KR20110033092A - Discharge lamp - Google Patents

Abstract

PURPOSE: A discharge lamp is provided to implement an electrode in which a plurality of solid bodies are combined by solid-state joining of the plural solid bodies to form the electrode. CONSTITUTION: In a discharge lamp, a metal part(40) having high melting point and a metal part(50) having high conductivity are solid state joined to form a positive electrode. A pair of electrodes is installed on the inside of the discharge lamp. At least one-way electrode are solid-state joined with a plurality of solid bodies to form an electrode. A junction area(S) is formed in anode section diameter direction to an electrode shaft. The diameter of the crystal grain around a junction area is even along the junction area.

Description

Discharge Lamp {DISCHARGE LAMP}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a discharge lamp used for an exposure apparatus and the like, and more particularly, to an electrode structure of a high output discharge lamp such as a short arc type discharge lamp.

In a short arc type discharge lamp, light of high brightness is irradiated to an exposure target such as a substrate. In order to increase the size of the exposure object and to improve the amount of work, a high output of the discharge lamp is required, and accordingly an increase in the rated power consumption is required. When the power is increased, the conventional electrode structure has an effect on electron emission, heat emission, durability, and the like. Therefore, there is a demand for an electrode structure in which metals having different crystals, types, and the like are combined.

For example, when the rated power is increased, the current consumption at the cathode tip portion is large, so that electrode consumption is severe, and the bright point of the arc discharge is moved, resulting in unstable discharge. Then, as a structure which stabilizes an arc discharge, the electrode structure which melt | dissolves a cathode tip part by a direct current discharge processing apparatus and coarsens the crystal structure of a tip part is known (refer patent document 1).

In addition, when the rated power is increased, the amount of current flowing between the electrodes of the lamp increases, and the electrode temperature rises. In particular, the positive electrode tip becomes a high temperature state, and the positive electrode tip melts and evaporates with time. As a result, the luminous efficiency is lowered due to unstable arc discharge, adhesion of metal to the tube surface due to the melting of the anode, and the lamp life is reduced due to electrode consumption.

In order to prevent the electrode melting by such overheating, the electrode structure which encloses the metal material whose thermal conductivity is higher than the metal electrode main body and whose melting point is low in the internal space of a main body is known (refer patent document 2). There, the lid member is welded to a bottomed cylindrical metal member to form an electrode having a sealed space.

Patent Document 1: Japanese Patent Application Laid-Open No. 2002-110083 Patent Document 2: Japanese Patent Application Laid-Open No. 2004-259644

(Summary of invention)

(Tasks to be solved by the invention)

Even if the crystal structure and the metal composition in the vicinity of the electrode surface are changed, the electrode characteristics such as thermal conductivity, conductivity and durability cannot be greatly improved as a whole. In particular, in the case of a large output discharge lamp, a large improvement in heat dissipation characteristics cannot be expected. However, when the electrode is formed by combining the same or different kinds of members, the bonding state between the members affects durability, thermal conductivity and the like.

For example, when a metal member is joined by welding, such as electron beam welding, the diameter of a metal crystal becomes large along a joining surface, and the magnitude | size of a diameter becomes nonuniform. In addition, the change of the crystal diameter along the electrode axis direction is discontinuous, and a crystal boundary appears at the junction portion. As a result, the electrode strength decreases at the junction.

In addition, when the metal structure such as the size of the crystal diameter is nonuniform or discontinuous near the joint surface, the heat conduction characteristics along the electrode axis direction are not uniform throughout the joint surface, and heat transport inside the electrode is not smooth. . As a result, a local overheating condition occurs inside the electrode, which speeds up electrode consumption.

Therefore, in order not to adversely affect an electrode characteristic, it is calculated | required to comprise an electrode combining several members.

The discharge lamp of this invention is equipped with a discharge tube and a pair of electrode arrange | positioned in a discharge tube, For example, it is comprised as a short arc type discharge lamp (especially a large output discharge lamp). And at least one electrode of a discharge lamp is comprised by the electrode which solid-state-bonded the some solid member, and the at least 1 solid member consists of a metal member. For example, it is possible to join a some metal member, and the number of solid members which comprise an electrode is arbitrary. Moreover, you may join together solid members directly, or may join through the member which improves joining performance, etc. between members (this intervening member can also be regarded as a some solid member).

The plurality of solid members constituting the electrode main body include a solid member (hereinafter referred to as a rear end solid member) supported by an electrode support rod, and a solid member (hereinafter referred to as a front end solid member) having an electrode end surface. It is formed by solid-state bonding between a rear end solid member and a front end solid member. In solid state joining, the joining surfaces between solid members are contacted, and solid members are joined together, pressing and heating.

In the present invention, at least a part of crystal grains (hereinafter referred to as bonding surface crystal grains) forming the bonding surface of the metal member are deformed by bonding. On the other hand, the other grains are not substantially deformed before and after bonding. For example, the joining surface crystal grains occur over the entire strained surface (surface that contributes to joining) or the deformation of the grains, or the grain boundary is a strain that contributes to the joining. In particular, when the joint surface is not a super smooth surface, large crystal grains are likely to be formed, and a small gap is generated.

On the other hand, in metal crystal grains other than the joining surface crystal grains, deformation due to the joining does not substantially occur along the joining surface vertical direction near the joining surface. Here, "it does not generate | occur | produce substantially" means that grain deformation (grain formation) and grain boundary movement which directly contribute to the bonding do not occur, and the grain before bonding is hardly deformed after the bonding.

Crystals in the vicinity of the joining surface of the metal member after joining by such a solid joining, that is, joining surface crystal grains are used for direct joining, and other metal structures (crystal grains) are excluded from the influence of joining. The diameter has a uniform characteristic. That is, the crystal grain of a metal member becomes substantially uniform along the joining surface of a metal member, and becomes substantially uniform along a joining surface vertical direction.

Therefore, in the vicinity of the joint surface, enlarged crystal grains by primary and secondary recrystallization are generated, such as electron beam welding, and the like, and the enlarged crystal grains are not formed in a layer shape along the joint surface vertical direction. There is no change in discontinuity in the joining surface direction and the joining surface vertical direction.

Thereby, about the metal crystal structure in a joining surface, it is the structure excellent in balance regarding durability and thermal conductivity. While the required strength is obtained by reliable solid phase joining at the joining surface, the crystal structure differs from other metal structures only on the joining surface with respect to heat transport and conductivity. Therefore, the capability does not fall remarkably compared with the electrode of an integral structure.

