiment, the detecting and mapping step defines an opaque fluid sample for at least the first wavelength range of the light wave, measures the transparency of the fluid sample, compresses the fluid sample in the first direction while compressing the sample into the fluid sample. Particles contained in the compressed sample that confine in a second direction that is parallel to the flow direction of and perpendicular to the first direction and extends in the third direction orthogonal to the first and second directions And identifying a feature of the sample, wherein the sample is transparent to at least one wavelength of the first range of wavelengths when the sample is compressed in the first direction.
As will be realized, different embodiments are possible and the details described herein may be varied in various respects without departing from the scope of the claims. Accordingly, the drawings and detailed description are by way of example only and are not meant to be limiting. Like reference numerals are used to refer to like elements.
1 illustrates an exemplary embodiment of a system with flow separation.
2 illustrates an exemplary embodiment of a system for component manipulation.
3 shows an exemplary embodiment of a system with coordinate conversion.
4 illustrates an example embodiment for selective particle removal in a chemical mechanical polishing (CMP) process.
FIG. 5 shows an example of time delay and diffusion factors in one embodiment of a system in which selective object manipulation is performed in a multicomponent flow, such as a slurry used in a CMP process.
6A shows an overview of the flow of one embodiment of a particle monitoring system;
6B shows an overview of systems and variables for numerical evaluation of a particle monitoring system in one embodiment.
6C shows an overview of an exemplary cuvette according to the first embodiment (two optical elements with Y axis extending and curvature Z);
6D shows an overview of an exemplary cuvette in accordance with a second embodiment (optical element having a flow passage extending in the Y axis and defined in the Z axis).
7A shows an overview of an exemplary particle monitoring system according to the first embodiment.
7B shows a more detailed cross-sectional view of an exemplary particle monitoring system according to the first embodiment.
7C and 7D show cross-sectional views of an exemplary particle monitoring system according to a first embodiment that incorporates ambient flow.
8A shows an overview of an exemplary particle monitoring system according to a second embodiment.
8B shows a more detailed cross-sectional view of an exemplary particle monitoring system according to the second embodiment.
9A shows an overview of an exemplary particle monitoring system according to a third embodiment.
9B shows a more detailed cross-sectional view of an exemplary particle monitoring system according to the third embodiment.
9C shows a more detailed overview of cuvettes in an exemplary particle monitoring system according to the third embodiment.
10 shows an overview of an exemplary optical cuvette in accordance with a fourth embodiment.
11 shows an overview of an exemplary optical cuvette according to the fifth embodiment.
12A, 12B, 12C and 12D show an overview of an exemplary particle monitoring system according to a sixth embodiment using cylindrical double-sided concave lenses as waveguides.
details
1 shows a
In one embodiment, the
In one embodiment, the
In one embodiment, the
In the
2 shows another exemplary embodiment in which the flow separating means 3 can be replaced or supplemented by the component operating means 7. Examples of component manipulation means may include, for example, a laser or other radiation light source to destroy dangerous cells while leaving other components there through. Other examples of component manipulation means may include light sources capable of producing other destructive effects, such as radiation sources or shock waves that disrupt the aggregation of particles.
3 illustrates an example method using coordinate transformation of detected components. Detection can be performed by an example particle monitoring system as illustrated in FIGS. 6-12 and the accompanying detailed description. The sample flow is thinner using the same technique for component B detection and subsequent flow separation or manipulation (minimum thickness flow can be allowed for easier detection and mapping and easier separation or manipulation). Can be molded into threads.
Exemplary techniques for shaping the flow include the use of two prisms with opposing tips, two cylindrical lenses and two optical blocks that overlap at least on the Z axis as shown in FIG. 6, for example. can do. In an embodiment of two prisms having opposing ends as shown in FIG. 6B, the prism compresses the flowable sample in the first direction X, while the sample is parallel to the flow direction and orthogonal to the first direction. While limiting to the second direction Z, the sample may be extended in a third direction Y that is orthogonal to the first and second directions. Once the sample is compressed in the first direction, the sample may be transparent to light sources of at least one wavelength.
