KR20100118842A - Atomspheric pressure plasma apparatus and atomspheric pressure plasma contamination processing apparatus - Google Patents

Abstract

PURPOSE: An atmospheric pressure plasma apparatus and a contaminant processing apparatus using atmospheric pressure plasma are provided to protect environment by reducing the used amount of water and detergent. CONSTITUTION: A first electrode(14) includes a tapered part(14a) which is symmetric in a first direction. A second electrode(12) is arranged around the tapered part of the first electrode. The second electrode includes a plasma outlet(17) in the first direction. Power supply(18) is in connection with the first electrode. A gap between the tapered part and the second electrode are constant. The gap provides a discharging space(23).

Description

ATOMSPHERIC PRESSURE PLASMA APPARATUS AND ATOMSPHERIC PRESSURE PLASMA CONTAMINATION PROCESSING APPARATUS}

The present invention relates to a plasma apparatus, and more particularly to an atmospheric pressure plasma apparatus.

The present invention is derived from a study conducted as part of the industrial technology development project of the Ministry of Commerce, Industry and Energy [project name: development of real-time measurement technology of semiconductor vacuum process].

Washing separates dirt and dirt from clothing by mechanical force such as shock, friction and vibration and chemical action of detergent, restoring the original beauty and hygienic function of clothing and at the same time recovering the original shape of clothing to improve durability. It is to let you. In case of washing only with water, water-soluble contaminants can be separated from clothes. However, since the oil-soluble contaminants are insoluble in water, the washing is difficult. When washing with detergent added to water, the detergent is an amphiphilic substance that has both water-like (or water-loving, hydrophilic) and oil-like (or water-dislike, hydrophobic) properties. It acts as a surfactant. Detergents can remove oil-soluble contaminants from fibers by wrapping them in water and dissolving in water. At this time, the mechanical force of the washing machine serves to absorb the detergent deep into the fiber so that the contaminants can be quickly removed from the fiber. This basic washing mechanism can be applied to all washing machines. In the case of the recently developed bubble washing machine, since the bubble has excellent detergent delivery power, the bubble is quickly absorbed and dissipated in a large area of the fiber and thus disappears, thereby improving washing power and rinsing performance. Thus, time and energy savings are possible. In addition, washing machines that have a sterilizing effect by adding steam function and / or boil function are also on the market. The sterilization method by applying high temperature has problems of fiber damage and high power consumption. In addition, laundry using synthetic detergents can cause environmental pollution. Synthetic detergents are not easily degraded by microorganisms, blocking the light passing through the water, inhibiting photosynthesis of aquatic plants, blocking oxygen supply, and significantly lowering the river's self-cleaning ability. In addition, phosphate, a cleaning promoter in synthetic detergents, acts as a nutrient for phytoplankton, causing eutrophication of streams, causing red tide that kills not only fish but also other aquatic plants. Washing requires improvement in washing power and saving of water and power consumed during washing and rinsing, and washing is also required to be environmentally friendly.

 The steam function, which is used in not only a washing machine but also a cleaner, heats and vaporizes water using electric energy and sterilizes it through heat transfer. At this time, there is a limit of bactericidal effect because no effective heat transfer. In addition, the electricity consumption is not efficient.

Atmospheric pressure plasma apparatus according to an embodiment of the present invention can provide a stable atmospheric pressure plasma apparatus by adjusting the distance between the electrodes.

Atmospheric pressure plasma apparatus according to an embodiment of the present invention can provide a stable atmospheric pressure plasma contaminant treatment apparatus by adjusting the distance between the electrodes.

An atmospheric pressure plasma apparatus according to an embodiment of the present invention includes a first electrode including a tapered portion having a tapered shape symmetrically in a first direction, disposed around the tapered portion of the first electrode, and providing a plasma outlet in the first direction. And a second electrode, and a power source electrically connected to the first electrode, wherein a distance between the tapered portion and the second electrode is maintained uniformly, and the gap may provide a discharge space.

In one embodiment of the present invention, further comprising a gap adjusting unit for adjusting the gap, the adjustment of the gap can provide a stable plasma.

In one embodiment of the present invention, the plasma and by-products generated by the plasma may be provided to the object through the plasma outlet to hydrophilize the object.

In one embodiment of the present invention, it may further include a first electrode insulating film disposed on the surface of the first electrode.

In one embodiment of the present invention, it may further include a fluid supply for supplying a fluid to the discharge space.

In one embodiment of the present invention, it may further include a third electrode spaced apart from the second electrode in the first direction.

In one embodiment of the present invention, further comprising a body portion coupled to the first electrode to support the first electrode and the second electrode, the second electrode and the body portion to form a capacitor to provide a displacement current can do.

In one embodiment of the present invention, the tapered portion may be a cone shape or truncated cone shape.

In one embodiment of the present invention, further comprising a body portion separated and coupled to the second electrode, the first electrode further includes a first electrode body portion having a constant cross-section extending from the tapered portion, the body portion The second electrode body may be fixedly coupled to each other.

In one embodiment of the present invention, further comprising a short adjusting portion for adjusting the gap, wherein the gap adjusting portion bolt portion formed in any one of the body portion and the second electrode, and the body portion and the second electrode It includes a nut portion formed in the other, the bolt portion and the nut portion can be combined with each other to adjust the gap.

