KR20100072274A - Apparatus and methods for ambient air abatement of electronic device manufacturing effluent - Google Patents

Abstract

An abatement system is provided which includes an abatement unit adapted to abate effluent; and an ambient air supply system comprising an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.

Description

TECHNICAL APPARATUS AND APPARATUS FOR AIR AIR CLEANING OF ELECTRONIC DEVICES WASTE {APPARATUS AND METHODS FOR AMBIENT

The present invention is filed on September 20, 2007, entitled "METHODS AND APPARATUS FOR USING AMBIENT AIR DURING ABATEMENT OF SEMICONDUCTOR DEVICE MANUFACTURING EFFLUENTS." `` APPARATUS AND METHODS FOR AMBIENT AIR ABATEMENT OF ELECTRONIC DEVICE MANUFACTURING EFFLUENT, which claims priority to Patent Provisional Application No. US Patent Application No. 12 / 053,480 (Representative Document No. 12779) filed March 21, 2008, entitled "

The present invention relates to the manufacture of electronic devices, and more particularly to hazardous and / or undesirable compound purification systems using atmospheric air as an oxidant.

Conventional electronics manufacturing waste purification systems typically use clean dry air (“CDA”) as the oxidant. CDA, as its name implies, is dry, highly filtered air and costs money associated with the preparation of the CDA. In electronic device manufacturing facilities, CDA is typically supplied through a facility at relatively high pressures, which may be on the order of about 90 psi. As with an abatement system, for use in a particular electronic device manufacturing facility system, the pressure in the installation CDA is reduced to the pressure required by the particular system. Pressurization of the CDA requires equipment and energy. Reduction of CDA pressure requires at least equipment.

Thus, a method and apparatus for reducing the costs associated with the use of CDA in a purification unit is desirable.

In one aspect there is provided a purification system comprising: 1) a purification unit configured to purify waste; And 2) an atmospheric air supply system including an air moving device, wherein the atmospheric air supply system is configured to supply atmospheric air to the purification unit for use as an oxidant.

In another aspect, an atmospheric air supply system for supplying atmospheric air for use as an oxidant to a purification unit, comprising: 1) an air moving device; And 2) a manifold coupled to the air mover and configured to supply air to the purifying unit, wherein the air mover and manifold are configured to receive air from a source of atmospheric air; Is provided.

In another aspect, a method for purifying waste using atmospheric air as an oxidant, the method comprising: 1) providing a purge unit configured to purify waste from an electronic device manufacturing process tool; 2) providing an atmospheric air supply system comprising an air moving device, wherein the atmospheric air supply system is configured to provide atmospheric air to the purifying unit; And 3) purifying the waste in the purifying unit with the atmospheric air supplied by the atmospheric air supply system. Various other aspects are provided in accordance with these and other aspects of the invention. Other features and aspects of the invention will be more fully understood from the following detailed description, the appended claims, and the accompanying drawings.

1 is a schematic diagram of a purification system of the present invention.
FIG. 2 is a schematic diagram of a second embodiment of the purification system of FIG. 1.
3 is a schematic diagram of an atmospheric air supply system of the present invention.
4 is a schematic diagram of an alternative embodiment of the atmospheric air supply system of the present invention.
5A and 5B show side cross-sectional views of air amplifiers useful in the present invention.
6 is a flow chart depicting a method of operating a purge unit according to the invention.

The electrical device manufacturing process uses various reactants, some of which may pass through process tools unused. Reactants that are not used as such may be harmful to the environment if they simply pass through the factory discharge system or may be at risk of fire or explosion. In addition, the electrical device manufacturing process may produce byproducts with similar hazards or hazards. For ease of reference, herein, hazardous, toxic, flammable and / or explosive unused reactants and by-products may be referred to as 'undesirable effluent' or simply 'effluent'.

