KR20100117281A

KR20100117281A - Multi-beam dividing method and apparatus for laser direct image

Info

Publication number: KR20100117281A
Application number: KR1020090035939A
Authority: KR
Inventors: 김종수
Original assignee: 주식회사 프로텍
Priority date: 2009-04-24
Filing date: 2009-04-24
Publication date: 2010-11-03

Abstract

PURPOSE: A multi-beam dividing method for a laser direct image and a multi-beam dividing apparatus are provided to finely control the intensity of light by moving an optical division lens unit in an X axis and a Y axis. CONSTITUTION: A first collimator lens(20) changes light transmitted through a first optical fiber(10) from a single ultraviolet ray source to parallel light of a wanted size. An optical division lens unit(30) divides parallel light into a plurality of light and focuses the divided light on the different positions. A plurality of second collimator lenses(50) receive the plurality of divided light through a second optical fiber(40) and converts the received light into parallel light. The second collimator lens transmits parallel light into an exposure lens.

Description

MULTI-BEAM DIVIDING METHOD AND APPARATUS FOR LASER DIRECT IMAGE}

The present invention relates to a multiple light splitting method and apparatus for LDI.

In particular, the present invention is to divide the light from the UV light source such as LD (laser diode), mercury lamp, etc. into a plurality of light having the same amount of light using a light split lens unit to be delivered to a plurality of exposure engine without loss The present invention relates to a multiple light splitting method and apparatus for LDI.

In general, an exposure system is a process of manufacturing a plasma display panel (PDP), a shadow mask, a printed circuit board (PCB), a color filter, a liquid crystal display (LCD), a semiconductor, and the like. A system in charge of one process is a system for forming a panel on a substrate using a mask and an optical system, a positioning stage, and ultraviolet light.

One example of the above exposure system is to form an ITO film by coating a predetermined pattern on an LCD panel, which is difficult to form a pattern with an ITO film on a glass substrate by a photolithography method. It is complicated, so long manufacturing time is required as well as increase of manufacturing cost.

In view of this, recently, a technology for directly exposing without a photomask using a DMD (Digital Micromirror Device) has been developed, but a light source (UV light source) must be disposed in each exposure engine including a DMD.

That is, since the light source increases as the exposure engine increases, the volume of the entire exposure system increases, manufacturing costs increase, and the control of the amount of light is difficult due to the use of a plurality of light sources.

Thus, the present applicant uses a single light source irrespective of the number of exposure engines, thereby simplifying the structure of the exposure system, thereby reducing the volume and significantly reducing the manufacturing cost of the exposure system. Patent Application No. 10-2420) was filed in advance.

In other words, the applicant's prior application technology is that the light from the UV light source is reflected through a 45-degree reflection mirror and then separated into two lights of the same intensity by a cube type beam splitter, each having a DMD. Incident on the exposure engine. In this case, the light must be incident at 45 degrees with respect to the DMD because of the hinge structure of the DMD.

Therefore, the applicant's prior application technology can optimize the space utilization of the optical transmission optical system using a 45 degree reflection mirror, while adjusting the position and angle of the exposure engine is not easy.

That is, the applicant's prior application technology cannot freely arrange the configuration of the exposure engine, and in the case of disposing a plurality of exposure engines, it is impossible to change the minute position and the angle according to the exposure area.

In addition, as a source technology, a writing head, a drawing device, and a drawing method (Korean Patent Publication No. 10-2004-48298) are disclosed.

The light transmission method in the source technology has a structure in which a plurality of GaN-based semiconductor laser (LD) light sources are focused on the optical fiber through the primary (collimator) and the secondary (condensing) lens to transmit the light.

In other words, UV light from a plurality of LD light sources is converted into parallel light through the primary collimator lens, respectively, and then the respective parallel light converted by the primary collimator lens through the secondary condenser lens is focused on the optical fiber and the optical fiber Through the UV light to the exposure engine.