An atmospheric pressure plasma apparatus according to an embodiment of the present invention includes a first electrode including a tapered portion, a first electrode insulating layer disposed on a surface of the first electrode, and a taper portion of the first electrode disposed to surround the tapered portion. A second electrode including a plasma outlet disposed in the decreasing region, a power source electrically connected to the first electrode, the second electrode and the taper portion having a uniform gap and a gap adjusting part for adjusting the gap; And a fluid supply part supplying a fluid to the discharge space provided by the gap, wherein the body part supports the second electrode and the first electrode, and the gap adjusting part is configured to vary the gap to provide stable plasma discharge. Can be.

In one embodiment of the present invention, the fluid supply unit may be formed in the second electrode to supply the fluid to the discharge space.

In one embodiment of the present invention, the first electrode includes a tapered portion, a first electrode body portion having a uniform cross section, a first electrode connecting portion connecting the tapered portion and the first electrode body portion, The first electrode connector may provide a buffer space between the second electrode and the first electrode connector.

In one embodiment of the present invention, the body portion may include a support portion for supporting the first electrode and a connection portion connected to the second electrode.

Atmospheric pressure plasma apparatus according to an embodiment of the present invention includes a first electrode having a tapered shape in a first direction, a second electrode in which the first electrodes arranged in a second direction crossing the first direction is inserted, And a power source electrically connected to the first electrodes, wherein the first electrodes and the second electrode maintain a uniform interval, and the interval may provide a discharge space.

Atmospheric pressure plasma contaminant treatment apparatus according to an embodiment of the present invention is a first electrode including a tapered portion, a first electrode insulating film disposed around the first electrode, a second disposed around the tapered portion and includes a plasma outlet An electrode, a power source electrically connected to the first electrode, the second electrode and the tapered portion maintain a uniform gap, and a gap adjusting part for adjusting the gap, and in combination with the first electrode, the first electrode and the It includes a body portion for supporting a second electrode, wherein the interval between the tapered portion of the first electrode and the second electrode is uniform, the interval may provide a discharge space.

In one embodiment of the present invention, further comprising a fluid supply for supplying a fluid to the discharge space, the fluid supply may be formed in the body portion.

In one embodiment of the present invention, the body portion is a double cylinder shape including an inner cylinder and an outer cylinder, the fluid supply may be provided by a space between the inner cylinder and the outer cylinder.

Atmospheric pressure plasma apparatus according to an embodiment of the present invention can provide a stable plasma by adjusting the distance between the electrodes. The atmospheric plasma may enable environmentally friendly washing by reducing the amount of water and detergent while improving washing power by supplementing existing washing mechanisms. The atmospheric plasma results in an increase in sterilization power, which is applicable to cleaners as well as washing machines.

Atmospheric pressure plasma apparatus according to an embodiment of the present invention can provide an environmentally friendly laundry with improved washing power, sterilization effect by using atmospheric pressure plasma to complement the washing mechanism using the conventional detergent and physical force. In addition, the atmospheric pressure plasma apparatus may be applied to a vacuum cleaner in addition to a washing machine by forming a plasma at atmospheric pressure.

Atmospheric pressure plasma apparatus according to an embodiment of the present invention can provide a surface treatment effect, sterilization effect and the like using the atmospheric plasma. The atmospheric plasma apparatus may hydrophilize the surface characteristics of the contaminants remaining in the fiber through the atmospheric plasma treatment. Accordingly, the washing effect of the fiber can be increased, the amount of detergent used and the amount of water consumed during rinsing can be reduced. In addition, the plasma treatment of the fibers can provide environmentally friendly washing. The plasma treatment can also effectively inactivate bacteria by the combined action of ultraviolet radiation, heat, chemically activated species (radicals), and charge particles. The plasma treatment can improve the heat sterilization effect of the conventional washing machine only. In addition, the plasma treatment may be applied to a steam cleaner or a rice cooker.

The limitations and problems of the basic washing mechanism using the detergent function of the detergent and the mechanical power of the washing machine can be supplemented and improved by using plasma treatment. In other words, the contaminants may be hydrophilized through plasma treatment and dissolved in water. The plasma treatment may provide a high washing power improvement effect while reducing the amount of detergent. In addition, the plasma treatment is excellent in the sterilization effect by the active species to complement the conventional heat sterilization action. In other words, it reduces the consumption of detergents, water and power, enabling environmentally friendly laundry.

In the present specification, the atmospheric pressure includes a pressure in the vicinity of the atmospheric pressure in addition to the atmospheric pressure in the strict sense.

Atmospheric pressure plasma apparatus according to an embodiment of the present invention can adjust the distance between the electrodes can satisfy a variety of matching conditions by the use of various gases.

Atmospheric pressure plasma apparatus according to an embodiment of the present invention can hydrophilize the contaminants. That is, the hydrophilization treatment may be performed by plasma and / or active species (radicals) generated by the plasma.

 Conventional, the stability of the discharge using high frequency may depend on the characteristics of the load. The nature of the load may depend on the gas used, the pressure used, the distance between the electrodes, and the like. However, the conventional atmospheric plasma apparatus is difficult to ensure the stability of the plasma when the use gas or use pressure is changed. Atmospheric pressure plasma apparatus according to an embodiment of the present invention can provide a stable plasma by adjusting the distance between the electrodes.

