KR20110018846A - Analyzer - Google Patents

Abstract

PURPOSE: An analyzer apparatus is provided to ensure uniform sensitivity between objects by guiding the lights coming out from the objects to a single spectroscope using optical fiber. CONSTITUTION: An analyzer apparatus(100) comprises a light source(2), measuring cells(3), first and second optical fiber(4,5), a light guide member(6), a spectroscope(7), and an optical detector(8). The measuring cells accommodate different samples, respectively. The first optical fiber transmits the light from the light source to each measuring cell. The second optical fiber transmits the light passing through the samples in the measuring cells. The light guide member transmits the light transmitted with the second optical fiber to an incident slit(7S). The spectroscope splits the light transmitted with the light guide member. The optical detector detects the light split with spectroscope.

Description

Analytical Device

The present invention relates to an analysis device for guiding and detecting light emitted from an inspection object such as a measuring cell to a photodetector, and analyzing a sample included in the inspection object.

As a conventional spectroscopic analyzer, as shown in Patent Literature 1, light from a light source is transmitted by a single core fiber to irradiate light onto a sample in a measurement cell, and the light transmitted through the sample is passed through a single core optical fiber. There is a configuration to transmit to.

In addition, as shown in Patent Literature 2 or Patent Literature 3, there is one configured to transmit transmitted light from a plurality of measuring cells to one spectrometer and to analyze a sample included in each measuring cell.

However, when transmitting the transmitted light from each measuring cell to one spectrometer by the optical fiber, there is a problem that the incident position of the light transmitted from each optical fiber in the incident slit of the spectroscope is different and the detection sensitivity is different for each optical fiber. .

Japanese Unexamined Patent Publication No. 2005-164255 Japanese Patent Laid-Open No. 59-70946 Japanese Unexamined Patent Publication No. 2003-294609

Accordingly, the present invention has been made to solve the above problems at once, and in the analysis device for guiding light from a plurality of inspection objects to one spectrometer using an optical fiber, the detection sensitivity between the inspection objects is as equal as possible. It is to make it the main aim.

That is, the analysis apparatus which concerns on this invention is obtained from the 1st optical fiber element which receives the light obtained from a 1st test object from the light-incidence side edge part, and injects the light at the light-emitting side edge part, and is obtained from a 2nd test object. A plurality of second optical fiber elements that receive light from an end of the light incidence side, and emit the light at the light exit side end; and at a light exit side end of the first optical fiber element and the light exit side end of the second optical fiber element And a light detecting portion for detecting the light to be formed, wherein the light emitting side end portion of the first optical fiber element and the light emitting side end portion of the second optical fiber element are arranged to be mixed with each other.

In this case, light from the first and second inspection objects can be guided to one light detecting unit, thereby reducing the cost of the analyzer, reducing the installation location, and reducing the installation time. In this case, since the light emitting side ends of the first and second optical fiber elements are arranged to be mixed with each other, the light guided to the photodetector for each of the first and second inspection objects can be made substantially uniform, The detection sensitivity between inspection objects can be made the same as much as possible.

Here, in the case where transmitted light is transmitted from the first and second measurement cells to the spectrometer using a single core fiber, the arrangement form of the light emission cross section of the single core fiber is, for example, FIGS. 6A and 6B. It is as shown in ().

However, when arranged as shown in Fig. 6A, each optical fiber is pushed out from the incident slit, and there is a problem that the amount of light transmitted by the optical fiber is largely lost. In addition, each optical fiber has a problem that the optical fiber is not disposed at the central portion in the longitudinal direction of the incident slit, and is disposed at a position biased from the central portion, whereby the detection sensitivity is lowered.

On the other hand, when it arrange | positions like FIG. 6 (B), although the light quantity loss improves, there exists a problem that a detection sensitivity differs for every optical fiber. That is, the detection sensitivity varies depending on the position of the optical fiber in the incidence slit, and there is a problem that the detection sensitivity of the optical fiber at both ends is lower than the detection sensitivity of the optical fiber disposed near the central portion in the longitudinal direction of the incidence slit.