In order to avoid environmental hazards and risks to employees and the public, the electronics manufacturing industry has decided to clean up hazardous wastes. The purification of hazardous waste can take many forms, but ultimately, the purification converts the hazardous waste into no or less harmful or dangerous substances. One method of purifying hazardous waste is to oxidize the waste in a purification reactor or unit using an oxidant such as oxygen. An easy source of oxidant used in the purification unit is CDA, which can usually be obtained from a facility CDS source.

However, due to the cost, many facilities budget or restrict the use of the CDA. For example, some installations only budget or permit conventional purification systems to use about 360 standard liters / minute of CDA. However, some conventional purification systems may require 1000 slm or more CDA to purify the waste. For example, processes for manufacturing solar panels can release large amounts of unused hydrogen and silane reactants. These large amounts of flammable and / or explosive gases require large amounts of oxidant for purification. Thus, conventional purification systems may not meet the CDA budget requirements of some installations and may therefore not be selected by the consumer.

As described above, the plant CDA is passed through the plant under pressure, typically at a pressure high enough to meet the needs of the plant system having the highest pressure condition of all plant systems. This pressure is about 90 psi. For use in all other plant systems, including purification systems (which may consume up to about 45% to 80% of all CDAs produced in the plant), the pressure of the CDA need not be so high. Since the purifying unit does not require such high pressure air, pressurizing the CDA for transportation unnecessarily increases the cost of operating the purifying unit. Likewise, drying the CDA for use in a purification unit in which the oxidant does not need to be dried also unnecessarily increases operating costs. It is therefore desirable to operate the purification unit while avoiding the costs associated with drying, high filtering and air compression.

In some embodiments, the present invention can reduce or avoid the use of CDA by providing atmospheric air to the purification unit through an atmospheric air supply system. Atmospheric air can be obtained inside a room containing a purification unit, or from another space in the installation. Other sources of suitable atmospheric air may be used, such as, for example, air from outside the plant or recycled facility air.

In some embodiments of the invention, air may be supplied to the purifying unit by a naturally aspirated air system (NAAS) or the like. NAAS is a system that allows the purge unit to draw air into the purge unit but does not actively move the air. The NAAS may have an inlet that is open to atmospheric air at approximately atmospheric pressure and an outlet that can be coupled to a purification system (and / or subsystem of the purification system). In such an embodiment, the purge system may be operated at a pressure below atmospheric pressure. For example, the pressure inside the reactor may be about -1.2 "to -5" water (or other suitable pressure) relative to atmospheric pressure. In this case, air can be drawn into the purification system and / or subsystem naturally by the pressure difference between the gas inside the purification system and the atmospheric air. In this way, oxygen can be supplied to the reactor from the outside air. Atmospheric air may be at different pressures, including above or below atmospheric pressure. In order for the NAAS to work, the pressure differential must be large enough to draw air into the purge unit at a rate that provides sufficient oxygen to purge the waste flowing through the purge unit to the desired purge level.

In other embodiments, NAAS may not provide all the air required to purify the waste to the desired extent. One way of purifying waste to the desired level of purge is to flow the least amount of air into the purge unit. This minimum amount of air can be readily determined by evaluating the nature of the waste to be cleaned and the mass flow rate of the waste to be cleaned. If the difference between the pressure of the atmospheric air and the pressure of the purifying unit is too small, enough air will not be sucked into the purifying unit to effectively purify the waste. In this case, more air must be pushed in or drawn into the purification unit. In another such embodiment, an air moving system, such as an air blower or an air amplifier, is used to allow the atmospheric air supply system to push / push or draw enough air into the purification system and / or its subsystems. device).

In yet another embodiment, although there may be a sufficient pressure differential between the atmospheric air and the purifying unit (i.e., sufficient to inhale sufficient air into the purifying unit to effectively purify the waste), the air is forced into the purifying system and It may still include an air moving device such as an air blower or an air amplifier to push / retract it. By including such an air moving device in the atmospheric air supply system, it is possible to somewhat resolve any temporary lack of atmospheric air which may be caused by a temporary change in the atmospheric air pressure or the operating pressure of the purification unit.