1 is a conceptual diagram illustrating an atmospheric pressure plasma apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the atmospheric pressure plasma apparatus 10 includes a first electrode 14 including a tapered portion 14a symmetrically in a first direction, and a circumference of the tapered portion 14a of the first electrode 14. It may include a second electrode 12 which is disposed in and includes a plasma outlet 17 in the first direction, and a power source 18 electrically connected to the first electrode 14. The gap d1 of the tapered portion 14a and the second electrode 12 may be maintained uniformly, and the gap d1 may provide a discharge space 23. The atmospheric pressure plasma apparatus 10 may include an interval adjusting unit 15 that adjusts the interval d1. Adjusting the spacing can provide a stable plasma.

The first electrode 14 may be a conductive material. As the tapered portion 14a travels in the first direction with respect to the central axis of the first electrode 14, the cross-sectional area of the tapered portion 14a may decrease. The tapered portion may be conical or truncated conical. The taper angle between the central axis and the tapered surface of the tapered portion 14a may be constant. The tapered portion 14a may be symmetrical about the central axis. The first electrode insulating layer 13 may be disposed on the surface of the first electrode 14. The first electrode insulating layer 13 may suppress arc generation during discharge. The first insulating layer 13 may include at least one of a metal oxide layer, a metal oxynitride layer, a dielectric layer, rubber, acryl, polyimide, and a polymer. The thickness of the first electrode insulating layer 13 may be several tens of um to several mm. One end 14c of the tapered portion 14a may be disposed toward the plasma outlet 17. One end 14c of the tapered portion 14a may have a curved shape. Thus, the curved shape can reduce the arc discharge due to the concentration of the electric field (or electric field). The first electrode insulating layer 113 may have a multilayer structure. The first electrode insulating layer 113 may have a double structure of an aluminum oxide film / poly film. The shape of one end 14c of the tapered portion 14a may be variously modified. The first electrode 14 may include a first electrode body portion 14b.

The tapered portion 14a may include a groove 19 formed on the surface. The groove 19 may induce a hollow cathode discharge by changing the shape of the electric field. Accordingly, the hollow cathode discharge may increase the production rate of the plasma 21 and by-products. According to a modified embodiment of the present invention, the groove 19 may be formed on the surface of the second electrode 12 facing the tapered portion.

The second electrode 12 may be disposed around the first electrode 14. Alternatively, the second electrode 12 may be disposed around the first electrode 14. The second electrode 12 may include a tapered hole 12a to maintain a constant distance from the first electrode 14. The tapered portion 14a may be inserted into the tapered hole 12a. A second electrode insulating layer (not shown) may be disposed on the tapered hole 12a. The second electrode insulating layer may suppress generation of arc during discharge. The second electrode 12 may include a plasma outlet 17. The plasma outlet 17 may be disposed on the central axis of the tapered portion 14a. The plasma outlet 17 may be disposed in succession with the tapered hole 12a. The cross-sectional area of the plasma outlet 17 may be smaller than the cross-sectional area of the tapered hole 12a. Plasma 21 may be generated between the tapered portion 14a and the second electrode 12. The plasma 21 may diffuse through the plasma outlet 17. The gap d1 of the tapered portion 14a and the second electrode 12 may vary. The interval d1 may be changed while the second electrode 12 moves in the first direction. The interval d1 may be adjusted according to a gas and a process used for plasma discharge. The second electrode 12 may be grounded.

The body portion 16 may be disposed adjacent to the other end of the first electrode 14. The body portion 16 may be disposed to surround the first electrode body portion 14b. The body portion 16 may be fixedly coupled to the first electrode 14. The body portion 16 may support the first electrode 14 and the second electrode 12. A first electrode insulating layer 13 may be disposed between the body portion 16 and the first electrode 14. The first electrode insulating layer 13 may have a different thickness according to a position. The thickness of the first electrode insulating layer 13 on the tapered portion 14a may be greater than the thickness of the first electrode insulating layer 13 disposed to face the body portion 16. The first electrode insulating layer 13 on the tapered portion 14a may have a multilayer structure of a polymer / aluminum oxide layer. The polymer may be damaged by the plasma 21 and replaced. The body portion 16 and the first electrode body portion 14b may be electrically insulated from each other to constitute a capacitor. Displacement current may flow through the capacitor. The current supplied to the power source 18 may include the displacement current flowing through the capacitor and the plasma current flowing through the plasma 21. The displacement current may be greater than the plasma current. As the displacement current increases, the plasma may operate stably. In order to increase the capacitance of the capacitor, the other end of the first electrode 14 and the shape of the body portion 16 corresponding thereto may be variously modified. The body portion 16 may be grounded.

The gap adjuster 15 may be disposed between the body 16 and the second electrode 12. Alternatively, the gap adjusting part 15 may be formed in the body part 16 and / or the second electrode 12. The gap controller 15 may be variously modified as long as the gap controller 15 may adjust the gap between the taper unit 14a and the second electrode 12 facing the taper unit 14a. The gap adjuster 15 may move the second electrode 12 relative to the first electrode 14 in the first direction. When the plasma 21 is unstable, the cut adjustment unit 15 may provide a stable plasma by adjusting the interval d1. In the atmospheric pressure treatment process, water vapor in the atmosphere, a substance desorbed from an object to be processed, and the like may be introduced into the discharge space, thereby changing process conditions. Thus, atmospheric plasma apparatuses with fixed spacing have limitations in eliminating arc discharge and plasma instability.

