KR20110012132A - Baking apparatus for color filter - Google Patents

Abstract

PURPOSE: An apparatus for baking a color filter is provided to increase thermal efficiency in a chamber. CONSTITUTION: An upper plate(156) and a lower plate(159) cover both sides of the first frame. The first heat insulating material(162) is formed between the upper plate and the lower plate corresponding to the first frame. A supply terminal(167) and a discharge terminal(169) are formed inside the first heat insulating material. The supply terminal and the discharge terminal supply or discharge cooling water. A PCW(Process Cooling Water) pipe(165) is connected between the frame and the lower plate in a zig-zag shape.

Description

Baking apparatus for color filter

The present invention relates to a firing apparatus, and more particularly to a firing apparatus for curing a color filter formed on a color filter substrate for a liquid crystal display device.

Recently, with the rapid development of the information society, there is a need for a flat panel display having excellent characteristics such as thinning, light weight, and low power consumption. Among them, a liquid crystal display has a resolution, It is excellent in color display and image quality, and is actively applied to notebooks and desktop monitors.

In general, a liquid crystal display device arranges two substrates on which electrodes are formed so that the surfaces on which the two electrodes are formed face each other, injects a liquid crystal material between the two substrates, and applies a voltage to the two electrodes to generate an electric field. By moving the liquid crystal molecules, the image is expressed by the transmittance of light that varies accordingly.

In more detail, the structure thereof will be described with reference to FIG. 1, which is an exploded perspective view of a general liquid crystal display. As shown, the liquid crystal display includes an array substrate 10 and a color with the liquid crystal layer 30 therebetween. The filter substrate 20 has a configuration in which the filter substrate 20 is face-to-face bonded to each other. The array substrate 10 of the lower part of the plurality of gate wirings 14 is vertically and horizontally arranged on the upper surface of the transparent substrate 12 to define a plurality of pixel regions P. And a data line 16, and a thin film transistor Tr is provided at an intersection point between the two lines 14 and 16, and is connected one-to-one with the pixel electrode 18 provided in each pixel region P. .

In addition, the upper color filter substrate 20 facing the array substrate 10 is a rear surface of the transparent substrate 22, and the non-display of the gate wiring 14, the data wiring 16, the thin film transistor T, and the like. A grid-like black matrix 25 is formed around the pixel region P so as to cover the region, and red (R) and green are sequentially arranged in order to correspond to the pixel region (P) in the grid. A color filter layer 26 including (G) and blue (B) color filter patterns 26a, 26b, and 26c is formed, and is transparent over the entire surface of the black matrix 25 and the color filter layer 26. The common electrode 28 is provided.

In addition, the two substrates 10 and 20 are each sealed with a sealant or the like along the edges of the liquid crystal layer 30 to prevent leakage of the liquid crystal layer 30 interposed therebetween. 30, an upper and lower alignment layers (not shown) which provide reliability in the molecular alignment direction of the liquid crystal are interposed, and at least one outer surface of each of the substrates 10 and 20 is provided with a polarizing plate (not shown). have.

In addition, a backlight (not shown) is provided on the outer surface of the array substrate 10 to supply light, and the on / off signal of the thin film transistor T is sequentially provided to the gate wiring 14. When the image signal of the data line 16 is transferred to the pixel electrode 18 of the selected pixel region P by scanning, the liquid crystal molecules are driven by the vertical electric field therebetween, thereby changing the light transmittance. We can display various images

On the other hand, in the liquid crystal display device having such a configuration, the color filter layer formed on the color filter substrate is formed by applying a color resist by a pigment dispersion method, a dyeing method, an electrodeposition method, or a jetting method using an inkjet device. In order to cure the color resist, a baking process is performed.

The baking process for hardening this color filter layer mainly uses the baking apparatus.