Thus, since electroconductivity, thermal conductivity, and durability are stable in the vicinity of a joining surface, thermal conductivity, durability, etc. fall locally, and there is no possibility that abrupt partial electrode consumption may arise. Therefore, it is possible to select heterogeneous or homogeneous solid members and to join while freely designing the electrode shape, such as to improve heat transfer, electron emission characteristics, durability, and the like, thereby obtaining an electrode structure having excellent characteristics.

Moreover, the discharge lamp electrode in another situation of this invention is arrange | positioned in the discharge tube of a discharge lamp, Comprising: The some solid member containing the front end side solid member containing an electrode front end surface, and the rear end side solid member supported by the electrode support rod. An electrode composed of a plurality of solid members, which is formed by solid-state bonding between a front end solid member and a rear end solid member, wherein at least one of the plurality of solid members is a metal member and forms a joining surface of the metal member. At least a part of the surface crystal grains are deformed by the bonding, and for metal grains other than the bonding surface grains, deformation due to the bonding is not substantially generated along the bonding surface vertical direction in the vicinity of the bonding surface.

On the other hand, the discharge lamp or the electrode for the discharge lamp in another aspect of the present invention can be provided with an electrode in which the bonding surface is inclined in the solid state bonding. That is, a discharge lamp is an electrode provided with a discharge tube and a pair of electrode arrange | positioned in a discharge tube, and at least one electrode is formed by solid-state joining a some solid member.

At least one of the plurality of solid members is a metal member, and the crystal diameter of the metal member is almost uniform along the joining surface between the members, and the metal crystal and the crystal structure are inclined along the joining surface vertical direction near the joining surface of the metal member. It is mad.

"Sloped" is described in the following references 1 and 2, for example.

[Reference 1] 「Patent Distribution Support Chart」 15 Chemistry 14 Light Metal Base Composite Material

Industrial property rights and training center,

1.1.1 Description of Light Metal Based Composites (7) Inclination

(http // ww.ryutu.inpit.go.jp / chart / H15 / kagaku14 / 1 / 1-1.pdf)

[Ref. 2] 「Technology Development of Inclined Functional Materials」 CMC Publishing, September 22, 2009

Chapter 1 Appearance of Slope Functional Materials

1.3 Basic Concepts of Functionally Graded Materials, pp. 5, 6

1.6 Prospect of Tilt Functional Materials, page 10

As described in Documents 1 and 2, the inclination means a state in which a composition, structure, or other function other than that is continuously changed therein. In the present invention, it shows that the structure of the metal crystal, that is, the metal member, is continuously or stepwise changed along the joining plane vertical direction with respect to its properties, properties, and functions, and is distributed (tilted) structure near the joining plane. Means that is expressed. For example, as one specific feature, when solid-state bonding a plurality of solid members including a metal member, the crystal diameter is continuously changed along the direction away from the bonding surface.

In the present invention, by solid-state joining the solid-state members that are separately prepared, the structure of the metal crystal grains and the metal structure of the joining surface are excellent in terms of durability and thermal conductivity. The diameter of the metal crystal is almost uniform along the joint surface between the solid members, and the crystal along the joint surface vertical direction is inclined near the joint surface. In other words, the crystal is stepwise and continuous in the vicinity of the joint surface, and there is no abrupt crystal change.

In the vicinity of the bonding surface, since the conductivity, thermal conductivity, and durability are stable, thermal conductivity, durability, and the like are locally lowered, and there is no fear of sudden partial electrode consumption, thereby improving heat transfer, electron emission characteristics, and durability. By selecting and joining heterogeneous or homogeneous solid members, an electrode structure having excellent characteristics can be obtained.

The grain deformation or inclination of the joining surface should just be formed generally in the range which satisfies the condition which avoids partial and local ubiquitous. As for the solid state bonding method, a solid state bonding method using thermal diffusion, electric field diffusion, or the like may be applied. For example, it is preferable to apply diffusion bonding which is one of solid state bonding methods. Specifically, the solid members can be joined to each other by the discharge plasma sintering method (SPS * † * method) or the like. In the solid phase bonding process, heating conditions, pressurization conditions, and the like are set so as to realize grain deformation / tilting.

The degree of smoothness of the joining surface of the solid member varies, and when it is not the ultra smooth surface, a minute gap occurs in the joining surface. It is conceivable to heat only a small gap so as not to cause grain deformation. In this case, it is preferable to join solid members together by bonding (SPS bonding) by a discharge plasma sintering system.

About the combination of a joining member, what is necessary is just to determine the combination of a solid member according to the purpose, such as a heat-transport effect, durability, etc., and also to determine an electrode shape according to the objective. The number of solid members constituting the electrode is arbitrary. For example, in a short arc discharge lamp or the like, an electrode is constituted by a truncated cone-shaped electrode tip and a circumferential electrode fuselage. The joining surface is an electrode tip or an electrode fuselage depending on the combination and shape of a solid member. It is possible to be located at

As a combination of a specific solid member, you may comprise an electrode main body with two combinations of a front end side solid member and a rear end side solid member. For example, in the case of the electrode shape which consists of a columnar part and a cone-shaped part, it is also possible to join the solid member which comprises a part of an electrode tip part and an electrode body part, and the solid member which comprises a remainder electrode body part, and also an electrode body part And a solid member constituting a part of the electrode tip and a solid member constituting the remaining electrode tip. Alternatively, the electrode tip portion and the electrode body portion may be formed of separate solid members, respectively, and may be joined.

For example, when the whole electrode tip part is comprised by one solid member, a 1st solid member can be comprised by the truncated electrode tip part of a truncated cone shape, and the columnar junction part which has a diameter equal to the diameter of a 2nd solid member. . With such an electrode structure, the structure of the body portion can be designed relatively freely, such as forming a heat radiation fin in the circumferential direction to form an inner space in the body portion.

On the other hand, when only a part of an electrode tip part is comprised by one solid member, a 2nd solid member is comprised by the trunk | drum and the cone-shaped electrode junction part joined with a 1st solid member. With such an electrode structure, a design such as changing only the characteristics of the electrode tip portion is possible.

In consideration of increasing the heat transport effect along the electrode axial direction, it is preferable to join the solid members having different thermal conductivity and to configure the electrode body portion on the electrode support rod side by the relatively high solid member of the thermal conductivity. For example, high melting point solid members, such as pure tungsten, can be comprised as an electrode body part. On the other hand, for the purpose of constituting a free electrode shape, it is also possible to form electrodes by joining solid members of the same kind and the same characteristic.

When the whole electrode tip part is comprised by one solid member, a tip side solid member can be comprised by a truncated electrode tip part and a columnar junction part. With such an electrode structure, the structure of the body portion can be designed relatively freely, such as forming an internal space in the body portion or forming a heat radiation fin in the circumferential direction. In addition, you may comprise only one part of an electrode tip part with one solid member.