In order to suitably solve this problem, the photodetector includes a spectroscope for spectroscopy of light passing through the incident slit, and a photodetector for detecting light spectroscopy by the spectroscope, wherein the first and second optical fiber elements are provided. (A) guides light obtained from each of the first and second inspection objects to the incident slit, wherein the diameter of the first and second optical fiber elements is smaller than the slit width of the incident slit, and the length at the incident slit. In the vicinity of the central portion in the direction, it is preferable that the arrangement densities of the light exit sections of the first and second optical fiber elements are substantially the same.

If this is the case, the first and second optical fiber elements are mixed and bundled, and the light from the light emitting cross section is guided to the incident slit, thereby increasing the light from the inspection object introduced into the incident slit, thereby increasing the first and second inspection. The light quantity error between objects can be reduced. In addition, since the arrangement density of the light emission cross section of each optical fiber element is made about the same in the vicinity of the longitudinal center portion in the incident slit, the amount of light at the longitudinal center portion of the incident slit is biased for each of the first and second inspection objects. It can be made uniform, and inspection sensitivity in every 1st and 2nd inspection object can be made substantially the same. In addition, since light from the first and second inspection objects can be guided to the longitudinal center portion of the incident slit, it can be detected by the line sensor without using an expensive two-dimensional sensor as the photodetector.

In order to efficiently transmit light from the first and second inspection objects to the first and second optical fiber elements, and to enable switching of light from the first and second inspection objects, the first inspection object is connected to the first inspection object. A first single core fiber for transmitting the light emitted from the inspection object to the first optical fiber element, and a second single connected to the second inspection object and transmitting the light from the inspection object to the second optical fiber element. It is provided between the core fiber and the first and second single core fibers and the first and second optical fiber elements, so that the space of the light exit end face of each single core fiber and the light exit end face of each optical fiber element is formed. It is provided with the switching mechanism which interrupts | blocks or opens, and guides the light from any one of the said 1st and 2nd inspection object to the said light-detecting part. Is recommended. In this way, since a single core fiber and an optical fiber element are used, there is always a connection portion between them in structure. By utilizing this connection part, a switching mechanism can be easily installed, suppressing a light quantity loss as much as possible.

According to the present invention configured as described above, in the spectroscopic analyzer for guiding light emitted from the first and second inspection subjects to one spectrometer using optical fibers, the detection sensitivity between the first and second inspection subjects is as similar as possible. can do.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic block diagram of the spectroscopic analyzer which concerns on one Embodiment of this invention.
2 is a side view schematically showing the light guide member of the embodiment.
3 is a diagram showing the positional relationship between the incident slit and the light guide member when viewed from the opening direction of the incident slit of the embodiment.
4 is a diagram showing a connection portion between the single core fiber and the light guide member and the switching mechanism of the above embodiment.
It is a front view which shows typically the switching mechanism of the said embodiment.
6 is a diagram schematically showing an arrangement of optical fibers in a conventional incident slit.

EMBODIMENT OF THE INVENTION Below, one Embodiment of a spectroscopic analyzer as an example of the analyzer which concerns on this invention is described with reference to drawings.

The spectroscopic analyzer 100 according to the present embodiment irradiates light to a sample accommodated in the measurement cell 3, spectroscopy the light transmitted through the sample, and measures the spectrum, thereby measuring the absorbance or light transmittance of the sample. Qualitatively or quantitatively.

Specifically, as shown in FIG. 1, the light source 2, a plurality of measurement cells 3 in which different samples are accommodated, and light from the light source 2 are transmitted to each measurement cell 3. The plurality of first optical fibers 4, the plurality of second optical fibers 5 for transmitting the light transmitted through the sample in the measuring cell 3, and the light transmitted by the second optical fibers 5 receive the incident slit ( A plurality of light guide members 6 transmitted to 7S, a spectrometer 7 for spectroscopy of the light transmitted by the light guide member 6, and a photodetector for detecting light spectroscopy by the spectroscope 7 8) is provided. On the other hand, the light source 2, the light guide member 6, the spectrometer 7 and the photodetector 8 are housed in the same casing 9 to constitute the apparatus main body, and a plurality of measuring cells 3 are arranged in the apparatus main body. It is set as the structure connected by the 1st and 2nd optical fiber 5. As shown in FIG.

The light source 2 is a continuous spectrum light source which consists of a halogen lamp etc., for example, and the condensing optical system 10 is arrange | positioned in the light emission direction. In addition, the code | symbol 11 in FIG. 1 is a reference optical system for guiding the light from the light source 2 directly to the spectroscope 7, and performing a reference light measurement.