Figure 2 is a perspective view briefly showing the chamber and the top plate of the conventional baking apparatus for color filter curing, Figure 3 is a cross-sectional view showing a state in which the top plate and the chamber in close contact with the conventional baking apparatus for color filter curing.

As shown in the drawing, the conventional baking apparatus 40 includes a lower chamber 45 having a color filter substrate (not shown) mounted thereon and an openable cover 70 for cleaning the inside of the lower chamber 45. It consists of.

The lower chamber 45 is formed of a bottom surface and four side surfaces, and a support pin 48 on which the color filter substrate (not shown) is seated, and a lower portion of the support chamber 48 positioned below the color. A plurality of plate-shaped IR (Infra Red) heaters 52 for heating a filter substrate (not shown) are provided. The plurality of IR heaters 52 are supported by a support 53 having a lattice structure and are arranged horizontally to form a flat surface inside the chamber 45 for even heat transfer to the color filter substrate (not shown). .

At this time, any one of the four sides of the lower chamber 45 (hereinafter referred to as the first side 55) is provided with a substrate entrance 58 for carrying in and out of the color filter substrate (not shown) The color filter substrate (not shown) is mounted on the plurality of support pins 48 provided in the chamber 45 to correspond to the first side surface 55 having the substrate entrance and exit 58. In order to prevent heat inside the chamber 45 from being discharged to the outside during the heating process, the shutter 60 is provided to seal the substrate entrance 58. At this time, the shutter 60 is supported by the shaft 63, the shaft 63 is connected to a cylinder (not shown) and the like to enable the up and down movement of the shutter 60. In addition, the shaft 63 and the shutter 60 are configured to linearly reciprocate back and forth toward the first side 55 to be in close contact with the first side 55 of the chamber 45. . In addition, an o-ring 66 made of a sealing agent is provided on a surface of the shutter 63 that faces the first side surface 55 of the chamber 45.

On the other hand, the cover 70 for sealing the upper portion of the lower chamber 45 having the above-described configuration is made of SUS material and has a grid 73 and a metal material on the upper and lower surfaces of the frame 73, respectively. An upper plate 75 and a lower plate 78 are provided, and a heat insulating material 82 is formed between the upper plate 75 and the lower plate 78 made of a metal material. In this case, the heat insulator 82 fills the opening of the frame 73, that is, is in contact with the side surface of the frame 73.

The lower chamber 45 and the cover 70 are always sealed while serving as the sintering apparatus, and the IR heater 52 is worn during the cleaning of the lower chamber 45 or as an internal component. Only when the nozzle (not shown) or the sealant 66 is replaced, the open structure is shown as shown. In this case, the lower chamber 45 and the cover 70 are provided with a sealing agent 66 as a heat-resistant organic or polymer material at a portion where the four sides of the cover 70 and the chamber 45 contact each other to completely seal the lower chamber 45 and the cover 70. It is becoming.

In the conventional sintering device 40 having the above-described configuration, the heat dissipated from the IR heater 52 is about 300 ° C. to 350 ° C., and the sintering device 40 that maintains this temperature at all times during the process is There is a problem that causes deformation of the cover when operating for a long time.

The cover 70 is provided with a frame 73 having a lattice structure made of SUS material in order to prevent deformation due to heat, but is subjected to heat for a long time, in particular, FIG. 4 (a cover in the conventional color filter curing firing apparatus) As shown in the figure that is deformed by heating, warpage occurs at the edge of the cover 70, causing a lifting phenomenon from the side of the lower chamber 40 (FIG. 3). Therefore, since the chamber (40 of FIG. 3) and the cover 70 is not completely sealed, the thermal efficiency is lowered, and rapid heat release occurs to a portion where the lifting occurs, thereby causing unwanted internalization of the chamber (40 of FIG. 3). As a result of the convection phenomenon, a temperature difference is partially generated in the color filter substrate (not shown), which causes a hardening of the color filter.

The present invention has been made to solve the above-mentioned conventional problems, and to provide a baking apparatus for curing color filters that can improve the thermal efficiency in the chamber without causing deformation of the cover even in long-term use. do.

