KR20100122218A - Pipe vibrating device and pipe vibrating method - Google Patents

Abstract

PURPOSE: A pipe vibrating device and a pipe vibrating method are provided to mechanically remove foreign materials inside a gas pipe by the installation of a vibrator outside a gas pipe to vibrate the gas pipe. CONSTITUTION: A pipe vibrating device comprises a vibrator(200), a vibration sensor(300), and a controller(400). The vibrator is attached to a gas pipe and vibrates the gas pipe. The vibration sensor is attached to the gas pie to sense the vibration signals of the gas pipe. The controller controls vibration characteristic of the vibrator based on vibration signals sensed by the vibration sensor.

Description

PIPE VIBRATING DEVICE AND PIPE VIBRATING METHOD}

The present invention relates to a pipe excitation device and a pipe excitation method.

A gas pipe of a predetermined length is provided as a moving passage of the gas flow required in the semiconductor fabrication process. At this time, the cleanliness in the gas pipe serves as an important factor in determining the yield and quality of the produced product. Therefore, semiconductor manufacturers have to work to remove fine dust and water (hereinafter, referred to as foreign substances) in the gas pipe in order to realize high cleanliness in the gas pipe. Here, the removal of foreign substances in the gas pipe is performed on the gas pipe before starting the semiconductor manufacturing process (after the pipe construction and before the production of the equipment), or on the gas pipe newly replaced after the pipe is replaced while the equipment is not in operation. Is performed. By the way, the method which hits the outer side of a gas pipe with a hammer etc. by a worker, and removes the foreign material in a gas pipe has been mainly used conventionally.

However, the foreign material removal method of the gas pipe using a hammer or the like has a problem that takes a considerable manpower and time.

In addition, since a considerable manpower and time is required to remove foreign substances in order to maintain the cleanliness of the gas pipe, there is a problem that the production schedule is disrupted, and the productivity of the product is lowered, resulting in a huge economic loss of the manufacturer.

Therefore, in order to solve the problems as described above, the present invention is to control the excitation characteristics of the exciter provided on the outside of the gas pipe through the controller, it is possible to remove the foreign matter accumulated in the gas pipe mechanically and efficiently Its purpose is to provide a piping excitation device and a piping excitation method.

In addition, the present invention, by automatically controlling the excitation characteristics of the exciter through the controller, it is possible to shorten the working time using the gas pipe, and to reduce the manpower required to reduce the work cost pipe piping apparatus and piping excitation Its purpose is to provide a method.

The inventors of the present invention according to claim 1, the pipe excitation device is attached to the gas pipe vibrating the gas pipe, a vibration sensor attached to the gas pipe to detect the vibration signal of the gas pipe, vibration detected by the vibration detection sensor And a controller for controlling the excitation characteristic of the exciter based on the signal.

Therefore, according to the piping excitation apparatus of Claim 1, the foreign matter accumulate | stored in the gas piping can be mechanically removed by installing a vibrator outside a gas piping, and vibrating a gas piping, and the excitation characteristic of this excitation apparatus may be adjusted. By controlling it through, it can remove efficiently.

The piping excitation apparatus which is an inventor of Claim 2 is a piping apparatus with invention which is invention of Claim 1 WHEREIN: A controller makes an exciter vibrate a gas piping to a preset permissible vibration level.

Therefore, according to the pipe excitation device which is the invention of Claim 2, by vibrating the exciter by a controller to the permissible vibration level of a gas pipe, the vibration efficiency and life of a gas pipe can be extended.

In the piping excitation device of the inventor of Claim 3, the piping excitation device of the invention of Claim 1 WHEREIN: Excitation characteristic is at least any one of the vibration width, the excitation frequency, and an allowable vibration level of an excitation machine.

Therefore, according to the piping excitation apparatus which concerns on Claim 3, the vibration width, excitation frequency, and permissible vibration level of the excitation machine which are the excitation characteristics of an excitation machine can be controlled by a controller.

The inventors of the present invention, the pipe excitation apparatus according to claim 4, the inventors of the pipe excitation apparatus according to claim 1, wherein the controller, the vibration level of the vibration signal sensed by the vibration sensing sensor is maintained for more than a predetermined time When the exciter is off.