Usually, the electrode shape is symmetrical about the electrode axis, and the heat and the current become the movement along the electrode axis. Therefore, it is preferable to arrange | position a solid member in place along the electrode shaft, and it is good to solid-state-bond a solid member so that a joining surface may be formed along an electrode shaft vertical direction. For example, in the case of cutting and forming an electrode after solid phase bonding, when the bonding surface is formed along the vertical direction of the electrode shaft, the electrode stability during operation becomes excellent.

In a discharge lamp in which an anode is placed vertically above, when a solid member having high thermal conductivity is bonded to an electrode tip such as tungsten, the distance in the electrode axial direction from the electrode tip surface to the bonding surface is the same. Therefore, there is no variation in the transport of heat along the electrode axis, and the temperature distribution during lamp lighting is symmetrically distributed around the electrode axis, and electrode wear due to local overheating does not occur.

In consideration of preventing overheating of the electrode, it is preferable to enhance the heat dissipation effect together with the?-? Transport. If the contact surface of the solid member to be joined is not completely flat (super smooth surface), the gap remains partially after the bonding even after the bonding, and heat is released from the gap during lamp lighting. Therefore, it is good to solid-state-bond solid members which have a contact surface like a clearance gap formed along a joining surface. For example, a wedge may be formed along the circumferential direction near the electrode surface to form a gap.

As mentioned above, about a manufacturing method of an electrode, a some solid member can be joined by SPS bonding, for example. In this case, it is preferable to locally heat the joint surface by increasing the current density sent to the joint surface as much as possible. Therefore, if the area (area contributing to the joining) along the joining surface of the metal member is S01, and the cross-sectional area along the electrode axis vertical direction in the filling part of the metal member is S02, it is configured to satisfy S02> S01. desirable. For example, you may reduce the joint surface area by making a conical shape near a joint surface.

Alternatively, a sealed space may be formed inside the electrode, and the bonding surface may be configured as an edge portion. Considering that the bonding portion (ie, the heating portion) has a uniform distribution with respect to the electrode axis, in consideration of the excellent balance of strength at the time of bonding, the joining surface becomes the smallest in the radial cross-sectional area of the electrode body of the substantially cylindrical shape. It is preferable to comprise S01 so that it may become a shape or ring shape.

Regardless of the degree of smoothing of the joining surface, in order to improve the joining state between the solid members, the soft members may be sandwiched between the solid members. In order to increase the bonding strength, it is preferable to join the metal member with another solid member with an intervening solid member interposed therebetween. For example, the intervening solid member is configured as a member that is softer than the solid member to be joined. Here, the "soft" member is, for example, one having a low hardness, rich in ductility or malleability (high), and a member having a larger deformation than a solid member at the time of joining.

For example, when a metal member is tungsten, what is necessary is just to comprise so that at least any one of molybdenum, tantalum, vanadium, niobium, titanium, gold, platinum, and rhenium may be softer than tungsten. In addition, in consideration of stabilizing thermal conductivity and conductivity, an alloy containing tungsten in the interposing solid member may be used.

As the electrode structure, a concave metal member is provided, a plurality of solid members are joined to form a sealed space inside the electrode, and a low melting point metal melted at the time of lighting is inserted into the sealed space to improve heat transport efficiency in the electrode axial direction. It is possible to let.

In this case, after the electrode main body is formed, the electrode supporting rod is joined to the rear end side solid member. At this time, the rear end side solid member deform | transforms by the pressure in the electrode support rod side, and there exists a possibility that joining surface peeling may occur because the pressure is transmitted to a joining surface.

In order to prevent this, it is preferable that the joining surface of the concave metal member is located at the lamp center side (the other electrode side) than the tip end portion of the rear end side solid member supported by the conductive electrode support rod. In the joining surface, it is preferable to construct the joining surface (for example, joining surfaces on both the concave wall surface and the end face of the metal member) so that a gap leading to the sealed space does not occur. In addition, in consideration of preventing the molten metal from being pushed into the joining surface, the joining surface of the concave metal member is preferably configured to be located at the electrode support rod side rather than the solidification range of the lit metal melted at the time of lighting.

In order to enhance the heat dissipation effect of the electrode itself, it is desirable to increase the surface area. By joining a plurality of solid members to form an electrode in a pin shape and a slice shape, an electrode structure of a deep groove, which has been difficult in the conventional production, becomes possible.

For example, a plurality of plate-like solid members having different sizes and diameters may be provided, and a plurality of plate-like solid members may be joined to change the electrode diameter along the electrode axis direction. By joining the plate-shaped fixing members having different diameters, it is possible to construct an electrode in which the electrode diameter in the direction perpendicular to the electrode axis increases intermittently with the columnar electrode body portion.

Alternatively, it is also possible to form an electrode in which pins are arranged along the electrode axis direction. For example, an electrode tip member having an electrode tip surface as a plurality of solid members, and a body in which a plurality of pins extending in the radial direction from a tubular member having a smaller size and diameter than the electrode tip member are arranged at predetermined intervals in the circumferential direction. A member may be prepared and the electrode which coaxially joined the electrode tip member and the cylindrical member may be configured. As a result, a deep groove can be formed in the columnar electrode body portion along the electrode axial direction. Moreover, it is good also as a structure which also joins a pin and an electrode tip member.

In the case of an electrode having such a pin shape, it is necessary to form a fin so that the joining surface of the electrode tip member constitutes a part of the longitudinal cross section of the groove, protect the fin from discharge, and prevent the gas that is overheated by the discharge from directly entering the joining portion. good. The plurality of pins are formed to have a radial size that does not protrude from the joining surface of the electrode tip member.

Moreover, when the number of fins is increased in order to improve heat dissipation, the cross-sectional area of the electrode body portion becomes small, and thermal conductivity in the electrode axial direction is lowered. Therefore, if the cross-sectional area along the electrode axis vertical direction of the fuselage member is S11 and the cross-sectional area along the electrode axis vertical direction of the virtual fuselage member when the groove between the plurality of pins is filled is S12, S12 × 2/3 ≦ S11 is satisfied. It is good to configure it.

The manufacturing method of the electrode for discharge lamps in another aspect of this invention contains the front-end side solid member containing an electrode front end surface, and the rear-end side solid member supported by the electrode support rod, At least one solid which is a metal member As a manufacturing method for solid-state joining a member between a front end side solid member and a rear end solid, at least one part of the joining surface crystal grains which form the joining surface of a metal member is deformed by joining, About metal grains other than joining surface grains In the vicinity of the bonding surface, a plurality of solid members are solid-bonded so that deformation due to bonding does not substantially occur along the bonding surface vertical direction. For example, as a solid-state joining method in which only the joining surface crystal grains contribute to joining, it is preferable to apply SPS joining that gives local heating to the micro gaps of the joining surfaces.