The color filter curing firing apparatus according to the present invention has a bottom surface and a chamber formed with the first, second, third, and fourth side surfaces formed by opening an upper portion thereof, and a cover for covering the opened upper portion of the chamber. In the apparatus, the cover has a lattice structure, the first frame made of a first metal material, the upper and lower plates made of a second metal material covering the first frame on the upper and lower portions, respectively, and the first A first heat insulating member formed between the upper plate and the lower plate corresponding to the opening of the frame, and having a supply end for supplying cooling water and a discharge end for discharging cooling water, which are formed inside the first heat insulating material, are connected in a zigzag form between the frame and the lower plate; Comprising a PCW (process cooling water) tube formed, each of the first, second, third, fourth side and the bottom surface is formed of a lattice form of the first metal material And a second heat insulating material formed in an opening of the second frame positioned between the inner wall and the outer wall and the inner wall and the outer wall respectively covering the second frame with the second frame and the second metal material. The side surface is provided with a substrate entrance for carrying in and out of the color filter formed substrate, the outer side of the first side is provided with a shutter for sealing the substrate entrance, the upper portion of the bottom is supported by a support and a plurality of IR A heater is provided, and a plurality of support pins for supporting the substrate is provided on the IR heater.

In this case, the third and fourth side surfaces of the chamber facing each other and spaced apart from each other and facing the third and fourth sides are characterized in that the heat reflection insulating material is provided.

In addition, any one of the first, second, third and fourth sides of the chamber is provided with a plurality of air supply nozzles for supplying clean air into the chamber through an external pipe, the first, second, third And one of the four sides is characterized in that the exhaust port for discharging the air in the chamber.

In addition, an air supply heater is provided between the plurality of air supply nozzles and the external pipe to heat the clean air supplied at a temperature in the chamber.

The PWC pipe has one cooling water supply stage and a discharge stage, and the supply stage and the discharge stage are connected to the front of the cover in one form, or each of the one supply stage and a plurality of cooling water supply stages and discharge stages. It is characterized by being formed into a plurality of parts in the form of connecting the discharge end.

In addition, the first heat insulating material is provided with a temperature sensor for sensing the temperature of the cover to drive the cooling of the cover by automatically controlling the flow of coolant through the PCW tube when the cover is above a certain temperature. Is characteristic.

In addition, the PCW tube is preferably a copper material having excellent thermoelectricity and corrosion resistance to cooling water.

In addition, the first metal material is SUS, and the second metal material is preferably SUS or aluminum (Al).

In the present invention, by providing a cover that does not deform even if used for a long time to reduce the cost of replacing the cover, and further has the effect of improving the equipment operation rate by reducing the firing device down time for the cover replacement.

In addition, by providing a heat reflection insulating material spaced apart from the inner wall of the chamber in the free space with the side of the chamber to increase the thermal efficiency inside the chamber, and minimize the heat emission to the outside through the inner surface of the chamber to reduce the output value of the IR heater It can reduce the cost of electricity and improve the durability.

There is an effect of preventing the color filter hardening failure by suppressing the partial temperature difference in the substrate due to unwanted tropical flow in the chamber caused by the failure of the cover is not completely sealed with the chamber.

Hereinafter, with reference to the accompanying drawings will be described a baking apparatus for curing the color filter according to an embodiment of the present invention.

Figure 5 is a perspective view showing the chamber and the cover of the open state of the color filter curing firing apparatus according to the present invention, Figure 6 is a cross-sectional view of any one side of the chamber in the firing apparatus of the present invention, Figure 7 Is sectional drawing about the part which cut | disconnected the 2nd side surface and a base part part with heat reflection insulating material in the baking apparatus of this invention. 8 is a plan view seen from above of the chamber in the firing apparatus of the present invention, and FIG. 9 is a plan view viewed from above in the firing apparatus of the present invention.