Therefore, according to the pipe excitation device according to claim 4, the controller turns off the exciter when the vibration level of the vibration signal sensed by the vibration detection sensor lasts for a predetermined time beyond the range of the allowable vibration level. This can prevent damage to the gas pipe.

The inventors of the pipe excitation apparatus according to claim 5 are the pipe excitation apparatus according to the invention according to claim 3, wherein the controller is configured to adjust the vibration width of the vibrator, the excitation frequency, the magnitude of the allowable vibration level, and the predetermined time for determining abnormal vibration, respectively. The control unit may further include.

Therefore, according to the piping excitation apparatus which concerns on Claim 5, the controller contains the control part which can respectively adjust the vibration width, the excitation frequency, the magnitude | size of permissible vibration level, and the predetermined time which determines abnormal vibration of an excitation device, Through this, it is possible to efficiently control the excitation characteristic of the exciter.

The piping excitation apparatus of the inventor of Claim 6 is a piping excitation apparatus of the invention of Claim 4, The controller further includes the control part which can set predetermined time.

Accordingly, the inventors of the present invention according to claim 6 further include a control unit capable of setting a predetermined time by the controller, whereby the predetermined time can be set shorter or longer, and the predetermined time becomes shorter and longer, thereby allowing a range of vibration levels. You can make the time exceeding the short or long. In addition, it may be determined whether the vibration level of the vibration signal detected by the vibration sensor is continuously exceeded for a predetermined time, except when the vibration level of the allowable vibration level is momentarily exceeded.

The pipe excitation device according to claim 7 is the pipe excitation device according to any one of claims 2 to 5, wherein the allowable vibration level is a force that strikes the hammer on a point on the surface of the gas pipe to strike the hammer. The mobility of the gas pipe is measured by the oscillation speed at which the gas pipe vibrates by the size and the hammer, and the resonant frequency of the gas pipe is searched through the mobility, and is calculated using the found resonant frequency.

Therefore, according to the pipe excitation device according to claim 7, the permissible vibration level of the gas pipe calculated by using the mobility and the resonant frequency of the gas pipe can be accurately calculated, and through this, the gas pipe is excited to improve the reliability of the product. Can be.

The inventors of the present invention according to claim 8, the pipe excitation method comprising the steps of vibrating the gas pipe is attached to the gas pipe, a detection step of detecting a vibration signal of the gas pipe through a vibration sensor attached to the gas pipe, vibration detection sensor And a control step of controlling the excitation characteristic of the exciter based on the detected vibration signal.

Therefore, the inventors of the pipe excitation method according to claim 8 can install a vibrator outside the gas pipe and vibrate the gas pipe, thereby mechanically removing foreign matters accumulated in the gas pipe. By controlling, it can remove efficiently.

As described above, according to the present invention, by controlling the excitation characteristic of the exciter provided on the outside of the gas pipe via a controller, foreign matter accumulated in the gas pipe can be removed mechanically and efficiently.

In addition, according to the present invention, by automatically controlling the excitation characteristics of the exciter through the controller, it is possible to shorten the working time using the gas pipe, it is possible to reduce the labor cost by reducing the required manpower.

Specific matters other than the problem to be solved, the problem solving means, and the effects of the present invention as described above are included in the following embodiments and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. Like reference numerals refer to like elements throughout.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the accompanying drawings are only described in order to more easily disclose the contents of the present invention, but the scope of the present invention is not limited to the scope of the accompanying drawings that will be readily available to those of ordinary skill in the art. You will know.

1 is a view showing the configuration of the gas pipe excitation device according to the present invention, Figures 2a to 2c is a view showing the structure of the exciter of the gas pipe excitation device according to the present invention, Figure 3 is a gas pipe according to the present invention It is a figure which shows the structure of the controller of an excitation apparatus.

As shown in FIG. 1, the gas pipe excitation apparatus according to the present invention includes an exciter 200, a vibration detection sensor 300, and a controller 400. In addition, the signal generator 250 installed between the exciter 200 and the controller 400 may further include a signal conditioner 350 installed between the vibration sensor 300 and the controller 400.