On the other hand, the manufacturing method of the electrode for discharge lamps in another situation of this invention is a some solid member containing the 1st solid member which has an electrode front end surface, and the 2nd solid member supported by the electroconductive electrode support rod, A manufacturing method for solid-state bonding a plurality of solid members, at least one of which is a metal member, between a first solid member and a second solid member, wherein the crystal diameter of the metal member is made substantially uniform along the joining surface between the members. It is characterized by solid-state bonding of the plurality of solid members so that the metal crystals are inclined along the joining plane vertical direction in the vicinity of the joining plane.

In addition, the discharge lamp electrode or the discharge lamp in another aspect of the present invention is not only solid-state bonding as described above, that is, surface bonding only by the substantial bonding surface crystal grains, or electrode by inclination, The electrode which joined the some solid member by the welding method is also included. In the case of a discharge lamp, it is an electrode provided with a discharge tube and a pair of electrode arrange | positioned in a discharge tube, and at least one electrode is formed by welding a some solid member, At least one of a some solid member is a metal member.

The electrode for the discharge lamp or the discharge lamp has the same characteristics as described above, that is, a structure for installing an interposing solid member, a structure for providing an airtight space to adjust the position of the electrode support rod joint portion and the joint surface with respect to the metal solidification range, At least any one structure of the electrode provided with the slice structure and fin structure which increased the electrode surface area is provided.

According to this invention, the electrode which combined various solids can be comprised, without affecting an electrode characteristic.

1 is a plan view schematically showing a short arc type discharge lamp according to a first embodiment.
2 is a schematic cross-sectional view of the anode.
3 is a view showing a discharge plasma sintering apparatus.
Fig. 4 is a sectional view of the anode of the discharge lamp in the second embodiment.
Fig. 5 is a sectional view of the anode of the discharge lamp in the third embodiment.
Fig. 6 is a sectional view of the anode of the discharge lamp in the fourth embodiment.
Fig. 7 is a sectional view of the anode of the discharge lamp as the fifth embodiment.
8 is a cross-sectional view of the anode of the discharge lamp in the sixth embodiment.
9 is a plan view of the anode of the discharge lamp according to the seventh embodiment as seen from above.
Fig. 10 is a side view of the anode of the discharge lamp in the seventh embodiment.
11 is a cross-sectional view of the anode of the discharge lamp in the seventh embodiment.
Fig. 12 is a sectional view of the anode of the discharge lamp in the eighth embodiment.
FIG. 13 is a diagram showing an electron micrograph showing a bonding state of uniform crystal diameters of an anode in Example 1. FIG.
FIG. 14 is a view showing an electron micrograph showing a bonding state of a uniform crystal diameter of an anode in which an intervening metal member is interposed between metal members in Example 2. FIG.
FIG. 15 is a diagram showing an electron micrograph showing an inclined bonding state of the anode in Example 3. FIG.
FIG. 16 is a diagram showing an electron micrograph showing a bonding state of an anode by electron beam bonding. FIG.

(Form to carry out invention)

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings.

1 is a plan view schematically showing a short arc type discharge lamp according to a first embodiment.

The short arc type discharge lamp 10 is a discharge lamp which can be used for a light source or the like of an exposure apparatus (not shown) for pattern formation, and has a transparent quartz glass discharge tube (light emitting tube) 12. In the discharge tube 12, the cathode 20 and the anode 30 are disposed to face each other at a predetermined interval.

On both sides of the discharge tube 12, quartz glass sealing tubes 13A, 13B are provided integrally with the discharge tube 12, and both ends of the sealing tubes 13A, 13B are joined by brackets 19A, 19B. It is blocked. The discharge lamp 10 is disposed along the vertical direction such that the positive electrode 30 is on the upper side and the negative electrode 20 is on the lower side. As will be described later, the anode 30 is composed of two metal members 40 and 50.

Inside the sealing tubes 13A and 13B, conductive electrode supporting rods 17A and 17B for supporting the metallic cathode 20 and the anode 30 are arranged in an array, and a metal foil such as a metal ring (not shown) or molybdenum is arranged. It is connected to the conductive lead rods 15A, 15B through 16A, 16B, respectively. Sealing tube 13A, 13B is welded with the glass tube (not shown) provided in sealing tube 13A, 13B, and by this, the discharge space DS in which mercury and a rare gas were enclosed is sealed.

The lead rods 15A, 15B are connected to an external power supply (not shown), and the cathodes 20, 15A, 15B, the metal foils 16A, 16B, and the electrode support rods 17A, 17B are connected to each other. A voltage is applied between the anodes 30. When electric power is supplied to the discharge lamp 10, arc discharge occurs between the electrodes, and bright rays (ultraviolet light) by mercury are emitted.

2 is a schematic cross-sectional view of the anode.

The anode 30 is an electrode composed of a metal member (front-side solid member) 40 having an electrode tip surface 40S and a metal member (rear-side solid member) 50 joined to the metal member 40. , The metal member 40 has a cone-shaped portion 40A including the electrode tip surface 40S, and a columnar portion having the same diameter as the cylindrical metal member 50, and joined to the metal member 50 ( 40B). The metal member 50 is supported by the electrode support rod 17B at the rear end surface 50B.

The metal member 40 is comprised by high melting point, such as pure tungsten, or the alloy which has tungsten as a main component. On the other hand, the cylindrical metal member 50 contains a metal having a higher thermal conductivity than the metal member 40 (for example, pure tungsten, molybdenum, a getter effect, tantalum, aluminum nitride having high thermal conductivity, etc.). It is composed of metal.

The metal members 40 and 50 are solid-state bonded by the discharge plasma sintering (SPS sintering) system. In this embodiment, by adjusting the heating and pressurization at the time of joining, the joining surface crystal grains which become the crystal grains of the metal members 40 and 50 which comprise a joining surface deform so as to contribute to joining, and in other metal structures However, crystal deformation due to bonding does not substantially occur along the electrode axis direction.

The metal members 40 and 50 are solidified by sintering metal powder, respectively, and the metal structure is a primary recrystallization structure. On the other hand, when the metal members 40 and 50 are solid-bonded and the electrode 30 is constituted, the secondary recrystallization is performed along the electrode axial direction and the bonding surface direction in the vicinity of the bonding surface S of the metal members 40 and 50. No grain enlargement, grain boundary migration, or the like due to this occurs, and a bonding layer in which the crystal structure is enlarged and deformed along the electrode axis X is not formed.