As shown, the color filter curing firing apparatus 100 according to the present invention is a closed space covering the lower chamber 110 and the chamber 110 on which a color filter substrate (not shown) coated with color resist is seated. Completion of the cover 150 is configured to be opened and closed in a sliding manner.

In this case, the lower chamber 110 is formed of a bottom surface 119 and four side surfaces 120, 140, 142, and 144, and the color filter substrate (not shown) is mounted on the bottom surface 119. A plurality of support pins 113 are provided spaced at a predetermined interval, and a plurality of support pins 113 are disposed below the support pins 113 and heat the color filter substrate (not shown) seated at the ends of the support pins 113. The IR heater 116 is provided. Each of the plurality of IR heaters 116 is supported and fixed by a heater support 118 having a lattice structure and horizontally to form a flat surface inside the chamber 110 for even heat transfer to the color filter substrate (not shown). It is deployed.

In addition, any one of four side surfaces 120, 140, 142, and 144 of the lower chamber 110 (hereinafter referred to as the first side surface 120) may be used for carrying in and out of a color filter substrate (not shown). The color filter substrate entrance 123 is provided, and the color filter substrate (not shown) supports the pins 113 inside the chamber 110 to correspond to the first side surface 120 provided with the substrate entrance 123. The shutter 126 is provided to seal the substrate entrance 123 in order to prevent the heat inside the chamber 110 from being discharged to the outside during heating. The shutter 126 is supported by the shaft 130, the shaft 130 is connected to a cylinder (not shown) and the like to enable the up and down movement of the shutter 126, the shaft 130 ) And the shutter 126 are configured to linearly reciprocate back and forth toward the first side surface 120 to be in close contact with the first side surface 120 of the chamber 110.

In addition, the surface facing the first side surface 120 of the chamber 110 of the shutter 126 is provided with an O-ring 133 made of a sealing agent is completely sealed when in contact with the first side surface 120 It is configured to lose.

Meanwhile, the bottom surface and the four side surfaces 120, 140, 142, and 144 constituting the outer wall of the chamber 110 are each formed of an inner wall 112 and an outer wall 114 made of SUS material, and an insulating material 115 interposed therebetween. ) Has a cross-sectional configuration. At this time, the bottom surface 119 and the four side surfaces (120, 140, 142, 144) is connected to form a frame having a grid structure (not shown) is formed so that the outer wall 114 and the inner wall 112, respectively, the frame (Not shown) and has a configuration in which a heat insulating material 115 having a thickness equal to the thickness of the frame (not shown) is interposed in each region captured by the frame (not shown) having a lattice structure. .

In addition, as a characteristic configuration of the present invention of the four side (120, 140, 142, 144) of the chamber 110 and the first side 120, which is provided with the substrate entrance (123) facing the first Corresponding to the third and fourth side surfaces 142 and 1144 except for the second side surface 140, a heat reflection insulating material 148 is provided to serve as heat, in particular, infrared reflection and heat insulation. In this case, the heat reflection insulating material 148 has a cross-sectional structure of “L” shape, so that the width of the bottom surface of the heat reflection insulating material 148 is the third and fourth side surfaces 142 and 144 of the chamber 110. The air gap is formed between the third and fourth side surfaces 142 and 144 of the chamber 110 and the heat reflection insulating material 148 by being spaced apart from the space.

