KR20100105096A - In-situ laser scribing apparatus - Google Patents

In-situ laser scribing apparatus Download PDF

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Publication number
KR20100105096A
KR20100105096A KR1020090023940A KR20090023940A KR20100105096A KR 20100105096 A KR20100105096 A KR 20100105096A KR 1020090023940 A KR1020090023940 A KR 1020090023940A KR 20090023940 A KR20090023940 A KR 20090023940A KR 20100105096 A KR20100105096 A KR 20100105096A
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South Korea
Prior art keywords
laser
vacuum chamber
substrate
unit
scribing
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KR1020090023940A
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Korean (ko)
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KR101029095B1 (en
Inventor
백우성
장창영
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주식회사 셀코스
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Publication of KR20100105096A publication Critical patent/KR20100105096A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L31/00Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
    • Y02P70/52Manufacturing of products or systems for producing renewable energy
    • Y02P70/521Photovoltaic generators

Abstract

PURPOSE: An in-sit laser scribing apparatus is the back contact electrode among the cell manufacturing process, and the vacuum condition the process of the light absorption layer and transparent oxide conductive, it like that advances. The thin film solar cell manufacturing process is simplified and the cost down is realized. CONSTITUTION: A substrate for manufacturing the thin film solar cell is settled in the vacuum chamber(130). The laser scriber device locates outside the vacuum chamber. By using laser, the laser scriber device makes the substrate settled within the vacuum chamber the scribing. The laser scriber device comprises the vision part(110) outputting the vision signal, and the laser driver(120) and sorter(140).

Description

IN-situ laser scribing apparatus

The present invention relates to an in-suit laser scribing apparatus.

More specifically, when manufacturing a copper-indium-gallium-selenium (Cu-In-Ga-Se) solar cell, P1 (rear electrode: Mo), P2 (light absorption layer: CIGS), P3 ( The transparent conductive film: ZnO) relates to an in-suit laser scribing apparatus that allows the process of the ZnO) to proceed from the conventional vacuum chamber to the atmospheric state as it is.

CIGS thin film solar cell is a compound thin film composed of four elements of copper, indium, gallium, and selenium, and has a pn mixed junction structure that converts solar heat into a current and an integrated structure characteristic of thin film solar cells. CIGS solar cell is composed of a glass substrate / MO layer / CIGS layer / CdS / TCO transparent electrode layer (ZnO, ITO) layer as shown in FIG.

CIGS thin film solar cell is a monolithic structure in which several unit solar cells are formed on one large substrate at a time as shown in FIG. 2, unlike a solar cell manufactured using a conventional silicon wafer. Simplification can drastically reduce production costs. The monolithic structure is composed of MO / CIGS / CdS / ZnO layers formed on a glass substrate by connecting unit cells in series through a patterning process using a laser and a needle.

CIGS thin film solar cell is produced through the process shown in FIG. First, the glass substrate is wet-washed, and then Mo layer is formed by sputter deposition. After that, a pattern is formed through a laser patterning process, and a CIGS layer is deposited thereon by thermal deposition. After the CdS layer is grown and deposited using CSD (Chemical Surface Deposition) technology, mechanical patterning process is performed again. Subsequently, the transparent electrode layer is deposited using sputtering deposition technology and the panel of the CIGS solar cell is completed through the mechanical patterning process. The manufacturing process of high purity CIGS solar cell is mainly carried out in a clean room of class 10,000.

Diode pumped solid state lasers (DPSS) are often used for micromachining because of their high quality. The general structure of the high power DPSS laser, which is a solid state laser, has an active laser medium, Nd: YAG (neodymium-doped yttrium aluminum garnet: Nd: Y3AL5012) bar, surrounded by diode arrays and pumped energy. have. Photons travel between the optical resonators and are amplified so that energy comes out through the OC (Output Coupler), a partial reflection mirror. In particular, Nd: YAG laser is widely used for P1 (back electrode: Mo) scribing of thin film solar cells. The photomask is modified with Nd: YAG laser, Nd: YLF laser, and Nd: YVO4 laser. Green laser is currently applied to thin film solar cell P2, P3 scribing.

In the conventional laser scribing technology, in the manufacturing process of CIGS thin film solar cell, Mo (back electrode) is deposited in a vacuum chamber, and then comes back to the standby state to perform laser scribing. As the time (manufacture time per cell) becomes longer, problems such as a decrease in production yield and generation of particles occur.

In the present invention, when manufacturing a copper-indium-gallium-selenium (Cu-In-Ga-Se) solar cell, P1 (rear electrode: Mo), P2 (light absorption layer: CIGS), P3 (transparent) Conductive film: The purpose of the present invention is to provide an in-suit laser scribing apparatus that allows the process of ZnO) to proceed from the conventional vacuum chamber to the atmospheric state as it is.

Embodiments of the present invention for achieving the above object, the in-suit laser scribing apparatus, a vacuum chamber on which a substrate is mounted to manufacture a thin film solar cell; And a laser scriber device provided outside the vacuum chamber and configured to scribe the substrate mounted in the vacuum chamber using a laser.

