KR20110034125A - Method and apparatus for manufacturing touchscreen panel - Google Patents

Method and apparatus for manufacturing touchscreen panel Download PDF

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Publication number
KR20110034125A
KR20110034125A KR1020090091535A KR20090091535A KR20110034125A KR 20110034125 A KR20110034125 A KR 20110034125A KR 1020090091535 A KR1020090091535 A KR 1020090091535A KR 20090091535 A KR20090091535 A KR 20090091535A KR 20110034125 A KR20110034125 A KR 20110034125A
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KR
South Korea
Prior art keywords
window
platform
touch screen
screen panel
substrates
Prior art date
Application number
KR1020090091535A
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Korean (ko)
Inventor
김재홍
남성일
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(주)멜파스
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Priority to KR1020090091535A priority Critical patent/KR20110034125A/en
Publication of KR20110034125A publication Critical patent/KR20110034125A/en

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)

Abstract

PURPOSE: A method and apparatus for manufacturing a touch screen panel are provided to improve the efficiency of the manufacturing process by collectively processing hardened window substrates. CONSTITUTION: A platform(200) installed inside of a chamber comprises receiving parts(220) in which a plurality of window substrates are placed. A target supporter supports a target of a deposition material. A mask substrate fixing unit couples a mask substrate(300) including a mask pattern. The mask substrate is repeatedly arranged in the platform. The platform comprises one or more of glass, quartz, metal, or polymer material.

Description

TECHNICAL AND APPARATUS FOR MANUFACTURING TOUCHSCREEN PANEL}

The present invention relates to a method and apparatus for manufacturing a touch screen panel, and to a method of manufacturing a window integrated touch screen panel by depositing a conductive material or an insulating material on a window substrate and a device used therein.

Various touch technologies and structures, such as resistive film type, capacitive type, and ultrasonic type, are applied to a touch screen, which is an input device that recognizes a user's touch applied to a specific position on a display screen. Among these, capacitive touch screens, which have recently gained attention due to their advantages such as multi-touch input and excellent durability, are being made of transparent conductive materials such as indium tin oxide (ITO) on the back of a window (also called a cover lens). Using the formed sensor pattern, the touch of the user and the position to which the touch is applied are recognized.

1 illustrates a cross-sectional structure of a conventional capacitive touch screen panel. As shown in FIG. 1, a conventional capacitive touch screen is a transparent sensor substrate attached to a rear surface of a window substrate 10 made of acrylic or glass material by an transparent adhesive layer 20 such as an optically clear adhesive (OCA). It consists of 30. On one surface of the transparent sensor substrate 30 made of polyethylene terephthalate (PET) or glass, a sensor pattern layer 31 including a transparent conductive material such as ITO and metal wiring is formed.

In the capacitive touch screen panel having such a structure, the FPCB 40 on which the sensor IC 50 is mounted is attached to the transparent sensor substrate 30 by an anisotropic conductive film (ACF) or an anisotropic conductive paste (ACP). As a result, individual sensor electrodes constituting the sensor pattern layer 31 are electrically connected to the respective sensor pins of the sensor IC 50.

However, the capacitive touch screen panel having the above structure is necessarily subjected to a process of attaching the transparent sensor substrate 30 to the window substrate 10 with the transparent adhesive layer 20 in the manufacturing process, and the defective rate in the attaching process, which is the final process. Because of this considerable level, there are certain limitations in reducing manufacturing costs. Thus, in order to overcome this limitation, a window-integrated touch screen panel having a structure as shown in FIG. 2 has been proposed. (Korean Patent Application No. 2008-0083724)

Unlike the conventional structure described above, the touch screen panel of FIG. 2 directly forms the sensor pattern layer 35 using a technique of depositing a transparent conductive material on the back surface of the window substrate 10. Since the window-integrated touch screen panel shown in this drawing does not include the transparent adhesive layer 20 and the transparent sensor substrate 30, the raw material cost is reduced, and the overall panel manufacturing yield is improved by a simplified process, thereby greatly increasing the manufacturing cost. It has the advantage of being saved.