The coordinate shift factor may be established between the detection and manipulation system y ^ y 'using the detection system and the second detection system instead of the manipulation system. Similarly, the time delay factor t ⇒ t 'can be determined between the two systems. After detecting component B on the detection system, the coordinates (y, t) of component B 'can be determined. The coordinates (y ', t') of component B 'can be determined by the second detection system. The coordinates of the plurality of components B and B 'may be converted from the operating system transfer function T link (y, t) to (y', t '). The detection of the object by the detection system at coordinate y 1 and time t 1 , using the known transfer function T, generalizes coordinate y 1 ′, at which point a suitable action is applied at a predetermined time t ′ 1 .
4 shows a non-limiting exemplary embodiment for selective particle removal in a chemical mechanical polishing (CMP)
Particles with dimensions exceeding specified values for a particular application are similar to sandpaper with excessively large grit and are disadvantageous by leaving marks or scratches on the surface to be flattened. Therefore, a quality control process is essential to eliminate the use of slurries with excessively large particles.
The pad and wafer 9 can be compressed together by the
In the non-limiting embodiment shown in FIG. 4, the slurry delivery line 15 of the CMP polishing system includes, as one embodiment, a
The system for in-line monitoring of particles in an opaque flow, which is one of the embodiments shown in FIGS. 6-12, is preferably a slurry delivery line of the
In one embodiment, the three-
In one embodiment, the three-
In one embodiment, as a test mode, a second in-line monitor (not shown) may be temporarily connected to the three-way valve and the time delay may be approximately ˜1 for a 3 m line at typical flow rates (example values). Minutes). To determine the time delay value, the slurry flow will be monitored for a specific time period and a correlation between these two system readings will be made. The reading of the first particle detection system will correlate with the reading of the second system with the necessary time delay for particles transporting from the first detection point to the second point. Due to flow turbulence and irregularities, the time delay can vary at certain limits that can be introduced as the diffusion factor S. An example of an exercise for determining the time delay and time spreading factor is shown in FIG. 5.
As shown in FIG. 5, a "packet" of particles, such as changing the particle concentration from zero to some specific value for a fixed time period, can be used to determine the time delay. The time delay and “packet” diffusion factor S (due to turbulence and flow nonuniformity) can be determined by comparing the signals obtained from the two in-line monitors.
In the operating mode, after particle detection by the in-
As described, exemplary embodiments examine the flow carriers containing the components to be separated, identify the locations of the specific components to be separated in the flow, and selectively remove the flow fractions having the components to be separated, while removing the components to be separated. For the portion of the flow that does not contain it is concerned with minimizing the impact. In an exemplary embodiment, particle conversion or removal can be synchronized with particle detection. Separated components can be concentrated for further analysis or use. Exemplary embodiments can separate live and dead cells that can be distinguished by components that cannot be separated by filtration, such as fluorescence, but that cannot be separated by filtration.
6A, 6B, 6C and 6D are provided as an overview for introduction. In-line particle detection systems can be used to continuously monitor the flow.
In another embodiment, one particle detection system of the embodiment shown in FIGS. 6-12 may be used in an optional object manipulation system such as the system of one of FIGS. 1-4, for example the CMP system shown in FIG. 4. have.
In the example particle monitoring system shown in FIG. 6A, sample flows (indicated by dashed lines) with inclusions or particles to be detected may be converging or diverging into parts. Arrows indicate the light penetration depth, which depends on the optical properties of the sample, such as sample haze. The aim is to provide light penetration down to the narrowest part of the
6B shows an overview of an exemplary particle monitoring system and variables for numerical evaluation to be discussed later.
There may be several basic groups that can be classified as example designs for particle monitoring systems. 6C shows an overview of an exemplary cuvette according to the first group. Here, there may be two optical elements with the Y axis extending and the Z axis curvature. An example includes two prisms with opposing tips, two cylindrical lenses and two optical blocks with minimal overlap on the Z axis. 6D shows an overview of an exemplary cuvette according to the second group. There may be optical elements with a flow passage extending in the Y axis and defined in the Z axis. These designs may include, for example, monolithic waveguide structures with slits for flow defined in the Z direction. Other design groups may include combinations of the above features. For example, one optical element may have a substantial curvature in the Z direction and another element may comprise a flat portion.
The transparency of the sample flow can be arranged in the form of a "sheet" flow, which can be relatively thin in the first (X) and second (Z) orthogonal dimensions and long in the third (Y) orthogonal dimensions. Exemplary optimal sample thicknesses can be determined using, for example, two criteria. The first criterion may be based on the absence of significant majority scattering of light by the sample or the presence of relatively high sample transparency, which may determine the thickness at the first dimension.