The laser scriber device is located above the vacuum chamber, the laser driver for emitting a laser beam to the upper portion of the substrate for scribing the substrate processed in the vacuum chamber, and on the laser driver A vision unit which is positioned and outputs a vision signal for aligning the position of the laser emitted from the laser driver to have a straightness, and is positioned below the vacuum chamber and receives the vision signal output from the vision unit to receive the laser beam. Characterized in that the alignment portion for aligning the position of the drive unit.

The laser scriber device may further include a transfer unit to move the laser driver according to a predetermined pattern.

The substrate may include a back electrode layer, a light absorbing layer, and a transparent conductive film layer, and the laser scriber apparatus may further include a controller configured to control the laser driver to selectively scribe each layer of the substrate. It features.

In the present invention, when manufacturing a copper-indium-gallium-selenium (Cu-In-Ga-Se) solar cell, P1 (rear electrode: Mo), P2 (light absorption layer: CIGS), P3 (transparent) Conductive film: ZnO) has the effect of being able to proceed from the existing vacuum chamber to the atmospheric state as it proceeds.

The present invention can be expected to simplify the thin film solar cell manufacturing process, reduce the cost, improve the production yield.

Hereinafter, the configuration of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 4, the in-suit laser scribing apparatus according to the present invention includes a vacuum chamber 130 on which a substrate is seated to manufacture a thin film solar cell, and an outside of the vacuum chamber 130. It consists of a laser scriber device for scribing the substrate seated in the vacuum chamber 130 using a laser.

The laser scriber device is positioned above the vacuum chamber 130, and a laser beam is disposed on the substrate 160 to scribe a substrate (160 in FIG. 6) processed in the vacuum chamber 130. A laser drive unit 120 to be emitted to the upper portion, and a vision unit which is located above the laser driver 120 to output a vision signal for aligning the position so that the laser emitted from the laser driver 120 has a straightness 110 and an alignment unit 140 positioned below the vacuum chamber 130 to receive the vision signal output from the vision unit 110 to align the position of the laser driver 120. Consists of a transfer unit that allows the laser driver 120 to move according to a predetermined pattern, and a control unit that controls the laser driver 120 to selectively scribe each layer of the substrate 160. The.

The alignment unit 140 is positioned above the reinforcing bar 150.

In this case, the substrate 160 may be formed of a back electrode layer, a light absorbing layer, and a transparent conductive film layer, and the controller of the laser scriber device may be implemented to be scribed to a desired layer for each layer constituting the substrate. Of course, the information on the floor to be scribed is implemented so that the operator can enter and set.

The operation of the in-suit laser scribing apparatus configured as described above is as follows.

First, when the substrate 160 for manufacturing the thin film solar cell is seated on the substrate seating portion in the vacuum chamber 120 as shown in FIG. 6, the vacuum chamber 130 may uniformly planarize the substrate 160. After converting the interior to a vacuum state, the processing is performed. That is, Mo (back electrode) is deposited on the substrate 160 by DC sputtering in the vacuum chamber 130. Is there any process other than Mo (back electrode) deposition process in the vacuum chamber? Yeah

After the Mo (back electrode) of the substrate 160 is deposited in the vacuum chamber 130 as described above, the controller controls the vision unit 110 so that the laser emitted from the laser driver 120 has a straightness. The vision signal for aligning the position is output to the alignment unit 140, and the alignment unit 140 aligns the laser driver 120 in response to the vision signal so that the laser emitted through the laser driver 120 is the substrate 160. To be straight.

At this time, the laser drive unit 120 is moved according to a predetermined pattern by the transfer unit, the transfer pattern of the transfer unit is stored in the internal memory of the control unit, or an external memory connected to the control unit, the transfer unit reads the transfer pattern It is controlled in response to the transfer control signal of the control part to output.

The vision unit 110 recognizes the alignment marks displayed on the substrate 160 and transfers them to the controller (not shown) as an image. The vision unit 110 analyzes the image as an image, and then positions the position of the laser driver 120. Alignment between the alignment markers of the substrate 160 and the role of the alignment unit 140. This is to align the position of the substrate 160 provided by the vision unit 110 and the laser driver 120 that is initially set in the alignment unit 140 and the role of interlocking the role of the controller (not shown) )

On the other hand, the vision unit 110 is fixed to the upper portion of the vacuum chamber 130, the alignment unit 140 is located at the inner lower end of the vacuum chamber 130, the substrate 160 is placed, X-axis, Move the Y-axis, θ-axis, and Up / Down in micrometers.

In addition, the laser driver 120 is mounted on a linea motion motor (linear motion motor, not shown), and the linea motion motor (linear motion motor) part has an error within 5 micrometers of the laser driver 120. It moves to the X and Y axes.

This aligns the position of the substrate 160 provided by the vision unit 110 and the position of the laser driver 120 within 3 micrometers in the alignment unit 140 as described above, and based on this, Linea motion The laser driver 120 mounted on the motor (linear motion motor) unit performs a scribing operation according to a predetermined pattern.