The exciter 200 is attached on the gas pipe 100 to vibrate the gas pipe 100. The exciter 200 is attached to the gas pipe 100 and vibrates in the vertical direction with respect to the gas pipe 100 and the longitudinal wave vibrator vibrating in the left and right directions, and the vibration in the vertical and horizontal directions A combined exciter can be used. The structure of the exciter 200 will be described in more detail with reference to FIGS. 2A and 2B. On the other hand, the gas pipe excitation device according to the present invention has been described as an example of a structure in which one exciter 200 is mounted on the gas pipe, in the case of a long gas pipe may be provided with a plurality of exciters. For example, in the case of a gas pipe having a length of about 200 mm, it is preferable to provide 6 to 7 exciters per 200 m. However, it is not limited thereto, and it will be apparent to those skilled in the art that the installation interval of the exciter can be adjusted for higher excitation efficiency.

The vibration sensor 300 is attached to the gas pipe 100 between the exciter 200 and the exciter 200 to detect a vibration signal of the gas pipe 200. The vibration sensor 300 detects the degree of vibration of a general machine and a device, that is, a vibration speed, and a speed sensor or an acceleration sensor may be used.

The signal conditioner 350 is connected to the vibration detection sensor 300, and performs a function of filtering the vibration signal detected from the vibration detection sensor 300 to shield noise and the like contained in the signal.

The controller 400 controls the excitation characteristic of the exciter 200 based on the vibration signal sensed by the vibration detection sensor 300. That is, the controller 400 sets the allowable vibration level of the exciter 200 in advance so that the exciter 200 vibrates the gas pipe 100 to the allowable vibration level. Here, the excitation characteristic is at least one of the vibration width, the excitation frequency, and the allowable vibration level of the exciter 200. In addition, the controller 400 turns off the exciter 200 when the vibration level of the vibration signal sensed by the vibration sensor 300 lasts for a predetermined time beyond the range of the allowable vibration level. And, the controller 400, when the vibration level of the vibration signal detected by the vibration sensor 300 does not last more than a predetermined time beyond the range of the allowable vibration level, the state of the exciter 200 is operating normally Keep it. The controller 400 further includes a controller (not shown) that can adjust the vibration width, the excitation frequency, the magnitude of the allowable vibration level, and the predetermined time of the exciter 200, respectively. On the other hand, the structure and function of the controller 400 will be described in more detail in FIG.

The signal generator 250 is responsible for generating a signal input from the controller 400 as a desired signal waveform and supplying it to the exciter 200.

As shown in FIG. 2A, FIG. 2A shows a longitudinal wave exciter of a gas piping excitation device according to the invention. This longitudinal wave exciter is mounted on the outer surface of the gas pipe and has the gas pipe in the vertical direction perpendicular to the longitudinal direction of the gas pipe. In other words, the oscillation waveform uses longitudinal vibration to excite the gas pipe. At this time, the total height (e) of the exciter of the vibration waveform of the spring 220a is longitudinal wave is 85mm, the height (d) of the cover 210a is 14mm, the height (c) of the magnet core 230a is 57mm, the base The height a of the frame 240a may be 9 mm and the width f may be 210 mm. At this time, the weight of the sect is about 4.5kg. Here, the excitation frequency and vibration width of the exciter can be adjusted by the controller. In addition, it is possible to improve the excitation efficiency by installing the exciter in the vertical direction in the form of a small size, respectively installed in the outer vertical direction of the gas pipe.

As shown in FIG. 2B, FIG. 2B shows a transverse exciter of the gas piping excitation device according to the present invention. The shear wave exciter is mounted on the outer surface of the gas pipe and excites in a horizontal direction horizontal to the longitudinal direction of the gas pipe. That is, a gas pipe is excited using the vibration whose vibration waveform is a transverse wave. At this time, the total height (d, e) of the vibration wave is transverse wave is 92mm, the body height (c) of the lower surface 210b is 72mm, the width (b + c) of the magnet core 230b is 65.2mm, the base The width f of the frame 240b may have a value of 220 mm. At this time, the weight of the shear wave exciting is about 7.0 kg. On the other hand, the exciter shown in Figure 2b, the outer appearance of the lower side mounted to the gas pipe is shown, the configuration inside the body is the same as the configuration of the longitudinal wave exciter shown in Figure 2a. In addition, it is possible to improve the excitation efficiency by installing each of the excitation in the left and right direction in the form of a small size, respectively installed in the outer vertical direction of the gas pipe.