Although the prior art is free to arrange the exposure engine, it is not possible to use a single UV light source that is generally used, and each exposure engine by collecting a GaN-based semiconductor laser (LD) light source capable of emitting a large number of UV light. It is necessary to send by.

As a result, there is a need for a setting that can accurately send a large number of LDs, which are UV light sources, to the collimator lens, and also requires a lens to focus on the optical fiber, which is structurally complicated and requires one light source per exposure engine. In this case, multiple LD light sources must be aligned.

1 and 2, the present applicant can use a general UV light source such as a UV lamp or a laser using LD, and integrated optics means capable of separating uniform light. Prior to this, an exposure system for separating UV light into a desired number and inputting the optical fiber through a focus optics means to transmit UV light to an exposure engine has been filed.

The exposure system which is a prior application technology of this applicant,

A single UV light source 100, one reflection mirror (M) and a plurality of light splitters (BS1) (BS2) (BS3) having different transmittances and the light input from the UV light source 100 The integrated optical means 200 for dividing into pieces, the respective light quantity adjusting means 300 for adjusting and outputting each light intensity split out from the integrated optical means 200, and the respective light quantity adjusting means 300 A corresponding optical input means 400 for concentrating and dividing the divided light, an optical fiber 500 connected to an output end of the optical input means 400, and an optical output means provided at an output end of the optical fiber 500 ( 600 and an exposure engine 700 and the like connected to the output terminal and the incident part of the light output means 600.

As described above, the exposure system has to manufacture several light splitters having different transmittances of non-polarizing coatings that can maintain the same transmittance and reflectance for all polarizations of the light source. .

In other words, if the light is divided into four, the exposure system requires four light splitters having transmittance and reflectance of 75:25, 66.7: 33.3, 50:50, and 0: 100.

In addition, in order to fabricate the optical splitter constituting the exposure engine, a non polarizing coating technique is required, which is difficult to manufacture since the non polarizing coating technique requires more than 37 dielectric multilayer thin film coating techniques.

And there is a problem that the transmittance and reflectance deviation of the light splitter is severely generated according to the optical path alignment.

The multiple light splitting method and apparatus for LDI of the present invention for solving the conventional problems as described above,

The purpose is to reduce the production cost by constructing a combination of four focal lenses having a rectangular edge using a stage and moving it finely in the X-axis and Y-axis directions.

In addition, the present invention is a combination of four condensing lenses having the same focal length is another object that can be implemented even with a conventional lens manufacturing technology.

According to the present invention, the optical splitting lens unit and the optical fiber are finely moved in the X-axis and Y-axis directions according to the amount of light detected by the light-quantity measuring device to correct the optical path, thereby reducing the variation of the amount of light divided into four parts. Another object is to reduce the loss of the amount of incident light.

The multiple optical splitter for LDI of the present invention for achieving the above object,

A first collimator lens for converting light output from a single UV light source and transmitted through the first optical fiber into parallel light of a desired size;

A light split lens unit for dividing the light converted into parallel light by the first collimator lens into a plurality of lights to focus the light at different positions; And

A plurality of second collimator lenses that receive a plurality of lights divided by the light split lens unit through a second optical fiber, convert the light into a parallel light, and transmit the light to an exposure engine; Characterized in that it comprises a.

The light split lens unit is a split lens having four rectangular shapes, and is installed on a stage movable in the X-axis and Y-axis directions.

In addition, the present invention includes a plurality of first light splitters installed at the rear end of the light split lens unit to divide a part of the light;

A plurality of first power probes for detecting the intensity of light divided by the plurality of light splitters; And

The light is divided by driving the stage so that the intensity of each of the light split by the light split lens unit is equalized by receiving feedback of the light split by the light split lens unit detected by the plurality of first power probes. A first power meter for finely adjusting the lens unit in the X-axis and Y-axis directions; It characterized in that it further comprises.

In addition, the present invention includes a plurality of second light splitters installed at a rear end of the plurality of second collimator lenses to divide a part of light;

A plurality of second power probes for detecting the intensity of light split by the plurality of light splitters; And

X-axis and Y-axis of the second optical fiber such that the light intensity transmitted to the exposure engine is fed back from the second collimator lens detected by the plurality of second power probes so as to maximize the intensity of the light transmitted to the exposure engine. A second power meter finely adjusted in a direction; It characterized in that it further comprises.