The laser driver 120 determines the intensity of the laser beam emitted under the control of a controller (not shown), so that the laser driver 120 can be scribed to an arbitrary layer on a substrate composed of a plurality of layers. The laser driver 120 performs scribing in a predetermined pattern shape under the control of a controller (not shown), and the type and intensity of the laser beam are determined according to the scribing material.

After depositing Mo (back electrode) on the substrate 160, the laser penetrates the substrate 160, and when the laser touches the Mo (back electrode) layer, Mo (back electrode) is the width of the laser beam. As it deteriorates gradually, scribing is performed according to a predetermined pattern.

When the substrate 160 is positioned in the alignment unit 140 of the vacuum chamber 130, and the alignment mark information of the substrate 160 is transferred from the vision unit 110 to the controller (not shown), the alignment marker information and After the initial position alignment of the laser driver 120 is performed by the alignment unit 140 and the user-created pattern is input to the controller (not shown), the controller is mounted on the linear motion motor (linear motion motor). The scribing operation is performed while transferring the laser driver 120 to the X and Y axes.

The present invention is applicable to crystallization facilities such as thin film solar cell manufacturing equipment (a-si, CdTe, CIGS), large-area organic EL manufacturing equipment, LTPS (low temperature polysilicon).

As described above, the preferred embodiment according to the present invention has been described, but the present invention is not limited to the above-described embodiment, and the present invention is not limited to the scope of the present invention as claimed in the following claims. Anyone with knowledge of the present invention will have the technical spirit of the present invention to the extent that various modifications can be made.

1 is a view showing the structure of a CIGS thin film solar cell.

2 shows a monolithic structure of a CIGS thin film.

3 is a view for explaining a CIGS solar cell production process.

4 is a view showing an in-suit laser scribing apparatus according to the present invention.

5 is a cross-sectional view of FIG. 4.

6 is a view for explaining the interior of the vacuum chamber applied to FIG.

DESCRIPTION OF REFERENCE NUMERALS

110: Vision Division

120: laser drive unit

130: vacuum chamber

140: alignment unit

150: reinforcement

Claims (4)

  1. In-suit laser scribing device,
    A vacuum chamber on which a substrate is mounted to manufacture a thin film solar cell; And
    A laser scriber device provided outside the vacuum chamber and configured to scribe the substrate mounted in the vacuum chamber using a laser;
    In-suit laser scribing apparatus comprising a.
  2. The method of claim 1,
    The laser scriber device,
    A laser driver positioned above the vacuum chamber and configured to emit a laser beam above the substrate to scribe a substrate processed in the vacuum chamber;
    A vision unit which is located above the laser driver and outputs a vision signal for aligning the position of the laser emitted from the laser driver to have a straightness;
    An alignment unit positioned below the vacuum chamber and configured to receive a vision signal output from the vision unit to align the position of the laser driver;
    In-suit laser scribing device, characterized in that consisting of.
  3. The method of claim 2,
    The laser scriber device,
    In-suit laser scribing device, characterized in that the laser drive unit further comprises a transfer unit to move according to a predetermined pattern.
  4. The method of claim 2,
    The substrate is composed of a back electrode layer, a light absorption layer and a transparent conductive film layer,
    The laser scriber device,
    In-suit laser scribing apparatus comprising a control unit for controlling the laser drive unit to selectively scribing each layer of the substrate.
KR1020090023940A 2009-03-20 2009-03-20 In-situ laser scribing apparatus KR101029095B1 (en)

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Application Number Priority Date Filing Date Title
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101035186B1 (en) * 2009-08-31 2011-05-17 미리넷솔라 주식회사 Texturing apparatus of solar cell
CN102457011A (en) * 2010-10-29 2012-05-16 北京中视中科光电技术有限公司 Adjusting device and manufacturing method of surface mount device (SMD) solid laser
KR101656341B1 (en) * 2016-03-16 2016-09-12 제너셈(주) Laser scriber
KR102102311B1 (en) * 2018-12-18 2020-04-21 주식회사 와이컴 Method for manufacturing space transformer of probe card and machining apparatus of ceramic plate for space transformer of probe card

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101348118B1 (en) * 2012-08-10 2014-01-08 (주)솔라세라믹 Metal patterning method for transparent film coating substrate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6444506B1 (en) 1995-10-25 2002-09-03 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing silicon thin film devices using laser annealing in a hydrogen mixture gas followed by nitride formation
KR100616656B1 (en) * 2005-01-03 2006-08-28 삼성전기주식회사 Method and apparatus of producing a gallium nitride based singlecrystal substrate
GB2439962B (en) 2006-06-14 2008-09-24 Exitech Ltd Process and apparatus for laser scribing

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101035186B1 (en) * 2009-08-31 2011-05-17 미리넷솔라 주식회사 Texturing apparatus of solar cell
CN102457011A (en) * 2010-10-29 2012-05-16 北京中视中科光电技术有限公司 Adjusting device and manufacturing method of surface mount device (SMD) solid laser
KR101656341B1 (en) * 2016-03-16 2016-09-12 제너셈(주) Laser scriber
KR102102311B1 (en) * 2018-12-18 2020-04-21 주식회사 와이컴 Method for manufacturing space transformer of probe card and machining apparatus of ceramic plate for space transformer of probe card

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