1 is a schematic diagram of an example of an atmospheric air purification system 100 of the present invention. Purification system 100 may have a purification unit 102 that may be configured to purify waste discharged from one or multiple process tools 104. Waste may flow from the process tool 104 through the conduit 106 to the purification unit 102. Purification unit 102 may be configured to purify the waste by reacting the waste with oxygen. Oxygen may be supplied to the purification unit 102 as a component of atmospheric air, which may be supplied to the purification unit 102 through the conduit 107 by the atmospheric air supply system 108. The atmospheric air supply system 108 may be connected to the atmospheric air source 112 through the atmospheric air inlet 110, from which the atmospheric air supply system 108 may draw atmospheric air. Although only one atmospheric air supply system 108 is shown, more than one, for example 2, 3, 4 or more atmospheric air supply systems may be used. In some embodiments, purifying unit 102 may burn fuel to generate a temperature at which waste will react with oxygen. Thus, the purifying unit 102 may couple to the fuel supply 114 through the conduit 116. The purified waste may be discharged from the purification unit 102 through the outlet 118, from which it may be transferred to the use site or to further purification devices such as house scrubbers or the atmosphere.

Purification unit 102 may be a reactor configured to process waste. Such a reactor may be, for example, a fuel combustion heat purification unit such as Marathon Abatement System manufactured by Applied Materials, Inc., Santa Clara, California. Alternatively the purifying unit may be heated electrically or by other suitable methods. In some cases, the purification unit may not need to be heated to purify the waste, such as when the waste itself is flammable.

Process tool 104 may be a system that includes a process chamber (not shown) that produces waste that is purged by purge unit 102. For example, the process tool 104 may be a deposition chamber or other processing chamber that discharges waste that the purifying unit 102 can purify. In solar panel manufacturing facilities, the process chamber may release large amounts of hydrogen and / or silane.

As described above, the atmospheric air supply system 108 may supply atmospheric air from the atmospheric supply source 112 to the purification unit 102. The structure and operation of the atmospheric air supply system 108 is described in more detail with reference to FIGS. 3 and 4 below.

The atmospheric air source 112 may be atmospheric air surrounding the purification system 100, although other suitable air sources may be used. For example, the air can be atmospheric air filtered by a HEPA filter commonly used in manufacturing facilities. Such air may or may not need to be filtered again prior to delivering air to the purification unit 102. In such embodiments, the atmospheric air supply system 108 may be coupled to the structure of the atmospheric air purification system 100 such that the inlet of the atmospheric air supply system 108 opens to the atmospheric air surrounding the purification system 100. have. Alternatively, the atmospheric air source 112 may be air supplied from outside of the installation. In such embodiments, the atmospheric air supply system 108 may include piping or other conduit systems configured to deliver air from the outside of the installation to the purification unit 102 in an amount sufficient to effectively purify the waste. As used herein, the term 'air' is to be understood not to limit the temperature, pressure, composition, etc., of the gaseous compounds supplied by the atmospheric air source 112. For example, it is to be understood that the term 'air' may include any composition normally found in the atmosphere, such as oxygen, nitrogen, although any suitable source of gaseous compound may be used.

The fuel supply 114 may supply only fuel or a mixture of fuel and air to the purifying unit 102. The fuel may be hydrogen, methane, natural gas, methane or LPG, but any suitable fuel may be used. The pressure of the fuel supplied to the purification unit 102 may be between about 0.2 psi and about 10 psi, but any suitable pressure may be used. The fuel supply 114 may be coupled to the purifying unit 102 by, for example, stainless steel tubing configured to transfer fluid, but any means suitable for transferring fuel may be used. It is to be understood that the embodiment provided in accordance with the present invention is not necessarily coupled to the fuel supply 114. For example, the purifying unit 102 may be a fuel-less reactor (if the waste is flammable and only requires an ignition source and an air source).