In the present invention, the oscillator is an example of vibrating in the vertical direction or the left and right directions, but the present invention can be applied to a composite exciter having a complex excitation in the vertical direction and the left and right directions.

On the other hand, the vibration sensor for detecting the vibration of the gas pipe can be mounted inside the exciter of the gas piping device according to the present invention, this will be described in detail with reference to Figure 2c.

As shown in FIG. 2C, FIG. 2C illustrates a structure of an exciter in which a vibration sensing sensor is mounted inside the longitudinal wave type exciter shown in FIG. 2A. The vibrator is mounted on the gas pipe 100, and a magnet core 230a, a core bracket 231a, a spring 220a, a base frame 240a, and a speed sensor 300 are mounted therein.

The magnet core 230a is an electromagnet type and moves up and down by an excitation frequency and an excitation force applied from a controller (not shown), thereby generating an excitation force.

The core bracket 231a is connected to and supported by the magnet core 230a and transmits the excitation force generated in the magnet core 230a to the spring 240a.

The spring 240a is connected to the core bracket 231a and serves to protect the impact of the magnet core 230a, and at the same time, the excitation force transmitted through the core bracket 231a is applied to the base frame 240a. To pass.

The base frame 240a is formed of a steel component to vibrate the gas pipe 100 by using an excitation force transmitted by the spring 240a.

The speed sensor 300 detects the vibration generated in the gas pipe 100 and supplies the detected vibration signal to the controller.

As shown in FIG. 3, the controller of the apparatus having a gas pipe according to the present invention includes a control unit 410, a display unit 420, a power supply unit 430, and an operation state display unit 440.

The controller 410 may adjust the vibration width of the exciter, the excitation frequency, the magnitude of the allowable vibration level, and the predetermined time. An excitation force volume controller 410a for adjusting the amplitude of the excitation force by the magnitude of the excitation force, a frequency volume controller 410b for adjusting the excitation frequency, an acceleration limiting volume controller 410c for adjusting the allowable vibration level, In order to determine whether the vibrator is turned off by detecting whether the abnormal vibration is continued, a time volume controller (not shown) which adjusts a predetermined time that the vibration level of the vibration signal lasts beyond the range of the allowable vibration level. It is composed.

The display unit 420 displays the vibration width Amp, the excitation frequency Freq, the allowable vibration limit, the vibration speed Acc, the excitation start time and the stop time of the excitation device. . In the present invention, the LCD is displayed.

The power supply unit 430 supplies power to control the excitation characteristics of the excitation controller through the on and off of the switch.

The operation state display unit 440 includes a power indicator 440a indicating whether power is supplied to the controller, an operation indicator 440b indicating whether the controller is operating, and an abnormality display indicating whether the controller is abnormal. And the like 440c. In the present invention, the operation state display unit 440 is configured as an example.

Although not shown, a central processing unit for controlling the operations of the control unit 410, the display unit 420, the power supply unit 430, and the operation state display unit 440 is provided inside the controller. At this time, the central processing unit, which is made of a PCB module, by applying to the magnet core (magnet core) of the excitation frequency, excitation size, etc. input from the control unit 410 to vibrate the gas pipe. In addition, the vibration signal sensed by the speed sensor is displayed on the LCD, or compared with the allowable vibration level to determine whether the vibrator is off (ie, the emergency stop is performed). At this time, when the vibration level of the vibration signal sensed by the vibration detection sensor exceeds the range of the allowable vibration level and continues for a predetermined time or more, it is determined that the exciter is emergency stop. However, when the vibration level of the vibration signal sensed by the vibration sensor does not last longer than the allowable vibration level for a predetermined time, it is determined that the exciter is operated normally without emergency stop.