The fluid supply unit 28 may supply a fluid to the discharge space 23. The fluid may comprise a carrier gas and / or a reactant gas. The carrier gas may include at least one of a fluorine gas such as helium and argon, and nitrogen. The reaction gas may vary depending on the process. The reaction gas for the hydrophilization treatment may be a gas containing oxygen. For example, the reaction gas may include at least one of oxygen, carbon dioxide, and carbon monoxide. The hydrophilization treatment may be attributable to oxygen-containing groups (-OH, -OOH) formed in the workpiece 26 through oxidation. Therefore, a reaction gas that forms a large number of C═O molecules may be desirable. The plasma 21 and by-products generated by the plasma 21 may be provided to the object 26 through the plasma outlet 17 to hydrophilize the object 26. The fluid supply part 28 may be formed in the body part 14.

The third electrode 24 may be spaced apart from the first electrode 14 in the first direction. The workpiece 26 may be disposed between the third electrode 24 and the first and second electrodes 14 and 12. The third electrode 24 may be grounded. The workpiece 26 may be a fiber, a substrate, a polymer, a semiconductor, or a metal. The workpiece 26 may be treated by plasma and / or by-products passing through the plasma outlet 17. An auxiliary plasma 25 may be generated between the workpiece 26 and one end 14c of the tapered portion 14a of the first electrode 14. An effective area of the auxiliary plasma 25 may be smaller than an effective area of the plasma 21. When the effective area of the auxiliary plasma 21 is larger than the effective area of the plasma 21, the auxiliary plasma 21 may be unstable according to discharge conditions and cause arc discharge. The distance between the third electrode 24 and one end 14c of the tapered portion 14a may be greater than the distance between the tapered portion 14a of the first electrode 14 and the second electrode 12. .

The power source 18 may be a radio frequency (RF) power source, an AC power source, or a DC power source. When the power source is an RF power source, a matching network (not shown) may be disposed between the power source 18 and the first electrode 14.

2A and 2B are diagrams illustrating an atmospheric pressure plasma apparatus according to another embodiment of the present invention. FIG. 2B is a cross-sectional view taken along the line II ′ of FIG. 2A.

2A and 2B, the atmospheric pressure plasma apparatus 100 includes a first electrode 110 including a tapered portion 110a and a first electrode insulating layer 112 disposed on a surface of the first electrode 110. ), A second electrode 122 including a plasma outlet 124 disposed to surround the tapered portion 110a of the first electrode 110 and disposed in a region where the cross section of the tapered portion 110a is reduced. In addition, the power supply 164 electrically connected to the first electrode 110, the second electrode 122 and the tapered portion (110a) is to maintain a uniform interval and the interval adjusting unit 170 to adjust the interval And a body part 133 supporting the second electrode 122 and the first electrode 110, and a fluid supply part 182 supplying a fluid to the discharge space 123 provided by the gap. . The spacing controller 170 may vary the spacing to provide stable plasma discharge.

The tapered portion 110a may have a conical shape. The first electrode 110 may include a first electrode body part 110b extending from the tapered part 110a and having a constant cross section. The first electrode body 110b may have a cylindrical shape. The tapered portion 110a and the first electrode body portion 110b may be one body. The first electrode 110 may be connected to the power source 164 to generate an atmospheric plasma.

The first electrode insulating layer 112 may be disposed around the first electrode 110. The thickness of the first electrode insulating layer 112 may be different from each other in the tapered portion 110a and the first electrode body portion 110b. The thickness of the first electrode insulating layer 112 on the tapered part 110a may be greater than the thickness of the first electrode insulating layer 112 on the first electrode body part 110b.

The second electrode 122 may have a solid shape having a hole in the center thereof. The hole may be a plasma outlet 124. The space between the second electrode 122 and the tapered portion 110a may provide a discharge space 123. The shape of the second electrode 122 may be variously modified as long as it maintains a constant distance from the tapered portion 110a. The second electrode 122 may include a tapered hole 122a. The angle of the tapered hole 122a may be constant. An angle of the tapered hole 122a and an angle of the tapered part may be the same. The diameter of the plasma outlet 124 may be smaller than the diameter of the tapered hole 122a. The plasma generated in the discharge space 123 may be diffused through the plasma outlet 124. The second electrode 122 may be grounded.

The body portion 133 may be separated and coupled to the second electrode 122. The body portion 133 may have a cylindrical shape. The inner radius of the body portion 133 may substantially coincide with the maximum radius of the tapered hole 122a. The body portion 133 may be fixedly coupled to the first electrode body portion 110b. The body portion 133 may be disposed to surround the first electrode body portion 110b. The body portion 133 may be separated into two around a central axis, and may support the first electrode body portion 110b while being coupled to each other. The body portion 133 may configure a capacitor with the first electrode body portion 110b. The body part 133 may include a connection body part 132 coupled to the second electrode 110 and a support part 134 supporting the first electrode body part 110b. The body portion 133 may be grounded.