The second optical fiber is characterized in that it is provided on the stage movable in the X-axis and Y-axis direction.

And said light split lens unit and said second optical fiber constitute one set by a fixing unit.

The UV light source is characterized in that the UV light source having a wavelength of 405nm or 365nm or LD or mercury lamp.

In addition, the multiple light splitting method for LDI according to the present invention,

A first step of converting light output from a single UV light source and transmitted through the first optical fiber into parallel light of a desired size by the first collimator lens;

A second step of dividing the light converted into parallel light by the first collimator lens into a plurality of light by a light splitting lens unit to focus the light at different positions; And

A third step of receiving a plurality of lights split and focused by the light split lens unit through a second optical fiber, converting the plurality of lights into parallel lights by a plurality of second collimator lenses, and transferring the light to an exposure engine; Characterized in that it comprises a.

The light split lens unit is a split lens having four quadrangular shapes and is installed on the stage to move in the X-axis and Y-axis directions.

In addition, the present invention comprises the steps of dividing a portion of the light divided by the light split lens unit by a plurality of first light splitters;

Detecting by the plurality of first power probes the intensity of the light split by the plurality of light splitters; And

The stage so that the intensity of each of the light split by the light split lens unit is equal by the first power meter fed back the intensity of the light split by the light split lens unit detected by the plurality of first power probes. Fine-tuning the optical split lens unit in the X-axis and Y-axis directions by driving a light source; It characterized in that it further comprises.

In addition, the present invention comprises the steps of dividing a portion of the light converted into parallel light by the plurality of second collimator lens by a plurality of second light splitters;

Detecting by the plurality of second power probes the intensity of the light split by the plurality of light splitters; And

The second optical fiber such that the intensity of light transmitted to the exposure engine is maximized by a second power meter fed back from the second collimator lens detected by the plurality of second power probes to the exposure engine; Finely adjusting the X-axis and Y-axis directions; It characterized in that it further comprises.

The second optical fiber is installed on the stage to move in the X-axis and Y-axis direction.

Therefore, according to the present invention, the manufacturing cost can be lowered by allowing the focus lens having a rectangular edge to be moved finely in the X-axis and Y-axis directions using a stage.

In addition, the present invention is a form of a combination of four condensing lenses having the same focal length, it is easy to manufacture because it can be implemented only with conventional lens manufacturing techniques.

According to the present invention, the optical splitting lens unit and the optical fiber are finely moved in the X-axis and Y-axis directions according to the amount of light detected by the light-quantity measuring device to correct the optical path so as to reduce the deviation of the light quantity divided into four and the optical fiber There is an effect that can reduce the loss of the amount of light incident on the.

Hereinafter, the configuration and operation of the present invention for achieving the above object with reference to the accompanying drawings in detail.

3 is a conceptual diagram illustrating a method of dividing light of a light source into four parts, FIG. 4 is a conceptual diagram of a light split lens unit shown in FIG. 3, and FIG. 5 is a light split lens shown in FIGS. 3 and 4. 6 is a conceptual diagram illustrating a method of correcting a position of a unit, and FIG. 6 is a conceptual diagram illustrating an alignment method of an optical fiber for transmitting divided light, and FIG. 7 is a conceptual diagram illustrating an example of applying the present invention disclosed in FIGS. 3 to 6 to an LDI. .

FIG. 3 is a conceptual diagram showing a method according to the present invention for dividing light of a light source into four parts, a single UV light obtained from a UV light source having a wavelength of 405 nm or 365 nm or LD or mercury lamp, that is, one laser light. Is divided into space by a rectangular dividing lens unit 30 received through an optical fiber 10 and a collimator lens 20 and then a plurality of optical fibers 40 It is a structure that delivers to a plurality of exposure engine (focuso engine) by focusing.