4 is a view showing the configuration of a system for evaluating the performance of the exciter of the gas pipe excitation device according to the present invention. On the other hand, for the performance evaluation of the exciter of the gas pipe excitation device according to the present invention, the vibration force of each of the points of the gas pipe and the vibration force of the exciter is measured. At this time, the exciter is excited by 70% of the maximum excitation force to measure the amount of debris removal in the gas pipe. In the following description, the diameter of the gas pipe is 20 mm. In FIG. 4, the vibration sensing sensors are mounted at five points in a gas pipe having a predetermined length will be described as an experimental example.

As shown in Figure 4, the system for evaluating the performance of the exciter, the vibrator 200 for vibrating the gas pipe 100, vibration detection sensors (300a, 300b, 300c, 300d, 300e), frequency analyzer 600, a personal computer 700. At this time, the plurality of vibration sensors (300a, 300b, 300c, 300d, 300e) are disposed at five points at intervals of about 3.5m, foreign matter, that is particles removed from the inside of the gas pipe 100 on one side of the last point There is a particle counter 500 that measures the number of.

The exciter 200 is attached on the gas pipe 100 to vibrate the gas pipe 100. At this time, the exciter 200 has the gas pipe 100 at a frequency of 70% vibration width, 40 Hz to 110 Hz.

A plurality of vibration detection sensors 300a, 300b, 300c, 300d, and 300e are attached to the gas pipe 100 between the vibrator 200 and the vibrator (not shown) at predetermined intervals, thereby providing a gas pipe 100. To detect the vibration signal.

The frequency analyzer 600 (FFT Analyzer), when the vibration signal of the gas pipe 100 detected by the plurality of vibration detection sensors (300a, 300b, 300c, 300d, 300e) is input, it is a gas pipe 100 for each point (100) Analyze by vibration level by time or frequency.

The personal computer 700 outputs the vibration level for each time or frequency analyzed by the frequency analyzer 600.

Figures 5a to 5e is a graph showing the vibration speed of the gas pipe over time at each point analyzed by the frequency analyzer of the gas pipe excitation device according to the present invention.

FIG. 5A shows the Pt. It is a graph which shows the oscillation speed of the gas piping by time at one point, FIG. 5B is Pt. It is a graph which shows the oscillation speed of the gas piping by time at two points, FIG. 5C is Pt. It is a graph which shows the oscillation speed of the gas piping by time at 3 points | pieces, FIG. 5D is a Pt. It is a graph which shows the oscillation speed of the gas piping by time at four points, FIG. 5E is Pt. It is a graph which shows the oscillation speed of the gas pipe by time at 5 points.

6a to 6e are graphs showing the vibration velocity of the gas pipe for each frequency at each point analyzed by the frequency analyzer of the gas pipe excitation apparatus according to the present invention.

FIG. 6A shows the Pt. It is a graph which shows the oscillation speed of the gas piping by frequency at one point, FIG. 6B is Pt. It is a graph showing the vibration speed of the gas pipe for each frequency at two points, Figure 6c is a Pt. It is a graph which shows the oscillation speed of the gas piping by frequency at three points, and FIG. 6D is Pt. It is a graph showing the vibration speed of the gas pipe for each frequency at four points, Figure 6e is a Pt. It is a graph which shows the vibration velocity of gas pipe by frequency at 5 points.

Here, in FIGS. 6A to 6E, as a result of experimenting by setting a frequency between 40 Hz and 110 Hz in the gas pipe, it can be seen that the highest vibration speed value is obtained when the frequency is 57 Hz within the set frequency range. Therefore, the resonant frequency of this gas pipe can be estimated at 57 Hz. Accordingly, when the vibration is fixed at a frequency of 57 Hz, the vibration velocity of the gas pipe is Pt. It can be seen from Figures 7a and 7b below that it is 231.6 mm / s at one point.

7A and 7B are tables and graphs showing the RMS value and the attenuation value in dB of the vibration measurement results of the gas pipe shown in FIGS. 5A to 5E and 6A to 6E.