The second criterion may be based on the desired pressure drop of the optical cuvette at the desired flow rate. The pressure drop inside the optical cuvette can be an important factor for method availability in the industry. There may be an acceptable range of pressure drops that can be introduced into the flow lanes by a device (such as an in-line monitoring device). This range may vary depending on the application and also depends on process parameters. The pressure drop inside the cuvette can be the inverse of the flow thickness in the first and third dimensions and can determine the cross section of the cuvette. Since the flow thickness in the first dimension X can be determined by the optical transparency criteria and does not change freely, the flow width in the third dimension Y can be used to maintain the pressure drop at the desired level. The pressure drop can be directly proportional to the flow dimension in the second direction Z and this can be used to influence the pressure drop in the cuvette in a desired manner.
As an example, a sample fluid flow can be established having a thickness in the range of about X = 5-500 μm, Z = 0.1-5 mm and a width of Y = 5-25 mm in the third dimension. The split angle at the output of the cuvette can affect the pressure drop in the cuvette at a given flow rate and can be selected accordingly. Another criterion for selecting the classification angle may be its influence on the flow structure. For example, high fractionation angles (orthogonal angles in the extreme, ie slits in flat materials) will best produce turbulent movement in the flow. If turbulence is undesirable, it can be prevented by selecting the appropriate fractionation angle of the cuvette.
In an exemplary embodiment, laser quenching and multiple light scattering by the particles can be ignored for the "sheet" of a typical slurry. At the same time, the slurry flow may not require dilution, so the size distribution of particles in the slurry can have minimal distortion.
Numerical evaluation
In one embodiment, referring to FIG. 6B, the flow variable at the measurement point is width Y, thickness X, flow rate Q. The laser beam of Lp (not shown) power has a width Y and a thickness Z. The measuring area Z * Y is projected by a optical system of magnification k to a camera type sensor of Py * Pz pixels (pixel sizes are z p and y p ) and signal accumulation time t c . Optical magnification is chosen for the overall flow observation:
Y = k * Py * y p .
The particle velocity at the measurement area is V = Q / (X * Y). The signal registration time is t = Z / V or t = z p / k / V, which is smaller. Assuming t <t c (which is reasonable in most cases), the signal amplitude is:
S = Lp * F (d) * X / Q * (z p / k / Z)
Where F (d) is the light scattering function for particles of size d. For particles in the scattering medium, the detection limit is determined by the signal / noise ratio rather than by the signal value itself. The signal / noise ratio can be influenced by two variables-the volume of the scattering medium illuminating a single pixel and the ratio of signal and noise accumulation time. Multiplying these two factors by the signal / noise ratio gives:
SN = Py / t c / Q * (F (d) / F (d m ))
Wherein d m is the median particle size in the scattering medium. SN does not necessarily depend on flow space variables. This allows for a variety of flow thicknesses X to achieve flow transparency without affecting the signal / noise ratio.
Multiple light scattering can be neglected for the underlying sample optical thickness (ie transmittance> exp (-l)). The acceptable sample optical thickness range can be extended up to five times or more at small signal acquisition angles. In this case, the correlation of Beer-Lambert light scattering may be modified.
The parameters of the sensor (eg detection camera) can be as important as the overall flow rate. Some exemplary calculation results for two cameras (1024 and 2048 pixels) and two flow rates are shown in Table 1 below. The detectable particle size d p is calculated on the assumption that it is a Raleigh scattering and signal to noise ratio 1 (the slurry variables are d = 100 nm and N =
From Table 1 it can be seen from the simple assumption that individual particles as small as 600-1000 nm should be able to be detected. It should be mentioned that the detectable particle size can be reduced by operating the S / N ratio below 1 if necessary, which can be technically easy.
7A, 7B, 7C and 7D show an exemplary
In one embodiment, exemplary dimensions for the X, Z, and Y directions are about 50 μm to 3 mm in the first (X) direction, about 10 μm to 3 mm in the second (Z) direction and 3 (Y) dimensions are from about 5 mm to 25 mm.