That is, the bonding surface crystal grains which are exposed (exposed) facing each other on the bonding surfaces of the metal members 40 and 50 are only bonded to each other, and for other metal crystal grains, bonding is also performed in the bonding surface direction and the vertical direction. Almost no deformation, recrystallization, and grain boundary movement contribute to By such solid phase joining, the crystal diameter in the vicinity of the joining surface of the metal member after joining becomes almost uniform along the joining surface of the metal member, and becomes substantially uniform along the joining surface vertical direction.

By forming the metal structure which has such a joining surface S, a deviation does not generate | occur | produce along the joining surface S with respect to thermal conductivity and electroconductivity. The temperature distribution inside the anode is symmetrically distributed about the electrode axis X while heat is transferred from the electrode tip surface 40S (1000 占 폚 or more) that becomes high temperature by the lamp lighting toward the electrode support rod 17B. The heat transport is hardly affected by the bonding surface S.

3 is a view showing a discharge plasma sintering apparatus.

The joining method by discharge plasma sintering (SPS) is a joining method in which pulsed electrical energy is directly injected into the particle gap of the molded body, and high temperature energy of the discharge plasma generated instantaneously by the spark discharge phenomenon is applied to thermal diffusion, electric field diffusion and the like.

The discharge plasma sintering apparatus 60 of FIG. 3 is provided with the vacuum chamber 65, between the upper punch 80A, the lower punch 80B, and the graphite die 80 provided in the vacuum chamber 65, The metal members 40 and 50 which have the shape shown in FIG. 2 are provided in the state which contacted the surface which respectively joins. The metal members 40 and 50 are sintered and solidified, and the metal members 40 and 50 are formed by metal processing such as cutting. In addition, after joining the metal members 40 and 50, you may shape | mold by cutting etc.

The upper punch 80A and the lower punch 80B made of graphite are connected to the upper punch electrode 70A and the lower punch electrode 70B, respectively. After the inside of the apparatus is vacuumed, a voltage is applied between the upper punch 80A and the lower punch 80B by the pulse power supply 90.

In addition to the energization, pressure is applied between the upper punch 80A and the lower punch 80B by a pressure mechanism (not shown). After heating up to predetermined | prescribed sintering temperature by the discharge plasma by electricity supply, it maintains for a fixed time in the state which applied pressure. As a result, an anode having the shape shown in FIG. 2 is obtained. The pressure and the sintering temperature are determined so as to realize the above bonded state. For example, the pressure is 50 to 100 MPa, the pressurization time is 5 to 20 minutes, and the sintering temperature in the vicinity of the bonding surface is determined to be in the range of 1600 to 1800 ° C.

Thus, according to this embodiment, the anode 30 of the short arc type discharge lamp 10 is comprised by SPS joining the metal member 40 of high melting | fusing point and the metal member 50 with high thermal conductivity. By joining the cone-shaped metal member 40 and the columnar metal member 50, the joining surface S is along the direction perpendicular | vertical to the electrode axis X, ie, the anode cross section radial direction.

While the lamp is turned on, the vicinity of the electrode tip surface 40S becomes very high, but the heat of the tip portion is effectively transported to the electrode supporting rod side by the metal member 50. Thereby, electrode consumption by electrode overheating can be prevented. In addition, crystal deformation due to bonding occurs with respect to the crystal grains along the bonding surface S, while recrystallization, enlargement, deformation, grain boundary movement, etc. due to bonding hardly occur with other grains.

Therefore, in the bonding surface S perpendicular | vertical to the electrode axis X, thermal conductivity, electroconductivity, etc. are the same as a whole, and there is no deviation. As a result, heat transport along the electrode shaft occurs throughout the anode, and there is no fear of locally overheating inside the electrode.

Next, the discharge lamp which is 2nd Embodiment is demonstrated using FIG. In 2nd Embodiment, the metal member (henceforth intervening metal member) which improves bonding strength between metal members is provided. About the other than that structure, it is substantially the same as 1st Embodiment.

4 is a cross-sectional view of the anode of the discharge lamp in the second embodiment.

The anode 130 is an electrode formed by solid-state bonding the metal member 140 and the metal member 150. And the interposition metal member 155 which makes bonding more reliable is interposed between the metal member 140 and the metal member 150.

The intervening metal member 155 is a plate-shaped mixture of tungsten and a metal that is softer (higher in ductility, etc.) than tungsten (for example, molybdenum, vanadium, niobium, titanium, gold, tantalum, platinum, rhenium, and the like). It is a member formed in foil shape, and is softer than the metal members 140 and 150. FIG.

Since it is soft, joining performance becomes higher than joining the metal members 140 and 150 directly, and the favorable joining state can be maintained, even if the joining surface of the metal members 140 and 150 is not very smooth. In addition, since tungsten is contained, thermal conductivity and conductivity are less likely to be nonuniform throughout the electrode.

As described above, according to the second embodiment, the metal member is joined while sandwiching the intervening metal member for increasing the bonding strength. As a result, the bonding strength of the electrode is further increased. In particular, even when the joining surface of a metal member contains the fine unevenness | corrugation which is not a super smooth surface, it can be reliably joined. The interposing metal member 155 is preferably a metal member in which rhenium and tungsten are mixed in consideration of the stable electrode characteristics. However, the interposing metal member 155 may be configured to interpose a metal member containing no tungsten.

Next, the discharge lamp which is 3rd Embodiment is demonstrated using FIG. In the third embodiment, a sealed space is formed inside the anode, and the molten metal is sealed in the sealed space. About the other than that structure, it is substantially the same as 1st Embodiment.

5 is a cross-sectional view of the anode of the discharge lamp in the third embodiment.

The anode 230 is comprised from the metal member 240 in which the cylindrical recessed part 240P is formed, and the metal member 250 joined to the electrode support rod 217B. The peripheral edge portion 240W of the metal member 240 is joined to the metal member 250. A step is formed in the junction part of the metal member 250, and the groove | channel is formed in the circumferential direction according to the peripheral edge part 240W of the metal member 240. As shown in FIG.

The electrode support bar 217B is formed by joining the fitting portion 255 of the metal member 250 after the anode 230 is molded. The joining surface S is located on the lamp center side rather than the tip end of the fitting portion 255. Thereby, when fitting the electrode support rod 217B, the metal member 250 deform | transforms as a whole and prevents a junction part from peeling off.

A low melting point molten metal is enclosed in the sealed space 245 formed between the metal members 240 and 250. The molten metal is melted when the lamp is turned on, and circulation of heat occurs along the electrode axis X in the sealed space 245. Since the joining surface S is located on the electrode support rod side rather than the solidified end face (upper end), there is no possibility that molten metal will enter the joining surface S. FIG.