FIG. 7A is a table in which vibration measurement results of gas pipes are displayed with RMS values and attenuation values in dB units. Through this, vibration speeds and vibration attenuation levels for each section can be known.

FIG. 7B shows the vibration measurement results for each point of the gas pipe as the vibration attenuation level, except for the excitation point (Pt. 1 or Ref. 1) using +/- 5 dB distribution. It is divided into Band RMS, RMS, Zero to Peak and Peak to Peak values for each symbol shown on the upper left of the graph.

As shown in FIGS. 7A and 7B, the vibration attenuation level of the gas pipe is Pt. 2 to Pt. Between 3 and Pt. 4 to Pt. Although there is a tendency to decrease between the five, this is caused by the vibration of the gas pipe is reflected from the gas pipe end or modified by other configurations mounted between the gas pipe.

8 is a graph showing the number of particles in which particles in the gas pipe are removed with respect to time when the gas pipe is excited using the exciter of the gas pipe excitation device according to the present invention. On the other hand, in the present invention, for example, the numerical value of such a graph was derived through an experiment for a total of 2 hours 20 minutes.

As shown in Figure 8, when the excitation using the gas piping device according to the invention, by using the existing hammer (Hammering) to remove the particles in the gas pipe in the same or higher level than when You can see that it is being removed. The horizontal axis represents the measurement time, and the vertical axis represents the number of particles (foreign substances such as dust in the pipe) measured by the particle counter. In addition, the numbers (-0.10, -0.15, -0.20, -0.25) described at the bottom of the graph mean the diameter of the particles, and the graph shows the number of particles detected inside the gas pipe according to the particles.

On the other hand, the normal state (Normal State) state is a case in which only nitrogen gas flows without any excitation force in the gas pipe, it can be seen that the particles start to escape the outside of the gas pipe and gradually decrease as the nitrogen gas flows.

In addition, the vibrator on state is the time when the exciter starts to operate. At this time, as the particles adhered to the inner surface of the gas pipe fall off, the number of particles gradually increases, and the number of particles that is almost uniform with respect to the time for which the excitation force acts can be confirmed.

The pressure up state means an increase in the gas pressure in the gas pipe, and thus, the number of particles tends to decrease.

The vibrator off state is a point at which the exciter stops, and at this time, the number of particles decreases.

The Hammer On state is the moment when a person starts a price using a hammer, and the number of particles starts to increase. The hammer off state is the point at which the hammering price is stopped.

Therefore, by using the gas pipe excitation apparatus according to the present invention as described above, by providing a gas pipe, the piping performance (Qualification) using the excitation machine is equivalent to the method using a hammer (hammering) by the existing human It has more or more effects, and can be mechanically excited for a long time, so it can be seen that it is more effective.

9A to 9C are graphs showing a system configuration diagram and a measurement result using the same for calculating the allowable vibration level of the exciter of the gas pipe excitation apparatus according to the present invention.

As shown in Figure 9a, the system for the calculation of the permissible vibration level of the exciter of the gas pipe excitation device according to the present invention, the vibration detection sensor (300a, 300b), the frequency analyzer 600, A personal computer 700. On the other hand, the system for calculating the permissible vibration level of the exciter of the gas pipe excitation device according to the present invention, the hammer (H1, H2) and a plurality of vibration detection sensors (300a, 300b) in order to first measure the mobility of the gas pipe Was used. Here, the mobility (Mobility) represents the vibration speed value for the excitation force to the gas pipe, the magnitude (H1) of the force supplied to the hammer by the price (H2) on a point on the surface of the gas pipe (H1) And the hammer is calculated by the vibrating speed at which the gas pipe vibrates.

As shown in FIG. 9B, it can be seen that the average mobility in the 111-115 Hz frequency region is 0.8 mm / s / N from the gas pipe vibration measurement result of 20 mm in diameter. At this time, the 20 mm pipe speed (band RMS) is 190 mm / s from the acceleration attached to the pipe during the excitation using a hammer. Therefore, if the required excitation force is calculated from the mobility value of 0.8 mm / s / N and the gas pipe oscillation speed of 190 mm / s, a result of 237.5 N can be obtained.