In some embodiments, the purifying unit 102 and / or any portion of the atmospheric air purification system 100 (except for the fuel supply 114) is operated at a pressure lower than the pressure of the atmospheric air source 112 to produce a pressure differential. Or a delta. Although the process tool 104 is shown in FIG. 1, it should be noted that this does not form part of the purification system 100. This pressure difference can cause atmospheric air to flow naturally through the atmospheric air supply system 108 to the purification unit 102. If the pressure difference is large enough, sufficient atmospheric air may be sucked through the atmospheric air supply system 108 and enter the purification unit 102. Operation of the atmospheric air supply system 108 will be described in more detail below.

In other embodiments, the purifying unit 102 and / or any portion of the purifying system 100 may be purged from the atmospheric air supply 112 via the atmospheric air supply system 108, as described above. It can operate at pressures that are too large to create a pressure differential that moves enough air. In such embodiments, the atmospheric air supply system 108 may include an air moving device, such as a blower or an air amplifier, as described in more detail below with reference to FIGS. 4 and 5.

In another embodiment, insufficient amount of air is operated from atmospheric air supply 112 to atmospheric purification system 102 via atmospheric air supply system 108 while operating at a pressure lower than atmospheric air pressure of atmospheric air source 112. I can move it. This may be due to the nature and volume of the waste flowing through the purifying unit 102. Even in this case, the atmospheric air supply system 108 may include an air moving device such as a blower or an air amplifier.

In another embodiment, the purifying unit 102, on average, is sufficiently lower than the pressure of the atmospheric air source 112 to move a sufficient amount of air through the atmospheric air supply system 108 to the purifying unit 102. Although actuated at pressure, there may be a fluctuation in the operating pressure of the purifying unit 102, which temporarily causes insufficient air to flow into the purifying unit 102. This may allow an unacceptable amount of unpurified waste to exit purge unit 102. Even in this embodiment, the atmospheric air supply system 108 may include an air moving device, such as a blower or an air amplifier, to even the air flow to the purification unit 102.

The purification system 200 shown in FIG. 2 is an alternative embodiment of the purification system 100 of FIG. 1. 1 and 2 correspond to each other for ease of reference. For example, the purifying unit of FIG. 1 is indicated at 102 and the purifying unit of FIG. 2 is denoted at 202.

The atmospheric air purification system 200 is similar to the purification system 100 but has the following differences. The atmospheric air supply system 108 of the purification system 100 is connected to the purification unit 102 through one conduit 107, while the atmospheric air supply system 208 of the purification system 200 is connected to five conduits ( It is connected to the purification unit 202 via 207. In addition, conduit 207 is subsequently connected to purifying unit 202 through five atmospheric air inlets 220. Although five conduits 207 and atmospheric air inlet 220 are shown, fewer or more than five conduits 207 and atmospheric air inlet 220 may be used. As shown in FIG. 2, a more uniform combustion region within the purifying unit 202 can be generated by placing the air inlet on or on the opposite side of the purifying unit symmetrically.

Further, in comparison with a single atmospheric air supply system 108 and a single atmospheric air source of the purification system 100, the purification system 200 includes three independent atmospheric air supply systems 208, and three independent atmospheric air sources ( 212). It should be noted that any number of atmospheric air supply systems 208 and atmospheric air sources 212 may be used in practicing the present invention. Thus, there may be n air inlets 220, through which atmospheric air may be supplied by n or less than n atmospheric air supply systems 208. Conversely, atmospheric air may be supplied to the n air inlets 220 by more than n atmospheric air supply systems 208. The air inlet 220 may be configured such that when atmospheric air is supplied at a pressure selected by the atmospheric air supply system 208, each has an internal orifice diameter selected to flow a desired air mass per unit time. Alternatively, each air inlet 220 may be the same size as the other air inlet 220.

In this case, in order to obtain the desired mass flow rate, the atmospheric air supply system 208 may provide air of individually selected mass flow rate to each air inlet 220, or as described in more detail below. May be configured to provide air at an individually selected pressure to the air inlet 220 of the.