However, in the case of a window material that requires a reinforcement treatment such as glass, the glass original plate is cut according to the shape of the individual window substrate 10 and then subjected to reinforcement treatment to form the sensor pattern layer 35 in the unit of the individual window substrate 10. Process efficiency is reduced. On the other hand, when the transparent conductive material is deposited by the glass unit to increase the process efficiency there is a problem that can not be reinforced after cutting. On the other hand, when the glass plate is reinforced and the transparent conductive material is collectively deposited, it is difficult to cut the individual window substrate 10 and the side is not hardened after cutting. There is a problem with that.

Accordingly, the present invention proposes a touch screen panel manufacturing method and a manufacturing apparatus used in the method to increase the process efficiency by collectively processing a plurality of the window substrate is reinforced.

According to an aspect of the present invention, there is provided a method of manufacturing a touch screen, the method comprising: mounting a plurality of window substrates having a predetermined size on a platform provided with a plurality of seating units, and transparent conductive material on one surface of the plurality of window substrates mounted on the platform Collectively depositing a material to form a transparent conductive layer.

Meanwhile, the method of manufacturing the touch screen panel may be extended to a process of depositing a target material on an arbitrary substrate. The deposition method according to the present embodiment includes the steps of seating a plurality of substrates having a predetermined size on a platform provided with a plurality of seating; Fastening a mask substrate on a platform on which the plurality of substrates are seated; And depositing a target material on the upper surface of the plurality of substrates seated on the platform.

Furthermore, the touch screen manufacturing apparatus according to an embodiment of the present invention comprises a chamber; A platform disposed inside the chamber and having a plurality of seating parts on which a plurality of window substrates are seated; And a target support for supporting a target material to be deposited on the plurality of window substrates.

According to the present invention, it is possible to increase the efficiency of the touch screen panel manufacturing process by depositing transparent conductive materials on a plurality of window substrates collectively.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

3 is a cross-sectional view showing the structure of a touch screen panel manufacturing apparatus according to an embodiment of the present invention. As shown in the drawing, the manufacturing apparatus is made of quartz, glass, and the like, and is equipped with a chamber 100 capable of injecting the platform 200 therein through a material inlet 110, and equipment installed inside the chamber 100. Include them. (The air supply, exhaust, pump, electrode, heating equipment, etc., which are provided in a conventional evaporator for convenience, are not shown.)

The stand 130 is disposed inside the chamber 100, and the stand 130 supports the platform 200 in which the seating portions 220, on which the plurality of window substrates are seated, are provided at a plurality of locations within the chamber 100. It plays a role. 4 illustrates a three-dimensional shape of the platform 200. Referring to the present drawing, the plurality of seating portions 220 are provided in a shape that mates with the window substrate so that individual window substrates can be properly seated. On the other hand, the platform 210 is provided with at least one mask substrate fastening protrusion 210. The protrusion 210 is inserted into the fastening hole 310 formed in the mask substrate 300 of FIG. 5 to be repeatedly disposed at a plurality of locations of the mask substrate 300 and the plurality of seating portions 220. It serves to fix the mask substrate 300 so that the alignment (Alignment) of the individual window substrate is mounted on each other.

Meanwhile, a target supporter 120 supporting the target 400 of material to be collectively deposited on a plurality of window substrates mounted on the frame 200 is provided on the chamber 100. As the material to be deposited, a transparent conductive material such as ITO or indium zinc oxide (IZO), a metal material such as aluminum, molybdenum or copper or an alloy thereof, a mask pattern layer forming material or an insulating material such as silicon or SiO 2 may be used. Can be.