Accordingly, heat loss may be minimized by preventing the internal heat of the chamber 110, which is heated through the IR heater 116 and constitutes 300 ° C. to 350 ° C., to be conducted to the outside of the chamber 110 and naturally discharged. . That is, the third and fourth side surfaces 142 and 144 in the chamber 110 are primarily thermally heated by the heat reflection insulating material 148 provided inside the third and fourth side surfaces 142 and 144. Prevents the heat from being discharged to the outside of the chamber 110, and prevents heat loss secondarily by an air layer formed between the heat reflection insulating material 148 and the third and fourth side surfaces 142 and 144, and finally The third and fourth side surfaces 142 and 144 more precisely prevent heat loss by the heat insulator 116 inside the third and fourth side surfaces 142 and 144. Therefore, the firing apparatus 110 according to the present invention can improve the thermal efficiency of the firing apparatus 110 by minimizing heat naturally emitted by conduction or radiation from the inside of the chamber 110 to the outside. In addition, since the thermal efficiency inside the chamber 110 is improved, the amount of electricity used to heat the IR heater 116 may be reduced, thereby reducing the manufacturing cost of the color filter.

On the other hand, the cover 150 to cover the upper portion of the lower chamber 110 having the above-described configuration to form a completely sealed space is made of SUS material and has a frame 153 having a lattice structure, and an upper surface of the frame 153 and A lower plate 156 and a lower plate 159 made of a metal material such as SUS or aluminum (Al) are respectively provided on the lower surface thereof, and a heat insulating material 162 is formed between the upper plate 156 and the lower plate 159 of metal material. It is becoming. In this case, the heat insulator 162 fills the opening captured by the frame 153 of the lattice structure, that is, is provided in contact with the side surface of the frame 153.

In this case, the cover 150 has a PCW to prevent thermal deformation of the cover 150 between the frame 153 having the lattice structure and the lower plate 159 of a metallic material. PCW pipe 165 for supplying (process cooling water) is characterized in that the end is connected to form a zigzag form at regular intervals apart from one end of the cover. The PCW tube 165 has a supply stage 167 for supplying cooling water having a temperature lower than or equal to room temperature and a discharge end 169 for discharging the cooling water heated by heat in the chamber 110. Cooling water is injected and discharged through each of the stage 167 and the discharge stage 169, and the cover 150 is continuously heated by cooling the lower plate 159 and the frame 153 made of a metal material of the cover 150. The exposure serves to prevent the edge warping from occurring.

The PCW tube 165 may have one supply end 167 and an outlet end 169 connected to the whole cover 150 as one, or as illustrated, a central portion of the cover 150 is provided. The first and second PCW pipes 165a and 165b having the input end 167 and the discharge end 169 may be formed in the first and second regions divided into two, respectively. The installation form of the PCW tube 165 is proportional to the area of the chamber 110 and may be freely modified in consideration of the temperature in the chamber 110 and the moving distance of the coolant in the chamber 110. In this case, a temperature sensor (not shown) is provided inside the cover 150 to determine a temperature change inside the cover 150. In this case, the PCW tube 165 is made of copper (Cu), which is a metal material having excellent thermal conductivity and excellent corrosion resistance to water.

Therefore, the PCW tube 165 is provided inside the cover 150 and is heated by the IR heater 116 in the chamber 110 so that the PCW is automatically provided when the frame 153 provided therein is above a certain temperature. Since the coolant is supplied through the pipe 165 and the cover 150 is cooled by the coolant, the warpage of the frame 153 caused by being continuously exposed to high temperature can be prevented. Further, since the warp does not occur even when the cover 150 is used for a long time, the color filter substrate (not shown) may always be in close contact with the chamber 110 during the firing process for curing the color filter. It is possible to prevent the color filter curing failure due to the partial temperature difference of the phase.

In addition, since the cover 150 does not need to be replaced periodically, the manufacturing cost of the color filter substrate can be reduced, and the firing apparatus 100 does not need to be stopped to replace the cover 150. It is possible to improve the productivity per unit time of the color filter substrate by improving the operation rate of 100).

On the other hand, the lower chamber 110 and the cover 150 according to the present invention having the above-described configuration is always sealed while acting as the firing apparatus 100, during the cleaning process of the lower chamber 110 Alternatively, only when the IR heater 116 is replaced, an open structure is formed as shown. In this case, the lower chamber 110 and the cover 150 are organically resistant to heat at a portion where the four sides 120, 140, 142, and 144 of the cover 150 and the lower chamber 110 come into contact with each other for complete sealing. Alternatively, a sealing agent (not shown) is provided as the polymer material.