The gap adjusting part 170 may include a bolt part 174 formed on one of the body part 133 and the second electrode 122, and another part of the body part 133 and the second electrode 122. It may include a nut portion 172 formed on one. The bolt part 174 and the nut part 172 may be coupled to each other to adjust the gap. The nut part 172 may be formed at a lower end of the second electrode 122. The nut part 172 may include a groove coupled with a thread. The bolt portion 174 may include the thread. The bolt part 172 may be formed in the connection body part 132. The gap adjusting unit 170 may be changed to another structure in addition to the screw coupling structure.

The fluid supply part 182 may be formed inside the body part 133. The fluid supply part 182 may include a plurality of fluid through holes 182b running in parallel in the direction of the central axis of the support part 134. The fluid through holes 182b may be disposed while maintaining a constant angle with respect to the central axis of the support part 134.

The fluid through hole 182b may be connected to a nozzle 182a disposed adjacent to an area in which the tapered portion 110a and the connecting portion 132 face each other. The nozzle 182a may provide a fluid to the discharge space 123. The lid 152 may be disposed at the lower end of the body portion 133. The lid 152 may be coupled to the body portion 133. The lid 152 may be a conductive or insulating material. The lid 152 may include two jaws 155b and 155a whose thickness decreases as the diameter decreases. The lid 152 may include an insulating through hole 153 in the center area. The diameter of the insulating through hole 153 may be larger than the diameter of the first electrode body part 110b. The insulating plate 154 may be disposed on the inner side of the first jaw 155a on the insulating through hole 153. The second jaw 155b and the insulating plate 154 may provide a fluid mixing space 182c. The fluid mixing space 182c may be connected to the through holes 182b. The flow rate controller 146 may be connected to the fluid mixing space 182c. The flow rate controller 146 may adjust the flow rate supplied through the flow path. The flow rate controller 146 may be a plurality. The flow rate controller 146 may adjust the flow rates of the plurality of fluids.

An electrode plug 166 may be disposed at the center of the insulating plate 154. The electrode plug 166 may be a means for electrically connecting with the first electrode 110. The power source 164 may be connected to the electrode plug 166. The matching network 162 may be disposed between the power source 164 and the electrode plug 166.

The third electrode 125 may be spaced apart from the first electrode 110 in the first direction. An object to be processed may be disposed between the third electrode 125 and the first 110. The third electrode 125 may be grounded.

3 is a cross-sectional view illustrating an atmospheric pressure plasma apparatus according to another embodiment of the present invention. Descriptions overlapping with those described in FIGS. 2A and 2B will be omitted.

Referring to FIG. 3, the atmospheric pressure plasma apparatus 100 includes a first electrode 110 including a tapered portion 110a, a first electrode insulating layer 112 disposed on a surface of the first electrode 110, and the A second electrode 122 including the plasma outlet 124 disposed to surround the tapered portion 110a of the first electrode 110 and disposed in an area where the cross section of the tapered portion 110a is decreased, The power supply 164 electrically connected to the first electrode 110, the second electrode 122, and the tapered portion 110a maintain a uniform interval and adjust the interval 170, and adjust the gap. A second electrode 122, a body portion 133 for supporting the first electrode 110, and a fluid supply unit 182 for supplying a fluid to the discharge space 123 provided by the gap. The spacing controller 170 may vary the spacing to provide stable plasma discharge.

The first electrode 110 has a tapered portion 110a, a first electrode body portion 110b having a uniform cross section, and a first connecting the tapered portion 110a and the first electrode body portion 110b. The electrode connection part 110c may be included. The first electrode connector 110c may provide a buffer space 102 between the second electrode 122 and the first electrode connector 110c. The taper part 110a, the first electrode body part 110b, and the first electrode connection part 110c may be one body. The buffer space 102 may be a mixing space of the fluid. In addition, the buffer space 102 may suppress unnecessary abnormal discharge between the edge of the tapered hole 122a and the tapered portion 110a.

According to a modified embodiment of the present invention, the first electrode connection part 110c may be an insulator. Accordingly, the first electrode connection part 110b may include a conductive wire (not shown) therein. The conductive wire may electrically connect the table portion 110a and the first electrode body portion 110b to each other.

4 is a cross-sectional view illustrating an atmospheric pressure plasma apparatus according to another embodiment of the present invention.

Referring to FIG. 4, the atmospheric pressure plasma apparatus 200 includes a first electrode 210 including a tapered portion 210a, a first electrode insulating layer 212 disposed around the first electrode 210, and the A second electrode 222 disposed around the tapered portion 210a and including a plasma outlet 224, a power source 264 electrically connected to the first electrode 210, and the first electrode 210a; In combination with the body portion 233 to support the first electrode 210 and the second electrode 222. An interval between the tapered portion 210a of the first electrode 210 and the second electrode 222 may be uniform, and the interval may provide a discharge space 223. The atmospheric plasma apparatus 200 may include a fluid supply part 282 supplying a fluid to the discharge space 223. The fluid supply part 282 may be formed in the body part 233. The body portion 233 may have a double cylindrical shape including an inner cylinder and an outer cylinder, and the fluid supply part 233 may be provided by a space between the inner cylinder and the outer cylinder.