In operation, the purification unit 202 may receive waste through the waste inlet 222 at the top of the purification unit 202. There may be multiple burner jets (not shown) inside the purification unit 202 surrounding each waste inlet 222. The burner jet may supply flame and heat directed downward in the purifying unit 202, and waste may be purged, for example oxidized, as it moves down through the purifying unit 202. In some embodiments, the purifying unit 202 may be configured such that it may be desirable to introduce air to the purifying unit 202 at multiple locations and at different pressures or mass flow rates selected at one or multiple of the locations. . For example, in some embodiments, an oxidation reaction is performed at the top of the purification unit 202 in a fuel rich (ie, oxygen lean) state and then remaining unpurified waste at the bottom of the purification unit 202. It may be desirable to carry out the oxidation reaction with sufficient air to create an oxygen rich environment that may be sufficient to effectively purify the membrane. This configuration can help to reduce the formation of nitrogen oxides and sulfur oxides. Providing different pressures or mass flow rates at each air inlet 220 may be done in any suitable manner as described below with reference to FIGS. 3 and 4.

The atmospheric air supply system 300 shown in FIG. 3 corresponds to the atmospheric air supply system 108 and the atmospheric air supply system 208 shown in FIGS. 1 and 2, respectively.

The atmospheric air supply system 300 may include an air inlet 302 that may draw atmospheric air from the atmospheric air source 304. Atmospheric air may pass through the air inlet 302 and enter the airbox 308 through the shutoff valve 306. Atmospheric air may then enter the manifold 314 from the air box 308 through the conduit 310 and the flow control valve 312. Manifold 314 may distribute atmospheric air through conduit (not shown) that may carry atmospheric air to a purification unit (not shown) through atmospheric air outlet 316. The controller 318 may be any microcomputer, microprocessor, logic circuit, combination of hardware and software, etc. suitable for controlling the opening and closing of the shutoff valve 306 flow control valve 312 via the communication links 320 and 322. Can be.

The atmospheric air source 304 may be any suitable source of atmospheric air as described above. The air inlet 302 may be three inch stainless steel or PVC vacuum tubing, but any suitable conduit of any suitable form may be used.

The shutoff valve 306 may be any valve suitable for opening and closing the atmospheric air path through the gate valve or the air inlet 302. As shown, the shutoff valve 306 may be a solenoid or pneumatically actuated gate valve that may be provided by HVH, LLC, although any suitable valve may be used. The shutoff valve 306 can be configured to open and close so that air from the atmospheric air source 304 can be regulated. For example, it may be desirable to completely close the air flow from the atmospheric air source 304 to the purification system. Thus, the shutoff valve 306 may be closed (eg, extending a flat disc to close the air path) to prevent air from being transported from the air inlet 302 to the air box 308. In this closed state, the air box 308 will not be able to carry any air from the atmospheric air source 304 to the purification system. The shutoff valve 306 may also be configured to prevent waste from flowing towards the atmospheric air source 304. For example, shutoff valve 306 may be configured to close when the pressure in the purifying unit increases to an undesirable pressure (eg, atmospheric pressure, pressure greater than atmospheric air pressure, etc.).

The air box 308 may be an air box, but any suitable containment vessel may be used. As shown, the air box 308 may provide an air reservoir that can be used to cushion the fluctuations in air pressure to enhance the ability of the atmospheric air supply system 300 to control the flow of atmospheric air. Although air box 308 is shown in FIG. 3, it is also possible in some embodiments not to use air box 308. Also, as shown, the air box 308 may be a rectangular box, or any suitable form (eg, cylindrical, hexagonal, etc.) may be used. The size of the air box 308 may be selected based on factors such as volume and speed of atmospheric air configured to flow through the atmospheric air supply system 300.

Flow control valve 12 may be a butterfly valve, but any suitable valve may be used. As shown, the flow control valve 312 can be a solenoid or pneumatically actuated valve that can be controlled by the controller 318. The flow control valve 312 has a flap in the body of the flow control valve 312 that rotates to increase or decrease the opening through which air delivered from the atmospheric air source 304 to the purification system flows. Can be. Thus, air can be controlled to flow at high or low speeds (eg, standard liters per minute) to regulate the flow from the atmospheric air source 304 to the purification system.