In addition, although not shown in the drawing, the chamber 110 has a plurality of air supply nozzles (not shown) for connection with an external air supply pipe (not shown) any one of the four sides (120, 140, 142, 144). It is provided on the side, and a plurality of exhaust ports (not shown) for connection with an external exhaust pipe (not shown) is provided. In this case, the air supply nozzle (not shown) is connected to the air supply heater (not shown), so that when the clean air is supplied into the chamber 110 through an air supply pipe (not shown) provided outside, the air supply heater (not shown) It is heated by the) and is introduced into the chamber 110 in a state having a temperature of approximately the same level as the temperature in the chamber 110. The clean air is supplied through the air supply heater (not shown) so as not to affect the temperature atmosphere in the chamber 110. If only clean air is supplied into the chamber 110, a sudden temperature change may occur in the chamber 110, which may result in poor color filter curing, and thermal efficiency of the chamber 110. This can be prevented because it can be reduced.

In addition, the chamber 110 is provided with an exhaust port (not shown) to form a structure connected to the external exhaust pipe (not shown) to discharge the fume generated during curing of the color filter made of color resist. When drying and curing the color resist constituting the color filter, the internal moisture is evaporated, wherein the evaporated moisture contains a lot of organic fume (fume), the organic fume (fume) inside the chamber 110 It is contaminated, and furthermore, the color filter substrate (not shown) may also cause contamination, so that the exhaust port (not shown) is provided to smoothly discharge it.

Therefore, in the color filter curing firing apparatus 110 according to the present invention, clean air heated to a temperature in the chamber 110 by a heater is supplied through an air supply nozzle (not shown), and organic fume discharged from the color filter ( Since the polluted air including the fume is discharged through the exhaust port (not shown), the inside of the chamber 110 is always filled with fresh air having an appropriate temperature. Defects can be prevented.

Hereinafter, the curing process of the color filter substrate using the color filter curing apparatus according to the present invention described above will be briefly described.

First, a color filter substrate (not shown) coated with red, green, and blue color resists is mounted on a lot arm (not shown) through an inkjet device (not shown). Thereafter, the shutter 126 of the lower chamber 110 is lowered to achieve a state in which the color filter substrate (not shown) entrance and exit are exposed.

Next, a color filter substrate (not shown) seated on the robot arm (not shown) is introduced into the chamber 110 through the substrate entrance 123, and the robot arm (not shown) is lowered by a predetermined interval. The color filter substrate (not shown) is positioned on the plurality of support pins 113 in the chamber 110. Thereafter, the color filter substrate (not shown) discharges the robot arm (not shown) while being supported by the plurality of support pins 113.

Next, the shaft 130 and the shutter 126 may be moved to the chamber in a state in which the shutter 126 is raised to completely cover the substrate entrance 123 of the first side surface 120. A linear movement toward the first side surface 120 of the 110 allows the shutter 126 to be in close contact with the first side surface 120.

Next, by supplying electricity to the IR heater 116 inside the chamber 110 and heating it, the temperature inside the chamber 110 is raised to an appropriate temperature (300 ° C. to 350 ° C.), and at the same time, clean air heated by the heater. Is supplied through an air supply nozzle (not shown), and at the same time, air containing organic fume inside the chamber 110 is discharged through an exhaust port (not shown).

Next, the above-described state is maintained for a proper time, and when the curing of the color filter is completed, the supply of the clean air and the exhaust of the contaminated air are stopped, and the shutter 126 is reversed to lower the substrate entrance 123. After exposure, the robot arm (not shown) may be introduced through the substrate entrance 123 to discharge the color filter substrate (not shown) on which the color filter is cured, thereby completing the color filter curing process.