The condensing optical system 10 is provided between the light source 2 and the first optical fiber 4 to condense the light from the light source 2 to the first optical fiber 4. 1 or a plurality of condensing lenses 10a for converting light into parallel light, and a fly's eye lens for condensing and passing the light passing through the condensing lenses 10a on a light incident end surface of each first optical fiber 4 (Fly) an eye lens 10b is provided. On the other hand, the fly's eye lens 10b is a lens array in which the same single lens is arranged vertically and horizontally in a matrix. In this way, by using the fly's eye lens 10b having a rectangular lens portion with a single lens arranged tightly, the loss of light quantity of the light from the light source 2 is suppressed, and light is efficiently applied to each first optical fiber 4. I can guide you.

The plurality of measurement cells 3 have the same configuration, and the light exit end of the first optical fiber 4 is connected to one wall facing each other, and the light of the second optical fiber 5 is connected to the other wall. The incident end is connected. On the other hand, the light emission end surface of the 1st optical fiber 4 and the light incident end surface of the 2nd optical fiber 5 are connected so that it may oppose. In the present embodiment, four are provided by the first to fourth measuring cells 4.

The first optical fiber 4 is connected to the casing 9 of the apparatus main body by its light incidence end and transmits the light collected by the condensing optical system 10 to the measuring cell 3. The first optical fiber 4 of the present embodiment is a single core fiber provided independently for each measurement cell 3.

The second optical fiber 5 has its light incident end connected to the measuring cell 3, and its light emitting end connected to the casing 9 of the apparatus main body via a switching mechanism 12 described later. Is transmitted to the light guide member 6. The second optical fiber 5 of the present embodiment is a single core fiber provided independently for each measurement cell 3 like the first optical fiber 4.

As shown in FIG. 2, the light guiding member 6 transmits light from the measurement cell 3 transmitted by the second optical fiber 5 to the incident slit 7S of the spectrometer 7. The light incidence end portion 601 of each light guide member 6 is made of fiber, and the light incidence end surface 6a is a light emission end face 5a of the corresponding second optical fiber 5. Is installed against the Moreover, the light guide member 6 is comprised by combining several optical fiber elements, and the light incidence cross section of each optical fiber element is arrange | positioned in substantially the same plane, and the light incidence end surface 6a of the light guide member 6 is thereby made Is formed. The diameter of this optical fiber element is smaller than the slit width of the incident slit 7S mentioned later. In addition, in this embodiment, the 1st-4th light guide member 6 provided for every 1st-4th measuring cell 3 is provided.

The light output end 602 of the light guide member 6 provided for each second optical fiber 5 (measurement cell 3) transmits light to one incident slit 7S of one spectrometer 7, As shown in FIG. 2, the light emission end surface 6b is arrange | positioned and grouped in substantially the same plane. Specifically, the light emitting end portions 602 of the optical fiber elements constituting each of the light guide members 6 are randomly mixed and bundled. Light emitted from the light output end 602 is focused by the light converging optical system 71 on the incident slit 7S of the spectrometer 7.

The spectroscope 7 spectroscopy the light transmitted by the light guide member 6, the incident slit 7S, the first concave mirror 72 reflecting and parallelizing the light, and the first concave mirror. A diffraction grating 73 for spectroscopically diffracting light by 72 and a second concave mirror 74 for condensing the light spectroscopically by the diffraction grating 73 and guiding it to the photodetector 8. . In this embodiment, the ultraviolet light detector 81 and the near-infrared light detector 82 are provided as the photodetector 8, and the 2nd concave mirror 8 is a recess which condenses light to the ultraviolet light detector 81. In FIG. It consists of the surface mirror 741 and the concave mirror 742 which condenses light to the near-infrared light detector 82.

The ultraviolet light detector 81 and the near infrared light detector 82 are multi-channel detectors, and are line CCD sensors configured by arranging CCDs in a row. By using a line CCD sensor, the cost of a photodetector can be reduced compared with the case where a two-dimensional CCD sensor is used. As for the detection signal obtained by this photodetector 8, absorbance, light transmittance, etc. are computed by the calculation control part (computer) which is not shown in figure.