It should be noted that the function of the shutoff valve 306 and the flow control valve 312 may be performed by a single valve (not shown), such as a throttling gate valve or a metering shutoff valve. However, such multifunctional valves are expensive and using them may be a more expensive way to provide these functions.

Manifold 314 may be a box used to distribute air regulated by flow control valve 312. As shown, manifold 314 is a box with six atmospheric air outlets 316. Although six atmospheric air outlets 316 are shown in FIG. 3, more or fewer atmospheric air outlets may be used. In addition, each atmospheric air outlet 316 may be coupled to one or multiple inlets (not shown) on the purification system. Each atmospheric air outlet 316 can be sized independently of the different atmospheric air outlets 316 such that a selected amount of air can flow through the atmospheric air outlet 316 to a specific location within the purification unit. .

In operation, the atmospheric air supply system 300 embodiment, as described above, creates a sufficient pressure differential to move sufficient air through the atmospheric air supply system 300 into the purification unit, as described above. To a purge system that operates at a pressure sufficiently lower than the pressure of the atmospheric air source 304. In such a case, the pressure difference between the atmospheric air source 304 and the operating pressure of the purifying unit can cause sufficient air to flow through the atmospheric air supply system into the purifying unit. Flow control valve 312 can be used to select the total amount of air that can be supplied to the purification unit via atmospheric air supply system 300.

The atmospheric air supply system 400 shown in FIG. 4 is similar to the atmospheric air supply system 300 shown in FIG. 3 but has the following differences. The atmospheric air supply system 400 may include a blower, an air amplifier, or other suitable air moving device. The controller 418 can control the speed at which the air movement device 424 moves atmospheric air through the atmospheric air supply system 400.

The air moving device 424 may be any blower capable of moving enough air mass per unit time, as may be required by a particular purge scenario. For example, the air mover 424 may be a squirrel cage fan, blade fan, turbo fan, or roots blower, but may be any suitable blower or fan. May also be used.

In operation, the atmospheric air supply system 400 is too high, i.e., of the atmospheric air source 404, to ensure that enough air is moved to the purification unit through the atmospheric air supply system 400 to effectively purify the waste. It may be useful for the purification system of the present invention operating at a pressure not lower than pressure. In another embodiment, the purge system operates even at a pressure sufficiently lower than the pressure of the atmospheric air source 404 to manually move sufficient air to purify the waste through the atmospheric air supply system 400 to the purge unit. For example, the air moving device 424 may be used to ensure a constant flow of atmospheric air despite any pressure fluctuations that may occur at the operating pressure of the purification unit. This pressure fluctuation may occur due to pressure fluctuations in the house exhaust system, which may be the driving force for drawing waste through the purification unit.

5A and 5B, the air amplifier 500 may be an air amplifier, but any means suitable for pushing or drawing air from the atmospheric air source 512 to the purification unit 502 may be used. have. As shown, the air amplifier 500 is cylindrical, but any suitable form may be used. The air amplifier 500 is shown to include an inlet that is open to the source of air provided by the atmospheric air source 512. The air amplifier 500 is also shown to include an outlet opening to the purification unit 502. The air amplifier 500 may be made of stainless steel, but any suitable material may be used.

The flow of air provided by the atmospheric air source 512 is indicated by a number of arrows 528 located inside the air amplifier 500 and directed in the direction from the atmospheric air source 512 to the purification unit 502. . The air amplifier 500 may be configured to draw in and / or push out air supplied by the atmospheric air source 512. As shown, air supplied by atmospheric air source 512 may be drawn through air amplifier 500 by CDA supply from CDA source 530. Although CDA is used in this embodiment of the atmospheric air supply system, the use of CDA is reduced because relatively small amounts of CDA are used to move more volume of air from the atmospheric air source 512.