As shown in FIG. 9C, in the case of the gas pipe having a diameter of 200 mm, since mobility is 0.124 mm / s / N, the mobility ratio of the 20 mm gas pipe and the 200 mm gas pipe is 200 through the mobility ratio. Estimate the excitation force needed to make the mm gas pipe tremble at the same speed as the 20 mm gas pipe. The estimated force of the 200mm gas pipe is 1532.3N.

To explain the process of calculating the allowable vibration level of the gas pipe in more detail, the criteria for calculating the allowable vibration level in the case where the 20A measuring pipe is subjected to 115 Hz vibration for 5 days are as follows.

On the other hand, the total excitation of the gas pipe was 5 × 10 ⁷ times (N = 115 × 3600 seconds × 24 hours × 5 days), the stress reduction coefficient of the gas pipe formed of stainless steel was 1.0, and the allowable stress was 22,000 psi. (152 MPa).

Based on this, the allowable vibration level of the gas pipe can be calculated by the following equation.

Where V _allow is the allowable vibration level (i.e., allowable pipe oscillation speed, Allowable velocity (inch / s or mm / s)), C ₁ is the compensation factor that compensates for the concentrated mass effect, and C ₂ K ₂ = 2i≤ 4 is the stress concentration coefficient ( i = 0.9 / h ^(2/3) , h = tR / r ² ), C ₃ is the correction factor to compensate for the deflection and insulation effect in the pipe, C ₄ is the fixed end of the pipe According to the correction coefficient (fix = 1, Simply supported = 1.33, equal Z-bend = 0.74), C ₅ is off-resonance forced vibration (1≤C ₅ ≤2), α is the stress reduction coefficient (carbon steel = 1.3, Stainless steel = 1.0), β is 3.64 x 10 ^-3 in psi, 1.34 in Mpa, and Sel is the ratio of the alternating stress intensity from ASME BPV Code Sec. Indicates.

On the other hand, the determination process and results of the variables and coefficients are as follows. The gas pipe is an SUS pipe with an inner diameter of 20 mm and a thickness of 1.68 mm, and C ₁ is a case where there is no concentrated mass in the gas pipe at present, and the ratio of the concentrated mass and the distribution load becomes 0, which means a corresponding correction value. It is 1.0. C ₂ K ₂ represents the stress concentration coefficient, 4, C ₃ is the correction coefficient to compensate for the weight and insulation effect in the pipe, C ₄ is the correction coefficient according to the fixed state of the pipe end, the gas pipe support state 1.3 in simple support form. C ₅ is a correction factor indicating vibrations excited in a non-vibration state, and is 2. α is 1.0 because the gas piping material is SUS, Sel / α is 22,000 psi (Alternating stress intensity from ASME BPV Code Sec. III), and β is 0.00364 determined by applying the psi unit system.

Therefore, based on the above variables and coefficients, the allowable vibration level in the case of having the gas pipe at 115 Hz for five days can be derived as follows.

The allowable vibration level calculated as described above becomes the allowable vibration level, that is, the allowable vibration speed of 338.0 mm / s (0-Peak reference) when the 20 mm pipe is provided for 5 days with 115 Hz vibration.

Therefore, by using the controller of the gas pipe excitation apparatus according to the present invention to excite at a value lower than the maximum allowable stress of the gas pipe, that is, 68% (231.0 / 338 mm / s) vibration rate, foreign matter accumulated inside the gas pipe Can be removed mechanically and efficiently.

10 is a flow chart showing the procedure of the gas piping excitation method according to the present invention.

As shown in FIG. 10, the gas pipe excitation method according to the present invention includes an excitation step S100, a detection step S200, and a control step S300.

The excitation step (S100) is attached to the gas pipe to vibrate the gas pipe, and the detection step (S200) detects a vibration signal of the gas pipe through the vibration detection sensor attached to the gas pipe.