In this way, the light emitting end portions 602 that are the mixing portions of the light guide member 6 of the present embodiment have a plurality (in this embodiment) so that the detection sensitivity of the light introduced by the light guide members 6 becomes substantially the same. The optical fiber elements constituting the first to fourth light guide members 6 are randomly mixed between the light guide members 6 without distinction. Specifically, the light emitting side ends of the optical fiber elements derived from each measuring cell 3 are arranged to be mixed with each other, and the detection sensitivity by one line CCD sensor, which is the photodetector 8, is reduced by each light guide member 6. The optical fiber elements constituting the plurality of light guide members 6 are arranged to be mixed with each other so as to be substantially the same between them.

That is, from the opening direction of the incident slit 7S, the arrangement density of the light emission cross section of the optical fiber element of the light guide member 6 in the incident slit 7S is made to be substantially the same between the respective light guide members 6. Consists of. More specifically, the arrangement density of the light emission cross section of the optical fiber element of the light guide member 6 is configured to be substantially the same between the light guide members 6 in the vicinity of the central portion in the longitudinal direction in the incident slit 7S. . In this way, the light from the plurality of inspection objects 3 is guided to one photodetector (spectrometer 7 and photodetector 8) by tying the plurality of light guide members 6 and the light emitting side ends thereof. The light collecting member X is configured.

Moreover, the spectroscopic analyzer 100 which concerns on this embodiment switches the switching mechanism 12 which switches so that the light which permeate | transmitted any one of the some measurement cell 3 to the spectrometer 7 may be guided. Equipped with.

This switching mechanism 12 is provided between the 2nd optical fiber 5 which is a single core fiber, and the light guide member 6, and the light-emitting end surface 5a of the 2nd optical fiber 5, and the light guide member 6 of The space of the light incident end face 6a is blocked or opened, and the light from any one of the plurality of measurement cells 3 is guided to the spectrometer 7 (incident slit 7S).

The switching mechanism 12 is capable of blocking and opening each of the second optical fibers 5 and each of the light guide members 6 independently, and as shown in FIG. 5, each of the second optical fibers 5 and the light guide members ( 6 (4 in this embodiment) the movable plate 121 and the said movable plate 121 which were provided for every 6), and the light-injection end surface 5a of the 2nd optical fiber 5, and light incidence of the light guide member 6; An open position (P) for blocking the space between the end faces 6a, an open position for opening the space between the light exit end face 5a of the second optical fiber 5 and the light incident end face 6a of the light guide member 6 ( The drive part 122 which moves to and from Q) is provided.

The drive part 122 of this embodiment is a rotary solenoid, and rotates the movable plate 121 between the interruption | blocking position P and the open position Q. FIG. This rotary solenoid is provided with the rotating shaft 122a which consists of permanent magnets, the yoke (not shown) arrange | positioned around the said rotating shaft, and the induction coil (not shown) wound around and attached to the said yoke. The movable plate 121 is fixed to the rotating shaft 122a. Then, during excitation, the magnetic pole generated in the yoke and the permanent magnet are repulsed, and the rotating shaft 122a rotates so that the movable plate 121 is rotated and fixed to either the blocking position P or the open position Q. . In addition, at the time of non-excitation, the yoke and the permanent magnet are attracted and the rotating shaft 122a is rotated so that the movable plate 121 is rotated and fixed to the other side of the cutoff position P or the open position Q. By constituting the switching mechanism 12 in this way, it is possible to selectively fix the positioning between the two positions P and Q without using external force such as a spring. In addition, since the rotary solenoid having a fast response speed is used for the drive unit 122, the conversion between the positions P and Q can be made faster. In addition, it is possible to reduce the number of parts, reduce the cost and failure factors, thereby realizing operational stability. In addition, since the switching mechanism 12 is disposed between the second optical fiber 5 and the light guide member 6, the light is emitted from the light source 2 into the measurement cell 3 during measurement. It is easy to check defects, such as light leakage between (2) and the measurement cell 3.

<Effect of this embodiment>

According to the spectroscopic analyzer 100 according to the present embodiment configured as described above, the light from the plurality of measurement cells 3 can be spectroscopically detected by using one spectroscope 7, and the spectroscopic analyzer 100 can be detected. Cost reduction, installation place, and installation time can be reduced.