1 is an exploded perspective view of a general liquid crystal display device.

Figure 2 is a perspective view briefly showing the chamber and the top plate of the baking apparatus for the conventional color filter curing.

3 is a cross-sectional view showing a state in which the top plate and the chamber in close contact with the conventional baking apparatus for color filter curing.

5 is a perspective view showing a chamber and a cover in an open state of a baking apparatus for curing color filters according to the present invention.

Figure 6 is a cross-sectional view of any one side of the chamber in the firing apparatus of the present invention.

7 is a cross-sectional view of a portion of the second side and the bottom surface with heat reflection insulating material cut in the firing apparatus of the present invention.

Figure 8 is a plan view of the chamber from above in the firing apparatus of the present invention.

Figure 9 is a plan view of the cover from the firing apparatus of the present invention from above.

<Description of the symbols for the main parts of the drawings>

100: firing apparatus 110: chamber

113: support pin 116: IR heater

120: first side 123: substrate entrance

126: shutter 130: axis

133: sealing agent 140: second side

142: third side 144: fourth side

148: heat reflection insulation 150: cover

153: frame 156: top plate

159: lower plate 162: insulation

165: PCW tube 165a, 165b: 1st, 2 PCW tube

167: (cooling water) supply stage 169: (cooling water) discharge stage

Claims (8)

In the firing apparatus for curing the color filter comprising a chamber having a bottom surface and the first, second, third and fourth side, the chamber formed to open the upper portion, and a cover covering the open upper portion of the chamber, The cover has a lattice structure and includes a first frame made of a first metal material, an upper plate and a lower plate made of a second metal material covering the first frame at upper and lower portions thereof, and an opening of the first frame. Correspondingly, a PCW having a first heat insulating material formed between the upper plate and the lower plate, a supply end for supplying cooling water, and a discharge end for discharging, and connected in a zigzag form between the frame and the lower plate. cooling water), including Each of the first, second, third, and fourth side surfaces and the bottom surface includes an inner wall, an outer wall, and the inner wall formed by covering the second frame with a second frame made of a lattice shape with the first metal material and the second metal material, respectively. And a second heat insulator formed in the opening of the second frame located between the outer wall and the outer wall, The first side is provided with a substrate entrance for carrying in and out of the color filter formed substrate, The outer side of the first side is provided with a shutter for sealing the substrate entrance, The top of the bottom is supported by a support and provided with a plurality of IR heaters, And a plurality of support pins for supporting the substrate on the IR heater. The method of claim 1, And a heat reflection insulating material facing and spaced apart from the third and fourth sides to face the third and fourth sides of the chamber facing each other. The method of claim 2, Any one of the first, second, third and fourth sides of the chamber is provided with a plurality of air supply nozzles for supplying clean air into the chamber through an external pipe, At least one side of the first, second, third and fourth side of the firing apparatus for curing the color filter, characterized in that the exhaust port for discharging the air in the chamber is provided. The method of claim 3, wherein And an air supply heater for heating clean air supplied to the temperature in the chamber between the plurality of air supply nozzles and the external pipe. The method of claim 2, The PWC pipe has one cooling water supply end and an outlet end and has a form in which the supply end and the discharge end are connected to the front of the cover, or Or a plurality of cooling water supply stages and discharge stages, wherein each one of the supply and discharge stages is formed in a plurality of parts in a form that is connected to each other. The method of claim 2, The first heat insulating material is provided with a temperature sensor for sensing the temperature of the cover, and when the cover is above a certain temperature, the drive to cool the cover by automatically controlling the flow of coolant through the PCW pipe. Firing apparatus for curing in color filter. The method of claim 2, The PCW tube is excellent in thermoelectricity, color filter curing firing apparatus, characterized in that the copper material having corrosion resistance to the cooling water. The method of claim 2, The first metal material is SUS, and the second metal material is SUS or aluminum (Al) firing apparatus for curing the color filter.

Images