The first electrode 210 may be a conductive material. The tapered portion 210a may decrease in cross-sectional area of the tapered portion 210a as the central axis of the first electrode 210 extends in the direction or the first direction. The tapered portion 210a may have a conical shape or a truncated cone shape. The taper angle between the central axis and the tapered surface of the tapered portion 210a may be constant. The tapered portion 210a may be symmetrical about the central axis. The first electrode insulating layer 212 may be disposed on the surface of the first electrode 210. The first electrode insulating layer 212 may suppress arc generation during discharge. The first insulating layer 212 may include at least one of a metal oxide layer, a metal oxynitride layer, a dielectric layer, rubber, acryl, polyimide, and a polymer. The thickness of the first electrode insulating layer 212 may be several tens of um to several mm. One end of the tapered portion 210a may be disposed toward the plasma outlet 224. One end of the tapered portion 210a may include a curved shape. Thus, the curved shape can reduce the arc discharge due to the concentration of the electric field (or electric field). The first electrode insulating layer 212 may have a multilayer structure. The first electrode insulating film 212 may have a dual structure of an aluminum oxide film / poly film. The shape of one end of the tapered portion 210a may be variously modified. The first electrode 210 may include a first electrode body 210b. The first electrode body 210b may have a constant cross section.

The second electrode 222 may be disposed around the tapered portion 210a. Alternatively, the second electrode 222 may be disposed around the tapered portion 210a. The second electrode 222 may include a tapered hole 222a to maintain a constant distance from the tapered portion 210a. The taper 210a may be inserted into the taper hole 222a. A second electrode insulating layer (not shown) may be disposed on the taper hole 222a. The second electrode insulating layer may suppress generation of arc during discharge. The second electrode 222 may include a plasma outlet 224. The plasma outlet 224 may be disposed on a central axis of the tapered portion 210a. The plasma outlet 224 may be continuously disposed after the tapered hole 222a. The cross-sectional area of the plasma outlet 224 may be smaller than the cross-sectional area of the tapered hole 222a. Plasma may be generated between the tapered portion 210a and the second electrode 222. The plasma may diffuse through the plasma outlet 224. The gap between the taper 210a and the second electrode 222 may vary. The gap may be changed while the second electrode 222 moves in the first direction. The interval may be adjusted according to the gas and the process used for the plasma discharge. The second electrode 222 may be grounded.

The body portion 233 may be disposed adjacent to the other end of the first electrode 222. The body portion 233 may be disposed to surround the first electrode body portion 210b. The body portion 233 may be fixedly coupled to the first electrode 210. The body portion 233 may support the first electrode 210 and the second electrode 222. A first electrode insulating layer 212 may be disposed between the body portion 233 and the first electrode 210. The first electrode insulating layer 212 may have a different thickness according to a position. The thickness of the first electrode insulating layer 212 on the tapered portion 210a may be greater than the thickness of the first electrode insulating layer 212 on the first electrode body portion 210b. The first electrode insulating layer 212 on the tapered portion 210a may have a multilayer structure of a polymer / aluminum oxide layer. The polymer may be damaged by the plasma and replaced. The body 233 and the first electrode body 210b may be electrically insulated from each other to constitute a capacitor. Displacement current may flow through the capacitor. The current supplied from the power source 264 may include the displacement current flowing through the capacitor and the plasma current flowing through the plasma. The displacement current may be greater than the plasma current. As the displacement current increases, the plasma may operate stably. In order to increase the capacitance of the capacitor, the shape of the first electrode body portion 210b and the body portion 233 corresponding thereto may be variously modified. The body portion 233 may be grounded. The body part 233 may include a connection part 232, a support part 234a, and an auxiliary support part 234b. The auxiliary support part 234b may be disposed between the connection part 232 and the support part 234a. The support part 234a may have a double cylindrical shape. The first electrode body 210b may be disposed in the inner cylinder 234d of the support part 234a. The auxiliary support 234b may have a ring shape inserted into the outer cylinder 234c of the support 234a. The auxiliary support part 234b may be fixed to each other through the groove of the connection part 232. The body portion 233 may include a lid 252. The lid 252 may be disposed to cover a space between the inner cylinder 234d and the outer cylinder 234c of the support 234b. An insulation part 268 may be disposed on the lid 252. The power plug 266 may be disposed through the insulating part 268. The power plug 266 may be electrically connected to the first electrode 210.

The gap controller 270 may be formed in the body 233 and / or the second electrode 222. The gap controller 270 may be variously modified as long as the gap controller 270 may adjust the gap between the taper 210a and the second electrode 222 facing the taper 210a. The gap controller 270 may move the second electrode 222 relative to the first electrode 210 in the first direction. When the plasma is unstable, the cut adjustment unit 270 may provide a stable plasma by adjusting the interval. The gap adjusting part 270 is a bolt part 274 formed on one of the body part 233 and the second electrode 222, and the other of the body part 233 and the second electrode 222. It may include a nut portion 272 formed in one. The bolt part 274 and the nut part 272 may be coupled to each other to adjust the gap. The nut part 272 may be formed at a lower end of the second electrode 222. The nut part 272 may include a groove that engages with a thread. The bolt portion 274 may include the thread. The bolt part 272 may be formed at the connection part 232. The gap adjusting unit 270 may be changed to another structure in addition to the screw coupling structure.