A beam splitter 32 is installed between the optical split lens unit 30 and the optical fiber 40 to split a part of the light split by the optical split lens unit 30, that is, about 1% of the light. The optical splitting lens unit detects the intensity of light of about 1% by a power probe 33 or a photo detector and receives the feedback from a control means including a power meter. The X-axis and Y-axis positions of the light split lens unit 30 are finely adjusted so that the intensity of each light divided by 30 is the same.

A light splitter 51 is provided between the collimator lens 50 and the exposure engine to split a portion of the light incident on the exposure engine, that is, about 1% of the light, and the intensity of the light of about 1% is measured by the power probe 52. After detecting by the feedback from the control means including the power meter and the X-axis and Y-axis position of the optical fiber 40 so that the intensity of each light transmitted to the exposure engine through the optical fiber 40 has a maximum value Fine tune.

This means that a plurality of lights divided by the light split lens unit 30 are transmitted to the exposure engine without loss.

Therefore, the light output from one light source is divided into a plurality of lights and transmitted to the exposure engine as light with the same intensity without loss.

That is, light emitted from a UV light source such as a laser diode (LD) or a mercury lamp is transmitted by a predetermined distance through the optical fiber 10, and then the collimator lens 20 is converted into parallel light. That is, the parallel light converted by the collimator lens 20 is incident on the light split lens unit 30 having four rectangular shapes.

The light incident on the light split lens unit 30 is condensed into light at four different positions. In this case, since the input light is spatially divided, the positional accuracy of the light split lens unit 30 with respect to the input light becomes an important factor.

Accordingly, in order to adjust the exact position of the input light, it is preferable to install the light split lens unit 30 on the stage 31 movable in the X-axis and Y-axis directions, as shown in FIG. .

At this time, the moving distance of the stage 31, that is, the light split lens unit 30, divides the light split by the light split unit lens 30 by about 1% using the light splitter 32, and the intensity of the split light is adjusted. The light splitting lens unit 30, i.e., is measured so that the intensity of each light split by the light splitting unit lens 30 has the same value under the control of a control means including a power meter measured in real time by the power probe 33 The position of the stage 31 is finely adjusted in the X-axis and Y-axis directions.

In addition, in order to transfer the light split by the light split lens unit 30 to the exposure engine, an optical fiber 40 is provided at each focus position of the light split lens unit 30.

In order to align the optical fiber 40, an optical splitter 51 is provided between the optical fiber 40 and the exposure engine, divides about 1% of the output light of the optical fiber 40, and uses the intensity of the divided light as the power. The stage in which the optical fiber 40 is mounted in the X-axis and Y-axis directions so that the control means including a power meter measured in real time by the probe 52 has a maximum value by controlling the intensity of the output light of the optical fiber 40. Position will be adjusted.

The light transmitted through the optical fiber 40 whose position is finely adjusted is incident on the exposure engine, respectively.

FIG. 4 is a conceptual view of the light split lens unit, and an input beam having a circular vertical cross section is incident on the light split lens unit 30 having four quadrangular shapes. The intensity of the four lights divided by the light split lens unit 30 is determined according to the area where the input light passes through the light split lens unit 30.

Here, the light splitting lens unit 30 dividing one light into four lights is a stage movable in the X-axis direction and the Y-axis direction to finely adjust the light intensity so that the divided light intensity has the same value. (X, Y moving micro stage) 31 has a structure mounted on.

FIG. 5 is a conceptual view illustrating a process of correcting the position of the light split lens unit 30 mentioned above in three dimensions, wherein light split from one input beam by the light split unit lens 30 A part of the light, that is, about 1% of the light is divided by the four light splitters, and the intensity of the divided light is measured by the power probe 33 in real time, so that the control means including the power meter 34 receiving the input The position of the light split lens unit 30, that is, the stage is finely adjusted in the X-axis and Y-axis directions so that the intensity of each of the light split by the light split unit lens 30 has the same value.