The platform 200 is introduced into the chamber 100 with the mask substrate 300 fastened or without the mask substrate 300. When the mask substrate 300 is inserted in the fastened state, the target material is deposited on one surface of the window substrate in a predetermined pattern. When the mask substrate 300 is inserted into the chamber 100 without the mask substrate 300, the target material is deposited on the entire surface of the window substrate.

The platform 200 and the mask substrate 300 include a material having a variation in the coefficient of thermal expansion of the window substrate less than 5%. In general, the deposition of the target material is performed at a temperature higher than room temperature. At this time, the alignment of the plurality of window substrates may be misaligned due to the difference in the thermal expansion coefficients of the window substrates and the facilities disposed inside the chamber 100. . This problem becomes larger as the number of window substrates processed at one time in the chamber 100 increases. Therefore, by selecting a thermal expansion coefficient of at least the material of the platform 200 and the mask substrate 300 from a material which is substantially the same as the thermal expansion coefficient of the window substrate material, side effects due to thermal expansion can be prevented. Usable materials include metals, glass, quartz, SiO 2 , teflon, and other polymeric materials.

In the apparatus illustrated in FIG. 1, the platform 200 is positioned below the chamber 100, and the target support 130 is positioned above the chamber 100, but the arrangement of the platform 200 and the target support 130 may be applied. It may differ from that shown depending on the deposition method. For example, the target support 130 may be disposed below the chamber 100 and the platform 200 may face each other above the chamber.

6 and 7 illustrate a window substrate mounting structure of the touch screen manufacturing apparatus according to another embodiment of the present invention. The platform 200 of FIG. 6 includes at least one sub platform seating part 240 formed in a shape that matches the sub platform 250 so that the sub platform 250 of FIG. 7 may be seated. The sub platform 250 includes at least one seating portion 251 that is formed in a shape that matches the window substrate so that each window substrate is seated. On the other hand, each sub platform 250 is provided with a sub mask substrate fastening protrusion 252 which functions to correspond to the mask substrate fastening protrusion 210 of FIG. 4. A sub mask substrate (not shown) including a number of individual mask patterns corresponding to the seating portions 251 formed on the sub platform 250 is a fastening hole (not shown) provided at a position corresponding to the sub mask substrate fastening protrusion 252. Is fixed on each sub platform 250. When the window substrate mounting structure is layered as described above, the problem of misalignment due to thermal expansion of the platform 200, the mask substrate 300, and the window substrate may be minimized.

8 is a flowchart illustrating a step-by-step method of manufacturing a window integrated touch screen panel using the above-described touch screen manufacturing apparatus. First, in step S100, a plurality of window substrates are mounted on the seating part. In this step, the seating portion on which the window substrate is seated is a seating portion 220 or a seating portion 251 formed in the sub-platform 250 or the seating portion 220 directly provided on the platform 200. Next, the mask coupled to the platform in step S200 is put into the chamber in a state coupled to the platform in step S300. The method of coupling the mask to the platform includes a method of coupling the mask substrate fastening protrusion 210 of the platform 200 to be inserted into the fastening hole 310 of the mask substrate 300 and the fastening of the sub mask substrate (not shown). A ball (not shown) may be coupled to the sub mask substrate fastening protrusion 251 of the sub platform 250 and the sub platform 250 may be seated on the sub platform seating part 240. The coupling method using the protrusions 210 and 251 and the fastening hole 310 is only an example of mask coupling, and the mask substrate 300 or the sub such as an alignment method using an alignment mark and a coupling method using a fastening screw. Various techniques for aligning and coupling the mask substrate to the platform 200 or sub-platform 250 may be used.

Step S400 is a step of collectively depositing a transparent conductive material on a plurality of window substrates seated on the platform. In the step S400, various deposition techniques such as sputtering deposition, chemical vapor deposition (CVD), and plasma deposition may be used. The transparent conductive material is formed on one surface of the window substrate according to the shape of the mask pattern.