A waste purification method 600 according to the present invention is provided in FIG. 6. The method begins at step 602 and proceeds to step 604 where a purge unit is provided configured to purify waste from the electronic device manufacturing process tool. This method includes a step 606 in which an atmospheric air supply system is provided that includes an air moving device and the atmospheric air supply system is configured to supply atmospheric air to the purifying unit. Steps 604 and 606 may be executed in any order. The method also includes a step 608 in which waste is oxidized by atmospheric air provided by an atmospheric air supply system. The method ends at step 610.

The foregoing description merely illustrates exemplary embodiments of the invention. Modifications of the above disclosed apparatus and methods which fall within the scope of the invention will be readily apparent to those skilled in the art.

Accordingly, while the invention has been described in connection with exemplary embodiments thereof, it should be understood that other embodiments may be included within the spirit and scope of the invention as defined in the following claims.

Claims (15)

As a purification system,
A purifying unit configured to purify the waste; And
An atmospheric air supply system including an air moving device;
The atmospheric air supply system is configured to supply atmospheric air to the purification unit for use as an oxidant,
Purification system.
The method of claim 1,
The air moving device comprises a blower,
Purification system.
The method of claim 1,
The atmospheric air supply system is configured to supply atmospheric air to the purification unit at a selected mass flow rate,
Purification system.
The method of claim 1,
The atmospheric air supply system is configured to supply atmospheric air to the purification unit at a selected pressure,
Purification system.
The method of claim 4, wherein
The atmospheric air supply system is configured to reduce pressure fluctuations of air supplied to the purifying unit,
Purification system.
The method of claim 1,
The purifying unit is configured to receive atmospheric air from the atmospheric air supply system through more than one air inlet,
The atmospheric air supply system is configured to flow atmospheric air through each air inlet at a selected mass flow rate,
The mass flow rate selected for each air inlet may be the same or different than the mass flow rate selected for any other air inlet,
Purification system.
The method of claim 1,
The purifying unit is configured to receive atmospheric air from the atmospheric air supply system through more than one air inlet,
Each air inlet comprises an orifice, the diameter of the orifice is selected to allow air to flow into the purge unit at a selected mass flow rate,
The mass flow rate selected for each air inlet may be the same or different than the mass flow rate selected for any other air inlet,
Purification system.
An atmospheric air supply system for supplying atmospheric air for use as an oxidant to a purification unit,
Air moving device; And
A manifold coupled to the air moving device and configured to supply air to the purifying unit;
The air mover and manifold are configured to receive air from a source of atmospheric air,
Atmospheric air supply system.
The method of claim 8,
The air moving device comprises a blower,
Atmospheric air supply system.
The method of claim 8,
The atmospheric air supply system is further configured to supply atmospheric air to the purification unit at a selected mass flow rate,
Atmospheric air supply system.
The method of claim 8,
The atmospheric air supply system is further configured to supply atmospheric air to the purification unit at a selected pressure,
Atmospheric air supply system.
The method of claim 11,
Further configured to reduce pressure fluctuations of atmospheric air supplied to the purifying unit,
Atmospheric air supply system.
The method of claim 8,
The atmospheric air supply system is further configured to supply atmospheric air to the purification unit through more than one air inlet,
Atmospheric air supply system.
The method of claim 13,
The atmospheric air supply system is configured to flow atmospheric air through each air inlet at a selected mass flow rate,
Wherein the atmospheric air supply system is configured to flow atmospheric air through each air inlet at a mass flow rate equal to or different from that of any other air inlet,
Atmospheric air supply system.
A method for purifying waste by using atmospheric air as an oxidant,
Providing a purifying unit configured to purify waste from the electronic device manufacturing process tool;
Providing an atmospheric air supply system comprising an air moving device, wherein the atmospheric air supply system is configured to provide atmospheric air to the purifying unit; And
And purifying the waste in the purification unit with atmospheric air supplied by the atmospheric air supply system.
How to clean up waste.

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