In one embodiment, an optical flow cell such as
The effective flow dimension in the second orthogonal direction can be measured by the curvature of the flow focusing element and can, for example, range from 10 μm to 3 mm. The flow channel variable may be substantially constant along the entire length of the measurement portion of cuvette 210 (eg, ± 10% flow channel width in any direction). The measurement portion of the
In one embodiment, as shown in FIGS. 7C and 7D, the sample fluid flow is in operative communication (eg, at least partially) with a clean (ie, relatively particle free) clear liquid (eg, water) or other suitable liquid. Surrounded by). This can be achieved, for example, by introducing and removing the clear transparent liquid through the surrounding flow inlet and outlet. This method can be used to avoid contamination of the optical component or as another method for controlling sample flow thickness and transparency. Exemplary optical cuvettes with symmetrical peripheral flow inlets are shown in FIGS. 7C and 7D. The main sample flow is introduced through the flow inlet and discharged through the sensing area defined by the tip of
In one embodiment, an exemplary method of compressing a flow is shown in FIG. 7A as two optical elements (eg, prisms 220) having a gap formed between the tips that compress the sample to make the sample transparent to at least one wavelength of light waves. 7b, 7c and 7d. The tip of
Symmetric or asymmetric prisms may be used depending on the requirements for the confluence and fractionation angle of the flow. One skilled in the art, in addition to one or all of the embodiments described above, as well as variations thereof, the cuvette would use two optical elements, such as two isostriction (or other) prisms, compressing the sample to at least one dimension to compress the sample to a predetermined wavelength. It is possible to create a flow cell to be transparent to the light waves of.
The system may also include a method for identifying the characteristics of the individual particles contained in the compressed sample. In one embodiment, the identification device is shown in FIG. 7B, such as an optical camera or detector 230 (eg, a CCD camera, CMOS, photodiode or other optical sensing device) in optical communication with the
Sample transparency can be measured by quenching and the sample fluid thickness in the flat portion of the
7C and 7D show further details of an
Prism 220 (eg, sapphire or glass coated with diamond-like carbon) is attached to
This exemplary embodiment allows measurement of sample transparency as a function of sample thickness in a single experiment. These measurements can allow the measurement of particle size variables in the sample fluid using the integrated scattering method. At the same time, the maximum particle variable can be determined using a single particle approach. The combination of these two different approaches (ie integration and differential) may allow for improvements in the accuracy and reliability of the measurements.
As a second embodiment, as shown in FIGS. 8A and 8B, sample fluid flow may be introduced into the flat portion of the cuvette 310, which may be formed by two flat
The sample fluid in the flat portion of the cuvette 310 may be illuminated with an appropriately shaped
In a third embodiment, as shown in FIGS. 9A, 9B, and 9C, the sample fluid flow is into a flat portion of the
10 shows an example of a fourth embodiment. As shown, the sample flow may be an annular "thread" of flow having a thickness X. Exemplary light guide and scattered light collection systems can be made of glass, sapphire or quartz. Scattered light can be delivered to a light detection and signal processing system by a fiber optic guide. Such a guide can be used to connect (convert) the annularly distributed signal to a linear optical detector. 11 shows a fifth embodiment similar to the fourth embodiment.
12A, 12B, 12C and 12D show an exemplary particle monitoring system according to the sixth embodiment. In this embodiment, the waveguide can be formed using a cylindrical biconcave lens. The slit can be cut at the center of the lens and polished for light passage. In this embodiment, the slit width can be fixed.
Experimental results show the ease of concept described herein. For example, the experiment was carried out using the optical cuvette (ie formed by the flat window and the cylindrical lens) of the third embodiment. Examples of such optical cuvettes are shown in FIGS. 9A, 9B and 9C. In this exemplary embodiment, the width of the flow was 10 mm and the sample thickness (X, measured by shim) was ˜100 μm. The diameter of the cylindrical lens was 5 mm and the window diameter was 20 mm. Cylindrical lenses were used to partially concentrate the laser beam near the cylinder-window (detection area). The laser beam was magnified before reaching the optical cuvette by another cylindrical lens to provide uniform illumination along the entire sample length in the Y axis.
In an exemplary experimental embodiment, the housing was made of black Delrin material and the window was partially glued or rubber-sealed. The pressure drop measured at these cell parameters was -1.5 psi for a flow rate of 100 ml / min. The pressure, translated to 7.5 psi at 500 ml / min, should be acceptable for most semiconductor applications.
In this embodiment, the sample is irradiated with a laser and subjected to a custom deformation to reduce the pulse length to remove the image “penetration” of the moving particles. The laser beam was stopped at the collecting lens plane and the collecting lens was used to send square scattered light to a video camera (WT-502, manufactured by Watec Corp.). Images were recorded on a PC using Airlink + frame grabber.