The sensor pattern layer formed by the transparent conductive material in step S400 is electrically connected to each sensing channel of the sensor IC mounted in the FPCB later through the wiring pattern and the bonding pad deposited in the next step S600. To this end, the platform on which the plurality of window substrates are mounted is replaced with a mask including a wiring mask pattern in step S500, and then re-injected into the chamber. In step S600, as described above, the wiring pattern layer is formed on one surface of the window substrate. For example, a metal material is collectively deposited on the plurality of window substrates. In the step S600, a wiring pattern layer may be formed using a metal material such as aluminum, molybdenum, copper, or an alloy thereof. Prior to step S600, the process of replacing the target and changing the deposition conditions of the chamber is omitted.

Unlike the order illustrated in FIG. 8, the forming of the wiring pattern layer (S600) may be performed prior to the forming of the sensor pattern layer (S400). In this case, the mask of steps S200 and S300 refers to a mask including a wiring mask pattern, and the mask replaced in step S500 refers to a mask including a sensor mask pattern.

Although not shown in FIG. 8, prior to step S100, an anti-reflection layer may be formed on one surface of the window substrate by a deposition method. This has the effect of preventing the sensor pattern from having visibility by the boundary between the region where the transparent conductive material of the sensor pattern layer is formed and the region where the transparent conductive material is not formed.

In addition, after the sensor pattern layer and the wiring pattern layer are formed, a step of forming a protective layer for preventing chemical and physical damage of the two layers may be added. The protective layer may be formed by coating or depositing SiO 2 or a transparent polymer material on one surface of the window substrate on which the sensor pattern layer and the wiring pattern layer are formed. At this time, since the protective layer should be formed except for the bonding pad portion to which the FPCB is attached, it is preferable to form the protective layer through deposition in the chamber after replacing the mask as in steps S500 and S600.

9 is a flowchart illustrating each step of forming a touch screen panel manufacturing method according to another embodiment of the present invention. Steps S100 to S400 are the same as steps S100 to S400 of FIG. 8. In operation S520, the wiring pattern layer is formed in a manner different from those of operations S500 and S600 of FIG. 8. In operation S520, a wiring pattern layer including a wiring pattern having a predetermined shape is formed on one surface of the window substrate using a technique such as silk screen printing. A representative wiring forming material available at step S520 is silver (Ag). Like the embodiment illustrated in FIG. 8, the present embodiment may also be modified to form the wiring pattern layer prior to the sensor pattern layer by disposing the step S520 in front of the step S100.

10 illustrates a method of manufacturing a touch screen panel according to another embodiment of the present invention. The first step S100 is the same as the step S100 shown in FIGS. 8 and 9. In operation S240, the platform on which the plurality of window substrates are placed is introduced into the chamber. In this step (S240) it is distinguished from the step (S300) of Figs. 8 and 9 in that the platform is introduced into the chamber without the mask is coupled.

Next, in step S340, a transparent conductive material is collectively deposited on one surface of the plurality of window substrates mounted on the platform. In step S440, a mask pattern layer is deposited on the surface of the plurality of window substrates mounted on the platform, which is placed back into the chamber after the mask is coupled, by step S540. The window substrate on which the mask pattern layer is formed on the transparent conductive material deposition layer is etched through step S640. This step (S640) is to selectively etch the portion where the mask pattern is not formed using dry etching, wet etching and other various etching techniques, step (S640) includes the process of removing the mask pattern after the completion of etching. Finally, in step S740, the wiring pattern layer is formed on the window substrate, and the techniques described in steps S500 and S600 of FIG. 8 or step S520 of FIG. 9 may be used.

11 illustrates a method of manufacturing a touch screen panel according to another embodiment of the present invention. The illustrated steps S100 to S400 correspond to the steps S100 to S400 illustrated in FIGS. 8 and 9. Meanwhile, steps S100 to S400 may be replaced with steps S100 to S640 of FIG. 10.