FIG. 6 is a conceptual diagram illustrating in three dimensions a process of aligning four optical fibers 40 to deliver the light divided into four lights by the optical split lens unit 30 to each exposure engine. Light splitters are provided at the rear ends of the parts 40 to split a part of the light incident on the respective exposure engines, that is, about 1% of the light.

The control means comprising a power meter 53 in which the intensity of light of about 1% divided by the four light splitters is detected and transmitted by each of the power probes 52 is controlled by the X axis direction and the Y axis. Fine adjustment in the axial direction is to correct the light intensity so that the intensity of each light transmitted to the exposure engine through the four optical fibers 40 has a maximum value.

7 is a conceptual diagram illustrating an example in which the present invention disclosed in FIGS. 3 to 6 is applied to the LDI optical system, but is similar to FIG. 3, but the light splitting amount adjustment and the light split lens unit 30 are performed by the light split lens unit 30. There is a difference in that the alignment with the optical fiber 40 for optical transmission is measured in one real time light quantity.

That is, since the light split lens unit 30 and the optical fiber 40 are fixed in one set by the fixing unit 80, the light split lens is moved by moving the fixing unit 80 in the X-axis and Y-axis directions. The position of the unit 30 and the optical fiber 40 are adjusted at the same time to adjust the amount of light at a time.

First, in the LDI optical system as shown in FIG. 7, light having a wavelength of 405 nm or 365 nm from the UV light source 1 such as LD or mercury lamp is transmitted through the optical fiber 10 for light transmission, and then the collimator lens ( 20) is converted into parallel light of the desired size.

At this time, since the optical fiber 40 is positioned at the focal position of the optical split lens unit 30 by the fixing unit 80, parallel light converted by the collimator lens 20 is converted into the optical split lens unit 30 and the optical fiber ( 40 is divided into a plurality of lights and output.

Here, the fixing unit 80, that is, the optical split lens unit 30 and the optical fiber 40 are installed on the stage that is finely movable in the X-axis and Y-axis directions with respect to the traveling direction of the light, so that they are different from each other in conjunction with the movement of the stage. The amount of light of the light divided into positions can be constantly adjusted.

A collimator lens 50 capable of transmitting light to a desired distance through an optical fiber extending to the optical fiber 40 fixed by the fixing unit 80 and obtaining parallel light of a required size at an output position of the optical fiber. Is provided, the light converted into parallel light is incident on the exposure engine 60 provided with the DMD 61.

Here, the light splitters 51 are respectively provided at the output positions of the collimator lenses 50 to split a part of the light incident on the exposure engine 60, that is, about 1% of the light.

When the intensity of light of about 1% divided by the four light splitters 51 is detected and transmitted by each of the power probes 52, the control means including the power meter moves the stage not shown in the X-axis direction and Y. It is used as a reference for fine tuning in real time in the axial direction.

1 is a conceptual diagram illustrating a conventional method of sequentially dividing light into four parts.

2 is a diagram illustrating an example of application to an LDI system using the method disclosed in FIG. 1.

3 is a conceptual diagram showing the method according to the present invention for dividing the light of the light source into four.

4 is a conceptual diagram of the light split lens unit shown in FIG. 3.

5 is a conceptual view illustrating a position correction method of the light split lens unit illustrated in FIGS. 3 and 4.

6 is a conceptual diagram illustrating an alignment method of an optical fiber for transmitting divided light.

7 is a conceptual diagram illustrating an example in which the present invention disclosed in FIGS. 3 to 6 is applied to an LDI optical system.

DESCRIPTION OF REFERENCE NUMERALS

10, 40: optical fiber 20, 50: collimator lens

30: optical split lens unit 31: stage

32, 51: optical splitter 33, 52: power probe

34, 53: power meter 60: exposure engine

61: DMD 80: fixed unit

Claims

A first collimator lens 20 for converting light output from a single UV light source and transmitted through the first optical fiber 10 into parallel light having a desired size;

A light split lens unit 30 for dividing the light converted into parallel light by the first collimator lens 20 into a plurality of lights to focus the light at different positions; And

A plurality of second collimator lenses 50 which receive a plurality of lights divided by the light split lens unit 30 through the second optical fiber 40 and convert them into parallel lights and transmit them to the exposure engine 60;

Multiple optical splitting device for LDI comprising a.