In this embodiment, the experimental results showed a medium in which the non-dilution slurry was scattered uniformly in the “milky phase”. The slurry was transparent due to the small thickness. 1588 nm polymer microspheres in DI water prepared by Duke Scientific Corporation were tested for optical system sensitivity and the ability to record particles of this size. The same concentration of 1588 nm globules was placed in the slurry. The results showed that the added particles were clearly detectable in slurry as well as in DI water.
In this embodiment, the experimental data suggests:
The slurry becomes transparent at the reference thickness and optical methods can be used for particle characterization.
The cuvette resistance to flow can be kept low to effect operation at relatively high flow rates, such as 500 ml / min.
The total flow can be investigated and can be examined for the presence of large particles.
Background scattering from the slurry does not prevent the registration of large particles.
Thus, as one embodiment, experimental results suggest that 100% of the slurry flow can be monitored at a flow rate of 500 ml / min or less.
As described, exemplary embodiments relate to non-invasive systems and methods for in-line or off-line monitoring of a single particle over a wide range of sizes and concentrations contained in a system comprising mostly small particles. . Exemplary methods can accommodate mixtures that do not require dilution thereof and mixtures in which the "tail" of the largest particles in the particle size distribution can be accurately measured. Optical characterization of particles over a wide range of sizes and concentrations in a concentration system can be achieved using an example embodiment of an optical flow cell, such as a cuvette, wherein the sample flow is adapted to apply optical techniques for particle characterization. It is made relatively transparent.
In an embodiment, a system for chemical and mechanical polishing of a semiconductor wafer shown in FIG. 4 is a slurry source (17) comprising SiO 2 or Al 2 O 3 particles suspended in an acid or base solution at a 4-18% weight solids concentration. ). The particle size range is, for example, 0.03 micron to 1.0 micron diameter or more. In some cases, some of the
The chemical
Sample transparency may be measured by quenching, and the sample fluid thickness may be adjusted in the flat portion of the
If particles having a size larger than a predetermined size, such as 1 micron, are detected, the
The actuation timing of the
In short, systems and methods are disclosed for selective object manipulation in multicomponent flows. Exemplary systems can include detection systems for monitoring components such as particles in the flow carrier. The system may also include an apparatus (eg, a valve or actuator) for manipulating the detected component from other components in the flow carrier. A controller or other processor can receive and process the protected component data and can distinguish the component of interest from the remaining flowable sample. Once the component is recognized, the controller synchronizes the flow manipulation device with the detection system to organize the detected component from the flow carrier.
The description is presented to enable those skilled in the art to make and use the systems and methods described herein well, and is provided with specific applications and requirements thereof. It is well known to those skilled in the art that various modifications to the above embodiments are possible, and the general principles described herein may be applied to other embodiments and applications without departing from the spirit and scope of the claims. Thus, the illustrated embodiments are not intended to provide limitations, but should be accorded the widest scope consistent with the principles and features described herein.
Claims (111)
Means for manipulating the flow component; And
Means for controlling the manipulation of the detected component,
The means for manipulating the flow component is adapted to remove or separate the detected component from other components in the flow carrier, and wherein the control means is adapted to synchronize the manipulation means with the detection means. system.
A cuvette adapted to define an opaque flowable sample for at least a first wavelength range of light waves;
Compress the flowable sample in a first direction and control the sample in a second direction parallel to the flow direction and orthogonal to the first direction, while positioned in the cuvette, while the sample is controlled in a third direction orthogonal to the first and second directions A transparent flow compression element adapted to extend; And
A monitor for monitoring the flowable sample using at least one wavelength,
And if the sample is compressed in the first direction, the sample becomes transparent for at least one wavelength in the wavelength range of the light wave.
Means for manipulating the flow; And
Means for controlling the manipulation of the detected component,
The flow manipulation means is adapted to manipulate the detected components while preserving other components in the flow carrier,
Said control means being adapted to synchronize said operating means with detection and mapping means.
Manipulating the detected components while preserving the other components in the flow carrier,
And wherein said manipulating the detected components is synchronized with detecting and mapping the components.