In operation S560, the platform is re-injected into the chamber after replacing or removing the mask of the platform on which the window substrate on which the sensor pattern layer is formed is mounted, through the above-described steps. Next, in step S660, an insulating material such as SiO 2 is deposited on the sensor pattern layer. If the mask is replaced in step S560, the insulating material is formed in a predetermined pattern in step S660, and if the platform is re-injected into the chamber with the mask removed in step S560, step S660. Insulation material is deposited on the front side of the window substrate. The former may be used to form a pattern that insulates the two bridge patterns so as not to short-circuit at the intersection when the sensor patterns are connected to each other in a bridge pattern that crosses each other. On the other hand, the latter may be used to form an insulating layer on the entire surface to electrically insulate the sensor pattern and the shielding layer when forming a transparent shielding layer for shielding noise from a display device or the like.

In step S760, after replacing or removing the mask again, the platform is reinserted into the chamber. Next, in step S860, a transparent conductive material is deposited on a plurality of window substrates.

In the case of forming the transparent shielding layer, a step of forming a wiring pattern layer is disposed between steps S400 and S560. Meanwhile, in this case, the platform may be introduced into the chamber with the mask already removed in step S560, and thus a transparent shielding layer may be formed by depositing a transparent conductive material on the remaining area except the bonding pad.

On the contrary, if the insulating layer is formed to form the cross bridge pattern, the transparent conductive material deposited on one surface of the window substrate in step S860 has the shape of a bridge pattern. At this time, the bridge pattern can be designed so that the width and length thereof are sufficiently small so that the bridge pattern is almost invisible. In this case, step S860 is to deposit a material for forming a wire such as aluminum or molybdenum instead of the transparent conductive material. Can be replaced with In this case, the bridge pattern and the wiring pattern may be formed in one process.

8 to 11 have been described various embodiments of a method for manufacturing a touch screen panel according to the present invention. 9 to 11, the details of the embodiments described with reference to FIG. 8 may be applied as they are or with some modifications, and vice versa. Further, further or modified embodiments described in connection with FIG. 8 may also be applied to the embodiments of FIGS. 9 to 11.

Furthermore, the idea of the present invention included in the above-described method for manufacturing a touch screen panel may be extended to a general process of depositing a target material in a predetermined pattern on an arbitrary substrate requiring a strengthening process such as tempered glass. That is, when it is difficult to deposit the target material on a disc basis, high process efficiency may be achieved by placing individual substrates on a platform including a plurality of seating portions, and then placing them in a chamber and processing them collectively.

Such a deposition method includes mounting a plurality of substrates having a predetermined size on a platform provided with a plurality of seating units; Fastening a mask substrate to a platform on which the plurality of substrates are seated; And depositing a target material on the upper surface of the plurality of substrates seated on the platform. As described above, the target material deposited on the substrate may include a transparent conductive material, a metal material, an insulating material, a mask pattern forming material, etc. In addition, the deposition method may be used to deposit various materials.

While the preferred embodiments of the present invention have been shown and described, the present invention is not limited to the specific embodiments described above, and the present invention is not limited to the specific embodiments of the present invention, without departing from the spirit of the invention as claimed in the claims. Many modifications are possible to those skilled in the art. In addition, matters that can be easily inferred from the accompanying drawings are to be regarded as included in the contents of the present invention even if they are not described in the detailed description, and various modifications may be separately understood from the technical spirit or the prospect of the present invention. I will not.

1 is a view showing a cross-sectional structure of a conventional touch screen panel,

2 illustrates a cross-sectional structure of a window-integrated touch screen panel;

3 is a cross-sectional view illustrating a structure of a touch screen panel manufacturing apparatus according to an embodiment of the present invention;

4 is a perspective view illustrating a three-dimensional structure of the platform of FIG. 3;

5 is a perspective view illustrating a three-dimensional structure of the mask substrate of FIG. 3;

6 and 7 are perspective views illustrating the three-dimensional structure of the platform structure and its corresponding sub-platform, respectively, partially modified from that shown in FIG. 4,

8 to 11 are flowcharts illustrating step by step methods of manufacturing a touch screen panel according to various embodiments of the present disclosure.