The method of claim 1,

The light splitting lens unit 30 is a split lens having four rectangular shapes, and is installed on the stage 31 movable in the X-axis and Y-axis directions.

The method of claim 1,

A plurality of first light splitters 32 installed at a rear end of the light split lens unit 30 to split a part of the light;

A plurality of first power probes (33) for detecting the intensity of the light split by the plurality of light splitters (32); And

The intensity of each of the light split by the light split lens unit 30 is the same by receiving the feedback of the light split by the light split lens unit 30 detected by the plurality of first power probes 33. A first power meter 34 driving the stage 31 to finely adjust the light split lens unit 30 in the X-axis and Y-axis directions;

Multiple optical splitting device for LDI, characterized in that it further comprises.

The method of claim 1,

A plurality of second light splitters 51 installed at a rear end of the plurality of second collimator lenses 50 to divide a part of the light;

A plurality of second power probes 52 for detecting the intensity of light divided by the plurality of light splitters 51; And

The intensity of light transmitted to the exposure engine 60 is fed back by receiving the intensity of the light transmitted from the second collimator lens 50 detected by the plurality of second power probes 52 to the exposure engine 60. A second power meter 53 for fine-adjusting the second optical fiber 40 in the X-axis and Y-axis directions such that;

The method of claim 4, wherein

And the second optical fiber (40) is installed on a stage movable in the X-axis and Y-axis directions.

The method of claim 1,

The light splitting lens unit (30) and the second optical fiber (40) is composed of one set by the fixing unit (80).

The method of claim 1,

The UV light source is a UV light source having a wavelength of 405nm or 365nm, LD or a mercury lamp, multiple light splitting apparatus for LDI.

A first step of converting light output from a single UV light source and transmitted through the first optical fiber 10 into parallel light having a desired size by the first collimator lens 20;

A second step of dividing the light converted into parallel light by the first collimator lens 20 into a plurality of light by the light split lens unit 30 to focus the light at different positions; And

The plurality of light divided by the light split lens unit 30 is focused through the second optical fiber 40 and converted into parallel light by the second collimator lens 50 to the exposure engine 60. A third step of doing;

Multiple optical splitting method for LDI, comprising a.

The method of claim 8,

The light splitting lens unit 30 is a split lens having four quadrangular shapes and is installed on the stage 31 to move in the X-axis and Y-axis directions.

The method of claim 8,

Dividing a portion of the light split by the light split lens unit (30) by a plurality of first light splitters (32);

Detecting, by the plurality of first power probes, the intensity of the light split by the plurality of light splitters (32); And

By the light split lens unit 30 by a first power meter 34 which is fed back the intensity of the light split by the light split lens unit 30 detected by the plurality of first power probes 33. Finely adjusting the light split lens unit 30 in the X-axis and Y-axis directions by driving the stage 31 so that the intensity of each divided light is the same;

Multiple light splitting method for LDI, characterized in that it further comprises.

The method of claim 8,

Dividing a portion of the light converted into parallel light by the plurality of second collimator lenses (50) by the plurality of second light splitters (51);

Detecting, by the plurality of second power probes, the intensity of the light split by the plurality of light splitters; And

The exposure engine 60 by the second power meter 53 fed back the intensity of light transmitted from the second collimator lens 50 detected by the plurality of second power probes 52 to the exposure engine 60. Finely adjusting the second optical fiber 40 in the X-axis and Y-axis directions such that the intensity of light transmitted to the maximum value is maximum;

The method of claim 11,

The second optical fiber (40) is provided on the stage to move in the X-axis and Y-axis direction multiple light splitting method for LDI, characterized in that.

The method of claim 8,

The UV light source is a UV light source having a wavelength of 405nm or 365nm, LD or mercury lamp, characterized in that the multiple light splitting method for LDI.