In addition, since the optical fiber elements constituting the plurality of light guide members 6 are mixed and bundled, and the light from the light emitting end surface 6b is guided to the incident slit 7S, the measurement cell introduced into the incident slit 7S. While increasing the light from (3), the light quantity error between each measurement cell 3 can be reduced.

In addition, since the arrangement density on the light emission cross section of the optical fiber element is made substantially the same near the central portion in the longitudinal direction in the incident slit 7S, the amount of light at the longitudinal central portion of the incident slit 7S is measured in each measurement cell 3. It can make it uniform without biasing every time, and the inspection sensitivity in each measurement cell 3 can be made substantially the same.

In addition, since the light from each measuring cell 3 can be guided to the longitudinal center portion of the incident slit 7S, it can be detected by the line CCD sensor without using an expensive two-dimensional CCD sensor as the photodetector 8. have.

In addition, this invention is not limited to the said embodiment.

For example, in the said embodiment, although the light guide member is comprised so that it may become substantially the same as the outline of a 2nd optical fiber by tying an optical fiber element, the number of the optical fiber elements which comprise each light guide member according to the size of an incident slit, or The arrangement may be determined. Specifically, the optical fiber element may be bundled in a slit shape (for example, a rectangular shape) so as not to be pushed out of the slit in the opening direction. In this case, the number of optical fiber elements can be reduced, and the cost can be reduced.

In the mixing portion of the light guide member of the above embodiment, the optical fiber elements are randomly mixed and bundled, but the optical fiber elements may be regularly mixed.

In the said embodiment, although the 1st-4th test object is provided for every 1st-4th test object, the light emission side edge part of the optical fiber element which comprises the 1st-4th light guide member is mutually mixed, but The inspection object and the light guide member are not limited to four, but two or more may be provided.

In addition, in the said embodiment, although it had an ultraviolet light detector and a near-infrared light detector, you may comprise using any one photodetector. Moreover, you may use three or more types of photodetectors.

In addition, although the photodetector of the said embodiment is comprised by the spectroscope and the photodetector, you may comprise with the optical system and photodetector other than a spectroscope, and may comprise only the photodetector.

In addition, although the inspection object of the said embodiment was a measurement cell, another inspection object can also be used as an endpoint monitor etc. as a processing chamber of semiconductor processing apparatuses, such as an etching apparatus, for example.

In addition, this invention is not limited to the said embodiment, Needless to say that various deformation | transformation is possible in the range which does not deviate from the meaning.

100: analysis device (spectral analysis device)
3: Inspection target (measurement cell)
5: single core fiber (second optical fiber)
5a: Light injection cross section of single core fiber
6 light guiding member (plural optical fiber elements)
6a: Light incident cross section of light guide member
7: spectrometer
7S: incident slit
8: photodetector
12: switching mechanism

Claims (3)

A plurality of first optical fiber elements for receiving the light obtained from the first inspection object from the light incidence side end and emitting the light at the light incidence side end;
A plurality of second optical fiber elements for receiving the light obtained from the second inspection object from the light incident side end portion and emitting the light at the light emission side end portion;
And a light detector for detecting light emitted from the light emitting side end of the first optical fiber element and the light emitting side end of the second optical fiber element,
And a light emitting side end portion of the first optical fiber element and a light emitting side end portion of the second optical fiber element are arranged to be mixed with each other. 2. The light detector according to claim 1, wherein the photodetector includes a spectroscope for spectroscopy of light passing through the incident slit, and a photodetector for detecting light spectroscopically by the spectroscope,
The first and second optical fiber elements guide light obtained from each of the first and second inspection objects to the incident slit, and the diameters of the first and second optical fiber elements are larger than the slit width of the incident slit. And an arrangement density of light emission cross-sections of the first and second optical fiber elements is substantially the same near the central portion in the longitudinal direction in the incident slit. The first single core fiber of claim 1, further comprising: a first single core fiber connected to the first inspection object and configured to transmit light emitted from the inspection object to the first optical fiber element;
A second single core fiber connected to said second inspection object and transmitting light emitted from said inspection object to said second optical fiber element;
Interposed between the first and second single core fibers and the first and second optical fiber elements to block or open the space of the light exit end face of each single core fiber and the light exit end face of each optical fiber element; And a switching mechanism for guiding light from any one of the first and second inspection objects to the photodetector.

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