The fluid supply part 282 may include a space 282b between the outer cylinder and the inner cylinder of the support part 234a and a nozzle 282a for supplying a fluid to the discharge space 223. The nozzle 282a may be connected from the space 282b between the outer cylinder and the inner cylinder of the support 234a. The nozzle 282a may be formed in the connection portion 232. The nozzle 282a may be disposed obliquely with respect to the first direction. The nozzle 282 may be regularly arranged at a predetermined angle with respect to the central axis of the connection portion 232. The flow rate controller 246 may supply a fluid to the space 282b between the outer cylinder and the inner cylinder.

The fluid may comprise a carrier gas and / or a reactant gas. The carrier gas may include at least one of a fluorine gas such as helium and argon, and nitrogen. The reaction gas may vary depending on the process. The reaction gas for the hydrophilization treatment may be a gas containing oxygen. For example, the reaction gas may include at least one of oxygen, carbon dioxide, and carbon monoxide. The hydrophilization treatment may be attributable to oxygen-containing groups (-OH, -OOH) formed in the object to be treated through oxidation. Therefore, a reaction gas that forms a large number of C═O molecules may be desirable. The plasma and by-products generated by the plasma may be provided to the workpiece through the plasma outlet 224 to hydrophilize the workpiece. The fluid supply part 282 may be formed in the body part 233. The fluid supply part 282 may be connected to the flow rate adjusting means 246.

The third electrode 225 may be spaced apart from the first electrode 222 in the first direction. The workpiece (not shown) may be disposed between the third electrode 225 and the first and second electrodes 210 and 222. The third electrode 225 may be grounded. The workpiece may be a fiber, a substrate, a polymer, a semiconductor, or a metal. The workpiece may be treated by plasma and / or byproducts that have passed through the plasma outlet 224. An auxiliary plasma may be generated between the workpiece and one end of the tapered portion 210a. The effective area of the auxiliary plasma may be smaller than the effective area of the plasma. The distance between the third electrode 225 and one end of the tapered portion 210a may be greater than the distance between the tapered portion 210a and the second electrode 222.

The power source 264 may be a radio frequency (RF) power source, an AC power source, or a DC power source. When the power source is an RF power source, a matching network 262 may be disposed between the power source 264 and the first electrode 210.

5A and 5B are diagrams illustrating an atmospheric pressure plasma apparatus according to another embodiment of the present invention. FIG. 5B is a cross-sectional view taken along the line II-II 'of FIG. 5A.

5A and 5B, the atmospheric pressure plasma apparatus 300 includes first electrodes 310 having a tapered shape in a first direction, and the first electrodes arranged in a second direction crossing the first direction. A second electrode 322 into which the electrodes 310 are inserted, and a power source 364 electrically connected to the first electrodes 310, wherein the first electrodes 310 and the second electrode ( 322 maintains a uniform gap, which may provide a discharge space.

The first electrode may include a tapered portion 310a. The tapered portion 310a may have a conical shape. The first electrode 310 may include a first electrode body 310b extending from the tapered portion 310a and having a constant cross section. The first electrode body 310b may have a cylindrical shape. The tapered portion 310a and the first electrode body 310b may be one body. The first electrode 310 may be connected to the power source 364 to generate an atmospheric plasma. The first electrode insulating layer 312 may be disposed around the first electrode 310.

The second electrode 122 may have a plate shape including a plurality of tapered holes arranged in a matrix form. The tapered holes may be connected to the plasma outlet 324. The space between the second electrode 322 and the tapered portion 310a may provide a discharge space 323. The shape of the second electrode 122 may be variously modified as long as it maintains a constant distance from the tapered portion 310a. The angle of the tapered hole 322a may be constant. An angle of the tapered hole 322a and an angle of the tapered part may be the same. The diameter of the plasma outlet 324 may be smaller than the diameter of the tapered hole 322a. The plasma generated in the discharge space 323 may be diffused through the plasma outlet 324. The second electrode 322 may be grounded.

The body portion 333 may be separately coupled to the second electrode 322. The body portion 333 may have a cylindrical shape. An inner radius of the body portion 333 may substantially coincide with a maximum radius of the tapered hole 322a. The body portion 333 may be fixedly coupled to the first electrode body portion 310b. The body portion 333 may be disposed to surround the first electrode body portion 310b.

The body portion 333 may constitute a capacitor with the first electrode body portion 310b. The body part 333 may include a connection body part 332 coupled to the second electrode 310 and a support part 334 supporting the first electrode body part 310b. The body portion 333 may be grounded.

The gap adjusting part 370 is a bolt part 374 formed at any one of the body part 333 and the second electrode 322, and the other of the body part 333 and the second electrode 322. It may include a nut portion 372 formed on one. The bolt part 374 and the nut part 372 may be coupled to each other to adjust the gap. The nut part 372 may be formed on the second electrode 322. The nut part 372 may include a groove coupled with a thread. The bolt part 374 may include the screw thread. The bolt part 372 may be formed in the connection body part 332. The gap adjusting unit 370 may be changed to another structure in addition to the screw coupling structure.

The fluid supply part 382 may be formed in the body part 333. The fluid supply part 382 may include a plurality of fluid through holes 382b running side by side in the direction of the central axis of the support part 334. The fluid through holes 382b may be disposed while maintaining a constant angle with respect to the central axis of the support part 334.