In addition, the concave side surface 240T and the peripheral edge portion 240W of the concave metal member 240 are joined to the metal member 250 without providing a gap leading to the sealed space 245 in the joint surface S. FIG. Then, the inner surface of the metal member 250 protrudes toward the lamp center side rather than the joining surface S. FIG. Therefore, the molten metal is reliably prevented from entering the vicinity of the bonding surface S. FIG.

Thus, according to 3rd Embodiment, the sealed space is formed in the inside of the anode, and the metal which melts at the time of lamp lighting is enclosed. As a result, heat transport from the anode tip side to the electrode support rod side is effectively exhibited.

Moreover, since a sealed space is formed, the joining surface cross-sectional area (area of the annular peripheral portion 240T) is smaller with respect to the cross-sectional area along the joining surface S of the metal member 250. Thereby, heating at the time of joining becomes local and uniform distribution with respect to an electrode axis, and it can realize more effective joining. Generally, what is necessary is just to comprise so that a joining surface area may become smaller than a metal member cross-sectional area.

Next, the discharge lamp which is 4th, 5th embodiment is demonstrated using FIG. 6, FIG. In 4th and 5th embodiment, the protrusion part which contacts a molten metal is provided. About the other than that structure, it is substantially the same as 3rd Embodiment.

6 is a cross-sectional view of the anode of the discharge lamp in the fourth embodiment. Fig. 7 is a sectional view of the anode of the discharge lamp as the fifth embodiment.

As shown in FIG. 6, the anode 330 is composed of metal members 340 and 350, and a columnar metal protrusion member 390 is solid-bonded along the electrode shaft X to the metal member 350. have. Here, the columnar metal projection member 390 may be integrated with the metal member 350 by molding by cutting. The tip end of the protruding member 390 is in contact with the molten metal 370. The thermal conductivity and melting point of the protruding member 390 are lower than that of tungsten and higher than that of the molten metal 370.

By providing such a projection member 390, the heat transportation efficiency is increased. In addition, it is possible to arbitrarily select the material of the protruding member 390 from the viewpoint of thermal conductivity and melting point. In addition, the protruding member 390 may be brought into contact with the metal member 340.

In the anode 330A shown in FIG. 7, the projection member 390A is solid-bonded to the metal member 340. As a result, heat transfer proceeds to a faster stage after the lamp is turned on, and the strength of the metal member 340 is increased. In addition, the projection member 390A may be brought into contact with the metal member 350.

Next, the discharge lamp which is 6th Embodiment is demonstrated using FIG. In the sixth embodiment, heat dissipation fins are formed around the electrode body. About a structure other than that, it is the same as that of 1st Embodiment.

8 is a cross-sectional view of the anode in the sixth embodiment.

The anode 430 alternates between disk-shaped plate-shaped metal members 480 and 490 having different sizes (diameters) between the metal member 450 supported by the electrode support bar 417B and the metal member 440 on the tip side. These members are solid-bonded by the structure arrange | positioned. The plate-shaped metal members 480 and 490 are inserted through the shaft member 470 and coaxially arranged.

Thereby, the electrode structure which arrange | positioned the plate-shaped metal member 480 which functions as a pin along the electrode axis X at predetermined intervals can be implement | achieved. As a result, the release of heat can be further increased. In addition, the shape of the plate-shaped metal members 480 and 490 is arbitrary (square etc.), You may solid-state join the plate-shaped metal member of different materials.

Next, the discharge lamp which is 7th Embodiment is demonstrated using FIGS. In the seventh embodiment, heat dissipation fins extending in the electrode axial direction are formed in the electrode body portion. About a structure other than that, it is the same as that of 1st Embodiment.

It is a top view which looked at the anode in 7th Embodiment from the back end side. 10 is a side view of the anode in the seventh embodiment. 11 is a cross-sectional view of the anode in the seventh embodiment.

As shown in FIG. 9, the anode 530 is composed of a truncated tip portion 540, a columnar body portion 550, and a pin portion 550A, and solid-state junction of the tip portion 540 and the body portion 550. The anode 530 is comprised by this.

In the trunk | drum 550, the fin part 550A is integrally formed in the form which protrudes in the radial direction from the columnar main-body part 550S, and several pin is arrange | positioned at predetermined intervals in the circumferential direction. The pin portion 550A extending along the electrode shaft X is joined at the rear end surface 540T of the tip portion 540. The tip portion 540 is a metal member made of tungsten, and the columnar body portion 550S and the pin portion 550A are configured as a metal member mainly composed of molybdenum having good heat dissipation. Here, columnar main-body part 550S and pin part 550A are integrally formed by cutting.

The radial length of the pin portion 550A is determined so as not to protrude from the rear end surface of the tip portion 540. As a result, the heat released from between the pin portions 550A of the body portion 550 is discharged to the electrode finger rod side and the electrode side surface side. This can prevent the electrode tip surface from overheating (see FIG. 11). In addition, the pin portion 550A of molybdenum and its junction portion are not exposed to the anode tip side by the rear end surface 540T of the tip portion 540. Therefore, it can protect from discharge. Moreover, arrangement | positioning, the number, and shape of a pin are arbitrary.

If the size of the fin with respect to the body portion is increased to increase the heat dissipation, the conductivity and thermal conductivity of the body portion 550 may be reduced, and the tip portion 540 may be overheated. Therefore, the cross-sectional area of the columnar portion in the case where the groove between the adjacent pins of the pin portion 550A is filled with the cross-sectional area composed of the columnar body portion 550S and the pin portion 550A of the trunk portion 550 (here, the tip portion ( If the area of the rear end surface 540) is S12, it is determined to satisfy S12 x 2/3?

Next, the discharge lamp which is 8th Embodiment is demonstrated using FIG. In 8th Embodiment, unlike 1st-7th embodiment, it inclines in the vicinity of a joining surface. About a structure other than that, it is the same as that of 1st Embodiment.

12 is a cross-sectional view of the anode of the discharge lamp in the eighth embodiment.

The anode 630 is an electrode formed by joining the metal member 680 and the metal member 670. The metal member 670 is composed of a cylindrical portion 672 and a truncated cone-shaped portion 674 having a recess 674S. The metal member 680 having the electrode tip end surface 680S is shaped to fit in the metal member 670. In the vicinity of the joining surface S by SPS joining, a metal crystal is substantially uniform along the radial direction of a joining surface, and is "inclinated" along the direction of the electrode axis X. FIG.

That is, in the vicinity of the bonding surface S, the inclined layer is formed, and metal structure characteristics, such as a crystal diameter, change continuously or gradually and stepwise along the electrode axis X, and a sudden change does not occur. By declination, the crystal diameter is continuously changed along the electrode axis (X).