The control step S300 controls the excitation characteristic of the exciter based on the vibration signal detected by the vibration detection sensor. Here, the excitation characteristic is at least one of the vibration width, the excitation frequency, and the allowable vibration level of the exciter. In addition, the control step (S300) may turn off the exciter when the vibration level of the vibration signal sensed by the vibration detection sensor lasts for more than a predetermined time beyond the range of the allowable vibration level. Then, the control step (S300), when the vibration level of the sensed vibration signal does not last more than a predetermined time beyond the range of the allowable vibration level, it may continue to maintain the normal operation state of the exciter.

Therefore, according to the gas pipe excitation device and the excitation method according to the present invention as described above, it is possible to remove the foreign matter accumulated in the gas pipe mechanically and efficiently by using the controller, and also to reduce the working time using the gas pipe. It can reduce the work cost by reducing the manpower required.

As such, the technical configuration of the present invention described above can be understood by those skilled in the art that the present invention can be implemented in other specific forms without changing the technical spirit or essential features of the present invention.

Therefore, the exemplary embodiments described above are to be understood as illustrative and not restrictive in all respects, and the scope of the present invention is indicated by the following claims rather than the detailed description, and the meaning and scope of the claims and their All changes or modifications derived from equivalent concepts should be construed as being included in the scope of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the structure of the gas pipe excitation apparatus which concerns on this invention.

2a to 2c are views showing the structure of the exciter of the gas pipe excitation device according to the present invention.

3 is a view showing the structure of the controller of the gas pipe excitation apparatus according to the present invention.

4 is a view showing the configuration of a system for evaluating the performance of the exciter of the gas pipe excitation device according to the present invention.

Figures 5a to 5e is a graph showing the vibration speed of the gas pipe over time at each point analyzed by the frequency analyzer of the gas pipe excitation device according to the present invention.

6a to 6e are graphs showing the vibration speed of the gas pipe for each frequency at each point analyzed by the frequency analyzer of the gas pipe excitation apparatus according to the present invention.

7A and 7B are tables and graphs in which the vibration measurement results of the gas pipes shown in FIGS. 5A to 5E and 6A to 6E are displayed with RMS values and attenuation values in dB units.

8 is a graph showing the number of particles in which particles in the gas pipe are removed with respect to time when the gas pipe is excited by using the exciter of the gas pipe excitation device according to the present invention.

9A to 9C are graphs showing the system configuration for calculating the allowable vibration level of the exciter of the gas pipe excitation apparatus according to the present invention and the measurement result using the same.

10 is a flow chart showing the procedure of the gas piping excitation method according to the present invention.

Claims (8)

A vibrator attached to a gas pipe to vibrate the gas pipe; A vibration sensor attached to the gas pipe to detect a vibration signal of the gas pipe; And A controller for controlling an excitation characteristic of the exciter based on a vibration signal sensed by the vibration detection sensor; Including, device with tubing. The method of claim 1, The controller is configured to cause the vibrator to vibrate the gas pipe at a preset allowable vibration level. Tubing The method of claim 1, The excitation characteristic is at least one of the vibration width, the excitation frequency, the allowable vibration level of the exciter, Device with piping. The method of claim 1, The controller is configured to turn off the vibrator when the vibration level of the vibration signal sensed by the vibration sensing sensor lasts for a predetermined time beyond a range of an allowable vibration level. Device with piping. The method of claim 3, The controller further includes a control unit for adjusting the vibration width of the vibrator, the excitation frequency, the magnitude of the allowable vibration level, and a predetermined time for determining abnormal vibration, respectively. Device with piping. The method of claim 4, wherein The controller further includes a control unit for adjusting the predetermined time. Device with piping. The method according to any one of claims 2 to 5, The allowable vibration level is, The mobility of the gas pipe is measured by hitting the hammer on a point of the surface of the gas pipe by the magnitude of the force that the hammer strikes and the vibration speed at which the gas pipe vibrates by the hammer. The resonance frequency of the gas pipe is searched and calculated using the found resonance frequency. Device with piping. A step of vibrating the gas piping attached to the gas piping; Sensing a vibration signal of the gas pipe through a vibration sensor attached to the gas pipe; And A control step of controlling an excitation characteristic of the exciter based on the vibration signal sensed by the vibration detection sensor; Including, method with tubing.

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