The fluid through hole 382b may be connected to a nozzle 382a disposed adjacent to an area where the tapered portion 310a and the connection portion 332 face each other. The nozzle 382a may provide a fluid to the discharge space 323. The lid 352 may be disposed at one end of the body portion 333. The lid 352 may be coupled to the body portion 333. The lid 352 may be a conductive or insulating material. The insulating plate 354 may be inserted into the lid 352 and disposed. The insulating plate 354 and the body portion 33 may provide a fluid mixing space 382c. The fluid mixing space 382c may be connected to the through holes 382b. An electrode plug 366 may be disposed at the center of the insulating plate 354. The electrode plug 366 may be a means for electrically connecting with the first electrode 310. The power source 364 may be connected to the electrode plug 366. The matching network 362 may be disposed between the power source 364 and the electrode plug 366.

1 is a conceptual diagram illustrating an atmospheric pressure plasma apparatus according to an embodiment of the present invention.

2A and 2B are diagrams illustrating an atmospheric pressure plasma apparatus according to another embodiment of the present invention.

4 is a cross-sectional view illustrating an atmospheric pressure plasma apparatus according to another embodiment of the present invention.

3 is a cross-sectional view illustrating an atmospheric pressure plasma apparatus according to another embodiment of the present invention.

5A and 5B are diagrams illustrating an atmospheric pressure plasma apparatus according to another embodiment of the present invention.

Claims (18)

A first electrode including a taper having a tapered shape symmetric in a first direction; A second electrode disposed around the tapered portion of the first electrode and including a plasma outlet in the first direction; And Include a power source electrically connected to the first electrode, Wherein the gap between the tapered portion and the second electrode is maintained uniformly, the gap providing a discharge space. According to claim 1, And a spacing controller for adjusting the spacing, wherein the spacing of the spacing provides a stable plasma. According to claim 1, And the plasma and by-products generated by the plasma are provided to the workpiece through the plasma outlet to hydrophilize the workpiece. According to claim 1, Atmospheric pressure plasma apparatus further comprises a first electrode insulating film disposed on the surface of the first electrode. According to claim 1, Atmospheric pressure plasma apparatus further comprises a fluid supply for supplying a fluid to the discharge space. According to claim 1, And a third electrode spaced apart from the second electrode in the first direction. According to claim 1, Further comprising a body portion coupled to the first electrode to support the first electrode and the second electrode, And the second electrode and the body portion form a capacitor to provide a displacement current. According to claim 1, The tapered portion is atmospheric pressure plasma apparatus, characterized in that the conical shape or truncated cone shape. The method of claim 8, Further comprising a body portion to be separated and coupled to the second electrode, The first electrode further includes a first electrode body portion extending from the tapered portion and having a constant cross section. The body portion atmospheric pressure plasma apparatus, characterized in that the second electrode body portion fixed to each other. The method of claim 9, Further comprising a short adjusting unit for adjusting the spacing, The gap adjusting unit: A bolt portion formed on one of the body portion and the second electrode; And A nut part formed on the other of the body part and the second electrode, Atmospheric pressure plasma apparatus characterized in that the bolt portion and the nut portion are coupled to each other to adjust the gap. A first electrode including a tapered portion; A first electrode insulating film disposed on the surface of the first electrode; A second electrode disposed to surround the tapered portion of the first electrode and including a plasma outlet disposed in an area where a cross section of the tapered portion decreases; A power source electrically connected to the first electrode; A spacing controller configured to maintain a uniform spacing and adjust the spacing between the second electrode and the tapered portion; A body part supporting the second electrode and the first electrode; And It includes a fluid supply for supplying a fluid to the discharge space provided by the gap, The gap adjusting unit may vary the gap to provide stable plasma discharge. 12. The method of claim 11, And the fluid supply part is formed at the second electrode to supply the fluid to the discharge space. 12. The method of claim 11, The first electrode includes a tapered portion, a first electrode body portion having a uniform cross section, and a first electrode connection portion connecting the tapered portion and the first electrode body portion. And the first electrode connector provides a buffer space between the second electrode and the first electrode connector. 12. The method of claim 11, The body portion includes an atmospheric pressure plasma apparatus comprising a support portion for supporting the first electrode and a connection portion connected to the second electrode. First electrodes having a tapered shape in a first direction; A second electrode into which the first electrodes arranged in a second direction crossing the first direction are inserted; A power source electrically connected to the first electrodes, And the first electrodes and the second electrode maintain a uniform gap, and the gap provides a discharge space. A first electrode including a tapered portion; A first electrode insulating film disposed around the first electrode; A second electrode disposed around the tapered portion and including a plasma outlet; A power source electrically connected to the first electrode; A spacing controller configured to maintain a uniform spacing and adjust the spacing between the second electrode and the tapered portion; And A body part coupled to the first electrode to support the first electrode and the second electrode, And the gap between the tapered portion of the first electrode and the second electrode is uniform and the gap provides a discharge space. The method of claim 16, Further comprising a fluid supply for supplying a fluid to the discharge space, And said fluid supply part is formed in said body portion. The method of claim 17, The body portion is a double-cylindrical shape including an inner cylinder and an outer cylinder, wherein the fluid supply portion is provided by the space between the inner cylinder and the outer cylinder, atmospheric pressure plasma contaminant treatment apparatus.

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