Detailed description of the main parts of the drawing

100: chamber

200: platform

220, 251: seating part

240: sub-platform

300: mask substrate

Claims (17)

Mounting a plurality of substrates having a predetermined size on a platform provided with a plurality of seating units; Fastening a mask substrate to a platform on which the plurality of substrates are seated; And Depositing a target material on a plurality of substrates mounted on the platform; Pattern deposition method. The method of claim 1, The plurality of substrates are characterized in that the glass substrate is a tempered treatment Pattern deposition method. The method of claim 1, The target material is at least one of a transparent conductive material, a metal material and an insulating material Pattern deposition method. In the method of manufacturing a window integrated touch screen panel, Mounting a plurality of window substrates having a predetermined size on a platform provided with a plurality of seating units; And Forming a transparent conductive layer by collectively depositing a transparent conductive material on one surface of a plurality of window substrates mounted on the platform; Window integrated touch screen panel manufacturing method. The method of claim 4, wherein depositing the transparent conductive material Depositing a transparent conductive material on one surface of the plurality of window substrates; Forming a mask pattern layer by depositing a mask material on one surface of the plurality of window substrates while the mask substrate is fastened to the platform; Etching the transparent conductive material deposited on the window substrate; And And removing the mask pattern layer. Window integrated touch screen panel manufacturing method. The method of claim 4, wherein depositing the transparent conductive material And collectively depositing a transparent conductive material on one surface of the window substrate while the mask substrate is fastened to the platform. Window integrated touch screen panel manufacturing method. The method of claim 4, wherein And forming an anti-reflection layer on one surface of the window substrate. Window integrated touch screen panel manufacturing method. The method of claim 4, wherein And depositing a metal material on one surface of the plurality of window substrates in a predetermined pattern. Window integrated touch screen panel manufacturing method. The method of claim 4, wherein And printing a metal line on the window substrate. Window integrated touch screen panel manufacturing method. The method of claim 4, wherein Forming an insulating layer on one surface of the plurality of window substrates on which the transparent conductive material is deposited; And And forming a transparent conductive layer on one surface of the plurality of window substrates on which the insulating layer is formed. Window integrated touch screen panel manufacturing method. The method of claim 4, wherein And reinforcing the plurality of window substrates. Window integrated touch screen panel manufacturing method. The method of claim 4, wherein And depositing a protective layer on one surface of the plurality of windows in which the transparent conductive layer is formed. Window integrated touch screen panel manufacturing method. In the device for manufacturing a touch screen panel, chamber; A platform disposed inside the chamber and having a plurality of seating parts on which a plurality of window substrates are seated; And A target support for supporting a target of the deposition material Touch screen panel manufacturing device. The method of claim 13, And a mask substrate fastening part for fastening a mask substrate including a predetermined mask pattern repeatedly disposed on the platform. Touch screen panel manufacturing device. The method of claim 13, At least a portion of the platform is made of a material having a variation in thermal expansion coefficient with the plurality of window substrates of less than 5% Touch screen panel manufacturing device. The method of claim 13, The platform is characterized in that it comprises at least one material of glass, quartz, metal and polymeric material Touch screen panel manufacturing device. The method of claim 13, wherein the platform A sub platform including at least one sub seating portion provided in a shape to conform to each window substrate; And And at least one sub platform seating part on which the sub platform is seated. Touch screen panel manufacturing device.
KR1020090091535A 2009-09-28 2009-09-28 Method and apparatus for manufacturing touchscreen panel KR20110034125A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101399158B1 (en) * 2012-10-25 2014-05-30 희성전자 주식회사 Manufacturing device and method for integrated touch screen panel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101399158B1 (en) * 2012-10-25 2014-05-30 희성전자 주식회사 Manufacturing device and method for integrated touch screen panel

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