By such joining, there is no variation along the joining surface S with respect to the thermal conductivity and the conductivity. The temperature distribution inside the anode is symmetrically distributed about the electrode axis X while heat is transferred from the electrode tip surface 40S (1000 占 폚 or more) that becomes high temperature by the lamp lighting toward the electrode support rod 17B. The heat transport is not affected by the bonding surface S.

SPS bonding is performed as a method of manufacturing the electrode inclined in the vicinity of a bonding surface. The pressure and the sintering temperature are determined such that the bonding state is realized. For example, a pressure of 50 to 100 MPa, a press time of 10 to 60 minutes, and a sintering temperature in the vicinity of the joining surface are determined in the range of 1600 ° C to 2000 ° C, and are appropriately determined in consideration of materials and the like.

As described above, according to the present embodiment, the anode 630 of the short arc type discharge lamp is constituted by SPS joining the high melting point metal member 680 and the high thermal conductivity metal member 670. The joining surface S is along the direction perpendicular | vertical to an electrode axis, ie, the diameter direction of an anode cross section. Moreover, it is also possible to set it as the anode structure (refer FIG. 2) shown in 1st Embodiment.

While the lamp is turned on, the vicinity of the electrode tip surface 680S becomes extremely high, but the heat of the tip portion is effectively transported to the electrode support rod side by the metal member 670. Thereby, electrode consumption by electrode overheating can be prevented. Moreover, in the bonding surface S perpendicular | vertical to an electrode axis, thermal conductivity, electroconductivity, etc. are the same as the whole, and there is no deviation. As a result, heat transport along the electrode shaft occurs all over the inside of the anode, and there is no fear of locally overheating inside the electrode.

In 1st-8th embodiment, you may manufacture an electrode by the diffusion bonding method other than SPS sintering method. For example, an electrode can be manufactured by the joining method which sinters under pressure, such as hot press (HP) and hot hydrostatic pressure (HIP). Moreover, other solid state joining methods (friction welding method, ultrasonic joining method, etc.) are also applicable, and it is also possible to stabilize a metal structure uniformly by such a method. Moreover, also about a cathode, it is good also as an electrode structure which solid-state-bonded some metal member.

In consideration of electrode characteristics other than heat transport, the joining surface may be formed along a direction other than the vertical direction of the electrode axis. Moreover, it is also possible to make the clearance gap formed along the joining surface into a wedge shape, and to make an electrode surface into a fin shape, and to heighten a thermal radiation effect further. In addition, it is also possible to comprise so that a clearance gap may not be provided in a joining surface.

The number of metals constituting the electrode is arbitrary, and the electrode may be composed of three or more metals. Moreover, the same kind of metal may be joined together by solid state, and also in 3rd-8th embodiment, you may interpose an interposition metal member similarly to 2nd embodiment.

In the third embodiment, since the sealed space is formed inside, the bonding area is smaller than the cross section of the metal member. However, the constitution may be applied to the first to second and fourth to eighth embodiments. That is, if the area (area contributing to the joining) along the joining surface of the metal member is S01 and the cross-sectional area along the electrode axis vertical direction in the filling part of the metal member is S02, it is configured to satisfy S02> S01. good.

In addition, one may be a metal member, the other may be a non-metal member (tungsten, ceramics, etc.), and may be solid-state-joined, and at least one member to be bonded may be metal. Even in the combination of such members, the metal structure is brought into the bonded state near the joining surface.

About the electrode shown in 1st-7th embodiment, you may comprise the electrode which has the junction state inclined in the vicinity of a junction surface like 8th embodiment. Moreover, about 3rd-7th embodiment, you may comprise an electrode by welding other than solid state welding (for example, fusion welding, such as electron beam welding).

Next, Examples 1 to 3 of the present invention will be described with reference to FIGS. 13 to 16. Here, as an anode corresponding to the first, second, and eighth embodiments, the bonding surface state of the anode formed by SPS bonding and the bonding surface state formed by electron beam welding are compared.

Example 1

13 is a view showing an electron micrograph of the bonding state of the positive electrode according to Example 1. According to 1st Embodiment, the electrode was formed by SPS joining two metal members from which a shape differs. The two metal members are solidified by sintering a powder of tungsten (WVMW W 15-40 ppm), and are composed of two metals, which have a truncated cone shape and a cylinder shape shown in the first embodiment.

The SPS sintering apparatus manufactured by SPS Syntex Corporation was used as the apparatus for SPS joining, and under the conditions of a vacuum atmosphere, pressure 90 MPa was applied from both sides of the metal member, and the joining was performed by holding at a sintering temperature of 1700 ° C. near the joining surface for 10 minutes. .

In FIG. 13, the photograph photographed in the micrometer unit level of the junction surface vicinity of the anode surface is shown, and the metal structure of the junction surface is revealed. The joining surface is formed along the left-right direction of the paper.

As shown in FIG. 13, only the joining surface crystal grain which forms a joining surface deform | transforms at the time of joining, and crystal grain distortion and enlargement which contribute to joining do not generate | occur | produce along the joining surface vertical direction about other grains. That is, the deformation | transformation of a crystal grain by a junction and the enlarged layer are not formed. The crystal diameter is almost uniform along the joint surface direction and the joint surface vertical direction. As evidence that the bonding surface crystal grains were deformed, the electrode axial lengths of the electrodes before and after bonding were changed.

[Example 2]

14 is a view showing an electron micrograph of the bonding state of the positive electrode according to the second embodiment. According to the second embodiment, SPS bonding was performed between two tungsten metal members with a tungsten rhenium alloy (thickness of 0.5 mm). The conditions of the SPS junction were substantially the same as in Example 1.

As shown in Fig. 14, only the bonding surface crystal grains forming the bonding surface in the same manner as in Example 1 are deformed at the time of bonding, and for other crystal grains, grain deformation and enlargement contributing to the bonding are determined in the bonding surface vertical direction. It doesn't happen.

Example 3

FIG. 15 is a view showing an electron micrograph of a bonding state of a positive electrode according to Example 3. FIG. According to 8th Embodiment, the electrode was formed by SPS joining two metal members from which a shape differs. However, an electrode shape is different from FIG. 12, and is comprised from two metals of the truncated cone shape and columnar shape shown in 1st Embodiment.

In the SPS bonding, pressure 90 MPa was applied from both sides of the metal member so as to form the inclined layer on the bonding surface under the conditions of a vacuum atmosphere, and the bonding was performed by maintaining the temperature at 1800 ° C. near the bonding surface for 20 minutes.

As shown in FIG. 15, the metal crystal diameter along a joining surface is substantially uniform, and metal crystal characteristics, such as a crystal diameter, continuously change and incline along an electrode axis.