A cuvette adapted to define an opaque flowable sample for at least a first wavelength range of light waves;
Compress the flowable sample in a first direction and control the sample in a second direction parallel to the flow direction and orthogonal to the first direction, while positioned in the cuvette, while the sample is controlled in a third direction orthogonal to the first and second directions A transparent flow compression element adapted to extend; And
A monitor for monitoring the flowable sample using at least one wavelength,
And when the sample is compressed in the first direction, the sample becomes transparent for at least one wavelength in the wavelength range of the light wave.
Compress the flowable sample in a first direction and control the sample in a second direction parallel to the flow direction and orthogonal to the first direction, while positioned in the cuvette, while the sample is controlled in a third direction orthogonal to the first and second directions A transparent flow compression element adapted to extend; And
A monitor for monitoring the flowable sample using at least one wavelength,
And when the sample is compressed in the first direction, the sample becomes transparent for at least one wavelength in the wavelength range of the light wave.
The particle monitoring system, wherein the second light guide is confined to transmit scattered light, or the optical waveguide has holes through which the flowable sample flows.
Measuring the transparency of the flowable sample;
Compressing the flowable sample in a first direction, while defining the sample in a second direction that is parallel to the flow direction and orthogonal to the first direction, while extending the sample in a third direction orthogonal to the first and second directions ; And
Identifying the characteristics of the particles contained in the compressed sample,
And when the sample is compressed in the first direction, the particles become transparent for at least one wavelength in the wavelength range of the light wave.
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US12/169,500 US7738101B2 (en) | 2008-07-08 | 2008-07-08 | Systems and methods for in-line monitoring of particles in opaque flows |
US8014208P | 2008-07-11 | 2008-07-11 | |
US61/080,142 | 2008-07-11 |
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KR101326903B1 (en) * | 2011-08-17 | 2013-11-11 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Apparatus and methods for real-time error detection in cmp processing |
US11684920B2 (en) | 2020-07-07 | 2023-06-27 | International Business Machines Corporation | Electrical tracking of a multiphase microfluidic flow |
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CN104769414B (en) * | 2012-09-06 | 2018-08-24 | 古河电气工业株式会社 | A specimen identifies that separating extraction device and a specimen identify separating and extracting process |
CN113015897A (en) * | 2018-11-16 | 2021-06-22 | 粒子监测系统有限公司 | Slurry monitoring and single particle detection in combination with bulk size distribution |
KR102470065B1 (en) * | 2020-12-22 | 2022-11-23 | (주) 엘티아이에스 | Particle measuring device |
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US5742234A (en) * | 1995-02-28 | 1998-04-21 | Vickers, Inc. | Particle detection and destruction in fluid systems |
US6778724B2 (en) * | 2000-11-28 | 2004-08-17 | The Regents Of The University Of California | Optical switching and sorting of biological samples and microparticles transported in a micro-fluidic device, including integrated bio-chip devices |
EP1335198B1 (en) * | 2002-02-01 | 2004-03-03 | Leister Process Technologies | Microfluidic component and procedure for sorting particles in a fluid |
US7318902B2 (en) * | 2002-02-04 | 2008-01-15 | Colorado School Of Mines | Laminar flow-based separations of colloidal and cellular particles |
US6710874B2 (en) * | 2002-07-05 | 2004-03-23 | Rashid Mavliev | Method and apparatus for detecting individual particles in a flowable sample |
JP4601445B2 (en) * | 2004-06-21 | 2010-12-22 | 富士通セミコンダクター株式会社 | Abrasive supply method |
US7014539B1 (en) * | 2004-11-18 | 2006-03-21 | Lam Research Corporation | Method and apparatus for minimizing agglomerate particle size in a polishing fluid |
JP2006234559A (en) * | 2005-02-24 | 2006-09-07 | Mitsui Eng & Shipbuild Co Ltd | Flow site meter |
EP1742057A1 (en) * | 2005-07-08 | 2007-01-10 | Stichting Voor De Technische Wetenschappen | Device and method for the separation of particles |
WO2007046871A2 (en) * | 2005-10-19 | 2007-04-26 | University Of Notre Dame Du Lac | Apparatus and method for non-contact microfluidic sample manipulation |
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KR101326903B1 (en) * | 2011-08-17 | 2013-11-11 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Apparatus and methods for real-time error detection in cmp processing |
US11684920B2 (en) | 2020-07-07 | 2023-06-27 | International Business Machines Corporation | Electrical tracking of a multiphase microfluidic flow |
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