FIG. 16 is a comparison diagram showing an electron micrograph showing a bonding surface state of an anode by electron beam bonding. FIG. The electrode by electron beam bonding is also comprised with two metals similarly. The electron beam welding apparatus by the NEC control system was used for electron beam joining.

16 shows an enlarged photograph of the bonding surface near the anode surface. In Fig. 16, it is found that the metal particle diameter along the joining surface is nonuniform (see near the electrode surface). The crystal grains along the electrode axis direction (up and down direction of the surface) are also rapidly and intermittently changed.

Thus, in the electrode shape | molded by SPS sintering, metal structure is stabilized in the vicinity of a joining surface. As a result, a good performance is exhibited with respect to the heat radiation of an electrode live line and lighting compared with the conventional electrode.

10 discharge lamp
12 discharge tube
30 anodes
40 metal parts
50 metal parts
S joint surface

Claims (18)

Discharge tube,
A pair of electrodes arranged in the discharge tube,
At least one electrode is an electrode formed by solid-state bonding a some solid member,
At least one of the plurality of solid members is a metal member,
At least a part of the bonding surface crystal grains forming the bonding surface of the metal member is deformed by bonding, and for metal grains other than the bonding surface crystal grains, deformation due to bonding is substantially along the bonding surface vertical direction near the bonding surface. Discharge lamp, characterized in that not generated. Discharge tube,
A pair of electrodes arranged in the discharge tube,
At least one electrode is an electrode formed by solid-state bonding a some solid member,
At least one of the plurality of solid members is a metal member,
A discharge lamp, characterized in that the crystal diameter in the vicinity of the joining surface of the metal member after joining is almost uniform along the joining surface of the metal member, and is substantially uniform along the joining surface vertical direction. Discharge tube,
A pair of electrodes arranged in the discharge tube,
At least one electrode is an electrode formed by solid-state bonding a some solid member,
At least one of the plurality of solid members is a metal member,
The crystal diameter of the metal member is almost uniform along the joint surface between the members,
And a metal crystal is inclined along the joining surface vertical direction in the vicinity of the joining surface of the metal member. 4. The discharge lamp according to claim 3, wherein a diameter of a metal crystal is continuously changed along the joining surface vertical direction near the joining surface of the metal member. The area according to the joining surface of the metal member is S01, and the cross-sectional area along the electrode axis vertical direction in the filling portion of the metal member is S02. Discharge lamp, characterized in that to satisfy. The metal member according to any one of claims 1 to 4, wherein the metal member is joined to another solid member with an intervening solid member interposed therebetween,
A discharge lamp, characterized in that it is softer than the solid member to which the interposing solid member is joined. The discharge lamp of claim 6, wherein the interposing solid member is a metal member including at least one of molybdenum, tantalum, vanadium, niobium, titanium, gold, platinum, and rhenium. 8. The discharge lamp of claim 7, wherein the interposing solid member is a metal member containing tungsten. 5. The concave metal member and the rear end solid according to claim 1, wherein the plurality of solid members have a concave metal member and a rear end side solid member supported by a conductive electrode support bar. 6. By joining the members, a sealed space is formed in the electrode,
And a joining surface of the concave metal member is located at a lamp center side of the rear end side solid member rather than a joining front end portion with the electrode supporting rod. 10. The method according to claim 9, wherein the molten metal at the time of melting when the lamp is turned on is enclosed in the sealed space, and the joining surface of the concave metal member is located on the electrode support rod side than the solidification range of the molten metal at the time of the lighting. Discharge lamp. The said electrode is equipped with the some plate-shaped solid member from which a diameter differs, and joins the said some plate-shaped solid member along the electrode axial direction, The said electrode is characterized by the above-mentioned. Discharge lamp. The plurality of fins according to any one of claims 1 to 4, wherein the plurality of solid members extend in the radial direction from an electrode tip member having an electrode tip surface and a cylindrical member having a smaller size than the electrode tip member. A discharge lamp having a fuselage member arranged at predetermined intervals in the circumferential direction, wherein the electrode tip member and the tubular member are joined coaxially. 13. The discharge lamp of claim 12, wherein the plurality of pins have a radial size that does not protrude from a joining surface of the electrode tip member. The cross-sectional area along the electrode axis vertical direction of the virtual body member when the groove between the plurality of pins is filled in S11 is S12, and the cross-sectional area along the electrode shaft vertical direction of the fuselage member is S12. Discharge lamp, characterized in that / 3≤S11. An electrode composed of a plurality of solid members disposed in a discharge tube of a discharge lamp and comprising a front end side solid member including an electrode end face and a rear end side solid member supported by an electrode support rod,
The plurality of solid members are formed by solid-state bonding between the front end side solid member and the rear end side solid member,
At least one of the plurality of solid members is a metal member,
At least a part of the bonding surface crystal grains forming the bonding surface of the metal member is deformed by bonding,
In the case of metal grains other than the said joining surface crystal grain, the deformation | transformation by joining does not generate | occur | produce substantially along the joining surface vertical direction in the vicinity of a joining surface, The electrode for discharge lamps characterized by the above-mentioned. An electrode composed of a plurality of solid members disposed in a discharge tube of a discharge lamp and comprising a first solid member having an electrode end face and a second solid member supported by a conductive electrode support rod,
Formed by solid-state bonding the plurality of solid members between the first solid member and the second solid member,
At least one of the plurality of solid members is a metal member,
The crystal diameter of the metal member is almost uniform along the joint surface between the members,
A discharge lamp electrode, wherein a metal crystal is inclined along the joining surface vertical direction near the joining surface of the metal member. Solid-state bonding between the tip-side solid member and the rear-end solid member a plurality of solid members comprising a tip-side solid member including an electrode tip surface and a rear-end solid member supported by an electrode support rod, wherein at least one solid member is a metal member. As a manufacturing method to
At least a part of the bonding surface crystal grains forming the bonding surface of the metal member is deformed by bonding,
In the case of metal grains other than the joining surface crystal grains, the plurality of solid members are solid-bonded in the vicinity of the joining surface such that deformation due to joining does not occur substantially along the joining surface vertical direction. Manufacturing method. A plurality of solid members comprising a first solid member having an electrode end surface and a second solid member supported by a conductive electrode supporting rod, wherein at least one solid member is a metal member. As a manufacturing method of solid-state bonding between a 2nd solid member,
Solid-state joining of the plurality of solid members such that the crystal diameter of the metal member becomes substantially uniform along the joining surface between the members, and the metal crystals are inclined along the joining surface vertical direction near the joining surface of the metal member. A method of manufacturing an electrode for a discharge lamp, characterized in that.

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